A device for producing aluminum nitride

Abstract

The present invention relates to the field of semiconductor material production, and in particular to a device for producing aluminum nitride, comprising a cylinder, a rotating shaft, a spring and a driving assembly, wherein the cylinder is fixedly arranged, the rotating shaft is vertically arranged and rotatably arranged in the cylinder around its own axis, the spring is sleeved on the rotating shaft, the middle part of the spring slides on the rotating shaft along the axial direction of the rotating shaft, a positioning ring is fixedly installed on the circumference of the spring, the positioning ring is rotatably connected to the cylinder, and the driving assembly is used to intermittently push the middle part of the spring to slide downward on the rotating shaft; an air inlet is provided on the cylinder, and the air inlet is located below the spring. Through the coordinated arrangement of the spring and the driving assembly, the spring is concave after receiving the thrust of the driving assembly, the material in the middle part of the spring is bounced up by the spring, and the bounced material is dispersed in the air, the contact area between the dispersed material and the gas is increased, the material can react better with the gas, and the deformation of the spring makes the interaction of the gas between the upper and lower parts of the spring faster, and the reaction between the material and the gas is more sufficient.

Description

Technical Field

[0001] The invention relates to the field of semiconductor material production, in particular to a device for producing aluminum nitride. Background Art

[0002] Aluminum nitride is a covalent bond compound with a hexagonal structure. Its characteristics are that the two elements that make up the AlN molecule have a small atomic weight, a simple crystal structure, a short bond length of the A1-N bond, a large bond energy, and the resonance of the covalent bond is conducive to the heat transfer mechanism, making the AlN material have a thermal conductivity that is superior to that of general non-metallic materials. AlN has a high melting point, high hardness, good dielectric properties and dielectric loss, non-toxicity, and a thermal expansion coefficient that matches that of silicon. It is not only an ideal material for the new generation of heat dissipation substrates and electronic device packaging, but can also be used in heat exchangers, piezoelectric ceramics and films, thermal conductive fillers, etc. It has broad application prospects and is called the third generation of semiconductor materials.

[0003] At present, the main industrial preparation methods of aluminum nitride powder are direct nitridation and carbon thermal reduction. The direct nitridation method is to directly place aluminum powder in high-temperature nitrogen, and rely on the chemical reaction to directly combine the aluminum powder with nitrogen to form aluminum nitride powder. When the existing production equipment using the direct nitridation method produces aluminum nitride, the aluminum powder is accumulated and cannot fully contact with nitrogen, which affects the reaction efficiency. Summary of the invention

[0004] Based on this, it is necessary to provide a device for producing aluminum nitride to address the problem that the reaction efficiency of aluminum powder and nitrogen is slow when producing aluminum nitride in current production devices.

[0005] The above purpose is achieved through the following technical solutions:

[0006] A device for producing aluminum nitride comprises a cylinder, a rotating shaft and a vibrating mechanism, wherein the cylinder is fixedly arranged, a feeding port is arranged on the top of the cylinder, the rotating shaft is arranged in the cylinder to rotate around its own axis, and the axis of the rotating shaft extends in the vertical direction; the vibrating mechanism comprises a spring piece and a driving assembly, the spring piece is sleeved on the rotating shaft, and the spring piece and the rotating shaft are coaxial, the middle part of the spring piece slides on the rotating shaft along the axial direction of the rotating shaft, a positioning ring is fixedly installed on the circumference of the spring piece, the positioning ring is rotatably connected with the cylinder, the driving assembly is used to intermittently push the middle part of the spring piece to slide downward on the rotating shaft, and the middle part of the spring piece can play the role of restoring deformation The cylinder body is provided with an air inlet hole, which is located below the shrapnel; in a natural state, the middle part of the shrapnel is located above its circumference, and the shrapnel is provided with a blanking hole, a first air hole and a second air hole, and a plurality of first air holes are provided, and the blanking holes and the plurality of first air holes are located at the edge of the shrapnel, and the plurality of first air holes are evenly arranged around the axis of the shrapnel, and a plurality of second air holes are provided, and the plurality of groups of second air holes are evenly arranged around the axis of the shrapnel, and the number of second air holes in each group is multiple, and the plurality of second air holes in each group are arranged along the radial direction of the shrapnel, and the second air holes are located between the first air holes and the rotating shaft.

