Solution silicon carbide device cleaning device and cleaning method

Abstract

The invention discloses a solution silicon carbide device cleaning device and method, and belongs to the field of device cleaning. The solution silicon carbide device cleaning device comprises a flow guide water pipe, a limiting sleeve shell fixedly installed on the surface of the outer side of the top of the flow guide water pipe, a multi-layer filtering box arranged on the back face of the flow guide water pipe, and liquid guide pipes detachably installed on the edges of the two sides of the flow guide water pipe. The limiting rails are fixedly installed on the edges of the front side and the rear side of the limiting sleeve shell, and the silicon carbide devices are movably connected to the outer side surfaces of the output ends of the limiting rails in a sleeving mode. When clamping equipment puts a silicon carbide device into the closed sleeve shell, a certain gap is reserved between the silicon carbide device and the closed sleeve shell in cooperation with the heightened water-permeable strip on the inner side surface of the closed sleeve shell, and meanwhile when the silicon carbide device is squeezed into the closed sleeve shell, the silicon carbide device is squeezed into the closed sleeve shell. And the edge position of the silicon carbide device can extrude the elastic soft sleeve strip on the inner side wall surface of the closed sleeve shell, and meanwhile, the silicon carbide device is limited in the closed sleeve shell in cooperation with elastic expansion of the elastic soft sleeve strip.

Description

Technical Field

[0001] The invention belongs to the technical field of device cleaning, and in particular relates to a device and a method for cleaning a dissolved silicon carbide device. Background Art

[0002] The main application areas of silicon carbide devices include LED solid lighting and high-frequency devices. This material has excellent properties such as bandgap, drift velocity, breakdown voltage, thermal conductivity, high temperature resistance, etc. that are several times higher than traditional silicon. It has irreplaceable advantages in electronic applications such as high temperature, high pressure, high frequency, high power, optoelectronics, radiation resistance, microwave, and extreme environment applications such as aerospace, military industry, and nuclear energy. Silicon carbide is a representative material of the third generation of semiconductors with a large bandgap and high chemical inertness. It has important application value in the field of high-frequency and high-voltage devices, and has gradually been used in photovoltaics, new energy vehicles, smart grids and other fields, with excellent performance.

[0003] In the current prior art, during the processing of silicon carbide devices, extremely fine raw material debris will appear on the surface of the silicon carbide devices due to processing. When cleaning the silicon carbide devices, the silicon carbide devices need to be placed in the device cleaning box. However, during the placement process, the silicon carbide devices are placed quickly, and the too thin silicon carbide devices are easy to change direction due to changes in water flow, which leads to the silicon carbide devices colliding with the bottom and inner wall of the cleaning box. For example, the silicon carbide focusing ring has a high hardness, but the body is very brittle and is prone to breakage when it is hit by external force during cleaning. In order to improve the cleaning efficiency, the device is often required to rotate in the cleaning box, and the transmission cleaning box has a poor limiting effect on the device.

[0004] To this end, the present invention provides a molten silicon carbide device cleaning device and a method thereof. Summary of the invention

[0005] The present invention is to make up for the deficiencies of the prior art and solve at least one technical problem raised in the background technology.

