Polishing equipment for semiconductor quartz component

Abstract

The invention relates to polishing equipment for a semiconductor quartz component, which is applied to the field of semiconductors and comprises a polishing machine and a tube stopping and checking mechanism, the tube stopping and checking mechanism can detect whether a furnace tube moves forwards or not, and when the furnace tube is stuck and stops moving forwards, a ringing reminding module can make a sound to remind related workers, so that the working efficiency is improved. According to the technical scheme of the utility model, a worker can find the phenomenon that the furnace tube is stuck in time, so that the worker can carry out corresponding treatment in time, thereby not only greatly reducing the influence of the stuck furnace tube on the processing efficiency, but also preventing the surface of the furnace tube from being damaged due to the stuck furnace tube. The concave-convex detection assembly can detect whether the surface of the furnace tube has defects such as protrusions and pits, the situation that the furnace tube is clamped due to the fact that the protrusions or the pits exist on the surface of the furnace tube can be prevented, workers do not need to independently conduct such detection on the quartz furnace tube, and the machining efficiency can be further improved.

Description

Technical Field

[0001] The invention relates to a polishing device, in particular to a polishing device for semiconductor quartz parts applied in the semiconductor field. Background Art

[0002] Semiconductors refer to materials whose electrical conductivity at room temperature is between that of conductors and insulators. Semiconductors are used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high-power power conversion and other fields. For example, diodes are devices made of semiconductors.

[0003] In the semiconductor industry, many quartz parts made of quartz materials are needed, and quartz furnace tubes are one of them. During the production and processing of quartz furnace tubes, a polishing machine is needed to polish the outer surface of the furnace tube. During polishing, under the combined action of the polishing wheel, guide wheel, etc. in the polishing machine, the furnace tube will rotate, move forward, and be polished.

[0004] When using a polishing machine to polish a quartz furnace tube, the furnace tube is prone to get stuck and cannot move forward smoothly. If it is not discovered and handled in time, it will not only affect the processing efficiency, but also easily cause damage to the furnace tube surface. Therefore, we propose a polishing device for semiconductor quartz parts. Summary of the invention

[0005] In view of the above-mentioned prior art, the technical problem to be solved by the present invention is that when the furnace tube is stuck, it cannot be discovered in time, which not only affects the processing efficiency but also easily causes damage to the surface of the furnace tube.

[0006] In order to solve the above problems, the present invention provides a polishing device for semiconductor quartz parts, including a polishing machine and a tube stop detection mechanism, the tube stop detection mechanism includes a supporting tube body, a supporting box body is penetrated on the top outer wall of the supporting tube body, a detection stop roller is penetrated on the bottom outer wall of the supporting box body, the detection stop roller is rotatably connected to the inner wall of the supporting box body through a shaft and a bearing, and the detection stop roller is movably connected to the bottom outer wall of the supporting box body, a sealing cylinder is penetrated on the side wall of the supporting box body, a color sensor is fixedly installed in the sealing cylinder, and the sealing cylinder is close to one end of the detection stop roller A transparent sheet is provided through the outer wall, and a plurality of continuous colored marks evenly distributed along a ring are provided on the outer wall of the inspection and stop roller close to the sealing tube side. The colored marks are painted with paint, and the colors of adjacent colored marks are different. One of the colored marks is on the same horizontal line as the color sensor and the transparent sheet. The pipe stop inspection and awakening mechanism also includes an inspection and awakening intelligent controller fixedly mounted on the outer wall of the supporting pipe body. A pipe stop analysis module and a bell reminder module are provided in the inspection and awakening intelligent controller. The color sensor is electrically connected to the pipe stop analysis module, and the pipe stop analysis module is electrically connected to the bell reminder module.

[0007] In the above-mentioned polishing equipment for semiconductor quartz parts, the tube stop detection mechanism can detect whether the furnace tube is moving forward. When the furnace tube is stuck and stops moving forward, the bell reminder module will make a sound to remind relevant staff, so that the staff can discover it in time and take corresponding measures.

