Method for assisting whole semiconductor in producing hot batches through report system
Through the connection between the RPT reporting system and the MES system, hot batch reports are generated and chart analysis tools are provided, which solves the problems of cumbersome operation and difficulty in information inheritance of existing MES systems, and improves the efficiency and accuracy of semiconductor production.
Patent Information
- Application Number
- CN202411316769.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-20
- Publication Date
- 2025-01-10
AI Technical Summary
When processing hot batches, the existing semiconductor manufacturing execution system (MES) has cumbersome operations and errors, and lacks the function of automatically adjusting the completion time of the plan, which leads to difficulties in information inheritance and affects production efficiency and delivery time.
By setting up communication connection between the RPT reporting system and the MES system, production data is obtained regularly, hot batch reports are generated, chart analysis tools are provided, historical data is automatically stored, and users are allowed to adjust the schedule completion date and reduce manual input.
It simplifies the operation of staff, reduces errors, improves the real-time and accuracy of data, facilitates analysis and adjustment of batch priorities, and improves the flexibility and accuracy of production planning.
Smart Images
Figure CN119294368A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the field of semiconductor production technology, and in particular to a method for assisting the whole semiconductor production hot batch through a reporting system. Background Art
[0002] In the semiconductor manufacturing industry, when a batch is put into production, the batch priority will be defined according to the actual situation, and the actual completion time of the current batch will be calculated and the planned completion time of the batch will be set according to the production cycle time, dwell time and actual wafer quantity of each process. When the difference between the planned completion time and the actual completion time is too large, the operation department can timely check and analyze the reasons for the batch and adjust the subsequent process flow in time to complete the production plan on time.
[0003] Hot Lots in wafer manufacturing refer to those wafer batches that need to be processed first. These batches usually involve urgent orders, critical projects, or products that encounter problems during the production process and require quick feedback. Hot lots enjoy priority in the production line. This priority processing can not only help ensure production efficiency and delivery time, but also enable wafer fabs to maintain flexibility in the face of urgent needs and quickly respond to changes in customers and the market.
[0004] The manufacturing process of semiconductors uses a manufacturing execution system (MES) for production management. For batch analysis operations, in the current MES system, all relevant information needs to be summarized by opening multiple menus, exporting them to Excel for screening, and then pulling calculation methods and charts. This operation is cumbersome and prone to errors. Secondly, after the planned time of the batch is adjusted, the start time of the current step needs to be changed to the system time of the filling time. However, the current MES system does not have a menu to modify the planned completion time, and manual input is required, which is very inconvenient. In addition, the production cycle (cycle time) of the process is recalculated at the beginning of each month using the running time of each process in the previous month. There is no corresponding maintenance setting in the current MES system. Since the current MES system mainly relies on manual management for batch analysis management, when there is a change in personnel, the inheritance of information will become more difficult. Once the personnel handover is unclear, it will take a lot of time to parse, and even in serious cases, the previous labor results may be lost. Summary of the invention
[0005] In order to solve the above problems, the present invention aims to provide a method for assisting the whole semiconductor production hot batch through a reporting system.
[0006] To achieve the above object, the present invention adopts the following technical solutions:
[0007] The present invention provides a method for assisting the whole semiconductor production hot batch through a reporting system, which is characterized by: setting an RPT reporting system, connecting the RPT reporting system with an MES system for communication, obtaining semiconductor production data from the MES system, processing the obtained data to generate a hot batch report, and then feeding back the hot batch report to the MES system as a basis for adjusting the planned completion date of the production batch.
[0008] Furthermore, in the method provided by the present invention for assisting the entire semiconductor production hot batch through a reporting system, it can also have the following characteristics: wherein, the production data includes product data, equipment data, batch data, process step data, and production time; the batch data includes the current status of the batch and the historical information of the batch.
[0009] Furthermore, in the method provided by the present invention for assisting the whole semiconductor production hot batch through the reporting system, it can also have such a feature: wherein the data processing flow of the RPT reporting system includes the following steps:
[0010] 1) Connect the product process data in series from the first step to the last step according to the process step;
[0011] 2) The current status and historical information of the batch are stitched together based on step;
[0012] 3) Assign different attributes to batches of different priorities and display them on the same page of the hot batch report;
[0013] 4) Use the historical information of the batch to count the historical step moves based on the batch LOT ID, and generate a Gantt chart of the steps that the LOT product has gone through;
[0014] 5) Analyze the actual data and planned data of the LOT and generate an actual and planned line chart;
[0015] 6) The system automatically and regularly stores the data obtained from the above steps 1) to 5) as historical data.