[0006] In the first aspect, the technical solution adopted by the present invention to solve its technical problem is: a molten silicon carbide device cleaning device described in the present invention comprises a guide water pipe and a limiting sleeve fixedly installed on the outer surface of the top of the guide water pipe, a multi-layer filter box arranged on the back of the guide water pipe, a liquid guide pipe detachably installed on the edge positions of both sides of the guide water pipe, a limiting track fixedly installed on the edge positions of the front and rear sides of the limiting sleeve, a silicon carbide device movably sleeved on the outer surface of the output end of the limiting track, a motor 1 is fixedly installed on the top surface of the guide water pipe and located at the edge position of one side of the limiting sleeve, a transmission rod is movably sleeved on the outer surface of the limiting sleeve and located in the middle position, and a transmission rod is arranged on the output end of the motor 1. A conveyor belt movably sleeved on the outer surface of the transmission rod is arranged. When the closed casing fixes the silicon carbide device, a pair of conveyor belts are transmitted in cooperation with a motor, thereby driving the transmission rod on the outer surface of the limiting casing to rotate on the surface of the limiting casing, so that the triangular swing arm circulates and rotates inside the limiting casing and the guide water pipe, so that the silicon carbide device is rinsed inside the guide water pipe and the excess cleaning liquid of the silicon carbide device is dripped and recovered inside the limiting casing, and then the silicon carbide device is taken out and a new silicon carbide device is installed through the limiting casing. A triangular swing arm is fixedly connected to the outer surface of the transmission rod and located in the middle position, and a closed casing is movably sleeved on one end of the triangular swing arm. The inner wall surface of the closed shell is fixedly connected with an elastic soft sleeve strip movably sleeved on the outer wall surface of the silicon carbide device. When the triangular swing arm on the outer surface of the transmission rod drives the closed shell to move into the diversion water pipe, the diversion pipe is used to inject water into one end of the diversion water pipe. The water source flows through the water-permeable holes on the surfaces of the closed shell and the elastic soft sleeve strip to clean up the debris on the surface of the silicon carbide device. The water source is used to contact the front and rear surfaces of the silicon carbide device. The flowing water source will generate an outward pulling force on the debris, so that the debris adhered to the surface of the silicon carbide device is cleaned up. The outer edge positions of the closed shell and the elastic soft sleeve strip are provided with water-permeable holes. At the same time, the silicon carbide device is When squeezed into the closed shell, the edge position of the silicon carbide device will squeeze the elastic soft sleeve strip on the inner wall of the closed shell, and at the same time, the elastic expansion of the elastic soft sleeve strip will confine the silicon carbide device inside the closed shell, limit the position of the silicon carbide device, and at the same time, with the gap inside the elastic soft sleeve strip, silicon carbide devices of different sizes can be effectively clamped. The inner wall of the closed shell is fixedly connected with a raised and permeable strip that is movably overlapped on the outer wall of the silicon carbide device. When the clamping device puts the silicon carbide device into the closed shell, the raised and permeable strip on the inner surface of the closed shell is used to leave a certain gap between the silicon carbide device and the closed shell, so that the cleaning liquid can flow in an orderly manner.

[0007] Preferably, a closed top cover is movably sleeved on the top surface of the multi-layer filter box, and docking covers are movably sleeved on both side surfaces of the multi-layer filter box and the closed top cover. A sealing ring is provided on the outer surface of the docking cover and in the middle position. A C-shaped limit strip is fixedly connected to the inner wall of the multi-layer filter box, and an ultra-dense filter screen is movably sleeved on the inner wall of the C-shaped limit strip, which cooperates with the liquid guide tube to extract the cleaning liquid inside the diversion water pipe, and diverts the cleaning liquid into the interior of the multi-layer filter box. At the same time, the ultra-dense filter screen on the inner wall of the C-shaped limit strip is used to filter the flowing water source multiple times, and then filter the fine debris inside the cleaning liquid, so that the new cleaning liquid can be recycled for a second time.

[0008] Preferably, a second motor is movably sleeved on the inner wall surface of the limiting track, and a lifter is fixedly connected to the output end of the second motor, so that the second motor slides on the surface of the limiting track to peel the silicon carbide device out of the closed shell, and a support frame is fixedly connected to the output end of the lifter. When the silicon carbide device is completely cleaned, the silicon carbide device is moved to the highest point under the push of the triangular swing arm, and the second motor slides inside the limiting track, so that the support frame on one end of the lifter pushes the adsorption horn, and the outer surface of the support frame is detachably mounted with an adsorption horn that movably fits on the outer surface of the silicon carbide device.

[0009] Preferably, a suction fan is fixedly installed on the top surface of the lifter, and an air duct arranged on the edge of one side of the adsorption horn is fixedly connected to the output end of the suction fan, so that the soft side of the adsorption horn is attached to the surface of the silicon carbide device. At this time, the gas inside the air duct and the adsorption horn is absorbed by the suction fan. As the gas is continuously reduced, the adsorption horn will be compressed so that the adsorption horn and the air duct are in a semi-vacuum state, thereby firmly adsorbing the silicon carbide device on the surface of the adsorption horn.

