A kind of AlGaNGaN HEMT device performance testing device and its use method

Abstract

The present invention relates to the field of semiconductor testing technology, and specifically to an AlGaNGaN HEMT device performance testing device and a method for using the same, comprising a machine, a bracket fixedly connected to the upper surface of the machine, a testing mechanism arranged on the upper front portion of the bracket, a detection table arranged in the middle of the upper surface of the machine, a protective component arranged at the edge of the upper surface of the bracket, an electric push rod arranged on the side of the machine, a fixture fixedly connected to the driving end of the electric push rod, a stabilizing component arranged on the side of the fixture, and an adjusting component arranged inside the fixture. Compared with the prior art, the present application arranges protective components on both sides of the machine, uses a double-headed motor as a driving source, and pushes the first baffle plate and the second baffle plate to move forward under the transmission of a transmission rod, a gear one and a rack one. After the second baffle plate moves to a specified position, it is limited by a gear two and a rack two and will rotate around a sliding rod. The enclosure formed by the second baffle plate and the first baffle plate closes the periphery of the product to be tested, thereby achieving a protective effect.

Description

Technical Field

[0001] This invention relates to the field of semiconductor testing technology, and in particular to a performance testing device for AlGaNGaN HEMT devices and its usage method. Background Technology

[0002] AlGaNGaN HEMT devices are power devices based on aluminum gallium nitride (AlGaN) and gallium nitride (GaN) heterojunction structures. They have excellent characteristics such as high voltage resistance, high temperature resistance, radiation resistance, and high electron mobility. After the AlGaNGaN HEMT devices are manufactured, they need to be tested using testing equipment to perform performance tests on the samples.

[0003] In the prior art, Chinese patent document CN117783817B discloses a semiconductor CP testing device, which includes a display and a testing box mounted on a worktable. The testing box is fixedly connected to a first electric push rod, and the output end of the first electric push rod is fixedly connected to a probe array. A turntable feeding mechanism is provided on the right side of the testing box, and multiple adsorption mechanisms for adsorbing wafers are detachably mounted on the turntable feeding mechanism. A linear feed mechanism is arranged laterally along the left and right direction at the bottom of the testing box. The axis of the turntable feeding mechanism is perpendicular to and intersects the axis of the linear feed mechanism. Through the coordinated arrangement of the linear feed mechanism, the turntable feeding mechanism, and the adsorption mechanism, the efficiency of product testing can be effectively improved. However, device testing includes multiple data tests, some of which may cause product breakage. The flying fragments pose a certain danger and may easily injure personnel. Therefore, this application provides an AlGaNGaN HEMT device performance testing device and its usage method to meet the need for comprehensive protection during product testing. Summary of the Invention

[0004] In view of this, the purpose of this invention is to provide an AlGaNGaN HEMT device performance testing device and its usage method to solve the problem of product fragmentation and splashing during partial testing.

[0005] To achieve the above objectives, the present invention provides a performance testing device for AlGaNGaN HEMT devices, comprising a machine base, a support fixedly connected to the upper surface of the machine base, a testing mechanism disposed on the upper front of the support, a testing stage disposed in the middle of the upper surface of the machine base, a protective component disposed at the edge of the upper surface of the support, an electric push rod disposed on the side of the machine base, a clamp fixedly connected to the driving end of the electric push rod, a stabilizing component disposed on the side of the clamp, and an adjustment component disposed inside the clamp;

[0006] The protective component can enclose the testing table, the stabilizing component is provided in two sets and symmetrically distributed on both sides of the fixture, and the adjusting component acts on the stabilizing component to adjust the distance between the stabilizing component and the fixture.

[0007] Preferably, the protective component includes a positioning groove formed on the upper surface of the machine base, a first baffle is slidably connected inside the positioning groove, a connecting shaft is fixedly connected to the top end of the first baffle, a second baffle is rotatably connected to the other end of the connecting shaft, and a sliding rod is fixedly connected to the bottom end of the second baffle, the sliding rod being slidably connected inside the positioning groove.

