Superconducting magnet and magnetic control Czochralski single crystal equipment

Abstract

The invention belongs to the technical field of semiconductor manufacturing, and particularly relates to a superconducting magnet and magnetic control straight pulling single crystal equipment, which comprises a support mounting assembly, the support mounting assembly comprises a support frame plate and a support lug plate, the support lug plate is fixedly mounted on the outer side of the support frame plate, and a superconducting magnet assembly and a rotary straight pulling assembly are mounted on the top of the support frame plate. A straight pulling furnace shell is fixedly installed in the supporting frame plate, a rotating crucible assembly is installed in the straight pulling furnace shell, the tiny change of the temperature in the liquid helium cavity is captured in real time through an arranged thermistor, and when the thermistor detects that the temperature rises to cause resistance reduction, magnetic field fluctuation possibly caused by the temperature change is compensated; through the feedback mechanism, even if the temperature in the liquid helium cavity fluctuates, the magnetic field can be kept relatively stable, so that the components of the crystal are more uniform, and the segregation effect in the crystal is reduced.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor manufacturing, in particular to a superconducting magnet and a magnetron CZ single crystal pulling device. Background Art

[0002] The methods for making single crystal silicon are divided into the Czochralski method and the floating zone melting method. At present, most single crystal silicon is prepared by the Czochralski method, which uses a single crystal furnace to grow rod-shaped single crystal silicon from the melt. In the process of growing crystals by the Czochralski method, the thermal convection of the melt causes macroscopic and microscopic inhomogeneities of impurities, thereby affecting the physical and chemical properties of the crystal. Therefore, inhibiting melt convection is one of the important ways to improve the quality of single crystals. In order to solve the above problems, the magnetron single crystal pulling technology has been gradually developed. On the basis of the Czochralski method, a strong magnetic field is applied on the outside of the single crystal furnace to inhibit the thermal convection of the melt, reduce the impurity content of the crystal, and improve the uniformity of the longitudinal and radial impurity distribution, so as to obtain high-quality single crystals.

[0003] The magnetic field generating device of the traditional magnetron Czochralski method generally uses permanent magnetic materials and conventional electromagnets. Due to the limitations of the saturation magnetization intensity of the permanent magnetic materials and the power of conventional electromagnets, the magnetic field intensity generated by the magnetron Czochralski method is often not high, and the thermal convection suppression effect on the melt is relatively ordinary. With the development of superconducting magnet technology, more and more superconducting magnets have replaced traditional conventional electromagnets, which can generate stronger magnetic fields and have more obvious thermal convection suppression effects on the melt. Then, in conjunction with the corresponding crystal pulling process, larger size or higher quality single crystal silicon can be produced.

[0004] When the existing superconducting magnet is in use, its interior will be affected by the temperature of the vertical pulling furnace. The vertical pulling furnace will generate extremely high temperature in the working state. This high temperature will directly or indirectly act on the superconducting magnet through various means such as heat conduction and heat radiation. Due to the structural characteristics and material properties of the superconducting magnet, its interior will be significantly and directly affected by the temperature of the vertical pulling furnace, which will inevitably increase the temperature inside the superconducting magnet. Once the temperature inside the superconducting magnet rises, the low temperature environment of the superconducting core will be destroyed, resulting in the transformation or loss of the superconducting state. This transformation will directly affect the stability and distribution of the current in the superconducting core, thereby causing a significant change in the magnetic force, interfering with the silicon rod forming process, resulting in uneven growth rate of the silicon rod, inconsistent diameter, increased internal defects, and even causing the breakage of the silicon rod, which seriously affects the product quality and production efficiency of the silicon rod.

[0005] To this end, the present invention provides a superconducting magnet and a magnetically controlled CZ single crystal pulling device. Summary of the invention

[0006] In order to make up for the deficiencies of the prior art, at least one technical problem raised in the background technology is solved.

[0007] The technical solution adopted by the present invention to solve its technical problems is: a superconducting magnet and a magnetron CZ single crystal device described in the present invention include a support and installation assembly, the support and installation assembly includes a support frame plate and a support ear plate, and the support ear plate is fixedly installed on the outside of the support frame plate, a superconducting magnet assembly and a rotating CZ assembly are installed on the top of the support frame plate, a CZ furnace shell is fixedly installed inside the support frame plate, a rotating crucible assembly is installed inside the CZ furnace shell, a driving assembly is fixedly installed on the bottom of the support frame plate and the support ear plate, the driving assembly is used to drive the rotating CZ assembly and the rotating crucible assembly to operate, the driving assembly includes a driving motor, a driving gear is fixedly installed on the output end of the driving motor, and the superconducting magnet assembly includes a center insulator A thermal-resistance magnetic shell, an upper thermal-insulation magnetic-resistance shell and a lower thermal-insulation magnetic-resistance shell, wherein the central thermal-insulation magnetic-resistance shell, the upper thermal-insulation magnetic-resistance shell and the lower thermal-insulation magnetic-resistance shell are all located on the outside of the vertical-pulling furnace shell, the upper thermal-insulation magnetic-resistance shell is fixedly installed on the top of the central thermal-insulation magnetic-resistance shell, and the lower thermal-insulation magnetic-resistance shell is fixedly installed on the bottom of the central thermal-insulation magnetic-resistance shell, the outer sides of the central thermal-insulation magnetic-resistance shell, the upper thermal-insulation magnetic-resistance shell and the lower thermal-insulation magnetic-resistance shell are all fixedly installed with liquid-adding valves, the interiors of the central thermal-insulation magnetic-resistance shell, the upper thermal-insulation magnetic-resistance shell and the lower thermal-insulation magnetic-resistance shell are all provided with liquid helium cavities, the interiors of the liquid helium cavities are all fixedly provided with superconducting cores, the outer sides of the superconducting cores are all wound with coils, and the number of turns of the coils wound on the outer sides of the superconducting cores in the central thermal-insulation magnetic-resistance shell, the upper thermal-insulation magnetic-resistance shell and the lower thermal-insulation magnetic-resistance shell is 2:1:1.