[0010] Preferably, closing covers are detachably mounted on both side surfaces of the diversion water pipe, and one end of the diversion water pipe is fixedly connected to the surface of the closing cover, and the other end of the diversion water pipe is movably sleeved on the inner wall of the sealing ring.

[0011] Preferably, a snap-on lock buckle is provided on one end of the triangular swing arm, and one end of the snap-on lock buckle is detachably mounted on the back side of the closed shell.

[0012] Preferably, a support arm is fixedly connected to the inner wall surface of the limiting sleeve, and the other end of the support arm is movably sleeved on the outer surface of the transmission rod.

[0013] In a second aspect, a method for cleaning a dissolved silicon carbide device comprises the following steps:

[0014] S1. Clamp the silicon carbide device using a clamp;

[0015] S2, clamping the clamped silicon carbide device into the cleaning device, using the cleaning liquid to flow inside the conveying pipe, using the water source to contact the front and rear surfaces of the silicon carbide device, the flowing water source will generate an outward pulling force on the debris, and the debris adhering to the surface of the silicon carbide device will be cleaned off;

[0016] S3. The fluidity of the cleaning liquid is used to flow evenly on the front and rear surfaces of the silicon carbide device, and the fine debris on the surface of the silicon carbide device is cleaned by the flowing cleaning liquid, thereby avoiding the traditional chip cleaning method, which requires the use of foreign objects to slide on the surface of the silicon carbide device, so that the debris floats into the water source. The sliding of the foreign object will generate too much thrust on the debris on the surface of the silicon carbide device, causing the debris to slide on the surface of the silicon carbide device, thereby causing many extremely small and fine scratches on the surface of the silicon carbide device, affecting the use of the semiconductor in the later stage, and greatly reducing the cleaning of foreign objects.

[0017] S4. Use the diversion pipe to drain the cleaning liquid, use the ultra-fine filter to filter the cleaning liquid, filter out the fine debris, and then recycle the cleaning liquid for secondary use. Use the diversion pipe to extract the cleaning liquid inside the diversion pipe, and divert the cleaning liquid into the multi-layer filter box. Use the ultra-dense filter on the inner wall of the C-shaped limit strip to filter the flowing water source multiple times, and then filter the fine debris inside the cleaning liquid. Different ultra-dense filters can filter debris of different sizes multiple times and multiple layers, and recycle the cleaning liquid for secondary use.

[0018] S5. When the silicon carbide device is completely cleaned, the triangular swing arm pushes the silicon carbide device to the highest point, and the soft side of the adsorption horn is attached to the surface of the silicon carbide device. The adsorption horn will be compressed so that the inside of the adsorption horn and the air duct are in a semi-vacuum state, thereby firmly adsorbing the silicon carbide device on the surface of the adsorption horn. At the same time, the gripper is used to take down the cleaned silicon carbide sheet, and the motor 2 is made to slide on the surface of the limit track to peel the silicon carbide device out of the closed shell. The direction of the silicon carbide device is changed by rotating the lifter through the motor 2, and the silicon carbide device is placed in a specific storage box and placed in a specific collecting device to reduce excessive contact between the silicon carbide device and the outside world.

[0019] The beneficial effects of the present invention are as follows:

[0020] 1. In the cleaning device and method for the dissolved silicon carbide device of the present invention, when the clamping device places the silicon carbide device into the closed shell, the padding water-permeable strip on the inner surface of the closed shell is used to leave a certain gap between the silicon carbide device and the closed shell. At the same time, when the silicon carbide device is squeezed into the closed shell, the edge position of the silicon carbide device will squeeze the elastic soft sleeve strip on the inner wall of the closed shell, and at the same time, the elastic expansion of the elastic soft sleeve strip will limit the silicon carbide device inside the closed shell, limit the position of the silicon carbide device, and at the same time, with the gap inside the elastic soft sleeve strip, the silicon carbide devices of different sizes can be effectively clamped;

