A method and system for adjusting the damping uniformity of a micro-shell resonant gyroscope

Abstract

The present invention discloses a method and system for adjusting the damping uniformity of a micro-shell resonant gyroscope, the method comprising: assembling and modal precessing a metallized micro-shell resonator, and performing free decay of vibration every X°; sampling the data of free decay during the modal precession, and fitting to obtain a circumferential non-uniformity curve of the damping of the micro-shell resonator; defining the axis with the highest Q value as the low-damping axis, defining the axis with the lowest Q value as the high-damping axis, and defining the maximum difference between the current Q values ​​of the low-damping axis and the high-damping axis as ΔQ; sputtering and depositing a thin film on the low-damping axis to adjust the damping non-uniformity until the damping non-uniformity requirement is met. The present invention is applied to the field of micro-electromechanical technology, and the damping non-uniformity is adjusted by depositing a thin film on the outer surface of the micro-shell resonator, and the damping non-uniformity caused by all damping factors can be adjusted without causing surface contamination.

Description

Technical Field

[0001] The invention relates to the field of micro-electromechanical technology, and in particular to a method and system for adjusting the damping uniformity of a micro-shell resonant gyroscope. Background Art

[0002] The ideal micro-shell resonator pursues all-round symmetry, aiming to induce equal quality factors in any direction of electrostatic excitation. However, the resonator in actual production often faces the challenge of non-uniform distribution of internal damping, which is reflected in the difference of quality factor of micro-shell gyroscope. The inconsistency of quality factor will cause the drift of gyroscope and affect its output performance. This inconsistency of quality factor directly reflects the uneven state of damping distribution, and its root cause can be traced back to the inherent defects of materials and the accumulated errors in the manufacturing process.

[0003] The problem of uneven damping caused by material defects is usually solved by optimizing the selection of raw materials and implementing process technologies such as high-temperature annealing. The manufacturing error in the geometric shape of the resonator is also a key factor causing the uneven distribution of the quality factor, which is usually solved by improving the manufacturing process and precise quality adjustment. However, these technical solutions are usually completed before the micro-shell resonator is metallized. The unmetallized resonator has the problem of low accuracy in detecting circumferential damping unevenness. The final adjustment of damping unevenness after assembly is of great significance to improving the performance of the micro-shell resonant gyroscope.

[0004] The damping uniformity of the micro-shell resonant gyroscope has an important influence on its operating performance, which is specifically reflected in the following aspects:

[0005] 1) Angle drift and lock zone phenomenon: During the precession of the resonator of the micro-shell resonant gyroscope, the damping unevenness has a strong angle dependence, and the angle drift caused is distributed in a sinusoidal law. This angle drift will directly affect the measurement accuracy and stability of the gyroscope.

[0006] 2) Increased noise and zero bias drift. Uneven damping will increase the noise level of the gyro, causing the output signal to contain more random errors and interference components. The increase in noise will further reduce the measurement accuracy and stability of the gyro. Uneven damping will also cause the gyro output zero bias drift, that is, when the gyro is stationary or rotating at a constant speed, its output signal will deviate from the theoretical value and produce a certain deviation. This deviation will directly affect the measurement accuracy and reliability of the gyro.

[0007] Existing patents related to the damping non-uniformity of micro-shell resonant gyroscopes mainly focus on the methods of removing mass and compensating for back-end errors in traditional hemispherical resonant gyroscopes. For example, the Chinese invention patent application with publication number CN115540903A applies for a method and system for adjusting the damping and stiffness non-uniformity of a hemispherical resonant gyroscope, which describes the demodulation and identification of the vibration signal of the hemispherical resonator after the metallization of the inner surface of the hemispherical resonator, the damping non-uniformity error and stiffness deviation are obtained, and the damping and stiffness non-uniformity errors of the hemispherical resonator are adjusted by adjusting the resistance value of the resistor. The Chinese invention patent application with publication number CN115824263A is based on a damping adjustment method and system for a hemispherical resonant gyroscope, which mainly uses an ion beam to remove mass after identifying the damping and stiffness axis information of the hemispherical resonator to adjust the damping non-uniformity of the hemispherical resonator. The Chinese invention patent application with publication number CN113587954A discloses a compensation control method and system for uneven damping of a full-angle hemispherical resonant gyroscope. The compensation force value is detected and calculated after the hemispherical resonator is excited, and the error is integrated and eliminated over the entire cycle.

