Visualization device and method for electrostatic induction mask electrolytic machining of body wave induced surface wave

Abstract

The invention discloses a visualization device and method for electrostatic induction mask electrolytic machining of body wave induced surface wave, and belongs to the field of electrolytic machining. A workpiece in the device is fixed on one side of an insulating baffle with a square through hole by an insulating tape, and is inserted into a clamping groove in an electrolytic bath. The plane where the piezoelectric ceramic piece is located and the plane where the workpiece is located form a 45-degree angle, and a water outlet hole of the electrolytic bath sprays out electrolyte flow forming a 45-degree angle with the plane where the workpiece is located. The high-speed camera, the piezoelectric ceramic piece, the water outlet hole and the workpiece are located at the same horizontal position. Based on the device, wireless machining of the workpiece can be achieved. Bulk waves excited by the piezoelectric ceramic piece induce surface waves on the surface of the workpiece, so that electrolysis products such as bubbles are discharged in time, and electrolyte is updated in time through electrolyte flow jetted by the water outlet holes. The bubble derivation process in the machining process is directly observed through a high-speed camera. The method is easy to operate, bubbles in the blind holes can be effectively discharged, and the mask electrolytic machining precision is improved.

Description

Technical Field

[0001] The invention relates to a mask electrolytic machining device and method, in particular to a visualization device and method for electrostatic induction mask electrolytic machining of body wave induced surface waves, belonging to the field of electrolytic machining. Background Art

[0002] Mask electrolytic machining uses the principle of anodic dissolution to selectively remove areas without photoresist protection. It is one of the main technologies for mass production of metal microstructures, with advantages such as no burrs, no processing stress, large quantities, and low costs. However, due to the formation of a semi-closed micro blind hole structure between the photoresist and the workpiece during the processing, it is very difficult to discharge the electrolytic products during mask electrolytic machining, resulting in a slower processing rate for the positions covered by the electrolytic products and a faster processing rate for the uncovered positions, which in turn leads to poor processing uniformity. This non-uniform processing result seriously affects the consistency and reliability of the product.

[0003] In order to solve the mass transfer problem in micro blind holes, Chinese invention patent CN107116274A proposes a cavitation jet assisted mask electrolytic machining method, which uses the micro water jet formed by the collapse of the cavitation jet electrolyte to discharge the electrolytic products and improve the machining surface quality. Chinese invention patent CN106312206A proposes a movable mask electrolytic machining device and method, which places the metal porous medium close to the anode workpiece, pumps the electrolyte above the porous medium, and then the electrolyte flows out from all sides of the porous medium, so that the inter-electrode mass transfer is smooth and the machining accuracy is improved. Chinese invention patent CN117139754A proposes a surface acoustic wave assisted mask electrolysis device and method, which uses surface acoustic wave acoustic flow to remove electrolytic products, thereby improving machining uniformity.

[0004] The above method has played a certain role in promoting the development of mask electrolytic processing technology. However, the problem of discharging bubbles in the electrolytic products has not been well solved. In the micro blind hole, the bubble adhesion is very strong, and it is difficult to effectively remove it by conventional methods. At present, there are few methods for removing bubbles in the electrolytic process. Therefore, it is necessary to invent a device and method for effectively removing bubble products, and observe the bubble evolution process in the processing process, find bubbles and discharge them in time to improve processing uniformity. Summary of the invention

[0005] To solve the above problems, the present invention proposes a visualization device and method for electrostatic induction mask electrolytic machining of body wave induced surface waves, which utilizes the high sound pressure gradient in the body wave induced surface wave to achieve timely discharge of electrolytic products including bubbles. At the same time, visualization technology is used to monitor the electrolytic products in real time, so as to achieve timely discovery and discharge of electrolytic products, thereby improving the uniformity of mask electrolytic machining of metal microstructures.

[0006] In order to achieve the above object, the technical solution adopted by the present invention is as follows:

[0007] A visualization device for electrostatic induction mask electrolytic machining of body wave induced surface waves, the visualization device mainly comprises a power supply 1, a power amplifier board 2, a power line 3, a signal line 4, an anode 5, an induction electrode 6, an electrolytic cell 7, two pumps 8, four hoses 9, a spotlight 10, a camera bracket 11, a high-speed camera 12, a cathode 13, and two transducers 14. The sensing electrode 6 is installed in the slot 710 in the middle of the electrolytic cell 7; the anode 5 and the cathode 13 are respectively installed in the two electrode brackets 702 on the inner sides of the front and rear side walls 701 of the electrolytic cell 7; the two transducers 14 are respectively installed in the transducer brackets 707 on the inner sides of the front and rear side walls 701 of the electrolytic cell 7; one ends of the four hoses 9 are fastened to the four hose interfaces 703 on the outer sides of the front and rear side walls 701 of the electrolytic cell 7, wherein the other end of the first (or third) hose 9 connected to the hose interface 703 above the front (or rear) side wall 701 is connected to the water outlet of the first (or second) pump 8, and the other end of the second (or fourth) hose 9 connected to the hose interface 703 below the front (or rear) side wall 701 is connected to the water inlet of the first (or second) pump 8. The power supply 1 supplies power to the anode 5 and the cathode 13 through the power line 3, the power amplifier board 2 drives the two transducers 14 through the signal line 4 to complete the removal of the electrolytic product 17, and the pump 8 realizes the circulation of the electrolyte in the electrolytic cell 7 through the hose 9. The electrolytic product 17 is generated during the machining process of the machined surface and the non-machined surface of the workpiece 601 located on the sensing electrode 6. The high-speed camera 12 is fixed on the camera bracket 11, illuminated by the spotlight 10, and observes the machining process of the workpiece 601 in real time through the front (or rear) side wall 701 of the electrolytic cell 7.