[0021] 2. In the cleaning device and method for the dissolved silicon carbide device of the present invention, after the closed housing fixes the silicon carbide device, a pair of conveyor tracks are driven in cooperation with the motor, thereby driving the transmission rod on the outer surface of the limit housing to rotate on the surface of the limit housing. When the triangular swing arm on the outer surface of the transmission rod drives the closed housing to move into the interior of the diversion water pipe, the diversion pipe is used to inject water into one end of the diversion water pipe, and the water source flows through the water-permeable holes on the surfaces of the closed housing and the elastic soft sleeve strip to clean up the debris on the surface of the silicon carbide device, so that the water source is contacted with the front and rear surfaces of the silicon carbide device, and the flowing water source will produce a pulling force outward on the debris, thereby cleaning up the debris adhering to the surface of the silicon carbide device;

[0022] 3. In the cleaning device and method for the dissolved silicon carbide device of the present invention, after the silicon carbide device is completely cleaned, the silicon carbide device is moved to the highest point under the push of the triangular swing arm, and the second motor is cooperated to slide inside the limit track, so that the support frame on one end of the lifter pushes the adsorption horn, and the soft side of the adsorption horn is attached to the surface of the silicon carbide device. At this time, the gas inside the air duct and the adsorption horn is absorbed by the suction fan. As the gas is continuously reduced, the adsorption horn will be compressed so that the adsorption horn and the air duct are in a semi-vacuum state, and then the silicon carbide device is firmly adsorbed on the surface of the adsorption horn, so that the second motor slides on the surface of the limit track, and the silicon carbide device is peeled off from the inside of the closed shell, and then the lifter is rotated by the second motor to change the direction of the silicon carbide device, and the silicon carbide device is placed in a specific storage box, so that the silicon carbide device is extracted at a horizontal angle and direction, and the silicon carbide device is reduced. The tilting effect will not occur when the silicon carbide device is taken again;

[0023] 4. In the cleaning device and cleaning method of the molten silicon carbide device of the present invention, the cleaning liquid inside the diversion water pipe is extracted in cooperation with the liquid guide pipe, and the cleaning liquid is diverted and instilled into the interior of the multi-layer filter box, and at the same time, the ultra-dense filter mesh on the inner wall of the C-type limit strip is used to filter the flowing water source multiple times, and then the fine debris inside the cleaning liquid is filtered, and different ultra-dense filter meshes can perform multiple and multi-layer filtering treatments on debris of different sizes, and at the same time, the cleaning liquid is recycled for secondary use, thereby reducing waste. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The present invention will be further described below in conjunction with the accompanying drawings.

[0025] Figure 1 is a stereogram of the present invention;

[0026] Figure 2 It is a sectional stereoscopic view of the diversion water pipe in the present invention;

[0027] Figure 3 is a three-dimensional diagram of a closed casing in the present invention;

[0028] Figure 4 It is a three-dimensional diagram of the inner structure of the closed casing in the present invention;

[0029] Figure 5 It is a cutaway stereogram of the limit track in the present invention;

[0030] Figure 6 It is a three-dimensional diagram of the multi-layer filter box in the present invention;

[0031] Figure 7 is a sectional stereoscopic view of the limiting sleeve in the present invention;

[0032] Figure 8 It is a schematic diagram of the process of the present invention.

[0033] In the figure: 11, water diversion pipe; 111, closing cover; 112, liquid diversion pipe; 12, limiting casing; 121, motor one; 122, transmission rod; 123, support arm; 124, triangular swing arm; 125, snap-on lock; 126, closing casing; 127, padding water-permeable strip; 128, elastic soft casing strip; 129, water-permeable hole; 13, multi-layer filter box; 131, closing top cover; 132, docking cover; 133, sealing ring; 134, C-type limiting strip; 135, super-dense filter; 14, silicon carbide device; 15, limiting track; 151, motor two; 152, lifter; 153, support frame; 154, suction fan; 155, air duct; 156, adsorption horn. DETAILED DESCRIPTION

[0034] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further explained below in conjunction with specific implementation methods.