[0008] As a further improvement of the present application, a stop-polishing feedback module is also provided in the inspection and awakening intelligent controller, the tube stop analysis module is electrically connected to the stop-polishing feedback module, and the stop-polishing feedback module is electrically connected to the control system of the polishing machine, so as to further prevent damage to the surface of the furnace tube due to the jamming of the furnace tube.

[0009] As a further improvement of the present application, a connecting screw is fixedly installed on the inner wall of the bottom end of the support tube body, a support tube seat is arranged at the top of the connecting screw, and an arc-shaped section is arranged at the top of the support tube seat. The support tube seat can play a role in supporting the furnace tube to ensure that the furnace tube can be against the inspection and stop roller.

[0010] As a further improvement of the present application, a threaded groove is provided at the bottom end of the support tube seat, and the support tube seat is threadedly connected to the connecting screw through the threaded groove. The support tube seat is provided with a plurality of different specifications, and the difference between the support tube seats of different specifications lies in the different thicknesses and the different radii of the arc-shaped cross-sections, so that the tube stop detection mechanism can be adaptively adjusted according to the specifications of the aluminum tube, and can be suitable for quartz furnace tubes of various specifications.

[0011] As a further improvement of the present application, a base box is provided below the support tube body, an adjusting cylinder is fixedly installed in the base box, an output end of the adjusting cylinder is fixedly connected to a lifting support rod, the lifting support rod passes through the top outer wall of the base box and extends to be fixedly connected to the support tube body, and the lifting support rod is slidably connected to the outer wall of the base box, so that the support tube body can be moved up and down for adjustment, thereby improving the applicability of the tube stop and wake-up mechanism.

[0012] As another improvement of the present application, a concave-convex analysis module is also provided in the detection and awakening intelligent controller, and the tube stop detection and awakening mechanism also includes a concave-convex detection and awakening component, which includes a support frame fixedly installed on the top of the support tube body and a distance sensor fixedly installed on the top of the support box body, a sliding rod is arranged through the middle of the support frame, a movable sleeve is provided on the outer wall of the sliding rod, a connecting screw sleeve is fixedly installed on the top of the support frame, a fixed rod sleeve is provided on the inner side of the connecting screw sleeve, and a reminder light is fixedly installed on the outer wall of the support frame.

[0013] As another improved supplement of the present application, the support frame is configured to be U-shaped and the support frame cover is arranged on the outside of the support box, the sliding rod is slidably connected to the support frame and the bottom end of the sliding rod is fixedly connected to the support box, the two ends of the spring are respectively fixedly connected to the support frame and the support box, the fixed rod sleeve is threadedly connected to the connecting screw sleeve, the fixed rod sleeve is arranged on the top end of the sliding rod, and the fixed rod sleeve is threadedly connected to the sliding rod, and the support box is slidably connected to the support tube body.

[0014] As another improved supplement of the present application, the distance sensor is electrically connected to the concave-convex analysis module, the concave-convex analysis module is electrically connected to the reminder light, and the concave-convex analysis module is also electrically connected to the stop-polishing feedback module, so that the concave-convex detection component can detect whether there are defects such as protrusions and pits on the surface of the furnace tube.

[0015] In summary, the present application sets up a tube stop detection mechanism, so that the tube stop detection mechanism can detect whether the furnace tube is moving forward. When the furnace tube is stuck and stops moving forward, the bell reminder module will make a sound to remind the relevant staff, so that the staff can find the furnace tube is stuck in time, so that the staff can take corresponding measures in time, which can not only greatly reduce the influence of the furnace tube stuck on the processing efficiency, but also prevent the surface of the furnace tube from being damaged due to the furnace tube stuck; through the setting of the concave-convex detection component, the concave-convex detection component can detect whether there are defects such as protrusions and pits on the surface of the furnace tube. If so, the concave-convex detection component will light up the reminder light to remind the relevant staff, prompting the relevant staff to take corresponding measures in time. On the one hand, it can prevent the furnace tube from being stuck due to protrusions or pits on the surface of the furnace tube. On the other hand, it makes it unnecessary for the staff to perform such detection on the quartz furnace tube separately, thereby further improving the processing efficiency and greatly improving the functionality and practicality of the tube stop detection mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the three-dimensional structure of a polishing device for semiconductor quartz components in the first embodiment of the present application;

