Automatic calibration mechanism and method for laser beam expanding light path

Abstract

The invention relates to the technical field of high-precision laser processing, in particular to a laser beam expanding light path automatic calibration mechanism and method.The laser beam expanding light path automatic calibration mechanism comprises a bottom plate, a base, a beam expanding lens, a light inlet end dimming jig, a light outlet end dimming jig, a four-degree-of-freedom adjusting mechanism, a CCD camera, a light inlet end beam expanding lens and an energy attenuation piece; the base is installed on the right portion of the top end of the bottom plate, the beam expanding lens is arranged on the upper left portion of the bottom plate, the light inlet end dimming jig and the light outlet end dimming jig are installed at the left end and the right end of the beam expanding lens respectively, the light inlet end dimming jig and the light outlet end dimming jig are each provided with a cross calibration line, and the four-freedom-degree adjusting mechanism is installed on the left portion of the top end of the bottom plate. The CCD camera is installed on the right portion of the top end of the base to recognize light beam spots, the beam expander at the camera inlet end is installed on the left portion of the top end of the base, and the energy attenuation piece is installed in the middle of the top end of the base. The device is fully automatic, is suitable for high-precision laser processing, has a self-centering function and is high in universality.

Description

Technical Field

[0001] The present invention relates to the technical field of high-precision laser processing, and in particular to a laser beam expansion optical path automatic calibration mechanism and method. Background Art

[0002] In the laser processing process, beam expanders are often used in the optical path design. In the laser system development, beam expanders can be used to calibrate the laser beam diameter at the output end of the laser system to match the required diameter at the input end, and at the same time reduce the divergence angle of the laser beam. In the optical path dimming process, the adjustment of the beam expander will directly affect the beam quality. Figure 1 This is the principle diagram of Galileo beam expansion. When the beam expander body is not concentric with the light beam, the light beam will be deformed, affecting the processing quality.

[0003] At present, dimming fixtures are usually used for light path dimming. The quality of the beam is observed by naked eyes by placing a light-blocking sheet at the light output end, which is time-consuming and labor-intensive, and has low precision. In high-precision laser processing technology, micron-level and below processing technology is often involved. It is difficult to meet the processing technology requirements by visually judging the beam quality, especially for round holes of 0.3 microns and below, which cannot be processed. In addition, the existing dimming fixtures do not have a self-centering function and can only be used in combination with corresponding models of beam expanders, and have poor versatility. Summary of the invention

[0004] The technical problem to be solved by the present invention is to overcome the deficiencies in the prior art and provide a laser beam expansion optical path automatic calibration mechanism and method which is simple in design, fully automated, suitable for high-precision laser processing, has a self-centering function, and is highly versatile.

[0005] The technical solution adopted by the present invention to solve the technical problem is: a laser beam expansion optical path automatic calibration mechanism, including a bottom plate, a base, a beam expander, a light input end dimming fixture and a light output end dimming fixture, the bottom plate is arranged horizontally, the base is installed at the top right part of the bottom plate, the beam expander is arranged at the upper left of the bottom plate, the light input end dimming fixture and the light output end dimming fixture are respectively installed at the left and right ends of the beam expander, the light input end dimming fixture and the light output end dimming fixture both have cross calibration lines, and also include:

[0006] A four-degree-of-freedom adjustment mechanism is installed on the top left of the bottom plate to drive the beam expander to move in four degrees of freedom;

[0007] A CCD camera is installed on the top right of the base to identify the beam spot;

[0008] The beam expander at the camera end is installed on the top left of the base to reduce the beam diameter;

[0009] and an energy attenuation sheet, mounted at the middle of the top end of the base, to reduce the energy of the beam.

[0010] Furthermore, the four-degree-of-freedom adjustment mechanism includes a lifting drive assembly, a guide rail, a lower adjustment plate, a steel ball, an upper adjustment plate, a clamp, a longitudinal movement drive assembly, a rotation drive assembly and a flipping drive assembly. The lifting drive assembly is vertically installed on the top left portion of the base plate, the guide rail is longitudinally installed on the driving end of the lifting drive assembly, the lower adjustment plate is arranged above the lifting drive assembly and is slidably connected to the guide rail, the steel ball is embedded in the top left portion of the lower adjustment plate, the upper adjustment plate is arranged directly above the lower adjustment plate and supported on the steel ball, the clamp is centrally installed on the top of the upper adjustment plate to clamp the collimator, the longitudinal movement drive assembly is distributed on the lifting drive assembly and the lower adjustment plate to drive the lower adjustment plate to move longitudinally, the rotation drive assembly is distributed on the lower adjustment plate and the upper adjustment plate to drive the upper adjustment plate to rotate, and the flipping drive assembly is installed on the upper adjustment plate to drive the upper adjustment plate to flip.