[0035] Example 1

[0036] like Figures 1 to 7 As shown, a molten silicon carbide device cleaning device and method according to an embodiment of the present invention include a water guide pipe 11 and a limiting sleeve 12 fixedly installed on the outer surface of the top of the water guide pipe 11, a multi-layer filter box 13 arranged on the back of the water guide pipe 11, a liquid guide pipe 112 detachably installed on the edge positions of both sides of the water guide pipe 11, a limiting track 15 fixedly installed on the edge positions of the front and rear sides of the limiting sleeve 12, a silicon carbide device 14 movably sleeved on the outer surface of the output end of the limiting track 15, a motor 121 fixedly installed on the top surface of the water guide pipe 11 and located at the edge position of one side of the limiting sleeve 12, and an outer surface of the limiting sleeve 12 and located at the middle position. A transmission rod 122 is sleeved, and a conveyor crawler movably sleeved on the outer surface of the transmission rod 122 is arranged on the output end of the motor 121. A triangular swing arm 124 is fixedly connected to the outer surface of the transmission rod 122 and located in the middle position. A closed shell 126 is movably sleeved on one end of the triangular swing arm 124. An elastic soft sleeve strip 128 movably sleeved on the outer wall of the silicon carbide device 14 is fixedly connected to the inner wall of the closed shell 126. Water permeable holes 129 are opened on the outer edge positions of the closed shell 126 and the elastic soft sleeve strip 128. A raised water permeable strip 127 movably overlapped on the outer wall of the silicon carbide device 14 is fixedly connected to the inner wall of the closed shell 126.

[0037] When the clamping device puts the silicon carbide device 14 into the closed shell 126, the padding permeable strip 127 on the inner surface of the closed shell 126 is used to leave a certain gap between the silicon carbide device 14 and the closed shell 126. At the same time, when the silicon carbide device 14 is squeezed into the closed shell 126, the edge position of the silicon carbide device 14 will squeeze the elastic soft sleeve strip 128 on the inner wall of the closed shell 126, and at the same time, the elastic force of the elastic soft sleeve strip 128 expands to confine the silicon carbide device 14 inside the closed shell 126, thereby tightening the silicon carbide device 14. The position of the silicon carbide device 14 is limited, and the gap inside the elastic soft sleeve strip 128 is used to effectively clamp the silicon carbide devices 14 of different sizes, so as to avoid the silicon carbide device 14 from flowing too fast during the placement of the silicon carbide device 14 in the device cleaning box. The too thin silicon carbide device 14 can easily change direction due to the change of water flow, thereby causing the silicon carbide device to collide with the bottom and inner wall of the cleaning box. After the closed sleeve shell 126 fixes the silicon carbide device 14, the motor 121 is used to drive the conveying crawler, thereby driving the limit sleeve shell 1 The transmission rod 122 on the outer surface of the transmission rod 122 rotates on the surface of the limiting casing 12. When the triangular swing arm 124 on the outer surface of the transmission rod 122 drives the closed casing 126 to move into the interior of the diversion water pipe 11, the diversion pipe 112 is used to inject water into one end of the diversion water pipe 11. The water flows through the water holes 129 on the surfaces of the closed casing 126 and the elastic soft casing strip 128 to clean up the debris on the surface of the silicon carbide device 14, so that the water source contacts the front and rear surfaces of the silicon carbide device 14, and the flowing water The water source will produce an outward pulling force on the debris, thereby cleaning the debris adhered to the surface of the silicon carbide device 14, avoiding the traditional debris cleaning method that requires using a foreign object to slide on the surface of the silicon carbide device 14 to make the debris float to the inside of the water source. The sliding of the foreign object will produce too much thrust on the debris on the surface of the silicon carbide device 14, causing the debris to slide on the surface of the silicon carbide device 14, thereby causing many extremely small fine scratches on the surface of the silicon carbide device 14, affecting the later use of the semiconductor, while greatly reducing the cleaning of foreign objects.

