Method and system for processing curved surface electrode of resonant gyroscope based on femtosecond laser

Abstract

The invention relates to the technical field of laser beam machining, in particular to a method and system for machining a resonant gyroscope curved surface electrode based on femtosecond laser, and the method comprises the following steps: clamping an electrode base on a femtosecond laser galvanometer five-axis linkage machining platform; the center axis of the curved surface electrode and the laser beam coincide with the rotating axis of the femtosecond laser galvanometer five-axis linkage machining platform, and the accurate coordinates of the laser beam in a machine tool coordinate system are determined; performing spherical surface specificity modeling on the electrode base to obtain a control code; a control code is input into a machine tool control system, after control parameters are adjusted, femtosecond laser five-axis linkage machining is conducted on the electrode base, and reflected light signals are transmitted to a computer through a real-time observer in the machining process. The method and the system provided by the invention solve the technical problem that the processing precision and the processing quality of the curved surface electrode are difficult to meet the requirements due to film layer flanging, recasting and substrate cracking caused by a heat effect.

Description

Technical Field

[0001] The present invention relates to the field of laser beam processing technology, and in particular to a method and system for processing a resonant gyroscope curved surface electrode based on a femtosecond laser. Background Art

[0002] A resonant gyroscope is a solid wave gyroscope based on the Coriolis effect, including quartz hemispherical resonant gyroscopes, metal cylinder resonant gyroscopes, nested ring gyroscopes and micro hemispherical gyroscopes. Among them, the quartz hemispherical resonant gyroscope is considered by the international academic community to be the most ideal device for strapdown inertial navigation systems of various types of vehicles in the 21st century. The quartz hemispherical resonant gyroscope consists of a resonator, an electrode base and other accessories. The electrode base is the only channel for sensitive resonator vibration and transmission of capacitance signals. It is usually composed of a fused quartz glass substrate and an outer layer of heterogeneous metal film that matches the resonator, and is finally formed by patterning to meet the requirements of hemispherical resonant gyroscope capacitance readout. The curved electrode base has a large capacitance area and is easier to obtain a better output signal under the same control level, but the position error and fractal accuracy of the curved electrode will directly affect the excitation and detection circuit loop of the hemispherical resonant gyroscope system, increase the error of the hemispherical resonant gyroscope electrode, and reduce the system accuracy. Therefore, electrode patterning requires processing curved fan-shaped electrodes evenly distributed circumferentially on the composite film without damaging the substrate. The existing photolithography technology is difficult to achieve good processing accuracy and processing quality on curved surfaces, and the technology is difficult and the process is complicated. The mask patterning coating method has a diffusion effect, and the patterning accuracy depends on the mask processing accuracy. It is costly and has poor adaptability. It has become a technical bottleneck for the research and development, manufacturing and mass production of resonant gyroscopes. The existing technology is difficult to support the high precision and future mass production applications of resonant gyroscopes.

[0003] Laser processing is an advanced manufacturing method that has developed rapidly in recent years. It focuses laser on the surface of the sample to remove or modify the material according to the design requirements to form a specified sample. It has attracted much attention due to its high precision, fast speed, non-contact, no need to introduce foreign pollutants and harsh experimental conditions. However, the traditional laser removal mechanism relies on the photothermal effect to instantly heat the material to above the melting point to melt or evaporate. This leads to the film flanging, recasting and substrate cracking caused by the thermal effect during the processing, making it difficult to meet the processing accuracy and processing quality of the curved electrode, which seriously restricts the rapid development of the resonant gyroscope. Summary of the invention

[0004] The technical problem to be solved by the present invention is to provide a method and system for processing a resonant gyroscope curved surface electrode based on a femtosecond laser, which realizes non-thermal removal, ensures that the processing result has no edge chipping, no warping, no damage to the substrate, and no additional debris, and can process a resonant gyroscope with a curved surface electrode base having high shape and position accuracy and surface quality, so that the resonant gyroscope assembled with the electrode base can significantly reduce the electrode error.

