Crystal bar transfer device capable of preventing crystal bar from falling off and crystal bar cut-off system

Abstract

The invention provides a crystal bar transfer device capable of preventing crystal bars from falling and a crystal bar cut-off system, and belongs to the technical field of monocrystalline silicon. The crystal bar transfer device capable of preventing the crystal bars from falling comprises a support, a first anti-falling assembly and a moving assembly, the first anti-falling assembly is located at the upper end of the support and detachably connected with the support, and the moving assembly is located at the lower end of the support; the first anti-falling assembly comprises a first bearing part and two clamping parts, the upper end of the first bearing part is provided with a trapezoidal groove matched with a crystal bar, the first bearing part is located at the upper end of the support, the two clamping parts are located on the two sides of the first bearing part correspondingly, the two clamping parts are both relatively perpendicular to the first bearing part, and the first bearing part is located in the trapezoidal groove. The two clamping parts are oppositely parallel, the first bearing part is detachably connected with the support, the two clamping parts are rotationally connected with the first bearing part, the opposite faces of the two clamping parts jointly abut against a crystal bar so that the crystal bar can be located in a trapezoidal groove of the first bearing part to be prevented from falling off, and the first bearing part supports the two clamping parts to be located on the support.

Description

Technical Field

[0001] The present invention relates to the technical field of single crystal silicon, and in particular to a crystal rod transport device and a crystal rod cutting system for preventing a crystal rod from falling. Background Art

[0002] Single crystal silicon ingots are one of the most important raw materials in semiconductor manufacturing. The weight and size of single crystal silicon ingots vary depending on the diameter and length. Taking a 12-inch single crystal silicon ingot as an example, its diameter is 12 inches (300 mm), the length is generally 1.5 meters to 2 meters, and the weight is about 270 kilograms. In addition, semiconductor silicon ingots with a diameter of 8-300 mm also have different weights and size specifications. However, single crystal silicon ingots need to go through multiple processing steps before they can be processed into wafers for integrated circuit manufacturing and semiconductor device production. Therefore, most staff choose ingot transfer devices to transfer heavier ingots between different processes.

[0003] Existing Chinese utility model patents such as the authorization announcement number "CN219949148U" disclose a transfer tool and transfer equipment, wherein the transfer tool is used for the transfer of crystal rods, including: a tool frame, a traction mechanism and a radio frequency mechanism, the tool frame includes a frame body, a loading mechanism and a transfer roller, the crystal rod is fixed by the setting of the loading mechanism on the tool frame, and the transfer is achieved by the cooperation of the transfer roller and the traction mechanism. However, the tool frame of the above technical solution fixes the crystal rod through a "V"-shaped groove. Since the heavy crystal rod has a large inertia during the transfer process, it is easy to cause the crystal rod to slide axially on the "V"-shaped groove of the tool frame, causing the crystal rod to fall. Summary of the invention

[0004] In view of this, it is necessary to provide a crystal ingot transport device that prevents the crystal ingot from falling, so as to solve the technical problem that the heavy crystal ingot has a large inertia during the transport process, which easily causes the crystal ingot to slide axially on the "V" groove, causing the crystal ingot to fall; It is also necessary to provide a crystal ingot cutting system.

[0005] On the one hand, the present invention provides a crystal rod transport device for preventing a crystal rod from falling, comprising a bracket, a first anti-falling component, and a moving component, wherein there are at least two first anti-falling components, the first anti-falling component is located at the upper end of the bracket, the moving component is located at the bottom surface of the bracket, the first anti-falling component is detachably connected to the bracket, the moving component is connected to the bracket, the first anti-falling component comprises a first bearing part and a clamping part, the number of the clamping parts is two, a trapezoidal groove adapted to the crystal rod is provided at the upper end of the first bearing part, the first bearing part is located at the upper end of the bracket, the two clamping parts are respectively located on both sides of the first bearing part, the two clamping parts are both relatively perpendicular to the first bearing part, and the two clamping parts are relatively parallel, the first bearing part is detachably connected to the bracket, the two clamping parts are both rotatably connected to the first bearing part, the opposite surfaces of the two clamping parts jointly hold the crystal rod, so that the crystal rod is located in the trapezoidal groove of the first bearing part to prevent the crystal rod from falling, and the first bearing part supports the two clamping parts, both of which are located on the bracket.