[0016] Furthermore, in the method provided by the present invention for assisting the whole semiconductor production hot batch through the reporting system, there may also be such a feature: wherein, in step 4), when rework occurs in the step, it is only counted once.
[0017] Furthermore, in the method provided by the present invention for assisting the whole semiconductor production hot batch through the reporting system, it can also have the following features: wherein, a TARGET_FABOUT input field and a LINK button are provided in the hot batch report; the TARGET_FABOUT input field is used for the user to input the date by himself, and the date is used as the planned completion date. When the user does not input the date, the default F_O is the planned completion date; the LINK button links to the actual and planned line chart; when the user modifies TARGET_FABOUT, the RPT reporting system automatically stores the historical data and includes it in the actual and planned line chart.
[0018] Furthermore, in the method provided by the present invention for assisting the entire semiconductor production hot batch through the reporting system, it can also have the following features: wherein, the main page of the hot batch report includes an upper table area and a lower visible area; the upper table area displays the priority level, batch LOTID, process step STEP_ID, process step description STEP_DESC, current status STATUS, the number of moves S_M of the batch run the previous day, the batch's stay time D_T in the current step, the remaining time R_D to the planned manufacturing completion, the planned completion date F_O, and the modified planned completion date TARGET_FABOUT; the lower visible area displays the LOT products arranged by priority, and is provided with an upper X-axis displaying R_D and a lower X-axis displaying the current STEP_DESC. When the mouse cursor is placed at the corresponding position of the area, a floating box will pop up on the page to display the details of the corresponding LOT product.
[0019] Furthermore, in the method provided by the present invention for assisting the whole semiconductor production hot batch through the reporting system, there may also be such a feature: wherein the data in the level column is assigned according to the priority of the level, and different assignments are displayed in different colors.
[0020] Furthermore, in the method provided by the present invention for assisting the whole semiconductor production hot batch through the reporting system, it can also have the following characteristics: wherein the data in the STATUS column is displayed as WAIT or HOLD according to the current status, and the background color of the data column displayed as HOLD is highlighted.
[0021] Furthermore, in the method provided by the present invention for assisting the whole semiconductor production hot batch through the reporting system, it can also have the following characteristics: wherein, the transmission mode between the RPT reporting system and the MES system is interface transmission.
[0022] Furthermore, in the method provided by the present invention for assisting the whole semiconductor production hot batch through the reporting system, it can also have the following characteristics: wherein, the RPT reporting system obtains data from the MES system regularly according to a preset time.
[0023] Compared with the prior art, the present invention has the following beneficial effects:
[0024] The present invention provides a method for assisting the whole semiconductor production hot batch through a reporting system. The RPT reporting system obtains data from the MES system at regular intervals, pre-processes and saves all data that need to be processed in priority, and directly presents all data in the form of pages and charts, which is convenient for staff to view and analyze, reduces the workload of staff as much as possible, and updates the latest data at all times. Feedback to the report can timely feedback the most authentic data to the hands of on-site staff, and can timely adjust the batch priority of the MES and analyze the reasons for batch delays according to actual conditions. BRIEF DESCRIPTION OF THE DRAWINGS
[0025] Figure 1 It is a simplified flow chart of the method of assisting the whole semiconductor production hot batch by using the report system of the present invention;
[0026] Figure 2 It is the main page of the hot batch report in the embodiment of the present invention;
[0027] Figure 3 It is a Gantt chart of the steps that the LOT product goes through in the hot batch report of the embodiment of the present invention;
[0028] Figure 4 It is an actual and planned line chart of LOT products in the hot batch report of an embodiment of the present invention. DETAILED DESCRIPTION
[0029] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the following embodiments are combined with the accompanying drawings to specifically illustrate the technical solutions of the present invention.
[0030] See also Figure 1 An embodiment of the present invention provides a method for assisting the whole semiconductor production hot batch through a reporting system. By setting up an RPT reporting system, the RPT reporting system is connected to the MES system for communication, and the semiconductor production data is obtained from the MES system at a regular interval. The obtained data is processed to generate a hot batch report, and then the hot batch report is fed back to the MES system in real time as a basis for adjusting the planned completion date of the production batch.