[0005] The present invention is achieved through the following technical solutions: A method for processing a resonant gyroscope curved surface electrode based on a femtosecond laser comprises the following steps: S1: Clamp the coated resonant gyro with a curved electrode base on the five-axis linkage processing platform of the femtosecond laser galvanometer; S2: Align the central axis of the curved electrode for the resonant gyroscope and the laser beam emitted by the femtosecond laser with the rotation axis of the five-axis linkage machining platform of the femtosecond laser galvanometer, and determine the precise coordinates of the laser beam in the machine tool coordinate system; S3: According to the geometric parameters of the curved electrode pattern, the curved electrode base for the resonant gyroscope after coating is spherically modeled, and the processing procedures of the curved electrode base for the resonant gyroscope are created based on the computer-aided manufacturing system. The focus motion trajectory of the laser beam is determined, and the precise coordinates of the laser beam in the machine tool coordinate system are used for processing to obtain the five-axis linkage machine tool control code based on focus tracking; S4: The five-axis linkage machine tool control code based on focus tracking is input into the machine tool control system. After adjusting the control parameters, the curved electrode base of the resonant gyroscope after coating is processed by femtosecond laser five-axis linkage. During the processing, the reflected light signal from the illumination light source to the sample surface is transmitted to the computer through the real-time observer, and the sample surface is observed and fed back in real time.

[0006] Preferably, in step S1, the coated resonant gyroscope is first fixed on a clamping tool with a curved electrode base, and then the clamping tool is fixedly mounted on a femtosecond laser galvanometer five-axis linkage processing platform.

[0007] Preferably, in step S2, the laser beam is aligned with the rotation axis of the femtosecond laser galvanometer five-axis linkage processing platform by using an arc centering method.

[0008] Furthermore, in step S2, a laser rangefinder is used to adjust the offset distance between the center axis of the curved electrode for the resonant gyroscope and the laser beam and the rotating axis of the femtosecond laser galvanometer five-axis linkage processing platform according to a negative feedback mechanism until the offset distance is less than or equal to 1 micron.

[0009] Preferably, step S3 uses a projection method to perform spherical-specific modeling on the curved electrode base for the resonant gyroscope after coating.

[0010] Furthermore, when the coated curved electrode base for the resonant gyroscope is subjected to femtosecond laser five-axis linkage processing in step S4, the electron and lattice temperatures of the coated curved electrode base for the resonant gyroscope are controlled according to formula (1): (1); in: represents the electron temperature of the coating, Indicates the electron temperature of the coating The electron heat capacity under Indicates time, represents the divergence of the composite term of the electronic temperature gradient and thermal conductivity of the coating, Indicates the electron temperature of the coating The electronic thermal conductivity under represents the gradient of the electron temperature of the coating, represents the lattice temperature of the coating, Indicates the lattice temperature of the coating The lattice heat capacity under represents the femtosecond laser source term, Indicates the processing depth of the coating.

[0011] Furthermore, the control parameters described in step S4 include the movement speed of the femtosecond laser galvanometer five-axis linkage processing platform and the femtosecond laser energy and femtosecond laser scanning speed in the femtosecond laser light source item. The femtosecond laser energy is adjusted and controlled by the laser energy regulator, and the femtosecond laser scanning speed is controlled by the laser galvanometer.

[0012] Furthermore, the control parameter is calculated according to formula (2): (2); in: represents the laser flux, express The reflectivity of the material surface at the moment, express The distance from the sample surface at the moment is The absorption coefficient of the material is Indicated by natural constant The exponential function with base , represents the pulse width, represents the femtosecond laser energy, represents the femtosecond laser repetition frequency, is the laser beam waist radius, represents the femtosecond laser scanning speed, Indicates the movement speed of the femtosecond laser galvanometer five-axis linkage processing platform.

[0013] Preferably, the movement speed of the femtosecond laser galvanometer five-axis linkage processing platform is 100 mm / min, the femtosecond laser energy is 12 microjoules, and the femtosecond laser scanning speed is 500 mm / sec.

[0014] A system for processing a resonant gyroscope curved surface electrode based on a femtosecond laser, used to execute any of the above-mentioned methods for processing a resonant gyroscope curved surface electrode based on a femtosecond laser, comprising a femtosecond laser five-axis linkage processing platform, a femtosecond laser, an aperture, a laser energy regulator, an optical switch, a reflector, a dual-wavelength lens, an illumination light source, a convex lens, a real-time observer, a laser galvanometer and a computer. The laser beam emitted by the femtosecond laser enters the laser energy regulator through the aperture for energy regulation, and then is reflected by the reflector and focused by the laser galvanometer onto a resonant gyroscope curved surface electrode base after coating mounted on the femtosecond laser five-axis linkage processing platform, located The illumination light emitted by the illumination light source above the reflector is reflected by the curved electrode base for the resonant gyroscope after coating through the convex lens, the dual-wavelength lens, the reflector and the laser galvanometer. The reflected illumination light is then returned through the laser galvanometer and the reflector, and is reflected by the dual-wavelength lens to reach the real-time observer. The computer is respectively connected to the controller of the real-time observer, the femtosecond laser, and the controller of the femtosecond laser five-axis linkage processing platform to control the parameter change of the femtosecond laser and the movement of the femtosecond laser five-axis linkage processing platform, and receives surface quality feedback from the real-time observer. The optical switch is connected to the laser energy regulator and is controlled to be turned on and off by the laser energy regulator.