[0008] Furthermore, the electrolytic cell 7 mainly includes a side wall 701, two electrode brackets 702, four hose interfaces 703, four transducer brackets 707, two nozzles 708, two limit plates 709, and a slot 710. Among them, the two electrode brackets 702, the four transducer brackets 707, and the two nozzles 708 are located on the inner side of the front and rear side walls 701 of the electrolytic cell 7, and the four hose interfaces 703 are located on the outer side of the front and rear side walls 701 of the electrolytic cell 7. The two limit plates 709 are concave plate structures, which are parallel to the two side walls 701 and are located in the middle of the electrolytic cell 7. A slot 710 is formed in the middle of the two limit plates 709. The slot 710 is used to insert the induction electrode 6, dividing the electrolytic cell 7 into two symmetrical parts. The front and rear side walls 701 are plate structures with two positioning holes 705 and two side wall holes 706, wherein the two positioning holes 705 are located on the left side of the side wall 701 for fixing the transducer bracket 707; the two side wall holes 706 are located on the right side of the side wall 701 for positioning the hose interface 703 and the nozzle 708. The hose interface 703 is a hollow cube structure with one end open, and a joint 704 is opened on the side to be fastened to the hose 9, and the open end covers the outside of the side wall hole 706. The transducer bracket 707 is a convex plate structure, and the protruding buckle 714 is fastened to the inner side of the positioning hole 705 on the side wall 701, and the middle of the plate has a diagonally arranged rectangular ceramic fixing hole 713 for fixing the transducer 14. The electrode bracket 702 is a U-shaped structure, located on the left side of the transducer bracket 707, and together with the inner side of the side wall 701, forms a through hole for fixing the cathode 13 and the anode 5. The nozzle 708 is a hollow straight triangular prism structure, and the lower surface is an isosceles right triangle. A circular hole 711 identical to the side wall hole 706 is opened on a side surface corresponding to the right angle side. The circular hole 711 and the side wall hole 706 above the side wall 701 are completely fitted on the inner side of the side wall 701, and a vertical rectangular water outlet hole 712 is opened on the side surface corresponding to the hypotenuse.

[0009] Furthermore, the anode 5, cathode 13, transducer 14, and induction electrode 6 are all fixed to the electrolytic cell 7 by riveting, so as to facilitate replacement and disassembly at any time. The induction electrode 6 is inserted into the middle of the electrolytic cell 7, and the electrolytic cell 7 is divided into two parts, the front and rear parts. The anode 5 and cathode 13 installed in the electrolytic cell 7 are arranged symmetrically about the induction electrode 6, the two transducers 14 are arranged symmetrically about the induction electrode 6, and the two nozzles 708 in the electrolytic cell 7 are arranged symmetrically about the induction electrode 6. The transducer 14 is inserted into the ceramic fixing hole 713 in the transducer bracket 707, and the transducer 14 is located between the anode 5 or cathode 13 and the nozzle 708. The anode 5 and cathode 13 are inserted into the electrode bracket 702. The centers of the workpiece 601 on the induction electrode 6, the water outlet 712 on the nozzle 708, and the piezoelectric ceramic sheet 141 on the transducer 14 are at the same horizontal position. The normal line passing through the center of the water outlet hole 712 on the nozzle 708 and perpendicular to the side where the water outlet hole 712 is located passes through the center of the workpiece 601 located on the sensing electrode 6, and the water outlet hole 712 ejects an electrolyte flow 15 at an angle of 45° to the plane where the workpiece 601 is located. The normal line passing through the center of the piezoelectric ceramic piece 141 on the transducer 14 and perpendicular to the piezoelectric ceramic piece 141 passes through the center of the workpiece 601 located on the sensing electrode 6, and the direction of the sound wave 16 excited by the piezoelectric ceramic piece 141 is 45° to the plane where the workpiece 601 is located.

[0010] Furthermore, the sensing electrode 6 mainly includes a workpiece 601, an insulating baffle 602, an insulating tape 603, and a slider 605. A square through hole 604 is opened in the middle of the insulating baffle 602. The workpiece 601 is made of a metal plate 606 with a photoresist 607 coated on one side, wherein the photoresist 607 is an insulating material with a hollow pattern, and the side of the metal plate 606 coated with the photoresist 607 is a processing surface, and the side not coated with the photoresist is a non-processing surface. The non-processing surface of the workpiece 601 is covered on the square through hole 604 of the insulating baffle 602, and the insulating tape 603 adheres the non-processing position around the processing surface of the workpiece 601 to any side of the insulating baffle 602. The slider 605 is installed above the insulating baffle 602. In particular, the sensing electrode 6 is not connected to any wires. When the sensing electrode 6 is inserted into the slot 710, the machined surface of the workpiece 601 and the cathode 13 are located on the same side, and the non-machined surface of the workpiece 601 and the anode 5 are located on the same side. The slider 605 can slide along the upper edge of the limit plate 709 in the electrolytic cell 7 to ensure that the center of the machined surface of the workpiece 601 in the sensing electrode 6 is located at the exact center of the electrolytic cell 7.

[0011] Furthermore, the transducer 14 mainly includes a piezoelectric ceramic sheet 141, a rubber ring 142, and a fixing plate 143. The piezoelectric ceramic sheet 141 is a disc with a frequency of 1.7MHz, and the front side is completely covered with a positive electrode and an insulating film, wherein the insulating film acts as an insulator outside the positive electrode; there is a negative electrode at the center of the back side of the piezoelectric ceramic sheet 141, and the positive electrode is flanged to the edge of the back side, and the positive electrode and the negative electrode are respectively connected to the positive and negative electrodes of the signal line 4. The rubber ring 142 is an inner groove circular ring, and the piezoelectric ceramic sheet 141 is embedded in the inner groove of the rubber ring 142. The fixing plate 143 is a convex plate structure, and the boss of the fixing plate 143 is inserted into the ceramic fixing hole 713 on the transducer bracket 707; the fixing plate 143 is flatly attached to the rubber ring on the back side of the piezoelectric ceramic sheet 141 and insulated and sealed with epoxy resin. Only the front insulating film of the piezoelectric ceramic piece 141 is exposed in the transducer 14. When the transducer 14 is inserted into the transducer bracket 707, the outer normal through the center of the insulating film is toward the center of the workpiece 601 to ensure that the direction of the sound wave 16 excited by the piezoelectric ceramic piece 141 is 45° to the plane where the workpiece 601 is located.