[0011] Furthermore, the clamp includes a lower clamping plate and an upper clamping plate, the lower clamping plate is centrally installed on the top of the upper adjustment plate, the upper clamping plate is arranged directly above the lower clamping plate and is connected to the lower clamping plate by bolts, and clamping grooves are symmetrically opened in the middle of the opposite ends of the lower clamping plate and the upper clamping plate.

[0012] Furthermore, the two side walls of the clamping groove form an "eight" shape or a "V" shape.

[0013] Furthermore, the longitudinal movement drive assembly includes a first motor, a first movable plate and a first spring. The first motor is longitudinally installed on the left side of the lifting drive assembly through a first fixed seat, and its output end is in conflict with the first movable plate. The first movable plate is installed on the left side of the lower adjustment plate. The first spring is arranged between the lifting drive assembly and the lower adjustment plate and is longitudinally arranged. One end of the first spring is connected to the lifting drive assembly, and the other end thereof is connected to the lower adjustment plate.

[0014] Furthermore, the rotation drive assembly includes a second motor, a second movable plate and a second spring. The second motor is horizontally mounted on the front side of the lower adjustment plate through a second fixed seat, and its output end is in contact with the second movable plate. The second movable plate is mounted on the front right end of the upper adjustment plate. The second spring is horizontally arranged. One end of the second spring is connected to the front right part of the upper adjustment plate, and the other end is connected to the front middle part of the lower adjustment plate.

[0015] Furthermore, the flipping drive assembly includes a third motor and a third spring. The third motor is vertically installed at the rear right end of the upper adjustment plate, and its output end is in contact with the top surface of the lower adjustment plate. The third spring is arranged between the lower adjustment plate and the upper adjustment plate and is arranged vertically. One end of the third spring is connected to the lower adjustment plate, and the other end is connected to the upper adjustment plate.

[0016] A laser beam expansion optical path automatic calibration method based on the above laser beam expansion optical path automatic calibration mechanism, the steps are as follows:

[0017] The four-degree-of-freedom adjustment mechanism drives the beam expander to move in four degrees of freedom until the intersection of the cross calibration lines of the dimming fixture at the light input end, the intersection of the cross calibration lines of the dimming fixture at the light output end, and the center of the light beam spot recognized by the CCD camera coincide with each other.

[0018] Furthermore, the specific steps are as follows:

[0019] S1. The flip drive assembly drives the upper adjustment plate to flip so that the intersection of the cross calibration line of the dimming fixture at the light input end coincides with the intersection of the cross calibration line of the dimming fixture at the light output end in the vertical direction;

[0020] S2. The rotation drive assembly drives the upper adjustment plate to rotate so that the intersection of the cross calibration line of the dimming fixture at the light input end coincides with the intersection of the cross calibration line of the dimming fixture at the light output end in the front-to-back direction;

[0021] S3. The lifting drive assembly drives the lower adjustment plate to lift, so that the center point of the minimum bounding box of the intersection of the cross calibration line of the dimming fixture at the light input end and the intersection of the cross calibration line of the dimming fixture at the light output end moves in the up and down direction to the center of the light beam spot;

[0022] S4. The longitudinal drive assembly drives the lower adjustment plate to move longitudinally, so that the center point of the minimum bounding box of the intersection of the cross calibration line of the dimming fixture at the light input end and the intersection of the cross calibration line of the dimming fixture at the light output end moves in the front-to-back direction to the center of the light beam spot;

[0023] S5. Iterate steps S1-S4 until the diagonal length of the minimum enclosing box of the intersection of the cross calibration lines of the dimming fixture at the light input end and the intersection of the cross calibration lines of the dimming fixture at the light output end is less than the preset allowable error of beam collimation, and the distance from the center point of the minimum enclosing box of the intersection of the cross calibration lines of the dimming fixture at the light input end and the intersection of the cross calibration lines of the dimming fixture at the light output end to the center of the beam spot is less than the preset allowable error of beam concentricity.