[0031] Preferably, the transmission mode between the RPT reporting system and the MES system adopts interface transmission, and the RPT reporting system obtains data from the MES system according to a preset time (for example, every 2 minutes).
[0032] The acquired production data includes product data (such as product name, etc.), equipment data (such as equipment ID, etc.), batch data (batch LOT_ID, batch priority level, etc.), process step data (process production cycle, process step STEP_ID, planned completion time F_O), production time, etc. Batch data includes the current status of the batch and the historical information of the batch.
[0033] The data processing flow of the RPT reporting system includes the following steps:
[0034] 1) Connect the product process data in series from the first step to the last step.
[0035] 2) The current status and historical information of the batch are stitched together based on step.
[0036] 3) Assign different attributes to batches of different priorities and display them on the same page of the hot batch report.
[0037] See also Figure 2 The main page of the hot batch report includes the table area at the top and the visible area at the bottom. Different colors and background colors are used to separate the contents with different attributes.
[0038] The table area at the top of the main page displays columns such as level, LOT ID, STEP_ID, STEP_DESC, STATUS, S_M, D_T, R_D, F_O, TARGET_FABOUT, and LINK.
[0039] Level (priority): such as Figure 2 In ①, the data in this column is assigned according to the priority of the level, and different assignments are displayed in different colors.
[0040] LOT ID (batch): Figure 2 In ②, click the data in the data column to jump to the Gantt chart page of the step that the LOT has passed.
[0041] STEP_ID, STEP_DESC, and STATUS represent the step the LOT is currently in, the step description, and the current status. Figure 2 In ④, the data in the STATUS column is displayed as WAIT or HOLD according to the current status, and the background color of the data column displayed as HOLD is highlighted, for example, displayed in red.
[0042] S_M (i.e. step move, is a step process completed by the batch the day before). D_T (delay time, is the time the batch stays in the current step). R_D (i.e. remain day, is the remaining time until the planned manufacturing is completed). F_O (i.e. FABOUT, is the completion time when the wafer runs through all the process steps, that is, the planned completion date).
[0043] TARGET_FABOUT: Figure 2 In ③, this column input bar is used for users to enter the date by themselves, and this date is used as the planned completion date. If the user does not enter any date, the default F_O is used as the planned completion date.
[0044] LINK: The Link button in this column links to the actual vs. plan line chart.
[0045] The Y axis in the visible area below the main page represents the priority of the LOT (such as Figure 2 ⑧), the shape represents its product. And the upper X-axis shows R_D, and the lower X-axis (such as Figure 2 ⑦) displays the current STEP_DESC. When the mouse cursor is placed at the corresponding position in the area (such as Figure 2 ⑤), a floating box will pop up on the page (such as Figure 2 ⑥) in the figure shows the details of the corresponding LOT product. The details of the LOT product include lot_id (batch), step_desc (process description), wfs (wafer quantity), and process (product name).
[0046] 4) Use the batch history information to count the historical step move quantity based on the batch LOT ID. If a step is reworked, it will only be counted once, and the specific time to be counted can be customized by the user. Figure 3 , generate a Gantt chart of the steps that the LOT product goes through. Figure 3 ① is the start time, end time, duration of LOT running to the process site and the remarks for the process. Figure 3 ② in the figure is the description of the process sites that LOT passes through. Figure 3 ③ is the scroll bar for querying the LOT operation time period. You can zoom in to a specific time interval to view the stations passed by the time interval.
[0047] 5) Analyze the actual data and planned data of the LOT, see Figure 4 , and generate an actual vs. planned line graph. When the user modifies TARGET_FABOUT, the RPT reporting system automatically stores the historical data and includes it in the actual vs. planned line graph. Figure 4The red line in ① represents a planned line chart of LOT from initial investment to final shipment, and the green line represents the actual operating time and process of LOT. Figure 4 ② in the figure indicates the reverse order of LOT production cycle. Figure 4 The ③ indicated area in the middle is the line description of the line chart, where red represents the plan, green represents the actual, and blue represents the reverse timeline above.
[0048] 6) The system automatically and regularly stores the data obtained from the above steps 1) to 5) as historical data.
