Preparation method and equipment of rare earth metal target blank

Abstract

The invention belongs to the technical field of metal targets, and particularly relates to a preparation method and equipment of a rare earth metal target workblank, and the preparation method comprises the following steps: S1, heating rare earth metal under the protection of inert gas to melt the rare earth metal into molten metal; s2, the shaping mold is heated before casting, so that the temperature of the shaping mold is kept at about 650-1100 DEG C, the mold is vibrated while casting is conducted through vibration equipment, after complete casting is conducted, vibration continues to be conducted for 30-40 s, then vibration is stopped, and meanwhile heating of the shaping mold is stopped; and S3, the target is cooled, and the target blank is obtained. The preparation method and equipment for the rare earth metal target blank have the advantages that in the casting process, the mold body generates a better vibration effect, bubbles and nonuniformity in metal are effectively treated, and therefore the final film quality effect is improved.

Description

Technical Field

[0001] The invention relates to the technical field of metal target materials, and in particular to a method and equipment for preparing a rare earth metal target material blank. Background Art

[0002] Rare earth metal target blanks are rare earth metal blanks before rare earth metal target processing. After machining, they are rare earth metal targets. Rare earth metal targets are indispensable raw materials for the preparation of high-performance magnetron sputtering films. The microstructure of the target blank directly affects the sputtering performance of the target. The uniform sputtering rate of the target can control the uniformity of the organizational structure and thickness of the magnetron sputtering film. Metal casting is a process of melting metal into a liquid that meets certain requirements and pouring it into a mold. After cooling, solidification, and cleaning, a casting with a predetermined shape, size, and performance is obtained. The casting blank is almost formed, so it can achieve the purpose of no mechanical processing or a small amount of processing, which reduces costs and reduces time to a certain extent. Casting is one of the basic processes in the modern machinery manufacturing industry.

[0003] The existing casting method heats the metal to a molten state, then pours it into a mold and cools it into shape. However, there may be bubbles and unevenness inside the metal during the casting process, so the mold is generally vibrated during the casting process. The existing vibration equipment is relatively simple and cannot effectively deal with the bubbles and unevenness inside the metal, thereby affecting the final film quality. Summary of the invention

[0004] The invention discloses a method and equipment for preparing a rare earth metal target blank, aiming to solve the technical problem that the existing casting method in the background technology heats the metal to a molten state and then pours it into a mold for cooling and forming. However, there may be bubbles and unevenness inside the metal during the casting process, so the mold is generally vibrated during the casting process. The existing vibration equipment is relatively simple and cannot effectively deal with the bubbles and unevenness inside the metal, thereby affecting the final film quality.

[0005] The present invention provides a method for preparing a rare earth metal target blank, comprising the following steps:

[0006] S1. Heating rare earth metal under the protection of inert gas to melt the rare earth metal into liquid metal;

[0007] S2. Before casting, heat the shaping mold to keep its temperature at about 650-1100℃. Vibrate the mold while casting through a vibration device. After complete casting, continue to vibrate for 30-40s and then stop vibrating. At the same time, stop heating the shaping mold.

[0008] S3, cooling the target material to obtain a target material blank;

[0009] In step S1, the rare earth metal is a powder or a block;

[0010] In step S1, the inert gas is one of argon, neon or krypton.

[0011] On the other hand, the present invention provides the above-mentioned casting equipment for preparing rare earth metal target material blanks, including an isolation frame, a vibration module is arranged inside the isolation frame, and the vibration module includes an L support plate, the bottom of the isolation frame is connected to a guide track one by bolts, and the inside of the guide track one is slidably connected to a screw nut slider, circular holes are opened on both sides of the isolation frame, and the insides of the two circular holes one are connected to the same screw through bearings, the side of the L support plate is fixedly connected to a screw motor, and the driving end of the screw motor is connected to one end of the screw through a coupling, the upper side of the isolation frame is connected to a tooling support plate by bolts, and the upper side of the tooling support plate is equidistantly connected to a tooling support frame by bolts, one side of the multiple tooling support frames is fixedly connected to the same furnace body, and a furnace cover is arranged on one side of the furnace body.

[0012] In a preferred scheme, one side of the screw nut slider is connected to a tool mounting plate by bolts, and the side of the tool mounting plate is connected to a limiting track by bolts, the inner sliding connection of the limiting track is a push-pull slider, the side of the push-pull slider away from the screw nut slider is fixedly connected to a guide track 2, the inner sliding connection of the guide track 2 is a horizontal reciprocating slider, the upper side of the horizontal reciprocating slider is fixedly connected to a mounting frame, one side of the mounting frame is fixedly connected to a placing platform, one side of the placing platform is provided with slots at equal distances, the interiors of the multiple slots are all slidably connected with a clamping slider, one side of the two clamping sliders on the same side are fixedly connected to the same arc-shaped clamping plate, and the interiors of the two arc-shaped clamping plates are clamped with the same mold body.

