Cooling pump pumping speed adjusting device

Abstract

The invention belongs to the technical field of semiconductor vacuum equipment, and discloses a cold pump pumping speed adjusting device, which comprises a driving part, a driving part and a driving part, the driven part is used for rotating under the driving of the driving part; the connecting rod assembly is used for connecting the driven part and the blade assembly and transmitting the rotating motion of the driven part to the blade assembly; the blade assembly is used for enlarging or reducing the aperture surrounded by the blades under the action of the connecting rod assembly; and the bottom plate is installed on the upper portion of the cold pump air inlet hole in the cavity, the driving and driven part, the connecting rod assembly and the blade assembly are installed on the plate face of the bottom plate, and the bottom plate is provided with a bottom hole with the hole diameter larger than or equal to the maximum hole diameter formed by the blade assembly. According to the cold pump pumping speed adjusting device, the blade assembly is driven to rotate through the connecting rod assembly, so that the aperture size surrounded by the blade assembly is changed, manual operation is not needed, and the automation capacity of equipment is improved.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor vacuum equipment, in particular to a cold pump pumping speed regulating device. Background Art

[0002] At present, cold pumps are widely used in physical vapor deposition (PVD) equipment for manufacturing thin films. They use the principle of condensation and adopt cold pump cold plates to adsorb specific gases in the reaction chamber to improve the vacuum degree in the reaction chamber. The cold pump's exhaust capacity is adjusted by installing baffles at the cold pump valve inlet and in the reaction chamber to adjust the process pressure during coating and the gas in the chamber after coating.

[0003] The pumping speed of the cold pump is related to the air intake volume controlled by the height of the cold pump baffle. The design height of the cold pump baffle is determined by the chamber type. During the process, it is impossible to freely adjust the height to control the air intake volume and thus adjust the pumping speed of the cold pump.

[0004] Currently, the cold pump baffle cannot be adjusted during the process. If the height of the cold pump baffle is to be adjusted, the chamber needs to be filled to the atmospheric state, the chamber needs to be opened to remove the cold pump baffle, and the screw gap needs to be adjusted to achieve the function of adjusting the cold pump pumping speed. After completion, the chamber vacuum needs to be restored.

[0005] The current cold pump baffle adjustment method is relatively complicated. In view of this, a device is needed that can automatically adjust the cold pump pumping speed without damaging the chamber environment during the process. Summary of the invention

[0006]

Technical issues

[0007] In order to solve the problems mentioned above, the purpose of the present invention is to provide a device for automatically adjusting the air intake amount of the cold pump, which is arranged on the air intake hole of the cold pump in the vacuum chamber. By adjusting the aperture surrounded by the blade assembly through a servo drive device, the air intake amount can be automatically changed to adjust the cold pump pumping speed, and the function of stepless adjustment can be realized during the process.

[0008]

Technical solution

[0009] A cooling pump pumping speed regulating device, comprising:

[0010] The active part is used to output the rotational power;

[0011] A driven part, used to rotate under the drive of the driving part;

[0012] A connecting rod assembly, used to connect the driven part and the blade assembly, and transmit the rotational motion of the driven part to the blade assembly;

[0013] a blade assembly for expanding or reducing the aperture surrounded by the blade under the action of the linkage assembly;

[0014] The bottom plate is installed on the upper part of the cold pump air inlet hole inside the chamber, and the master and slave parts, the connecting rod assembly and the blade assembly are installed on the plate surface. The bottom plate has a bottom hole larger than or equal to the maximum aperture formed by the blade assembly.

[0015] Optionally, the active part includes a driving motor and a driving gear, and a transmission shaft of the driving motor is connected to the driving gear via a key.

[0016] Optionally, the driven part is a driven gear, and the driven gear is arranged concentrically with the bottom hole.

[0017] Optionally, the connecting rod assembly includes multiple connecting rods, one end of each connecting rod is rotatably connected to each point distributed in the circumferential direction of the driven gear; the blade assembly includes multiple blades, and the multiple blades are rotatably mounted on the bottom plate in a partially stacked manner along the circumferential direction of the bottom hole; the other end of each connecting rod is rotatably connected to each blade.