[0008] Preferably, a dual-head motor is provided on the rear side of the bracket, a transmission rod is fixedly connected to the drive end of the dual-head motor, a gear is fixedly connected to the end of the transmission rod away from the dual-head motor, and a rack is fixedly connected to the rear side of the first baffle, with the gear meshing with the rack.

[0009] Preferably, a second gear is fixedly sleeved on the outer surface of the slide rod, and a second rack is fixedly connected to the inner wall of the positioning slide groove, with the second gear meshing with the second rack.

[0010] Preferably, the stabilizing component includes a U-shaped plate disposed on the side of the clamp, a shaft is rotatably connected to the inner wall of the U-shaped plate, a side plate is fixedly connected to the outer surface of the shaft, and a push plate is fixedly connected to the outer surface of the shaft away from the side plate.

[0011] Preferably, a support is fixedly connected to the inner wall of the U-shaped plate, a top rod is movably inserted through the middle of the support, a limit rod is fixedly connected to the outer surface of the top rod, a spring is sleeved on the outer surface of the top rod, one end of the spring is fixedly connected to the outer surface of the limit rod, and the other end is fixedly connected to the outer surface of the support.

[0012] Preferably, a limiting groove is formed through the upper surface of the push plate, and the limiting rod is slidably connected inside the limiting groove.

[0013] Preferably, the adjusting assembly includes a worm gear inserted through the rear side of the clamp, a vertical plate is provided inside the clamp, a threaded sleeve is movably inserted through the middle of the vertical plate, and a worm wheel is fixedly connected to the end of the threaded sleeve, the worm wheel being meshed with the worm gear.

[0014] Preferably, the threaded sleeve has an internal threaded connection to a threaded rod, and one end of the threaded rod extending out of the threaded sleeve is fixedly connected to the side of the U-shaped plate.

[0015] A method for using the testing apparatus described above for testing the performance of AlGaNGaN HEMT devices is as follows:

[0016] S1. Preparation: Place the device to be tested in the middle of the testing table, rotate the worm gear according to the size of the device to be tested, and adjust the position of the stabilizing component and the fixture by adjusting the component to match the size of the device. Check the connection of the testing mechanism.

[0017] S2. Protection: When the protection component is activated, the first and second baffles will move forward under the drive of the dual-head motor. After moving to a certain position, the second baffle will rotate and be placed at the front of the machine. The protection component will then surround and protect the testing table.

[0018] S3, Positioning: Start the electric actuator to drive the fixture to clamp the device to be tested, and the stabilizing component stabilizes and positions the device as the fixture moves;

[0019] S4. Testing: The testing organization starts testing the device under test to detect various data, and the staff records the results.

[0020] The beneficial effects of this invention are:

[0021] 1. This AlGaNGaN HEMT device performance testing device, by setting protective components on both sides of the machine, uses a dual-head motor as the drive source, and pushes the first baffle and the second baffle forward under the transmission of the transmission rod, gear one and rack one. After the second baffle moves to the designated position, it will rotate around the slide rod due to the limitation of gear two and rack two. The enclosure formed by the second baffle and the first baffle will close the perimeter of the product to be tested, achieving the protective effect.

[0022] 2. This AlGaNGaN HEMT device performance testing device, by setting stabilizing components on both sides of the fixture, pushes the push plate to rotate the shaft after the fixture approaches the device and the push rod contacts it. The side plate clamps the side of the product as the shaft rotates, and the fixture positions and clamps the product in four directions, ensuring that the product is in the center of the testing table, and also improving the stability of clamping during the product testing process.

[0023] 3. This AlGaNGaN HEMT device performance testing device, by setting the adjustment component in the middle of the fixture, the rotation of the worm gear will drive the worm wheel to rotate, and the worm wheel will drive the threaded sleeve to rotate synchronously. The threaded rod will slide out from the threaded sleeve as the threaded sleeve rotates, thereby pushing the U-shaped plates on both sides away from or closer to the fixture, achieving the effect of adjusting the size and improving the applicability of the device. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only for this invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0026] Figure 2 This is a schematic diagram of the rear structure of the present invention;

[0027] Figure 3 For the present invention Figure 2 Enlarged structural diagram at point A in the middle;

[0028] Figure 4 This is a schematic diagram of the protective component structure of the present invention;

[0029] Figure 5 For the present invention Figure 4 Enlarged structural diagram at point B;

[0030] Figure 6 This is a schematic diagram of the fixture structure of the present invention;

[0031] Figure 7 This is a schematic diagram of the stable component structure of the present invention;

[0032] Figure 8 This is a schematic diagram of the adjustment component structure of the present invention.

