Vacuum hot pressing furnace for bonding seed crystals

Abstract

The invention discloses a vacuum hot-pressing furnace for seed crystal bonding, and relates to the technical field of seed crystal bonding, the vacuum hot-pressing furnace comprises a heat preservation cylinder body, an upper pressing disc and a bearing disc, the outer wall of the heat preservation cylinder body is provided with an exhaust pipe and a pressure regulating pipe, the upper pressing disc is located in an inner cavity of the heat preservation cylinder body and is provided with a heater, and the exhaust pipe and the pressure regulating pipe are both provided with electric valves; a driving cylinder is installed at the upper end of the heat preservation barrel in a sealed mode, the movable end of the driving cylinder is located in an inner cavity of the heat preservation barrel and connected with the upper pressing disc, the heat preservation barrel comprises a heat preservation top plate, a heat preservation bottom plate and a semi-ring plate, the heat preservation top plate and the heat preservation bottom plate are arranged up and down, and an opening and closing door is rotationally arranged on the semi-ring plate. The semi-ring plates and the opening and closing door are made of heat conduction materials, and the heat preservation device further comprises a heat preservation ring plate and a driving unit used for driving the heat preservation ring plate to move up and down. The heat preservation ring plate capable of automatically moving up and down is arranged in the vacuum hot pressing furnace, so that the heat dissipation time of the assembly can be greatly shortened, and the working efficiency is improved.

Description

Technical Field

[0001] The invention relates to the technical field of seed crystal bonding, in particular to a vacuum hot pressing furnace for seed crystal bonding. Background Art

[0002] The main purpose of bonding the seed crystal to the crystal tray (bonding with fixing glue) is to ensure that the seed crystal can be stably fixed on the crystal tray during the crystal growth process, thereby avoiding the seed crystal from falling off or shifting due to factors such as vibration and temperature changes. At the same time, good bonding can also improve the quality and efficiency of crystal growth.

[0003] A vacuum hot press (including a heat-insulating cylinder with an insulation layer on the inner wall, an upper pressure plate installed at the output end of the driving cylinder, and a supporting plate arranged in the heat-insulating cylinder, and heaters are provided on the upper pressure plate and the supporting plate) is used for bonding the seed crystal to the crystal tray. The air in the heating chamber is extracted by a vacuum pump to create a near-vacuum environment. This helps to reduce the gas content in the fixing glue and avoid defects such as bubbles during the heating and pressing process. After the seed crystal and the crystal tray assembly is heated (the temperature of the assembly is about 400 degrees Celsius at this time), the vacuum hot press needs to be naturally cooled in a vacuum environment by the vacuum hot press (to prevent the adverse effects of oxygen and moisture in the air on the fixing glue, and to prevent dust from adhering to the assembly. The use of natural cooling can effectively avoid excessive thermal stress that causes cracking or deformation of the seed crystal). When the assembly dissipates heat naturally, the inner wall of the heat-insulating cylinder is completely covered by the heat-insulating layer, resulting in too slow cooling of the assembly, which in turn takes too long to cool down the entire assembly, reducing work efficiency. Therefore, the present application provides a vacuum hot press furnace for seed crystal bonding to meet the needs. Summary of the invention

[0004] The purpose of the present application is to provide a vacuum hot pressing furnace for seed crystal bonding, which is used to solve the technical problem in the prior art that it takes too long to cool down the assembly of the seed crystal and the crystal tray.

[0005] To achieve the above-mentioned purpose, the present application provides the following technical solutions: an insulation cylinder with an exhaust pipe and a pressure regulating pipe on its outer wall, an upper pressure plate and a carrying plate located in the inner cavity of the insulation cylinder and provided with a heater, the exhaust pipe and the pressure regulating pipe are both provided with electric valves, a driving cylinder is sealedly installed on the upper end of the insulation cylinder, and the movable end of the driving cylinder is located in the inner cavity of the insulation cylinder and connected to the upper pressure plate, the insulation cylinder comprises an insulation top plate and an insulation bottom plate and a semi-ring plate arranged up and down, an opening and closing door is rotatably arranged on the semi-ring plate, the semi-ring plate and the opening and closing door are made of heat-conducting material, and also comprises an insulation ring plate and a driving unit for driving the insulation ring plate to move up and down; The heat-insulating ring plate is arranged in the annular accommodating cavity of the heat-insulating ring plate, the upper end of the heat-insulating ring plate is sealedly connected to the heat-insulating ring plate, and the upper end of the annular accommodating cavity is communicated with the inner cavity of the heat-insulating cylinder; When it is necessary to heat the assembly of the seed crystal and the crystal support that have been squeezed and fixed, the driving unit automatically drives the insulation ring plate to move upward and makes the upper end of the insulation ring plate contact with the insulation top plate. The assembly is located in the cavity surrounded by the insulation ring plate, and the insulation ring plate, the insulation top plate and the insulation bottom plate constitute an insulation cavity. When the fixing glue between the seed crystal and the crystal tray is completely solidified and needs to be cooled, the driving unit automatically drives the insulation ring plate to move downward and retract into the annular accommodating cavity, and the assembly quickly dissipates heat outward by radiation heat dissipation.

