A high voltage power supply for an ion pump

Abstract

The present invention discloses an ion pump high-voltage power supply, which belongs to the fields of power supply technology and ion pump technology. The ion pump high-voltage power supply of the present invention includes: a square wave generating circuit, a forward inverter circuit, a voltage doubling circuit, a power management circuit and a high-voltage restart auxiliary circuit. The two voltage doubling circuits for generating positive and negative high voltages of the present invention share a set of converters and transformers, which not only improves efficiency but also reduces the installation volume; by real-time monitoring of the output current of the high-voltage power supply, and shutting off the high voltage when the current is lower than the set threshold, and restarting the high voltage after a period of time, the operating efficiency is further improved; compared with the solution of increasing the battery capacity, the cost of the system can be greatly reduced, and the experimental results show that the high-voltage power supply of the present invention can be continuously operated for more than 30 days when only one 9V dry battery is used, which is significantly improved in the endurance time of the high-voltage power supply compared with the prior art.

Description

Technical Field

[0001] The invention relates to an ion pump high voltage power supply, belonging to the field of power supply technology and ion pump technology. Background Art

[0002] An ion pump is a device that uses an electric field to discharge gas and generate positive and negative ions. In scientific research and industrial applications, ion pumps are widely used in gas purification, material surface treatment, and electronic device manufacturing in a vacuum environment. High-voltage power supply is one of the core components of an ion pump. In some special cases, such as when the mains power supply is interrupted and the ion pump needs to continue to operate, the traditional power supply method is no longer applicable and batteries must be used to supply power.

[0003] In the existing technology, the battery capacity is usually increased to extend the life of the high-voltage power supply. The main idea of ​​this solution is to increase the capacity of the battery so that it can provide power supply for the high-voltage power supply for a longer time when there is no mains power supply. In addition, the ion pump requires a positive high voltage and a negative high voltage to operate. In the existing technology, two sets of high-voltage power supplies are usually used to power the ion pump.

[0004] Existing solutions have some obvious disadvantages. First, increasing the battery capacity will significantly increase the cost of the system. In addition, due to the increase in the volume and weight of the battery, the volume and weight of the entire system will also increase significantly, which is unacceptable for some application scenarios. In addition, the use of two independent power supplies to generate positive high voltage and negative high voltage has low operating efficiency and will accelerate the consumption of battery power. Therefore, the existing technology has obvious problems and limitations in this field, and a new solution is needed to improve the working efficiency of the high-voltage power supply, thereby extending its battery life. Summary of the invention

[0005] In order to reduce system cost, reduce the volume and weight of the power supply, and extend the life of the high-voltage power supply, the present invention provides an ion pump high-voltage power supply, including: a square wave generating circuit, a forward inverter circuit, a voltage doubling circuit, a power management circuit and a high-voltage restart auxiliary circuit;

[0006] The square wave generating circuit is used to generate a square wave to drive the MOS tube Q1 in the forward inverter circuit;

[0007] The forward inverter circuit comprises: a MOS tube Q1 and a transformer T1; an AC voltage is generated between the primary winding of the transformer T1 by controlling the conduction and shutdown of the MOS tube Q1, and the two secondary windings of the transformer T1 respectively generate AC voltages accordingly;

[0008] The voltage doubling circuit is used to rectify the AC voltage output by the transformer T1 into a DC voltage and realize double amplification. The voltage doubling circuit includes a positive voltage doubling circuit and a negative voltage doubling circuit, which are respectively connected to the two secondary windings of the transformer T1 and output amplified positive and negative high voltages respectively;

[0009] The power management circuit includes: a timer IC2, a comparator IC3B and a transistor Q2. The comparator IC3B outputs a control signal by comparing the cross-group voltage with the reference voltage, drives the timer IC2 to generate a high or low level to control the turn-off of the transistor Q2, thereby controlling the operation and stop of the square wave generating circuit; the cross-group voltage is the voltage generated by the output current of the negative voltage multiplier circuit flowing through the resistor R5;

[0010] The high-voltage restart auxiliary circuit includes: a MOS tube Q4, a triode Q3 and a diode D6, the output end of the timer IC2 is connected to the anode of the diode D6, and the cathode of the diode D6 is respectively connected to the gate of the MOS tube Q4 and the capacitor C9 through a resistor R9; the base of the triode Q3 is connected to the drain of the MOS tube Q4 through a resistor R6, the emitter is connected to the power supply, and the collector is connected to the timer IC2; the capacitor C9 is connected to the source of the MOS tube Q4.

