Device for testing chemical corrosion resistance of resin cured film

Abstract

The invention provides a resin cured film chemical corrosion resistance testing device which comprises a control box, a heat dissipation assembly is fixed to the top of the control box, a testing box is fixed to the edge side of the control box, a cavity is formed in the testing box, a cover plate is movably installed in the cavity, a limiting pipe is fixed to the cover plate, and the limiting pipe is fixed to the top of the control box. And a movable column is movably mounted in the limiting pipe. When the device for testing the chemical corrosion resistance of the resin cured film is used, a movable column pushes a movable seat to move downwards through a fixed rod, the film moves in a solution after the movable seat moves downwards, the solution is in contact with different film positions through impact generated by movement, and the contact position and the solution are changed through contact; in addition, the movable columns drive the fixed rods to move upwards, the fixed rods drive the two ends of the resin film to be pulled out of the movable blocks, and the resin film is suspended after being pulled out, so that the solution drips and is discharged from the resin film.

Description

Technical Field

[0001] The invention relates to the field of corrosion testing equipment, in particular to a device for testing chemical corrosion resistance of a resin cured film. Background Art

[0002] Resin films with excellent chemical corrosion resistance have been widely used in interlayer insulation films and surface protection films of semiconductor elements in electronic devices. When evaluating the chemical corrosion resistance of resin cured films, it was found that the film surface cracks and film thickness fluctuations are prone to occur. These two situations can occur simultaneously or independently, so it is necessary to perform corrosion tests on resin cured films.

[0003] According to a resin cured film chemical corrosion resistance test device disclosed in the existing patent document with publication number CN217819918U, the device comprises an anti-evaporation cover, a sample rack, a solvent immersion tank, and a screen-display automatic temperature control water bath heating tank. The anti-evaporation cover comprises a solvent immersion tank cover and a screen-display automatic temperature control water bath heating tank cover. The sample rack comprises two side legs, a sample tank and a sample clamp. When the technical solution is in use, in the screen-display automatic temperature control water bath heating tank, the thermocouple, solid-state relay, and PID automatic temperature controller constitute a control circuit for the on-off and power output of the above-mentioned series circuit, so as to realize accurate control of the temperature in the water bath heating tank. With respect to the above-mentioned technical solution, although the solution realizes accurate control of the heating temperature, it is impossible to realize the activity of the membrane and contact with the solution during the corrosion test, and the solution on the membrane cannot be quickly removed at a later stage, which is inconvenient when used. Summary of the invention

[0004] In view of the shortcomings of the prior art, the purpose of the present invention is to provide a resin cured film chemical corrosion resistance testing device to solve the problems raised in the above-mentioned background technology. The present invention has a novel structure. When in use, the movable column pushes the movable seat to move downward through the fixed rod. After the movable seat moves downward, the film moves in the solution. The impact generated by the movement causes the solution to contact the positions of different membranes. The contact realizes the change of the contact position and the solution, so that the resin film actively contacts the solution for corrosion testing. In addition, the movable column drives the fixed rod to move upward, and the fixed rod drives the two ends of the resin film to be pulled out from the movable block. After being pulled out, it is suspended in the air to realize the dripping and discharge of the solution from the resin film.

[0005] In order to achieve the above-mentioned purpose, the present invention is implemented through the following technical scheme: a resin cured film chemical corrosion resistance testing device, comprising a control box, a heat dissipation component is fixed on the top of the control box, a test box is fixed on the side of the control box, a cavity is opened inside the test box, a cover plate is movably installed inside the cavity, a limiting tube is fixed on the cover plate, a movable column is movably installed inside the limiting tube, an observation window and a discharge pipe are fixedly installed on the side of the test box, and a movable plate is movably installed on the top of the test box.

[0006] Furthermore, a display mechanism is fixedly installed on the side of the control box, a button is installed on the bottom of the display mechanism, an air inlet is opened at the bottom of the control box, and a filter plate is fixedly installed inside the air inlet.