[0006] On the other hand, the present invention provides a crystal rod cutting system, comprising the crystal rod transfer device for preventing the crystal rod from falling and a vertical crystal rod cutting machine as described in the above aspect, wherein the crystal rod transfer device for preventing the crystal rod from falling is used to transfer the crystal rod to the vertical crystal rod cutting machine, and the vertical crystal rod cutting machine performs cutting processing on the crystal rod.

[0007] It can be known from the above technical scheme that the crystal rod transport device for preventing the crystal rod from falling provided by the present invention comprises a bracket, a first anti-drop component, and a moving component. The first anti-drop component is at least two, the first anti-drop component is located at the upper end of the bracket, the moving component is located at the bottom surface of the bracket, the first anti-drop component is detachably connected to the bracket, the moving component is connected to the bracket, the first anti-drop component comprises a first bearing part and a clamping part, the number of the clamping parts is two, a trapezoidal groove adapted to the crystal rod is provided at the upper end of the first bearing part, the first bearing part is located at the upper end of the bracket, and the two clamping parts are respectively located at the two ends of the first bearing part On the other side, the two clamping parts are both relatively perpendicular to the first bearing part, and the two clamping parts are relatively parallel, the first bearing part is detachably connected to the bracket, the two clamping parts are both rotatably connected to the first bearing part, and the first bearing part supports the two clamping parts, both of which are located on the bracket. When the opposite surfaces of the two clamping parts jointly support the crystal rod so that the crystal rod is located in the trapezoidal groove of the first bearing part, the two clamping parts rotate relative to each other under the action of the gravity of the crystal rod to jointly radially squeeze the crystal rod, and the rolled crystal rod has a tendency to move between the two clamping parts, which effectively limits the axial sliding of the crystal rod and prevents the crystal rod from falling from the crystal rod transport device. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for describing the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying creative work.

[0009] Figure 1 Schematic diagram of the structure of the crystal rod transfer device to prevent the crystal rod from falling.

[0010] Figure 2 It is a schematic structural diagram of the first anti-drop component.

[0011] Figure 3 It is a schematic structural diagram of the second anti-drop component.

[0012] Figure 4 It is a structural schematic diagram of the lifting and sliding assembly.

[0013] Figure 5 This is the front view of the vertical crystal rod cutting machine.

[0014] Figure 6 This is a schematic diagram of the first angle structure of the cooperation between the cutting assembly and the support frame.

[0015] Figure 7 It is a schematic diagram of the second angle structure of the cooperation between the cutting assembly and the support frame.

[0016] Figure 8 A cross-sectional view of the end tray.

[0017] Fig. 9 It is a schematic diagram of the structure of the ingot tray.

[0018] Fig.10 It is a schematic diagram of the third angle structure of the cooperation between the cutting assembly and the support frame.

[0019] Fig.11 It is a schematic structural diagram of the third slider.

[0020] Fig.12 This is a schematic diagram of the structure of a vertical crystal rod cutting machine.

[0021] Fig.13 Schematic diagram of the clamping assembly structure.

[0022] Fig.14 This is a schematic diagram of the structure of the vertical crystal rod cutting machine from another angle.

[0023] In the figure: a crystal ingot transport device 10 for preventing a crystal ingot from falling, a bracket 100, an L-shaped positioning plate 110, a lifting platform 120, a first anti-drop assembly 200, a first bearing portion 210, a clamping portion 220, a first connecting shaft 221, a first roller 222, a second roller 223, a moving assembly 300, a moving wheel 310, a rotating bearing 320, a second anti-drop assembly 400, a second bearing portion 410, a transition clamping portion 420, a second connecting shaft 421, a third roller 422, a lifting and sliding assembly 500, a driving portion 510, a speed reducer 511, a driving member 512, a lifting portion 520, a sliding portion 530, a connecting plate 531, a fourth roller 532, and a trapezoidal limiting plate 533; Vertical ingot cutting machine 60, support assembly 600, support vertical plate 610, fourth guide rod 611, infrared rangefinder 612, support frame 620, slide groove 621, clamping assembly 700, first driving part 710, third supporting plate 711, fourth motor 712, fourth screw rod 713, tooth plate 714, gear 715, first clamping part 720, connecting groove 721, first driving member 722, clamping claw 723, cushion layer 7231, elastic protective layer 724, cutting assembly 800, anti-collapse edge 810, telescopic member 811, second motor 8111, telescopic cylinder 8 112, suction cup 812, tooling 813, ingot tray 8131, end tray 8132, horizontal moving part 814, first motor 8141, first screw rod 8142, first slider 8143, cutting part 820, third motor 821, third screw rod 822, third slider 823, slide plate 8231, guide wheel 8232, mounting groove 8233, steel wire 824, winding machine 825, column 826, tensioning part 827, fourth support plate 8271, fifth support plate 8272, tensioning bolt 8273, third guide rod 828, conveying part 900. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0025] In the description of the present invention, it should be understood that the terms "upper", "middle", "outer", "inner", "lower" and the like indicating directions or positional relationships are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the components or elements referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as limiting the present invention.