[0011] Optionally, the square wave generating circuit includes: a timer IC1, a gate driving chip IC4;

[0012] Pin 3 of the timer IC1 is connected to pin 4 of the gate drive chip IC4 through resistor R11; the power supply is connected to the first plate of capacitor C4 through resistors RA1 and RB1, the first plate of capacitor C4 is connected to pin 6 of the timer IC1, and the second plate of capacitor C4 is grounded; pin 5 of the timer IC1 is connected to a constant voltage; pin 5 of the gate drive chip IC4 is connected to the gate of the MOS tube Q1.

[0013] Optionally, the forward inverter circuit further includes a Schottky diode D1, wherein an anode of the Schottky diode D1 is connected to the primary winding, and a cathode of the Schottky diode D1 is connected to a power supply.

[0014] Optionally, the positive voltage doubling circuit includes a capacitor C1, a capacitor C2, a diode D2 and a diode D3, the first plate of the capacitor C1 is connected to the first end of the first secondary winding, and the second plate is respectively connected to the cathode of the diode D2 and the anode of the diode D3; the first plate of the capacitor C2 is respectively connected to the anode of the diode D2 and the second end of the first secondary winding, and the second plate is connected to the cathode of the diode D3.

[0015] Optionally, the negative voltage multiplier circuit includes: a capacitor C3, a capacitor C6, a diode D4 and a diode D5, the first plate of the capacitor C3 is connected to the first end of the second secondary winding, and the second plate is respectively connected to the anode of the diode D4 and the cathode of the diode D5; the first plate of the capacitor C6 is respectively connected to the cathode of the diode D4 and the positive input terminal of the comparator IC3B, and the second plate is connected to the anode of the diode D5.

[0016] Optionally, the reference voltage generating circuit of the comparator IC3B includes: a resistor R8, a resistor R10 and a capacitor C10; the first end of the resistor R8 is connected to a power supply, and the second end is respectively connected to the first end of the resistor R10, the first end of the capacitor C10, and the negative input end of the comparator IC3B; the second end of the resistor R10 and the second end of the capacitor C10 are grounded.

[0017] Optionally, the square wave period is:

[0018]

[0019] The square wave duty cycle is:

[0020]

[0021] in, and Indicates resistance value, Indicates the capacitance of capacitor C4.

[0022] Optionally, the primary-to-secondary turns ratio of the transformer T1 is 9:1500.

[0023] The present invention provides an ion pump, comprising the ion pump high voltage power supply as described in any one of the above items.

[0024] The beneficial effects of the present invention are:

[0025] 1. Significant cost-effectiveness: The present invention extends the battery life by improving the working efficiency of the high-voltage power supply, rather than increasing the battery capacity. This can not only significantly reduce the cost of the system, but also keep the volume and weight of the entire system relatively small because there is no need to increase the volume and weight of the battery, thereby improving the cost-effectiveness of the system.

[0026] 2. Long battery life: The present invention monitors the output current of the high-voltage power supply in real time, turns off the high voltage when the current is lower than the set threshold, and restarts the high voltage after a period of time, thereby greatly improving the operating efficiency of the power supply. Experimental results show that the high-voltage power supply of the present invention can run continuously for more than 30 days using only one 9V dry battery. Compared with the prior art, this has significantly improved the battery life of the high-voltage power supply.

[0027] 3. High space utilization: The two voltage doubling circuits for generating positive and negative high voltages of the present invention share a set of converters and transformers, which not only improves efficiency but also reduces the installation volume. This is of great significance for some application scenarios with limited space.

[0028] 4. High degree of intelligence: The present invention realizes intelligent power management by monitoring the output current of the high-voltage power supply in real time and automatically adjusting the working state of the high-voltage power supply according to the change of the current. Compared with the existing technology, this improves the intelligence of the system and enables users to manage the high-voltage power supply more conveniently.

[0029] In summary, compared with the prior art, the present invention has the advantages of low cost, long battery life, high space utilization and high intelligence, and is a technical solution with broad application prospects. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0031] Figure 1 This is a working logic flow chart of the high voltage power supply of the ion pump of the present invention.

[0032] Figure 2 The figure is a simplified schematic diagram of the high voltage power supply of the ion pump of the present invention.