[0008] At present, the damping non-uniformity adjustment scheme for mechanical mass removal has the advantages of good directness, intuitive effect, easy verification, good stability, and the adjusted damping uniformity can be maintained for a long time, but it also has some disadvantages. The singleness of damping adjustment. The mass removal adjustment method is mainly aimed at the support damping caused by the unbalanced mass of the resonator, but the factors affecting the damping non-uniformity include thermoelastic damping, film damping, surface damping, etc. In addition, the adjustment of mechanical mass is mainly through ion beam removal of mass. During the ion beam removal of mass, the material will splash and re-deposit, etc. If it is not cleaned, the quality factor of the resonator will be greatly reduced, and the resonator after assembly is not convenient to clean. For the damping non-uniformity adjustment scheme for back-end circuit compensation, its advantages are high flexibility and better cost control, but its disadvantages are mainly high algorithm complexity and high development cost; it may be affected by circuit noise and has a high dependence on the circuit system; in high real-time application scenarios, real-time performance will be limited. Summary of the invention

[0009] In view of the above-mentioned deficiencies in the prior art, the present invention provides a micro-shell resonant gyroscope damping uniformity adjustment method and system, which can effectively identify and compensate for the damping unevenness of the micro-shell resonant gyroscope, reduce its drift and improve the gyroscope performance.

[0010] To achieve the above object, the present invention provides a method for adjusting the damping uniformity of a micro-shell resonant gyroscope, comprising the following steps:

[0011] Step 1, assembling and modulating the metallized micro-shell resonator, and performing free attenuation of vibration every X°;

[0012] Step 2, sampling the data of free decay of the micro-shell gyroscope during the vibration mode precession, and fitting to obtain the Q value information and its corresponding vibration mode angle, so as to form the circumferential non-uniformity curve of the damping of the micro-shell resonator;

[0013] Step 3, in the micro-shell resonator damping circumferential non-uniformity curve, define the axis with the highest Q value as the low damping axis, define the axis with the lowest Q value as the high damping axis, and define the maximum difference between the current Q values ​​of the low damping axis and the high damping axis as ΔQ;

[0014] Step 4, sputter deposit a thin film on the low damping axis of the micro-shell resonator to perform damping unevenness adjustment, and then perform steps 1 to 3 on the adjusted micro-shell resonator to obtain a new ΔQ, and determine whether the new ΔQ meets the damping unevenness requirement:

[0015] If so, output the current microshell resonator;

[0016] Otherwise, proceed to step 4 again.

[0017] In one embodiment, in step 1, the free attenuation of vibration every X° is specifically:

[0018] The vibration is freely attenuated every 5° to ensure the accuracy of the circumferential non-uniformity curve of the micro-shell resonator damping.

[0019] In one embodiment, in step 2, the sampling of the data of free decay of the micro-shell gyroscope during the vibration mode precession is specifically:

[0020] A sampling frequency of 1 Hz is used to sample the free decay data of the micro-shell gyroscope during the vibration mode precession.

[0021] In one embodiment, in step 4, the sputtering and depositing of a thin film on the low damping axis of the micro-shell resonator to perform damping unevenness adjustment is specifically as follows:

[0022] After the morphology of the assembled micro-shell gyroscope is obtained by industrial CT, a 3D model of the assembled micro-shell gyroscope is constructed by using 3D modeling software, and a repair mask is designed;

[0023] Four rows of holes are opened on the mask at intervals of 90°, corresponding to the four directions of the four low damping axes on the micro-shell resonator, wherein each row of holes contains N holes, and are evenly distributed on the mask along the direction corresponding to the low damping axis;

[0024] A 3D mask is printed with photosensitive resin, and the mask is covered on the micro-shell resonator, and each row of holes is aligned with the corresponding low damping axis. When the current ΔQ is greater than the first threshold, a thin film is sputter-deposited on one or more holes close to the outermost side, otherwise a thin film is sputter-deposited on one or more holes close to the innermost side.

[0025] In one embodiment, each row of holes contains N holes, specifically:

[0026] Each row of holes contains 4 holes.