[0038] like Figures 1 to 5 and Figure 7As shown, a motor 2 151 is movably sleeved on the inner wall surface of the limiting track 15, a lifter 152 is fixedly connected to the output end of the motor 2 151, a support frame 153 is fixedly connected to the output end of the lifter 152, an adsorption horn 156 movably attached to the outer surface of the silicon carbide device 14 is detachably mounted on the outer surface of the support frame 153, a suction fan 154 is fixedly mounted on the top surface of the lifter 152, and an air guide pipe 155 arranged on the edge position of one side of the adsorption horn 156 is fixedly connected to the output end of the suction fan 154 A closing cover 111 is detachably mounted on both side surfaces of the diversion water pipe 11, and one end of the liquid diversion pipe 112 is fixedly connected to the surface of the closing cover 111, and the other end of the liquid diversion pipe 112 is movably sleeved on the inner wall of the sealing ring 133, and a snap-fit ​​lock buckle 125 is provided on one end of the triangular swing arm 124, and one end of the snap-fit ​​lock buckle 125 is detachably mounted on the back of the closing shell 126, and a support arm 123 is fixedly connected to the inner wall of the limiting shell 12, and the other end of the support arm 123 is movably sleeved on the outer surface of the transmission rod 122.

[0039] When the silicon carbide device 14 is completely cleaned, the triangular swing arm 124 pushes the silicon carbide device 14 to the highest point, and the motor 151 slides inside the limit track 15, so that the support frame 153 on one end of the lifter 152 pushes the adsorption horn 156, and the soft side of the adsorption horn 156 is attached to the surface of the silicon carbide device 14. At this time, the air in the air duct 155 and the adsorption horn 156 is absorbed by the suction fan 154. As the gas continues to shrink, the adsorption horn 156 will be compressed so that the adsorption horn 156 and the air duct 155 are in a semi-vacuum state, thereby firmly holding the silicon carbide device 14. The silicon carbide device 14 is adsorbed on the surface of the adsorption horn 156, so that the motor 2 151 slides on the surface of the limit track 15, and the silicon carbide device 14 is peeled off from the inside of the closed shell 126. The motor 2 151 rotates the lifter 152 to change the direction of the silicon carbide device 14, and the silicon carbide device 14 is placed in a specific storage box, thereby avoiding the situation that when the silicon carbide device 14 is taken out manually, it is impossible to ensure that the silicon carbide device 14 is extracted at a horizontal angle and direction. The inclination in position will cause the relatively thin silicon carbide device 14 to have uneven force on the edge, which will cause the silicon carbide device 14 to break, thereby affecting the integrity of the silicon carbide device 14.

[0040] like Figure 1 - Figure 2 , Figure 4 and Figure 6 to Figure 7As shown, a closed top cover 131 is movably mounted on the top surface of the multi-layer filter box 13, a docking cover 132 is movably mounted on the two side surfaces of the multi-layer filter box 13 and the closed top cover 131, a sealing ring 133 is provided on the outer surface of the docking cover 132 and in the middle position, a C-shaped limit strip 134 is fixedly connected to the inner wall surface of the multi-layer filter box 13, and an ultra-dense filter screen 135 is movably mounted on the inner wall surface of the C-shaped limit strip 134.

[0041] The cleaning liquid inside the diversion water pipe 11 is extracted in cooperation with the liquid guide pipe 112, and the cleaning liquid is diverted and infused into the multi-layer filter box 13. At the same time, the super-dense filter 135 on the inner wall of the C-shaped limit strip 134 is used to filter the flowing water source multiple times, and then the fine debris inside the cleaning liquid is filtered. Different super-dense filter meshes 135 can perform multiple and multi-layer filtering treatments on debris of different sizes. At the same time, the cleaning liquid is recycled for secondary use, which reduces the effect of waste and avoids using the flow of water source to clean the debris. The debris will remain in the cleaning liquid. With the recycling of the water source, the debris is pushed by the water source to contact the surface of the silicon carbide device 14, thereby causing excessive scratches on the surface of the silicon carbide device 14.

[0042] Example 2

[0043] like Figure 8 As shown, the present invention also provides a method for cleaning a dissolved silicon carbide device, comprising the following steps:

[0044] S1. Clamp the silicon carbide device using a clamp;

[0045] S2, clamping the clamped silicon carbide device into the interior of the cleaning device, and using the cleaning liquid to flow inside the conveying pipeline;

[0046] S3, using the fluidity of the cleaning liquid to flow evenly on the front and rear surfaces of the silicon carbide device, and using the flowing cleaning liquid to clean off fine debris on the surface of the silicon carbide device;

[0047] S4. Use the guide pipe to drain the cleaning liquid, and use the ultra-fine filter to filter the cleaning liquid to filter out the fine debris, and then recycle the cleaning liquid for secondary use;

[0048] S5. At the same time, the cleaned silicon carbide wafer is taken down by cooperating with the gripper, and the silicon carbide device is placed in a specific collecting device to reduce excessive contact between the silicon carbide device and the outside world.