[0012] A method for electrostatic induction mask electrolytic machining of surface waves induced by body waves is implemented based on the above device and includes the following steps:

[0013] S1. Make a workpiece 601. Coat a photoresist 607 on the processed surface of a metal plate 606, and pattern the film through coating, photoresist exposure and development processes.

[0014] S2. Making the sensing electrode 6. Cover the square through hole 604 of the insulating baffle 602 with the non-machined surface of the workpiece 601, and use the insulating tape 603 to stick the non-machined position around the machined surface of the workpiece 601 to any side of the insulating baffle 602.

[0015] S3. Electrostatic induction mask electrolytic machining of body wave induced surface waves. Insert the induction electrode 6 into the slot 710 of the electrolytic cell 7, so that the machined surface of the workpiece 601 is on the same side as the cathode 13, and the non-machined surface of the workpiece 601 is on the same side as the anode 5. At the same time, slightly move the induction electrode 6 to ensure that the surface to be machined is in the center of the electrolytic cell 7. Turn on the spotlight 10, the high-speed camera 12, the two pumps 8, the power amplifier board 2, and the power supply 1 in sequence, and perform electrostatic induction mask electrolytic machining and monitoring of body wave induced surface waves at the same time. Among them, the order of turning on the spotlight 10, the high-speed camera 12, the two pumps 8 and the power amplifier board 2 can be adjusted arbitrarily. The power supply 1 is turned on last. In this process:

[0016] The power source drives the anode 5 and the cathode 13 to undergo oxidation reaction and reduction reaction, and generates an electric field in the electrolyte; under the action of the electric field, the machined surface of the workpiece 601 induces positive charge, undergoes oxidation reaction and produces electrolytic product 17, and the non-machined surface induces negative charge, undergoes reduction reaction and produces electrolytic product 17.

[0017] The insulating film on the front of the exposed piezoelectric ceramic sheet 141 in the transducer 14 is in contact with the electrolyte. Under the action of the 1.7MHz alternating current output by the power amplifier board 2, the two piezoelectric ceramic sheets 141 symmetrical about the induction electrode 6 generate high-frequency vibration sound waves 16 due to the inverse piezoelectric effect. The sound waves 16 propagate in the electrolyte in the form of body waves through the insulating film, and propagate to the machined surface and non-machined surface of the workpiece 601 at a 45° direction to the plane where the workpiece 601 is located. After the body waves propagating in the electrolyte encounter the workpiece 601, a part of them propagate at the interface between the workpiece 601 and the electrolyte in the form of surface waves, and the other part is reflected back to the electrolyte in the form of reflected waves. Because the body waves induce surface waves, the incident waves and reflected waves form a large pressure gradient in the electrolyte around the machined surface and non-machined surface of the workpiece 601, thereby generating acoustic flow, which promotes the timely discharge of the electrolytic products 17 from the machined surface and non-machined surface of the workpiece 601. In particular, since the body wave induced surface wave only produces a large pressure gradient near the machined surface and non-machined surface of the workpiece 601, there is a strong acoustic flow effect near the machined surface and non-machined surface of the workpiece 601, and the acoustic flow away from the machined surface and non-machined surface of the workpiece 601 is weak.

[0018] The water inlets of the two pumps 8 extract the electrolyte in the electrolytic cell 7 from the hose interface 703 below the outer side of the front and rear side walls 701 of the electrolytic cell 7, respectively. The water outlets of the two pumps 8 deliver the electrolyte to the hose 9, the hose interface 703 above the front and rear side walls 701 of the electrolytic cell 7, and the nozzle 708, so that the water outlet 712 sprays out the electrolyte flow 15 at 45 degrees to the plane where the workpiece 601 is located. Due to the laminar flow state, the electrolyte flow 15 has a higher flow rate at a position far away from the processing surface, thereby timely flushing away the electrolytic products 17 discharged from the processing surface and non-processing surface of the workpiece 601 by the body wave induced surface wave.

[0019] The high-speed camera 12 can directly observe the bubble evolution process during the processing. When bubble accumulation is observed, the bubble removal rate can be increased by increasing the power of the power amplifier board 2.

[0020] S4. Post-processing: Take out the sensing electrode 6, tear off the insulating tape 603, and remove the photoresist 607 in a degumming solution to obtain a processed metal microstructure.

[0021] The beneficial effects of the present invention are:

[0022] (1) The present invention improves mass transfer efficiency. The pump promotes macroscopic circulation of the electrolyte, and the body wave induces surface waves to achieve efficient mass transfer in a microscopic confined space, eliminating the negative impact of electrolysis products such as bubbles during the electrolysis process.

[0023] (2) The present invention improves the mass transfer environment during the processing of the through-hole structure. The electrostatic induction principle is used to realize the mask electrolytic processing, which eliminates the back mask process in the traditional mask electrolytic processing process, and changes the original blind hole structure (formed by the back mask and the through hole) into a through hole structure, thereby reducing the mass transfer resistance.

[0024] (3) The present invention can realize wireless processing of workpieces, and has stronger processability. The workpiece does not require back masking process or power connection, which simplifies the operation process. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 The overall view of the visualization device for electrostatic induction mask electrochemical machining of bulk wave induced surface waves;

[0026] Figure 2 A top view of a visualization device for electrostatic induction mask electrochemical machining of bulk wave induced surface waves;

[0027] Figure 3 The front view of the visualization device for electrostatic induction mask electrochemical machining of body wave induced surface waves;

[0028] Figure 4 This is an axonometric diagram of the electrolytic cell;

[0029] Figure 5 It is the axonometric drawing of the hose interface;

[0030] Figure 6 This is the axonometric view of the electrode holder;

[0031] Figure 7 Axonometric view of the electrolyzer with the hose interface and electrode holder hidden;

[0032] Figure 8 Axonometric view of the electrolyzer with the hose connections, electrode holder and one side wall hidden;

[0033] Fig. 9 This is the axonometric view of the nozzle;

[0034] Fig.10 This is the axonometric view of the transducer bracket;

[0035] Fig.11 is the axonometric diagram of the sensing electrode;

[0036] Fig.12 This is the axonometric view of the insulating baffle;

[0037] Fig.13 is the axonometric view of the transducer;

[0038] Fig.14 The schematic diagram of the electrostatic induction mask electrolytic machining method for body wave induced surface wave;

[0039] Fig.15 A comparison diagram of the micro-clamp used for electrostatic induction mask electrochemical machining of bulk wave induced surface waves and traditional mask electrochemical machining.