[0033] Figure 3 This is a schematic diagram of the interactive interface between the front panel and rear panel of the ion pump high voltage power supply. DETAILED DESCRIPTION

[0034] In order to make the objectives, technical solutions and advantages of the present invention more clear, the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.

[0035] Embodiment 1:

[0036] This embodiment provides an ultra-low power consumption ion pump high voltage power supply, see Figure 2 The power supply circuit mainly includes five parts: ① square wave generating circuit, used to drive MOS tube Q1; ② forward inverter circuit, used to convert 9V DC voltage into AC voltage, which is boosted by transformer T1; ③ voltage doubling circuit, used to rectify the AC voltage output by the transformer into DC voltage and achieve double amplification; ④ power management circuit, used to set the automatic shutdown and restart of the high-voltage power supply; ⑤ high-voltage restart auxiliary circuit, used to ensure the smooth restart of the high voltage.

[0037] like Figure 2 As shown, the square wave generating circuit is composed of timer IC1, gate driver chip IC4 and some resistors and capacitors. In the initial state, pin 3 of IC1 outputs a high level, which is sent to pin 4 of IC4 through R11. The level of pin 5 of IC4 is inverted with that of pin 4, so the square wave generating circuit outputs a low level in the initial state (pin 5 of IC4 is the output end of the square wave generating circuit). The voltage of pin 5 of IC1 is a constant value of 6V (2*Vcc / 3), and the 9V voltage of the battery charges C4 through RA1 and RB1. When the voltage on the upper end of C4 (pin 6 of IC1) is greater than 6V (the voltage on pin 5 of IC1), the level of pin 3 of IC1 is flipped to a low level, and after passing through IC4, the square wave generating circuit outputs a high level. At the same time, pin 7 of IC1 is forced to short-circuit with a low level, and C4 is discharged through RB1. When the voltage on the upper end of C4 is lower than 3V (Vcc / 3), the level of pin 3 of IC1 is reversed to a high level, and the level of pin 5 of IC4 is reversed to a low level, that is, the square wave generator outputs a low level. Repeating the cycle, by setting the values ​​of RA1, RB1 and C4, the charge and discharge time of C4 can be adjusted, and the frequency and duty cycle of the square wave can also be set.

[0038] The formula for setting the square wave period is:

[0039]

[0040] The formula for setting the duty cycle is:

[0041]

[0042] The forward inverter circuit consists of MOSFET Q1, transformer T1 and Schottky diode D1. When the square wave generator circuit outputs a high level, Q1 is turned on and the transformer pin 3 is pulled low; when the square wave generator outputs a low level, Q1 is turned off, and the current of the primary winding (pins 3 and 4) of T1 immediately becomes 0A. The sudden change of current in the leakage inductance causes a voltage spike to be generated at pin 3 of T1. The relationship between voltage and current is as follows:

[0043]

[0044] The number of turns between pin 1 and pin 2 of T1 is equal to the number of turns between pin 3 and pin 4. When the voltage of pin 3 exceeds 18.6V, the voltage of pin 1 exceeds 9.6V, and D1 will be turned on, clamping the voltage of pin 1 to 9.6V, and also clamping the voltage of pin 3 to 18.6V (to prevent the peak voltage from breaking down Q1), until the energy in the leakage inductance is exhausted. Therefore, the square wave generating circuit can generate an AC voltage with an amplitude of 9V between the primary winding of T1, that is, pin 3 and pin 4, by controlling the conduction and shutdown of Q1. The primary-to-secondary turns ratio of T1 is 9:1500, and the secondary side of T1 (that is, between pins 7 and 8, between pins 5 and 6) will generate an AC high voltage with an amplitude of 1500V.

[0045] The voltage doubler circuit is divided into a positive voltage doubler circuit and a negative voltage doubler circuit. The positive and negative voltage doubler circuits share a transformer T1. The positive voltage doubler circuit is composed of C1, C2, D2, and D3, and the negative voltage doubler circuit is composed of C3, C6, D4, and D5. Taking the positive voltage doubler circuit as an example, when the voltage at pin 8 of T1 is negative compared to pin 7, pin 7 charges C1 through D2 and charges to 1500V (the voltage of C1 is low on the left and high on the right); when the voltage at pin 8 of T1 is high compared to pin 7, the voltage at the left side of C1 is 1500V compared to pin 7. Since the voltage at the right side of C1 is 1500V higher than the voltage at the left side, the voltage at the right side of C1 is 3000V higher than the voltage at pin 7 of T1. D3 is turned on, and the secondary winding of T1 (pins 7 and 8) charges C2 through C1 and D3. After multiple cycles, the voltage at both ends of C2 can be charged to 3000V, and the positive voltage doubler circuit outputs a high voltage of 3000V. Based on the same principle, the negative voltage doubler circuit outputs -3000V high voltage.