[0033] The diagram is marked as follows:

[0034] 1. Machine base; 2. Support; 3. Testing mechanism; 4. Inspection table; 501. Positioning slide; 502. First baffle; 503. Second baffle; 504. Dual-head motor; 505. Transmission rod; 506. Gear 1; 507. Rack 1; 508. Coupling; 509. Slide rod; 510. Gear 2; 511. Rack 2; 6. Electric push rod; 7. Fixture; 801. U-shaped plate; 802. Shaft; 803. Side plate; 804. Push plate; 805. Limiting groove; 806. Support; 807. Top rod; 808. Limiting rod; 809. Spring; 901. Worm gear; 902. Worm wheel; 903. Vertical plate; 904. Threaded sleeve; 905. Threaded rod. Detailed Implementation

[0035] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to specific embodiments.

[0036] It should be noted that, unless otherwise defined, the technical or scientific terms used in this invention should have the ordinary meaning understood by one of ordinary skill in the art to which this invention pertains. The terms "first," "second," and similar terms used in this invention do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0037] like Figures 1 to 8 As shown, an AlGaNGaN HEMT device performance testing device includes a machine base 1, a support 2 fixedly connected to the upper surface of the machine base 1, a testing mechanism 3 arranged on the upper front of the support 2, a detection stage 4 arranged in the middle of the upper surface of the machine base 1, a protective component arranged at the edge of the upper surface of the support 2, an electric push rod 6 arranged on the side of the machine base 1, a clamp 7 fixedly connected to the driving end of the electric push rod 6, a stabilizing component arranged on the side of the clamp 7, an adjusting component arranged inside the clamp 7, the protective component can surround the detection stage 4, two sets of stabilizing components are arranged and symmetrically distributed on both sides of the clamp 7, and the adjusting component acts on the stabilizing component to adjust the distance between the stabilizing component and the clamp 7.

[0038] The protective components will seal the product to be tested from all sides to achieve a protective effect. The opening size of the clamp 7 is controlled by the adjustment components according to the size of the product. The electric push rod 6 will push the clamp 7 to position the product. During the positioning process, the stabilizing components will assist in positioning and improve the accuracy and stability of positioning.

[0039] like Figures 2 to 5As shown, the protective assembly includes a positioning slide groove 501 formed on the upper surface of the machine base 1. A first baffle 502 is slidably connected inside the positioning slide groove 501. A connecting shaft 508 is fixedly connected to the top end of the first baffle 502. A second baffle 503 is rotatably connected to the other end of the connecting shaft 508. A sliding rod 509 is fixedly connected to the bottom end of the second baffle 503. The sliding rod 509 is slidably connected inside the positioning slide groove 501. A dual-head motor 504 is provided on the rear side of the bracket 2. A transmission rod 505 is fixedly connected to the drive end of the head motor 504. A gear 506 is fixedly connected to the end of the transmission rod 505 away from the head motor 504. A rack 507 is fixedly connected to the rear side of the first baffle 502. The gear 506 and the rack 507 mesh with each other. A gear 510 is fixedly sleeved on the outer surface of the slide rod 509. A rack 511 is fixedly connected to the inner wall of the positioning slide groove 501. The gear 510 and the rack 511 mesh with each other.

[0040] The dual-head motor 504 drives the transmission rod 505 to rotate, which in turn drives the gear 506 to rotate. The gear 506 meshes with the rack 507, which in turn drives the rack 507 to move and push the first baffle 502 to slide along the positioning groove 501. The second baffle 503 slides along with the connecting shaft 508. When the slide rod 509 slides to the rack 511, the gear 510 meshes with the rack 511, which in turn drives the gear 510 and the slide rod 509 to rotate, simultaneously driving the second baffle 503 to rotate. Both second baffles 503 rotate towards the center of the machine base 1. The enclosure formed by the second baffle 503 and the first baffle 502 encloses the perimeter of the product to be tested, achieving a protective effect and preventing accidental injury from flying debris during the testing process, thus improving the safety of the test.