[0040] In the figure: 1 power supply, 2 amplifier board, 3 power line, 4 signal line, 5 anode, 6 sensing electrode, 7 electrolytic cell, 8 pump, 9 hose, 10 spotlight, 11 camera bracket, 12 high-speed camera, 13 cathode, 14 transducer, 15 electrolyte flow, 16 sound wave, 17 electrolysis product;

[0041] 601 workpiece, 602 insulating baffle, 603 insulating tape, 604 square through hole, 605 slider, 606 metal plate, 607 photoresist;

[0042] 701 side wall, 702 electrode bracket, 703 hose interface, 704 connector, 705 positioning hole, 706 side wall hole, 707 transducer bracket, 708 nozzle, 709 limit plate, 710 slot, 711 round hole, 712 water outlet hole, 713 ceramic fixing hole, 714 buckle;

[0043] 141 piezoelectric ceramic sheet, 142 rubber ring, 143 fixing plate. DETAILED DESCRIPTION

[0044] The core idea of ​​the present invention is to provide a visualization device and method for electrostatic induction mask electrolytic machining of body wave induced surface waves, which utilizes the principle of electrostatic induction to perform machining, breaks the semi-closed structure formed by the photoresist and the workpiece, and reduces the mass transfer resistance; utilizes the high sound pressure gradient of body wave induced acoustic surface waves to achieve timely discharge of electrolytic products including bubbles; at the same time, utilizes visualization technology to achieve timely detection and discharge of electrolytic products, thereby improving the uniformity of mask electrolytic machining of metal microstructures.

[0045] The present invention is further described below in conjunction with the embodiments shown in the accompanying drawings. Obviously, the described examples are only some examples of the present invention, rather than all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the protection scope of the present invention.

[0046] In order to achieve the above object, the technical solution adopted by the present invention is as follows:

[0047] The invention discloses a visualization device for electrostatic induction mask electrochemical machining of body wave induced surface wave. Figure 1 The overall view of the visualization device for electrostatic induction mask electrochemical machining of bulk wave induced surface waves. Figure 2 A top view of the visualization device for electrostatic induction mask electrochemical machining of bulk wave induced surface waves. Figure 3 Front view of the visualization device for electrostatic induction mask electrochemical machining of bulk wave induced surface waves. Figure 3In the figure, the spotlight 10, the camera support 11, the high-speed camera 12 and the side wall 701 are not shown. Figure 3 The local enlarged image in FIG. 1 is the portion presented in the field of view of the high-speed camera 12 .

[0048] like Figures 1 to 3 As shown, a visualization device for electrostatic induction mask electrolytic processing of body wave induced surface waves according to an embodiment of the present invention mainly includes a power supply 1, a power amplifier board 2, a power line 3, a signal line 4, an anode 5, an induction electrode 6, an electrolytic cell 7, a pump 8, a hose 9, a spotlight 10, a camera bracket 11, a high-speed camera 12, a cathode 13, and a transducer 14. The sensing electrode 6 involved in an embodiment of the present invention is installed in the slot 710 in the middle of the electrolytic cell 7; the anode 5 and the cathode 13 are respectively installed in the two electrode brackets 702 on the inner sides of the front and rear side walls 701 of the electrolytic cell 7; the two transducers 14 are respectively installed in the transducer brackets 707 on the inner sides of the front and rear side walls 701 of the electrolytic cell 7; one ends of the four hoses 9 are fastened to the four hose interfaces 703 on the outer sides of the front and rear side walls 701 of the electrolytic cell 7, wherein the other end of the first (or third) hose 9 connected to the hose interface 703 above the front (or rear) side wall 701 is connected to the water outlet of the first (or second) pump 8, and the other end of the second (or fourth) hose 9 connected to the hose interface 703 below the front (or rear) side wall 701 is connected to the water inlet of the first (or second) pump 8. The power supply 1 supplies power to the anode 5 and the cathode 13 through the power line 3, the power amplifier board 2 drives the two transducers 14 through the signal line 4 to complete the removal of the electrolytic product 17, and the pump 8 realizes the circulation of the electrolyte in the electrolytic cell 7 through the hose 9. Among them, the electrolytic product 17 involved in one embodiment of the present invention is generated during the machining process of the machined surface and the non-machined surface of the workpiece 601 located on the sensing electrode 6. The high-speed camera 12 is fixed on the camera bracket 11, illuminated by the spotlight 10, and observes the machining process of the workpiece 601 in real time through the front (or rear) side wall 701 of the electrolytic cell 7.

[0049] Figure 4 This is the axonometric drawing of the electrolytic cell. Figure 5 This is the axonometric drawing of the hose interface. Figure 6 This is the axonometric drawing of the electrode bracket. Figure 7 Axonometric view of the electrolyzer with the hose connections and electrode holder hidden. Figure 8 Axonometric view of the electrolyser with the hose connections, electrode holder and one side wall hidden. Fig. 9 This is the nozzle axonometric diagram. Fig.10 This is the axonometric view of the transducer bracket. Figures 4 to 10 The structure of each component of the electrolytic cell 7 and the relative position relationship between them are described. The electrolytic cell 7 is made of transparent acrylic plates spliced ​​together by gluing, and all its components are tightly connected.

[0050] like Figures 4 to 10As shown, the electrolytic cell 7 involved in one embodiment of the present invention mainly includes a side wall 701, two electrode brackets 702, four hose interfaces 703, four transducer brackets 707, two nozzles 708, two limit plates 709, and a slot 710. Among them, the two electrode brackets 702, the four transducer brackets 707, and the two nozzles 708 are located on the inner side of the front and rear side walls 701 of the electrolytic cell 7, and the four hose interfaces 703 are located on the outer side of the front and rear side walls 701 of the electrolytic cell 7.