[0013] In a preferred solution, the other sides of the two clamping sliders located on the same side are fixedly connected to the same connecting plate, and one side of the two connecting plates is provided with a second circular hole, the interiors of the two second circular holes are connected to a rotating shaft through bearings, one side of the mounting frame is fixedly connected to a driving motor, the driving end of the driving motor is fixedly connected to a rotating disk, the rotating disk is provided with two third circular holes away from its center, the interiors of the two third circular holes are connected to an eccentric shaft through bearings, and the eccentric shaft located on the same side and the outside of the rotating shaft are movably connected to the same push-pull support rod.

[0014] In a preferred solution, a circular hole four is provided on one side of the tooling mounting plate, and a rotating cylinder is connected to the inside of the circular hole four through a bearing, a rocking arm is fixedly connected to the outside of the rotating cylinder, a mounting block is fixedly connected to the side of the horizontally reciprocating slider, circular holes five are provided on both sides of the mounting block and the rocking arm, the insides of the two opposite circular holes five are connected to the same rotating shaft one through bearings, the outsides of the two rotating shafts one are movably connected to the same linkage push-pull rod one, and a lifting square frame is fixedly connected to the side of the push-pull slider facing the screw nut slider.

[0015] In a preferred solution, one side of the tooling mounting plate is fixedly connected to a limit rod, and a circular hole six is ​​provided on the side of the limit rod, a rotating circular rod is connected inside the circular hole six through a bearing, a non-concentric pushing circular plate is fixedly connected to one side of the rotating circular rod, the pushing circular plate is located in the lifting square frame, a fixed cylinder is fixedly connected to the other side of the pushing circular plate, a rotating support rod is fixedly connected to the outside of the fixed cylinder, a circular hole seven is provided on the side of the rotating support rod, a rotating shaft three is connected inside the circular hole seven through a bearing, a circular hole eight is provided on the side of the rocking arm, a rotating shaft two is connected inside the circular hole eight through a bearing, the rotating shaft two and the external active connection of the rotating shaft three are connected with the same linkage push-pull rod two, a universal motor is fixedly connected to one side of the tooling mounting plate, and a driving end of the universal motor is connected to one end of the rotating circular rod through a coupling.

[0016] By providing a vibration module, when casting the molten metal liquid, first the mold body is placed above the placement platform, and then the driving motor is started. The driving motor drives the rotating disc to drive the push-pull support rods on both sides to drive the clamping slider to move toward each other in the groove on the placement platform, so that the two arc-shaped clamping plates can quickly fix and disassemble the mold body. Then, during casting, the universal motor is started, and the universal motor drives the pushing circular plate on one side of the rotating circular rod to rotate eccentrically, so that the pushing circular plate drives the lifting square frame to make the push-pull slider reciprocate and lift in the limiting track. While pushing the circular plate to rotate, the rotating support rod rotates in a circle, so that the rotating support rod drives the linkage push-pull rod 2 to drive one end of the rocking rod to move back and forth in an arc shape, so that the linkage push-pull rod 1 drives the horizontal reciprocating slider to move horizontally in the guide track 2, so that during the casting process, the mold body produces a better vibration effect, so that the bubbles and unevenness inside the metal are effectively dealt with, thereby improving the quality of the final film.

[0017] In a preferred solution, a cooling module is provided on one side of the isolation frame, and the cooling module includes a fixed seat, an air inlet is opened on one side of the isolation frame, an air guide frame is fixedly connected to the inside of the air inlet, a fan body is arranged inside the air guide frame, cooling ports are opened on both sides of the isolation frame, hollow arc-shaped air inflation frames are fixedly connected to the inside of the two cooling ports, air inflation holes are opened on the arc surfaces of the two hollow arc-shaped air inflation frames at equal distances, and the air outlet of the fan body is connected to the inside of the hollow arc-shaped air inflation frame through an air inflation pipe.

