Low-angle-dependence impact inertia piezoelectric actuator and driving method thereof

Abstract

The invention relates to a low-angle-dependence impact inertia piezoelectric actuator and a driving method thereof, and belongs to the field of precision machinery. The driver comprises an L-shaped plate, an electromagnet, a flexible hinge mechanism, a bottom plate, a piezoelectric stack, a fine adjustment platform, a fixing block, a guide rail and a sliding block. The guide rail and the fine adjustment platform are installed on the bottom plate and are vertically fixed to the table top through the side plates. The flexible hinge mechanism is fixed to the sliding block and makes elastic contact with the fixing blocks on the two sides. The flexible hinge mechanism achieves the displacement function through a piezoelectric stack and an electromagnet. The device has the advantages of being simple in structure, small in size, easy to machine, assemble and control, capable of being used at multiple angles and capable of being used in the fields of precision instruments, precision machining and the like.

Description

Technical Field

[0001] The present invention relates to the field of precision machinery, and in particular to a low-angle-dependent impact inertia piezoelectric driver and a driving method thereof. The piezoelectric drive improves the disadvantage of high angle dependence of electromagnetic drives of the same size. The device can be used in the fields of precision instruments, precision machining, etc. Background Art

[0002] Piezoelectric actuators are devices that use the inverse piezoelectric effect of piezoelectric materials to convert electrical energy into mechanical energy or mechanical motion. With the development of science and technology, the demand for piezoelectric actuators, such precision machinery, is increasing in the fields of precision instruments and precision machining.

[0003] With the improvement of modern needs, these precision mechanical equipment often need to be used in different types of occasions, which has a certain dependence on the tilt angle of the equipment. In the existing application fields of precision machining and assembly, micro-nano operation, etc., most stepping piezoelectric drive devices can obtain a certain stroke by accumulating stepping displacements, but when located on an inclined working plane, the displacement is often too large or too small, which greatly reduces the accuracy. Although some inchworm-type piezoelectric actuators have high accuracy, their structure and assembly are quite complex, which limits their practical application. Therefore, it is very necessary to have an innovative design of a piezoelectric actuator with low angle dependence, stability, simple structure, and easy control. Summary of the invention

[0004] The purpose of the present invention is to provide a low angle-dependent impact inertia piezoelectric actuator to solve the above problems. The present invention has the advantages of low angle dependence, simple structure, stability, easy processing and control, and can be used in the fields of precision processing and assembly, micro-nano operation, etc.

[0005] The above-mentioned object of the present invention is achieved by the following technical solutions:

[0006] A low-angle-dependent impact inertia piezoelectric actuator, characterized in that it comprises an L-shaped plate (1), an electromagnet (2), a flexible hinge mechanism (3), a base plate (4), a piezoelectric stack (5), a fine-tuning platform (6), a fixing block (7), a guide rail (8), and a slider (9);

[0007] The base plate (4) is fixed to the long arm of the L-shaped plate (1), and the short arm (1) of the L-shaped plate is fixed to the experimental table; the fine-tuning platform (6) and the guide rail (8) are fixed to the base plate (4), and the fixed block (7) is fixed above the fine-tuning platform (6); the flexible hinge mechanism (3) is fixed above the slider (9), the piezoelectric stack (5) is placed in the flexible hinge mechanism (3), the electromagnet (2) is fixed below the flexible hinge mechanism (3), and both sides of the flexible hinge mechanism (3) are in elastic contact with the fixed block (7); the slider (9) can slide freely on the guide rail (8);

[0008] The flexible hinge mechanism (3) comprises a hinge front end (3-5), a hinge rear end (3-6), and a hinge (3-3); a slider connection hole (3-1) is located at the center of the hinge rear end (3-6); elastic beams (3-2) are located on both sides of the hinge rear end (3-6); and an electromagnet connection hole (3-4) is located at the center of the hinge front end (3-5); the L-shaped plate (1) comprises an angle adjustment hole (1-2) on the long arm and a desktop fixing hole (1-1) on the short arm;

[0009] The elastic beam (3-2) on the hinge rear end (3-6) of the flexible hinge mechanism (3) is in elastic contact with the fixed block (7) and is installed on the slider (9) through the slider connection hole (3-1); the electromagnet (2) is installed below the hinge front end (3-5) of the flexible hinge mechanism (3) through the electromagnet connection hole (3-4), and the piezoelectric stack (5) is placed between the two hinge beams (3-3); the bottom plate (4) is installed on the long arm of the L-shaped plate (1) through the angle adjustment hole (1-2), and the short arm of the L-shaped plate (1) is installed on the desktop through the desktop fixing hole (1-1).