[0051] like Figure 7 , 8 As shown, the two limiting plates 709 involved in one embodiment of the present invention are concave plate structures, both parallel to the two side walls 701, and located in the middle of the electrolytic cell 7. A slot 710 is formed in the middle of the two limiting plates 709. The slot 710 is used to insert the sensing electrode 6, dividing the electrolytic cell 7 into two symmetrical parts. The front and rear side walls 701 involved in one embodiment of the present invention are plate structures, having two positioning holes 705 and two side wall holes 706, wherein the two positioning holes 705 are located on the left side of the side wall 701 for fixing the transducer bracket 707; the two side wall holes 706 are located on the right side of the side wall 701 for positioning the hose interface 703 and the nozzle 708.

[0052] like Figure 4 , 5 As shown in FIG. 7 , a hose interface 703 according to an embodiment of the present invention is a hollow cube structure with one end open, a connector 704 fastened to the hose 9 is provided on the side, and the open end covers the outside of the side wall hole 706 .

[0053] like Figure 7 , 8 As shown in FIG. 10 , the transducer bracket 707 involved in one embodiment of the present invention is a convex-shaped plate structure, and the protruding buckle 714 is fastened to the inner side of the positioning hole 705 on the side wall 701, and there are diagonally arranged rectangular ceramic fixing holes 713 in the middle of the plate for fixing the transducer 14.

[0054] like Figure 4 , 6 As shown, the electrode bracket 702 involved in an embodiment of the present invention is a U-shaped structure, located on the left side of the transducer bracket 707, and together with the inner side of the side wall 701 forms a through hole for fixing the cathode 13 and the anode 5.

[0055] like Figure 7 , 8As shown in Figures 9, the nozzle 708 involved in one embodiment of the present invention is a hollow right triangular prism structure, the lower surface of which is an isosceles right triangle, and a circular hole 711 identical to the side wall hole 706 is opened on a side surface corresponding to the right angle side, the circular hole 711 and the side wall hole 706 above the side wall 701 are completely fitted on the inner side of the side wall 701, and a vertical rectangular water outlet hole 712 is opened on the side surface corresponding to the hypotenuse.

[0056] Fig.11 is the axonometric diagram of the sensing electrode. Fig.12 This is the isometric view of the insulation baffle. Fig.14 Schematic diagram of the electrostatic induction mask electrochemical machining method of body wave induced surface wave. Fig.11 , 12 The induction electrode 6 according to an embodiment of the present invention mainly includes a workpiece 601, an insulating baffle 602, an insulating tape 603, and a slider 605. A square through hole 604 is formed in the middle of the insulating baffle 602. Fig.14 As shown, the workpiece 601 is made of a metal plate 606 coated with a photoresist 607 on one side, wherein the photoresist 607 is an insulating material with a hollow pattern, and the side of the metal plate 606 coated with the photoresist 607 is a processing surface, and the side not coated with the photoresist is a non-processing surface. Fig.11 As shown, the non-processed surface of the workpiece 601 is covered on the square through hole 604 of the insulating baffle 602, and the insulating tape 603 adheres the non-processed position around the processed surface of the workpiece 601 to any side of the insulating baffle 602. The slider 605 is installed above the insulating baffle 602. In particular, Figure 1 , 2 3 , the sensing electrode 6 is not connected to any wires. When the sensing electrode 6 is inserted into the slot 710 , the machined surface of the workpiece 601 and the cathode 13 are located on the same side, and the non-machined surface of the workpiece 601 and the anode 5 are located on the same side. The slider 605 can slide on the upper edge of the limit plate 709 in the electrolytic cell 7 to ensure that the center of the machined surface of the workpiece 601 in the sensing electrode 6 is located at the exact center of the electrolytic cell 7.

[0057] Fig.13It is an axonometric view of the transducer. The transducer 14 involved in one embodiment of the present invention mainly includes a piezoelectric ceramic sheet 141, a rubber ring 142, and a fixing plate 143. The piezoelectric ceramic sheet 141 is a disc with a frequency of 1.7 MHz, and the front side is completely covered with a positive electrode and an insulating film, wherein the insulating film acts as an insulator outside the positive electrode; there is a negative electrode at the center position of the back side of the piezoelectric ceramic sheet 141, and the positive electrode is flanged to the edge of the back side, and the positive and negative electrodes are respectively connected to the positive and negative electrodes of the signal line 4. The rubber ring 142 is an inner groove ring, and the piezoelectric ceramic sheet 141 is embedded in the inner groove of the rubber ring 142. The fixing plate 143 is a convex plate structure, and the boss of the fixing plate 143 is inserted into the ceramic fixing hole 713 on the transducer bracket 707; the fixing plate 143 is flatly attached to the rubber ring on the back side of the piezoelectric ceramic sheet 141 and insulated and sealed with epoxy resin. As shown Figure 2 As shown, only the insulating film on the front side of the piezoelectric ceramic piece 141 is exposed in the transducer 14. When the transducer 14 is inserted into the transducer bracket 707, the outer normal through the center of the insulating film is oriented toward the center of the workpiece 601 to ensure that the direction of the sound wave 16 excited by the piezoelectric ceramic piece 141 is 45° to the plane where the workpiece 601 is located.

[0058] The electrolyte involved in one embodiment of the present invention flows out from the side wall hole 706 on the lower side of the front or rear side wall 701 of the electrolytic cell 7, passes through the hose interface 703, the hose 9, the pump 8, and then flows back to the electrolytic cell 7 through the hose 9, the hose interface 703 on the upper side of the side wall 701, the side wall hole 706, and the nozzle 708.