[0008] Preferably, a thermal insulation and magnetic resistance shell is fixedly installed inside the central thermal insulation and magnetic resistance shell, the upper thermal insulation and magnetic resistance shell and the lower thermal insulation and magnetic resistance shell, and the distance between the thermal insulation and magnetic resistance shell and the outer wall of the vertical pulling furnace shell is five centimeters, and a supporting bending rod is fixedly installed on the bottom of the lower thermal insulation and magnetic resistance shell, and the end of the supporting bending rod away from the lower thermal insulation and magnetic resistance shell is fixedly connected to the top of the support frame plate.

[0009] Preferably, thermal insulation connecting blocks are fixedly installed on the outer sides of the central thermal insulation magnetic resistance shell, the upper thermal insulation magnetic resistance shell and the lower thermal insulation magnetic resistance shell, the three thermal insulation connecting blocks are fixedly installed with thermistors inside, and the temperature measuring parts of the thermistors are located on the inner sides of the central thermal insulation magnetic resistance shell, the upper thermal insulation magnetic resistance shell and the lower thermal insulation magnetic resistance shell, and a power connection frame is fixedly installed on one side of the three thermal insulation connecting blocks away from the central thermal insulation magnetic resistance shell, the upper thermal insulation magnetic resistance shell and the lower thermal insulation magnetic resistance shell.

[0010] Preferably, the rotating straight-pull assembly includes a lifting straight-pull assembly and a rotating assembly, the lifting straight-pull assembly includes a straight-pull traction head, a rotating pull rod is fixedly installed on the top of the straight-pull traction head, a connecting rod is rotatably installed on the top of the rotating pull rod, an end of the connecting rod away from the rotating pull rod is fixedly connected to a lifting rope, an end of the lifting rope away from the connecting rod is fixedly connected to a winding rod, a steering gear is fixedly installed on the top of the support ear plate, an output end of the steering gear is fixedly connected to one end of the winding rod, a driven gear is fixedly installed on the input end of the steering gear, and the outer side of the driven gear is meshed with the outer side of the driving gear.

[0011] Preferably, the rotating assembly includes a limit frame, which is fixedly mounted on the inner side of the straight-pull furnace shell and movably mounted on the outer side of a rotating pull rod, a rotating guide groove is provided on the outer side of the rotating pull rod, a rotating guide block is fixedly mounted on the inner side of the limit frame, and the rotating guide block is slidably mounted on the inner side of the rotating guide groove.

[0012] Preferably, the rotating crucible assembly includes a crucible, which is located directly below the lower thermal insulation and magnetic resistance shell, an insulation ring plate is fixedly installed on the outer side of the crucible, an anti-slip ring is fixedly installed on the outer side of the insulation ring plate, and the anti-slip ring is fixedly installed on the inner side of the vertical pulling furnace shell, a driven gear ring is fixedly installed on the outer side of the insulation ring plate, the outer side of the driven gear ring is meshed with the outer side of the driving gear, a swinging assembly is installed inside the crucible, the swinging assembly is used to swing the material in the bottom area of ​​the crucible to the top area of ​​the crucible, and a magnetic ring lifting assembly is also installed inside the crucible, the magnetic ring lifting assembly is used to reduce heat convection inside the crucible.

[0013] Preferably, the swing assembly includes four pressure push rods and four U-shaped seats, one end of the four pressure push rods is fixedly connected to the inner side of the vertical pulling furnace shell, and a toggle plate is rotatably installed inside the four U-shaped seats. One end of the four pressure push rods away from the supporting bending rod is located on the inner side of the crucible, and the height of the one end of the pressure push rod away from the supporting bending rod is located between the top of the U-shaped seat and the top of the toggle plate, and a liquid diversion plate is fixedly installed on the bottom of the toggle plate.

[0014] Preferably, the liquid-repelling plate is five-step-type and shrinks from bottom to top, a rectangular through groove is provided inside the liquid-repelling plate, one side of the liquid-repelling plate is flat, and the other side of the liquid-repelling plate is arc-shaped.

[0015] Preferably, the magnetic ring lifting assembly includes a magnetic ring, four connecting rods are fixedly installed on the top of the magnetic ring, and lifting plates are fixedly installed on the top of the four connecting rods. The central axes of the four lifting plates are respectively in the same vertical plane as the central axes of four liquid-draining plates, and four limiting slide bars are slidably installed inside the connecting rods, and the bottom of the limiting slide bar is fixedly installed on the bottom of the crucible.

[0016] Preferably, a heat-resistant material is installed on the outer side of the magnetic ring, and the heat-resistant material is short aluminum oxide fibers, and the magnetic ring adopts aluminum nickel cobalt magnets.

[0017] The beneficial effects of the present invention are as follows: 1. A superconducting magnet and a magnetron CZ single crystal pulling device described in the present invention capture the slight changes in the temperature in the liquid helium chamber in real time through a thermistor. When the thermistor detects that the temperature rises and the resistance value decreases, the current in the coil connected in series with the thermistor increases to compensate for the magnetic field fluctuations that may be caused by the temperature change. Through this feedback mechanism, even if the temperature inside the liquid helium chamber fluctuates, the magnetic field can remain relatively stable, making the composition of the crystal more uniform and reducing the segregation effect in the crystal.

[0018] 2. A superconducting magnet and a magnetron direct-pull single crystal device described in the present invention, when the same current is passed through the superconducting core and the coil inside the central heat-insulating magnetic-resistance shell, the upper heat-insulating magnetic-resistance shell and the lower heat-insulating magnetic-resistance shell, the magnetic field strength generated by the magnetic field first increases and then decreases from bottom to top, the magnetic field strengths at the top and bottom are the same, and the magnetic field strength in the middle is twice the magnetic field strengths at the top and bottom. When the single crystal passes through the magnetic field from low to high, the convection movement in the melt can be more effectively suppressed, the heat can be conducted more evenly, and the defects and impurities in the crystal can be reduced. Afterwards, when passing through the magnetic field from high to low, it may help the formed crystal to have a buffer zone when it leaves the magnetic field, preventing the formed crystal from instantly leaving the magnetic field to trigger a new convection mode, which has an adverse effect on the crystal quality, and ensuring continued growth under more stable conditions. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The present invention will be further described below in conjunction with the accompanying drawings.