[0049] Working principle: When the clamping device puts the silicon carbide device 14 into the closed shell 126, the padding permeable strip 127 on the inner surface of the closed shell 126 is used to leave a certain gap between the silicon carbide device 14 and the closed shell 126. At the same time, when the silicon carbide device 14 is squeezed into the closed shell 126, the edge position of the silicon carbide device 14 will squeeze the elastic soft sleeve strip 128 on the inner wall of the closed shell 126, and at the same time, the elastic expansion of the elastic soft sleeve strip 128 will limit the silicon carbide device 14 inside the closed shell 126, limit the position of the silicon carbide device 14, and at the same time, with the gap inside the elastic soft sleeve strip 128, the silicon carbide devices 14 of different sizes can be effectively clamped;

[0050] After the closed housing 126 fixes the silicon carbide device 14, the motor 121 is used to drive the conveyor crawler, thereby driving the transmission rod 122 on the outer surface of the limiting housing 12 to rotate on the surface of the limiting housing 12. When the triangular swing arm 124 on the outer surface of the transmission rod 122 drives the closed housing 126 to move into the diversion water pipe 11, the liquid diversion pipe 112 is used to inject water into one end of the diversion water pipe 11, and the water source flows through the water-permeable holes 129 on the surfaces of the closed housing 126 and the elastic soft sleeve strip 128 to clean up the debris on the surface of the silicon carbide device 14, so that the water source is used to contact the front and rear surfaces of the silicon carbide device 14, and the flowing water source will produce a pulling force to pull the debris outward, so as to clean up the debris adhering to the surface of the silicon carbide device 14.

[0051] When the silicon carbide device 14 is completely cleaned, the triangular swing arm 124 moves the silicon carbide device 14 to the highest point, and the motor 151 slides inside the limit track 15, so that the support frame 153 on one end of the lifter 152 pushes the adsorption horn 156, and the soft side of the adsorption horn 156 is attached to the surface of the silicon carbide device 14. At this time, the air in the air guide pipe 155 and the adsorption horn 156 is absorbed by the suction fan 154. As the gas is not After continuous shrinkage, the adsorption horn 156 will be compressed so that the adsorption horn 156 and the air guide tube 155 are in a semi-vacuum state, and then the silicon carbide device 14 is firmly adsorbed on the surface of the adsorption horn 156, so that the motor 151 slides on the surface of the limit track 15, and the silicon carbide device 14 is peeled off from the inside of the closed shell 126, and then the motor 151 rotates the lifter 152 to change the direction of the silicon carbide device 14, and the silicon carbide device 14 is placed in a specific storage box;

[0052] The cleaning liquid inside the diversion pipe 112 is extracted and diverted into the multi-layer filter box 13 in cooperation with the liquid guide pipe 112, and the cleaning liquid is diverted and injected into the multi-layer filter box 13, and at the same time, the super-dense filter mesh 135 on the inner wall of the C-shaped limit strip 134 is used to filter the flowing water source multiple times, and then the fine debris inside the cleaning liquid is filtered, and different super-dense filter meshes 135 can perform multiple and multi-layer filtering treatments on debris of different sizes, and at the same time, the cleaning liquid is recycled for secondary use, thereby reducing waste.

[0053] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments, and the above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, and these changes and improvements all fall within the scope of the present invention to be protected.