[0059] The anode 5, cathode 13, transducer 14, and induction electrode 6 involved in one embodiment of the present invention are fixed to the electrolytic cell 7 by riveting, which is convenient for replacement and removal at any time. Among them, the induction electrode 6 is inserted into the middle of the electrolytic cell 7, dividing the electrolytic cell 7 into two parts, the front and rear parts, the anode 5 and cathode 13 installed in the electrolytic cell 7 are arranged symmetrically about the induction electrode 6, the two transducers 14 are arranged symmetrically about the induction electrode 6, and the two nozzles 708 in the electrolytic cell 7 are arranged symmetrically about the induction electrode 6. The transducer 14 is inserted into the ceramic fixing hole 713 in the transducer bracket 707, and the transducer 14 is located between the anode 5 or cathode 13 and the nozzle 708. The anode 5 and the cathode 13 are inserted into the electrode bracket 702.

[0060] In particular, the centers of the workpiece 601 on the sensing electrode 6, the water outlet hole 712 on the nozzle 708, and the piezoelectric ceramic piece 141 on the transducer 14 are at the same horizontal position. The normal line passing through the center of the water outlet hole 712 on the nozzle 708 and perpendicular to the side where the water outlet hole 712 is located passes through the center of the workpiece 601 on the sensing electrode 6, so that the water outlet hole 712 sprays out the electrolyte flow 15 at an angle of 45° to the plane where the workpiece 601 is located. The normal line passing through the center of the piezoelectric ceramic piece 141 on the transducer 14 and perpendicular to the piezoelectric ceramic piece 141 passes through the center of the workpiece 601 on the sensing electrode 6, so that the direction of the sound wave 16 excited by the piezoelectric ceramic piece 141 is 45° to the plane where the workpiece 601 is located.

[0061] The anode 5 and cathode 13 involved in one embodiment of the present invention are replaced and cleaned only when they are consumed, damaged or contaminated, otherwise they are installed in the electrode bracket 702 in the electrolytic cell 7. The transducer 14 is replaced when the piezoelectric ceramic sheet is damaged or the insulation fails, otherwise it is installed in the transducer bracket 707 in the electrolytic cell 7.

[0062] The electrostatic induction mask electrochemical machining method of bulk wave induced surface waves according to an embodiment of the present invention is implemented based on the above-mentioned device and includes the following steps:

[0063] S1. Processing the workpiece 601. Coating the photoresist 607 on the processed surface of the metal plate 606, and patterning the film through coating, photoresist exposure and development processes. The pattern of the photoresist 607 on the processed surface of the workpiece 601 is a micro clamp.

[0064] In particular, the pattern of the photoresist 607 on the processing surface of the workpiece 601 involved in one embodiment of the present invention is not limited to the micro-clamp, and can be any desired pattern. The non-processed surface of the workpiece 601 is not subjected to insulation treatment, the back mask process in the traditional mask electrolytic processing process is eliminated, and the blind hole structure (formed by the back mask and the through hole) in the traditional mask electrolytic processing is changed into a through hole structure, and the mass transfer resistance is reduced.

[0065] S2. Making the sensing electrode: Cover the square through hole 604 of the insulating baffle 602 with the non-machined surface of the workpiece 601 , and use the insulating tape 603 to stick the non-machined position around the machined surface of the workpiece 601 to any side of the insulating baffle 602 .

[0066] S3. Electrostatic induction mask electrolytic machining of body wave induced surface waves. Insert the induction electrode 6 into the slot 710 of the electrolytic cell 7, so that the machined surface of the workpiece 601 is on the same side as the cathode 13, and the non-machined surface of the workpiece 601 is on the same side as the anode 5. At the same time, slightly move the induction electrode 6 to ensure that the surface to be machined is in the center of the electrolytic cell 7. Turn on the spotlight 10, high-speed camera 12, two pumps 8, power amplifier board 2, and power supply 1 in sequence, and perform electrostatic induction mask electrolytic machining and monitoring of body wave induced surface waves at the same time. Among them, the electrolyte is 25%wt sodium chloride, the power supply current is 0.5A, the processing time is 10s, and the power amplifier board power is 10W.

[0067] In particular, the order in which the spotlight 10, the high-speed camera 12, the two pumps 8 and the amplifier board 2 are turned on can be adjusted arbitrarily. The power supply 1 is turned on last.

[0068] Fig.14 The schematic diagram of the electrostatic induction mask electrolytic machining method of body wave induced surface wave involved in one embodiment of the present invention. The power source drives the anode 5 and the cathode 13 to undergo oxidation reaction and reduction reaction, and generates an electric field in the electrolyte; under the action of the electric field, the machined surface of the workpiece 601 induces positive charge, undergoes oxidation reaction and produces electrolytic product 17, and the non-machined surface induces negative charge, undergoes reduction reaction and produces electrolytic product 17.

[0069] At the same time, the exposed piezoelectric ceramic sheet 141 in the transducer 14 contacts the electrolyte on the front side. Under the action of the 1.7MHz alternating current output by the power amplifier board 2, the two piezoelectric ceramic sheets 141 symmetrical about the induction electrode 6 generate high-frequency vibration sound waves 16 due to the inverse piezoelectric effect. The sound waves 16 propagate in the electrolyte in the form of body waves, and propagate to the machined surface and the non-machined surface of the workpiece 601 at a 45° direction to the plane where the workpiece 601 is located. After the body waves in the electrolyte encounter the workpiece 601, a part of them propagate at the interface between the workpiece 601 and the electrolyte in the form of surface waves, and the other part is reflected back to the electrolyte in the form of reflected waves. Since the body waves induce the surface waves, the incident waves and the reflected waves form a large pressure gradient in the electrolyte around the machined surface and the non-machined surface of the workpiece 601, thereby generating acoustic flow, which promotes the timely discharge of the electrolysis products 17 from the machined surface and the non-machined surface of the workpiece. In particular, the acoustic flow force involved in one embodiment of the present invention has a strong effect only near the machined surface and the non-machined surface of the workpiece.