[0020] Figure 1 It is a three-dimensional appearance diagram of the present invention; Figure 2 is a bottom-up stereogram of the present invention; Figure 3 It is a schematic diagram of the cross-sectional structure of the vertical pulling furnace shell in the present invention; Figure 4 It is a schematic diagram of the three-dimensional structure of the superconducting magnet group in the present invention; Figure 5 It is a schematic diagram of the three-dimensional structure of the superconducting magnet assembly in the present invention when viewed from above; Figure 6 It is a schematic cross-sectional structural diagram of a superconducting magnet assembly in the present invention; Figure 7 It is a schematic diagram of the three-dimensional structure of the rotating crucible assembly in the present invention; Figure 8 It is a schematic diagram of a local three-dimensional structure in the present invention; Fig. 9It is a schematic diagram of the three-dimensional structure of the limiting frame in the present invention; Fig.10 It is a circuit connection diagram of the superconducting magnet assembly in the present invention; In the figure: 1, central heat-insulating magnetic-resisting shell; 2, upper heat-insulating magnetic-resisting shell; 3, lower heat-insulating magnetic-resisting shell; 4, liquid-adding valve; 5, heat-insulating connecting block; 6, thermistor; 7, power connection rack; 8, liquid helium chamber; 9, superconducting core; 10, coil; 11, steering gear; 12, winding rod; 13, lifting rope; 14, straight-pull furnace shell; 15, connecting rod; 16, rotating rod; 17, rotating guide groove; 18, driven gear; 19, support frame plate; 20, support Ear support plate; 21. Driving motor; 22. Driving gear; 23. Crucible; 24. Driven gear ring; 25. Insulation ring plate; 26. Anti-slip ring; 27. Limiting slide bar; 28. Limiting frame; 29. ​​Rotating guide block; 30. Straight-pull traction head; 31. Support bending rod; 32. Insulation magnetic shell; 33. Push rod; 34. U-shaped seat; 35. Toggle plate; 36. Liquid-discharging plate; 37. Magnetic ring; 38. Connecting vertical pole; 39. Lifting plate. DETAILED DESCRIPTION

[0021] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further explained below in conjunction with specific implementation methods.

[0022] like Figures 1 to 10As shown, a superconducting magnet and a magnetron CZ single crystal device according to an embodiment of the present invention include a support and installation assembly, the support and installation assembly includes a support frame plate 19 and a support ear plate 20, and the support ear plate 20 is fixedly installed on the outside of the support frame plate 19, the superconducting magnet assembly and the rotating CZ assembly are installed on the top of the support frame plate 19, the CZ furnace shell 14 is fixedly installed inside the support frame plate 19, the rotating crucible assembly is installed inside the CZ furnace shell 14, the driving assembly is fixedly installed on the bottom of the support frame plate 19 and the support ear plate 20, the driving assembly is used to drive the rotating CZ assembly and the rotating crucible assembly to operate, the driving assembly includes a driving motor 21, and a driving gear 22 is fixedly installed on the output end of the driving motor 21, and the superconducting magnet assembly includes a central thermal insulation and magnetic resistance shell 1, an upper thermal insulation and magnetic resistance shell 2 and a lower thermal insulation and magnetic resistance shell 3, the central thermal insulation and magnetic resistance shell 1, the upper thermal insulation and magnetic resistance shell 2 and the lower thermal insulation and magnetic resistance shell 3 are all located on the outside of the vertical pulling furnace shell 14, the upper thermal insulation and magnetic resistance shell 2 is fixedly installed on the top of the central thermal insulation and magnetic resistance shell 1, and the lower thermal insulation and magnetic resistance shell 3 is fixedly installed on the bottom of the central thermal insulation and magnetic resistance shell 1, the outer sides of the central thermal insulation and magnetic resistance shell 1, the upper thermal insulation and magnetic resistance shell 2 and the lower thermal insulation and magnetic resistance shell 3 are all fixedly installed with a liquid filling valve 4, the interiors of the central thermal insulation and magnetic resistance shell 1, the upper thermal insulation and magnetic resistance shell 2 and the lower thermal insulation and magnetic resistance shell 3 are all provided with a liquid helium cavity 8, the interiors of the liquid helium cavity 8 are all fixedly installed with a superconducting core 9, the outer sides of the superconducting core 9 are all wound with a coil 10, and the number of turns of the coil 10 wound on the outer sides of the superconducting core 9 in the central thermal insulation and magnetic resistance shell 1, the upper thermal insulation and magnetic resistance shell 2 and the lower thermal insulation and magnetic resistance shell 3 is 2:1:1;During operation, first, liquid helium can be injected into the liquid helium cavity 8 inside the central thermal insulation and magnetic resistance shell 1, the upper thermal insulation and magnetic resistance shell 2 and the lower thermal insulation and magnetic resistance shell 3 through the liquid filling valve 4. The liquid helium makes the inside of the liquid helium cavity 8 in a low temperature state, so that the superconducting core 9 and the coil 10 located inside the liquid helium cavity 8 are both in a low temperature state, so that the superconducting core 9 and the coil 10 are both in a superconducting state. In addition, the number of turns of the coil 10 wound around the outside of the superconducting core 9 inside the central thermal insulation and magnetic resistance shell 1, the upper thermal insulation and magnetic resistance shell 2 and the lower thermal insulation and magnetic resistance shell 3 is 2:1:1. When the same current is passed, the magnetic field intensity generated by the superconducting core 9 and the coil 10 inside the central thermal insulation and magnetic resistance shell 1, the upper thermal insulation and magnetic resistance shell 2 and the lower thermal insulation and magnetic resistance shell 3 increases first and then decreases from bottom to top, the magnetic field intensity at the top and the bottom is the same, and the magnetic field intensity in the middle is The magnetic field strength at the top and bottom is twice as strong. When the single crystal passes through the magnetic field from low to high, it can more effectively suppress the convection movement in the melt, make the heat conduction more uniform, reduce the defects and impurities in the crystal, and then pass through the magnetic field from high to low, it may help the formed crystal to have a buffer zone when it leaves the magnetic field, preventing the formed crystal from instantly leaving the magnetic field to trigger a new convection mode, which has an adverse effect on the quality of the crystal, and ensures that it continues to grow under more stable conditions. In addition, the central heat-insulating magnetic-resistance shell 1, the upper heat-insulating magnetic-resistance shell 2 and the lower heat-insulating magnetic-resistance shell 3 are all made of heat-insulating materials, which can greatly delay the heating rate of the liquid helium inside the liquid helium cavity 8, so that the inside of the liquid helium cavity 8 can maintain a low temperature state for a long time, ensure that the superconducting core 9 is in a superconducting state for a long time, and ensure the use effect of the device. ;