[0026] Please see Figures 1 to 4On the one hand, the present invention provides a crystal rod transport device 10 for preventing a crystal rod from falling, comprising a support 100, a first anti-drop component 200, and a moving component 300. There are two first anti-drop components 200, the first anti-drop component 200 is located at the upper end of the support 100, the moving component 300 is located at the bottom of the support 100, the first anti-drop component 200 is detachably connected to the support 100, the moving component 300 is connected to the support 100, the first anti-drop component 200 comprises a first bearing part 210 and a clamping part 220, the number of the clamping parts 220 is two, a trapezoidal groove adapted to the crystal rod is provided at the upper end of the first bearing part 210, the first bearing part 210 is located at the upper end of the support 100, and the two clamping parts 220 are respectively located at the first and second clamping parts 220. On both sides of a bearing part 210, two clamping parts 220 are relatively perpendicular to the first bearing part 210, and the two clamping parts 220 are relatively parallel. The first bearing part 210 is detachably connected to the bracket 100, and the two clamping parts 220 are rotatably connected to the first bearing part 210. The first bearing part 210 supports the two clamping parts 220 and both are located on the bracket 100. When the opposite surfaces of the two clamping parts 220 jointly support the crystal rod so that the crystal rod is located in the trapezoidal groove of the first bearing part 210, the two clamping parts 220 rotate relative to each other under the action of the gravity of the crystal rod to radially squeeze the crystal rod together, and the rolled crystal rod has a tendency to move between the two clamping parts 220, which effectively limits the axial sliding of the crystal rod and prevents the crystal rod from falling from the crystal rod transport device.

[0027] In one embodiment, the first bearing portion 210 is two first support plates, the two first support plates are relatively parallel, the two clamping portions 220 are located between the two first support plates, one end of the two clamping portions 220 is rotatably connected to one of the first support plates, and the other end of the two clamping portions 220 is rotatably connected to the other first support plate.

[0028] In one embodiment, the clamping portion 220 includes a first connecting shaft 221 and a first roller 222. The first connecting shaft 221 is located at the axis of the first roller 222, and the first roller 222 is located between two first support plates. One end of the first connecting shaft 221 is rotatably connected to one of the first support plates, and the other end of the first connecting shaft 221 is rotatably connected to the other first support plate.

[0029] In one embodiment, for crystal rods of different diameters, first rollers 222 of different diameters are required to fix the crystal rods, and in order to facilitate the staff to more conveniently replace the clamping part 220, U-shaped connecting holes are opened on both sides of the upper ends of the two first support plates, and the clamping part 220 also includes a second roller 223, the second roller 223 is adapted to the first roller 222, the second roller 223 is concentric and coaxial with the first roller 222, the second roller 223 is located at one end of one of the first support plates away from the first roller 222, one end of the first connecting shaft 221 is inserted into the U-shaped connecting hole of one of the first support plates, and the other end of the first connecting shaft 221 is inserted into the U-shaped connecting hole of the other first support plate and connected to the second roller 223.