[0007] Preferably, a plurality of vibration mechanisms are provided, and the plurality of vibration mechanisms are arranged on the rotating shaft at intervals in the vertical direction, dividing the interior of the cylinder into a plurality of cavities from top to bottom, and two adjacent cavities are connected through the blanking hole, the first air hole and the second air hole.

[0008] Preferably, the driving components in two adjacent vibration mechanisms alternately drive the corresponding elastic sheets to move downward, so that the volume changes of the two adjacent cavities are opposite.

[0009] Preferably, a plurality of accommodating cavities are provided inside the rotating shaft, and a plurality of slide grooves are opened on the circumferential surface of the rotating shaft. In the axial direction of the rotating shaft, a spacing is provided between two adjacent accommodating cavities, and a spacing is also provided between two adjacent slide grooves. The accommodating cavities and the slide grooves are arranged correspondingly, and each accommodating cavity corresponds to a cavity, and each slide groove penetrates the rotating shaft and the corresponding accommodating cavity along the radial direction of the rotating shaft.

[0010] Preferably, each driving assembly includes a cylinder and a push block, the cylinder is arranged in the accommodating cavity, the cylinder is fixedly connected to the rotating shaft, and the cylinder is extended and retracted along the axial direction of the rotating shaft, the push block is slidably arranged in the slide groove, and the push block is connected to the cylinder, a groove is opened in the middle part of the spring sheet, and a step is provided at one end of the push block away from the cylinder, the step on the push block is slidably arranged in the groove on the corresponding spring sheet, and the step on the push block abuts against the corresponding spring sheet in the axial direction of the rotating shaft.

[0011] Preferably, an installation groove is provided on the circumferential surface of the rotating shaft, the installation groove is connected with the sliding groove, a sealing plate is provided on the installation groove, the sealing plate is slidably connected with the push block, and the push block can be installed in the accommodating cavity through the installation groove, a plurality of fixed cylinders are provided in the cylinder body, the fixed cylinders are connected to the inner wall of the cylinder body by bolts, the inner diameter of the fixed cylinders is consistent with the inner diameter of the positioning ring, the positioning ring is rotatably connected to the fixed cylinder, and the fixed cylinders and the positioning rings are alternately distributed in the axial direction of the rotating shaft, and the fixed cylinders are used to limit the sliding of the positioning ring in the axial direction of the rotating shaft.

[0012] Preferably, a plurality of protrusions are provided on one side of the positioning ring that is rotatably connected to the fixed tube, and the plurality of protrusions are evenly distributed around the axis of the positioning ring. A plurality of sliders are provided on one side of the fixed tube that is rotatably connected to the positioning ring. The sliders are slidably arranged on the fixed tube along the vertical direction, and the sliders can abut against the protrusions. When the sliders abut against the protrusions, the sliders can move on the fixed tube away from the corresponding spring sheets. A spring is provided between the slider and the fixed tube for resetting the slider after it is detached from the connection with the protrusions.

[0013] Preferably, the blanking holes on two adjacent spring pieces are not on the same vertical plane.

[0014] Preferably, the projection of the cavity at the bottom of the cylinder on the vertical plane is funnel-shaped, and a discharge port is provided at the bottom of the cylinder.

[0015] Preferably, an exhaust port is provided on the top of the cylinder.

[0016] The beneficial effects of the present invention are as follows: a spring sheet is provided, and through the coordinated arrangement of the spring sheet and the driving assembly, the spring sheet becomes concave after being thrust by the driving assembly, and the material on the spring sheet slides on the spring sheet and approaches the rotating shaft; when the driving assembly stops driving the spring sheet, the middle part of the spring sheet slides upward on the rotating shaft under the action of its own elasticity, and at this time the material located in the middle part of the spring sheet is bounced up by the spring sheet, and the bounced up material is dispersed in the air, and the contact area between the dispersed material and the gas is increased, so that the material can react with the gas better, and the deformation of the spring sheet makes the interaction between the gas in the upper and lower parts of the spring sheet faster, and the reaction between the material and the gas is more complete.