[0018] In a preferred solution, slide grooves are provided on both sides of the air guide frame, and the opposite sides of the two slide grooves are fixedly connected with guide cylinders, the outsides of the two guide cylinders are slidably connected with horizontal slide seats, the horizontal slide seats and the opposite sides of the slide grooves are fixedly connected with the same return spring, the return spring is located on the outside of the guide cylinders, the opposite sides of the two horizontal slide seats are fixedly connected with mounting rods, the opposite sides of the two mounting rods are fixedly connected with telescopic springs at equal distances, and the other sides of the multiple telescopic springs are fixedly connected with the same filter plate.

[0019] In a preferred solution, one side of the two horizontal slides is fixedly connected with a sealing slide plate, and one side of the two sealing slide plates is fixedly connected with the same U-shaped support rod, one side of the U-shaped support rod is fixedly connected with a linkage gear rod, one side of the isolation frame is connected with the U-shaped frame by bolts, and circular holes nine are opened on both sides of the U-shaped frame, the interiors of the two circular holes nine are connected with the same rotating shaft four through bearings, the outside of the rotating shaft four is fixedly connected with a semicircular gear, the tooth block end of the semicircular gear is meshed with the linkage gear rod, and the side of the fixed seat is fixedly connected with a servo motor, and the driving end of the servo motor is connected to one end of the rotating shaft four through a coupling.

[0020] By providing a cooling module, after the casting is completed, the fan body is started, and the mold body is blown by the fan body, so that the mold body is quickly cooled and a secondary casting operation is performed. The cold air enters the isolation frame through the air guide frame, and is first filtered by the filter plate to prevent dust from entering the isolation frame. At the same time, the servo motor is started to drive the semicircular gear to rotate. When the semicircular gear is engaged with the linkage gear rod, the U-shaped support rod drives the horizontal slide to slide outside the guide cylinder. At this time, the return springs on both sides of the horizontal slide are squeezed and stretched respectively. When the semicircular gear is separated from the linkage gear rod, the return spring rebounds quickly, so that the filter plate vibrates to prevent dust from adhering to the filter plate and affecting the air intake. At the same time, the isolation frame take-out port is cooled by the hollow arc-shaped air blowing frame, so that the mold body is cooled while being taken and placed.

[0021] In a preferred embodiment, one side of the isolation frame is connected to a placement plate by bolts, and a vacuum system is arranged above the placement plate, a current collecting device is arranged outside the furnace body, an observation port is opened on the side of the isolation frame, a transparent observation window is fixedly connected to the inside of the observation port, and one side of the isolation frame is connected to an isolation cover plate by a hinge.

[0022] From the above, it can be seen that the method for preparing a rare earth metal target blank provided by the present invention has the beneficial effect of producing a better vibration effect on the mold body during the casting process, so that the bubbles and unevenness inside the metal can be effectively treated, thereby improving the quality of the final film. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A flow chart of a method for preparing a rare earth metal target blank proposed by the present invention;

[0024] Figure 2 This is a schematic diagram of the main structure of a device for preparing a rare earth metal target blank proposed by the present invention;

[0025] Figure 3 This is a schematic diagram of the oblique structure of a device for preparing a rare earth metal target blank proposed by the present invention;

[0026] Figure 4 A schematic diagram of the side structure of a device for preparing a rare earth metal target blank proposed by the present invention;

[0027] Figure 5 This is a schematic diagram of the structure of a vibration module of a device for preparing a rare earth metal target blank proposed by the present invention;

[0028] Figure 6 This is a schematic diagram of the structure of a vibration module of a device for preparing a rare earth metal target blank proposed by the present invention;

[0029] Figure 7 for Figure 6 A schematic diagram of the enlarged structure of part A;

[0030] Figure 8 This is a schematic diagram of the structure of a vibration module of a device for preparing a rare earth metal target blank proposed by the present invention;

[0031] Fig. 9 This is a schematic diagram of the cooling module structure of a rare earth metal target blank preparation device proposed by the present invention;

[0032] Fig.10 This is a schematic diagram of the cooling module structure of a device for preparing a rare earth metal target blank proposed by the present invention;

[0033] Fig.11 for Fig.10 Schematic diagram of the enlarged structure of part B.