[0030] In one embodiment, in order to better fix the crystal rod portion suspended between the two first anti-drop components 200, the crystal rod transport device 10 for preventing the crystal rod from falling further includes a second anti-drop component 400, the second anti-drop component 400 is located between the two first anti-drop components 200, the first anti-drop component 200 is concentric and coaxial with the second anti-drop component 400, the second anti-drop component 400 includes a second bearing portion 410 and a transition clamping portion 420, the upper end of the second bearing portion 410 is also provided with a trapezoidal groove adapted to the crystal rod, the number of the transition clamping portions 420 is two, and the transition clamping portion 420 is adapted to the clamping part 220, the second bearing part 410 is located at the upper end of the bracket 100, the second bearing part 410 is concentric and coaxial with the first bearing part 210, the two transition clamping parts 420 are located on both sides of the second bearing part 410, the two transition clamping parts 420 are respectively concentric and coaxial with the two clamping parts 220, the second bearing part 410 is detachably connected to the bracket 100, the transition clamping part 420 is rotatably connected to the second bearing part 410, and the opposite surfaces of the two transition clamping parts 420 jointly support the crystal rod so that the crystal rod part suspended between the two first anti-drop assemblies 200 can be fixed.

[0031] In one embodiment, the transition clamping portion 420 includes a second connecting shaft 421 and a third roller 422. The number of the third rollers 422 is two. The second connecting shaft 421 is located on the second bearing portion 410. The third rollers 422 are located at both ends of the second connecting shaft 421. The second connecting shaft 421 is rotatably connected to the second bearing portion 410. One end of the second connecting shaft 421 is connected to the axis center of one of the third rollers 422. The other end of the second connecting shaft 421 passes through the second bearing portion 410 and is connected to the axis center of the other third roller 422.

[0032] In one embodiment, similarly, for crystal rods of different diameters, third rollers 422 of different diameters are required to fix the crystal rods, and in order to facilitate the staff to more conveniently replace the transition clamping part 420, the second bearing part 410 is two second support plates, the second support plates are adapted to the first support plates, and U-shaped connecting holes are also provided on both sides of the upper ends of the two second support plates, and the second connecting shaft 421 is arranged in the U-shaped connecting holes of the two second support plates.

[0033] In one embodiment, in order to make the crystal ingot transport device 10 for preventing the crystal ingot from falling more efficient in loading or unloading the crystal ingot, the crystal ingot transport device 10 for preventing the crystal ingot from falling further includes a lifting and sliding assembly 500, the lifting and sliding assembly 500 includes a driving part 510, a lifting part 520, and a sliding part 530, the number of the lifting parts 520 is two, the number of the sliding parts 530 is the same as the lifting parts 520, the driving part 510 and the lifting part 520 are both located in the middle of the bracket 100, the driving part 510 is located between the two first anti-dropping assemblies 200, the two lifting parts 520 are respectively located below the two first anti-dropping assemblies 200, and the two sliding parts 530 are respectively located at the two The upper end of the lifting part 520 is connected to the upper end of the lifting part 520, and the sliding part 530 is located between the two clamping parts 220, the driving part 510 is fixedly connected to the bracket 100, the driving part 510 is key-connected to the lifting part 520, the lower end of the lifting part 520 is fixedly connected to the bracket 100, and the upper end of the lifting part 520 is connected to the sliding part 530, the driving part 510 drives the two lifting parts 520, and the two lifting parts 520 respectively push the two sliding parts 530 to rise or fall, so that the two sliding parts 530 cooperate to jointly drive the crystal rod to rise or fall, and when the two sliding parts 530 jointly lift the crystal rod, the crystal rod can slide on the two sliding parts 530 along the axial direction of the two clamping parts 220.

[0034] In one embodiment, the lifting part 520 is an elevator, and the driving part 510 includes a reducer 511 and a driving member 512. The reducer 511 is located on the bracket 100, and the driving member 512 is located on the reducer 511. The driving member 512 is keyed to the input end of the reducer 511, and the two output ends of the reducer 511 are respectively connected to the two elevator keys. The driving member 512 drives the reducer 511 to rotate, and the reducer 511 drives the telescopic rod of the elevator to rise or fall.

[0035] In one embodiment, the sliding portion 530 includes a connecting plate 531 and a fourth roller 532. The vertical section of the connecting plate 531 is U-shaped. The fourth roller 532 is adapted to the crystal rod. The connecting plate 531 is located on the telescopic rod of the elevator. The fourth roller 532 is located on the connecting plate 531. The fourth roller 532 and the two clamping portions 220 are perpendicular to each other. The connecting plate 531 is fixedly connected to the lifting portion 520. The fourth roller 532 is rotatably connected to the connecting plate 531. The connecting plate 531 supports the fourth roller 532 and is located between the two clamping portions 220 so that the crystal rod slides on the fourth roller 532.

