Power module cleaning device

Abstract

The invention provides a power module cleaning device which comprises a bottom plate, electrode plates and a cleaning device. The two ends of the bottom plate are fixedly provided with vertically-arranged electrode plates. A supporting plate is fixedly arranged on the vertical plate, and the vertical plate is fixedly connected with the bottom plate; the transfer frame is provided with a groove matched with the power module; and the clamping assembly is used for forming a clamping position for clamping the power module with the supporting plate. The cleaning device has the beneficial effects that the horizontal plasma flow is generated through the vertically-arranged electrode plates, the power module is clamped through the clamping assembly and then removed from the transfer frame, the power module is better exposed in the plasma flow, and the cleaning effect is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor processing, and in particular relates to a power module cleaning device. Background Art

[0002] The power module cleaning device is needed in the production process of power modules to clean the surface of the power modules. When the two electrode plates are placed vertically, a horizontal plasma flow is generated during operation. In order to facilitate the rapid cleaning of multiple power modules, multiple power modules are generally transferred through a transfer frame. After cleaning, the transfer frame is used to transfer the multiple power modules. The horizontal plasma flow is blocked by the frame, resulting in low cleaning efficiency. Summary of the invention

[0003] In view of this, the present invention aims to provide a power module cleaning device, in order to solve at least one of the above-mentioned technical problems.

[0004] To achieve the above object, the technical solution of the present invention is achieved as follows:

[0005] A power module cleaning device, comprising:

[0006] A bottom plate, with vertically arranged electrode plates fixedly disposed at both ends of the bottom plate;

[0007] A vertical plate, wherein a support plate is fixedly arranged on the vertical plate, and the vertical plate is fixedly connected to the bottom plate;

[0008] A transfer frame, wherein a groove matching the power module is formed on the transfer frame;

[0009] A clamping assembly is used to form a clamping position for clamping the power module with the support plate.

[0010] Further, the clamping assembly includes a slide plate, the vertical plate is provided with a strip hole matching the slide plate, the strip hole is vertically arranged, the slide plate can be movably connected to the inner side of the strip hole, the slide plate is fixed with a clamping plate, and the clamping plate and the support plate form a clamping position for clamping the power module;

[0011] The slide plate is correspondingly provided with a driving component for driving the slide plate to move.

[0012] Further, the driving assembly includes a driving block, the driving block is movably connected to the vertical plate, the sliding plate is fixedly provided with a horizontal plate, the horizontal plate is provided with a guide column, the driving block is provided with a guide groove, and the guide column is installed on the inner side of the guide groove;

[0013] The guide groove includes an upper transverse guide groove and a lower transverse guide groove. The upper transverse guide groove and the lower transverse guide groove are connected at one end close to the transfer frame through a vertical guide groove, and the lower transverse guide groove is connected to the middle end of the upper transverse guide groove at one end away from the transfer frame through an oblique guide groove.

[0014] Furthermore, a first elastic sheet is provided at one end of the oblique guide groove adjacent to the upper transverse guide groove, and an end of the first elastic sheet away from the transfer frame is fixedly connected to the driving block;

[0015] A second elastic sheet is provided on the side wall of the lower end of the oblique guide slot adjacent to the lower transverse guide slot, and the upper end of the second elastic sheet is fixedly connected to the driving block.

[0016] Furthermore, a connecting rod is provided at one end of the driving block adjacent to the transfer frame, a driving rod is fixedly provided at one end of the connecting rod adjacent to the transfer frame, the diameter of the driving rod is larger than the diameter of the connecting rod, a mounting hole matching the driving rod is opened on the vertical plate, the diameter of the mounting hole matches the diameter of the driving rod, the driving rod is installed on the inner side of the mounting hole, an annular boss is fixedly provided on the inner side of one end of the mounting hole away from the transfer frame, a compression spring is provided between the annular boss and the driving rod.

[0017] Further, the connecting rod is threadedly connected to the driving block;

[0018] The end surface of the driving block adjacent to the transfer frame is in contact with the vertical plate.