[0046] The power management circuit is composed of timer IC2, comparator IC3B, transistor Q2 and some resistors and capacitors. The current of negative voltage output will flow through GND through resistor R5 and return to pin 5 of T1. The output current will generate a cross-group voltage on R5, which is proportional to the output current. The cross-group voltage is compared with the voltage divider on R10 by comparator IC3B. By adjusting the resistance values ​​of R5, R8 and R10, it is set so that when the current of negative voltage output of the voltage doubler circuit is less than 50nA, the cross-group voltage on R5 is lower than the voltage divider on R10. At this time, comparator IC3B outputs a low level, which is given to pin 2 of IC2 through R7, and immediately drives pin 3 to output a high level, which is given to the base of transistor Q2 through R3. Q2 is turned on to pull down the reset pin 4 of IC1, prohibiting the square wave generator from working, and the power supply no longer outputs high voltage. When pin 2 of IC2 is pulled to a low level, the short circuit of pin 7 is released inside IC2, and the +9V voltage charges C7 through R4. The voltage on C7 increases exponentially with the time constant R4*C7. When the voltage on C7 reaches 6V (2*Vcc / 3), the trigger is reset, pin 7 of IC2 is short-circuited again, C7 is discharged quickly, and pin 3 of IC2 is driven to output a low level, so that Q2 is turned off, the square wave generator is restarted, and the power supply continues to output high voltage. By adjusting the resistance value of R4 and the capacitance value of C7, the duration of shutting down the high-voltage power supply when the output current is detected to be lower than 50nA can be arbitrarily set. This embodiment improves the efficiency of the power supply and extends the battery life by shutting down and restarting the high-voltage power supply in a timely manner.

[0047] At the moment when the high voltage is restarted, the positive and negative high voltages gradually increase from 0V. Before the output voltage reaches the level that can drive the ion pump to work, the high voltage power supply output current is 0A, which is lower than 50nA, causing the power management circuit to be triggered again and turn off the high voltage. In this way, the high voltage power supply cannot be restarted. The high voltage restart auxiliary circuit is used to restart the high voltage.

[0048] The high voltage restart auxiliary circuit is composed of MOSFET Q4, transistor Q3, diode D6 and some resistors and capacitors. When the 3rd pin of IC2 of the power management circuit outputs a high level to turn off the high voltage, the high level also turns on MOSFET Q4 through D6 and R9, pulls down the lower end of R6, turns on transistor Q3, and maintains the 2nd pin of IC2 at a high level. At the moment when the high voltage needs to be restarted, the 3rd pin of IC2 flips to a low level. Since the output current is lower than 50nA, the 7th pin of IC3B still outputs a low level. At this time, D6 is reversely cut off, and the voltage on C9 will keep Q4 and Q3 turned on, and keep the 2nd pin of IC2 high to prevent it from being triggered again by IC3B. By adjusting the capacitance of C9, the power on C9 can be maintained until the high voltage power supply is successfully restarted. After the high voltage is restarted, the power on C9 is consumed, Q4 and Q3 are turned off, and the control of the power management circuit is returned to the comparator IC3B.

[0049] Through the above steps, this embodiment can realize intelligent management of high-voltage power supply, improve its operating efficiency, and extend its battery life. At the same time, due to the use of technical means such as shared converters and transformers and real-time monitoring of the output current of the high-voltage power supply, the installation volume of the high-voltage power supply is significantly reduced, and the weight is also reduced, thereby improving the portability and practicality of the entire system.

[0050] Some steps in the embodiments of the present invention may be implemented using software, and the corresponding software program may be stored in a readable storage medium, such as a CD or a hard disk.