Claims

1. A molten silicon carbide device cleaning device, comprising a water guide pipe (11) and a limiting sleeve (12) fixedly mounted on the outer surface of the top of the water guide pipe (11), a multi-layer filter box (13) arranged on the back of the water guide pipe (11), a liquid guide pipe (112) detachably mounted on the edge positions of both sides of the water guide pipe (11), a limiting rail (15) fixedly mounted on the edge positions of both sides of the limiting sleeve (12), and a silicon carbide device (14) movably sleeved on the outer surface of the output end of the limiting rail (15), characterized in that: A motor 1 (121) is fixedly mounted on the top surface of the guide water pipe (11) and located at an edge position on one side of the limiting casing (12); a transmission rod (122) is movably sleeved on the outer surface of the limiting casing (12) and located at a middle position; a conveying crawler movably sleeved on the outer surface of the transmission rod (122) is provided on the output end of the motor 1 (121); a triangular swing arm (124) is fixedly connected to the outer surface of the transmission rod (122) and located at a middle position; the triangular swing arm A closed casing (126) is movably sleeved on one end of the (124); an elastic soft casing strip (128) movably sleeved on the outer wall of the silicon carbide device (14) is fixedly connected to the inner wall of the closed casing (126); water-permeable holes (129) are provided at the outer edge positions of the closed casing (126) and the elastic soft casing strip (128); and a raised water-permeable strip (127) movably overlapped on the outer wall of the silicon carbide device (14) is fixedly connected to the inner wall of the closed casing (126).

2. The device for cleaning dissolved silicon carbide devices according to claim 1, characterized in that: A closed top cover (131) is movably sleeved on the top surface of the multi-layer filter box (13), a docking cover (132) is movably sleeved on the two side surfaces of the multi-layer filter box (13) and the closed top cover (131), a sealing ring (133) is provided on the outer surface of the docking cover (132) and at a middle position, a C-shaped limit strip (134) is fixedly connected to the inner wall surface of the multi-layer filter box (13), and an ultra-dense filter screen (135) is movably sleeved on the inner wall surface of the C-shaped limit strip (134).

3. The device for cleaning dissolved silicon carbide devices according to claim 2, characterized in that: A second motor (151) is movably sleeved on the inner wall surface of the limiting track (15), a lifter (152) is fixedly connected to the output end of the second motor (151), a support frame (153) is fixedly connected to the output end of the lifter (152), and an adsorption horn (156) movably attached to the outer surface of the silicon carbide device (14) is detachably mounted on the outer surface of the support frame (153).

4. The molten silicon carbide device cleaning device according to claim 3, characterized in that: A suction fan (154) is fixedly mounted on the top surface of the lifter (152), and an air guide pipe (155) arranged on an edge position of one side of the adsorption speaker (156) is fixedly connected to the output end of the suction fan (154).

5. The molten silicon carbide device cleaning device according to claim 4, characterized in that: Closing covers (111) are detachably mounted on both side surfaces of the diversion water pipe (11), one end of the diversion water pipe (112) is fixedly connected to the surface of the closing cover (111), and the other end of the diversion water pipe (112) is movably sleeved on the inner wall surface of the sealing ring (133).

6. The device for cleaning dissolved silicon carbide devices according to claim 5, characterized in that: A snap-fit ​​lock buckle (125) is provided on one end of the triangular swing arm (124), and one end of the snap-fit ​​lock buckle (125) is detachably mounted on the back side of the closed casing (126).

7. The device for cleaning dissolved silicon carbide devices according to claim 6, characterized in that: A support arm (123) is fixedly connected to the inner wall surface of the limiting sleeve (12), and the other end of the support arm (123) is movably sleeved on the outer surface of the transmission rod (122).

8. A method for cleaning a dissolved silicon carbide device, applicable to the dissolved silicon carbide device cleaning device as claimed in any one of claims 1 to 7, characterized in that: The following steps are involved: S1. Clamp the silicon carbide device using a clamp; S2, clamping the clamped silicon carbide device into the interior of the cleaning device, and using the cleaning liquid to flow inside the conveying pipeline; S3, using the fluidity of the cleaning liquid to flow evenly on the front and rear surfaces of the silicon carbide device, and using the flowing cleaning liquid to clean the debris on the surface of the silicon carbide device; S4. Use a guide pipe to drain the cleaning liquid, use an ultra-fine filter to filter the cleaning liquid, remove debris, and then recycle the cleaning liquid; S5. At the same time, the cleaned silicon carbide wafer is taken down by cooperating with the gripper, and the silicon carbide device is placed in a specific collecting device to reduce excessive contact between the silicon carbide device and the outside world.

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