[0041] like Figure 1 , Figure 6 and Figure 7 As shown, the stabilizing component includes a U-shaped plate 801 disposed on the side of the clamp 7. A shaft 802 is rotatably connected to the inner wall of the U-shaped plate 801. A side plate 803 is fixedly connected to the outer surface of the shaft 802. A push plate 804 is fixedly connected to the outer surface of the shaft 802 away from the side plate 803. A support 806 is fixedly connected to the inner wall of the U-shaped plate 801. A top rod 807 is movably inserted in the middle of the support 806. A limit rod 808 is fixedly connected to the outer surface of the top rod 807. A spring 809 is sleeved on the outer surface of the top rod 807. One end of the spring 809 is fixedly connected to the outer surface of the limit rod 808, and the other end is fixedly connected to the outer surface of the support 806. A limit groove 805 is formed through the upper surface of the push plate 804. The limit rod 808 is slidably connected inside the limit groove 805.

[0042] As the clamp 7 approaches, the push rod 807 slides along the support 806 into the U-shaped plate 801. During the sliding of the push rod 807, the limiting rod 808 slides in the limiting groove 805 and pushes the push plate 804 to drive the shaft 802 to rotate. At the same time, it will squeeze the spring 809. The rotation of the shaft 802 will drive the side to rotate towards the product. After the push rod 807 is completely retracted into the U-shaped plate 801, the side plate 803 will clamp the side of the product and work with the clamp 7 to position and clamp the product. Clamping the product in four directions can ensure that the product is located in the center of the inspection table 4 and also improve the stability of clamping during the product inspection process.

[0043] like Figure 1 , Figure 6 and Figure 8 As shown, the adjustment assembly includes a worm gear 901 that is inserted into the rear side of the clamp 7. A vertical plate 903 is provided inside the clamp 7. A threaded sleeve 904 is movably inserted into the middle of the vertical plate 903. A worm wheel 902 is fixedly connected to the end of the threaded sleeve 904. The worm wheel 902 is meshed with the worm gear 901. A threaded rod 905 is threadedly connected inside the threaded sleeve 904. One end of the threaded rod 905 that extends out of the threaded sleeve 904 is fixedly connected to the side of the U-shaped plate 801.

[0044] Rotating the worm gear 901 will drive the worm wheel 902 to rotate, and the worm wheel 902 will drive the threaded sleeve 904 to rotate synchronously. As the threaded sleeve 904 rotates, the threaded rod 905 will slide out from the threaded sleeve 904, which can push the U-shaped plates 801 on both sides away from or closer to the clamp 7, thereby achieving the effect of adjusting the size and improving the applicability of the device.

[0045] A method for using the testing apparatus described above for testing the performance of AlGaNGaN HEMT devices is as follows:

[0046] S1. Preparation: Place the device to be tested in the middle of the testing table 4. Rotate the worm gear 901 according to the size of the device to be tested. Adjust the position of the stabilizing component and the fixture 7 by adjusting the component to match the size of the device. Check the connection of the testing mechanism 3.

[0047] S2. Protection: Activate the protection component. Driven by the dual-head motor 504, the first baffle 502 and the second baffle 503 will move forward. After moving to a certain position, the second baffle 503 will rotate and be placed in front of the machine 1. The protection component will protect the detection table 4.

[0048] S3, Positioning: Start the electric push rod 6 to drive the clamp 7 to clamp the device to be tested. The stabilizing component moves with the clamp 7 to stably clamp and position the device.

[0049] S4. Testing: Start the testing unit 3 to test various data of the device under test, and the staff will record the results.