[0010] Another object of the present invention is to provide a driving method of a low angle-dependent impact inertia piezoelectric actuator, characterized in that it comprises the following steps:

[0011] a) After assembly is completed, a sawtooth driving voltage is applied to the piezoelectric stack (5). When the voltage rises slowly, the piezoelectric stack (5) slowly stretches, causing the hinge (3-3) part of the flexible hinge mechanism (3) to undergo elastic deformation, thereby driving the hinge front end (3-5) of the flexible hinge mechanism (3) to move forward; when the sawtooth driving voltage reaches a maximum value and is about to drop, a short square voltage is applied to the electromagnet (2) to make it adsorbed on the bottom plate (4). At this time, due to the rapid drop in the driving voltage, the piezoelectric stack (5) is quickly shortened, causing the hinge (3-3) part of the flexible hinge mechanism (3) to return to its original state, thereby driving the hinge rear end (3-6) of the flexible hinge mechanism (3) to move forward on the guide rail (8) through the slider (9);

[0012] b) When the sawtooth drive voltage reaches the minimum value and is about to rise slowly again, the square voltage applied to the electromagnet (2) is removed to make it leave the adsorption state, so that the elongation of the piezoelectric stack (5) can continue to drive the hinge front end (3-5) of the flexible hinge mechanism (3) to move forward, and then the step a) is repeated, so as to achieve equal spacing of each displacement at a certain angle;

[0013] c) The angle between the bottom plate (4) and the vertical direction can be changed through the angle adjustment holes (1-2) on the long arm of the L-shaped plate (1), so that the flexible hinge mechanism (3) can be placed in different angle environments. At this time, steps a) and b) are repeated to achieve equal spacing of each displacement at different angles. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] The illustrations of the drawings herein are used to provide further understanding of the present invention and constitute a part of this application. The illustrative examples of the present invention and their descriptions are used to explain the present invention and do not constitute improper limitations on the present invention.

[0015] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0016] Figure 2 It is a structural schematic diagram of the flexible hinge mechanism of the present invention;

[0017] Figure 3 It is a structural schematic diagram of the L-shaped plate of the present invention;

[0018] Figure 4 It is a schematic diagram of sawtooth driving voltage;

[0019] Figure 5 It is a schematic diagram of square voltage;

[0020] In the figure: 1. L-shaped plate; 1-1. Desktop fixing hole; 1-2. Angle adjustment hole; 2. Magnet; 3. Flexible hinge mechanism; 3-1. Slider connection hole; 3-2. Elastic beam; 3-3. Hinge; 3-4. Electromagnet connection hole; 3-5. Hinge front end; 3-6. Hinge rear end; 4. Bottom plate; 5. Piezoelectric stack; 6. Fine-tuning platform; 7. Fixing block; 8. Guide rail; 9. Slider. DETAILED DESCRIPTION

[0021] The details of the present invention and its specific implementation methods are further described below in conjunction with the accompanying drawings.

[0022] See also Figure 1-Figure 5 As shown, a low angle-dependent impact inertia piezoelectric actuator is characterized by comprising an L-shaped plate (1), an electromagnet (2), a flexible hinge mechanism (3), a base plate (4), a piezoelectric stack (5), a fine-tuning platform (6), a fixing block (7), a guide rail (8), and a slider (9);

[0023] The base plate (4) is fixed to the long arm of the L-shaped plate (1), and the short arm (1) of the L-shaped plate is fixed to the experimental table; the fine-tuning platform (6) and the guide rail (8) are fixed to the base plate (4), and the fixed block (7) is fixed above the fine-tuning platform (6); the flexible hinge mechanism (3) is fixed above the slider (9), the piezoelectric stack (5) is placed in the flexible hinge mechanism (3), the electromagnet (2) is fixed below the flexible hinge mechanism (3), and both sides of the flexible hinge mechanism (3) are in elastic contact with the fixed block (7); the slider (9) can slide freely on the guide rail (8);

[0024] The flexible hinge mechanism (3) comprises a hinge front end (3-5), a hinge rear end (3-6), and a hinge (3-3); a slider connection hole (3-1) is located at the center of the hinge rear end (3-6); elastic beams (3-2) are located on both sides of the hinge rear end (3-6); and an electromagnet connection hole (3-4) is located at the center of the hinge front end (3-5); the L-shaped plate (1) comprises an angle adjustment hole (1-2) on the long arm and a desktop fixing hole (1-1) on the short arm;

[0025] The elastic beam (3-2) on the hinge rear end (3-6) of the flexible hinge mechanism (3) is in elastic contact with the fixed block (7) and is installed on the slider (9) through the slider connection hole (3-1); the electromagnet (2) is installed below the hinge front end (3-5) of the flexible hinge mechanism (3) through the electromagnet connection hole (3-4), and the piezoelectric stack (5) is placed between the two hinge beams (3-3); the bottom plate (4) is installed on the long arm of the L-shaped plate (1) through the angle adjustment hole (1-2), and the short arm of the L-shaped plate (1) is installed on the desktop through the desktop fixing hole (1-1).