[0023] like Figures 1 to 10As shown, a heat-insulating magnetic shell 32 is fixedly installed inside the central heat-insulating magnetic shell 1, the upper heat-insulating magnetic shell 2 and the lower heat-insulating magnetic shell 3, and the distance between the heat-insulating magnetic shell 32 and the outer wall of the vertical pull furnace shell 14 is five centimeters. A support bending rod 31 is fixedly installed at the bottom of the lower heat-insulating magnetic shell 3, and one end of the support bending rod 31 away from the lower heat-insulating magnetic shell 3 is fixedly connected to the top of the support frame plate 19; when working, the heat-insulating magnetic shell 32 can delay the vertical pull furnace shell 14 from transmitting heat to the interior of the central heat-insulating magnetic shell 1, the upper heat-insulating magnetic shell 2 and the lower heat-insulating magnetic shell 3, greatly delaying the heating rate of the liquid helium in the liquid helium cavity 8, so that the inside of the liquid helium cavity 8 can maintain a low temperature state for a long time, ensuring that the superconducting core 9 is in a superconducting state for a long time, and ensuring the use effect of the device. In addition, the heat-insulating magnetic shell 32 is made of magnetic conductive material, which can ensure that the superconducting core 9 The generated magnetic field can act on the vertical pulling furnace shell 14 in a precise and controllable direction, and thus effectively have an expected effect on the silicon rods undergoing vertical pulling growth inside the vertical pulling furnace shell 14, thereby greatly reducing the thermal stress generated by the silicon rods during the growth process. A five-centimeter spacing space is deliberately designed between the thermal insulation and magnetic shell 32 and the vertical pulling furnace shell 14. This ingenious arrangement not only effectively avoids direct contact between the thermal insulation and magnetic shell 32 and the vertical pulling furnace shell 14, thereby significantly reducing the direct transfer of heat on the one hand, but also, on the other hand, the five-centimeter spacing provides a buffer distance for the magnetic field when it acts, so that the magnetic lines of force can act on the silicon rods inside the vertical pulling furnace shell 14 more evenly and stably, further optimizing the control effect of the magnetic field on the growth process of the silicon rods, and ensuring the quality and stability of the growth of the silicon rods.

[0024] like Figures 1 to 10As shown, the outer sides of the central thermal insulation magnetic resistance shell 1, the upper thermal insulation magnetic resistance shell 2 and the lower thermal insulation magnetic resistance shell 3 are all fixedly installed with thermal insulation connecting blocks 5, and the insides of the three thermal insulation connecting blocks 5 are all fixedly installed with thermistors 6, and the temperature measuring parts of the thermistors 6 are located on the inner sides of the central thermal insulation magnetic resistance shell 1, the upper thermal insulation magnetic resistance shell 2 and the lower thermal insulation magnetic resistance shell 3, and the three thermal insulation connecting blocks 5 are fixedly installed with power connection frames 7 on the sides away from the central thermal insulation magnetic resistance shell 1, the upper thermal insulation magnetic resistance shell 2 and the lower thermal insulation magnetic resistance shell 3; when working, the external current can be transmitted to the thermistors 6 and the superconducting core 9 through the wires, and the three thermistors 6 change their resistance values ​​according to the temperature inside the liquid helium cavity 8 inside the central thermal insulation magnetic resistance shell 1, the upper thermal insulation magnetic resistance shell 2 and the lower thermal insulation magnetic resistance shell 3, and the three thermistors 6 are all negative temperature coefficient thermistors Resistor 6, when the temperature inside the liquid helium cavity 8 increases, the resistance of the thermistor 6 decreases, which can change the current passing through the coil 10 inside the central thermal insulation magnetic resistance shell 1, the upper thermal insulation magnetic resistance shell 2 and the lower thermal insulation magnetic resistance shell 3, so as to ensure the stability of the magnetic field generated by the superconducting core 9 and the coil 10 when the temperature inside the liquid helium cavity 8 changes. The thermistor 6 can be used as a highly sensitive temperature sensor to capture the slight changes in the temperature inside the liquid helium cavity 8 in real time. When the thermistor 6 detects that the temperature increases and the resistance decreases, the current in the coil 10 connected in series with it will increase to compensate for the magnetic field fluctuations that may be caused by temperature changes. Through this feedback mechanism, even if the temperature inside the liquid helium cavity 8 fluctuates, the magnetic field can remain relatively stable, making the composition of the crystal more uniform and reducing the segregation effect in the crystal.

[0025] like Figures 1 to 10As shown, the rotary straight-pull assembly includes a lifting straight-pull assembly and a rotary assembly, the lifting straight-pull assembly includes a straight-pull traction head 30, a rotary pull rod 16 is fixedly installed on the top of the straight-pull traction head 30, a connecting rod 15 is rotatably installed on the top of the rotary pull rod 16, an end of the connecting rod 15 away from the rotary pull rod 16 is fixedly connected to a lifting rope 13, an end of the lifting rope 13 away from the connecting rod 15 is fixedly connected to a winding rod 12, a steering gear 11 is fixedly installed on the top of the support ear plate 20, an output end of the steering gear 11 is fixedly connected to one end of the winding rod 12, a driven gear 18 is fixedly installed on the input end of the steering gear 11, and the outer side of the driven gear 18 is meshed with the outer side of the driving gear 22; during operation, after the drive motor 21 is started, the output end of the drive motor 21 can drive the driving gear 22 to rotate, thereby driving the driven gear 1 8 is rotated, and after being diverted by the diverter 11, the winding rod 12 is driven to rotate, thereby winding the lifting rope 13, thereby pulling the connecting rod 15 upward, thereby driving the rotating rod 16 to move upward, and finally pulling the straight-pull traction head 30 upward, forming a straight-pull silicon rod at the bottom of the straight-pull traction head 30, and the straight-pull traction head 30 is lifted by winding the lifting rope 13. As the number of turns of the lifting rope 13 wound on the outer side of the winding rod 12 increases, the length of the lifting rope 13 that can be wound up by rotating the winding rod 12 one circle increases, thereby slowly increasing the rising speed of the straight-pull traction head 30. In the early stage of silicon rod growth, a lower pulling speed helps to stabilize the growth interface and reduce the generation of defects. As the growth proceeds, gradually increasing the pulling speed can maintain the stable growth of the crystal and improve production efficiency at the same time.