[0007] Furthermore, an opening is formed on the inner wall of the cavity, a shielding plate is movably installed inside the opening, the shielding plate is fixedly installed on the movable plate, and the opening is connected to the inner wall of the control box.

[0008] Furthermore, a box body is fixed inside the cavity, a support base is fixed at the bottom of the box body, the support base is fixedly installed inside the test box, and a heating mechanism is fixedly installed between the support base and the box body.

[0009] Furthermore, a positioning column is fixed inside the box body, a movable seat is movably installed on the positioning column, a positioning hole is opened on the movable seat, the positioning hole is installed on the positioning column, and a discharge port is opened at the bottom of the box body, and the discharge port is connected to the discharge pipe.

[0010] Furthermore, the movable seat is provided with an opening and a fixing groove, a fixing rod is movably installed inside the fixing groove, the fixing rod is fixedly installed at one end of the movable column, a movable block is movably installed on the movable seat, and a limiting plate is movably installed on the side of the movable block.

[0011] Furthermore, a movable rod is fixed on the limiting plate, a mounting hole is opened on the movable block, one end of the movable rod is movably installed inside the mounting hole, a fixing hole is opened on the movable seat, a fixing column is fixed on the movable seat, and one end of the fixing column is movably installed on the inner wall of the cover plate.

[0012] Furthermore, a slide groove is opened on the inner wall of the box body, a support mechanism is fixed inside the slide groove, a slider is fixed at one end of the support mechanism, and one end of the slider is in movably contact with the side of the movable seat.

[0013] Furthermore, a limiting groove is provided inside the limiting tube, a reset mechanism is fixed inside the limiting groove, a limiting block is fixed at one end of the reset mechanism, and one end of the limiting block is fixed on the movable column.

[0014] Furthermore, a connecting column is fixed to the bottom of the movable block, a tension mechanism is fixed to one end of the connecting column, and the connecting column is installed inside the fixing hole through the tension mechanism.

[0015] Beneficial effects of the present invention:

[0016] 1. A resin cured film chemical corrosion resistance testing device, when in use, the movable column pushes the movable seat to move downward through the fixed rod, and the movable seat moves downward, and the film moves in the solution. The impact generated by the movement makes the solution contact with the position of different films, and the contact realizes the change of the contact position and the solution, so that the resin film actively contacts the solution for corrosion testing. In addition, the movable column drives the fixed rod to move upward, and the fixed rod drives the two ends of the resin film to be pulled out from the movable block. After being pulled out, it is suspended in the air to realize the dripping and discharge of the solution from the resin film.

[0017] 2. A device for testing the chemical corrosion resistance of a resin cured film. The heat dissipation component is used to cool the controller inside the control box. In addition, the movable plate drives the shielding plate inside the opening to move. The shielding plate loses its seal on the opening, and the high temperature inside the cavity is quickly discharged to the outside, which is convenient for cooling the solution inside the box. The movable block limits and fixes the two ends of the resin film under the pull of the tension mechanism. The limit plate moves to both sides to limit the two ends of the resin films of different widths to meet the use in different situations. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of a device for testing chemical corrosion resistance of a resin cured film according to the present invention;

[0019] Figure 2 It is a schematic structural diagram of a box of a resin cured film chemical corrosion resistance testing device of the present invention;

[0020] Figure 3 It is a structural schematic diagram of a movable seat of a resin cured film chemical corrosion resistance testing device of the present invention;

[0021] Figure 4 It is a structural schematic diagram of a movable block of a device for testing chemical corrosion resistance of a resin cured film according to the present invention;

[0022] Figure 5 A schematic diagram of a side cross-sectional structure of a box of a device for testing chemical corrosion resistance of a cured resin film according to the present invention;

[0023] Figure 6 It is a schematic diagram of the side cross-sectional structure of a cover plate and a movable seat of a device for testing chemical corrosion resistance of a resin cured film according to the present invention;