[0017] A first air hole and a second air hole are arranged on the spring sheet. Under the curvature of the spring sheet, the dispersed material moves toward the edge of the spring sheet. The material at the edge of the spring sheet can still be fully in contact with the gas under the action of the first air hole. When the driving component drives the spring sheet again to make the spring sheet concave, the material at the edge of the spring sheet slides toward the middle of the rotating shaft. At this time, the area of ​​the material spread out on the spring sheet increases. Under the action of the second air hole, the sliding material and the material in the middle of the spring sheet can still be in contact with the gas. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A schematic diagram of the structure of a device for producing aluminum nitride provided in an embodiment of the present invention;

[0019] Figure 2 A front view of a device for producing aluminum nitride provided by an embodiment of the present invention;

[0020] Figure 3 for Figure 2 Sectional view along AA direction;

[0021] Figure 4 A schematic diagram of the structure of a spring piece of an apparatus for producing aluminum nitride provided by an embodiment of the present invention;

[0022] Figure 5 A split diagram of a rotating shaft of an apparatus for producing aluminum nitride provided by an embodiment of the present invention;

[0023] Figure 6 A state diagram of a spring piece of an apparatus for producing aluminum nitride provided by an embodiment of the present invention, in which the middle part is concave.

[0024] Among them: 100, cylinder; 101, rotating shaft; 102, feed port; 103, spring piece; 104, positioning ring; 105, air inlet; 106, drop hole; 107, first air hole; 108, second air hole; 109, cavity; 110, accommodating cavity; 111, slide groove; 112, cylinder; 113, push block; 114, groove; 115, step; 116, mounting groove; 117, sealing plate; 118, fixing cylinder; 119, motor; 120, discharge port; 121, exhaust port. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below through embodiments and in conjunction with the accompanying drawings. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0026] The serial numbers assigned to the components herein, such as "first", "second", etc., are only used to distinguish the objects described and do not have any order or technical meaning. The "connection" and "coupling" mentioned in the present invention, unless otherwise specified, include direct and indirect connections (couplings). In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present invention.

[0027] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0028] like Figures 1 to 6 As shown, an embodiment of the present invention provides an apparatus for producing aluminum nitride, including a cylinder 100, a rotating shaft 101 and a vibration mechanism, wherein the cylinder 100 is fixedly arranged, a feed port 102 is arranged on the top of the cylinder 100, the rotating shaft 101 is rotatably arranged in the cylinder 100 around its own axis, and the axis of the rotating shaft 101 extends in the vertical direction; the vibration mechanism includes a spring piece 103 and a driving assembly, the spring piece 103 is sleeved on the rotating shaft 101, and the spring piece 103 is coaxial with the rotating shaft 101, the middle part of the spring piece 103 slides on the rotating shaft 101 along the axial direction of the rotating shaft 101, a positioning ring 104 is fixedly installed on the circumferential surface of the spring piece 103, the positioning ring 104 is rotatably connected to the cylinder 100, the driving assembly is used for intermittently pushing the middle part of the spring piece 103 to slide downward on the rotating shaft 101, and the middle part of the spring piece 103 can be restored to its original shape. The cylinder 100 is provided with an air inlet 105, which is located below the spring 103; in a natural state, the middle part of the spring 103 is located above its circumference, and the spring 103 is provided with a blanking hole 106, a first air hole 107 and a second air hole 108, and a plurality of first air holes 107 are provided, and the blanking holes 106 and the plurality of first air holes 107 are located at the edge of the spring 103, and the plurality of first air holes 107 are evenly arranged around the axis of the spring 103, and the second air holes 108 are provided with a plurality of groups, and the plurality of groups of second air holes 108 are evenly arranged around the axis of the spring 103, and the number of the second air holes 108 in each group is a plurality, and the plurality of second air holes 108 in each group are arranged along the radial direction of the spring 103, and the second air holes 108 are located between the first air holes 107 and the rotating shaft 101.

[0029] A spring piece 103 is provided. Through the coordinated arrangement of the spring piece 103 and the driving assembly, the spring piece 103 becomes concave after receiving the thrust of the driving assembly, and the material on the spring piece 103 slides on the spring piece 103 and approaches the rotating shaft 101. When the driving assembly stops driving the spring piece 103, the middle part of the spring piece 103 slides upward on the rotating shaft 101 under the action of its own elasticity. At this time, the material located in the middle part of the spring piece 103 is bounced up by the spring piece 103, and the bounced up material is dispersed in the air. The contact area between the dispersed material and the gas is increased, and the material can react with the gas better.