[0027] To achieve the above object, the present invention further provides a micro-shell resonant gyroscope damping uniformity adjustment system, which adopts the above micro-shell resonant gyroscope damping uniformity adjustment method, comprising the following steps:

[0028] A vibration mode precession unit is used to perform vibration mode precession on the metallized and assembled micro-shell resonator and perform free attenuation of vibration every X°;

[0029] The data sampling and fitting unit is used to sample the free decay data of the micro-shell gyroscope during the vibration mode precession process, and to fit the Q value information and its corresponding vibration mode angle to form the circumferential non-uniformity curve of the damping of the micro-shell resonator;

[0030] The damping difference extraction unit defines the axis with the highest Q value as the low damping axis, the axis with the lowest Q value as the high damping axis, and defines ΔQ as the maximum difference between the current Q values ​​of the low damping axis and the high damping axis in the circumferential non-uniformity curve of the damping of the micro-shell resonator;

[0031] The adjustment verification unit is used to sputter and deposit a thin film on the low damping axis of the micro-shell resonator to perform damping unevenness adjustment, and then after obtaining a new ΔQ, determine whether the new ΔQ meets the damping unevenness requirement. If so, output the current micro-shell resonator; otherwise, adjust it again.

[0032] Compared with the prior art, the present invention has the following beneficial technical effects:

[0033] 1. The present invention aims at a micro-shell resonant gyroscope with a smaller size and thinner wall thickness. The damping unevenness is adjusted by depositing a thin film on the outer surface of the micro-shell resonator. It not only has the advantages of stable mechanical adjustment, but also avoids the problem of mechanical noise caused by surface contamination caused by mass removal adjustment. In addition, the damping unevenness caused by all damping factors is adjusted without causing surface contamination. It can be applied to all sensors that focus on quality factors.

[0034] 2. In the process of adjusting the damping non-uniformity of the present invention, the sputtering deposited film mainly affects the damping and will not bring about changes in the frequency difference of the resonator. Moreover, it belongs to the adjustment of the mechanical structure of the resonator and is an important basis for achieving good results in the back-end compensation. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0036] Figure 1 It is a flow chart of a method for adjusting damping uniformity of a micro-shell resonant gyroscope in an embodiment of the present invention;

[0037] Figure 2 An example diagram of a circumferential non-uniformity curve of damping of a micro-shell resonator in an embodiment of the present invention;

[0038] Figure 3 An example diagram of a mask for adjusting damping unevenness in an embodiment of the present invention;

[0039] Figure 4 This is an example diagram of a micro-shell resonant gyroscope after adjusting the damping non-uniformity in an embodiment of the present invention;

[0040] Figure 5 It is a structural block diagram of the damping uniformity adjustment system of the micro-shell resonant gyroscope in an embodiment of the present invention.

[0041] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0042] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0043] In addition, the technical solutions between the various embodiments of the present invention can be combined with each other, but it must be based on the fact that ordinary technicians in the field can implement it. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0044] Example 1

[0045] In view of the uneven damping of the micro-shell resonant gyroscope, this embodiment discloses a method for adjusting the uniformity of damping of the micro-shell resonant gyroscope. According to the damping unevenness curve obtained by test, a metal film is deposited on the outer surface of the resonator to adjust the damping uniformity. Among them, the damping unevenness is mainly carried out by the method of vibration mode precession. When the micro-shell resonator is excited to vibrate, its vibration form (vibration mode) is a four-amplitude vibration, consisting of four antinodes and four nodes. After the vibration mode precesses by adjusting the excitation force of different electrodes, the damping unevenness curve of the resonator can be obtained by fitting after the vibration mode is freely decayed at intervals of a certain angle. Then, the damping uniformity of the resonator is adjusted by coating the low-damping axis of the resonator to increase the damping, thereby reducing the influence of the damping uniformity on the angle drift of the micro-shell gyroscope.

[0046] refer to Figure 1 In this embodiment, a method for adjusting the damping uniformity of a micro-shell resonant gyroscope specifically comprises the following steps:

[0047] Step 1, assembling and modulating the metallized micro-shell resonator, and performing free vibration decay every X°, wherein preferably, performing free vibration decay every 5° to ensure the accuracy of the uneven curve;

[0048] Step 2, sampling the data of free decay of the micro-shell gyroscope during the vibration mode precession, and fitting to obtain the Q value information and its corresponding vibration mode angle, so as to form the circumferential non-uniformity curve of the damping of the micro-shell resonator;

[0049] Step 3, in the micro-shell resonator damping circumferential non-uniformity curve, define the axis with the highest Q value as the low damping axis, define the axis with the lowest Q value as the high damping axis, and define the maximum difference between the current Q values ​​of the low damping axis and the high damping axis as ΔQ;

[0050] Step 4, sputter deposit a thin film on the low damping axis of the micro-shell resonator to perform damping unevenness adjustment, and then perform steps 1 to 3 on the adjusted micro-shell resonator to obtain a new ΔQ, and determine whether the new ΔQ meets the damping unevenness requirement. For example, when the new ΔQ is less than the set value, the surface has met the damping unevenness requirement:

[0051] If so, output the current microshell resonator;

[0052] Otherwise, proceed to step 4 again.