[0024] In the figure: 1. control box; 2. display mechanism; 3. button; 4. heat dissipation component; 5. movable plate; 6. test box; 7. cavity; 8. cover plate; 9. limit tube; 10. movable column; 11. observation window; 12. discharge pipe; 13. opening; 14. box body; 15. support seat; 16. fixed column; 17. movable seat; 18. positioning column; 19. positioning hole; 20. opening; 21. movable block; 22. limit plate; 23. fixed groove; 24. fixed rod; 25. connecting column; 26. tension mechanism; 27. slide groove; 28. support mechanism; 29. ​​slider; 30. heating mechanism; 31. discharge port; 32. limit groove; 33. reset mechanism; 34. limit block; 35. movable rod. DETAILED DESCRIPTION

[0025] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further explained below in conjunction with specific implementation methods.

[0026] See also Figures 1 to 6 The present invention provides a technical solution: a device for testing chemical corrosion resistance of a resin cured film, comprising a control box 1, a heat dissipation component 4 is fixed on the top of the control box 1, a test box 6 is fixed on the side of the control box 1, a cavity 7 is opened inside the test box 6, a cover plate 8 is movably installed inside the cavity 7, a limiting tube 9 is fixed on the cover plate 8, a movable column 10 is movably installed inside the limiting tube 9, an observation window 11 and a discharge pipe 12 are fixedly installed on the side of the test box 6, a movable plate 5 is movably installed on the top of the test box 6, the movable plate 5 moves to open the opening 13, and the opening realizes synchronous cooling of the control box 1 and the inside of the cavity 7.

[0027] In this embodiment, a display mechanism 2 is fixedly installed on the side of the control box 1. The display mechanism 2 is a display screen. The display screen displays the temperature of the solution inside the box 14 and the time of corrosion immersion. A button 3 is installed at the bottom of the display mechanism 2. An air inlet is opened at the bottom of the control box 1. A filter plate is fixedly installed inside the air inlet. An opening 13 is opened on the inner wall of the cavity 7. A shielding plate is movably installed inside the opening 13. The shielding plate is fixedly installed on the movable plate 5. The opening 13 is connected to the inner wall of the control box 1. A box 14 is fixed inside the cavity 7. A support seat 15 is fixed at the bottom of the box 14. The support seat 15 is fixedly installed inside the test box 6. A heating mechanism 30 is fixedly installed between the support seat 15 and the box 14. The heating mechanism 30 is composed of an electric heating wire. The electric heating wire generates high temperature when energized, and the high temperature is transmitted upward to the inside of the box 14 to heat the solution.

[0028] In this embodiment, a positioning column 18 is fixed inside the box body 14, and a movable seat 17 is movably installed on the positioning column 18. A positioning hole 19 is opened on the movable seat 17, and the positioning hole 19 is installed on the positioning column 18. A discharge port 31 is opened at the bottom of the box body 14, and the discharge port 31 is connected to the discharge pipe 12. An opening 20 and a fixed groove 23 are opened on the movable seat 17. A fixing rod 24 is movably installed inside the fixing groove 23. The fixing rod 24 is fixedly installed at one end of the movable column 10. A movable block 21 is movably mounted on the movable seat 17, a limit plate 22 is movably mounted on the side of the movable block 21, a movable rod 35 is fixed on the limit plate 22, a mounting hole is opened on the movable block 21, one end of the movable rod 35 is movably mounted inside the mounting hole, a fixing hole is opened on the movable seat 17, a fixing column 16 is fixed on the movable seat 17, one end of the fixing column 16 is movably mounted on the inner wall of the cover plate 8, the fixing column 16 is connected to the cover plate 8, and the movable seat 17 is removed upward by the movement of the cover plate 8 at a later stage.