[0015] Beneficial effects of the invention: The present invention provides a method and system for processing a resonant gyroscope curved surface electrode based on a femtosecond laser, which has the following advantages: 1. With the femtosecond laser five-axis linkage processing platform, the metal film of the curved electrode for the resonant gyroscope can be processed non-contactly by femtosecond laser, and finally a curved electrode base for the resonant gyroscope with high shape and position accuracy and surface quality can be processed, thereby supporting high-performance resonant gyroscopes.

[0016] 2. Utilize the interaction mechanism between femtosecond laser and heterogeneous metal film to achieve non-thermal removal, ensuring that the processing results have no edge collapse, no warping, no damage to the substrate, and no additional debris.

[0017] 3. This method also has the characteristics of flexible patterning, non-contact, and pollution-free, which can meet the stringent morphological accuracy and quality requirements pursued in the design and manufacture of electrode bases. The resonant gyroscope assembled from the processed electrode base can significantly reduce the electrode error, and thus has the potential for high precision and high performance. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the process of the present invention.

[0019] Figure 2 It is a schematic diagram of the electrode error test results of the present invention.

[0020] Figure 3 It is a schematic diagram of the system of the present invention.

[0021] In the figure: 1. Femtosecond laser; 2. Aperture; 3. Laser energy regulator; 4. Optical switch; 5. Real-time observer; 6. Illumination light source; 7. Dual-wavelength lens; 8. Reflector; 9. Laser galvanometer; 10. Curved electrode base for resonant gyroscope after coating; 11. Femtosecond laser five-axis linkage processing platform; 12. Computer; 13. Convex lens. DETAILED DESCRIPTION

[0022] A method for processing a resonant gyroscope curved electrode based on a femtosecond laser, the flow chart of which is as follows: Figure 1 As shown, the specific steps include: S1: Clamp the coated resonant gyro with a curved electrode base on the five-axis linkage processing platform of the femtosecond laser galvanometer; Preferably, the coated resonant gyroscope can be first fixed on a clamping tool with a curved electrode base, and then the clamping tool can be fixedly installed on a femtosecond laser galvanometer five-axis linkage processing platform.

[0023] S2: Align the central axis of the curved electrode for the resonant gyroscope and the laser beam emitted by the femtosecond laser with the rotation axis of the five-axis linkage machining platform of the femtosecond laser galvanometer, and determine the precise coordinates of the laser beam in the machine tool coordinate system; Specifically, the laser beam can be aligned with the rotation axis of the femtosecond laser galvanometer five-axis linkage processing platform using an arc centering method, which is a prior art.

[0024] During the adjustment process, a laser rangefinder can be used to adjust the offset distance between the center axis of the curved electrode for the resonant gyroscope and the laser beam and the rotating axis of the femtosecond laser galvanometer five-axis linkage processing platform according to the negative feedback mechanism until the offset distance is less than or equal to 1 micron, so as to meet the coaxial accuracy requirements of the coating fractal pattern processing.

[0025] S3: According to the geometric parameters of the curved electrode pattern, the curved electrode base for the resonant gyroscope after coating is spherically modeled, and the processing procedures of the curved electrode base for the resonant gyroscope are created based on the computer-aided manufacturing system. The focus motion trajectory of the laser beam is determined, and the precise coordinates of the laser beam in the machine tool coordinate system are used for processing to obtain the five-axis linkage machine tool control code based on focus tracking; Specifically, a projection method may be used to perform spherical surface-specific modeling on the curved electrode base for the resonant gyroscope after coating, and the projection method is a prior art.

[0026] S4: The five-axis linkage machine tool control code based on focus tracking is input into the machine tool control system. After adjusting the control parameters, the curved electrode base of the resonant gyroscope after coating is processed by femtosecond laser five-axis linkage. During the processing, the reflected light signal from the illumination light source to the sample surface is transmitted to the computer through the real-time observer, and the sample surface is observed and fed back in real time.