[0018] Optionally, a plurality of first threaded holes are provided in the circumferential direction of the driven gear, and a first through hole is provided at one end of the connecting rod. A first screw rod passes through the first through hole and is screwed onto the first threaded hole of the driven gear, thereby rotatably mounting one end of the connecting rod on the driven gear.

[0019] Optionally, a plurality of second threaded holes are arranged along the circumferential direction on the base plate, a second through hole is arranged at one end of the blade, a second screw rod passes through the second through hole and is screwed onto the second threaded hole of the base plate, thereby rotatably mounting one end of the blade on the base plate.

[0020] Optionally, a third threaded hole is further provided on the blade, and a third through hole is provided on the other end of the connecting rod. A third screw passes through the third through hole and is screwed onto the third threaded hole of the blade, so that the other end of the connecting rod is rotationally connected to the blade.

[0021] Optionally, the blade shape is crescent-shaped.

[0022] On the other hand, the present application provides a vacuum chamber, including: a wafer base, a cold pump, a cold pump valve and the cold pump pumping speed regulating device mentioned above.

[0023] Optionally, the valve of the cold pump is installed on the outer wall of the vacuum chamber, and the cold pump pumping speed regulating device is installed inside the vacuum chamber.

[0024]

Beneficial Effects

[0025] The cold pump pumping speed regulating device of the present application drives the blade assembly to rotate through the connecting rod assembly, thereby changing the aperture size around the blade assembly, without the need for manual operation, thereby improving the automation capability of the equipment.

[0026] The cold pump speed adjustment device of the present application does not need to fill the vacuum chamber to the atmospheric state before performing the adjustment operation, but can be adjusted without destroying the vacuum state of the vacuum chamber, thereby reducing waiting time, improving adjustment efficiency, and improving production efficiency.

[0027] The cold pump speed regulating device of the present application can be adjusted during the process, providing conditions for the research and development of wafer production processes and helping to improve process quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a top view of the cold pump speed regulating device of an embodiment of the present application.

[0029] Figure 2 It is a front view of the cold pump speed regulating device of an embodiment of the present application.

[0030] Figure 3 It is a schematic diagram of the adjustment changes of the suction holes by the cold pump suction speed adjustment device of an embodiment of the present application.

[0031] Figure 4 It is a schematic diagram of a vacuum chamber installed with a cold pump speed regulating device according to an embodiment of the present application.

[0032] [Brief Description of Reference Numerals]

[0033] 100: driving part 110: driving motor

[0034] 120: key 130: driving gear

[0035] 200: driven part 210: driven gear

[0036] 211: First threaded hole 300: Connecting rod assembly

[0037] 310: Connecting rod 320: First screw

[0038] 330: The third screw 400: The blade assembly

[0039] 410: blade 420: second screw

[0040] 430: Third threaded hole 500: Bottom plate

[0041] 510: Second threaded hole 520: Bottom hole

[0042] 700: Cold pump 710: Valve

[0043] 800: Base 900: Vacuum chamber DETAILED DESCRIPTION

[0044] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0045] Please refer to Figure 1 , Figure 2 The cold pump pumping speed regulating device of the present application includes an active part 100, which is used to output rotational power; a driven part 200, which is used to rotate under the drive of the active part 100; a connecting rod assembly 300, which is used to connect the driven part 200 and the blade assembly 400, and transmit the rotational motion of the driven part 200 to the blade assembly; the blade assembly 400, which is used to expand or reduce the aperture surrounded by the blade under the action of the connecting rod assembly 300; a bottom plate 500, which is installed at the valve inlet of the cold pump and has a bottom hole 520 that is greater than or equal to the maximum aperture formed by the blade assembly.

[0046] The bottom plate 500 is installed on the upper part of the cold pump air inlet of the cold pump, and the active part, the driven part 200, the connecting rod assembly 300 and the blade assembly 400 are installed on the plate surface. Specifically, it can be installed on the upper end of the bottom plate 500. A bottom hole 520 penetrating the plate surface is provided on the plate surface, and the size of the air extraction hole is changed by controlling the contraction or expansion of the aperture around the blade assembly. More specifically, no matter how large the aperture formed by the blade assembly is, it is smaller than the aperture of the bottom hole, so the size of the air extraction hole is determined by the aperture formed by the blade assembly.