[0030] A first air hole 107 and a second air hole 108 are provided on the spring piece 103. Under the curvature of the spring piece 103, the dispersed material moves toward the edge of the spring piece 103. The material at the edge of the spring piece 103 can still be fully in contact with the gas under the action of the first air hole 107. When the driving component drives the spring piece 103 again to make the spring piece 103 concave, the material at the edge of the spring piece 103 slides toward the middle of the rotating shaft 101. At this time, the area of ​​the material spread out on the spring piece 103 increases. Under the action of the second air hole 108, the sliding material and the material located in the middle of the spring piece 103 can still be in contact with the gas.

[0031] In this embodiment, a plurality of vibration mechanisms are provided, and the plurality of vibration mechanisms are arranged on the rotating shaft 101 at intervals along the vertical direction, dividing the interior of the cylinder 100 from top to bottom into a plurality of cavities 109, and two adjacent cavities 109 are connected through the blanking hole 106, the first air hole 107 and the second air hole 108; a plurality of spring pieces 103 are provided, which can increase the residence time of the material in the cylinder 100, improve the utilization rate of the space in the cylinder 100, increase the number of times the material is dispersed in the air, and make the material react more fully with the gas.

[0032] In this embodiment, the driving components in two adjacent vibration mechanisms alternately drive the corresponding elastic pieces 103 to move downward, so that the volume changes of two adjacent cavities 109 are opposite. When the cavity 109 between two adjacent spring pieces 103 slides in the vertical direction in the middle of the two spring pieces 103, the volume of the corresponding cavity 109 increases or decreases, and the volume changes of the two cavities 109 adjacent to the cavity 109 are just opposite, so that the gases in the two adjacent cavities 109 can be exchanged to a certain extent, and the gases can better pass through the materials on the surface of the spring pieces 103; assuming that the cavity 109 between two adjacent spring pieces 103 is a first chamber, when the volume of the first chamber increases, the volumes of the two cavities 109 adjacent to the first chamber decrease, and the internal gas enters the first cavity 109 through the first air hole 107 and the second air hole 108 on the corresponding spring piece 103, the flow rate of the gas entering the first cavity 109 increases, and it is stirred inside the first cavity 109, so that the temperature of the gas in the first cavity 109 is as uniform as possible, the uniformity of the overall temperature in the cylinder 100 is improved, and the reaction between the gas and the material is more sufficient.

[0033] In this embodiment, a plurality of accommodating cavities 110 are provided inside the rotating shaft 101, and a plurality of sliding grooves 111 are opened on the circumferential surface of the rotating shaft 101. In the axial direction of the rotating shaft 101, a spacing is provided between two adjacent accommodating cavities 110, and a spacing is also provided between two adjacent sliding grooves 111. The accommodating cavities 110 and the sliding grooves 111 are arranged correspondingly, and each accommodating cavity 110 corresponds to a cavity 109, and each sliding groove 111 penetrates the rotating shaft 101 and the corresponding accommodating cavity 110 along the radial direction of the rotating shaft 101.

[0034] In this embodiment, each driving assembly includes a cylinder 112 and a push block 113. The cylinder 112 is arranged in the accommodating chamber 110. The cylinder 112 is fixedly connected to the rotating shaft 101, and the cylinder 112 is retracted along the axial direction of the rotating shaft 101. The push block 113 is slidably arranged in the slide groove 111, and the push block 113 is connected to the cylinder 112. A groove 114 is opened in the middle of the spring sheet 103. A step 115 is provided at one end of the push block 113 away from the cylinder 112. The step 115 on the push block 113 is slidably arranged on the corresponding spring sheet 111. 03, the step 115 on the push block 113 abuts against the corresponding spring piece 103 in the axial direction of the rotating shaft 101, and the push block 113 connected to the cylinder 112 is located above the corresponding spring piece 103. When the rotating shaft 101 rotates, the spring piece 103 can be driven to rotate in the cylinder 100 through the cooperation of the step 115 on the push block 113 and the groove 114 on the corresponding spring piece 103. At the same time, the push block 113 can push the middle part of the corresponding spring piece 103 to move downward in the slide groove 111 through the step 115.