[0070] At the same time, the water inlets of the two pumps 8 extract the electrolyte in the electrolytic cell 7 from the hose interface 703 below the front and rear side walls 701 of the electrolytic cell 7, and the water outlets of the two pumps 8 successively transport the electrolyte to the hose 9, the hose interface 703 below the front and rear side walls 701 of the electrolytic cell 7, and the nozzle 708, so that the water outlet 712 sprays out the electrolyte flow 15 at 45 degrees to the plane where the workpiece 601 is located. Due to the laminar flow state, the electrolyte flow 15 has a higher flow rate at a position far away from the processing surface, so that the electrolysis product 17 discharged from the processing surface and non-processing surface of the workpiece 601 by the body wave induced surface wave is promptly washed away.

[0071] At the same time, the high-speed camera 12 can directly observe the bubble evolution process during the processing. When bubble accumulation is observed, the bubble removal rate can be increased by increasing the power of the power amplifier board 2.

[0072] S4. Post-processing: Take out the sensing electrode 6, tear off the insulating tape 603, and remove the photoresist 607 in a degumming solution to obtain a processed metal microstructure.

[0073] The conventional mask electrolytic processing method according to a first embodiment of the present invention comprises the following steps:

[0074] S11. Processing the workpiece 601. Coating the photoresist 607 on the processed surface of the metal plate 606, and patterning the film through coating, photoresist exposure and development processes. Among them, the pattern of the photoresist 607 on the processed surface of the workpiece 601 is a micro clamp. At the same time, the non-processed surface of the workpiece 601 is completely coated with insulating photoresist and is not patterned.

[0075] S12. Make the anode. Drill a hole at the non-processed position of the processed surface of the workpiece 601, connect the positive electrode of the power line 3, and use epoxy resin glue to insulate the connection. Cover the square through hole 604 of the insulating baffle 602 with the non-processed surface of the workpiece 601, and use insulating tape 603 to stick the non-processed position around the processed surface of the workpiece 601 to any side of the insulating baffle 602.

[0076] S13. Conventional mask electrolytic processing. Insert the insulating baffle 602 into the slot 710 of the electrolytic cell 7 so that the processing surface of the workpiece 601 and the cathode 13 are on the same side. The workpiece 601 serves as the anode, and the power supply 1 supplies power to the workpiece 601 and the cathode 13. At the same time, slightly move the insulating baffle 602 to ensure that the surface to be processed is in the center of the electrolytic cell 7. Turn on the spotlight 10, the high-speed camera 12, the two pumps 8, and the power supply 1 in turn, and perform conventional mask electrolytic processing and monitoring at the same time. Among them, the electrolyte is 25%wt sodium chloride, the power supply current is 0.5A, and the processing time is 10s.

[0077] S14. Post-processing: The insulating baffle 602 is removed, the insulating tape 603 is torn off, and the photoresist 607 is removed in a degumming solution to obtain a processed metal microstructure.

[0078] Data analysis of embodiments and comparative examples:

[0079] Fig.15 This is a comparison diagram of the micro-clamps used in electrostatic induction mask electrochemical machining of body wave induced surface waves and traditional mask electrochemical machining. Fig.15 The left side shows a micro-clamp processed by conventional mask electrolytic machining, and the right side shows a micro-clamp processed by electrostatic induction mask electrolytic machining of body wave induced surface wave. The electrostatic induction mask electrolytic machining method of body wave induced surface wave of the present invention overcomes the problems of bubble interference and poor uniformity that have always existed in the conventional mask electrolytic machining technology. During the machining process, the bubble coverage rate Br = 3%, and the non-uniformity of the micro-clamp finally obtained is Nu = 12.5%. Compared with the conventional mask electrolytic machining method (Br = 95%, Nu = 100%), the method provided by the present invention reduces Br by 96.8% and Nu by 87.5%, and the bubble coverage rate and uniformity are greatly improved. It can be seen that the use of the present invention can effectively improve the mass transfer efficiency, reduce the surface coverage rate of bubbles, and ensure the performance of microstructure devices.

[0080] The above-described embodiments merely express the implementation methods of the present invention, but they cannot be understood as limiting the scope of the patent of the present invention. It should be pointed out that for those skilled in the art, several modifications and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. A visualization device for electrostatic induction mask electrochemical machining of bulk wave induced surface waves, characterized in that: The visualization device mainly includes a power supply (1), a power amplifier board (2), a power line (3), a signal line (4), an anode (5), an induction electrode (6), an electrolytic cell (7), two pumps (8), four hoses (9), a cathode (13), and two transducers (14); the details are as follows: The power supply (1) supplies power to the anode (5) and the cathode (13) via a power line (3); the anode (5) and the cathode (13) are respectively installed on the inner side of the front and rear side walls (701) of the electrolytic cell (7); the induction electrode (6) is installed in the middle of the electrolytic cell (7); the two transducers (14) are respectively installed on the inner side of the front and rear side walls (701) of the electrolytic cell (7); the power amplifier board (2) drives the two transducers (14) via a signal line (4) to complete the removal of the electrolysis product (17). The four hoses (9) are arranged in groups of two, and the two groups are arranged on the outside of the front and rear side walls (701) of the electrolytic cell (7), respectively. One end of the first group of hoses is connected to the hose interface (703) on the outside of the front side wall (701), and the other end is connected to the first pump (8). One end of the second group of hoses is connected to the hose interface (703) on the outside of the rear side wall (701), and the other end is connected to the second pump (8). The pump (8) realizes the circulation of electrolyte in the electrolytic cell (7) through the hoses (9); The electrolysis product (17) is generated during the machining process on the machined surface and the non-machined surface of the workpiece (601) on the induction electrode (6); when the induction electrode (6) is installed in the middle of the electrolytic cell (7), the machined surface of the workpiece (601) and the cathode (13) are located on the same side, and the non-machined surface of the workpiece (601) and the anode (5) are located on the same side.

2. The visualization device for electrostatic induction mask electrochemical machining of bulk wave induced surface waves according to claim 1, characterized in that: The high-speed camera (12) is fixed on the camera bracket (11) and observes the processing process of the workpiece (601) in real time through the front or rear side wall (701) of the electrolytic cell (7).