[0051] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. An ion pump high voltage power supply, characterized in that: include: Square wave generating circuit, forward inverter circuit, voltage doubling circuit, power management circuit and high voltage restart auxiliary circuit; The square wave generating circuit is used to generate a square wave to drive the MOS tube Q1 in the forward inverter circuit; The forward inverter circuit comprises: a MOS tube Q1 and a transformer T1; an AC voltage is generated between the primary winding of the transformer T1 by controlling the conduction and shutdown of the MOS tube Q1, and the two secondary windings of the transformer T1 respectively generate AC voltages accordingly; The voltage doubling circuit is used to rectify the AC voltage output by the transformer T1 into a DC voltage and realize double amplification. The voltage doubling circuit includes a positive voltage doubling circuit and a negative voltage doubling circuit, which are respectively connected to the two secondary windings of the transformer T1 and output amplified positive and negative high voltages respectively; The power management circuit includes: a timer IC2, a comparator IC3B and a transistor Q2. The comparator IC3B outputs a control signal to the trigger pin of the timer IC2 by comparing the cross-group voltage with the reference voltage, and drives its output end to generate high and low levels to control the shutdown of the transistor Q2, thereby controlling the operation and stop of the square wave generating circuit; the cross-group voltage is the voltage generated by the output current of the negative voltage multiplier circuit flowing through the resistor R5; The high-voltage restart auxiliary circuit includes: a MOS tube Q4, a triode Q3 and a diode D6, the output end of the timer IC2 is connected to the anode of the diode D6, and the cathode of the diode D6 is respectively connected to the gate of the MOS tube Q4 and the capacitor C9 through a resistor R9; the base of the triode Q3 is connected to the drain of the MOS tube Q4 through a resistor R6, the emitter is connected to the power supply, and the collector is connected to the trigger pin of the timer IC2; the capacitor C9 is connected to the source of the MOS tube Q4.

2. The ion pump high voltage power supply according to claim 1, characterized in that: The square wave generating circuit comprises: a timer IC1 and a gate driving chip IC4; Pin 3 of the timer IC1 is connected to pin 4 of the gate drive chip IC4 through resistor R11; the power supply is connected to the first plate of capacitor C4 through resistors RA1 and RB1, the first plate of capacitor C4 is connected to pin 6 of the timer IC1, and the second plate of capacitor C4 is grounded; pin 5 of the timer IC1 is connected to a constant voltage; pin 5 of the gate drive chip IC4 is connected to the gate of the MOS tube Q1.

3. The ion pump high voltage power supply according to claim 1, characterized in that: The forward inverter circuit further includes a Schottky diode D1 , wherein an anode of the Schottky diode D1 is connected to the primary winding, and a cathode of the Schottky diode D1 is connected to a power supply.

4. The ion pump high voltage power supply according to claim 1, characterized in that: The positive voltage doubling circuit includes a capacitor C1, a capacitor C2, a diode D2 and a diode D3. The first plate of the capacitor C1 is connected to the first end of the first secondary winding, and the second plate is respectively connected to the cathode of the diode D2 and the anode of the diode D3; the first plate of the capacitor C2 is respectively connected to the anode of the diode D2 and the second end of the first secondary winding, and the second plate is connected to the cathode of the diode D3.

5. The ion pump high voltage power supply according to claim 1, characterized in that: The negative voltage doubling circuit includes: a capacitor C3, a capacitor C6, a diode D4 and a diode D5, wherein the first plate of the capacitor C3 is connected to the first end of the second secondary winding, and the second plate is respectively connected to the anode of the diode D4 and the cathode of the diode D5; the first plate of the capacitor C6 is respectively connected to the cathode of the diode D4 and the positive input end of the comparator IC3B, and the second plate is connected to the anode of the diode D5.

6. The ion pump high voltage power supply according to claim 1, characterized in that: The reference voltage generating circuit of the comparator IC3B includes: a resistor R8, a resistor R10 and a capacitor C10; the first end of the resistor R8 is connected to the power supply, and the second end is respectively connected to the first end of the resistor R10, the first end of the capacitor C10, and the negative input end of the comparator IC3B; the second end of the resistor R10 and the second end of the capacitor C10 are grounded.

7. The ion pump high voltage power supply according to claim 2, characterized in that: The square wave period is: The square wave duty cycle is: in, and Indicates resistance value, Indicates the capacitance of capacitor C4.

8. The ion pump high voltage power supply according to claim 1, characterized in that: The primary-to-secondary turns ratio of the transformer T1 is 9:1500.

9. An ion pump, characterized in that: The ion pump comprises an ion pump high voltage power supply as claimed in any one of claims 1 to 8.

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