Low-temperature low-air-pressure controllable environment simulation device

Abstract

The invention provides a low-temperature and low-pressure controllable environment simulation device, which comprises a simulation cabin, a temperature control unit and a pressure control unit, and is characterized in that the simulation cabin is internally provided with a test space; the temperature control unit is communicated with the test space and is used for creating a temperature condition for the test space; the pressure control unit is communicated with the test space and used for creating a pressure condition for the test space. Through the integrated design, partial or all components in the pressure control unit and the temperature control unit are operated or closed, so that the test environment is flexibly controlled; five different test modes of a normal-pressure test environment, a normal-temperature and low-pressure test environment, a low-temperature test environment, a low-temperature and low-pressure test environment and a low-pressure test environment can be realized, simulation of various environmental conditions is realized, the number of equipment required by the test is reduced, the equipment cost and the occupied area are reduced, and the test efficiency is improved. And the laboratory cost is reduced, the site space requirement is saved, and the test efficiency is improved.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor testing technology, and in particular to a low-temperature and low-pressure controllable environment simulation device. Background Art

[0002] In the prior art, some tests need to be conducted under five different environmental conditions: normal pressure, normal temperature and low pressure, low temperature, low temperature and low pressure, and low pressure. In order to meet these conditions, it is usually necessary to prepare special test equipment for each environment. These equipment are not only expensive and occupy a large area, but also need to be equipped with complex control systems to ensure the stability of environmental conditions. Therefore, preparing multiple equipment at the same time significantly increases the overall cost and site requirements of the laboratory.

[0003] In addition, the maintenance and operation of the equipment are complicated, and the switching between multiple devices increases the time cost during the experiment and reduces the overall efficiency. The prior art lacks a universal simulation device that can integrate multiple environmental conditions to meet the needs of complex environmental testing more economically and efficiently. Summary of the invention

[0004] In view of the problems in the prior art that multiple devices are needed to simulate different environmental conditions, resulting in high cost, large space, complex operation and the like, the main purpose of the present invention is to provide a low-temperature and low-pressure controllable environment simulation device to achieve the simulation of multiple environmental conditions, reduce equipment cost and floor space, and improve test efficiency.

[0005] To achieve the above-mentioned purpose, the present disclosure provides a low-temperature and low-pressure controllable environment simulation device, including: a simulation cabin 1, a temperature control unit 2 and a pressure control unit 3, wherein: the simulation cabin 1 has a test space 4; the temperature control unit 2 is connected to the test space 4, and is used to create temperature conditions for the test space 4; the pressure control unit 3 is connected to the test space 4, and is used to create pressure conditions for the test space 4.

[0006] In the above scheme, the simulation cabin 1 includes a main cabin body 5, a loading platform 6, a hatch cover 7 and a sealing member 8, wherein: the loading platform 6 is located at the bottom of the main cabin body 5, the loading platform 6 and the main cabin body 5 are detachably connected, the hatch cover 7 and the main cabin body 5 are detachably connected, and the test space 4 is formed between the hatch cover 7, the main cabin body 5 and the loading platform 6; the sealing member 8 is arranged between the hatch cover 7 and the main cabin body 5, so that the hatch cover 7 and the main cabin body 5 are sealed.

[0007] In the above scheme, the hatch cover 7 is provided with a defrost window 9 and a raised threaded hole 10, wherein: the defrost window 9 is located in the center of the hatch cover 7 for real-time monitoring of the test object; the raised threaded hole 10 is located on the left and right sides of the defrost window 9 for further adapting and fixing different test samples.

[0008] In the above solution, the sealing member 8 is a sealing ring, and a sealing ring installation groove is provided at the connection between the main cabin body 5 and the hatch cover 7, and the sealing ring is installed in the sealing ring installation groove. Optionally, the depth of the sealing ring installation groove is less than the diameter of the sealing ring itself.

[0009] In the above scheme, the low-temperature and low-pressure controllable environment simulation device also includes a water cooler 20 and multiple sets of probes 24, wherein: the water cooler 20 is arranged on a pipeline connected to the test space 4, and is used to continuously adjust the temperature of the main cabin 5 to prevent overheating or temperature fluctuations; the multiple sets of probes 24 are arranged at the bottom of the main cabin 5 for electrical measurement.