[0034] In the figure: 1, isolation frame; 2, tooling support plate; 3, tooling support frame; 4, vacuum system; 5, furnace body; 6, furnace cover; 7, current collector; 8, vibration module; 801, guide rail 1; 802, lead screw; 803, lead screw nut slider; 804, tooling installation plate; 805, L support plate; 806, lead screw motor; 807, limit rail; 808, push-pull slider; 809, lifting square frame; 810, guide Toward track 2; 811, horizontal reciprocating slider; 812, mounting frame; 813, placement platform; 814, mold body; 815, drive motor; 816, rotating disc; 817, eccentric shaft; 818, push-pull support rod; 819, clamping slider; 820, connecting plate; 821, rotating shaft; 822, rotating cylinder; 823, rocking rod; 824, rotating shaft 1; 825, linkage push-pull rod 1; 826, installation Mounting block; 827, arc-shaped clamping plate; 828, rotating shaft 2; 829, linked push-pull rod 2; 830, limiting rod; 831, universal motor; 832, rotating round rod; 833, pushing round plate; 834, fixed cylinder; 835, rotating support rod; 836, rotating shaft 3; 9, cooling module; 901, hollow arc-shaped air blowing frame; 902, air blowing hole; 903, air guide frame; 904, air guide fan body; 905, air blowing pipe; 906, sealing slide plate; 907, horizontal slide seat; 908, guide cylinder; 909, reset spring; 910, installation long rod; 911, telescopic spring; 912, filter plate; 913, U-shaped support rod; 914, linkage gear rod; 915, U-shaped frame; 916, rotating shaft four; 917, semicircular gear; 918, fixed seat; 919, servo motor; 10, transparent observation window; 11, isolation cover; 12, placement plate. DETAILED DESCRIPTION

[0035] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0036] The method for preparing a rare earth metal target blank disclosed in the present invention is mainly applied to the existing casting method to heat the metal to a molten state, and then pour it into a mold for cooling and forming. However, there may be bubbles and unevenness inside the metal during the casting process, so the mold is generally vibrated during the casting process. The existing vibration equipment is relatively simple and cannot effectively deal with the bubbles and unevenness inside the metal, thereby affecting the final film quality.

[0037] Reference Figure 1 A method for preparing a rare earth metal target blank comprises the following steps:

[0038] S1. Heating rare earth metal under the protection of inert gas to melt the rare earth metal into liquid metal;

[0039] S2. Before casting, heat the shaping mold to keep its temperature at about 650-1100℃. Vibrate the mold while casting through a vibration device. After complete casting, continue to vibrate for 30-40s and then stop vibrating. At the same time, stop heating the shaping mold.

[0040] S3. Cool the target material to obtain a target material blank.

[0041] In step S1, the rare earth metal is in the form of powder or bulk material.

[0042] In step S1, the inert gas is one of argon, neon or krypton.

[0043] The above-mentioned casting equipment for preparing a rare earth metal target blank is referred to Figure 2-Figure 8 The casting equipment includes an isolation frame 1, a vibration module 8 is arranged inside the isolation frame 1, and the vibration module 8 includes an L support plate 805, the bottom of the isolation frame 1 is connected with a guide rail 801 by bolts, and the guide rail 801 is slidably connected with a screw nut slider 803 inside, and circular holes are opened on both sides of the isolation frame 1, and the insides of the two circular holes are connected with the same screw 802 through bearings, and the side of the L support plate 805 is fixedly connected with a screw motor 806, and the driving end of the screw motor 806 is connected to one end of the screw 802 through a coupling, and the upper side of the isolation frame 1 is connected with a tooling support plate 2 by bolts, and the upper side of the tooling support plate 2 is equidistantly connected with a tooling support frame 3 by bolts, and one side of the multiple tooling support frames 3 is fixedly connected with the same furnace body 5, and a furnace cover 6 is arranged on one side of the furnace body 5.

[0044] Reference Figure 2-Figure 8 One side of the screw nut slider 803 is connected to the tooling mounting plate 804 by bolts, and the side of the tooling mounting plate 804 is connected to the limiting track 807 by bolts, and the inner sliding connection of the limiting track 807 is connected to the push-pull slider 808, and the side of the push-pull slider 808 away from the screw nut slider 803 is fixedly connected to the guide track 2 810, and the inner sliding connection of the guide track 2 810 is connected to the horizontal reciprocating slider 811, and the upper side of the horizontal reciprocating slider 811 is fixedly connected to the installation frame 812, and one side of the installation frame 812 is fixedly connected to the placement platform 813, and one side of the placement platform 813 is provided with notches at equal distances, and the insides of the multiple notches are all slidably connected with the clamping slider 819, and one side of the two clamping sliders 819 on the same side are fixedly connected to the same arc-shaped clamping plate 827, and the two arc-shaped clamping plates 827 are clamped with the same mold body 814.