[0006] As a preferred implementation in this embodiment, the driving unit includes a thermos bottle filled with a low-boiling-point liquid, a heat-conducting plate, and two heat-insulating tubes arranged outside the heat-insulating ring plate; The upper ends of the two insulation tubes are sealed and connected to the insulation bottom plate, and the lower ends of the two insulation tubes are communicated with the inner cavity of the thermos bottle. The inner cavity of the insulation tube is sealed and slidably provided with a lifting rod, and the upper end of the lifting rod is provided with a first extrusion rod with a semicircular rod head; The thermos bottle is connected to the insulation bottom plate through an insulation connecting pipe, the inner cavity of the insulation connecting pipe is provided with a heat-conducting column, and the lower end of the heat-conducting column extends into the low-boiling-point liquid, and the upper end of the heat-conducting column extends to the inner cavity of the insulation cylinder and is connected to the heat-conducting plate; Hollow cylinders are provided on the outer walls of both sides of the insulation ring plate, and extrusion springs are installed in the hollow cylinders. The outer ends of the extrusion springs are fixedly connected to the second extrusion rods. The second extrusion rods are initially located above the corresponding first extrusion rods, and the outer ends of the second extrusion rods are arranged as semicircular structures.

[0007] As a preferred implementation manner in this embodiment, it also includes a cooling unit, one end of which is mounted on the insulating ring plate, and the other end is mounted on the heat-insulating ring plate. When the assembly is dissipating heat, the low-boiling-point liquid in the thermos bottle can be cooled by the cooling unit.

[0008] As a preferred implementation in this embodiment, the cooling unit includes a first mounting frame installed at the lower end of the insulation ring plate, a gear rod is slidably provided on the first mounting frame, a first magnetic isolation block is fixed on the upper end of the gear rod, a first permanent magnet is installed in the groove at the upper end of the first magnetic isolation block, a second permanent magnet is arranged at the position of the lower end of the insulation ring plate corresponding to the first permanent magnet, the first permanent magnet and the second permanent magnet have the same magnetic poles at the opposite ends, a first mounting ring is fixedly sleeved on the gear rod, and the first mounting ring is connected to the first mounting frame by a first spring, a crankshaft is rotatably provided at the lower end of the first mounting frame, and a one-way gear toothed with the gear rod is installed on the crankshaft, a movable rod is installed on the crankshaft, and a piston is fixedly provided at the lower end of the movable rod, and the piston is sealingly slidably arranged in the piston cylinder, and a liquid inlet pipe with a liquid inlet check valve and a liquid outlet pipe with a liquid outlet check valve are arranged on the piston cylinder; The insulation pipe comprises an insulation outer pipe and a heat-conducting inner pipe arranged inside the insulation outer pipe, the lower end of the lifting rod is slidably arranged in the inner cavity of the heat-conducting inner pipe, a cooling channel is formed between the insulation outer pipe and the heat-conducting inner pipe, a channel outlet is arranged at the bottom of the cooling channel, and the upper end of the liquid outlet pipe is communicated with the cooling channel; The thermos bottle comprises a heat-insulating shell and a heat-conducting liner, the low-boiling-point liquid is filled in the sealed heat-conducting liner, and a water storage cavity is formed between the inner wall of the heat-insulating shell and the outer wall of the heat-conducting liner; The inner cavities of the two heat-conducting inner tubes are communicated with the inner cavity of the heat-conducting inner tank, the flow channel outlet is communicated with the water storage cavity, the lower end of the insulation shell is provided with a drain pipe communicated with the water storage cavity, and a first valve is installed on the drain pipe.

[0009] As a preferred implementation manner in this embodiment, it also includes an automatic drainage unit, which is installed at the lower end of the insulation ring plate and automatically drains water after the low-boiling point liquid in the thermos bottle is cooled.

[0010] As a preferred implementation in this embodiment, the automatic drainage unit includes a second mounting frame installed on the outer wall of the insulation ring plate, a column is slidably provided on the second mounting frame, and a second mounting ring and a second magnetic isolation block are fixed on the column, a third permanent magnet is provided in the groove at the upper end of the second magnetic isolation block, the third permanent magnet is located directly below the corresponding lifting rod, a fourth permanent magnet is installed at the lower end of the lifting rod, the third permanent magnet and the fourth permanent magnet have the same magnetic poles at opposite ends, and the second mounting ring is connected to the second mounting frame by a second spring; The second mounting frame is slidably connected with a rack, and the right end of the rack is gear-engaged with a first gear provided on the regulating rod of the first valve, the upper end of the rack is provided with a V-shaped surface, and the left end of the rack is connected to the second mounting frame through a third spring; At the beginning, the lower end of the column conflicts with the lowest point of the V-shaped surface.

[0011] As a preferred implementation in this embodiment, it also includes an air pressure balancing unit, one end of which is installed on the corresponding insulation pipe and the other end is installed on the first mounting ring. When water is added to the cooling channel, it is used to balance the internal and external air pressures of the cooling channel.