[0010] In the above solution, the low-temperature and low-pressure controllable environment simulation device also includes a temperature sensor 25 , which is arranged inside the test space 4 and is used to sense temperature data in the test space 4 .

[0011] In the above scheme, the temperature control unit 2 includes a temperature control system 21, a refrigeration system 22 and a liquid nitrogen converter 23, all of which are arranged outside the test space 4, wherein: one end of the temperature control system 21 is connected to the test space 4, and the other end is connected to the refrigeration system 22; the liquid nitrogen converter 23 is connected to the test space 4.

[0012] In the above scheme, the pressure control unit 3 includes a first valve 11, a second valve 12, a third valve 13, a fourth valve 14, a fifth valve 15, a first vacuum pump 16 and a second vacuum pump 17, all of which are arranged outside the simulation cabin 1, wherein: the first end of the first valve 11, the first end of the second valve 12, the first end of the third valve 13, and the first end of the fifth valve 15 are connected, and are also connected to the test space 4; the second end of the fifth valve 15 is connected to the first end of the first vacuum pump 16, and the first end of the first vacuum pump 16 is simultaneously connected to the first end of the second vacuum pump 17 through the fourth valve 14.

[0013] In the above scheme, the low-temperature and low-pressure controllable environment simulation device also includes a flow sensor 18 and a pressure sensor 19, wherein the flow sensor 18 is connected to the second end of the first valve 11 for measuring the fluid flow rate; the pressure sensor 19 is connected to the second end of the second valve 12 for sensing the pressure data in the test space 4.

[0014] It can be seen from the above technical solutions that the low-temperature and low-pressure controllable environment simulation device provided by the present disclosure has at least the following beneficial effects compared with the prior art:

[0015] 1. The low-temperature and low-pressure controllable environment simulation device proposed in the present disclosure, through an integrated design, operates or shuts down some or all of the components in the pressure control unit 3 and the temperature control unit 2, flexibly controls the test environment, and can realize five different test modes: normal pressure test environment, normal temperature and low pressure test environment, low temperature test environment, low temperature and low pressure test environment, and low pressure test environment. Through the coordinated control of the pressure control unit 3 and the temperature control unit 2, it can be applied to these five test conditions at the same time on one device, realizing the simulation of multiple environmental conditions, reducing the number of equipment required for the test, reducing equipment costs and floor space, reducing laboratory costs and saving site space requirements, and improving test efficiency.

[0016] 2. The low-temperature and low-pressure controllable environment simulation device proposed in the present invention has a detachable connection between the loading platform 6 and the bottom of the main cabin 5, so that various samples can be tested by changing the shape of the loading platform 6; the hatch 7 and the main cabin 5 are detachably connected, so that the test equipment can be easily placed in the test space 4, and then the hatch 7 and the main cabin 5 can be closed, which is easy to use and has strong adaptability.

[0017] 3. The low-temperature and low-pressure controllable environment simulation device proposed in the present invention can achieve sealing after the hatch 7 is connected to the main cabin body 5. The seal 8 can ensure the sealing effect by virtue of its own deformation, and the sealing effect in the test space 4 is better and safer.

[0018] 4. The low-temperature and low-pressure controllable environment simulation device proposed in the present disclosure and the setting of the water cooler 20 can prevent the pipeline temperature from being too high or too low, thereby ensuring the operating safety of the low-temperature and low-pressure controllable environment simulation device provided in the embodiment of the present disclosure.

[0019] 5. The low-temperature and low-pressure controllable environment simulation device proposed in the present disclosure quantifies the temperature and pressure in the test space 4 through the temperature sensor 25 and the pressure sensor 19, so that the temperature and pressure in the test space 4 of the temperature and pressure environment simulation device provided in the embodiment of the present disclosure can be better controlled and quantified. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The above contents and other objects, features and advantages of the present disclosure will become more apparent through the following description of the embodiments of the present disclosure with reference to the accompanying drawings, in which:

[0021] Figure 1 It is a structural schematic diagram of a low-temperature and low-pressure controllable environment simulation device according to an embodiment of the present disclosure. DETAILED DESCRIPTION

[0022] Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. However, it should be understood that these descriptions are exemplary only and are not intended to limit the scope of the present disclosure. In the following detailed description, for ease of explanation, many specific details are set forth to provide a comprehensive understanding of the embodiments of the present disclosure. However, it is apparent that one or more embodiments may also be implemented without these specific details. In addition, in the following description, descriptions of known structures and technologies are omitted to avoid unnecessary confusion of the concepts of the present disclosure.