[0024] The beneficial effects of the present invention are:

[0025] (1) The present invention drives the four-degree-of-freedom movement of the beam expander through a four-degree-of-freedom adjustment mechanism, and adjusts the posture of the beam expander until the intersection of the cross calibration lines of the dimming fixture at the light input end, the intersection of the cross calibration lines of the dimming fixture at the light output end, and the center of the light beam spot recognized by the CCD camera coincide with each other, thereby automatically completing the light path dimming. The present invention has a simple design, high precision, and high stability, and is suitable for high-precision laser processing.

[0026] (2) The present invention reduces the beam diameter and the beam energy by setting a beam expander and an energy attenuation plate at the camera entrance end, thereby ensuring that the beam emitted by the laser can directly enter the CCD camera after passing through the beam expander and preventing the CCD camera from being damaged by the beam.

[0027] (3) The present invention automatically realizes four-degree-of-freedom adjustment of the beam expander through the mutual cooperation of the lifting drive assembly, the longitudinal movement drive assembly, the rotation drive assembly and the flipping drive assembly. It has strong practicality and versatility, and the optical path dimming accuracy can be guaranteed.

[0028] (4) The present invention drives several groups of clamping components to expand or contract synchronously through a synchronization component, so that the cover body can be installed and removed at the end of the collimator. It has a self-centering function and can be applied to collimators of different models. It has strong versatility and reduces costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0030] Figure 1 This is the schematic diagram of the Galilean beam expansion;

[0031] Figure 2 is a schematic structural diagram of Embodiment 1 of the present invention;

[0032] Figure 3 It is a schematic diagram of the CCD camera during light adjustment in the present invention;

[0033] Figure 4 is a schematic diagram of a four-degree-of-freedom adjustment mechanism in the present invention;

[0034] Figure 5 is a schematic diagram of the clamp in the present invention;

[0035] Figure 6 is a schematic diagram of a rotary drive assembly in the present invention;

[0036] Figure 7 It is a schematic diagram of the steel ball in the present invention;

[0037] Figure 8 is a schematic diagram of the longitudinal drive assembly in the present invention;

[0038] Fig. 9 is a schematic structural diagram of Embodiment 2 of the present invention;

[0039] Fig.10 is a schematic diagram of a dimming fixture at the light input end in Example 2 of the present invention;

[0040] Fig.11 is a cross-sectional view of the dimming fixture at the light input end in Example 2 of the present invention;

[0041] Fig.12It is a schematic diagram of the synchronization component in Example 2 of the present invention.

[0042] In the figure: 100, bottom plate; 200, base; 300, beam expander; 400, dimming fixture at light input end; 410, cover; 411, through hole; 412, limit hole; 413, annular groove; 420, clamping assembly; 421, clamping arm; 422, clamping column; 430, synchronization assembly; 431, inner ring; 4311, radial groove; 4312, annular convex ridge; 432, movable handle; 433, tension spring; 434, limit bolt; 435, slider; 436, fixed handle; 500, dimming fixture at light output end; 600, four-degree-of-freedom adjustment mechanism; 610, Lifting drive assembly; 620, guide rail; 630, lower adjustment plate; 640, steel ball; 650, upper adjustment plate; 660, clamp; 661, lower clamp; 662, upper clamp; 670, longitudinal drive assembly; 671, first motor; 672, first movable plate; 673, first spring; 680, rotation drive assembly; 681, second motor; 682, second movable plate; 683, second spring; 690, flipping drive assembly; 691, third motor; 692, third spring; 700, CCD camera; 800, beam expander at camera entrance end; 900, energy attenuation plate. DETAILED DESCRIPTION

[0043] The present invention will now be further described in conjunction with the accompanying drawings and preferred embodiments. These drawings are simplified schematic diagrams, which only illustrate the basic structure of the present invention in a schematic manner, and therefore only show the components related to the present invention.