[0012] As a preferred implementation in this embodiment, the air pressure balance unit includes a tooth plate fixedly arranged on the corresponding first mounting ring and an exhaust pipe whose inlet end is connected to the inner cavity corresponding to the cooling flow channel, a second valve is installed on the exhaust pipe, and a second gear is installed on the adjusting rod of the second valve, and the second gear is initially located above the tooth plate.

[0013] As a preferred implementation manner in this embodiment, a guide plate is arranged in the cooling flow channel, and the guide plate is spiral-shaped and extends downward.

[0014] In summary, the technical effects and advantages of the present invention are as follows: The invention has a reasonable structure. A heat preservation ring plate that can automatically move up and down is arranged in the vacuum hot pressing furnace, which can automatically remove the blockage of radiant heat, greatly shorten the heat dissipation time of the assembly of the seed crystal and the crystal support, and improve the work efficiency. In the present invention, a cooling unit is provided to enable the gas in the thermos bottle and the heat preservation tube to be quickly and completely liquefied, which is conducive to the subsequent rapid return of the first extrusion rod to its original position; In the present invention, an automatic drainage unit is provided to automatically drain the water after absorbing heat in the thermos bottle, thereby avoiding manual operation and increasing labor intensity; In the present invention, an air pressure balancing unit is provided, the purpose of which is to prevent the air pressure inside the cooling channel from increasing when adding water into the cooling channel, thereby preventing a large amount of cooling water from being added. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without paying any creative work.

[0016] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 for Figure 1 Schematic diagram of the local cross-section structure; Figure 3 for Figure 2 Schematic diagram of the cross-sectional structure of the middle insulation bottom plate, insulation ring plate and heat insulation ring plate; Figure 4 for Figure 3 Middle and rear view structure diagram; Figure 5 for Figure 4 Schematic diagram of the structure of the medium cooling unit; Figure 6 for Figure 3 Schematic diagram of the structure of the middle insulation ring plate; Figure 7 for Figure 3 Schematic diagram of the partial cross-section structure of the middle insulation connecting pipe, insulation pipe and thermos bottle; Figure 8 for Figure 3 Schematic diagram of the structure of the automatic drainage unit; Fig. 9 Schematic diagram of the exhaust pipe installation position.

[0017] In the figure: 1. Insulation cylinder; 101. Opening and closing door; 102. Half ring plate; 103. Insulation top plate; 104. Exhaust pipe; 105. Pressure regulating pipe; 106. Insulation bottom plate; 2. Driving cylinder; 3. Upper pressure plate; 4. Carrying plate; 5. Insulation ring plate; 6. Insulation ring plate; 61. Hollow cylinder; 62. Extrusion spring; 63. Second extrusion rod; 7. Driving unit; 71. Insulation bottle; 72. Heat-conducting liner; 73. Insulation connecting pipe; 74. Heat-conducting plate; 75. Heat-conducting column; 76. Insulation pipe; 77. Lifting rod; 78. First extrusion rod; 79. Insulation inner pipe; 710. Flow channel outlet; 711. Cooling flow channel; 712. Guide plate; 8. Automatic drainage unit; 81. The second mounting frame; 82, column; 83, second magnetic isolation block; 84, third permanent magnet; 85, second spring; 86, rack; 87, V-shaped surface; 88, third spring; 89, first gear; 810, first valve; 811, fourth permanent magnet; 9, cooling unit; 91, first mounting frame; 92, crankshaft; 93, movable rod; 94, piston cylinder; 95, liquid inlet pipe; 96, one-way gear; 97, first spring; 98, gear rod; 99, first mounting ring; 910, first magnetic isolation block; 911, first permanent magnet; 912, liquid outlet pipe; 913, second permanent magnet; 914, exhaust pipe; 915, second valve; 916, gear plate; 10, protective ring plate. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0019] Example: Figure 1-3 As shown, a heat preservation cylinder 1 is provided with an exhaust pipe 104 and a pressure regulating pipe 105 on the outer wall, an upper pressure plate 3 and a bearing plate 4 located in the inner cavity of the heat preservation cylinder 1 and provided with a heater, the exhaust pipe 104 and the pressure regulating pipe 105 are provided with electric valves, a driving cylinder 2 is sealedly installed on the upper end of the heat preservation cylinder 1, and the movable end of the driving cylinder 2 is located in the inner cavity of the heat preservation cylinder 1 and connected to the upper pressure plate 3, the heat preservation cylinder 1 includes an insulation top plate 103 and an insulation bottom plate 106 and a semi-ring plate 102 arranged up and down, an opening and closing door 101 is rotatably provided on the semi-ring plate 102, the semi-ring plate 102 and the opening and closing door 101 are made of heat-conducting materials, and also includes an insulation ring plate 6 and a driving unit 7 for driving the insulation ring plate 6 to move up and down; The heat-insulating ring plate 6 is arranged in the annular accommodation cavity of the heat-insulating ring plate 5, the upper end of the heat-insulating ring plate 5 is sealedly connected to the heat-insulating ring plate 6, and the upper end of the annular accommodation cavity is communicated with the inner cavity of the heat-insulating cylinder 1; When it is necessary to heat the assembly of the seed crystal and the crystal support that have been squeezed and fixed, the driving unit 7 automatically drives the heat preservation ring plate 6 to move upward and makes the upper end of the heat preservation ring plate 6 contact with the heat preservation top plate 103. The assembly is located in the cavity surrounded by the heat preservation ring plate 6. The heat preservation ring plate 6, the heat preservation top plate 103 and the heat preservation bottom plate 106 constitute the heat preservation cavity. When the fixing glue between the seed crystal and the crystal support is completely solidified and needs to be cooled, the driving unit 7 automatically drives the thermal insulation ring plate 6 to move downward and retract into the annular accommodating cavity. At this time, there is no thermal insulation ring plate 6 to block the heat, and the assembly can radiate heat to the semi-ring plate 102 made of heat-conducting material and the opening and closing door 101 (which can be made of copper material) by means of radiation heat dissipation, and exchange heat with the outside world, thereby accelerating the slow cooling speed of the assembly without causing deformation or cracking of the seed crystal.