[0029] In this embodiment, a slide groove 27 is opened on the inner wall of the box body 14, and a supporting mechanism 28 is fixed inside the slide groove 27. A slider 29 is fixed at one end of the supporting mechanism 28, and one end of the slider 29 is in contact with the side of the movable seat 17. A limiting groove 32 is opened inside the limiting tube 9, and a reset mechanism 33 is fixed inside the limiting groove 32. A limiting block 34 is fixed at one end of the reset mechanism 33, and one end of the limiting block 34 is fixed on the movable column 10. A connecting column 25 is fixed at the bottom of the movable block 21, and a tension mechanism 26 is fixed at one end of the connecting column 25. The connecting column 25 is installed inside the fixing hole through the tension mechanism 26. The supporting mechanism 28, the reset mechanism 33 and the tension mechanism 26 are all spring structures, and the slider 29 cooperates with the supporting mechanism 28 to push the movable seat 17 to rise and return to its original position.

[0030] When the device is in use, firstly, a solution is injected from the discharge pipe 12 into the interior of the box 14, and the solution is an inorganic acid-base solution. After the solution enters the interior of the box 14, the heating mechanism 30 is started, and the heating mechanism 30 heats the solution, and the resin solution is coated on the surface of the silicon substrate to form a uniform resin film. The resin film is exposed and developed to form a plurality of neatly arranged structural units with completely identical patterns. The substrate is cured in a nitrogen-filled oven, and then each structural unit is divided by a laser scriber to form a resin film of uniform size after division. The resin film is placed on the movable seat 17, and the two ends of the resin film are installed at the bottom of the movable block 21. The movable block 21 is moved upward, and the movable block 21 is moved upward through the connecting column 25 and the tension mechanism 26. After the movable block 21 moves upward, one end of the resin film is placed on the bottom of the movable block 21, and the movable block 21 is squeezed and fixed on the resin film through the tension of the tension mechanism 26. When the width of the resin film is wider, the limit plate 22 is moved on the movable block 21 through the movable rod 35 to expand the limit area, and the resin films of different widths are squeezed and fixed. After the resin film is squeezed and fixed, the cover plate 8 is installed in the cavity 7, and the cover plate 8 is installed on the positioning column 18 through the positioning hole 19 through the fixing column 16, and the side of the movable seat 17 is installed on the slider 29. At the top, when the resin film is immersed in the solution inside the box 14, the movable column 10 pushes the fixed rod 24 and the movable seat 17 to move downward. After the movable seat 17 moves downward, the support mechanism 28 pushes the slider 29 and the movable seat 17 to move upward. The up and down movement of the movable seat 17 makes the resin film actively contact with the solution to complete the corrosion test. After the test is completed, the movable column 10 is moved upward, and the fixed rod 24 moves upward from the bottom at the center of the resin film to pull the resin film out of the movable seat 17. The two ends of the resin film are separated from the movable block 21. After separation, the fixed rod 24 drives the resin film to be taken out of the solution. After the resin film is taken out, it is suspended and placed in the box 14 The top of the test box 14 is moved to the top of the test box 14, and the solution adhered to the resin film is dripped downward and discharged. After the resin film has been stationary for a period of time, the cover plate 8 drives the movable seat 17 to be taken out from the inside of the box body 14. After being taken out, the resin film is subjected to subsequent inspection and processing. When it is necessary to cool the solution inside the box body 14, the movable plate 5 moves to drive the shielding plate to open the opening 13 position, and the heat dissipation component 4 works to discharge the high temperature inside the control box 1 and the test box 6 to the outside, and the remaining solution is discharged from the discharge pipe 12. The resin film is sliced ​​at a later stage, and the interface bonding between the film and the substrate is observed. For the film thickness test, the case of no cracking is judged as qualified, and the case of cracking, non-bonding to the substrate, and film thickness loss is judged as unqualified.

[0031] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. It is obvious to those skilled in the art that the present invention is not limited to the details of the above exemplary embodiments, and the present invention can be implemented in other specific forms without departing from the spirit or basic features of the present invention. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the present invention is defined by the attached claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims are included in the present invention. Any figure mark in the claims should not be regarded as limiting the claims involved.