[0017] Figure 2 This is a schematic diagram of the three-dimensional structure of the pipe stop detection mechanism in the first embodiment of the present application;

[0018] Figure 3 This is a front view structural diagram of the pipe stop detection mechanism in the first embodiment of the present application;

[0019] Figure 4 This is a schematic cross-sectional view of the support box in the first embodiment of the present application;

[0020] Figure 5 This is a schematic cross-sectional structure diagram of the sealing cylinder in the first embodiment of the present application;

[0021] Figure 6 This is a side view structural diagram of the inspection and stop roller in the first embodiment of the present application;

[0022] Figure 7 This is a schematic cross-sectional view of the base box in the first embodiment of the present application;

[0023] Figure 8 This is a system structure block diagram of the first embodiment of the present application to detect the intelligent controller;

[0024] Fig. 9 This is a schematic diagram of the structure of the stop detection mechanism in the second embodiment of the present application;

[0025] Fig.10 For this application Fig. 9 A schematic diagram of the enlarged structure at A in the middle;

[0026] Fig.11 This is a schematic cross-sectional view of the rod fixing sleeve in the second embodiment of the present application;

[0027] Fig.12 This is a system structure block diagram of the smart controller for waking up in the second embodiment of the present application.

[0028] Description of the numbers in the figure:

[0029] 001, polishing machine; 002, pipe stop detection mechanism; 201, support pipe body; 202, support box; 203, detection stop roller; 204, sealing tube; 205, color sensor; 206, transparent sheet; 207, colored mark; 208, connecting screw; 209, support pipe seat; 210, base box; 211, adjusting cylinder; 212, lifting support rod; 003, detection and awakening intelligent controller; 401, support frame; 402, sliding rod; 403, spring; 404, connecting screw sleeve; 405, fixing rod sleeve; 406, distance sensor; 407, reminder light. DETAILED DESCRIPTION

[0030] Two implementation modes of the present application are described in detail below with reference to the accompanying drawings.

[0031] The first implementation method:

[0032] Figure 1-8A polishing device for semiconductor quartz parts is shown, including a polishing machine 001 and a tube stop detection mechanism 002, the tube stop detection mechanism 002 includes a support tube body 201, and a support box body 202 is penetrated on the top outer wall of the support tube body 201. In this embodiment, the support box body 202 is fixedly connected to the support tube body 201, and a detection stop roller 203 is penetrated on the bottom outer wall of the support box body 202. The detection stop roller 203 is rotatably connected to the inner wall of the support box body 202 through a shaft and a bearing, and the detection stop roller 203 is movably connected to the bottom outer wall of the support box body 202. A sealing cylinder 204 is penetrated on the side wall of the support box body 202, and a color sensor 205 is fixedly installed in the sealing cylinder 204. A transparent sheet 206 is penetrated on the outer wall of the sealing cylinder 204 close to the detection stop roller 203, and the outer wall of the detection stop roller 203 close to the sealing cylinder 204 is A plurality of continuous colored marks 207 evenly distributed along a ring are provided, the colored marks 207 are painted with paint, and the colors of adjacent colored marks 207 are different, one of the colored marks 207 is on the same horizontal line with the color sensor 205 and the transparent sheet 206, the pipe stop detection mechanism 002 also includes a detection and awakening intelligent controller 003 fixedly installed on the outer wall of the support pipe body 201, the detection and awakening intelligent controller 003 is provided with a pipe stop analysis module and a bell reminder module, the color sensor 205 is electrically connected to the pipe stop analysis module, and the pipe stop analysis module is electrically connected to the bell reminder module, a connecting screw 208 is fixedly installed on the inner wall of the bottom end of the support pipe body 201, a support pipe seat 209 is provided at the top of the connecting screw 208, and an arc-shaped section is provided at the top of the support pipe seat 209, and the support pipe seat 209 can play a role in supporting the furnace pipe to ensure that the furnace pipe can be against the detection and stop roller 203.