[0044] Example 1

[0045] like Figure 2 and Figure 3As shown, a laser beam expansion optical path automatic calibration mechanism includes a base plate 100, a base 200, a beam expander 300, a light input end dimming fixture 400, a light output end dimming fixture 500, a four-degree-of-freedom adjustment mechanism 600, a CCD camera 700, a beam expander 800 at the camera input end, and an energy attenuation sheet 900. The base plate 100 is arranged horizontally, the base 200 is installed at the top right part of the base plate 100, the beam expander 300 is arranged at the upper left of the base plate 100, and the light input end dimming fixture 400 and the light output end dimming fixture 500 are installed respectively. At the left and right ends of the beam expander 300, the light input end dimming fixture 400 and the light output end dimming fixture 500 both have cross calibration lines, the four-degree-of-freedom adjustment mechanism 600 is installed at the top left of the bottom plate 100 to drive the beam expander 300 to move in four degrees of freedom, the CCD camera 700 is installed at the top right of the base 200 to identify the light beam spot, the beam expander 800 at the camera input end is installed at the top left of the base 200 to reduce the beam diameter, and the energy attenuation plate 900 is installed at the top middle of the base 200 to reduce the beam energy. The beam expander 300 is driven to move in four degrees of freedom by the four-degree-of-freedom adjustment mechanism 600, and the posture of the beam expander 300 is adjusted until the intersection point X1 of the cross calibration line of the light input end dimming fixture 400, the intersection point X2 of the cross calibration line of the light output end dimming fixture 500 and the center O of the light beam spot identified by the CCD camera 700 coincide, and the light path dimming is automatically completed. The design is simple, high-precision, high-stability, and suitable for high-precision laser processing. The arrangement of the beam expander 800 and the energy attenuator 900 at the camera entrance reduces the beam diameter and the beam energy, ensuring that the beam emitted by the laser can directly enter the CCD camera 700 after passing through the beam expander 300, and preventing the CCD camera 700 from being damaged by the beam. Specifically, the base 200 is mounted on the bottom plate 100 by bolts, and the base 200 is easy to remove after the light path dimming is completed; the cross calibration line of the light input end dimming fixture 400 and the cross calibration line of the light output end dimming fixture 500 intersect at 45 degrees.

[0046] like Figure 3 As shown, the large circle is the light spot after imaging, with O as its center, the cross calibration lines of the dimming fixture 400 at the light input end are represented by thick lines, and their intersection is X1, the cross calibration lines of the dimming fixture 500 at the light output end are represented by thin lines, and their intersection is X2, and the minimum bounding box of the intersection X1 and the intersection X2 is represented by a dotted frame.

[0047] like Figure 2 , Figure 4 and Figure 5As shown, the four-degree-of-freedom adjustment mechanism 600 includes a lifting drive assembly 610, a guide rail 620, a lower adjustment plate 630, a steel ball 640, an upper adjustment plate 650, a clamp 660, a longitudinal drive assembly 670, a rotation drive assembly 680 and a flip drive assembly 690. The lifting drive assembly 610 is vertically installed on the top left part of the base plate 100, the guide rail 620 is longitudinally installed on the driving end of the lifting drive assembly 610, the lower adjustment plate 630 is arranged above the lifting drive assembly 610 and is slidably connected to the guide rail 620, and the steel ball 640 is embedded in the lower adjustment plate 630. At the top left part, the upper adjustment plate 650 is arranged just above the lower adjustment plate 630 and supported on the steel ball 640, the clamp 660 is centrally installed at the top of the upper adjustment plate 650 to clamp the beam expander 300, the longitudinal drive assembly 670 is distributed on the lifting drive assembly 610 and the lower adjustment plate 630 to drive the longitudinal movement of the lower adjustment plate 630, the rotation drive assembly 680 is distributed on the lower adjustment plate 630 and the upper adjustment plate 650 to drive the upper adjustment plate 650 to rotate, and the flip drive assembly 690 is installed on the upper adjustment plate 650 to drive the upper adjustment plate 650 to flip. Through the mutual cooperation of the lifting drive assembly 610, the longitudinal drive assembly 670, the rotation drive assembly 680 and the flip drive assembly 690, the four-degree-of-freedom adjustment of the beam expander 300 is automatically realized, the practicability and versatility are strong, and the optical path dimming accuracy can be guaranteed. During the light path dimming process, the lifting drive assembly 610 drives the lower adjustment plate 630 to move up and down, so that the intersection X1 and the intersection X2 move up and down at the same time. Specifically, the lifting drive assembly 610 is a prior art, and a lift can be used; the guide rail 620 uses a cross roller guide rail; there are two steel balls 640, the top of the rear steel ball 640 is embedded in the upper adjustment plate 650, and the top of the front steel ball 640 is in conflict with the upper adjustment plate 650.