[0045] Reference Figure 2-Figure 8, the other sides of the two clamping sliders 819 located on the same side are fixedly connected to the same connecting plate 820, and one side of the two connecting plates 820 is provided with a circular hole 2, the interior of the two circular holes 2 is connected to the rotating shaft 821 through a bearing, one side of the mounting frame 812 is fixedly connected to a driving motor 815, the driving end of the driving motor 815 is fixedly connected to a rotating disk 816, the rotating disk 816 is provided with two circular holes 3 away from the center of the circle, the interior of the two circular holes 3 is connected to an eccentric shaft 817 through a bearing, and the eccentric shaft 817 located on the same side and the outside of the rotating shaft 821 are movably connected to the same push-pull support rod 818.

[0046] Reference Figure 2-Figure 8 A circular hole four is provided on one side of the tooling mounting plate 804, and a rotating cylinder 822 is connected to the inside of the circular hole four through a bearing, a rocking rod 823 is fixedly connected to the outside of the rotating cylinder 822, a mounting block 826 is fixedly connected to the side of the horizontally reciprocating slider 811, circular holes five are provided on both sides of the mounting block 826 and the rocking rod 823, the insides of the two opposite circular holes five are connected to the same rotating shaft 1 824 through bearings, the outsides of the two rotating shafts 1 824 are movably connected to the same linkage push-pull rod 1 825, and a lifting square frame 809 is fixedly connected to the side of the push-pull slider 808 facing the screw nut slider 803.

[0047] Reference Figure 2-Figure 8 One side of the tooling mounting plate 804 is fixedly connected to a limit rod 830, and a circular hole 6 is opened on the side of the limit rod 830. A rotating circular rod 832 is connected to the inside of the circular hole 6 through a bearing. One side of the rotating circular rod 832 is fixedly connected to a non-concentric pushing circular plate 833. The pushing circular plate 833 is located in the lifting square frame 809. The other side of the pushing circular plate 833 is fixedly connected to a fixed cylinder 834. The outside of the fixed cylinder 834 is fixedly connected to a rotating support rod 835. The rotating support rod 835 is fixedly connected to the outside of the fixed cylinder 834. A circular hole seven is provided on the side of the rod 835, and a rotating shaft three 836 is connected to the inside of the circular hole seven through a bearing. A circular hole eight is provided on the side of the rocking arm 823, and a rotating shaft two 828 is connected to the inside of the circular hole eight through a bearing. The rotating shaft two 828 and the rotating shaft three 836 are externally movably connected with the same linked push-pull rod two 829. A universal motor 831 is fixedly connected to one side of the tooling mounting plate 804, and the driving end of the universal motor 831 is connected to one end of the rotating circular rod 832 through a coupling.

[0048] In a specific application scenario, when the molten metal is cast, the mold body 814 is first placed on the placement platform 813, and then the drive motor 815 is started. The drive motor 815 drives the rotating disc 816 to drive the push-pull support rods 818 on both sides to drive the clamping slider 819 to move in the groove on the placement platform 813, so that the two arc-shaped clamping plates 827 can quickly fix and disassemble the mold body 814. Then, when casting, the universal motor 831 is started, and the universal motor 831 drives the push on one side of the rotating round rod 832. The circular plate 833 rotates eccentrically, so that the circular plate 833 is pushed to drive the lifting square frame 809 to make the push-pull slider 808 lift and reciprocate in the limiting track 807. While the circular plate 833 is pushed to rotate, the rotating support rod 835 rotates in a circle, so that the rotating support rod 835 drives the linked push-pull rod 2 829 to drive one end of the rocking rod 823 to move back and forth in an arc shape, so that the linked push-pull rod 1 825 drives the horizontal reciprocating slider 811 to move horizontally back and forth inside the guide track 2 810, so that during the casting process, the mold body 814 produces a better vibration effect.

[0049] Reference Figure 2 , Fig. 9 , Fig.10 and Fig.11 A cooling module 9 is provided on one side of the isolation frame 1, and the cooling module 9 includes a fixed seat 918. An air inlet is provided on one side of the isolation frame 1, and an air guide frame 903 is fixedly connected to the inside of the air inlet. A fan body 904 is provided inside the air guide frame 903. Cooling ports are provided on both sides of the isolation frame 1, and hollow arc-shaped air inflation frames 901 are fixedly connected to the inside of the two cooling ports. Air inflation holes 902 are equidistantly provided on the arc surfaces of the two hollow arc-shaped air inflation frames 901, and the air outlet of the fan body 904 is connected to the inside of the hollow arc-shaped air inflation frame 901 through an air inflation pipe 905.