[0020] It should be noted that the annular insulation layer fixed on the semi-annular plate 102 and the opening and closing door 101 in the original insulation cylinder 1 is replaced with an insulation ring plate 6 that can move up and down.

[0021] As a preferred implementation in this embodiment, Figure 1-3 and Figure 7 As shown, the driving unit 7 includes a thermos bottle 71 filled with a low-boiling-point liquid, a heat-conducting plate 74, and two heat-insulating tubes 76 arranged outside the heat-insulating ring plate 5; The upper ends of the two insulation tubes 76 are sealed and connected to the insulation bottom plate 106, and the lower ends of the two insulation tubes 76 are communicated with the inner cavity of the thermos bottle 71. The inner cavity of the insulation tube 76 is sealed and slidably provided with a lifting rod 77, and the upper end of the lifting rod 77 is provided with a first extrusion rod 78 with a semicircular rod head; The thermos bottle 71 is connected to the heat-insulating bottom plate 106 through the heat-insulating connecting pipe 73. The inner cavity of the heat-insulating connecting pipe 73 is provided with a heat-conducting column 75, and the lower end of the heat-conducting column 75 extends into the low-boiling-point liquid. The upper end of the heat-conducting column 75 extends to the inner cavity of the heat-insulating cylinder 1 and is connected to the heat-conducting plate 74. Hollow tubes 61 are provided on the outer walls on both sides of the insulation ring plate 6, and extrusion springs 62 are installed in the hollow tubes 61, and the outer ends of the extrusion springs 62 are fixedly connected to the second extrusion rods 63. The second extrusion rods 63 are initially located above the corresponding first extrusion rods 78, and the outer ends of the second extrusion rods 63 are arranged as semicircular structures.

[0022] At the beginning, the assembly is placed on the carrier plate 4, and the upper pressure plate 3 is driven downward by the driving cylinder 2 to squeeze the assembly, and then the vacuum pump is used to evacuate the insulation cylinder 1. During the evacuation, as the gas inside the insulation cylinder 1 is continuously extracted, the internal air pressure becomes smaller, and the insulation bottle 71 and the insulation tube 76 begin to be at standard atmospheric pressure. Through the effect of the air pressure difference, the lifting rod 77 will rise as the air pressure in the insulation cylinder 1 decreases, and the first squeezing rod 78 at the upper end of the lifting rod 77 will contact the second squeezing rod 63 and drive the insulation ring plate 6 to move upward, finally making the upper end of the insulation ring plate 6 The heat-insulating top plate 103 is in contact with the heat-insulating ring plate 6. At this time, the lower end of the heat-insulating ring plate 6 is located in the annular accommodating cavity. At this time, the vacuum is stopped, and the heater is controlled to heat the assembly. After the temperature is heated to the temperature required for the fixation of the fixing glue, the heating is stopped. During the heating process, the heat-conducting plate 74 is continuously heated by radiation, and the heat is transferred to the low-boiling-point liquid through the heat-conducting column 75, and the low-boiling-point liquid is vaporized. The vaporization can increase the air pressure in the heat-insulating tube 76 and the thermos bottle 71, thereby causing the lifting rod 77 to continue to move upward, and the first extrusion rod 78 squeezes and causes the second extrusion rod 63 to compress the extrusion spring 62, and finally causes the first The extrusion rod 78 moves to the top of the second extrusion rod 63 (at this time, the heater just stops heating the assembly). At this time, the heat preservation ring plate 6 moves downward by its own gravity and finally retracts into the annular accommodation cavity. At this time, the assembly radiates heat. Due to the lack of the heat preservation ring plate 6 to isolate and block the heat, the assembly can transfer the heat to the semi-ring plate 102 and the opening and closing door 101 made of heat-conducting material by means of heat radiation, and exchange heat with the outside world, thereby accelerating the slow cooling speed of the assembly. At the same time, it will not cause deformation or cracking of the seed crystal. After the heat dissipation of the assembly is completed (at this time, the thermos bottle 71 The air pressure in the insulation tube 76 is liquefied, and the internal air pressure is reduced, but the first extrusion rod 78 does not move to the bottom of the second extrusion rod 63), and the valve on the pressure regulating tube 105 is opened. At this time, the inner cavity of the insulation cylinder 1 is consistent with the external atmospheric pressure, and the air pressure in the thermos bottle 71 and the insulation tube 76 is lower than the atmospheric pressure. At this time, the lifting rod 77 will move downward and eventually make the first extrusion rod 78 move to the bottom of the second extrusion rod 63 and return to its original position. The driving unit 7 can automatically drive the insulation ring plate 6 to move upward or downward to avoid heat loss when the assembly is heated, and also improve the heat dissipation efficiency of the assembly when dissipating heat.