[0048] like Figure 4 and Figure 5 As shown, the clamp 660 includes a lower clamping plate 661 and an upper clamping plate 662. The lower clamping plate 661 is centrally mounted on the top of the upper adjustment plate 650. The upper clamping plate 662 is arranged directly above the lower clamping plate 661 and connected to the lower clamping plate 661 by bolts. Clamping grooves are symmetrically provided at the middle of the opposite ends of the lower clamping plate 661 and the upper clamping plate 662. Specifically, the two side walls of the clamping groove form an "eight" shape or a "V" shape to accommodate different models of beam expanders 300.

[0049] like Figure 4 , Figure 5 and Figure 8As shown, the longitudinal drive assembly 670 includes a first motor 671, a first movable plate 672 and a first spring 673. The first motor 671 is longitudinally mounted on the left side of the lifting drive assembly 610 through a first fixed seat, and its output end contacts the first movable plate 672. The first movable plate 672 is mounted on the left side of the lower adjustment plate 630. The first spring 673 is arranged between the lifting drive assembly 610 and the lower adjustment plate 630, and is arranged longitudinally. One end of the first spring 673 is connected to the lifting drive assembly 610, and the other end is connected to the lower adjustment plate 630. During the light path dimming process, the first motor 671 drives the lower adjustment plate 630 to move longitudinally along the guide rail 620, so that the intersection X1 and the intersection X2 move forward and backward at the same time. Specifically, the first movable plate 672 is in an "L" shape.

[0050] like Figure 4 and Figure 6 As shown, the rotation drive assembly 680 includes a second motor 681, a second movable plate 682 and a second spring 683. The second motor 681 is horizontally mounted on the front side of the lower adjustment plate 630 through a second fixing seat, and its output end contacts the second movable plate 682. The second movable plate 682 is mounted on the front right end of the upper adjustment plate 650. The second spring 683 is horizontally arranged, and one end of the second spring 683 is connected to the front right part of the upper adjustment plate 650, and the other end is connected to the front middle part of the lower adjustment plate 630. During the light path dimming process, the second motor 681 drives the upper adjustment plate 650 to rotate, so that the intersection X1 and the intersection X2 are close to or away from each other in the front and rear directions.

[0051] like Figure 4-Figure 7 As shown, the flip driving assembly 690 includes a third motor 691 and a third spring 692. The third motor 691 is vertically mounted at the rear right end of the upper adjustment plate 650, and its output end contacts the top surface of the lower adjustment plate 630. The third spring 692 is disposed between the lower adjustment plate 630 and the upper adjustment plate 650 and is vertically disposed. One end of the third spring 692 is connected to the lower adjustment plate 630, and the other end is connected to the upper adjustment plate 650. The movement of the output end of the third motor 691 drives the upper adjustment plate 650 to flip, so that the intersection X1 and the intersection X2 are moved closer to or farther from each other in the up-down direction.

[0052] It should be noted that, since the motor and the movable plate or the adjustment plate are in non-fixed contact, the spring provides a motor reaction force, so that the movable plate or the adjustment plate maintains close contact with the motor output end, eliminates the gap, and makes the accuracy of the motor straightness and the like not affect the accuracy of the mechanism. Of course, if the motors are all high-precision motors, the motor output end and the movable plate or the adjustment plate can be hinged, and the spring component can be omitted.

[0053] Example 2

[0054] In order to make the dimming fixture have a self-centering function and improve versatility, this embodiment improves the dimming fixture on the basis of embodiment 1.