[0026] A driving method for a low-angle-dependent impact inertia piezoelectric actuator, characterized in that it comprises the following steps:

[0027] a) After assembly is completed, a sawtooth driving voltage is applied to the piezoelectric stack (5). When the voltage rises slowly, the piezoelectric stack (5) slowly stretches, causing the hinge (3-3) part of the flexible hinge mechanism (3) to undergo elastic deformation, thereby driving the hinge front end (3-5) of the flexible hinge mechanism (3) to move forward; when the sawtooth driving voltage reaches a maximum value and is about to drop, a short square voltage is applied to the electromagnet (2) to make it adsorbed on the bottom plate (4). At this time, due to the rapid drop in the driving voltage, the piezoelectric stack (5) is quickly shortened, causing the hinge (3-3) part of the flexible hinge mechanism (3) to return to its original state, thereby driving the hinge rear end (3-6) of the flexible hinge mechanism (3) to move forward on the guide rail (8) through the slider (9);

[0028] b) When the sawtooth drive voltage reaches the minimum value and is about to rise slowly again, the square voltage applied to the electromagnet (2) is removed to make it leave the adsorption state, so that the elongation of the piezoelectric stack (5) can continue to drive the hinge front end (3-5) of the flexible hinge mechanism (3) to move forward, and then the step a) is repeated, so as to achieve equal spacing of each displacement at a certain angle;

[0029] c) The angle between the bottom plate (4) and the vertical direction can be changed through the angle adjustment holes (1-2) on the long arm of the L-shaped plate (1), so that the flexible hinge mechanism (3) can be placed in different angle environments. At this time, steps a) and b) are repeated to achieve equal spacing of each displacement at different angles.

Claims

1. A low angle-dependent impact inertia piezoelectric actuator, characterized in that: It comprises an L-shaped plate (1), an electromagnet (2), a flexible hinge mechanism (3), a base plate (4), a piezoelectric stack (5), a fine-tuning platform (6), a fixing block (7), a guide rail (8), and a slider (9); The base plate (4) is fixed to the long arm of the L-shaped plate (1), and the short arm (1) of the L-shaped plate is fixed to the experimental table; the fine-tuning platform (6) and the guide rail (8) are fixed to the base plate (4), and the fixed block (7) is fixed above the fine-tuning platform (6); the flexible hinge mechanism (3) is fixed above the slider (9), the piezoelectric stack (5) is placed in the flexible hinge mechanism (3), the electromagnet (2) is fixed below the flexible hinge mechanism (3), and both sides of the flexible hinge mechanism (3) are in elastic contact with the fixed block (7); the slider (9) can slide freely on the guide rail (8); The flexible hinge mechanism (3) comprises a hinge front end (3-5), a hinge rear end (3-6), and a hinge (3-3); a slider connection hole (3-1) is located at the center of the hinge rear end (3-6); elastic beams (3-2) are located on both sides of the hinge rear end (3-6); and an electromagnet connection hole (3-4) is located at the center of the hinge front end (3-5); the L-shaped plate (1) comprises an angle adjustment hole (1-2) on the long arm and a desktop fixing hole (1-1) on the short arm; The elastic beam (3-2) on the hinge rear end (3-6) of the flexible hinge mechanism (3) is in elastic contact with the fixed block (7) and is installed on the slider (9) through the slider connection hole (3-1); the electromagnet (2) is installed below the hinge front end (3-5) of the flexible hinge mechanism (3) through the electromagnet connection hole (3-4), and the piezoelectric stack (5) is placed between the two hinge beams (3-3); the bottom plate (4) is installed on the long arm of the L-shaped plate (1) through the angle adjustment hole (1-2), and the short arm of the L-shaped plate (1) is installed on the desktop through the desktop fixing hole (1-1).

2. The driving method of the low angle-dependent impact inertia piezoelectric actuator according to claim 1, characterized in that: The following steps are involved: a) After assembly is completed, a sawtooth driving voltage is applied to the piezoelectric stack (5). When the voltage rises slowly, the piezoelectric stack (5) slowly stretches, causing the hinge (3-3) part of the flexible hinge mechanism (3) to undergo elastic deformation, thereby driving the hinge front end (3-5) of the flexible hinge mechanism (3) to move forward; when the sawtooth driving voltage reaches a maximum value and is about to drop, a short square voltage is applied to the electromagnet (2) to make it adsorbed on the bottom plate (4). At this time, due to the rapid drop in the driving voltage, the piezoelectric stack (5) is quickly shortened, causing the hinge (3-3) part of the flexible hinge mechanism (3) to return to its original state, thereby driving the hinge rear end (3-6) of the flexible hinge mechanism (3) to move forward on the guide rail (8) through the slider (9); b) When the sawtooth drive voltage reaches the minimum value and is about to rise slowly again, the square voltage applied to the electromagnet (2) is removed to make it leave the adsorption state, so that the elongation of the piezoelectric stack (5) can continue to drive the hinge front end (3-5) of the flexible hinge mechanism (3) to move forward, and then the step a) is repeated, so as to achieve equal spacing of each displacement at a certain angle; c) The angle between the bottom plate (4) and the vertical direction can be changed through the angle adjustment holes (1-2) on the long arm of the L-shaped plate (1), so that the flexible hinge mechanism (3) can be placed in different angle environments. At this time, steps a) and b) are repeated to achieve equal spacing of each displacement at different angles.

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