[0036] In one embodiment, the sliding portion 530 also includes a trapezoidal limit plate 533, the number of the trapezoidal limit plates 533 is the same as that of the lifting portion 520, the trapezoidal limit plates 533 are located on the bracket 100, the trapezoidal limit plates 533 are located between the two first support plates, the trapezoidal limit plates 533 are located below the two clamping portions 220, the trapezoidal limit plates 533 are detachably connected to the bracket 100, and the telescopic rod of the elevator passes through the trapezoidal limit plates 533 and is fixedly connected to the connecting plate 531, so that the trapezoidal limit plates 533 limit the degree of descent of the connecting plate 531.

[0037] In one embodiment, in order to make the crystal rod transport device 10 that prevents the crystal rod from falling move more flexibly, the moving component 300 includes a moving wheel 310 and a rotating bearing 320. The number of the moving wheels 310 is four, and the number of the rotating bearings 320 is the same as that of the moving wheels 310. One end of the rotating bearing 320 is rotatably connected to the moving wheel 310, and the other end of the rotating bearing 320 is rotatably connected to the lower surface of the bracket 100. The rotating bearing 320 enables the moving wheel 310 and the bracket 100 to rotate, and the moving wheel 310 drives the bracket 100 to slide.

[0038] In one embodiment, both sides of the bracket 100 have an L-shaped positioning plate 110, and a positioning hole is opened on the bottom surface of the L-shaped positioning plate 110. The L-shaped positioning plate 110 is detachably connected to the bracket 100, and the positioning hole of the L-shaped positioning plate 110 can be inserted into the positioning pin to limit the movement of the crystal rod transport device 10 to prevent the crystal rod from falling.

[0039] In one embodiment, a lifting platform 120 is further provided under the bracket 100, and the lifting platform 120 is located in the middle of the bracket 100. In the prior art, for example, when an AGV transfer cart runs to the bottom of the lifting platform 120, the AGV transfer cart can push the lifting platform 120 through the lifting platform, so that the crystal rod transfer device 10 that prevents the crystal rod from falling is located on the AGV transfer cart, thereby realizing automatic transfer.

[0040] On the other hand, the present invention provides a crystal rod cutting system, comprising the crystal rod transfer device 10 for preventing the crystal rod from falling and the vertical crystal rod cutter 60 as described in the above aspect. The crystal rod transfer device 10 for preventing the crystal rod from falling is used to transfer the crystal rod to the vertical crystal rod cutter 60, and the vertical crystal rod cutter 60 cuts the crystal rod.

[0041] Please see Figure 5 and Figure 6 In one embodiment, a vertical crystal rod cutting machine 60 includes a support assembly 600, a clamping assembly 700, and a cutting assembly 800. The support assembly 600 includes a support vertical plate 610 and a support frame 620. The cutting assembly 800 includes an anti-collapse edge portion 810 and a cutting portion 820. The clamping assembly 700 is located above the support frame 620 and the cutting portion 820. The support vertical plate 610 is located above the support frame 620. The anti-collapse edge portion 810 is located inside the support frame 620. The cutting portion 820 is located above the anti-collapse edge portion 810. The clamping assembly 700, the anti-collapse edge portion 810, and the cutting portion 820 are located on the same side of the support vertical plate 610. The clamping assembly 700 and the support vertical plate 610 are disposed on the same side of the support vertical plate 610. The bottom of the supporting plate 610 is connected to one end of the top of the supporting frame 620, the bottom of the anti-collapse edge 810 is connected to the bottom of the supporting frame 620, the cutting part 820 is slidably connected to the supporting frame 620, the clamping assembly 700 is coaxial with the anti-collapse edge 810, the crystal rod is vertically clamped by the clamping assembly 700, the clamping assembly 700 moves vertically so that the bottom of the crystal rod contacts the anti-collapse edge 810, the crystal rod and the anti-collapse edge 810 apply forces in opposite directions to each other, and then the cutting part 820 moves horizontally to cut the crystal rod, so that the part cut into crystal ingots or silicon wafers is supported and will not tilt downward, so that the edges of the crystal ingots or silicon wafers will not collapse or have bosses, and the surface will be flat.