[0055] like Fig. 9 and Fig.10 As shown, both the light input end dimming fixture 400 and the light output end dimming fixture 500 include a cover body 410, a clamping assembly 420 and a synchronization assembly 430. The middle part of the cover body 410 has a cross calibration line. The clamping assemblies 420 are divided into several groups and are evenly arranged along the circumference of the outer edge of the cover body 410. The clamping assemblies 420 are rotatably mounted on one side of the outer edge of the cover body 410. The synchronization assembly 430 is installed in the cover body 410 to drive several groups of clamping assemblies 420 to expand or contract synchronously. By driving several groups of clamping assemblies 420 to expand or contract synchronously through the synchronization assembly 430, the cover body 410 is installed and removed at the end of the collimator 300, has a self-centering function, can be applied to collimators 300 of different models, has strong versatility, and reduces costs. Specifically, the clamping assemblies 420 are divided into three groups, but are not limited to three groups.

[0056] like Figure 10-12 As shown, the synchronization assembly 430 includes an inner ring 431, a movable handle 432, a tension spring 433, a limit bolt 434, a slider 435 and a fixed handle 436. The inner ring 431 is rotatably mounted in the cover body 410. The outer ring of the cover body 410 is provided with a through hole 411. One end of the movable handle 432 passes through the through hole 411 and is connected to the inner ring 431. The movable handle 432 is slidably matched with the through hole 411. The tension spring 433 is arranged in the through hole 411. One end of the tension spring 433 is connected to the side of the through hole 411. The cover body 410 is connected to the wall, and the other end is connected to the inner ring 431. A limiting hole 412 is provided on one side of the outer edge of the cover body 410. One end of the limiting bolt 434 passes through the limiting hole 412 and is connected to the movable handle 432. The limiting bolt 434 is slidably matched with the limiting hole 412. The slider 435 is composed of a plurality of pieces, which are evenly arranged along the circumference of the inner ring 431. The slider 435 is slidably installed in the radial groove 4311 provided on one side of the inner ring 431. The fixed handle 436 is installed on the outer ring of the cover body 410 and is arranged beside the through hole 411. The clamping assembly 420 includes a clamping arm 421 and a clamping column 422. The first end of the clamping arm 421 is rotatably connected to one side of the outer edge of the cover body 410, and the second end thereof is hinged to the slider 435. The clamping column 422 is installed on the third end of the clamping arm 421. Specifically, an annular groove 413 is provided on one side of the cover body 410, and an annular ridge 4312 is provided on one side of the inner ring 431. The annular ridge 4312 is embedded in the annular groove 413 and slidably cooperates with the annular groove 413 to play a guiding and limiting role; the clamping arm 421 is arc-shaped.

[0057] When installing the dimming fixture, the movable handle 432 is pulled toward the fixed handle 436, and the inner ring 431 rotates clockwise relative to the cover body 410, thereby driving the clamping arm 421 to rotate around its first end, and the three clamping arms 421 expand synchronously, and then the cover body 410 is placed on the end of the collimator 300, and the movable handle 432 is released. The tension spring 433 pulls the inner ring 431 to rotate counterclockwise relative to the cover body 410, and thereby drives the clamping arm 421 to rotate in the opposite direction around its first end, and the three clamping arms 421 shrink synchronously, and the three clamping columns 422 contact the end of the collimator 300 to achieve installation.

[0058] Example 3

[0059] A method for automatically calibrating a laser beam expansion optical path based on the laser beam expansion optical path automatic calibration mechanism described in Example 1, comprising the following steps:

[0060] The four-degree-of-freedom adjustment mechanism 600 drives the beam expander 300 to move in four degrees of freedom until the intersection point X1 of the cross calibration line of the light input end dimming fixture 400, the intersection point X2 of the cross calibration line of the light output end dimming fixture 500 and the center O of the light beam spot recognized by the CCD camera 700 coincide.

[0061] The specific steps of the automatic calibration method of the laser beam expansion optical path are as follows:

[0062] S1. The flip drive assembly 690 drives the upper adjustment plate 650 to flip so that the intersection point X1 of the cross calibration line of the light input end dimming fixture 400 and the intersection point X2 of the cross calibration line of the light output end dimming fixture 500 coincide in the up and down direction;

[0063] S2. The rotation drive assembly 680 drives the upper adjustment plate 650 to rotate so that the intersection point X1 of the cross calibration line of the light input end dimming fixture 400 coincides with the intersection point X2 of the cross calibration line of the light output end dimming fixture 500 in the front-to-back direction;