[0053] The metallization of the micro-shell gyroscope is an important step in its manufacturing process. Only after metallization can the micro-shell gyroscope perform free precession of vibration mode and signal detection. In the control of the metallized micro-shell gyroscope, the control force is only provided by the electrodes in the x and y directions. f x and fy The size of needs to be constantly changed to ensure that its combined force always follows the vibration angle of the micro-shell gyroscope. , Decomposed into forces along the major and minor axes of the ellipse , :

[0054] ;

[0055] in, , is the control force applied on the x-axis and y-axis, , are the driving force and the orthogonal force applied on the major axis and the minor axis, θ is the vibration angle;

[0056] Similarly, and It can also be expressed as the superposition of in-phase component and orthogonal component:

[0057] ;

[0058] in, and They are The in-phase and quadrature quantities of and They are The in-phase and quadrature quantities of

[0059] By controlling the energy control loop and angle control loop of the micro-shell gyroscope, it can be made to resonate in a certain vibration direction:

[0060] ;

[0061] ;

[0062] in, E is the resonance energy, τ is the resonator free decay time, Δ τ is the decay time difference of the damping axis, θ τ is the damping axis deflection angle, ω is the resonant frequency, κ is the angle gain, Ω is the angular velocity input, θ ω is the stiffness axis deflection angle, Q is the quality factor;

[0063] The quality factor (Q value) directly reflects the energy storage and dissipation capacity of the resonant system, and damping unevenness is one of the main reasons for increased energy dissipation and decreased vibration stability. Therefore, the level of Q value can indirectly reflect the degree of damping unevenness. The calculation formula of Q value is shown as follows:

[0064] ;

[0065] in, is the resonant frequency of the micro-hemispherical resonator;

[0066] In the specific implementation process of step 2, after sampling the data of free decay of the micro-shell gyroscope during the vibration mode precession with a sampling frequency of 1 Hz, the sampled data is fitted using matlab software to obtain Q value information and its corresponding vibration mode angle, forming a circumferential non-uniformity curve of the damping of the micro-shell resonator, such as Figure 2 The circumferential inhomogeneity curve of the micro-shell resonator damping is the basis for adjusting the damping inhomogeneity, and provides the azimuth angle of film deposition and the amplitude of adjustment when adjusting the damping.

[0067] After obtaining the circumferential inhomogeneity curve of the damping of the micro-shell resonator, since the decay time of the micro-hemispherical resonator is different at different vibration angles, the axis with the highest and lowest energy decay time constants is called the main damping axis, the axis with the highest Q value is the low damping axis, and the axis with the lowest Q value is the high damping axis. Therefore, the damping unevenness can be expressed as the difference between the damping of the high damping axis and the low damping axis, and the maximum difference between the current Q values ​​of the low damping axis and the high damping axis is defined as ΔQ. Depositing a thin film on the low damping axis can increase the damping, and the difference ΔQ between the low damping axis and the high damping axis can be continuously adjusted.

[0068] In this embodiment, the process of sputtering and depositing a thin film on the low damping axis of the micro-shell resonator to perform damping unevenness adjustment is specifically as follows:

[0069] When the coating mask contacts the micro-shell resonator, it may cause an increase in its surface damping. It is very important to design a mask of appropriate size. Industrial computed tomography, referred to as industrial CT, is an advanced non-destructive testing technology. After obtaining the morphology of the assembled micro-shell gyroscope using industrial CT, a 3D model of the assembled micro-shell gyroscope is constructed using 3D modeling software, and a mask for repair is designed, such as Figure 3 As shown, four rows of small holes are opened on the mask every 90°, which correspond to the four directions of the low damping axis;

[0070] The four holes in each row are evenly distributed from the position of the shell near the teeth to the anchor position. When depositing films on the four holes in the longitudinal position, the degree of influence on damping is also different. Sputtering and depositing films on the holes near the teeth has a greater impact on damping. This is because deformation energy is the main factor affecting the micro-shell gyroscope. The deformation energy near the top anchor position is smaller than the deformation energy near the teeth position. The specific calculation process is shown in the following formula:

[0071] ;

[0072] ;

[0073] in, u is the deformation energy density, μ is Poisson's ratio, ε x , ε y , ε z For strain, γ yz , γ zx , γ xy is the shear strain, v For deformation energy.