[0019] Furthermore, a guide rod is fixedly provided on the vertical plate, a guide hole is opened on the horizontal plate, and the guide rod is installed on the inner side of the guide hole;

[0020] The transverse plate is fixedly mounted on the end surface of the slide plate away from the transfer frame.

[0021] Furthermore, the power module cleaning device also includes a support member, a receiving plate is fixedly provided on the support member, and a base is fixedly provided at the lower end of the support member.

[0022] Furthermore, a receiving groove corresponding to the power module is formed on the receiving plate.

[0023] Furthermore, a strip-shaped through hole is opened on the side surface of the transfer frame.

[0024] Compared with the prior art, the power module cleaning device described in the present invention has the following beneficial effects:

[0025] The power module cleaning device described in the present invention generates a horizontal plasma flow through a vertically arranged electrode plate, and the power module is clamped by a clamping assembly and then evacuated from the transfer frame, so that the power module is better exposed to the plasma flow, thereby improving the cleaning effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The accompanying drawings constituting a part of the present invention are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the accompanying drawings:

[0027] Figure 1 It is a schematic diagram of the three-dimensional structure of the device according to an embodiment of the present invention;

[0028] Figure 2 This is a schematic diagram of the three-dimensional structure of the support member according to an embodiment of the present invention;

[0029] Figure 3 For the embodiment of the present invention Figure 2 Schematic diagram of the structure at A in the middle;

[0030] Figure 4 It is a schematic diagram of the three-dimensional structure of the transfer frame according to an embodiment of the present invention;

[0031] Figure 5 It is a schematic diagram of a three-dimensional structure of a vertical plate mounted with a skateboard from a first perspective according to an embodiment of the present invention;

[0032] Figure 6 It is a schematic diagram of the stereoscopic structure of the vertical plate installed with the skateboard from a second viewing angle according to an embodiment of the present invention;

[0033] Figure 7 It is a schematic diagram of the cross-sectional structure of the driving rod according to an embodiment of the present invention;

[0034] Figure 8 This is a schematic diagram of the three-dimensional structure of the vertical plate according to an embodiment of the present invention;

[0035] Fig. 9 This is a schematic diagram of the three-dimensional structure of a skateboard according to an embodiment of the present invention;

[0036] Fig.10 This is a schematic diagram of the three-dimensional structure of the horizontal plate according to an embodiment of the present invention;

[0037] Fig.11 It is a structural schematic diagram of the installation state of the guide column and the guide groove according to an embodiment of the present invention.

[0038] Description of reference numerals:

[0039] 1. Vertical plate; 2. Electrode plate; 3. Transfer frame; 4. Support member; 5. Drive rod; 6. Drive block; 7. Slide plate; 8. Horizontal plate; 9. Compression spring; 10. First elastic sheet; 11. Second elastic sheet; 101. Support plate; 102. Guide rod; 103. Mounting hole; 104. Strip hole; 201. Bottom plate; 301. Strip through hole; 302. Groove; 401. Receiver plate; 402. Receiver groove; 403. Base; 501. Connecting rod; 601. Upper horizontal guide groove; 602. Lower horizontal guide groove; 603. Vertical guide groove; 604. Oblique guide groove; 701. Clamping plate; 801. Guide hole; 802. Guide column. DETAILED DESCRIPTION

[0040] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments may be combined with each other.

[0041] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and the like are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", and the like may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0042] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0043] The present invention will be described in detail below with reference to the accompanying drawings and in conjunction with embodiments.

[0044] like Figures 1 to 11As shown, a power module cleaning device comprises: a bottom plate 201, both ends of the bottom plate 201 are fixedly provided with vertically arranged electrode plates 2; a vertical plate 1, a support plate 101 is fixedly provided on the vertical plate 1, the number of the support plates 101 is multiple, the multiple support plates 101 are evenly arranged along the height direction, and the vertical plate 1 is fixedly connected to the bottom plate 201; a transfer frame 3, the transfer frame 3 is provided with grooves 302 matching the power module, the grooves 302 correspond to the support plates 101, each support plate 101 is correspondingly provided with two grooves 302, and the grooves 302 are located on both sides of the inner end of the transfer frame 3; a clamping assembly, the clamping assembly is used to form a clamping position for clamping the power module with the support plate 101.