[0049] In the existing scenario, the method of assisting the whole semiconductor production hot batch through the reporting system of the present invention can assist the staff to achieve the following analysis:
[0050] 1. Analyze whether the planned completion time and actual completion time of the batch are not much different. If the difference between the planned and actual time is too large (for example, more than 2 days), whether the batch level needs to be upgraded to reduce the waiting time after the batch leaves the station. In addition, you can also analyze which processes cause the delay by comparing the planned completion line and the actual completion line.
[0051] 2. If the delay time of the batch step is too long, you can analyze the reasons for the batch delay.
[0052] 3. Based on the step move amount of the batch on the previous day, today's move amount can be predicted.
[0053] 4. Operators can infer the planned completion time based on actual conditions. If the difference is too large, they can explain the reason and apply to adjust the planned completion time.
[0054] The above embodiments are only exemplary preferred embodiments of the present invention and are not intended to limit the protection scope of the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention are included in the protection scope of the present invention.
Claims
1. A method for assisting the whole semiconductor production hot batch through a reporting system, characterized by: An RPT reporting system is set up, and the RPT reporting system is communicatively connected to the MES system, semiconductor production data is obtained from the MES system, and the obtained data is processed to generate a hot batch report, and then the hot batch report is fed back to the MES system as a basis for adjusting the planned completion date of the production batch.
2. The method of using a reporting system to assist semiconductor production hot batch processing as claimed in claim 1, characterized in that: in, The production data includes product data, equipment data, batch data, process step data, and production start time; The batch data includes the current status of the batch and the historical information of the batch.
3. The method of assisting the whole semiconductor production hot batch by the reporting system as claimed in claim 2, Features: in, The data processing flow of the RPT reporting system includes the following steps: 1) Connect the product process data in series from the first step to the last step according to the process step; 2) The current status and historical information of the batch are stitched together based on step; 3) assigning different attributes to batches of different priorities and displaying them on the same page of the hot batch report; 4) Use the historical information of the batch to count the historical step moves based on the batch LOT ID, and generate a Gantt chart of the steps that the LOT product has gone through; 5) Analyze the actual data and planned data of the LOT and generate an actual and planned line chart; 6) The system automatically and regularly stores the data obtained from the above steps 1) to 5) as historical data.
4. The method of using a reporting system to assist semiconductor production thermal batch processing as claimed in claim 3, characterized in that: in, In step 4), if rework occurs in the step, it will only be counted once.
5. The method of using a reporting system to assist thermal batch processing in semiconductor production as claimed in claim 3, characterized in that: in, The hot batch report is provided with a TARGET_FABOUT input field and a LINK button; The TARGET_FABOUT input field is used for users to enter a date, which is used as the planned completion date. If the user does not enter a date, the default F_O is used as the planned completion date. The LINK button links to the actual vs. planned line chart; When the user modifies TARGET_FABOUT, the RPT reporting system automatically stores historical data and includes it in the actual and planned line chart.
6. The method of using a reporting system to assist thermal batch processing in semiconductor production as claimed in claim 3, wherein: in, The main page of the hot batch report includes an upper table area and a lower visible area; The upper table area shows the priority level, batch LOT ID, step STEP_ID, step description STEP_DESC, current status STATUS, number of moves S_M of the batch run the previous day, the batch's stay time D_T in the current step, the remaining time R_D to the planned manufacturing completion, the planned completion date F_O, and the modified planned completion date TARGET_FABOUT; The lower visible area displays LOT products arranged by priority, and is provided with an upper X-axis displaying R_D and a lower X-axis displaying the current STEP_DESC. When the mouse cursor is placed at a corresponding position in the area, a floating box will pop up on the page to display the details of the corresponding LOT product.
7. The method of using a reporting system to assist thermal batch processing in semiconductor production as claimed in claim 6, wherein: in, The data in the level column is assigned according to the priority of the level, and different assignments are displayed in different colors.
8. The method of using a reporting system to assist semiconductor production thermal batch processing as claimed in claim 6, wherein: in, The data in the STATUS column is displayed as WAIT or HOLD according to the current status, and the background color of the data column displayed as HOLD is highlighted.
9. The method of claim 1 for assisting semiconductor production thermal batch processing using a reporting system, wherein: in, The transmission method between the RPT reporting system and the MES system is interface transmission.
10. The method of claim 1 for assisting semiconductor production thermal batch processing with a reporting system, wherein: in, The RPT reporting system obtains data from the MES system at a preset time.