[0023] It should be noted that: First, the heat conduction effect of the heat conduction plate 74 can be changed by controlling the surface area of ​​the heat conduction plate 74 and the distance between the upper pressure plate 3 and the supporting plate 4, so that when the assembly is heated to about 400 degrees Celsius, the heat conduction plate 74 transfers heat to the low-boiling liquid and vaporizes the low-boiling liquid, and the boiling point of the low-boiling liquid is controlled between 65 degrees Celsius and 80 degrees Celsius; Second, the heat conduction plate 74 is sealed and fixed to the insulation connecting pipe 73 to prevent the inner cavity of the insulation cylinder 1 from communicating with the inner cavity of the thermos bottle 71, thereby avoiding the inability to cause the lifting rod 77 to move upward during vacuum extraction; Third, a protective ring plate 10 is fixed to the lower end of the insulation bottom plate 106, and a bracket is installed at the lower end of the protective ring plate 10, and the drive unit 7 is arranged in the annular cavity of the protective ring plate 10.

[0024] As a preferred implementation in this embodiment, it also includes a cooling unit 9, one end of which is installed on the insulation ring plate 5, and the other end is installed on the insulation ring plate 6. When the assembly is dissipating heat, the low-boiling point liquid in the thermos bottle 71 can be cooled by the cooling unit.

[0025] When the assembly is dissipating heat, it will also continuously radiate heat to the heat conducting plate 74, while the heat dissipation effect of the heat preservation tube 76 and the thermos bottle 71 itself is poor, which may easily lead to the first extrusion rod 78 being unable to move to the bottom of the second extrusion rod 63 after the assembly has finished dissipating heat and the valve on the pressure regulating tube 105 is opened, and thus being unable to return to its original position normally (which prolongs the interval time for heating the next assembly). The reason is that the gas in the thermos bottle 71 and the heat preservation tube 76 is not completely liquefied, so a cooling unit is provided to accelerate the liquefaction of the internal gas.

[0026] As a preferred implementation in this embodiment, Figure 3-6 As shown, the cooling unit 9 includes a first mounting frame 91 mounted at the lower end of the heat-insulating ring plate 5, a gear rod 98 is slidably provided on the first mounting frame 91, a first magnetic isolation block 910 is fixed on the upper end of the gear rod 98, a first permanent magnet 911 is installed in the groove at the upper end of the first magnetic isolation block 910, a second permanent magnet 913 is provided at the lower end of the heat-insulating ring plate 6 at a position corresponding to the first permanent magnet 911, the first permanent magnet 911 and the second permanent magnet 913 have the same magnetic poles at the opposite ends, and a fixed sleeve is provided on the gear rod 98. A first mounting ring 99, and the first mounting ring 99 is connected to the first mounting frame 91 through a first spring 97, a crankshaft 92 is rotatably provided at the lower end of the first mounting frame 91, and a one-way gear 96 is installed on the crankshaft 92 and is gear-connected with a gear rod 98, a movable rod 93 is installed on the crankshaft 92, and a piston is fixedly provided at the lower end of the movable rod 93, and the piston is sealed and slidably provided in a piston cylinder 94, and a liquid inlet pipe 95 with a liquid inlet check valve and a liquid outlet pipe 912 with a liquid outlet check valve are provided on the piston cylinder 94; The heat preservation pipe 76 includes a heat preservation outer pipe and a heat conduction inner pipe 79 arranged inside the heat preservation outer pipe. The lower end of the lifting rod 77 is slidably arranged in the inner cavity of the heat conduction inner pipe 79. A cooling channel 711 is formed between the heat preservation outer pipe and the heat conduction inner pipe 79. A channel outlet 710 is arranged at the bottom of the cooling channel 711. The upper end of the liquid outlet pipe 912 is communicated with the cooling channel 711. The thermos bottle 71 includes a heat-insulating shell and a heat-conducting liner 72. The low-boiling-point liquid is filled in the sealed heat-conducting liner 72. A water storage cavity is formed between the inner wall of the heat-insulating shell and the outer wall of the heat-conducting liner 72. The inner cavities of the two heat-conducting inner tubes 79 are connected to the inner cavity of the heat-conducting inner liner 72, the flow channel outlet 710 is connected to the water storage cavity, and a drain pipe connected to the water storage cavity is provided at the lower end of the insulation shell, and a first valve 810 is installed on the drain pipe.