[0035] In this embodiment, a mounting groove 116 is opened on the circumferential surface of the rotating shaft 101, and the mounting groove 116 is connected to the sliding groove 111. A sealing plate 117 is provided on the mounting groove 116. The sealing plate 117 is slidably connected to the push block 113, and the push block 113 can be installed in the accommodating chamber 110 through the mounting groove 116. A plurality of fixed cylinders 118 are provided in the cylinder body 100. The fixed cylinder 118 is connected to the inner wall of the cylinder body 100 by bolts. The inner diameter of the fixed cylinder 118 is consistent with the inner diameter of the positioning ring 104. The positioning ring 104 is rotatably connected to the fixed cylinder 118, and the fixed cylinder 118 and the positioning ring 104 are alternately distributed in the axial direction of the rotating shaft 101. The fixed cylinder 118 is used to limit the sliding of the positioning ring 104 in the axial direction of the rotating shaft 101. A motor 119 is provided on the top of the cylinder body 100. The motor 119 is connected to the rotating shaft 101 and can drive the rotating shaft 101 to rotate. The top of the cylinder 100 is openable. When assembling the device for producing aluminum nitride, first place the spring piece 103 in the cylinder 100, then install a fixed cylinder 118 to limit the spring piece 103, and then install the push block 113 in the corresponding accommodating chamber 110, connect it with the cylinder 112 in the accommodating chamber 110, and make the push block 113 slidably connected with the slide groove 111, and finally install the sealing plate 117 to limit the push block 113 to slide only in the slide groove 111; then install the subsequent spring pieces 103 in sequence, and finally close the top of the cylinder 100 so that the motor 119 is connected to the rotating shaft 101. At this time, multiple cylinders 112 can be controlled to extend downward at the same time to abut against the corresponding spring pieces 103, and start the motor 119. When the push block 113 rotates with the rotating shaft 101, the push block 113 rotates to the position of the groove 114 and engages with the groove 114. At this time, the assembly of the device for producing aluminum nitride is completed.

[0036] In the present embodiment, a plurality of protrusions are provided on one side of the positioning ring 104 that is rotatably connected to the fixing cylinder 118. The plurality of protrusions are evenly distributed around the axis of the positioning ring 104. A plurality of sliders are provided on one side of the fixing cylinder 118 that is rotatably connected to the positioning ring 104. The sliders are slidably arranged on the fixing cylinder 118 along the vertical direction, and the sliders can abut against the protrusions. When the sliders abut against the protrusions, the sliders can move on the fixing cylinder 118 in a direction away from the corresponding spring piece 103. A spring is provided between the slider and the fixing cylinder 118 for resetting the slider after it is disconnected from the protrusion. The spring piece 103 drives the positioning ring 104 to rotate relative to the fixing cylinder 118. When the piston moves, the protrusion on the positioning ring 104 will contact the slider on the fixed cylinder 118 in turn. When the protrusion contacts the slider, the protrusion will push the slider to compress the spring. When the protrusion is separated from the slider, the slider is reset under the action of the spring and hits the corresponding positioning ring 104. The positioning ring 104 vibrates and transmits the vibration to the spring 103. The spring 103 will vibrate. When the push block 113 pushes the middle part of the spring 103 to move downward, the vibration generated by the spring 103 will better guide the material on the edge of the spring 103 to the middle part of the push block 113. At the same time, the material on the spring 103 will also shake and come into contact with the gas more fully.

[0037] In this embodiment, the drop holes 106 on two adjacent spring pieces 103 are not on the same vertical plane. When the material on the upper spring piece 103 falls onto the lower spring piece 103, the material will not be quickly discharged from the drop hole 106 on the lower spring piece 103, which can extend the time the material stays on the spring piece 103.

[0038] In this embodiment, the projection of the cavity 109 at the bottom of the cylinder 100 on the vertical plane is funnel-shaped, and a discharge port 120 is provided at the bottom of the cylinder 100. When the material falls into the cavity 109 at the bottom of the cylinder 100, the material can move to the discharge port 120 through the shape of the cavity 109, which is convenient for the discharge of the material.

[0039] In this embodiment, an exhaust port 121 is provided at the top of the cylinder 100, and the waste gas after reacting with the material and the excess gas in the cylinder 100 are discharged from the top of the rotating drum.

