Device and method for installing valve plate sealing ring

Abstract

The invention relates to a device and method for installing a valve plate sealing ring. The device comprises a base, a guide component and a fixing component. The base is used for fixing the valve plate, the guide part is provided with a conical surface to guide the sealing ring to enter the valve plate mounting groove, and the fixing part is connected with the base and the guide part. The method comprises the steps that the valve plate is fixed to the base, the guide part is arranged on the valve plate and sleeved with the sealing ring, the conical surface is covered with the fixing part, the fixing part is connected with the base, and the sealing ring is moved to the installation groove. The device can be repeatedly used, and falling off and uneven deformation of the sealing ring are avoided.

Description

Technical Field

[0001] The invention relates to the field of semiconductor equipment, and in particular to a device and method for installing a valve plate sealing ring. Background Art

[0002] Valves are used in semiconductor equipment to control the opening and closing of gas circuits and the size of the flow rate. The sealing ring installed on the valve plate that works for a long time will cause mechanical wear. At this time, it is often necessary to remove the old sealing ring and replace it with a new one. At this time, efficient and convenient installation of the sealing ring will affect production efficiency.

[0003] Currently, the sealing ring is assembled manually, and the sealing ring is directly inserted into the installation groove on the valve plate by hand.

[0004] The existing technology has the following problems: during the installation of the sealing ring, it is easy to pull the sealing ring as a whole to exceed the elongation rate of the sealing ring when it is designed, resulting in the sealing ring being easily detached when the valve is working after it is installed in the installation groove on the valve plate. In addition, since the direct installation by hand adopts the method of installing side by side, this will cause the deformation of the sealing ring to be uneven, and there will be gaps between parts, which will reduce the service life of the sealing ring. Summary of the invention

[0005] In order to overcome the above problems, the present invention provides a device for installing a sealing ring on a valve plate of a valve, which can prevent the sealing ring from falling off and reduce the problem of uneven force on the sealing ring caused by manual installation.

[0006] A device for installing a valve plate sealing ring, the device comprising:

[0007] A base, which is arranged at one end of the valve plate and is used to fix the valve plate;

[0008] A guide component, the guide component is arranged at the other end of the base, and comprises at least one conical surface, a bottom surface and a top surface connected to the conical surface, the bottom surface is arranged at the other end of the valve plate, and the conical surface is used to guide the sealing ring into the installation groove of the valve plate;

[0009] A fixing component is used to fix the base and the guide component.

[0010] Preferably, the fixing component includes two concentrically arranged and interconnected first and second ring bodies, the first ring body is covered on the conical surface and abuts against the conical surface when installed, and the second ring body is connected to the outer side surface of the base when installed.

[0011] Preferably, the inner side surface of the second ring body is provided with an internal thread, the outer side of the base is provided with an external thread, and the internal thread matches with the external thread.

[0012] Preferably, the fixing component further comprises a connecting portion, and the connecting portion is used to connect the first ring body and the second ring body.

[0013] Preferably, the connecting portion is two symmetrically arranged "L"-shaped strips, one end of the strip is connected to the outer side surface of the first ring body, and the other end of the strip is connected to the upper surface of the second ring body.

[0014] Preferably, the inclination angle of the conical surface is the same as the inclination angle of the side surface of the valve plate.

[0015] Preferably, the inner side surface of the first ring body is configured as an inclined surface, and the inclination angle of the inclined surface is the same as the inclination angle of the conical surface.

[0016] Preferably, the guide component further comprises an alignment portion, one end of the alignment portion extends to the conical surface, and the other end of the alignment portion extends to the top surface, and the alignment portion is a cylinder.

[0017] Preferably, the diameter of the alignment portion is the same as the minimum diameter of the circle enclosed by the inclined surfaces.

[0018] Preferably, the base is configured to have a bearing groove matching an outer edge of one end of the valve plate.

[0019] Preferably, the bottom surface is configured to have a groove matching the surface of the other end of the valve plate.

[0020] The present invention also proposes a method for installing a valve plate sealing ring, which is implemented by using the device, and the method comprises the following steps:

[0021] Fix the valve plate on the base;

[0022] Placing the guide component on the valve plate and inserting a sealing ring on the guide component;

[0023] The fixing component cover is arranged on the conical surface of the guide component, and the fixing component is connected to the base;

[0024] The sealing ring is moved along the conical surface toward the valve plate until it moves into the mounting groove of the valve plate.