[0033] See also Figure 1-6 and Figure 8When polishing the quartz furnace tube, one end of the furnace tube is passed through the inner side of the support tube body 201, and the furnace tube is abutted against the detection stop roller 203, and then the furnace tube is sent into the polishing machine 001, and the polishing machine 001 is started to polish the furnace tube. During the polishing process, the forward movement of the furnace tube will drive the detection stop roller 203 to rotate, and the colored mark 207 will rotate with the detection stop roller 203, so that the color recognized by the color sensor 205 will continue to change. Once the furnace tube stops moving, the rotation of the detection stop roller 203 will also stop. The recognition result of the color sensor 205 will be fed back to the tube stop analysis module in real time, so that the tube stop analysis module can be found The color recognized by the color sensor 205 stops changing and it is found that the movement of the furnace tube has stopped. At this time, the tube stop analysis module will send an instruction to the bell reminder module to make the bell reminder module emit a sound. Therefore, through the setting of the tube stop detection mechanism 002, the tube stop detection mechanism 002 can detect whether the furnace tube is moving forward. When the furnace tube is stuck and stops moving forward, the bell reminder module will emit a sound to remind the relevant staff, so that the staff can promptly discover the phenomenon that the furnace tube is stuck, so that the staff can promptly take corresponding measures, which can not only greatly reduce the impact of the furnace tube jam on the processing efficiency, but also prevent the surface of the furnace tube from being damaged due to the furnace tube jam.

[0034] See also Figure 8 A stop-polishing feedback module is also provided in the detection and awakening intelligent controller 003. The tube stop analysis module is electrically connected to the stop-polishing feedback module, and the stop-polishing feedback module is electrically connected to the control system of the polishing machine 001. After the tube stop analysis module finds that the furnace tube is stuck, it will also send an instruction to the stop-polishing feedback module, so that the stop-polishing feedback module feeds back this information to the control system of the polishing machine 001, causing the control system of the polishing machine 001 to stop polishing the furnace tube through corresponding control, thereby further preventing damage to the surface of the furnace tube caused by the jamming of the furnace tube.

[0035] See also Figure 3 The bottom end of the support tube seat 209 is provided with a threaded groove, and the support tube seat 209 is threadedly connected to the connecting screw 208 through the threaded groove. The support tube seat 209 is provided with a variety of different specifications. The difference between the support tube seats 209 of different specifications lies in the different thicknesses and the different radii of the arc-shaped sections. The support tube seats 209 of different specifications correspond to furnace tubes of different specifications. The diameter of the arc-shaped section on the support tube seat 209 matches the outer diameter of the corresponding furnace tube. When polishing quartz furnace tubes of different specifications, the corresponding support tube seat 209 can be selected to be replaced, so that the tube stop detection mechanism 002 can be adaptively adjusted according to the specifications of the aluminum tube, and can be suitable for quartz furnace tubes of various specifications. In addition, the larger the radius of the arc-shaped section, the thicker the quartz furnace tube, which requires more space, and the thinner the support tube seat 209 will be. Therefore, the larger the radius of the arc-shaped section, the thinner the thickness of the support tube seat 209.

[0036] See also Figure 3 and Figure 7 A base box 210 is arranged below the support tube body 201, and an adjusting cylinder 211 is fixedly installed in the base box 210. A lifting support rod 212 is fixedly connected to the output end of the adjusting cylinder 211. The lifting support rod 212 penetrates the top outer wall of the base box 210 and extends to be fixedly connected to the support tube body 201. The lifting support rod 212 is slidably connected to the outer wall of the base box 210, so that the support tube body 201 can be moved up and down for adjustment, thereby improving the applicability of the tube stop detection mechanism 002.

[0037] The second implementation method:

[0038] Figure 9-12A polishing device for semiconductor quartz parts is shown. Different from the first embodiment, a concave-convex analysis module is also provided in the detection intelligent controller 003, and the tube stop detection mechanism 002 also includes a concave-convex detection component, which includes a support frame 401 fixedly installed on the top of the support tube body 201 and a distance sensor 406 fixedly installed on the top of the support box 202. A slide bar 402 is provided through the middle of the support frame 401, and a spring 403 is movably sleeved on the outer wall of the slide bar 402. A connecting screw sleeve 404 is fixedly installed on the top of the support frame 401, and a fixed rod sleeve 405 is provided on the inner side of the connecting screw sleeve 404. A reminder light 407 is fixedly installed on the outer wall of the support frame 401, and the support frame 401 is provided with a spring sleeve 403. The support frame 401 is U-shaped and the cover of the support box 202 is arranged on the outside of the support box 202. The slide bar 402 is slidably connected to the support frame 401 and the bottom end of the slide bar 402 is fixedly connected to the support box 202. The two ends of the spring 403 are respectively fixedly connected to the support frame 401 and the support box 202. The fixed rod sleeve 405 is threadedly connected to the connecting screw sleeve 404. The fixed rod sleeve 405 is sleeved on the top of the slide bar 402, and the fixed rod sleeve 405 is threadedly connected to the slide bar 402. In this embodiment, the support box 202 is slidably connected to the support tube 201, the distance sensor 406 is electrically connected to the concave-convex analysis module, the concave-convex analysis module is electrically connected to the reminder light 407, and the concave-convex analysis module is also electrically connected to the stop-throwing feedback module. The fixed rod sleeve 405 can The support box 202 can be fixed to a certain distance. After the furnace pipe passes through the inner side of the support pipe 201 and contacts the inspection and stop roller 203, the fixed rod sleeve 405 is rotated to completely disengage the connecting screw sleeve 404 and the slide bar 402, so as to contact the slide bar 402, the support box 202, etc. During the polishing process, if there are surface defects such as protrusions or pits on the surface of the furnace pipe, for example, there are protrusions on the surface of the furnace pipe. When the protrusion moves past the inspection and stop roller 203, it will push the inspection and stop roller 203 upward, causing the support box 202 to move upward a certain distance. The distance sensor 406 can detect the distance between it and the inner wall of the top of the support frame 401 in real time, and the detected data will be transmitted to the concave-convex analysis module so that The concave-convex analysis module can find out that there is a bulge on the surface of the furnace tube because it finds that the distance between the distance sensor 406 and the inner wall of the top of the support frame 401 is significantly reduced. At this time, the concave-convex analysis module will light up the reminder light 407. At the same time, the concave-convex analysis module will also send an instruction to the stop-polishing feedback module, so that the stop-polishing feedback module will feed back this information to the control system of the polishing machine 001, causing the polishing to stop. On the contrary, if there is a pit on the surface of the furnace tube, the concave-convex analysis module can find out that there is a pit on the surface of the furnace tube because it finds that the distance between the distance sensor 406 and the inner wall of the top of the support frame 401 is significantly increased. Therefore, through the setting of the concave-convex detection component, the concave-convex detection component can detect whether there are defects such as bulges and pits on the surface of the furnace tube. If so,The concave-convex detection component will light up the reminder light 407 to remind the relevant staff, prompting the relevant staff to take corresponding measures in time. On the one hand, it can prevent the furnace tube from being stuck due to the presence of convexities or concave pits on the surface of the furnace tube. On the other hand, it makes it unnecessary for the staff to perform such inspections on the quartz furnace tube separately, thereby further improving the processing efficiency and greatly improving the functionality and practicality of the tube stop detection mechanism 002.

[0039] In view of current practical needs, the above-mentioned implementation mode adopted in this application is not limited to the scope of protection. Various changes made within the knowledge scope of technical personnel in this field without departing from the concept of this application still fall within the scope of protection of the present invention.

Claims

1. A polishing device for semiconductor quartz components, comprising a polishing machine (001) and a tube stop detection mechanism (002), characterized in that: The tube stop detection mechanism (002) comprises a supporting tube body (201), a supporting box body (202) is provided through the top outer wall of the supporting tube body (201), a detection stop roller (203) is provided through the bottom outer wall of the supporting box body (202), the detection stop roller (203) is rotatably connected to the inner wall of the supporting box body (202) through an axis and a bearing, and the detection stop roller (203) is movably connected to the bottom outer wall of the supporting box body (202), a sealing cylinder (204) is provided through the side wall of the supporting box body (202), a color sensor (205) is fixedly installed in the sealing cylinder (204), a transparent sheet (206) is provided through the outer wall of the sealing cylinder (204) close to the detection stop roller (203), and the detection stop roller (203) is rotatably connected to the inner wall of the supporting box body (202) through an axis and a bearing, and the detection stop roller (203) is movably connected to the bottom outer wall of the supporting box body (202), A plurality of continuous colored marks (207) evenly distributed along a ring are arranged on the outer wall of the wheel (203) on one side close to the sealing cylinder (204); the colored marks (207) are painted with paint, and the colors of adjacent colored marks (207) are different; one of the colored marks (207) is located on the same horizontal line as the color sensor (205) and the transparent sheet (206); the pipe stop detection mechanism (002) further comprises a detection intelligent controller (003) fixedly mounted on the outer wall of the supporting pipe body (201); a pipe stop analysis module and a bell reminder module (302) are arranged in the detection intelligent controller (003); the color sensor (205) is electrically connected to the pipe stop analysis module, and the pipe stop analysis module is electrically connected to the bell reminder module (302).