[0047] The active part 100 may include a driving motor 110, and a transmission shaft of the driving motor 110 is connected to a driving gear 130 via a key 120. The key 120 may be a flat key, a spline, etc., which are not limited here. Under the drive of the driving motor 110, the driving gear may realize clockwise and counterclockwise rotation.

[0048] The driven part 200 may be a driven gear 210 , which is meshed with the driving gear 130 and can achieve a rotation function under the drive of the driving gear 130 . The driven gear 210 may be arranged concentrically with the bottom hole 520 .

[0049] It should be noted that the above active part and driven part are only exemplary, and the present application does not limit the transmission structure. For example, the present application does not exclude the use of chain drive or belt drive to transmit the rotational motion. For example, the active part 100 and the driven part can both be sprockets, connected by chain drive. The sprocket can be driven to rotate by a driving motor 110, and the sprocket and the driven part 200 can be driven to rotate by a chain drive.

[0050] The connecting rod assembly 300 includes a plurality of connecting rods 310, one end of each connecting rod 310 is connected to the driven gear 210, specifically, it can be connected to the side of the driven gear 210. A first threaded hole 211 can be provided on the driven gear 210, such as Figure 1 As shown in , a plurality of first threaded holes 211 are provided in the circumferential direction of the driven gear 210. A first through hole is provided at one end of the connecting rod 310, and a first screw rod 320 of the connecting rod assembly passes through the first through hole at the end of the connecting rod 310 and is screwed into the first threaded hole 211 of the driven gear 210, so that one end of the connecting rod 310 is rotatably mounted on the driven gear 210. Thus, the other end of the connecting rod 310 can rotate around the first threaded hole 211.

[0051] The blade assembly 400 includes a plurality of blades 410, and the plurality of blades 410 are evenly arranged along the circumferential direction. One end of the blade 410 is rotatably connected to the bottom plate 500. Specifically, the bottom plate 500 may be provided with a second threaded hole 510, such as Figure 1 As shown, a plurality of second threaded holes 510 are provided along the circumferential direction on the bottom plate 500. A second through hole is provided at one end of the blade 410, and a second screw rod 420 passes through the second through hole of the blade 410 and is screwed into the second threaded hole 510 of the bottom plate, so that one end of the blade is rotatably mounted on the bottom plate 500. Thus, the other end of the blade can rotate around the second threaded hole 510.

[0052] The blades 410 can be multiple pieces installed in a partially stacked manner in the circumferential direction. For example, one end of the first blade 410 can be rotatably mounted on the base plate 500, and the second blade can be rotatably mounted on the base plate 500, and is stacked on the first blade in a manner that partially overlaps with the first blade area. The third blade can be rotatably mounted on the base plate 500, and is stacked on the second blade in a manner that partially overlaps with the second blade area. And so on, until all blades are installed. After all blades 410 are stacked and installed, the aperture around them changes with the rotation of the blades. Since the diameter of the bottom hole of the base plate 500 is larger than the maximum aperture formed by the blade assembly, the size of the air extraction hole for the cold pump is determined by the blade assembly. When all blades rotate and shrink to the smallest aperture, this is the minimum aperture for the cold pump to extract air. When all blades rotate and expand to the largest aperture, this is the maximum aperture for the cold pump to extract air.

[0053] The blade shape may be a crescent shape, but is not limited to a crescent shape, and may be various common shapes, such as a strip shape, an ellipse shape, a sphere shape, a square shape, etc. The different blade shapes have an impact on the shape and size of the aperture, for example, the minimum aperture formed by some blades may be a completely closed air extraction hole.

[0054] A third threaded hole 430 is also provided on the blade 410, and a third through hole is provided at the other end of the connecting rod 310. The third screw rod 330 passes through the third through hole of the connecting rod 310 and is screwed on the third threaded hole 430 of the blade 410, so that the other end of the connecting rod 310 is rotatably connected to the blade 410.

[0055] Since one end of the connecting rod 310 is rotatably connected to the driven gear 210, when the driven gear rotates, it drives one end of the connecting rod 310 to rotate together, so that the other end of the connecting rod pushes the blade 410 rotatably connected thereto to rotate.