[0074] The uneven damping of the micro-shell resonator can be adjusted by sputtering and depositing thin films by aligning the circumferential angle of the small hole with the low damping axis (the circumferential damping is the smallest). The four points in the same row can be adjusted according to the size of the damping adjustment. When the damping difference (ΔQ) is relatively large, the small hole close to the outermost hole or more holes can be selected. When the damping difference is relatively small, the small hole close to the innermost hole can be selected for precise adjustment;

[0075] Then, the photosensitive resin is used to print the 3D mask. The photosensitive resin printer is an advanced device that uses light-curing technology to build three-dimensional objects layer by layer. It is also called a stereolithography (SLA) technology printer. The mask required for printing the micro-shell gyroscope damping unevenness adjustment is mainly divided into the following steps: liquid photosensitive resin preparation, layered slicing of the three-dimensional modeling mask, ultraviolet irradiation, layer-by-layer stacking, and post-processing;

[0076] Finally, the mask is covered on the micro-shell resonator, and each row of holes is aligned with the corresponding low damping axis. When the current ΔQ is greater than the first threshold, a thin film is sputtered and deposited on one or more holes close to the outermost side, otherwise a thin film is sputtered and deposited on one or more holes close to the innermost side, for example Figure 4 shown.

[0077] It is worth noting that although this embodiment Figure 1The steps in the process are shown in sequence as indicated by the arrows, but the steps are not necessarily executed in the order indicated by the arrows. Unless otherwise specified in this document, there is no strict order restriction for the execution of the steps, and the steps can be executed in other orders. Figure 1 At least part of the steps may include multiple sub-steps or multiple stages. These sub-steps or stages are not necessarily executed at the same time, but can be executed at different times. The execution order of these sub-steps or stages is not necessarily sequential, but can be executed in turn or alternately with other steps or at least part of the sub-steps or stages of other steps.

[0078] Example 2

[0079] Based on the micro-shell resonant gyroscope damping uniformity adjustment method in Example 1, this embodiment discloses a micro-shell resonant gyroscope damping uniformity adjustment method system, referring to Figure 5 The micro-shell resonant gyro damping uniformity adjustment method system includes a vibration mode precession unit, a data sampling and fitting unit, a damping difference extraction unit and an adjustment verification unit. Specifically,

[0080] The vibration mode precession unit is used to perform vibration mode precession on the metallized and assembled micro-shell resonator, and perform free attenuation of vibration every X°;

[0081] The data sampling and fitting unit is used to sample the free decay data of the micro-shell gyroscope during the vibration mode precession process, and to fit the Q value information and its corresponding vibration mode angle to form the circumferential non-uniformity curve of the damping of the micro-shell resonator;

[0082] The damping difference extraction unit defines the axis with the highest Q value as the low damping axis, the axis with the lowest Q value as the high damping axis in the circumferential non-uniformity curve of the micro-shell resonator damping, and defines ΔQ as the maximum difference between the current Q values ​​of the low damping axis and the high damping axis;

[0083] The adjustment verification unit is used to sputter and deposit a thin film on the low damping axis of the micro-shell resonator to perform damping unevenness adjustment, and then after obtaining a new ΔQ, determine whether the new ΔQ meets the damping unevenness requirement. If so, the current micro-shell resonator is output; otherwise, it is adjusted again.

[0084] In this embodiment, the specific working process and working principle of the vibration mode precession unit, the data sampling and fitting unit, the damping difference extraction unit and the adjustment verification unit are the same as those in the method of embodiment 1, so they are not described in detail in this embodiment. Each unit module can be implemented in whole or in part by software, hardware and a combination thereof, and each unit module can be embedded in or independent of the processor in the computer device in the form of hardware, or can be stored in the memory in the computer device in the form of software, so that the processor can call and execute the operations corresponding to each of the above unit modules.