[0025] The present invention has the following beneficial effects:

[0026] Reduce the tensile damage of the sealing ring caused by manual installation of the sealing ring; ensure the uniformity of expansion and contraction.

[0027] It can realize standardized installation process, the operation process is simple and efficient, and the installation consistency of the sealing ring is ensured;

[0028] The device is easy to install, and the installed sealing ring is stable and reusable. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 A three-dimensional diagram of a device for installing a valve plate sealing ring according to an embodiment of the present invention;

[0030] Figure 2 A cross-sectional view of a device for installing a valve plate sealing ring according to an embodiment of the present invention;

[0031] Figure 3 An exploded view of a device for installing a valve plate sealing ring according to an embodiment of the present invention. DETAILED DESCRIPTION

[0032] The following is a further detailed description of a device and method for installing a valve plate sealing ring proposed by the present invention in combination with the accompanying drawings and specific embodiments. According to the following description, the advantages and features of the present invention will be clearer. It should be noted that the drawings are in a very simplified form and use non-precise proportions, which are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention. In order to make the purposes, features and advantages of the present invention more obvious and easy to understand, please refer to the accompanying drawings. It should be noted that the structure, proportion, size, etc. illustrated in the drawings of this specification are only used to match the contents disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the limiting conditions for the implementation of the present invention, so they have no technical substantive significance. Any modification of the structure, change in the proportional relationship or adjustment of the size, without affecting the effects that the present invention can produce and the purposes that can be achieved, should still fall within the scope of the technical content disclosed by the present invention.

[0033] As described in the background technology, the existing method of installing the sealing ring adopts manual installation. In order to insert the sealing ring into the installation groove of the valve plate, the sealing ring will be stretched beyond the stretching limit of the sealing ring, thereby reducing the service life of the sealing ring and even causing the sealing ring to fall off. In addition, the stretching amount of each part of the sealing ring is inconsistent, and the sealing effect of each part is different. In order to achieve standardized installation operations and ensure the reliability of the seal. The present invention provides a device for installing a valve plate sealing ring.

[0034] See also Figures 1 to 3, a device for installing a valve plate sealing ring provided in an embodiment of the present invention, the device comprises a base 11, a guide component 12 and a fixing component 13. The base 11 is arranged at one end of a valve plate 21 for fixing the valve plate 21, and a mounting groove for installing the sealing ring 22 is preset on the outer edge of the valve plate 21. The base 11 is fixed to one end of the valve plate 21, and the other end is connected to the guide component 12. The guide component 12 comprises at least one conical surface 101, a bottom surface 102 connected to the conical surface 101 and a top surface 103, the bottom surface 102 abuts against the other end of the valve plate 21, the conical surface 101 is used to guide the sealing ring into the mounting groove of the valve plate 21, and the size of the bottom surface 102 is substantially the same as that of the valve plate 21, so as to ensure that the sealing ring 22 can smoothly transition from the conical surface 101 to the valve plate 21. In order to fix the guide component 12, the fixing component 13 can be used to fix the guide component 12 on the valve plate 21. The valve plate 21 is a circular plate, and the base 11, the bottom surface 102 and the top surface 103 are also circular.

[0035] In some embodiments, the inclination angle (relative to the horizontal plane) of the conical surface 101 of the guide member 12 is the same as the inclination angle (relative to the horizontal plane) of the side surface of the valve plate 21. The conical surface 101 can be designed to have a smooth surface. When the sealing ring 22 moves toward the valve plate 21 along the conical surface 101, the sealing ring 22 is gradually expanded until it passes through the conical surface 101 and transitions to the valve plate 21. In the process of pushing the sealing ring 22, the conical surface 101 can evenly expand the sealing ring 22 to ensure that the sealing ring 22 is subjected to the same force at all positions of the circumference, thereby reducing the risk of damage to the sealing ring 22 due to uneven force. At the same time, when the sealing ring is deformed to the maximum, it just reaches the side surface of the valve plate, so it will not be stretched excessively, effectively protecting the sealing ring.

[0036] Further, the bottom surface 102 of the guide member 12 is configured to have a groove 108 that matches the surface of the other end of the valve plate 21. The groove 108 is used to accommodate the protruding position of the valve plate 21, and the edge of the groove 108 abuts against the surface of the valve plate 21. Optionally, the groove 108 is a circular groove, the center of which is concentric with the center of the bottom surface; the groove 108 can firmly fix the valve plate.