[0023] The terms used herein are only for describing specific embodiments and are not intended to limit the present disclosure. The terms "comprise", "include", etc. used herein indicate the existence of the features, steps, operations and / or components, but do not exclude the existence or addition of one or more other features, steps, operations or components.

[0024] All terms (including technical and scientific terms) used herein have the meanings commonly understood by those skilled in the art unless otherwise defined. It should be noted that the terms used herein should be interpreted as having a meaning consistent with the context of this specification and should not be interpreted in an idealized or overly rigid manner.

[0025] In addition, the technical features involved in the different embodiments of the present application described below can be combined with each other as long as they do not conflict with each other.

[0026] like Figure 1 As shown, the low temperature and low pressure controllable environment simulation device provided by the embodiment of the present disclosure includes: a simulation cabin 1, a temperature control unit 2 and a pressure control unit 3. The simulation cabin 1 has a test space 4; the temperature control unit 2 is connected to the test space 4 to create temperature conditions for the test space 4; the pressure control unit 3 is connected to the test space 4 to create pressure conditions for the test space 4.

[0027] In the low-temperature and low-pressure controllable environment simulation device provided in the embodiment of the present disclosure, the simulation cabin 1 includes a main cabin body 5, a loading platform 6, a hatch cover 7 and a sealing member 8. Among them, the loading platform 6 is located at the bottom of the main cabin body 5, the loading platform 6 and the main cabin body 5 are detachably connected, the hatch cover 7 and the main cabin body 5 are detachably connected, and a test space 4 is formed between the hatch cover 7, the main cabin body 5 and the loading platform 6. In this case, since the loading platform 6 is detachably connected to the bottom of the main cabin body 5, it is possible to test a variety of samples by changing the shape of the loading platform 6; the hatch cover 7 and the main cabin body 5 are detachably connected, and it is very convenient to put the test equipment into the test space 4, and then close the hatch cover 7 and the main cabin body 5, which is easy to use and has strong adaptability.

[0028] In order to further improve the versatility of the low-temperature and low-pressure controllable environment simulation device, the raised threaded holes on the left and right sides of the hatch cover 7 increase the flexibility of installing the tested samples. That is, in the low-temperature and low-pressure controllable environment simulation device provided by the present disclosure, the hatch cover 7 is provided with a defrost window 9 and a raised threaded hole 10, wherein: the defrost window 9 is located in the center of the hatch cover 7, for real-time monitoring of the test object; the raised threaded holes 10 are located on the left and right sides of the defrost window 9, for further adapting and fixing different test samples.

[0029] In the low-temperature and low-pressure controllable environment simulation device provided in the embodiment of the present disclosure, the seal 8 is arranged between the hatch cover 7 and the main cabin body 5, so that the hatch cover 7 and the main cabin body 5 are sealed and connected. Optionally, the seal 8 is a sealing ring, and a sealing ring installation groove is provided at the connection between the main cabin body 5 and the hatch cover 7, and the sealing ring is installed in the sealing ring installation groove. The depth of the sealing ring installation groove is less than the diameter of the sealing ring itself. In this case, the seal 8 can achieve sealing after the hatch cover 7 is connected to the main cabin body 5, and the seal 8 can ensure the sealing effect by virtue of its own deformation, and the sealing effect in the test space 4 is better and safer.

[0030] The low-temperature and low-pressure controllable environment simulation device provided by the embodiment of the present disclosure also includes a water cooler 20 and multiple sets of probes 24. The water cooler 20 is arranged on the pipeline connected to the test space 4, and is used to continuously adjust the temperature of the main cabin 5 to prevent overheating or temperature fluctuations; the multiple sets of probes 24 are arranged at the bottom of the main cabin 5 for electrical measurement. In this case, the setting of the water cooler 20 can prevent the pipeline temperature from being too high or too low, and ensure the operating safety of the low-temperature and low-pressure controllable environment simulation device provided by the embodiment of the present disclosure.