[0027] Specifically, when the curved surface electrode base for the resonant gyroscope after coating is subjected to femtosecond laser five-axis linkage processing, the electron and lattice temperature of the curved surface electrode base for the resonant gyroscope after coating can be controlled according to formula (1): (1); in: represents the electron temperature of the coating, Indicates the electron temperature of the coating The electron heat capacity under Indicates time, represents the divergence of the composite term of the electronic temperature gradient and thermal conductivity of the coating, Indicates the electron temperature of the coating The electronic thermal conductivity under represents the gradient of the electron temperature of the coating, represents the lattice temperature of the coating, Indicates the lattice temperature of the coating The lattice heat capacity under represents the femtosecond laser source term, Indicates the processing depth of the coating.

[0028] The method provided by the present invention can control the electron and lattice temperature of the curved electrode base for the resonant gyroscope after coating by adjusting and controlling the femtosecond laser light source item, thereby changing the traditional removal mechanism that relies on the photothermal effect to instantly heat the material to above the melting point for melting or evaporation, and preventing the film layer flanging, recasting and substrate cracking caused by the thermal effect during the processing, which makes it difficult for the processing accuracy and processing quality of the curved electrode to meet the requirements.

[0029] Specifically, the control parameters include the movement speed of the femtosecond laser galvanometer five-axis linkage processing platform and the femtosecond laser energy and femtosecond laser scanning speed in the femtosecond laser light source item. The femtosecond laser energy is adjusted and controlled by the laser energy regulator, and the femtosecond laser scanning speed is controlled by the laser galvanometer.

[0030] Specifically, the control parameters can be calculated according to formula (2): (2); in: represents the laser flux, express The reflectivity of the material surface at the moment, express The distance from the sample surface at the moment is The absorption coefficient of the material is Indicated by natural constant The exponential function with base , represents the pulse width, represents the femtosecond laser energy, represents the femtosecond laser repetition frequency, is the laser beam waist radius, represents the femtosecond laser scanning speed, Indicates the movement speed of the femtosecond laser galvanometer five-axis linkage processing platform.

[0031] Specifically, the movement speed of the femtosecond laser galvanometer five-axis linkage processing platform may be preferably 100 mm / min, the femtosecond laser energy may be preferably 12 microjoules, and the femtosecond laser scanning speed may be preferably 500 mm / sec.

[0032] By controlling the above parameters, it is possible to effectively avoid the metal film and the fused quartz substrate absorbing the laser at the same time, that is, the femtosecond laser will only process the metal film and will not have any effect on the fused quartz substrate. The heat affected zone caused by laser processing is reduced or even eliminated, the metal film has no edge collapse / warping after processing and has sharp edges without a recast layer, and the fused quartz substrate of the electrode base has no cracks, which can meet the stringent morphological accuracy and quality requirements pursued in the design and manufacture of the electrode base. The resonant gyroscope assembled from the processed electrode base can significantly reduce the electrode error, and thus has the potential for high precision and high performance.

[0033] The electrode base processed by femtosecond laser is assembled with the hemispherical resonant gyroscope resonator, base and shielding cover, and then evacuated to a vacuum to form a hemispherical resonant gyroscope prototype.

[0034] Through the electrode error test on the hemispherical resonant gyroscope prototype, it can be seen that the electrode base prepared by the method provided by the present invention has an angle error of less than 0.0635°, does not change significantly over time, and has good long-term stability. The electrode error test results are as follows: Figure 2 shown.

[0035] By using the method for processing curved electrodes for resonant gyroscopes based on femtosecond laser provided by the present invention, in combination with a femtosecond laser five-axis linkage processing platform, the metal film of the curved electrodes for resonant gyroscopes can be non-contact processed by femtosecond laser, and ultimately a curved electrode base for a resonant gyroscope with high shape and position accuracy and surface quality can be processed, thereby supporting a high-performance resonant gyroscope.

[0036] At the same time, the interaction mechanism between femtosecond laser and heterogeneous metal film is used to achieve non-thermal removal, ensuring that the processing results have no broken edges, no warping, no damage to the substrate, and no additional debris. In addition, this method also has the characteristics of flexible patterning, non-contact, and no pollution, which can meet the stringent morphological accuracy and quality requirements pursued by the design and manufacture of electrode bases. The resonant gyroscope assembled from the processed electrode base can significantly reduce the electrode error, and thus has the potential for high precision and high performance.