3. The visualization device for electrostatic induction mask electrochemical machining of bulk wave induced surface waves according to claim 2, characterized in that: The electrolytic cell (7) comprises a side wall (701), an electrode support (702), a hose interface (703), a transducer support (707), a nozzle (708), a limit plate (709), and a slot (710); specifically: Two electrode supports (702), four transducer supports (707), and two nozzles (708) are located on the inner sides of the front and rear side walls (701) of the electrolytic cell (7); four hose interfaces (703) are located on the outer sides of the front and rear side walls (701) of the electrolytic cell (7); the front and rear side walls (701) are plate structures; two limiting plates (709) are concave plate structures, both parallel to the two side walls (701), and located in the middle of the electrolytic cell (7); a slot (710) is formed in the middle of the two limiting plates (709), and the slot (710) is used to insert the induction electrode (6).

4. The visualization device for electrostatic induction mask electrochemical machining of bulk wave induced surface waves according to claim 3, characterized in that: The sensing electrode (6) divides the electrolytic cell (7) into two parts, front and rear. The anode (5) and cathode (13) installed in the electrolytic cell (7) are arranged symmetrically with respect to the sensing electrode (6). The two transducers (14) are arranged symmetrically with respect to the sensing electrode (6). The two nozzles (708) in the electrolytic cell (7) are arranged symmetrically with respect to the sensing electrode (6). The transducer (14) is inserted into the ceramic fixing hole (713) in the transducer bracket (707), and the transducer (14) is located between the anode (5) or cathode (13) and the nozzle (708); The centers of the workpiece (601) located on the sensing electrode (6), the water outlet hole (712) located on the nozzle (708) and the piezoelectric ceramic sheet (141) located on the transducer (14) are located at the same horizontal position; The electrolyte flow (15) ejected from the water outlet (712) on the nozzle (708) is at an angle of 45° to the plane where the workpiece (601) is located; and the direction of the sound wave (16) excited by the piezoelectric ceramic piece (141) of the transducer (14) is at an angle of 45° to the plane where the workpiece (601) is located.

5. The visualization device for electrostatic induction mask electrochemical machining of bulk wave induced surface waves according to claim 4, characterized in that: The sensing electrode (6) comprises a workpiece (601), an insulating baffle acoustic wave (602), an insulating tape (603), and a slider (605); specifically: A through hole (604) is formed in the middle of the insulating sound barrier (602); The workpiece (601) is made of a metal plate (606) coated with a photoresist (607) on one side, wherein the photoresist (607) is an insulating material with a hollow pattern, the side of the metal plate (606) coated with the photoresist (607) is a processing surface, and the side not coated with the photoresist is a non-processing surface; the non-processing surface of the workpiece (601) is covered on the through hole (604) of the insulating baffle sound wave (602), and the insulating tape (603) adheres the non-processing position around the processing surface of the workpiece (601) to any side of the insulating baffle sound wave (602); The slider (605) is installed above the insulating baffle sound wave (602); the slider (605) can slide on the limit plate (709) in the electrolytic cell (7) so that the center of the machined surface of the workpiece (601) is located in the center of the electrolytic cell (7).

6. The visualization device for electrostatic induction mask electrochemical machining of bulk wave induced surface waves according to claim 5, characterized in that: The anode (5), cathode (13), transducer (14), and induction electrode (6) are all fixed to the electrolytic cell (7) by riveting.

7. A method for electrostatic induction mask electrolytic machining of surface waves induced by bulk waves using the visualization device according to any one of claims 1 to 6, characterized in that: The following steps are involved: S1. Making a workpiece (601); Coating a photoresist (607) on the processed surface of the metal plate (606), and implementing a coating, photoresist exposure and development process to achieve film patterning; S2. Making sensing electrodes (6); Cover the through hole (604) of the insulating baffle sound wave (602) with the non-processed surface of the workpiece (601), and use insulating tape (603) to stick the non-processed position around the processed surface of the workpiece (601) to any side of the insulating baffle sound wave (602); S3. Electrostatic induction mask electrochemical machining of surface waves induced by body waves; Insert the induction electrode (6) into the slot (710) of the electrolytic cell (7), so that the machining surface of the workpiece (601) and the cathode (13) are located on the same side, and the non-machining surface of the workpiece (601) and the anode (5) are located on the same side, and at the same time move the induction electrode (6) to ensure that the surface to be machined is located in the exact center of the electrolytic cell (7); turn on each device, and perform electrostatic induction mask electrolytic machining and monitoring of body wave induced surface waves; Under the action of the electric field, electrolytic products (17) are generated on the machined surface and the non-machined surface of the workpiece (601); the transducer (14) generates sound waves (16), which propagate in the electrolyte in a body wave mode through the insulating film and propagate to the machined surface and the non-machined surface of the workpiece (601) in a direction of 45° to the plane where the workpiece (601) is located, respectively, to generate acoustic flow, and promote the electrolytic products (17) to be discharged from the machined surface and the non-machined surface of the workpiece (601) in a timely manner; The water inlets of the two pumps (8) draw electrolyte from the electrolytic tank (7) through the hose, and the water outlets deliver the electrolyte to the nozzle (708) through the hose, so that the water outlet (712) sprays out an electrolyte flow (15) at an angle of 45 degrees to the plane where the workpiece (601) is located, and the electrolyte flow (15) washes away the electrolytic products (17) discharged from the machined surface and non-machined surface of the workpiece (601) by the body wave induced surface wave; S4. Post-processing to obtain the processed metal microstructure.

8. The electrostatic induction mask electrolytic machining method of body wave induced surface wave implemented by a visualization device according to claim 7, characterized in that: The bubble evolution process during the processing is observed by a high-speed camera (12), and when bubble accumulation is observed, the bubble removal rate is increased by increasing the power of the power amplifier board (2).

9. The electrostatic induction mask electrolytic machining method of body wave induced surface wave implemented by a visualization device according to claim 7, characterized in that: The post-processing process is: taking out the sensing electrode (6), tearing off the insulating tape (603), removing the photoresist (607) in a degumming solution, and obtaining a processed metal microstructure.

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