[0027] Before use, a bucket filled with water at room temperature is placed below the thermos bottle 71, the lower end of the liquid inlet pipe 95 extends into the water, and the liquid discharge pipe is located above the bucket; When the heat preservation ring plate 6 moves downward by its own gravity, the magnetic force between the first permanent magnet 911 and the second permanent magnet 913 causes the gear rod 98 to move downward, and the crankshaft 92 is driven to rotate by the one-way gear 96. The rotation of the crankshaft 92 can cause the piston to pump the room temperature water in the bucket into the cooling channel 711 of the heat preservation tube 76, and finally flow into the water storage chamber, cooling the gas in the heat preservation bottle 71 and the heat preservation tube 76, which is conducive to the rapid liquefaction of the low boiling point liquid inside, and then the gas in the heat preservation bottle 71 and the heat preservation tube 76 is completely liquefied before the assembly is taken out. After the valve on the pressure regulating tube 105 is opened, the first extrusion rod 78 moves quickly to the bottom of the second extrusion rod 63; When the first extrusion rod 78 drives the insulation ring plate 6 to move upward, the first permanent magnet 911 can be driven to return to its original position through the elastic force of the first spring 97. At the end of this process, the one-way gear 96 cannot drive the crankshaft 92 to rotate, that is, water cannot be added to the water storage chamber and the cooling channel 711 when the insulation ring plate 6 moves upward.

[0028] It should be noted that: 1. The cooling unit 9 can accelerate the liquefaction of the gas and can also cushion the falling insulation ring plate 6 through the magnetic effect; 2. The water in the water storage chamber can be released through the first valve 810; 3. The liquid outlet pipe 912 is made of insulation material.

[0029] As a preferred implementation in this embodiment, it also includes an automatic drainage unit 8 installed at the lower end of the insulation ring plate 5, which automatically drains water after the low-boiling point liquid in the thermos bottle 71 is cooled.

[0030] The water absorbed by the thermos bottle 71 is automatically discharged, thus avoiding manual operation and increasing labor intensity.

[0031] As a preferred implementation in this embodiment, Figure 3 , Figure 7 and Figure 8 As shown, the automatic drainage unit 8 includes a second mounting frame 81 mounted on the outer wall of the heat insulation ring plate 5, a column 82 is slidably provided on the second mounting frame 81, and a second mounting ring and a second magnetic isolation block 83 are fixed on the column 82, a third permanent magnet 84 is provided in a groove at the upper end of the second magnetic isolation block 83, the third permanent magnet 84 is located directly below the corresponding jacking rod 77, a fourth permanent magnet 811 is installed at the lower end of the jacking rod 77, the third permanent magnet 84 and the fourth permanent magnet 811 have the same magnetic poles at opposite ends, and the second mounting ring is connected to the second mounting frame 81 through a second spring 85; The second mounting frame 81 is slidably connected with a rack 86, and the right end of the rack 86 is gear-engaged with a first gear 89 provided on the regulating rod of the first valve 810, and the upper end of the rack 86 is provided with a V-shaped surface 87, and the left end of the rack 86 is connected to the second mounting frame 81 through a third spring 88; Initially, the lower end of the column 82 abuts against the lowest point of the V-shaped surface 87 .

[0032] After the valve on the pressure regulating pipe 105 is opened, the lifting rod 77 moves downward and returns to its original position due to the pressure difference. During this process, the descending fourth permanent magnet 811 and the third permanent magnet 84 generate a repulsive force and cause the column 82 to move downward and squeeze the V-shaped surface 87, so that the rack 86 moves rightward, and then the first gear 89 rotates, the first valve 810 is opened, and the water in the water storage chamber flows back to the water bucket, realizing the recycling of cooling water; When the lifting rod 77 moves upward, the repulsive force is released, and the column 82 returns to its original position through the elastic force of the second spring 85, and the rack 86 returns to its original position through the elastic force of the third spring 88. At this time, the first valve 810 is in a closed state.

[0033] It should be noted that since the water is released when the lifting rod 77 moves downward after the valve on the pressure regulating pipe 105 is opened, there is a period of time between the beginning of water addition, that is, the cooling water will stay in the water storage chamber and the cooling flow channel 711 for a period of time, which is conducive to the complete liquefaction of the gas.

[0034] As a preferred implementation in this embodiment, it also includes an air pressure balancing unit, one end of which is installed on the corresponding insulation pipe 76, and the other end is installed on the first mounting ring 99. When water is added to the cooling channel 711, it is used to balance the internal and external air pressures of the cooling channel 711.

[0035] The purpose is to avoid the increase of air pressure inside the cooling channel 711 when adding water into the cooling channel 711, which would result in a large amount of cooling water being unable to be added.

[0036] As a preferred implementation in this embodiment, Figure 7 and Fig. 9 As shown, the air pressure balance unit includes a tooth plate 916 fixedly arranged on the corresponding first mounting ring 99 and an exhaust pipe 914 whose air inlet end is connected to the inner cavity of the corresponding cooling channel 711, a second valve 915 is installed on the exhaust pipe 914, and a second gear is installed on the adjusting rod of the second valve 915, and the second gear is initially located above the tooth plate 916.