[0026] like Figures 1 to 10 As shown, the rotating assembly includes a limit frame 28, which is fixedly mounted on the inner side of the straight-pull furnace shell 14, and the limit frame 28 is movably mounted on the outer side of the rotating pull rod 16, and a rotating guide groove 17 is opened on the outer side of the rotating pull rod 16, and a rotating guide block 29 is fixedly mounted on the inner side of the limit frame 28, and the rotating guide block 29 is slidably mounted on the inner side of the rotating guide groove 17; during operation, when the rotating pull rod 16 is in the process of rising, the limit frame 28 located on the outer side of the rotating pull rod 16 can ensure the stability of the rising of the rotating pull rod 16, so that the rotating pull rod 16 will not swing, reduce or eliminate the shaking phenomenon, so as to ensure the quality of the crystal and the stability of the growth process, and in addition, when the rotating pull rod 16 is in the process of rising, the rotating guide block 29 can move inside the rotating guide groove 17, so that the rotating pull rod 16 rotates, and the rotation can homogenize the composition and temperature distribution in the molten pool, and can also avoid the uneven stress caused by the friction between the crystal and the graphite rod, and can also promote the mass transfer between the gas and the molten pool, so as to better control the content and form of impurities in the crystal.

[0027] like Figures 1 to 10As shown, the rotating crucible assembly includes a crucible 23, which is located directly below the lower heat-insulating and magnetic-resistant shell 3. An insulation ring plate 25 is fixedly installed on the outer side of the crucible 23, and an anti-slip ring 26 is fixedly installed on the outer side of the insulation ring plate 25. The anti-slip ring 26 is fixedly installed on the inner side of the vertical pulling furnace shell 14. A driven gear ring 24 is fixedly installed on the outer side of the insulation ring plate 25. The outer side of the driven gear ring 24 is meshed with the outer side of the driving gear 22. A swing assembly is installed inside the crucible 23, and the swing assembly is used to swing the material in the bottom area of ​​the crucible 23 to the top area of ​​the crucible 23. A magnetic ring lifting assembly is also installed inside the crucible 23. The magnetic ring lifting assembly is used to reduce the heat convection inside the crucible 23; when working, the driving motor 21 can drive the driving gear 22 to rotate when it is started, thereby driving the driven gear ring 24 to rotate, and driving the crucible 23 to rotate through the heat insulation ring plate 25. The rotating crucible 23 can make the melt evenly distributed inside the crucible, and the centrifugal force generated by the rotation helps to discharge the bubbles in the melt, reduce the gaps between the melts, and make the reactants more closely combined, which is beneficial to the mass transfer and heat transfer between the reactants, thereby accelerating the chemical reaction. When the crucible 23 rotates, the melt inside The temperature distribution is more uniform, the temperature gradient is reduced, and it is helpful to reduce the thermal stress in the single crystal growth process and reduce the generation of crystal defects. In addition, the driven gear ring 24 and the driven gear 18 are driven to rotate through the driving gear 22. When it is necessary to straight-pull a silicon rod with a large diameter, the speed of the driving motor 21 can be reduced, so that the speeds of the driving gear 22, the driven gear ring 24 and the driven gear 18 are all reduced, so that the rotation speed of the crucible 23 and the rising speed of the straight-pull traction head 30 are reduced, and the straight-pull is performed slowly to ensure the stable growth of the silicon rod. When it is necessary to straight-pull a silicon rod with a small diameter, the speed of the driving motor 21 can be increased. The rotation speed of the driving gear 22, the driven gear ring 24 and the driven gear 18 are increased, so that the rotation speed of the crucible 23 and the rising speed of the straight-pull traction head 30 are increased, and the straight-pull is performed quickly to ensure the efficiency of the silicon rod straight-pull. The rotation speed of the crucible 23 and the rising speed of the straight-pull traction head 30 are both controlled by the driving motor 21, and do not require too much equipment adjustment, and can be stably applicable to the straight-pull of silicon rods of different diameters. In addition, the provided heat insulation ring plate 25 can play a role of heat insulation, prevent the support frame plate 19 from directly contacting the crucible 23, and prevent the staff from being affected by the high temperature of the crucible 23 during operation.

[0028] like Figures 1 to 10As shown, the swing assembly includes four push rods 33 and four U-shaped seats 34, one end of the four push rods 33 is fixedly connected to the inner side of the vertical pull furnace shell 14, and the inside of the four U-shaped seats 34 are rotatably installed with a toggle plate 35, and the ends of the four push rods 33 away from the supporting bending rod 31 are all located on the inner side of the crucible 23, and the height of the ends of the push rods 33 away from the supporting bending rod 31 is located between the top of the U-shaped seat 34 and the top of the toggle plate 35, and the bottom of the toggle plate 35 is fixedly installed with a liquid diverting plate 36; when working, the crucible 23 When rotating, the U-shaped seat 34 can drive the toggle plate 35 to rotate. When the toggle plate 35 passes the pressing push rod 33, the pressing push rod 33 can push one end of the toggle plate 35 toward the end close to the inner wall of the crucible 23, and make the liquid diverting plate 36 at the other end of the toggle plate 35 move toward the end away from the inner wall of the crucible 23, so as to divert the material deposited at the bottom of the crucible 23 upward, thereby avoiding excessive accumulation of the melt at the bottom of the crucible 23. This uniform distribution helps to ensure that the reactants can fully contact and mix, thereby improving the uniformity of the reaction.