[0045] The clamping assembly includes a slide plate 7, and a strip hole 104 matching the slide plate 7 is opened on the vertical plate 1. The strip hole 104 is vertically arranged, and the slide plate 7 can be movably connected to the inner side of the strip hole 104. A clamping plate 701 is fixedly provided on the slide plate 7, and the clamping plate 701 and the support plate 101 form a clamping position for clamping the power module; the slide plate 7 is correspondingly provided with a driving assembly for driving the slide plate 7 to move.

[0046] The driving assembly includes a driving block 6, which is movably connected to the vertical plate 1, a horizontal plate 8 is fixedly provided on the sliding plate 7, a guide column 802 is provided on the horizontal plate 8, a guide groove is opened on the driving block 6, and the guide column 802 is installed on the inner side of the guide groove; the guide groove includes an upper horizontal guide groove 601 and a lower horizontal guide groove 602, and the upper horizontal guide groove 601 and the lower horizontal guide groove 602 are connected at one end adjacent to the transfer frame 3 through a vertical guide groove 603, and the lower horizontal guide groove 602 is connected at one end away from the transfer frame 3 through an oblique guide groove 604 with the middle end of the upper horizontal guide groove 601.

[0047] A first elastic sheet 10 is provided at one end of the oblique guide groove 604 adjacent to the upper transverse guide groove 601, and the end of the first elastic sheet 10 away from the transfer frame 3 is fixedly connected to the driving block 6; a second elastic sheet 11 is provided on the side wall of the lower end of the oblique guide groove 604 adjacent to the lower transverse guide groove 602, and the upper end of the second elastic sheet 11 is fixedly connected to the driving block 6.

[0048] A connecting rod 501 is provided at one end of the driving block 6 adjacent to the transfer frame 3, and a driving rod 5 is fixedly provided at one end of the connecting rod 501 adjacent to the transfer frame 3. The diameter of the driving rod 5 is larger than the diameter of the connecting rod 501. A mounting hole 103 matching the driving rod 5 is opened on the vertical plate 1. The mounting hole 103 corresponds to the transfer frame 3. The diameter of the mounting hole 103 matches the diameter of the driving rod 5. The driving rod 5 is installed on the inner side of the mounting hole 103. An annular boss is fixedly provided on the inner side of the end of the mounting hole 103 away from the transfer frame 3. A compression spring 9 is provided between the annular boss and the driving rod 5. The compression spring 9 plays a limiting role.

[0049] The connecting rod 501 is threadedly connected to the driving block 6; the end surface of the driving block 6 adjacent to the transfer frame 3 is in contact with the vertical plate 1, and the driving block 6 plays a limiting role.

[0050] A guide rod 102 is fixedly provided on the vertical plate 1, and a guide hole 801 is opened on the horizontal plate 8. The guide rod 102 is installed on the inner side of the guide hole 801; the guide rod 102 guides the movement process of the slide plate 7, making the movement process of the slide plate 7 more stable, and the horizontal plate 8 is fixedly installed on the end face of the slide plate 7 away from the transfer frame 3.

[0051] To prevent leakage of the plasma stream, the device can be installed inside the box.

[0052] In other embodiments, the power module cleaning device also includes a support member 4, on which a plurality of receiving plates 401 are fixedly provided, each support plate 101 is correspondingly provided with a receiving plate 401, and a base 403 is fixedly provided at the lower end of the support member 4. The receiving plate 401 is provided with a receiving groove 402 corresponding to the power module, and the receiving groove 402 plays a positioning role for the power module. The side of the transfer frame 3 is provided with a strip through hole 301, and the strip through hole 301 is convenient for plasma to pass through and improves the cleaning efficiency. The transfer frame 3 places the lower end faces of one end of the plurality of power modules on the upper end face of the support plate 101, and then moves the receiving groove 402 on the receiving plate 401 of the support member 4 to align with the other end of the power module and insert it to support the other end of the power module, and finally moves the transfer frame 3 to expose the power module to the plasma flow generated by the electrode plate 2.