[0056] like Figure 3 As shown in the left side view, the driving gear 110 rotates clockwise, causing the driven gear 210 to rotate counterclockwise. Figure 3 As shown in the middle right view, the counterclockwise rotation of the driven gear 210 changes the state of the connecting rod, and the other end of the connecting rod pushes the blades 410 to rotate inward. Since all the blades are pushed inward by the connecting rod at the same time, the aperture surrounded by all the blades is reduced.

[0057] If the driving gear rotates counterclockwise, the driven gear 210 rotates clockwise. The clockwise rotation of the driven gear 210 changes the state of the connecting rod, and the other end of the connecting rod pulls the blades 410 to rotate outward. Since all the blades are pulled outward by the connecting rod at the same time, the aperture surrounded by all the blades is enlarged.

[0058] The present application also provides a vacuum chamber 900, such as Figure 4 As shown, it includes a base 800 for carrying wafers, a cold pump 700, and the above-mentioned cold pump pumping speed regulating device. The cold pump 700 is installed outside the vacuum chamber 900, the valve 710 of the cold pump 700 is installed on the outer wall of the vacuum chamber, the bottom plate 500 is installed above the valve 710, and the cold pump pumping speed regulating device is installed inside the vacuum chamber.

[0059] Of course, the present invention may have many other embodiments. Without departing from the spirit and essence of the present invention, those skilled in the art may make various corresponding changes and deformations according to the present invention, but these corresponding changes and deformations shall fall within the protection scope of the claims of the present invention.

Claims

1. A cooling pump pumping speed regulating device, characterized in that: include: The active part is used to output the rotational power; A driven part, used to rotate under the drive of the driving part; A connecting rod assembly, used to connect the driven part and the blade assembly, and transmit the rotational motion of the driven part to the blade assembly; a blade assembly for expanding or reducing the aperture surrounded by the blade under the action of the linkage assembly; The bottom plate is installed on the upper part of the cold pump air inlet hole inside the chamber, and the master and slave parts, the connecting rod assembly and the blade assembly are installed on the plate surface. The bottom plate has a bottom hole larger than or equal to the maximum aperture formed by the blade assembly.

2. The cold pump pumping speed regulating device according to claim 1, characterized in that: The active part comprises a driving motor and a driving gear, and a transmission shaft of the driving motor is connected to the driving gear through a key.

3. The cold pump pumping speed regulating device according to claim 1, characterized in that: The driven part is a driven gear, and the driven gear is arranged concentrically with the bottom hole.

4. The cold pump pumping speed regulating device according to claim 1, characterized in that: The connecting rod assembly includes multiple connecting rods, one end of each connecting rod is rotatably connected to each point distributed in the circumferential direction of the driven gear; the blade assembly includes multiple blades, and the multiple blades are rotatably mounted on the bottom plate in a partially stacked manner along the circumferential direction of the bottom hole; the other end of each connecting rod is rotatably connected to each blade.

5. The cold pump pumping speed regulating device according to claim 4, characterized in that: A plurality of first threaded holes are arranged in the circumferential direction of the driven gear, and a first through hole is arranged at one end of the connecting rod. A first screw rod passes through the first through hole and is screwed on the first threaded hole of the driven gear, so that one end of the connecting rod is rotatably mounted on the driven gear.

6. The cold pump pumping speed regulating device according to claim 5, characterized in that: A plurality of second threaded holes are arranged on the bottom plate along the circumferential direction, and a second through hole is arranged at one end of the blade. A second screw rod passes through the second through hole and is screwed on the second threaded hole of the bottom plate, so that one end of the blade is rotatably mounted on the bottom plate.

7. The cold pump pumping speed regulating device according to claim 6, characterized in that: A third threaded hole is also provided on the blade, and a third through hole is provided at the other end of the connecting rod. A third screw passes through the third through hole and is screwed onto the third threaded hole of the blade, so that the other end of the connecting rod is rotationally connected to the blade.

8. The vacuum chamber according to claim 1, characterized in that: The blade shape is crescent-shaped.

9. A vacuum chamber, characterized in that: include: A wafer base, a cold pump, a cold pump valve, and a cold pump speed regulating device as claimed in any one of claims 1 to 8.

10. The vacuum chamber according to claim 9, characterized in that: The valve of the cold pump is installed on the outer wall of the vacuum chamber, and the cold pump pumping speed regulating device is installed inside the vacuum chamber.

Images