[0037] A system for processing a resonant gyroscope curved surface electrode based on a femtosecond laser, used to execute any of the above-mentioned methods for processing a resonant gyroscope curved surface electrode based on a femtosecond laser, the system diagram is as shown in Figure 3 As shown, the femtosecond laser five-axis linkage processing platform 11, the femtosecond laser 1, the aperture 2, the laser energy regulator 3, the optical switch 4, the reflector 8, the dual-wavelength lens 7, the illumination light source 6, the convex lens 13, the real-time observer 5, the laser galvanometer 9 and the computer 12, the laser beam emitted by the femtosecond laser enters the laser energy regulator through the aperture for energy regulation, and then is reflected by the reflector and focused by the laser galvanometer onto the coated resonant gyroscope curved electrode base 10 installed on the femtosecond laser five-axis linkage processing platform, the illumination light emitted by the illumination light source above the reflector passes through the convex lens 13, and the laser beam is focused by the convex lens 14. The lens, dual-wavelength lens, reflector and laser galvanometer are illuminated by the coated resonant gyroscope curved electrode base for reflection, and the reflected illumination light is returned by the laser galvanometer and the reflector, and is reflected by the dual-wavelength lens to reach the real-time observer. The computer is respectively connected with the controller of the real-time observer, the femtosecond laser and the femtosecond laser five-axis linkage processing platform to control the parameter change of the femtosecond laser and the movement of the femtosecond laser five-axis linkage processing platform, and receives the surface quality feedback from the real-time observer. The optical switch is connected with the laser energy regulator to control the opening and closing of the optical switch.

[0038] The setting of the convex lens here can convert the light emitted by the illumination light source into parallel illumination light. The reflected illumination light returns through the laser galvanometer and the reflector, and reaches the real-time observer through reflection through the dual-wavelength lens. The surface quality information of the curved electrode base for the resonant gyroscope after coating in the processing process can be amplified, which makes it easier to observe the surface quality of the curved electrode base for the resonant gyroscope after coating in the processing process.

[0039] In summary, the present invention provides a method and system for processing the curved surface electrode of a resonant gyroscope based on femtosecond laser, which changes the removal mechanism of traditional laser that relies on the photothermal effect to instantly heat the material to above the melting point for melting or evaporation, and solves the technical problem that the processing accuracy and processing quality of the curved surface electrode cannot meet the requirements due to the film flanging, recasting and substrate cracking caused by the thermal effect during the processing. The resonant gyroscope assembled from the processed electrode base can significantly reduce the electrode error, and thus has the potential for high precision and high performance.

[0040] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A method for processing a resonant gyroscope curved surface electrode based on a femtosecond laser, characterized in that: The steps include: S1: Clamp the coated resonant gyro with a curved electrode base on the five-axis linkage processing platform of the femtosecond laser galvanometer; S2: Align the central axis of the curved electrode for the resonant gyroscope and the laser beam emitted by the femtosecond laser with the rotation axis of the five-axis linkage machining platform of the femtosecond laser galvanometer, and determine the precise coordinates of the laser beam in the machine tool coordinate system; S3: According to the geometric parameters of the curved electrode pattern, the curved electrode base for the resonant gyroscope after coating is spherically modeled, and the processing procedures of the curved electrode base for the resonant gyroscope are created based on the computer-aided manufacturing system. The focus motion trajectory of the laser beam is determined, and the precise coordinates of the laser beam in the machine tool coordinate system are used for processing to obtain the five-axis linkage machine tool control code based on focus tracking; S4: The five-axis linkage machine tool control code based on focus tracking is input into the machine tool control system. After adjusting the control parameters, the curved electrode base of the resonant gyroscope after coating is processed by femtosecond laser five-axis linkage. During the processing, the reflected light signal from the illumination light source to the sample surface is transmitted to the computer through the real-time observer, and the sample surface is observed and fed back in real time.

2. The method for processing a resonant gyroscope curved electrode based on a femtosecond laser according to claim 1, characterized in that: In step S1, the coated resonant gyroscope is first fixed on a clamping tool with a curved electrode base, and then the clamping tool is fixedly installed on a femtosecond laser galvanometer five-axis linkage processing platform.

3. The method for processing a resonant gyroscope curved surface electrode based on a femtosecond laser according to claim 1, characterized in that: In step S2, the laser beam is aligned with the rotation axis of the femtosecond laser galvanometer five-axis linkage processing platform by using an arc centering method.