[0029] like Figures 1 to 10 As shown, the liquid diverter plate 36 is a five-stage stepped liquid diverter plate 36 that is in a state of shrinking from bottom to top. A rectangular through groove is provided inside the liquid diverter plate 36. One side of the liquid diverter plate 36 is flat, and the other side of the liquid diverter plate 36 is in an arc shape. When working, the five-stage stepped liquid diverter plate 36 that is in a state of shrinking from bottom to top can divert the melt at different positions inside the crucible 23 to different degrees to ensure the uniformity of the diverting. In addition, the rectangular through groove inside the liquid diverter plate 36 can reduce the resistance of the liquid diverter plate 36 to divert upward, and also prevent the melt from being diverted and splashed, thereby ensuring the safety of the diverting. In addition, one side of the liquid-dipping plate 36 is flat to ensure the stirring effect and prevent the melt from quickly escaping from one side of the liquid-dipping plate 36. In addition, the other side of the liquid-dipping plate 36 is arc-shaped to prevent the liquid-dipping plate 36 from stirring the melt downward when the liquid-dipping plate 36 approaches the inner wall of the crucible 23 under the action of gravity, thereby ensuring the uniformity of the melt inside the crucible 23. The stirring of the melt by the liquid-dipping plate 36 increases the friction between the melts and is not easy to form agglomerates. In the process of growing a CZ single crystal, preventing agglomeration is helpful to grow high-quality single crystals without dislocations and defects.

[0030] like Figures 1 to 10As shown, the magnetic ring lifting assembly includes a magnetic ring 37, four connecting rods 38 are fixedly installed on the top of the magnetic ring 37, and lifting plates 39 are fixedly installed on the top of the four connecting rods 38. The central axes of the four lifting plates 39 are respectively in the same vertical plane as the central axes of the four liquid-discharging plates 36. Four limiting slide bars 27 are slidably installed inside the connecting rods 38, and the bottom of the limiting slide bar 27 is fixedly installed on the bottom of the crucible 23. When working, when the liquid-discharging plate 36 moves to the side away from the inner wall of the crucible 23, the lifting plate 39 can be pushed upward, thereby pulling the connecting rods 38 to move upward. This pulls the magnetic ring 37 to move upward on the outside of the limit slide bar 27. By adding the magnetic ring 37 that moves up and down in the crucible 23, a changing magnetic field can be generated. This magnetic field can more effectively suppress the convection of the silicon melt, thereby reducing the heat flow. When the magnetic field acts on the melt, the conductor in the melt will cut the magnetic lines of force, thereby generating an induced electromotive force. Under the action of the induced electromotive force, an induced current will be generated in the silicon melt, and the induced current will generate a Lorentz force under the action of the magnetic field. The direction of this Lorentz force is opposite to the flow direction of the melt, so it can hinder the flow of the melt, that is, suppress convection.

[0031] like Figures 1 to 10 As shown, the outer side of the magnetic ring 37 is installed with heat-resistant material, and the magnetic ring 37 adopts an aluminum-nickel-cobalt magnet; when working, the outer side of the magnetic ring 37 is wrapped with a heat-insulating material, and the heat-resistant material is short aluminum oxide fibers, which can significantly slow down the transfer of external heat to the magnetic ring 37, and the magnetic ring 37 is an aluminum-nickel-cobalt magnet, whose Curie temperature is higher than the sintering temperature of 900°C, and can still maintain magnetism at high temperatures.