[0042] Please see Figure 6 and Figure 7 In one embodiment, the anti-collapse edge 810 includes a telescopic member 811, a suction cup 812, and a tooling member 813. The telescopic member 811, the suction cup 812, and the tooling member 813 are all located below the cutting portion 820. The bottom of the telescopic member 811 is connected to the support frame 620, and the top of the telescopic member 811 is connected to the bottom of the suction cup 812. The suction cup 812 and the tooling member 813 are coaxial with the clamping assembly 700. The telescopic member 811 makes the suction cup 812 rise or fall vertically so that the top of the suction cup 812 contacts the bottom of the tooling member 813 or the crystal rod, and the top of the tooling member 813 contacts the crystal rod. The telescopic member 811 is extended and retracted so that the suction cup 812 or the tooling member 813 contacts the crystal rod to provide support. The suction cup 812 is used for silicon wafer cutting, and the tooling member 813 is used for cutting the head and tail of the crystal ingot or crystal rod.

[0043] In one embodiment, the telescopic member 811 includes a second motor 8111 and a telescopic cylinder 8112. The second motor 8111 and the telescopic cylinder 8112 are both located on the first slider 8143. The bottoms of the second motor 8111 and the telescopic cylinder 8112 are both connected to the support frame 620. The output end of the second motor 8111 is connected to one end of the telescopic cylinder 8112, and the other end of the telescopic cylinder 8112 is connected to the bottom of the suction cup 812. When the crystal rod descends to a predetermined position, the second motor 8111 drives the telescopic cylinder 8112 to rise so that the bottom of the crystal rod contacts the suction cup 812 or the tooling 813.

[0044] In one embodiment, the telescopic member 811 is a spring, the bottom of the spring is connected to the top of the first slider 8143, and the top of the spring is connected to the bottom of the suction cup 812. During the descent or ascent of the crystal rod, the spring automatically expands and contracts as the crystal rod descends or rises, so that the bottom of the crystal rod automatically contacts the suction cup 812 or the tooling 813.

[0045] Please see Figure 8 and Fig. 9 In one embodiment, the tooling 813 includes an ingot tray 8131 and an end tray 8132. The shape of the ingot tray 8131 is adapted to the shape of the ingot, and the shape of the end tray 8132 is adapted to the shape of the head of the crystal rod. Different tooling is used according to the shape of the cutting.

[0046] Please see Figures 6 to 11 In one embodiment, the anti-collapse edge 810 further includes a horizontal moving member 814, which includes a first motor 8141, a first screw rod 8142, and a first slider 8143. The first slider 8143 has a threaded through hole in its axial direction. The telescopic member 811 is located above the first slider 8143. The output end of the first motor 8141 is connected to one end of the first screw rod 8142. The other end of the first screw rod 8142 passes through the first slider 8143 and is threadedly connected to the first slider. The other end of the first screw rod 8142 is rotatable with the support frame 620. The top of the first slider 8143 is connected to the bottom of the second motor 8111 and the telescopic cylinder 8112. The first motor 8141 drives the first screw rod 8142 to rotate. The rotation of the first screw rod 8142 drives the first slider 8143 to move horizontally, so that the suction cup 812 or the tooling 813 moves toward or away from the supporting plate 610. When the clamping assembly 700 clamps crystal rods of different sizes, the suction cup 812 or the tooling 813 is always coaxial with the crystal rod, so that the truncated crystal ingot or silicon wafer is evenly stressed and will not cause edge collapse due to uneven stress.

[0047] In another embodiment, the top of the first slider 8143 is connected to the bottom of the spring.

[0048] In one embodiment, the cutting unit 820 includes a third motor 821, a third screw rod 822, a third slider 823, and a steel wire 824. A slide groove 621 is arranged above the support frame 620. The cross section of the slide groove 621 is U-shaped. The cross section of the third slider 823 is U-shaped. The third motor 821 and the third screw rod 822 are located on the front outside of the support frame 620. The third slider 823 is located in the slide groove 621. The steel wire 824 and the third screw rod 822 are perpendicular to each other. The output end of the third motor 821 is connected to the One end of the third screw rod 822 is connected, the third screw rod 822 passes through the third slider 823 and is threadedly connected to the third slider 823, the other end of the third screw rod 822 is rotatably connected to the support frame 620, and the two ends of the steel wire 824 are respectively connected to the third slider 823. When cutting, the third motor 821 drives the third screw rod 822 to rotate, and the rotation of the third screw rod 822 drives the third slider 823 to move horizontally in the slide groove 621, thereby driving the steel wire 824 to move horizontally to the left or right to cut the ingot or silicon wafer.