[0050] The technical solution provided by this invention involves placing the product to be tested on the testing table 4 during product testing. Then, the protective components are activated, sealing the product from all sides to achieve a protective effect. Next, the unfolding size of the adjustable clamp 7 is controlled by the adjusting components according to the product's dimensions. Then, the electric push rod 6 pushes the clamp 7 to position the product. During positioning, the stabilizing components assist in positioning and improve its accuracy and stability. Finally, the testing mechanism 3 is activated to test various performance characteristics of the product. Since the specific testing equipment structure and testing methods are existing technologies well-known to those skilled in the art, they will not be elaborated upon here. The protective components are divided into two groups symmetrically arranged on both sides of the machine table 1. The dual-head motor 504 is activated to drive the transmission rod 505 to rotate, through transmission... Rod 505 drives gear 506 to rotate. Gear 506 meshes with rack 507. Gear 506 drives rack 507 to move and pushes the first baffle 502 to slide along the positioning groove 501. The second baffle 503 slides along with the connecting shaft 508. When the slide rod 509 slides to the complete position of rack 511, gear 510 meshes with rack 511, which in turn drives gear 510 and slide rod 509 to rotate. Simultaneously, the second baffle 503 rotates. Both second baffles 503 rotate towards the center of the machine 1. The enclosure formed by the second baffle 503 and the first baffle 502 encloses the perimeter of the product to be tested, achieving a protective effect and avoiding accidental injury from flying objects caused by breakage during the testing process, thus improving the safety of the test.

[0051] During the process of the electric actuator 6 driving the clamp 7 to clamp and position the product, the push rod 807 first abuts against the outer surface of the product. As the clamp 7 approaches, the push rod 807 slides along the support 806 into the interior of the U-shaped plate 801. During the sliding of the push rod 807, the limiting rod 808 slides in the limiting groove 805 and pushes the push plate 804 to drive the shaft 802 to rotate. At the same time, it will squeeze the spring 809. The rotation of the shaft 802 will drive the side to rotate towards the product. After the push rod 807 is completely retracted into the interior of the U-shaped plate 801, the side plate 803 will clamp the side of the product, cooperating with the clamp 7 to position and clamp the product. Clamping the product in four directions can ensure that the product is in the center position of the inspection table 4, and also improve the stability of clamping during product inspection. When it is necessary to release the product, the electric actuator... 6. When the drive clamp 7 moves away from the product, the spring 809 rebounds and pushes the push rod 807 out of the U-shaped plate 801. At the same time, the limit rod 808 pushes the push plate 804, causing the shaft 802 to rotate. The side plate 803 then moves away from the product, making it convenient for the next use. When clamping products of different sizes, the worm 901 is manually rotated. During the rotation of the worm 901, the worm wheel 902 will rotate. Since threaded sleeves 904 are fixed on both sides of the worm 901 and the threaded sleeves 904 are movably inserted in the middle of the vertical plate 903, the worm wheel 902 will drive the threaded sleeves 904 to rotate synchronously. The threaded rod 905 will slide out from the threaded sleeve 904 as the threaded sleeve 904 rotates, thereby pushing the U-shaped plates 801 on both sides away from or closer to the clamp 7, achieving the effect of adjusting the size and improving the applicability of the device.

[0052] Those skilled in the art should understand that the discussion of any of the above embodiments is merely exemplary and is not intended to imply that the scope of the invention (including the claims) is limited to these examples; within the framework of the invention, the technical features of the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations of the different aspects of the invention as described above, which are not provided in the details for the sake of brevity.

[0053] This invention is intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this invention should be included within the scope of protection of this invention.

Claims

1. An AlGaNGaN HEMT device performance test device, characterized in that: include: A machine platform (1), wherein a bracket (2) is fixedly connected to the upper surface of the machine platform (1), a testing mechanism (3) is arranged on the upper front portion of the bracket (2), a detection table (4) is arranged in the middle of the upper surface of the machine platform (1), a protective component is arranged at the edge of the upper surface of the bracket (2), an electric push rod (6) is arranged on the side of the machine platform (1), a clamp (7) is fixedly connected to the driving end of the electric push rod (6), a stabilizing component is arranged on the side of the clamp (7), and an adjusting component is arranged inside the clamp (7); The protective component can be used to enclose the test platform (4); the stabilizing component is provided in two groups and is symmetrically distributed on both sides of the clamp (7); the adjusting component acts on the stabilizing component to adjust the distance between the stabilizing component and the clamp (7); The stabilizing component comprises a U-shaped plate (801) arranged on the side of the clamp (7), the inner wall of the U-shaped plate (801) is rotatably connected to a shaft (802), the outer surface of the shaft (802) is fixedly connected to a side plate (803), and the outer surface of the shaft (802) away from the side plate (803) is fixedly connected to a push plate (804).