[0031] The low-temperature and low-pressure controllable environment simulation device provided in the embodiment of the present disclosure further includes a temperature sensor 25 , which is arranged inside the test space 4 and is used to sense temperature data in the test space 4 .

[0032] In the low-temperature and low-pressure controllable environment simulation device provided in the embodiment of the present disclosure, the temperature control unit 2 includes a temperature control system 21, a refrigeration system 22 and a liquid nitrogen converter 23, all of which are arranged outside the test space 4. Among them, one end of the temperature control system 21 is connected to the test space 4, and the other end is connected to the refrigeration system 22; the liquid nitrogen converter 23 is connected to the test space 4. In this case, different temperature control results in the test space 4 can be achieved by operating or shutting down some or all components of the temperature control system 21, the refrigeration system 22, and the liquid nitrogen converter 23.

[0033] In the low-temperature and low-pressure controllable environment simulation device provided in the embodiment of the present disclosure, the pressure control unit 3 includes a first valve 11, a second valve 12, a third valve 13, a fourth valve 14, a fifth valve 15, a first vacuum pump 16 and a second vacuum pump 17, and the first valve 11, the second valve 12, the third valve 13, the fourth valve 14, the fifth valve 15, the first vacuum pump 16 and the second vacuum pump 17 are all arranged outside the simulation cabin 1.

[0034] Among them, the first end of the first valve 11, the first end of the second valve 12, the first end of the third valve 13, and the first end of the fifth valve 15 are connected, and are simultaneously connected to the test space 4; the second end of the fifth valve 15 is connected to the first end of the first vacuum pump 16, and the first end of the first vacuum pump 16 is simultaneously connected to the first end of the second vacuum pump 17 through the fourth valve 14, and the fourth valve 14 is connected between the first vacuum pump 16 and the second vacuum pump 17. In addition, the second valve 12, the first vacuum pump 16, and the second vacuum pump 17 are connected to each other, and their connection states are regulated by the third valve 13 and the fourth valve 14. In this case, different pressure control results in the test space 4 can be achieved by operating or closing some or all of the components in the third valve 13, the fourth valve 14, and the fifth valve 15.

[0035] The low-temperature and low-pressure controllable environment simulation device provided in the embodiment of the present disclosure also includes a flow sensor 18 and a pressure sensor 19, wherein the flow sensor 18 and the pressure sensor 19 are both arranged between the main cabin 5 and the pressure control unit 3, the flow sensor 18 is connected to the second end of the first valve 11, and is used to measure the fluid flow rate; the pressure sensor 19 is connected to the second end of the second valve 12, and is used to sense the pressure data in the test space 4.

[0036] In this case, the temperature and pressure in the test space 4 can be quantified through the temperature sensor 25 and the pressure sensor 19, so that the temperature and pressure in the test space 4 of the temperature and pressure environment simulation device provided by the embodiment of the present disclosure can be better controlled and quantified.

[0037] It should be noted that in order to ensure precise temperature control, the low-temperature and low-pressure controllable environment simulation device provided in the embodiment of the present disclosure needs to ensure good heat transfer and temperature measurement, and therefore does not include an insulation layer.

[0038] The low-temperature and low-pressure controllable environment simulation device provided by the embodiment of the present disclosure includes a simulation cabin 1, a temperature control unit 2, and a pressure control unit 3. By operating or shutting down some or all components in the pressure control unit 3, and / or operating or shutting down some or all components in the temperature control unit 2, the temperature and pressure environment simulation device can be operated in five test modes, namely, normal pressure, normal temperature and low pressure, low temperature, low temperature and low pressure, and low pressure. The low-temperature and low-pressure controllable environment simulation device can achieve that one device can be applied to five test conditions, namely, normal pressure, normal temperature and low pressure, low temperature, low temperature and low pressure, and low pressure, thereby saving test costs and the space required.