[0049] In one embodiment, the cutting portion 820 also includes a third guide rod 828, which is located on the rear and outer side of the support frame 620. The third guide rod 828 and the third screw rod 822 are parallel to each other and are located on the same horizontal plane. The two ends of the third guide rod 828 are fixedly connected to the two ends of the support frame 620. The third guide rod 828 passes through the third slider 823 and is slidably connected to the third slider 823 to provide a guide for the sliding of the third slider 823.

[0050] In one embodiment, the cutting portion 820 also includes a winding machine 825 and a column 826. A mounting groove 8233 is set on the side of the third slider 823. The winding machine 825 and the column 826 are located in the mounting groove 8233. One end of the steel wire 824 extends from the winding machine 825, bypasses the column 826 and the opposite sides of the third slider 823, and returns to the winding machine 825. The connection points of the winding machine 825, the column 826, the steel wire 824 and the third slider 823 that are rotatably connected form a rectangle. When the steel wire 824 is moderately tensioned, a certain elastic margin of the steel wire 824 is provided when the steel wire 824 cuts the crystal rod, so that the steel wire 824 will not break when cutting the crystal rod.

[0051] In one embodiment, the cutting portion 820 further includes a tensioning member 827, and the tensioning member 827 is two, and the tensioning member 827 includes a fourth support plate 8271, a fifth support plate 8272, and a tensioning bolt 8273. The third slider 823 has sliding grooves on two opposite sides, and the third slider 823 has a slide plate 8231 and a guide wheel 8232 on two opposite sides. The fourth support plate 8271 is connected to the third slider 823, the fifth support plate 8272 is connected to the slide plate 8231, and the tensioning bolt 8273 is connected to the third slider 823. It is rotatably connected to the fourth support plate 8271, the tensioning bolt 8273 is threadedly connected to the fifth support plate 8272, the slide plate 8231 is slidably connected to the sliding groove of the third slider 823, the guide wheel 8232 is connected to the slide plate 8231, and the steel wire 824 is rotatably connected to the guide wheel 8232. When the steel wire 824 needs to be tensioned, the tensioning bolt 8273 rotates, driving the fifth support plate 8272 and the slide plate 8231 to move along the sliding groove in a direction away from the supporting vertical plate 610 to tension the steel wire 824.

[0052] Please see Figure 12 to Figure 14 In one embodiment, the clamping assembly 700 includes a first driving part 710 and a first clamping part 720. The first driving part 710 and the first clamping part 720 are located on the same side of the supporting vertical plate 610. The axis of the first clamping part 720 is coaxial with the anti-collapse edge part 810. The first clamping part 720 is perpendicular to the supporting vertical plate 610. The first driving part 710 is connected to the supporting frame 620. The first driving part 710 is also connected to the first clamping part 720. The first driving part 710 drives the first clamping part 720 to move vertically, and the clamping assembly 700 clamps the crystal rod.

[0053] Specifically, there are two clamping assemblies 700 , and the clamping assemblies 700 are vertically arranged along the length direction of the supporting vertical plate 610 .

[0054] In one embodiment, fourth guide rods 611 are respectively arranged on both sides of the support vertical plate 610, and the first driving unit 710 includes a third support plate 711, a fourth motor 712, a fourth screw rod 713, a tooth plate 714, and a gear 715. The cross section of the third support plate 711 is U-shaped, the third support plate 711 and the fourth motor 712 are perpendicular to the support vertical plate 610, the fourth motor 712 is located at the front end of the third support plate 711, the tooth plate 714 is parallel to the support vertical plate 610, the gear 715 is located on the fourth screw rod 713, the tooth plate 714 is vertically fixedly connected to the middle part of the support vertical plate 610, and the fourth guide rod 611 is provided. The two ends of 11 are fixedly connected to the supporting vertical plate 610, the side of the third supporting plate 711 is connected to the first clamping part 720, the two ends of the third supporting plate 711 are slidably connected to the fourth guide rod 611, the fourth motor 712 is connected to the third supporting plate 711, the output end of the fourth motor 712 is connected to the fourth screw rod 713, the fourth screw rod 713 passes through the third supporting plate 711 and is rotatably connected to the third supporting plate 711, the fourth screw rod 713 is fixedly connected to the gear 715, the gear 715 is not in contact with the third supporting plate 711, the gear 715 is meshed with the tooth plate 714, and drives the first clamping part 720 to rise and fall.