2. The AlGaNGaN HEMT device performance testing device according to claim 1, characterized in that: The protection component comprises a positioning slide groove (501) provided on the upper surface of the machine platform (1); a first baffle plate (502) is slidably connected inside the positioning slide groove (501); a connecting shaft (508) is fixedly connected to the top end of the first baffle plate (502); a second baffle plate (503) is rotatably connected to the other end of the connecting shaft (508); a sliding rod (509) is fixedly connected to the bottom end of the second baffle plate (503); and the sliding rod (509) is slidably connected inside the positioning slide groove (501).

3. The AlGaNGaN HEMT device performance testing device according to claim 2, characterized in that: A double-headed motor (504) is arranged on the rear side of the bracket (2); a driving end of the double-headed motor (504) is fixedly connected to a transmission rod (505); an end of the transmission rod (505) away from the double-headed motor (504) is fixedly connected to a gear one (506); a rear side of the first baffle (502) is fixedly connected to a rack one (507); and the gear one (506) is meshingly connected to the rack one (507).

4. The AlGaNGaN HEMT device performance testing device according to claim 3, characterized in that: The outer surface of the slide rod (509) is fixedly sleeved with a second gear (510), and the inner wall of the positioning slide groove (501) is fixedly connected with a second rack (511), and the second gear (510) is meshingly connected with the second rack (511).

5. The AlGaNGaN HEMT device performance testing device according to claim 1, characterized in that: The inner wall of the U-shaped plate (801) is fixedly connected to a support (806), a push rod (807) is movably inserted into the middle of the support (806), the outer surface of the push rod (807) is fixedly connected to a limit rod (808), the outer surface of the push rod (807) is sleeved with a spring (809), one end of the spring (809) is fixedly connected to the outer surface of the limit rod (808), and the other end is fixedly connected to the outer surface of the support (806).

6. The AlGaNGaN HEMT device performance testing device according to claim 5, characterized in that: A limiting groove (805) is formed through the upper surface of the push plate (804), and the limiting rod (808) is slidably connected inside the limiting groove (805).

7. The AlGaNGaN HEMT device performance testing device according to claim 6, characterized in that: The adjustment assembly comprises a worm (901) inserted into the rear side of the clamp (7); a vertical plate (903) is arranged inside the clamp (7); a threaded sleeve (904) is movably inserted into the middle of the vertical plate (903); a worm wheel (902) is fixedly connected to the middle of the threaded sleeve (904); and the worm wheel (902) is meshingly connected to the worm (901).

8. The AlGaNGaN HEMT device performance testing device according to claim 7, characterized in that: The internal thread of the threaded sleeve (904) is connected to a threaded rod (905), and one end of the threaded rod (905) extending out of the threaded sleeve (904) is fixedly connected to the side of the U-shaped plate (801).

9. A method for using a testing device, using the AlGaNGaN HEMT device performance testing device as claimed in claim 8, the method for using is as follows: S1. Preparation: Place the device to be tested in the middle of the test table (4), rotate the worm (901) according to the size of the device to be tested, adjust the position of the stabilizing component and the fixture (7) by adjusting the component to match the size of the device, and check the connection of the test mechanism (3); S2, protection: the protection component is started, and the first baffle (502) and the second baffle (503) are driven by the double-headed motor (504) to move forward. After moving to a certain position, the second baffle (503) is rotated and placed in front of the machine (1), and the protection component is used to enclose and protect the testing platform (4); S3, positioning: starting the electric push rod (6) to drive the fixture (7) to clamp the device to be detected, and the stabilizing component stably clamps and positions the device as the fixture (7) runs; S4. Testing: Start the testing organization (3) to test various data of the device to be tested, and the staff will record the data based on the test.

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