[0032] Working principle: first, liquid helium can be injected into the liquid helium cavity 8 inside the central thermal insulation magnetic resistance shell 1, the upper thermal insulation magnetic resistance shell 2 and the lower thermal insulation magnetic resistance shell 3 through the liquid filling valve 4. The liquid helium makes the inside of the liquid helium cavity 8 in a low-temperature state, so that the superconducting core 9 and the coil 10 located inside the liquid helium cavity 8 are both in a low temperature, so that the superconducting core 9 and the coil 10 are both in a superconducting state. After that, the external current can be transmitted to the thermistor 6 and the superconducting core 9 through the wire. The three thermistors 6 are set to change the resistance according to the temperature inside the liquid helium cavity 8 inside the central thermal insulation magnetic resistance shell 1, the upper thermal insulation magnetic resistance shell 2 and the lower thermal insulation magnetic resistance shell 3. The three thermistors 6 are all negative temperature coefficient thermistors 6. When the temperature inside the liquid helium cavity 8 increases, the resistance of the thermistor 6 decreases, which can change the resistance of the thermistor 6 through the central thermal insulation magnetic resistance shell 1, the upper thermal insulation magnetic resistance shell 2 and the lower thermal insulation magnetic resistance shell 3. The current of the coil 10 inside the core thermal insulation magnetic resistance shell 1, the upper thermal insulation magnetic resistance shell 2 and the lower thermal insulation magnetic resistance shell 3 can ensure the stability of the magnetic field generated by the superconducting core 9 and the coil 10 when the temperature inside the liquid helium cavity 8 changes. The thermistor 6 can be used as a highly sensitive temperature sensor to capture the subtle changes in the temperature inside the liquid helium cavity 8 in real time. When the thermistor 6 detects that the temperature rises and the resistance value decreases, the current in the coil 10 connected in series with it will increase to compensate for the magnetic field fluctuations that may be caused by temperature changes. Through this feedback mechanism, even if the temperature inside the liquid helium cavity 8 fluctuates, the magnetic field can remain relatively stable, making the composition of the crystal more uniform and reducing the segregation effect in the crystal. In addition, the central thermal insulation magnetic resistance shell 1, the upper thermal insulation magnetic resistance shell 2 and the lower thermal insulation magnetic resistance shell 3 The coil 10 wound around the outside of the superconducting core 9 has a turn ratio of 2:1:1. When the same current is passed through the central thermal insulation and magnetic resistance shell 1, the upper thermal insulation and magnetic resistance shell 2 and the lower thermal insulation and magnetic resistance shell 3, the magnetic field strength generated by the superconducting core 9 and the coil 10 first increases and then decreases from bottom to top. The magnetic field strengths at the top and bottom are the same, while the magnetic field strength in the middle is twice that of the top and bottom. When the single crystal passes through a magnetic field that changes from low to high, it can more effectively suppress the convection movement in the melt, make the heat conduction more evenly, and reduce defects and impurities in the crystal. Afterwards, when passing through a magnetic field that changes from high to low, it may help the formed crystal to have a buffer zone when it leaves the magnetic field, preventing the formed crystal from instantly leaving the magnetic field to trigger a new convection mode, which will have an adverse effect on the crystal quality. The effect of the drive motor 21 is to ensure that the superconducting core 9 is in a superconducting state for a long time, and the use effect of the device is ensured. After the drive motor 21 is started, the output end of the drive motor 21 can drive the driving gear 22 to rotate, thereby driving the driven gear 18 to rotate, and after the steering gear 11 is turned, the winding rod 12 is driven to rotate, thereby winding the lifting rope 13, thereby pulling the connecting rod 15 upward, thereby driving the rotating rod 16 upward, and finally pulling the straight pull head 30 upward,A straight-pull silicon rod is formed at the bottom of the straight-pull traction head 30, and the straight-pull traction head 30 is lifted by means of a winding and lifting rope 13. As the number of turns of the lifting rope 13 on the outer side of the winding rod 12 increases, the length of the lifting rope 13 that can be wound up when the winding rod 12 rotates one circle increases, thereby slowly increasing the rising speed of the straight-pull traction head 30. In the initial stage of silicon rod growth, a lower pulling speed helps to stabilize the growth interface and reduce the generation of defects. As the growth proceeds, gradually increasing the pulling speed can maintain the stable growth of the crystal and improve production efficiency at the same time. During the rising process of the rotating pull rod 16, the limit frame 28 located on the outer side of the rotating pull rod 16 can ensure the stability of the rising of the rotating pull rod 16, so that the rotating pull rod 16 will not swing, reducing or eliminating shaking. In addition, the rotating guide block 29 can move inside the rotating guide groove 17 during the rising process of the rotating pull rod 16, so that the rotating pull rod 16 can rotate. The rotation can evenly distribute the components and temperature in the molten pool, avoid the uneven stress caused by the friction between the crystal and the graphite rod, and promote the mass transfer between the gas and the molten pool, so as to better control the content and form of impurities in the crystal. When the driving motor 21 is started, it can drive the active gear 22 to rotate, thereby driving the driven gear ring 24 to rotate, and driving the crucible 23 to rotate through the heat insulation ring plate 25. The rotating crucible 23 can make the melt evenly distributed inside the crucible, and the centrifugal force generated by the rotation has It helps to discharge bubbles in the melt, reduce the gaps between the melts, and make the reactants more closely combined, which is beneficial to mass transfer and heat transfer between the reactants, thereby accelerating the chemical reaction. When the crucible 23 rotates, the temperature distribution inside the melt can be made more uniform, reducing the temperature gradient, which helps to reduce the thermal stress in the single crystal growth process and reduce the generation of crystal defects. In addition, the driven gear ring 24 and the driven gear 18 are driven to rotate through the driving gear 22. When it is necessary to straight-pull a silicon rod with a large diameter, the speed of the drive motor 21 can be reduced, thereby reducing the speeds of the driving gear 22, the driven gear ring 24 and the driven gear 18, thereby reducing the rotation speed of the crucible 23 and the rising speed of the straight-pull traction head 30, and the straight-pull is performed slowly. , to ensure the stable growth of silicon rods. When it is necessary to pull silicon rods with small diameters, the speed of the driving motor 21 can be increased, so that the speeds of the driving gear 22, the driven gear ring 24 and the driven gear 18 are all increased, so that the rotation speed of the crucible 23 and the rising speed of the straight-pull traction head 30 are all increased, and the straight-pull is performed quickly to ensure the efficiency of the straight-pull of silicon rods. The speed of the crucible 23 and the rising speed of the straight-pull traction head 30 are both controlled by the driving motor 21, and there is no need to adjust too much equipment. It can be stably applied to the straight-pull of silicon rods of different diameters. When the crucible 23 rotates, the toggle plate 35 can be driven to rotate by the U-shaped seat 34. When the toggle plate 35 passes through the pressing push rod 33, the pressing push rod 33 can push one end of the toggle plate 35 toward the end close to the inner wall of the crucible 23.The liquid diverting plate 36 at the other end of the diverting plate 35 is moved toward the end away from the inner wall of the crucible 23, and the material deposited at the bottom of the crucible 23 is moved upward, thereby avoiding excessive accumulation of the melt at the bottom of the crucible 23. This uniform distribution helps to ensure that the reactants can fully contact and mix, thereby improving the uniformity of the reaction.

[0033] The above shows and describes the basic principles, main features and advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A superconducting magnet and a magnetron CZ single crystal pulling device, characterized in that: The invention comprises a support installation component, wherein the support installation component comprises a support frame plate (19) and a support ear plate (20), and the support ear plate (20) is fixedly mounted on the outer side of the support frame plate (19); a superconducting magnet component and a rotating straight-pull component are mounted on the top of the support frame plate (19); a straight-pull furnace shell (14) is fixedly mounted inside the support frame plate (19); a rotating crucible component is mounted inside the straight-pull furnace shell (14); a driving component is fixedly mounted on the bottom of the support frame plate (19) and the support ear plate (20); the driving component is used to drive the rotating straight-pull component and the rotating crucible component to operate; the driving component comprises a driving motor (21); a driving gear (22) is fixedly mounted on the output end of the driving motor (21); the superconducting magnet component comprises a central heat-insulating magnetic-resistance shell (1), an upper heat-insulating magnetic-resistance shell (2) and a lower heat-insulating magnetic-resistance shell (3); the central heat-insulating magnetic-resistance shell ( 1), an upper heat-insulating magnetic-resistance shell (2) and a lower heat-insulating magnetic-resistance shell (3) are both located on the outside of the vertical pulling furnace shell (14), the upper heat-insulating magnetic-resistance shell (2) is fixedly mounted on the top of the central heat-insulating magnetic-resistance shell (1), and the lower heat-insulating magnetic-resistance shell (3) is fixedly mounted on the bottom of the central heat-insulating magnetic-resistance shell (1), and a liquid filling valve (4) is fixedly mounted on the outside of the central heat-insulating magnetic-resistance shell (1), the upper heat-insulating magnetic-resistance shell (2) and the lower heat-insulating magnetic-resistance shell (3), and the central heat-insulating magnetic-resistance shell (1) is fixedly mounted on the outside of the upper heat-insulating magnetic-resistance shell (2) and the lower heat-insulating magnetic-resistance shell (3). A liquid helium cavity (8) is provided inside the thermal-insulating magnetic-resistance shell (1), the upper thermal-insulating magnetic-resistance shell (2) and the lower thermal-insulating magnetic-resistance shell (3); a superconducting core (9) is fixedly installed inside the liquid helium cavity (8); a coil (10) is wound around the outside of the superconducting core (9); and the coils (10) wound around the outside of the superconducting core (9) inside the central thermal-insulating magnetic-resistance shell (1), the upper thermal-insulating magnetic-resistance shell (2) and the lower thermal-insulating magnetic-resistance shell (3) have a turn ratio of 2:1:

1.