[0050] Reference Figure 2 , Fig. 9 , Fig.10 and Fig.11 , slide grooves are provided on both sides of the air guide frame 903, and the opposite sides of the two slide grooves are fixedly connected with guide cylinders 908, the outsides of the two guide cylinders 908 are slidably connected with horizontal slide seats 907, the horizontal slide seats 907 are fixedly connected with the same return spring 909 on the opposite side of the slide groove, the return spring 909 is located on the outside of the guide cylinder 908, the opposite sides of the two horizontal slide seats 907 are fixedly connected with mounting long rods 910, the opposite sides of the two mounting long rods 910 are fixedly connected with telescopic springs 911 at equal distances, and the other sides of the multiple telescopic springs 911 are fixedly connected with the same filter plate 912.

[0051] Reference Figure 2 , Fig. 9 , Fig.10 and Fig.11 One side of the two horizontal slides 907 is fixedly connected with a sealing slide plate 906, and one side of the two sealing slide plates 906 is fixedly connected with the same U-shaped support rod 913, one side of the U-shaped support rod 913 is fixedly connected with a linkage gear rod 914, one side of the isolation frame 1 is connected with a U-shaped frame 915 by bolts, and both sides of the U-shaped frame 915 are provided with round holes nine, the interior of the two round holes nine is connected with the same rotating shaft four 916 through bearings, the outside of the rotating shaft four 916 is fixedly connected with a semicircular gear 917, the tooth block end of the semicircular gear 917 is meshed with the linkage gear rod 914, and the side of the fixed seat 918 is fixedly connected with a servo motor 919, and the driving end of the servo motor 919 is connected to one end of the rotating shaft four 916 through a coupling.

[0052] In a specific application scenario, after the casting is completed, the fan body 904 is started, and the mold body 814 is blown by the fan body 904, so that the mold body 814 is quickly cooled, and a secondary casting operation is performed. The cold air enters the interior of the isolation frame 1 through the air guide frame 903, and the cold air is first filtered by the filter plate 912 to prevent dust from entering the interior of the isolation frame 1. At the same time, the servo motor 919 is started, and the semicircular gear 917 is driven to rotate by the servo motor 919. When the semicircular gear 917 is meshed with the linkage gear rod 914 At this time, the U-shaped support rod 913 drives the horizontal slide 907 to slide outside the guide cylinder 908. At this time, the return springs 909 on both sides of the horizontal slide 907 are squeezed and stretched respectively. When the semicircular gear 917 is separated from the linkage gear rod 914, the return spring 909 rebounds quickly, thereby causing the filter plate 912 to vibrate, preventing dust from adhering to the filter plate 912 and affecting the air intake. At the same time, the hollow arc-shaped air blowing frame 901 is used to cool the isolation frame 1 taking and placing port, so that the mold body 814 is cooled at the same time when taking and placing.

[0053] Reference Figure 2 , Figure 3 and Figure 4 A placement plate 12 is connected to one side of the isolation frame 1 by bolts, and a vacuum system 4 is arranged above the placement plate 12, a current collector 7 is arranged outside the furnace body 5, an observation port is opened on the side of the isolation frame 1, a transparent observation window 10 is fixedly connected to the inside of the observation port, and an isolation cover plate 11 is connected to one side of the isolation frame 1 by a hinge.

[0054] Working principle: When casting the molten metal liquid, first place the mold body 814 on the placement platform 813, and then start the drive motor 815. The drive motor 815 drives the rotating disc 816 to drive the push-pull support rods 818 on both sides to drive the clamping slider 819 to move in the groove on the placement platform 813, so that the two arc-shaped clamping plates 827 can quickly fix and disassemble the mold body 814. Then, during casting, start the universal motor 831, and drive the push circular plate 833 on one side of the rotating circular rod 832 to rotate eccentrically through the universal motor 831. Thus, the push circular plate 833 drives the lifting square frame 809 to make the push-pull slider 808 reciprocate and lift in the limit track 807. While the push circular plate 833 is rotated, the rotating support rod 835 rotates in a circle, so that the rotating support rod 835 drives the linkage push-pull rod 2 829 to drive one end of the rocking rod 823 to move back and forth in an arc shape, so that the linkage push-pull rod 1 825 drives the horizontal reciprocating slider 811 to move horizontally in the guide track 2 810, so that during the casting process, the mold body 814 produces a better vibration effect. After the casting is completed, the guide fan body 9 is started 04, the mold body 814 is blown by the fan body 904, so that the mold body 814 is quickly cooled for secondary casting. The cold air enters the isolation frame 1 through the air guide frame 903, and is first filtered by the filter plate 912 to prevent dust from entering the isolation frame 1. At the same time, the servo motor 919 is started, and the semicircular gear 917 is driven to rotate by the servo motor 919. When the semicircular gear 917 is engaged with the linkage gear rod 914, the U-shaped support rod 913 drives the horizontal slide 907 to slide outside the guide cylinder 908. At this time, the horizontal slide 90 The return springs 909 on both sides are squeezed and stretched respectively. When the semicircular gear 917 is separated from the linkage gear rod 914, the return spring 909 rebounds quickly, so that the filter plate 912 vibrates to prevent dust from adhering to the filter plate 912 and affecting the air intake. After cooling, the screw motor 806 is started to drive the screw to rotate, so that the mold body 814 on the screw nut slider 803 is moved to the take-in and put-out port of the isolation frame 1 for collection, and the take-in and put-out port of the isolation frame 1 is cooled by the hollow arc-shaped air-inflating frame 901, so that the mold body 814 is cooled while being taken in and put out.