[0064] S3. The lifting drive assembly 610 drives the lower adjustment plate 630 to lift and lower, so that the center point of the minimum bounding box of the intersection point X1 of the cross calibration line of the light input end dimming fixture 400 and the intersection point X2 of the cross calibration line of the light output end dimming fixture 500 moves in the up and down direction to the center of the light beam spot O;

[0065] S4. The longitudinal drive assembly 670 drives the lower adjustment plate 630 to move longitudinally, so that the center point of the minimum bounding box of the intersection point X1 of the cross calibration line of the light input end dimming fixture 400 and the intersection point X2 of the cross calibration line of the light output end dimming fixture 500 moves in the front-to-back direction to the center of the light beam spot O;

[0066] S5. Iterate steps S1-S4 until the diagonal length of the minimum enclosing box between the intersection point X1 of the cross calibration lines of the dimming fixture 400 at the light input end and the intersection point X2 of the cross calibration lines of the dimming fixture 500 at the light output end is less than the preset allowable error of beam collimation, and the distance from the center point of the minimum enclosing box between the intersection point X1 of the cross calibration lines of the dimming fixture 400 at the light input end and the intersection point X2 of the cross calibration lines of the dimming fixture 500 at the light output end to the center O of the beam spot is less than the preset allowable error of beam concentricity.

[0067] The above embodiments are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with this technology to understand the content of the present invention and implement it. They cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the protection scope of the present invention.

Claims

1. A laser beam expansion optical path automatic calibration mechanism, comprising a base plate (100), a base (200), a beam expander (300), a light input end dimming fixture (400) and a light output end dimming fixture (500), wherein the base plate (100) is arranged horizontally, the base (200) is installed at the top right part of the base plate (100), the beam expander (300) is arranged at the upper left of the base plate (100), the light input end dimming fixture (400) and the light output end dimming fixture (500) are respectively installed at the left and right ends of the beam expander (300), and the light input end dimming fixture (400) and the light output end dimming fixture (500) both have cross calibration lines, characterized in that: Also includes: A four-degree-of-freedom adjustment mechanism (600) is installed on the top left portion of the base plate (100) to drive the beam expander (300) to move in four degrees of freedom; A CCD camera (700) is mounted on the top right portion of the base (200) to identify the light beam spot; An incident beam expander (800) is mounted on the top left portion of the base (200) to reduce the beam diameter; and an energy attenuation sheet (900) mounted at the middle of the top end of the base (200) to reduce the energy of the light beam.

2. The laser beam expansion optical path automatic calibration mechanism according to claim 1, characterized in that: The four-degree-of-freedom adjustment mechanism (600) comprises a lifting drive assembly (610), a guide rail (620), a lower adjustment plate (630), a steel ball (640), an upper adjustment plate (650), a clamp (660), a longitudinal drive assembly (670), a rotation drive assembly (680) and a flip drive assembly (690), wherein the lifting drive assembly (610) is vertically mounted on the top left portion of the bottom plate (100), the guide rail (620) is longitudinally mounted on the driving end of the lifting drive assembly (610), the lower adjustment plate (630) is arranged above the lifting drive assembly (610) and is slidably connected to the guide rail (620), and the steel ball (640) is embedded in the lower adjustment plate (630). ), the upper adjustment plate (650) is arranged directly above the lower adjustment plate (630) and supported on the steel ball (640), the clamp (660) is centrally installed on the top of the upper adjustment plate (650) to clamp the beam expander (300), the longitudinal movement drive component (670) is distributed on the lifting drive component (610) and the lower adjustment plate (630) to drive the lower adjustment plate (630) to move longitudinally, the rotation drive component (680) is distributed on the lower adjustment plate (630) and the upper adjustment plate (650) to drive the upper adjustment plate (650) to rotate, and the flip drive component (690) is installed on the upper adjustment plate (650) to drive the upper adjustment plate (650) to flip.

3. The laser beam expansion optical path automatic calibration mechanism according to claim 2, characterized in that: The clamp (660) includes a lower clamping plate (661) and an upper clamping plate (662), wherein the lower clamping plate (661) is centrally installed on the top of the upper adjustment plate (650), and the upper clamping plate (662) is arranged directly above the lower clamping plate (661) and connected to the lower clamping plate (661) by bolts, and clamping grooves are symmetrically opened in the middle of the opposite ends of the lower clamping plate (661) and the upper clamping plate (662).