4. The method for processing a resonant gyroscope curved electrode based on a femtosecond laser according to claim 1, characterized in that: In step S2, a laser rangefinder is used to adjust the offset distance between the center axis of the curved electrode for the resonant gyroscope and the laser beam and the rotating axis of the femtosecond laser galvanometer five-axis linkage processing platform according to a negative feedback mechanism until the offset distance is less than or equal to 1 micron.

5. The method for processing a resonant gyroscope curved surface electrode based on a femtosecond laser according to claim 1, characterized in that: Step S3 uses a projection method to perform spherical-specific modeling on the curved electrode base of the resonant gyroscope after coating.

6. The method for processing a resonant gyroscope curved electrode based on a femtosecond laser according to claim 1, characterized in that: When the curved surface electrode base for the resonant gyroscope after coating is subjected to femtosecond laser five-axis linkage processing in step S4, the electron and lattice temperature of the curved surface electrode base for the resonant gyroscope after coating is controlled according to formula (1): （1）； in: represents the electron temperature of the coating, Indicates the electron temperature of the coating The electron heat capacity under Indicates time, represents the divergence of the composite term of the electronic temperature gradient and thermal conductivity of the coating, Indicates the electron temperature of the coating The electronic thermal conductivity under represents the gradient of the electron temperature of the coating, represents the lattice temperature of the coating, Indicates the lattice temperature of the coating The lattice heat capacity under represents the femtosecond laser source term, Indicates the processing depth of the coating.

7. The method for processing a resonant gyroscope curved electrode based on a femtosecond laser according to claim 6, characterized in that: The control parameters described in step S4 include the movement speed of the femtosecond laser galvanometer five-axis linkage processing platform and the femtosecond laser energy and femtosecond laser scanning speed in the femtosecond laser light source item. The femtosecond laser energy is adjusted and controlled by the laser energy regulator, and the femtosecond laser scanning speed is controlled by the laser galvanometer.

8. The method for processing a resonant gyroscope curved surface electrode based on femtosecond laser according to claim 6, characterized in that: The control parameters are calculated according to formula (2): （2）； in: represents the laser flux, express The reflectivity of the material surface at the moment, express The distance from the sample surface at the moment is The absorption coefficient of the material is Expressed as a natural constant The exponential function with base , represents the pulse width, represents the femtosecond laser energy, represents the femtosecond laser repetition frequency, is the laser beam waist radius, represents the femtosecond laser scanning speed, Indicates the movement speed of the femtosecond laser galvanometer five-axis linkage processing platform.

9. The method for processing a resonant gyroscope curved surface electrode based on femtosecond laser according to claim 8, characterized in that: The movement speed of the femtosecond laser galvanometer five-axis linkage processing platform is 100 mm / min, the femtosecond laser energy is 12 microjoules, and the femtosecond laser scanning speed is 500 mm / sec.

10. A system for processing resonant gyroscope curved surface electrodes based on femtosecond laser, characterized in that: A method for processing a resonant gyroscope curved electrode based on a femtosecond laser for executing any one of claims 1 to 9, comprising a femtosecond laser five-axis linkage processing platform, a femtosecond laser, an aperture, a laser energy regulator, an optical switch, a reflector, a dual-wavelength lens, an illumination light source, a convex lens, a real-time observer, a laser galvanometer and a computer, wherein the laser beam emitted by the femtosecond laser enters the laser energy regulator through the aperture for energy regulation, and then is reflected by the reflector and focused by the laser galvanometer onto a resonant gyroscope curved electrode base after coating mounted on the femtosecond laser five-axis linkage processing platform, and the illumination light above the reflector is The illumination light emitted by the source is reflected by the curved electrode base of the resonant gyroscope after coating through a convex lens, a dual-wavelength lens, a reflector and a laser galvanometer. The reflected illumination light is then returned through the laser galvanometer and the reflector, and is reflected by the dual-wavelength lens to reach the real-time observer. The computer is respectively connected to the controller of the real-time observer, the femtosecond laser, and the controller of the femtosecond laser five-axis linkage processing platform to control the parameter change of the femtosecond laser and the movement of the femtosecond laser five-axis linkage processing platform, and receives surface quality feedback from the real-time observer. The optical switch is connected to the laser energy regulator and is controlled to be turned on and off by the laser energy regulator.

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