[0055] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A method for preparing a rare earth metal target blank, characterized in that: The following steps are involved: S1. Heating rare earth metal under the protection of inert gas to melt the rare earth metal into liquid metal; S2. Before casting, heat the shaping mold to keep its temperature at about 650-1100℃. Vibrate the mold while casting through a vibration device. After complete casting, continue to vibrate for 30-40s and then stop vibrating. At the same time, stop heating the shaping mold. S3. Cool the target material to obtain a target material blank.

2. The method for preparing a rare earth metal target blank according to claim 1, characterized in that: In step S1, the rare earth metal is in the form of powder or bulk material.

3. The method for preparing a rare earth metal target blank according to claim 1, characterized in that: In step S1, the inert gas is one of argon, neon or krypton.

4. A device for preparing a rare earth metal target blank, comprising an isolation frame (1), characterized in that: A vibration module (8) is arranged inside the isolation frame (1), and the vibration module (8) comprises an L support plate (805); the bottom of the isolation frame (1) is connected to a guide track (801) by bolts; a screw nut slider (803) is slidably connected inside the guide track (801); round holes (1) are provided on both sides of the isolation frame (1); the insides of the two round holes (1) are connected to the same screw (802) by bearings; a screw motor (806) is fixedly connected to the side of the L support plate (805); the driving end of the screw motor (806) is connected to one end of the screw (802) by a coupling; the upper side of the isolation frame (1) is connected to a tooling support plate (2) by bolts; the upper side of the tooling support plate (2) is equidistantly connected to a tooling support frame (3) by bolts; one side of the plurality of tooling support frames (3) is fixedly connected to the same furnace body (5); and a furnace cover (6) is arranged on one side of the furnace body (5).

5. The equipment for preparing a rare earth metal target blank according to claim 4, characterized in that: One side of the screw nut slider (803) is connected to a tooling installation plate (804) by bolts, and the side of the tooling installation plate (804) is connected to a limit track (807) by bolts, and the limit track (807) is internally slidably connected to a push-pull slider (808), and the push-pull slider (808) is fixedly connected to a guide track 2 (810) on the side away from the screw nut slider (803), and the guide track 2 (810) is internally slidably connected to a horizontal reciprocating slider (811). The upper side of the movable slider (811) is fixedly connected to a mounting frame (812), one side of the mounting frame (812) is fixedly connected to a placement platform (813), one side of the placement platform (813) is provided with slots at equal distances, the interiors of the multiple slots are all slidably connected to clamping sliders (819), one side of two clamping sliders (819) located on the same side are both fixedly connected to the same arc-shaped clamping plate (827), and the interiors of the two arc-shaped clamping plates (827) clamp the same mold body (814); The other sides of the two clamping sliders (819) located on the same side are fixedly connected to the same connecting plate (820), and one side of the two connecting plates (820) is provided with a second circular hole, and the interiors of the two second circular holes are connected to a rotating shaft (821) through bearings. One side of the mounting frame (812) is fixedly connected to a driving motor (815), and the driving end of the driving motor (815) is fixedly connected to a rotating disk (816), and the rotating disk (816) is provided with two third circular holes away from the center of the circle, and the interiors of the two third circular holes are connected to an eccentric shaft (817) through bearings. The eccentric shaft (817) located on the same side and the exterior of the rotating shaft (821) are movably connected to the same push-pull support rod (818).