[0037] When the heat preservation ring plate 6 moves downward, the gear rod 98 moves downward and the gear plate 916 arranged thereon will connect with the second gear and drive it to rotate, thereby opening the second valve 915, so that the water storage cavity and the inner cavity of the cooling flow channel 711 are connected to the outside, so as to achieve the purpose of consistent internal and external air pressure; When the heat-insulating ring plate 6 moves upward, the tooth plate 916 drives the second gear to rotate in the opposite direction, and the second valve 915 is closed.

[0038] It should be noted that the exhaust pipe 914 is made of heat-insulating material, and the upper end of the exhaust pipe 914 is always located directly above the liquid level in the cooling channel 711 .

[0039] As a preferred implementation in this embodiment, a guide plate 712 is provided in the cooling flow channel 711 , and the guide plate 712 is spiral and extends downward.

[0040] The water flow can be made to move along a spiral path, thereby extending the water flow in the insulation tube 76 and increasing the heat absorption contact area, thereby fully cooling the internal gas.

[0041] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A vacuum hot pressing furnace for seed crystal bonding, comprising a heat preservation cylinder (1) with an exhaust pipe (104) and a pressure regulating pipe (105) on the outer wall, an upper pressure plate (3) located in the inner cavity of the heat preservation cylinder (1) and provided with a heater, and a supporting plate (4), the exhaust pipe (104) and the pressure regulating pipe (105) are both provided with electric valves, a driving cylinder (2) is sealedly mounted on the upper end of the heat preservation cylinder (1), and the movable end of the driving cylinder (2) is located in the inner cavity of the heat preservation cylinder (1) and connected to the upper pressure plate (3), the heat preservation cylinder (1) comprises an insulation top plate (103) and an insulation bottom plate (106) arranged in an upper and lower manner, and a semi-ring plate (102), an opening and closing door (101) is rotatably provided on the semi-ring plate (102), characterized in that: The semi-ring plate (102) and the opening and closing door (101) are made of heat-conducting material, and further include a heat-insulating ring plate (6) and a driving unit (7) for driving the heat-insulating ring plate (6) to move up and down; The heat-insulating ring plate (6) is arranged in the annular accommodating cavity of the heat-insulating ring plate (5), the upper end of the heat-insulating ring plate (5) is sealedly connected to the heat-insulating ring plate (6), and the upper end of the annular accommodating cavity is in communication with the inner cavity of the heat-insulating cylinder (1); When it is necessary to heat the assembly of the seed crystal and the crystal support that have been squeezed and fixed, the driving unit (7) automatically drives the heat-insulating ring plate (6) to move upward and causes the upper end of the heat-insulating ring plate (6) to contact the heat-insulating top plate (103), and the assembly is located in a cavity surrounded by the heat-insulating ring plate (6), and the heat-insulating ring plate (6), the heat-insulating top plate (103) and the heat-insulating bottom plate (106) constitute a heat-insulating cavity; When the fixing glue between the seed crystal and the crystal tray has been solidified and needs to be cooled, the driving unit (7) automatically drives the heat-insulating ring plate (6) to move downward and retract into the annular accommodation cavity, and the assembly quickly dissipates heat outward by means of radiation heat dissipation.

2. The vacuum hot pressing furnace for seed crystal bonding according to claim 1, characterized in that: The driving unit (7) comprises a thermos bottle (71) filled with a low-boiling-point liquid, a heat-conducting plate (74), and two heat-insulating tubes (76) arranged outside the heat-insulating ring plate (5); The upper ends of the two insulation tubes (76) are sealed and connected to the insulation bottom plate (106), and the lower ends of the two insulation tubes (76) are communicated with the inner cavity of the insulation bottle (71). The inner cavity of the insulation tube (76) is sealed and slidably provided with a lifting rod (77), and the upper end of the lifting rod (77) is provided with a first extrusion rod (78) with a rod head of a semicircular structure; The thermos bottle (71) is connected to the thermal insulation bottom plate (106) via a thermal insulation connecting tube (73); a heat-conducting column (75) is provided in the inner cavity of the thermal insulation connecting tube (73); the lower end of the heat-conducting column (75) extends into the low-boiling-point liquid; the upper end of the heat-conducting column (75) extends into the inner cavity of the thermal insulation cylinder (1) and is connected to the heat-conducting plate (74); Hollow cylinders (61) are provided on the outer walls of both sides of the heat-insulating ring plate (6), and extrusion springs (62) are installed in the hollow cylinders (61), and the outer ends of the extrusion springs (62) are fixedly connected to the second extrusion rods (63), and the second extrusion rods (63) are initially located above the first extrusion rods (78), and the outer ends of the second extrusion rods (63) are arranged in a semicircular structure.

3. The vacuum hot pressing furnace for seed crystal bonding according to claim 2, characterized in that: It also comprises a cooling unit (9), one end of which is mounted on the heat-insulating ring plate (5) and the other end of which is mounted on the heat-insulating ring plate (6). When heat is dissipated from the assembly, the low-boiling-point liquid in the thermos bottle (71) can be cooled by the cooling unit (9).