[0053] Working process:

[0054] When this solution is implemented, the two sides of the power module are aligned with the groove 302 of the transfer frame 3 and inserted, and multiple power modules are inserted in sequence. Then the transfer frame 3 moves toward the vertical plate 1, and the lower end surface of the power module contacts the upper end surface of the support plate 101. The transfer frame 3 drives the driving rod 5 to move toward the driving plate. At this time, the guide column 802 is located at the end of the upper horizontal guide groove 601 away from the transfer frame 3 ( Fig.11 When the guide post 802 moves along the upper transverse guide groove 601 (during this process, the first elastic sheet 10 plays a supporting role to prevent the guide post 802 from falling into the oblique guide groove 604) to the vertical guide groove 603, the guide post 802 and the slide plate 7 move downward, the clamping plate 701 and the support plate 101 clamp the power module, and then move away from the drive plate. Under the elastic force of the compression spring 9, the drive plate is reset, and the guide post 802 moves in the lower transverse guide groove 602 (during this process, the second elastic sheet 11 is deformed so that the guide post 802 can pass through) to the end of the lower transverse guide groove 602 away from the transfer frame 3 (such as Fig.11 b in the figure above), Fig.11The arrow in the above figure indicates the moving direction of the guide column 802. The description in this process is for easy understanding that the guide rod 102 moves relatively in the guide groove. In fact, the guide column 802 only moves up and down, and the drive plate only moves left and right.

[0055] The power supply of the electrode plate 2 is turned on to emit a plasma flow to clean the surface of the power module.

[0056] After cleaning, the grooves 302 of the transfer frame 3 are aligned with the two sides of the power module and inserted, and then the transfer frame 3 moves toward the vertical plate 1, and the transfer frame 3 drives the driving rod 5 to move toward the driving plate. At this time, the guide column 802 is located at the end of the lower horizontal guide groove 602 away from the transfer frame 3 ( Fig.11 (b) in the upper middle figure, when the guide column 802 moves along the lower transverse guide groove 602 (during this process, the second elastic sheet 11 plays a supporting role to guide the guide column 802 into the oblique guide groove 604), the guide column 802 moves upward in the oblique guide groove 604 under the guiding effect of the oblique guide groove 604 (driving the slide plate 7 to move the clamping plate 701 and the support plate 101 upward to release the clamping of the power module), the guide column 802 deforms the first elastic sheet 10 through the upper end of the oblique guide groove 604, so that the guide column 802 enters the upper transverse guide groove 601, and when the guide column 802 is not aligned with the vertical guide groove 603, the transfer frame 3 stops moving. Under the elastic force of the compression spring 9, the guide column 802 moves to the end of the upper transverse guide groove 601 away from the transfer frame 3 to complete the reset so that it can be used next time. Fig.11 The arrow in the lower middle figure indicates the moving direction of the guide column 802. The description in this process is for easy understanding that the guide rod 102 moves relatively in the guide groove. In fact, the guide column 802 only moves up and down, and the drive plate only moves left and right.

[0057] The process of pushing the transfer frame 3 can complete the clamping and unclamping functions, and the operation process is convenient and the work efficiency is improved.

[0058] A horizontal plasma flow is generated by the vertically arranged electrode plate 2, and the power module is clamped by the clamping assembly and then withdrawn from the transfer frame 3, so that the power module is better exposed to the plasma flow, thereby improving the cleaning effect.

[0059] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein by equivalents. These modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present invention, and they should all be included in the scope of the claims and specification of the present invention.