[0037] In some embodiments, the fixing component 13 includes two concentrically arranged and mutually connected first ring bodies 104 and second ring bodies 105, with a certain axial distance between the two ring bodies. The first ring body 104 is covered on the conical surface 101 and abuts against the conical surface 101 when installed, and the second ring body 105 is connected to the outer side surface of the base 11 when installed. The first ring body 105 is mainly used to transmit force to the conical surface 101 so that the guide component 12 can fit tightly with the valve plate 21. The second ring body 105 is mainly used to connect with the base 11 to ensure the stability of the fixing component 13. Optionally, the connection method between the second ring body 105 and the base 11 is a detachable connection, including threaded connection, snap connection, pin connection and other methods.

[0038] As a preferred example, the inner side of the second ring body 105 is provided with an internal thread, and the outer side of the base 11 is provided with an external thread, and the internal thread cooperates with the external thread. The fixing member 13 is moved closer to the base 11 by screwing the threads, so that the guide member 12 is pressed against the valve plate 21.

[0039] In some embodiments, the inner side surface of the first ring body 104 is set as an inclined surface, and the inclination angle of the inclined surface (relative to the horizontal plane) is the same as the inclination angle of the conical surface 101. When in use, the first ring body 104 is sleeved on the conical surface 101, and the first ring body 104 with the inclined surface setting can match the conical surface 101 well, strengthen the fit between the first ring body 104 and the first conical surface 101, and make the second ring body 105 more stable when screwing with the base 11. The first ring body 104 forms a surface contact with the conical surface 101, which can provide pressure to the conical surface 101 more reliably and evenly. In addition, this inclined surface setting method can evenly transfer the pressure of the first ring body 104 to the conical surface 101, and make the combined force of the pressure point to the valve plate 21, so that the guide component 13 can move directly relative to the valve plate 21.

[0040] Due to the uncertainty of manual operation, it is often difficult to ensure that the fixing component 13 is accurately aligned with the valve plate 21 when installing it, and adjustments are usually required, which is a time-consuming and laborious process. In order to improve the efficiency and accuracy of installation, we have designed an improved solution so that the fixing component 13 can be installed quickly and accurately.

[0041] Specifically, the guide component 12 is newly provided with an alignment portion 107, one end of which extends to the conical surface 101, and the other end extends to the top surface 103, and is designed to be cylindrical. The diameter of this cylinder matches the minimum diameter of the circle surrounded by the inclined surface of the first ring body 104. In this way, when the first ring body 104 of the fixing component 13 is sleeved on the alignment portion 107, the first ring body 104 and the guide component 12 can be concentrically arranged to ensure that the fixing component 13 can be correctly aligned with the valve plate 21. This design not only simplifies the installation process, but also facilitates the connection between the second ring body 105 of the fixing component 13 and the base 11, thereby greatly improving the efficiency and accuracy of the installation.

[0042] In order to further improve the convenience and efficiency of installation, the fixing component 13 also includes a connecting portion 106, which can connect the first ring body 104 and the second ring body 105. The connecting portion 106 can be designed as two symmetrical "L"-shaped strips, one end of each strip is connected to the outer side of the first ring body 104, and the other end is connected to the upper surface of the second ring body 105. Such a design not only ensures the structural stability of the fixing component 13, but also allows the operator to hold the connecting portion 106, or rotate the connecting portion 106 by a tool (such as a wrench), so as to conveniently rotate the fixing component 13.

[0043] In addition, the overall design of the fixing component 13 adopts a frame structure. This open design allows the operator to easily push the sealing ring 22 from the gap of the fixing component 13, further simplifying the installation process. This design takes into account both the stability of the structure and the convenience of operation, making the entire installation process smoother and more efficient.

[0044] In some examples, the base 11 is configured to have a bearing groove that matches the outer edge of one end of the valve plate 21. A through hole is provided in the bearing groove, and the through hole is connected to the threaded hole on the valve plate, and the base 11 can be fixedly connected to the valve plate 21 by bolts 109. Optionally, there are two bolts 109. Further preferably, a bolt groove is provided on the lower surface of the base 11, and the bolt groove passes through from one side of the base to the opposite side, and supporting feet are formed on both sides of the bolt groove on the lower surface of the base, and the bolts are provided in the bolt groove. The bearing groove can fix the valve plate 21 to prevent sliding, and at the same time, the bolts 109 further reinforce the valve plate. The bolt groove is used to prevent the bolt cap from protruding downward and affecting the flatness of the base 11.