[0085] The above description is only a preferred embodiment of the present invention, and does not limit the protection scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the inventive concept of the present invention, or directly / indirectly applied in other related technical fields are included in the protection scope of the present invention.

Claims

1. A method for adjusting the damping uniformity of a micro-shell resonant gyroscope, characterized in that: The steps include: Step 1, assembling and modulating the metallized micro-shell resonator, and performing free attenuation of vibration every X°; Step 2, sampling the data of free decay of the micro-shell gyroscope during the vibration mode precession, and fitting to obtain the Q value information and its corresponding vibration mode angle, so as to form the circumferential non-uniformity curve of the damping of the micro-shell resonator; Step 3, in the micro-shell resonator damping circumferential non-uniformity curve, define the axis with the highest Q value as the low damping axis, define the axis with the lowest Q value as the high damping axis, and define the maximum difference between the current Q values ​​of the low damping axis and the high damping axis as ΔQ; Step 4, sputter deposit a thin film on the low damping axis of the micro-shell resonator to perform damping unevenness adjustment, and then perform steps 1 to 3 on the adjusted micro-shell resonator to obtain a new ΔQ, and determine whether the new ΔQ meets the damping unevenness requirement: If so, output the current microshell resonator; Otherwise, proceed to step 4 again.

2. The method for adjusting the damping uniformity of a micro-shell resonant gyroscope according to claim 1, characterized in that: In step 1, the free attenuation of vibration every X° is specifically: The vibration is freely attenuated every 5° to ensure the accuracy of the circumferential non-uniformity curve of the micro-shell resonator damping.

3. The method for adjusting the damping uniformity of a micro-shell resonant gyroscope according to claim 1, characterized in that: In step 2, the sampling of the data of free decay of the micro-shell gyroscope during the vibration mode precession is specifically as follows: A sampling frequency of 1 Hz is used to sample the free decay data of the micro-shell gyroscope during the vibration mode precession.

4. The method for adjusting the damping uniformity of a micro-shell resonant gyroscope according to claim 1, 2 or 3, characterized in that: In step 4, the sputtering and depositing of a thin film on the low damping axis of the micro-shell resonator to perform damping unevenness adjustment is specifically as follows: After the morphology of the assembled micro-shell gyroscope is obtained by industrial CT, a 3D model of the assembled micro-shell gyroscope is constructed by using 3D modeling software, and a repair mask is designed; Four rows of holes are opened on the mask at intervals of 90°, corresponding to the four directions of the four low damping axes on the micro-shell resonator, wherein each row of holes contains N holes, and are evenly distributed on the mask along the direction corresponding to the low damping axis; A 3D mask is printed with photosensitive resin, and the mask is covered on the micro-shell resonator, and each row of holes is aligned with the corresponding low damping axis. When the current ΔQ is greater than the first threshold, a thin film is sputter-deposited on one or more holes close to the outermost side, otherwise a thin film is sputter-deposited on one or more holes close to the innermost side.

5. The method for adjusting the damping uniformity of a micro-shell resonant gyroscope according to claim 4, characterized in that: Each row of holes contains N holes specifically: Each row of holes contains 4 holes.

6. A micro-shell resonant gyroscope damping uniformity adjustment system, characterized in that: The method for adjusting the damping uniformity of a micro-shell resonant gyroscope according to any one of claims 1 to 5 comprises: A vibration mode precession unit is used to perform vibration mode precession on the metallized and assembled micro-shell resonator and perform free attenuation of vibration every X°; The data sampling and fitting unit is used to sample the free decay data of the micro-shell gyroscope during the vibration mode precession process, and to fit the Q value information and its corresponding vibration mode angle to form the circumferential non-uniformity curve of the damping of the micro-shell resonator; The damping difference extraction unit defines the axis with the highest Q value as the low damping axis, the axis with the lowest Q value as the high damping axis, and defines ΔQ as the maximum difference between the current Q values ​​of the low damping axis and the high damping axis in the circumferential non-uniformity curve of the damping of the micro-shell resonator; The adjustment verification unit is used to sputter and deposit a thin film on the low damping axis of the micro-shell resonator to perform damping unevenness adjustment, and then after obtaining a new ΔQ, determine whether the new ΔQ meets the damping unevenness requirement. If so, output the current micro-shell resonator; otherwise, adjust it again.

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