[0060] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A power module cleaning device, characterized in that: include: A bottom plate (201), with vertically arranged electrode plates (2) fixedly disposed at both ends of the bottom plate (201); A vertical plate (1), wherein a support plate (101) is fixedly arranged on the vertical plate (1), and the vertical plate (1) is fixedly connected to the bottom plate (201); A transfer frame (3), wherein a groove (302) matching the power module is formed on the transfer frame (3); A clamping assembly is used to form a clamping position for clamping a power module together with a support plate (101).

2. A power module cleaning device according to claim 1, characterized in that: The clamping assembly comprises a slide plate (7), the vertical plate (1) is provided with a strip hole (104) matching the slide plate (7), the strip hole (104) is vertically arranged, the slide plate (7) can be movably connected to the inner side of the strip hole (104), the slide plate (7) is fixedly provided with a clamping plate (701), and the clamping plate (701) and the support plate (101) form a clamping position for clamping the power module; The slide plate (7) is correspondingly provided with a driving component for driving the slide plate (7) to move.

3. A power module cleaning device according to claim 2, characterized in that: The driving assembly comprises a driving block (6), the driving block (6) is movably connected to the vertical plate (1), a horizontal plate (8) is fixedly provided on the sliding plate (7), a guide column (802) is provided on the horizontal plate (8), a guide groove is formed on the driving block (6), and the guide column (802) is installed on the inner side of the guide groove; The guide groove comprises an upper transverse guide groove (601) and a lower transverse guide groove (602); the ends of the upper transverse guide groove (601) and the lower transverse guide groove (602) adjacent to the transfer frame (3) are connected via a vertical guide groove (603); the end of the lower transverse guide groove (602) away from the transfer frame (3) is connected to the middle end of the upper transverse guide groove (601) via an oblique guide groove (604).

4. A power module cleaning device according to claim 3, characterized in that: A first elastic sheet (10) is provided at one end of the oblique guide groove (604) adjacent to the upper transverse guide groove (601), and an end of the first elastic sheet (10) away from the transfer frame (3) is fixedly connected to the driving block (6); A second elastic sheet (11) is provided on the side wall of the lower end of the oblique guide groove (604) adjacent to the lower transverse guide groove (602), and the upper end of the second elastic sheet (11) is fixedly connected to the driving block (6).

5. A power module cleaning device according to claim 2, characterized in that: A connecting rod (501) is provided at one end of the driving block (6) adjacent to the transfer frame (3), and a driving rod (5) is fixedly provided at one end of the connecting rod (501) adjacent to the transfer frame (3). The diameter of the driving rod (5) is larger than the diameter of the connecting rod (501). A mounting hole (103) matching the driving rod (5) is opened on the vertical plate (1). The diameter of the mounting hole (103) matches the diameter of the driving rod (5). The driving rod (5) is mounted on the inner side of the mounting hole (103). An annular boss is fixedly provided on the inner side of one end of the mounting hole (103) away from the transfer frame (3), and a compression spring (9) is provided between the annular boss and the driving rod (5).

6. A power module cleaning device according to claim 5, characterized in that: The connecting rod (501) is threadedly connected to the driving block (6); The end surface of the driving block (6) adjacent to the transfer frame (3) is in contact with the vertical plate (1).

7. A power module cleaning device according to claim 3, characterized in that: A guide rod (102) is fixedly provided on the vertical plate (1), a guide hole (801) is opened on the horizontal plate (8), and the guide rod (102) is installed on the inner side of the guide hole (801); The transverse plate (8) is fixedly mounted on the end surface of the slide plate (7) away from the transfer frame (3).

8. A power module cleaning device according to claim 1, characterized in that: The power module cleaning device further comprises a support member (4), a receiving plate (401) is fixedly provided on the support member (4), and a base (403) is fixedly provided at the lower end of the support member (4).

9. A power module cleaning device according to claim 8, characterized in that: The receiving plate (401) is provided with a receiving groove (402) corresponding to the power module.

10. The power module cleaning device according to claim 1, characterized in that: The transfer frame (3) has a strip-shaped through hole (301) on its side.

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