2. A polishing device for semiconductor quartz parts according to claim 1, characterized in that: The detection and awakening intelligent controller (003) is also provided with a stop-polishing feedback module, the pipe stop analysis module is electrically connected to the stop-polishing feedback module, and the stop-polishing feedback module is electrically connected to the control system of the polishing machine (001).

3. A polishing device for semiconductor quartz parts according to claim 1, characterized in that: A connecting screw (208) is fixedly mounted on the inner wall of the bottom end of the supporting tube body (201), a supporting tube seat (209) is arranged at the top end of the connecting screw (208), and an arc-shaped section is arranged at the top end of the supporting tube seat (209).

4. A polishing device for semiconductor quartz parts according to claim 3, characterized in that: A thread groove is provided at the bottom end of the support pipe seat (209), and the support pipe seat (209) is threadedly connected to the connecting screw (208) via the thread groove. The support pipe seat (209) is provided with a plurality of different specifications, and the difference between the support pipe seats (209) of different specifications lies in different thicknesses and different radii of the arc-shaped sections.

5. A polishing device for semiconductor quartz parts according to claim 1, characterized in that: A base box (210) is arranged below the support tube body (201), an adjusting cylinder (211) is fixedly installed in the base box body (210), an output end of the adjusting cylinder (211) is fixedly connected to a lifting support rod (212), the lifting support rod (212) passes through the top outer wall of the base box body (210) and extends to be fixedly connected to the support tube body (201), and the lifting support rod (212) is slidably connected to the outer wall of the base box body (210).

6. A polishing device for semiconductor quartz parts according to claim 2, characterized in that: The detection and awakening intelligent controller (003) is also provided with a concave-convex analysis module, and the tube stop detection and awakening mechanism (002) also includes a concave-convex detection and awakening component, and the concave-convex detection and awakening component includes a support frame (401) fixedly mounted on the top of the support tube body (201) and a distance sensor (406) fixedly mounted on the top of the support box (202), a sliding rod (402) is arranged through the middle of the support frame (401), and a spring (403) is movably sleeved on the outer wall of the sliding rod (402), a connecting screw sleeve (404) is fixedly mounted on the top of the support frame (401), and a fixed rod sleeve (405) is arranged on the inner side of the connecting screw sleeve (404), and a reminder light (407) is fixedly mounted on the outer wall of the support frame (401).

7. A polishing device for semiconductor quartz parts according to claim 6, characterized in that: The support frame (401) is configured to be U-shaped and the support frame (401) is covered on the outside of the support box (202); the slide bar (402) is slidably connected to the support frame (401) and the bottom end of the slide bar (402) is fixedly connected to the support box (202); the two ends of the spring (403) are respectively fixedly connected to the support frame (401) and the support box (202); the fixed rod sleeve (405) is threadedly connected to the connecting screw sleeve (404); the fixed rod sleeve (405) is sleeved on the top end of the slide bar (402) and the fixed rod sleeve (405) is threadedly connected to the slide bar (402); the support box (202) is slidably connected to the support tube (201).

8. A polishing device for semiconductor quartz parts according to claim 6, characterized in that: The distance sensor (406) is electrically connected to the concave-convex analysis module, the concave-convex analysis module is electrically connected to the reminder light (407), and the concave-convex analysis module is also electrically connected to the stop-throwing feedback module.

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