[0039] The low-temperature and low-pressure controllable environment simulation device provided in the embodiment of the present disclosure can flexibly control the test environment by running or shutting down some or all of the components in the pressure control unit 3 and the temperature control unit 2 to achieve five different test modes: normal pressure test environment, normal temperature and low pressure test environment, low temperature test environment, low temperature and low pressure test environment, and low pressure test environment. The low-temperature and low-pressure controllable environment simulation device can be applied to these five test conditions on a single device through the coordinated control of the pressure control unit 3 and the temperature control unit 2, thereby reducing the number of equipment required for the test, reducing laboratory costs and saving site space requirements. The implementation methods of these five test modes are described in detail below in conjunction with specific embodiments:

[0040] .Normal pressure test environment: In the normal pressure test environment, it is necessary to maintain normal atmospheric pressure and normal temperature. The specific operations are as follows:

[0041] Temperature control unit 2: Turn off all refrigeration and heating components to keep the simulation cabin at normal temperature;

[0042] Pressure control unit 3: Turn off the molecular pump or other vacuum device to maintain the same normal pressure environment in the cabin as outside.

[0043] By stopping temperature control and pressure control, the simulation chamber can naturally maintain normal pressure and temperature, which is suitable for testing items with normal environmental requirements.

[0044] .Normal temperature and low pressure test environment: In the normal temperature and low pressure environment, maintain normal temperature but reduce the pressure in the cabin. The specific operations are as follows:

[0045] Temperature control unit 2: Turn off the refrigeration and heating components to maintain normal temperature in the cabin.

[0046] Pressure control unit 3: Start the molecular pump or vacuum pump to extract the air in the cabin and reduce the air pressure to the required low pressure level (such as simulating a high altitude environment).

[0047] This operation mode is suitable for testing the impact of low pressure conditions on equipment or materials at room temperature.

[0048] .Low temperature test environment: In the low temperature test environment, the temperature in the cabin needs to be lowered to the set low temperature value and the normal pressure is maintained. The specific operations are as follows:

[0049] Temperature control unit 2: Start the liquid nitrogen cooling system to quickly lower the temperature in the cabin to a set value, such as -40°C or lower, through the flow of liquid nitrogen.

[0050] Pressure control unit 3: Turn off the molecular pump to maintain normal pressure in the cabin.

[0051] This mode is mainly used to simulate tests in polar or other extremely low temperature environments to test the cold resistance of items.

[0052] .Low temperature and low pressure test environment: In this mode, the air pressure needs to be reduced while the temperature is low, simulating an extremely cold environment at high altitudes. The specific operations are as follows:

[0053] Temperature control unit 2: Start the liquid nitrogen cooling system to reduce the temperature in the cabin to the required low temperature state.

[0054] Pressure control unit 3: Start the molecular pump to extract air and reduce the cabin pressure to the set low pressure level.

[0055] This mode can be used to simulate working environments at extremely high altitudes and low temperatures to test the performance of materials or equipment.

[0056] .Low pressure test environment: In the low pressure test environment, the air pressure in the cabin is mainly reduced without adjusting the temperature. The specific operations are as follows:

[0057] Temperature control unit 2: Turn off the refrigeration and heating systems to maintain normal temperature in the cabin.

[0058] Pressure control unit 3: Start the molecular pump to reduce the air pressure in the cabin to a predetermined low pressure state.

[0059] This mode is suitable for testing the performance of the device in a high altitude and low pressure environment.

[0060] Through the above flexible control of the temperature control unit 2 and the pressure control unit 3, the present invention can realize these five test modes in one device, effectively reducing the cost, floor space and operation complexity of the laboratory, and greatly improving the testing efficiency and versatility of the equipment.

[0061] It will be appreciated by those skilled in the art that the features described in the various embodiments of the present disclosure may be combined and / or combined in a variety of ways, even if such combinations or combinations are not explicitly described in the present disclosure. In particular, without departing from the spirit and teachings of the present disclosure, the features described in the various embodiments of the present disclosure may be combined and / or combined in a variety of ways. All of these combinations and / or combinations fall within the scope of the present disclosure.

[0062] The embodiments of the present disclosure are described above. However, these embodiments are only for illustrative purposes and are not intended to limit the scope of the present disclosure. Although the embodiments are described above, this does not mean that the measures in the various embodiments cannot be used in combination to advantage. Without departing from the scope of the present disclosure, those skilled in the art may make a variety of substitutions and modifications, which should all fall within the scope of the present disclosure.