4. The laser beam expansion optical path automatic calibration mechanism according to claim 3, characterized in that: The two side walls of the clamping groove form an "eight" shape or a "V" shape.

5. The laser beam expansion optical path automatic calibration mechanism according to claim 2, characterized in that: The longitudinal movement driving assembly (670) includes a first motor (671), a first movable plate (672) and a first spring (673). The first motor (671) is longitudinally installed on the left side of the lifting driving assembly (610) through a first fixing seat, and its output end is in contact with the first movable plate (672). The first movable plate (672) is installed on the left side of the lower adjustment plate (630). The first spring (673) is arranged between the lifting driving assembly (610) and the lower adjustment plate (630) and is longitudinally arranged. One end of the first spring (673) is connected to the lifting driving assembly (610), and the other end is connected to the lower adjustment plate (630).

6. The laser beam expansion optical path automatic calibration mechanism according to claim 2, characterized in that: The rotation drive assembly (680) includes a second motor (681), a second movable plate (682) and a second spring (683). The second motor (681) is horizontally mounted on the front side of the lower adjustment plate (630) through a second fixing seat, and its output end is in contact with the second movable plate (682). The second movable plate (682) is mounted on the front right end of the upper adjustment plate (650). The second spring (683) is horizontally arranged. One end of the second spring (683) is connected to the front right part of the upper adjustment plate (650), and the other end is connected to the front middle part of the lower adjustment plate (630).

7. The laser beam expansion optical path automatic calibration mechanism according to claim 2, characterized in that: The flip driving assembly (690) comprises a third motor (691) and a third spring (692). The third motor (691) is vertically mounted at the rear right end of the upper adjusting plate (650), and its output end contacts the top surface of the lower adjusting plate (630). The third spring (692) is arranged between the lower adjusting plate (630) and the upper adjusting plate (650), and is arranged vertically. One end of the third spring (692) is connected to the lower adjusting plate (630), and the other end is connected to the upper adjusting plate (650).

8. A method for automatically calibrating a laser beam expansion optical path based on the laser beam expansion optical path automatic calibration mechanism according to any one of claims 1 to 7, characterized in that: Here are the steps: The four-degree-of-freedom adjustment mechanism (600) drives the beam expander (300) to move in four degrees of freedom until the intersection of the cross calibration lines of the light input end dimming fixture (400), the intersection of the cross calibration lines of the light output end dimming fixture (500) and the center of the light beam spot identified by the CCD camera (700) coincide with each other.

9. The method for automatic calibration of laser beam expansion optical path according to claim 8, characterized in that: The specific steps are as follows: S1. The flip driving assembly (690) drives the upper adjustment plate (650) to flip, so that the intersection of the cross calibration line of the light input end dimming fixture (400) and the intersection of the cross calibration line of the light output end dimming fixture (500) coincide with each other in the vertical direction; S2. The rotation drive assembly (680) drives the upper adjustment plate (650) to rotate so that the intersection of the cross calibration line of the light input end dimming fixture (400) and the intersection of the cross calibration line of the light output end dimming fixture (500) coincide with each other in the front-to-back direction; S3. The lifting drive assembly (610) drives the lower adjustment plate (630) to lift and lower, so that the center point of the minimum bounding box of the intersection of the cross calibration line of the light input end dimming fixture (400) and the intersection of the cross calibration line of the light output end dimming fixture (500) moves in the up and down direction to the center of the light beam spot; S4. The longitudinal drive assembly (670) drives the lower adjustment plate (630) to move longitudinally, so that the center point of the minimum bounding box of the intersection of the cross calibration line of the light input end dimming fixture (400) and the intersection of the cross calibration line of the light output end dimming fixture (500) moves in the front-to-back direction to the center of the light beam spot; S5. Iterate steps S1-S4 until the diagonal length of the minimum enclosing box between the intersection of the cross calibration lines of the dimming fixture (400) at the light input end and the intersection of the cross calibration lines of the dimming fixture (500) at the light output end is less than the preset allowable error of beam alignment, and the distance from the center point of the minimum enclosing box between the intersection of the cross calibration lines of the dimming fixture (400) at the light input end and the intersection of the cross calibration lines of the dimming fixture (500) at the light output end to the center of the beam spot is less than the preset allowable error of beam concentricity.

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