[0032] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A device for testing the chemical corrosion resistance of a resin cured film, comprising a control box (1), characterized in that: A heat dissipation component (4) is fixed on the top of the control box (1), a test box (6) is fixed on the side of the control box (1), a cavity (7) is opened inside the test box (6), a cover plate (8) is movably installed inside the cavity (7), a limit tube (9) is fixed on the cover plate (8), a movable column (10) is movably installed inside the limit tube (9), an observation window (11) and a discharge pipe (12) are fixedly installed on the side of the test box (6), and a movable plate (5) is movably installed on the top of the test box (6).

2. The device for testing chemical corrosion resistance of cured resin films according to claim 1, characterized in that: A display mechanism (2) is fixedly mounted on the side of the control box (1), a button (3) is mounted on the bottom of the display mechanism (2), an air inlet hole is opened at the bottom of the control box (1), and a filter plate is fixedly mounted inside the air inlet hole.

3. The device for testing chemical corrosion resistance of cured resin films according to claim 1, characterized in that: An opening (13) is formed on the inner wall of the cavity (7), a shielding plate is movably mounted inside the opening (13), the shielding plate is fixedly mounted on the movable plate (5), and the opening (13) is connected to the inner wall of the control box (1).

4. The device for testing chemical corrosion resistance of cured resin films according to claim 1, characterized in that: A box body (14) is fixed inside the cavity (7), a support seat (15) is fixed at the bottom of the box body (14), the support seat (15) is fixedly installed inside the test box (6), and a heating mechanism (30) is fixedly installed between the support seat (15) and the box body (14).

5. The device for testing chemical corrosion resistance of cured resin films according to claim 4, characterized in that: A positioning column (18) is fixed inside the box body (14), a movable seat (17) is movably mounted on the positioning column (18), a positioning hole (19) is formed on the movable seat (17), and the positioning hole (19) is mounted on the positioning column (18), and a discharge port (31) is formed at the bottom of the box body (14), and the discharge port (31) is connected to a discharge pipe (12).

6. The device for testing chemical corrosion resistance of cured resin films according to claim 5, characterized in that: The movable seat (17) is provided with an opening (20) and a fixing groove (23); a fixing rod (24) is movably mounted inside the fixing groove (23); the fixing rod (24) is fixedly mounted on one end of the movable column (10); a movable block (21) is movably mounted on the movable seat (17); a limiting plate (22) is movably mounted on the side of the movable block (21).

7. The device for testing chemical corrosion resistance of cured resin films according to claim 6, characterized in that: A movable rod (35) is fixed on the limit plate (22), a mounting hole is formed on the movable block (21), one end of the movable rod (35) is movably mounted inside the mounting hole, a fixing hole is formed on the movable seat (17), a fixing column (16) is fixed on the movable seat (17), and one end of the fixing column (16) is movably mounted on the inner wall of the cover plate (8).

8. The device for testing chemical corrosion resistance of cured resin films according to claim 4, characterized in that: A slide groove (27) is provided on the inner wall of the box body (14), a support mechanism (28) is fixed inside the slide groove (27), a slider (29) is fixed at one end of the support mechanism (28), and one end of the slider (29) is in active contact with the side of the movable seat (17).

9. The device for testing chemical corrosion resistance of cured resin films according to claim 1, characterized in that: A limiting groove (32) is formed inside the limiting tube (9), a reset mechanism (33) is fixed inside the limiting groove (32), a limiting block (34) is fixed at one end of the reset mechanism (33), and one end of the limiting block (34) is fixed on the movable column (10).

10. The device for testing chemical corrosion resistance of cured resin films according to claim 7, characterized in that: A connecting column (25) is fixed to the bottom of the movable block (21), a tension mechanism (26) is fixed to one end of the connecting column (25), and the connecting column (25) is installed inside the fixing hole through the tension mechanism (26).

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