[0045] The present invention also provides a method for installing a valve plate sealing ring, which is implemented by using the device, and the method comprises the following steps:

[0046] The valve plate 21 is fixed to the base 11 by bolts 109 as in the above embodiment;

[0047] The guide component 12 is placed on the valve plate 21, and the sealing ring 22 is inserted into the guide component 12; specifically, the bottom surface of the guide component 12 is placed on the valve plate 21. In some examples, the protruding portion of the valve plate 21 is embedded in the groove 108 of the bottom surface, and the edge of the groove 108 abuts against the surface of the valve plate 21.

[0048] The fixing member 13 is covered on the conical surface 101 of the guide member 12, and the fixing member 13 is connected to the base 11, and the threaded connection as in the above embodiment can be adopted;

[0049] The sealing ring 22 is moved along the conical surface 101 toward the valve plate 21 until it moves into the installation groove of the valve plate 21 .

[0050] In summary, the device can reduce the tensile damage of the sealing ring caused by manual installation of the sealing ring, and ensure the uniformity of expansion and contraction. At the same time, it can realize a standardized installation process, the operation process is simple and efficient, and the consistency of the sealing ring installation is ensured; moreover, the device is easy to install, and the installed sealing ring is stable and reusable.

[0051] Although the content of the present invention has been described in detail through the above preferred embodiments, it should be appreciated that the above description should not be considered as a limitation of the present invention. After reading the above content, it will be apparent to those skilled in the art that various modifications and substitutions of the present invention will occur. Therefore, the protection scope of the present invention should be limited by the appended claims.

Claims

1. A device for installing a valve plate sealing ring, characterized in that: The device comprises: A base, which is arranged at one end of the valve plate and is used to fix the valve plate; A guide component, the guide component is arranged at the other end of the base, and comprises at least one conical surface, a bottom surface and a top surface connected to the conical surface, the bottom surface is arranged at the other end of the valve plate, and the conical surface is used to guide the sealing ring into the installation groove of the valve plate; A fixing component is used to fix the base and the guide component.

2. The device for installing a valve plate sealing ring according to claim 1, characterized in that: The fixing component includes two concentrically arranged and mutually connected first and second ring bodies, the first ring body is covered on the conical surface and abuts against the conical surface when installed, and the second ring body is connected to the outer side surface of the base when installed.

3. The device for installing a valve plate sealing ring according to claim 2, characterized in that: The inner side surface of the second ring body is provided with an internal thread, and the outer side of the base is provided with an external thread, and the internal thread matches with the external thread.

4. The device for installing a valve plate sealing ring according to claim 2, characterized in that: The fixing component further includes a connecting portion, and the connecting portion is used to connect the first ring body and the second ring body.

5. The device for installing a valve plate sealing ring according to claim 4, characterized in that: The connecting portion is two symmetrically arranged "L"-shaped strips, one end of the strip is connected to the outer side surface of the first ring body, and the other end of the strip is connected to the upper surface of the second ring body.

6. The device for installing a valve plate sealing ring according to claim 1, characterized in that: The inclination angle of the conical surface is the same as the inclination angle of the side surface of the valve plate.

7. The device for installing a valve plate sealing ring according to claim 2, characterized in that: The inner side surface of the first ring body is configured as an inclined surface, and the inclination angle of the inclined surface is the same as the inclination angle of the conical surface.

8. The device for installing a valve plate sealing ring according to claim 7, characterized in that: The guide component further comprises an alignment portion, one end of which extends to the conical surface and the other end of which extends to the top surface, and the alignment portion is a cylinder.

9. The device for installing a valve plate sealing ring according to claim 8, characterized in that: The diameter of the alignment portion is the same as the minimum diameter of the circle surrounded by the inclined surfaces.

10. The device for installing a valve plate sealing ring according to claim 1, characterized in that: The base is configured to have a bearing groove matching the outer edge of one end of the valve plate.

11. The device for installing a valve plate sealing ring according to claim 1, characterized in that: The bottom surface is configured to have a groove matching the surface of the other end of the valve plate.

12. A method for installing a valve plate sealing ring, characterized in that: The method is implemented by the device according to any one of claims 1 to 11, and comprises the following steps: Fix the valve plate on the base; Placing the guide component on the valve plate and inserting a sealing ring on the guide component; The fixing component cover is arranged on the conical surface of the guide component, and the fixing component is connected to the base; The sealing ring is moved along the conical surface toward the valve plate until it moves into the mounting groove of the valve plate.

Images