[0040] The working principle of the device for producing aluminum nitride provided in the above embodiment is:

[0041] Aluminum powder is added to the cylinder 100 through the feed port 102. At this time, the blanking hole 106 on the spring 103 closest to the feed port 102 is at the farthest position from the feed port 102, and the middle part of the spring 103 is recessed downward. After the addition of aluminum powder is completed, the feed port 102 is closed, and high-temperature nitrogen is injected into the cylinder 100 from the air inlet 105. The nitrogen flows upward from the lowest cavity 109 in the cylinder 100, passes through the first air hole 107, the second air hole 108 and the blanking hole 106 on the spring 103, and after the nitrogen in the cylinder 100 reacts with the aluminum powder, the excess gas is finally discharged from the exhaust port 121.

[0042] After the cylinder 100 is filled with gas, the two adjacent cylinders 112 are controlled to start alternately. The started cylinder 112 stretches to the maximum length and then stops. The gas pressure inside the stopped cylinder 112 is consistent with the external pressure. The cylinder 112 can shrink to the original position under the action of the restoring force of the deformed spring piece 103 to restore its own shape. When the deformed spring piece 103 recovers under its own elasticity, it pushes the push block 113 to move upward in the slide groove 111. The push block 113 pushes the cylinder 112 to shrink. After the spring piece 103 recovers, the aluminum powder on the spring piece 103 continues to move upward due to inertia and is thrown up. The thrown aluminum powder is dispersed in the air and contacts with the nitrogen in the corresponding cavity 109. At the same time, under the action of the shape of the spring piece 103, the thrown aluminum powder moves to the edge of the spring piece 103 and finally falls to a position close to the edge of the spring piece 103.

[0043] While filling the cylinder 100 with gas, the motor 119 is started. The motor 119 drives the rotating shaft 101 to rotate slowly. The rotating shaft 101 drives the spring 103 to rotate through the push block 113. The spring 103 drives the positioning ring 104 to rotate relative to the fixed cylinder 118. The protrusions on the spring 103 continuously pass through the sliders on the fixed cylinder 118. The slider compresses the spring after contacting the protrusion. When the slider is separated from the protrusion, the spring recovers and pushes the slider to hit the positioning ring 104. The positioning ring 104 vibrates and transmits the vibration to the spring 103. The aluminum powder on the vibrating spring 103 jumps slightly, the gap between the aluminum powder increases, and the nitrogen can better contact the aluminum powder. At the same time, on the spring 103 with a depression, the vibration of the spring 103 will also guide the aluminum powder on the spring 103 to move better to the middle of the spring 103.

[0044] As the shrapnel 103 rotates and the aluminum powder is thrown up by the shrapnel 103, the aluminum powder that falls on the drop hole 106 passes through the drop hole 106 and moves to the next shrapnel 103, and so on, until the aluminum powder falls from the bottom shrapnel 103 to the bottom cavity 109. After all the aluminum powder is separated from the shrapnel 103 and reacts with nitrogen to form aluminum nitride, the generated aluminum nitride is discharged from the discharge port 120.

[0045] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0046] The above-described embodiments only express several implementation methods of the present invention, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the scope of the present invention. It should be pointed out that, for a person of ordinary skill in the art, several modifications and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the attached claims.