6. The equipment for preparing a rare earth metal target blank according to claim 5, characterized in that: A circular hole four is provided on one side of the tooling mounting plate (804), and a rotating cylinder (822) is connected to the inside of the circular hole four via a bearing, a rocking rod (823) is fixedly connected to the outside of the rotating cylinder (822), a mounting block (826) is fixedly connected to the side of the horizontal reciprocating slider (811), circular holes five are provided on both sides of the mounting block (826) and the rocking rod (823), the insides of the two opposite circular holes five are connected to the same rotating shaft one (824) via bearings, the outsides of the two rotating shafts one (824) are movably connected to the same linkage push-pull rod one (825), and a lifting square frame (809) is fixedly connected to the side of the push-pull slider (808) facing the screw nut slider (803); One side of the tooling installation plate (804) is fixedly connected to a limit rod (830), and a circular hole (6) is opened on the side of the limit rod (830), and a rotating circular rod (832) is connected to the inside of the circular hole (6) through a bearing, and a non-concentric pushing circular plate (833) is fixedly connected to one side of the rotating circular rod (832), and the pushing circular plate (833) is located in the lifting square frame (809), and the other side of the pushing circular plate (833) is fixedly connected to a fixed cylinder (834), and the outside of the fixed cylinder (834) is fixedly connected to a rotating support rod (835), and the rotating support rod (835) is fixedly connected to the outside of the fixed cylinder (834). A circular hole seven is provided on the side of the movable support rod (835), and a rotating shaft three (836) is connected to the inside of the circular hole seven through a bearing. A circular hole eight is provided on the side of the rocking arm (823), and a rotating shaft two (828) is connected to the inside of the circular hole eight through a bearing. The rotating shaft two (828) and the rotating shaft three (836) are externally movably connected to the same linkage push-pull rod two (829). A universal motor (831) is fixedly connected to one side of the tooling mounting plate (804), and the driving end of the universal motor (831) is connected to one end of the rotating circular rod (832) through a coupling.

7. The equipment for preparing a rare earth metal target blank according to claim 6, characterized in that: A cooling module (9) is provided on one side of the isolation frame (1), and the cooling module (9) includes a fixing seat (918); an air inlet is provided on one side of the isolation frame (1); an air guide frame (903) is fixedly connected to the interior of the air inlet; a fan body (904) is provided inside the air guide frame (903); cooling ports are provided on both sides of the isolation frame (1); hollow arc-shaped air inflation frames (901) are fixedly connected to the interior of the two cooling ports; air inflation holes (902) are provided on the arc-shaped surfaces of the two hollow arc-shaped air inflation frames (901) at equal distances; and an air outlet of the fan body (904) is connected to the interior of the hollow arc-shaped air inflation frame (901) via an air inflation pipe (905).

8. The equipment for preparing a rare earth metal target blank according to claim 7, characterized in that: The air guide frame (903) is provided with a slide groove on both sides, and the opposite sides of the two slide grooves are fixedly connected with a guide cylinder (908), the outsides of the two guide cylinders (908) are slidably connected with a horizontal slide seat (907), the horizontal slide seat (907) and the side opposite to the slide groove are fixedly connected with a same return spring (909), the return spring (909) is located outside the guide cylinder (908), the opposite sides of the two horizontal slide seats (907) are fixedly connected with a mounting rod (910), the opposite sides of the two mounting rods (910) are fixedly connected with telescopic springs (911) at equal distances, and the other sides of the multiple telescopic springs (911) are fixedly connected with a same filter plate (912).

9. The equipment for preparing a rare earth metal target blank according to claim 8, characterized in that: One side of the two horizontal slide seats (907) is fixedly connected with a sealing slide plate (906), and one side of the two sealing slide plates (906) is fixedly connected with a same U-shaped support rod (913), one side of the U-shaped support rod (913) is fixedly connected with a linkage gear rod (914), one side of the isolation frame (1) is connected with a U-shaped frame (915) by bolts, and both sides of the U-shaped frame (915) are provided with round holes nine, the insides of the two round holes nine are connected with a same rotating shaft four (916) by bearings, the outside of the rotating shaft four (916) is fixedly connected with a semicircular gear (917), the tooth block end of the semicircular gear (917) is meshed with the linkage gear rod (914), and the side of the fixed seat (918) is fixedly connected with a servo motor (919), and the driving end of the servo motor (919) is connected to one end of the rotating shaft four (916) by a coupling.

10. The equipment for preparing a rare earth metal target blank according to claim 9, characterized in that: One side of the isolation frame (1) is connected to a placement plate (12) via bolts, and a vacuum system (4) is arranged above the placement plate (12); a current collector (7) is arranged outside the furnace body (5); an observation port is provided on the side of the isolation frame (1); a transparent observation window (10) is fixedly connected to the inside of the observation port; and one side of the isolation frame (1) is connected to an isolation cover plate (11) via a hinge.

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