4. The vacuum hot pressing furnace for seed crystal bonding according to claim 3, characterized in that: The cooling unit (9) comprises a first mounting frame (91) mounted on the lower end of the heat-insulating ring plate (5); a gear rod (98) is slidably provided on the first mounting frame (91); a first magnetic isolation block (910) is fixed on the upper end of the gear rod (98); a first permanent magnet (911) is installed in a groove at the upper end of the first magnetic isolation block (910); a second permanent magnet (913) is provided at a position at the lower end of the heat-insulating ring plate (6) corresponding to the first permanent magnet (911); the opposite end magnetic poles of the first permanent magnet (911) and the second permanent magnet (913) are the same; a first permanent magnet (913) is fixedly sleeved on the gear rod (98); a mounting ring (99), wherein the first mounting ring (99) is connected to the first mounting frame (91) via a first spring (97); a crankshaft (92) is rotatably provided at the lower end of the first mounting frame (91); a one-way gear (96) toothed with the gear rod (98) is installed on the crankshaft (92); a movable rod (93) is installed on the crankshaft (92); a piston is fixedly provided at the lower end of the movable rod (93); the piston is sealingly slidably provided in a piston cylinder (94); a liquid inlet pipe (95) with a liquid inlet check valve and a liquid outlet pipe (912) with a liquid outlet check valve are provided on the piston cylinder (94); The thermal insulation pipe (76) comprises a thermal insulation outer pipe and a heat-conducting inner pipe (79) arranged inside the thermal insulation outer pipe, the lower end of the lifting rod (77) is slidably arranged in the inner cavity of the heat-conducting inner pipe (79), a cooling flow channel (711) is formed between the thermal insulation outer pipe and the heat-conducting inner pipe (79), a flow channel outlet (710) is arranged at the bottom of the cooling flow channel (711), and the upper end of the liquid outlet pipe (912) is communicated with the cooling flow channel (711); The thermos bottle (71) comprises a heat-insulating shell and a heat-conducting liner (72); the low-boiling-point liquid is filled in the sealed heat-conducting liner (72); a water storage cavity is formed between the inner wall of the heat-insulating shell and the outer wall of the heat-conducting liner (72); The inner cavities of the two heat-conducting inner tubes (79) are both in communication with the inner cavity of the heat-conducting inner liner (72); the flow channel outlet (710) is in communication with the water storage cavity; a drainage pipe in communication with the water storage cavity is provided at the lower end of the heat-insulating shell, and a first valve (810) is installed on the drainage pipe.

5. The vacuum hot pressing furnace for seed crystal bonding according to claim 4, characterized in that: It also includes an automatic drainage unit (8) installed at the lower end of the heat-insulating ring plate (5) and automatically draining water after cooling the low-boiling-point liquid in the thermos bottle (71).

6. The vacuum hot pressing furnace for seed crystal bonding according to claim 5, characterized in that: The automatic drainage unit (8) comprises a second mounting frame (81) mounted on the outer wall of the heat insulation ring plate (5), a column (82) is slidably provided on the second mounting frame (81), and a second mounting ring and a second magnetic isolation block (83) are fixed on the column (82), a third permanent magnet (84) is provided in a groove at the upper end of the second magnetic isolation block (83), the third permanent magnet (84) is located directly below the corresponding lifting rod (77), a fourth permanent magnet (811) is installed at the lower end of the lifting rod (77), the third permanent magnet (84) and the fourth permanent magnet (811) have the same magnetic poles at opposite ends, and the second mounting ring is connected to the second mounting frame (81) via a second spring (85); The second mounting frame (81) is slidably engaged with a rack (86), and the right end of the rack (86) is gear-engaged with a first gear (89) provided on the regulating rod of the first valve (810), the upper end of the rack (86) is provided with a V-shaped surface (87), and the left end of the rack (86) is connected to the second mounting frame (81) via a third spring (88); At the beginning, the lower end of the column (82) contacts the lowest point of the V-shaped surface (87).

7. The vacuum hot pressing furnace for seed crystal bonding according to claim 4, characterized in that: It also includes an air pressure balancing unit, one end of which is mounted on the corresponding insulation pipe (76) and the other end of which is mounted on the first mounting ring (99), and is used to balance the internal and external air pressures of the cooling flow channel (711) when water is added to the cooling flow channel (711).

8. The vacuum hot pressing furnace for seed crystal bonding according to claim 7, characterized in that: The air pressure balance unit comprises a toothed plate (916) fixedly arranged on the first mounting ring (99) and an exhaust pipe (914) whose air inlet end is in communication with the inner cavity of the cooling channel (711), a second valve (915) being installed on the exhaust pipe (914), and a second gear being installed on the regulating rod of the second valve (915), and the second gear being initially located above the toothed plate (916).

9. The vacuum hot pressing furnace for seed crystal bonding according to claim 4, characterized in that: A guide plate (712) is provided in the cooling flow channel (711), and the guide plate (712) is spiral-shaped and extends downward.

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