Claims

1. A device for producing aluminum nitride, characterized in that: include: The cylinder body, the rotating shaft and the vibration mechanism, the cylinder body is fixedly arranged, the top of the cylinder body is provided with a feed port, the rotating shaft is arranged in the cylinder body around its own axis, and the axis of the rotating shaft extends in the vertical direction; the vibration mechanism includes a spring piece and a driving assembly, the spring piece is sleeved on the rotating shaft, and the spring piece is coaxial with the rotating shaft, the middle part of the spring piece slides on the rotating shaft along the axial direction of the rotating shaft, a positioning ring is fixedly installed on the circumference of the spring piece, the positioning ring is rotatably connected with the cylinder body, the driving assembly is used to intermittently push the middle part of the spring piece to slide downward on the rotating shaft, and the middle part of the spring piece can move upward under the action of restoring deformation; the cylinder body An air inlet is provided on the body, and the air inlet is located below the spring sheet; in a natural state, the middle part of the spring sheet is located above its circumference, and a blanking hole, a first air hole and a second air hole are provided on the spring sheet, and a plurality of first air holes are provided, and the blanking holes and the plurality of first air holes are located at the edge of the spring sheet, and the plurality of first air holes are evenly arranged around the axis of the spring sheet, and a plurality of groups of second air holes are provided, and the plurality of groups of second air holes are evenly arranged around the axis of the spring sheet, and the number of second air holes in each group is a plurality, and the plurality of second air holes in each group are arranged along the radial direction of the spring sheet, and the second air holes are located between the first air holes and the rotating shaft; There are multiple vibration mechanisms, which are arranged on the rotating shaft at intervals in the vertical direction, dividing the inside of the cylinder into multiple cavities from top to bottom, and two adjacent cavities are connected through the blanking hole, the first air hole and the second air hole; the driving components in the two adjacent vibration mechanisms alternately drive the corresponding spring pieces to move downward, so that the volume changes of the two adjacent cavities are opposite; an exhaust port is provided on the top of the cylinder; Aluminum powder is added into the cylinder through the feed port. At this time, the blanking hole on the shrapnel closest to the feed port is at the farthest position from the feed port, and the middle part of the shrapnel is concave downward. After the addition of aluminum powder is completed, the feed port is closed, and high-temperature nitrogen is injected into the cylinder from the air inlet. The nitrogen flows upward from the lowest cavity in the cylinder, passes through the first air hole, the second air hole and the blanking hole on the shrapnel, and after the nitrogen in the cylinder reacts with the aluminum powder, the excess gas is finally discharged from the exhaust port.

2. The device for producing aluminum nitride according to claim 1, characterized in that: A plurality of accommodating cavities are arranged inside the rotating shaft, and a plurality of slide grooves are opened on the circumferential surface of the rotating shaft. In the axial direction of the rotating shaft, a spacing is arranged between two adjacent accommodating cavities, and a spacing is also arranged between two adjacent slide grooves. The accommodating cavities and the slide grooves are arranged correspondingly, and each accommodating cavity corresponds to a cavity, and each slide groove penetrates the rotating shaft and the corresponding accommodating cavity along the radial direction of the rotating shaft.

3. The device for producing aluminum nitride according to claim 2, characterized in that: Each driving assembly includes a cylinder and a push block. The cylinder is arranged in the accommodating cavity. The cylinder is fixedly connected to the rotating shaft and the cylinder is extended and retracted along the axial direction of the rotating shaft. The push block is slidably arranged in the slide groove and is connected to the cylinder. A groove is provided in the middle of the spring sheet. A step is provided at one end of the push block away from the cylinder. The step on the push block is slidably arranged in the groove on the corresponding spring sheet, and the step on the push block abuts against the corresponding spring sheet in the axial direction of the rotating shaft.

4. The device for producing aluminum nitride according to claim 3, characterized in that: An installation groove is provided on the circumferential surface of the rotating shaft, the installation groove is connected with the sliding groove, a sealing plate is provided on the installation groove, the sealing plate is slidably connected with the push block, and the push block can be installed in the accommodating cavity through the installation groove, a plurality of fixed cylinders are provided in the cylinder body, the fixed cylinders are connected to the inner wall of the cylinder body by bolts, the inner diameter of the fixed cylinder is consistent with the inner diameter of the positioning ring, the positioning ring is rotatably connected to the fixed cylinder, and the fixed cylinder and the positioning ring are alternately distributed in the axial direction of the rotating shaft, and the fixed cylinder is used to limit the sliding of the positioning ring in the axial direction of the rotating shaft.

5. The device for producing aluminum nitride according to claim 4, characterized in that: A plurality of protrusions are provided on one side of the positioning ring and the fixed tube for rotation connection, and the plurality of protrusions are evenly distributed around the axis of the positioning ring. A plurality of sliders are provided on one side of the fixed tube and the positioning ring for rotation connection, and the sliders are slidably arranged on the fixed tube along the vertical direction, and the sliders can abut against the protrusions. When the sliders abut against the protrusions, the sliders can move on the fixed tube away from the corresponding spring pieces. A spring is provided between the slider and the fixed tube for resetting the slider after it is detached from the connection with the protrusions.

6. The device for producing aluminum nitride according to claim 1, characterized in that: The blanking holes on two adjacent spring pieces are not on the same vertical plane.

7. The device for producing aluminum nitride according to claim 1, characterized in that: The projection of the cavity at the bottom of the cylinder on the vertical plane is funnel-shaped, and a discharge port is arranged at the bottom of the cylinder.

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