Claims

1. A low temperature and low pressure controllable environment simulation device, characterized in that: include: A simulation chamber (1), a temperature control unit (2) and a pressure control unit (3), wherein: The simulation cabin (1) has a test space (4); The temperature control unit (2) is in communication with the test space (4) and is used to create temperature conditions for the test space (4); The pressure control unit (3) is connected to the test space (4) and is used to create pressure conditions for the test space (4).

2. The low temperature and low pressure controllable environment simulation device according to claim 1, characterized in that: The simulation cabin (1) comprises a main cabin body (5), a loading platform (6), a cabin cover (7) and a sealing member (8), wherein: The loading platform (6) is located at the bottom of the main cabin (5), the loading platform (6) and the main cabin (5) are detachably connected, the hatch (7) and the main cabin (5) are detachably connected, and the test space (4) is formed between the hatch (7), the main cabin (5) and the loading platform (6); The sealing member (8) is arranged between the hatch cover (7) and the main cabin body (5), so that the hatch cover (7) and the main cabin body (5) are sealed and connected.

3. The low temperature and low pressure controllable environment simulation device according to claim 2, characterized in that: The hatch cover (7) is provided with a defrosting window (9) and a raised threaded hole (10), wherein: The defrost window (9) is located at the center of the hatch cover (7) and is used to monitor the test object in real time; The raised threaded holes (10) are located on the left and right sides of the defrost window (9) and are used to further adapt and fix different test samples.

4. The low temperature and low pressure controllable environment simulation device according to claim 2, characterized in that: The sealing member (8) is a sealing ring, and a sealing ring installation groove is provided at the connection between the main cabin body (5) and the cabin cover (7), and the sealing ring is installed in the sealing ring installation groove.

5. The low temperature and low pressure controllable environment simulation device according to claim 4, characterized in that: The depth of the sealing ring installation groove is smaller than the diameter of the sealing ring itself.

6. The low temperature and low pressure controllable environment simulation device according to claim 2, characterized in that: The low-temperature and low-pressure controllable environment simulation device further comprises a water cooler (20) and multiple sets of probes (24), wherein: The water cooler (20) is arranged on a pipeline connected to the test space (4) and is used to continuously adjust the temperature of the main cabin (5) to prevent overheating or temperature fluctuations; The multiple groups of probes (24) are arranged at the bottom of the main cabin (5) and are used for electrical measurement.

7. The low temperature and low pressure controllable environment simulation device according to claim 2 or 6, characterized in that: The low-temperature and low-pressure controllable environment simulation device also includes a temperature sensor (25), which is arranged inside the test space (4) and is used to sense temperature data inside the test space (4).

8. The low temperature and low pressure controllable environment simulation device according to claim 1, characterized in that: The temperature control unit (2) comprises a temperature control system (21), a refrigeration system (22) and a liquid nitrogen converter (23), all of which are arranged outside the test space (4), wherein: One end of the temperature control system (21) is connected to the test space (4), and the other end is connected to the refrigeration system (22); The liquid nitrogen converter (23) is in communication with the test space (4).

9. The low temperature and low pressure controllable environment simulation device according to claim 1, characterized in that: The pressure control unit (3) comprises a first valve (11), a second valve (12), a third valve (13), a fourth valve (14), a fifth valve (15), a first vacuum pump (16) and a second vacuum pump (17), all of which are arranged outside the simulation cabin (1), wherein: The first end of the first valve (11), the first end of the second valve (12), the first end of the third valve (13), and the first end of the fifth valve (15) are in communication with each other and are also in communication with the test space (4); The second end of the fifth valve (15) is in communication with the first end of the first vacuum pump (16), and the first end of the first vacuum pump (16) is simultaneously in communication with the first end of the second vacuum pump (17) via the fourth valve (14).

10. The low temperature and low pressure controllable environment simulation device according to claim 9, characterized in that: The low-temperature and low-pressure controllable environment simulation device further comprises a flow sensor (18) and a pressure sensor (19), wherein: The flow sensor (18) is connected to the second end of the first valve (11) and is used to measure the flow rate of the fluid; The pressure sensor (19) is in communication with the second end of the second valve (12) and is used to sense pressure data in the test space (4).

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