2. A superconducting magnet and a magnetron CZ single crystal pulling device according to claim 1, characterized in that: A heat-insulating magnetic-resistance shell (32) is fixedly installed inside the central heat-insulating magnetic-resistance shell (1), the upper heat-insulating magnetic-resistance shell (2) and the lower heat-insulating magnetic-resistance shell (3), and the distance between the heat-insulating magnetic-resistance shell (32) and the outer wall of the vertical pull furnace shell (14) is five centimeters. A supporting bending rod (31) is fixedly installed at the bottom of the lower heat-insulating magnetic-resistance shell (3), and one end of the supporting bending rod (31) away from the lower heat-insulating magnetic-resistance shell (3) is fixedly connected to the top of the support frame plate (19).

3. A superconducting magnet and a magnetron CZ single crystal pulling device according to claim 2, characterized in that: The outer sides of the central heat-insulating magnetic-resistance shell (1), the upper heat-insulating magnetic-resistance shell (2) and the lower heat-insulating magnetic-resistance shell (3) are all fixedly mounted with heat-insulating connecting blocks (5); the interiors of the three heat-insulating connecting blocks (5) are all fixedly mounted with thermistors (6); and the temperature measuring parts of the thermistors (6) are located on the inner sides of the central heat-insulating magnetic-resistance shell (1), the upper heat-insulating magnetic-resistance shell (2) and the lower heat-insulating magnetic-resistance shell (3); and the sides of the three heat-insulating connecting blocks (5) away from the central heat-insulating magnetic-resistance shell (1), the upper heat-insulating magnetic-resistance shell (2) and the lower heat-insulating magnetic-resistance shell (3) are fixedly mounted with an electrical connection frame (7).

4. A superconducting magnet and a magnetron CZ single crystal pulling device according to claim 3, characterized in that: The rotary straight-pull assembly comprises a lifting straight-pull assembly and a rotary assembly, wherein the lifting straight-pull assembly comprises a straight-pull traction head (30), a rotary pull rod (16) is fixedly mounted on the top of the straight-pull traction head (30), a connecting rod (15) is rotatably mounted on the top of the rotary pull rod (16), a lifting rope (13) is fixedly connected to one end of the connecting rod (15) away from the rotary pull rod (16), a winding rod (12) is fixedly connected to one end of the lifting rope (13) away from the connecting rod (15), a steering gear (11) is fixedly mounted on the top of the support ear plate (20), an output end of the steering gear (11) is fixedly connected to one end of the winding rod (12), and a driven gear (18) is fixedly mounted on the input end of the steering gear (11), and the outer side of the driven gear (18) is meshed with the outer side of the driving gear (22).

5. A superconducting magnet and a magnetron CZ single crystal pulling device according to claim 4, characterized in that: The rotating assembly comprises a limit frame (28), wherein the limit frame (28) is fixedly mounted on the inner side of the straight-pull furnace shell (14), and the limit frame (28) is movably mounted on the outer side of a rotating pull rod (16), a rotating guide groove (17) is provided on the outer side of the rotating pull rod (16), a rotating guide block (29) is fixedly mounted on the inner side of the limit frame (28), and the rotating guide block (29) is slidably mounted on the inner side of the rotating guide groove (17).

6. A superconducting magnet and a magnetron CZ single crystal pulling device according to claim 5, characterized in that: The rotating crucible assembly comprises a crucible (23), the crucible (23) being located directly below the lower heat-insulating and magnetic-resisting shell (3), a heat-insulating ring plate (25) being fixedly mounted on the outer side of the crucible (23), a fall-off prevention ring (26) being fixedly mounted on the outer side of the heat-insulating ring plate (25), the fall-off prevention ring (26) being fixedly mounted on the inner side of the vertical-pulling furnace shell (14), a driven gear ring (24) being fixedly mounted on the outer side of the heat-insulating ring plate (25), the outer side of the driven gear ring (24) being meshed with the outer side of the driving gear (22), a swinging assembly being mounted inside the crucible (23), the swinging assembly being used to swing the material in the bottom area of ​​the crucible (23) to the top area of ​​the crucible (23), and a magnetic ring lifting assembly being mounted inside the crucible (23), the magnetic ring lifting assembly being used to reduce the heat convection inside the crucible (23).

7. A superconducting magnet and a magnetron CZ single crystal pulling device according to claim 6, characterized in that: The swing assembly comprises four push rods (33) and four U-shaped seats (34), one end of the four push rods (33) is fixedly connected to the inner side of the vertical pull furnace shell (14), and a toggle plate (35) is rotatably installed inside the four U-shaped seats (34). One end of the four push rods (33) away from the supporting bending rod (31) is located on the inner side of the crucible (23), and the height of the end of the push rod (33) away from the supporting bending rod (31) is located between the top of the U-shaped seat (34) and the top of the toggle plate (35), and a liquid diverting plate (36) is fixedly installed at the bottom of the toggle plate (35).

8. A superconducting magnet and a magnetron CZ single crystal pulling device according to claim 7, characterized in that: The liquid-discharging plate (36) is of five-stage stepped type and is in a shrinking state from bottom to top. A rectangular through groove is provided inside the liquid-discharging plate (36). One side of the liquid-discharging plate (36) is flat, and the other side of the liquid-discharging plate (36) is in an arc shape.

9. A superconducting magnet and a magnetron CZ single crystal pulling device according to claim 8, characterized in that: The magnetic ring lifting assembly comprises a magnetic ring (37), four connecting rods (38) are fixedly mounted on the top of the magnetic ring (37), and a lifting plate (39) is fixedly mounted on the top of each of the four connecting rods (38), the central axes of the four lifting plates (39) are respectively in the same vertical plane as the central axes of the four liquid-discharging plates (36), and four limiting slide bars (27) are slidably mounted inside the connecting rods (38), and the bottom of the limiting slide bars (27) is fixedly mounted on the bottom of the crucible (23).

10. A superconducting magnet and a magnetron CZ single crystal pulling device according to claim 9, characterized in that: A heat-resistant material is installed on the outer side of the magnetic ring (37), and the heat-resistant material is short aluminum oxide fibers. The magnetic ring (37) uses an aluminum-nickel-cobalt magnet.

Images