[0055] In one embodiment, the first clamping portion 720 includes a connecting groove 721, a first driving member 722, and a clamping jaw 723. The connecting groove 721 is perpendicular to the supporting plate 610, the clamping jaw 723 is coaxial with the suction cup 812 or the tooling 813, the left side of the connecting groove 721 is fixedly connected to the right side of the third support plate 711, the first driving member 722 is connected to the connecting groove 721, and the first driving member 722 drives the clamping jaws 723 to move closer to or away from each other to accommodate crystal rods of different sizes.

[0056] Specifically, the first driving member 722 may be a motor or a screw rod, and the screw rod is symmetrically provided with reverse threads so as to make the clamping jaws 723 approach or move away from each other.

[0057] In one embodiment, the first clamping portion 720 further includes an elastic protective layer 724, which is located on the right side of the connecting groove 721, parallel to the connecting groove 721, and the two ends of the elastic protective layer 724 are respectively connected to the clamping claws 723 to prevent damage to the crystal rod.

[0058] In one embodiment, cushion layers 7231 are disposed inside opposite sides of the clamping jaws 723 to prevent the crystal rod from being damaged.

[0059] In one embodiment, an infrared rangefinder 612 is disposed on the top of the support plate 610 to detect the length of the crystal rod.

[0060] In one embodiment, the vertical ingot cutting machine 60 further includes a conveying member 900 , which may be a conveyor belt.

[0061] What is disclosed above is only a preferred embodiment of the present invention, which certainly cannot be used to limit the scope of rights of the present invention. A person skilled in the art can understand that all or part of the processes of the above embodiments and equivalent changes made according to the claims of the present invention still fall within the scope of the invention.

Claims

1. A crystal ingot transport device for preventing a crystal ingot from falling, characterized in that: The invention comprises a bracket, a first anti-drop component and a moving component, wherein the first anti-drop component is at least two, the first anti-drop component is located at the upper end of the bracket, the moving component is located at the bottom surface of the bracket, the first anti-drop component is detachably connected to the bracket, the moving component is connected to the bracket, the first anti-drop component comprises a first bearing part and a clamping part, the number of the clamping parts is two, a trapezoidal groove adapted to the crystal rod is provided at the upper end of the first bearing part, the first bearing part is located at the upper end of the bracket, the two clamping parts are respectively located at both sides of the first bearing part, the two clamping parts are both relatively perpendicular to the first bearing part, and the two clamping parts are relatively parallel, the first bearing part is detachably connected to the bracket, the two clamping parts are both rotatably connected to the first bearing part, the opposite surfaces of the two clamping parts jointly resist the crystal rod, so that the crystal rod is located in the trapezoidal groove of the first bearing part to prevent the crystal rod from falling, and the first bearing part supports the two clamping parts, both of which are located on the bracket.

2. The crystal ingot transport device for preventing the crystal ingot from falling according to claim 1, characterized in that: The first bearing portion is two first support plates, the two first support plates are relatively parallel, the two clamping portions are located between the two first support plates, one end of the two clamping portions is rotatably connected to one of the first support plates, and the other end of the two clamping portions is rotatably connected to the other first support plate.

3. The crystal ingot transport device for preventing the crystal ingot from falling according to claim 2, characterized in that: The clamping portion includes a first connecting shaft and a first roller. The first connecting shaft is located at the axis center of the first roller. The first roller is located between the two first support plates. One end of the first connecting shaft is rotatably connected to one of the first support plates, and the other end of the first connecting shaft is rotatably connected to the other first support plate.

4. The crystal ingot transport device for preventing the crystal ingot from falling according to claim 3, characterized in that: U-shaped connecting holes are provided on both sides of the upper ends of the two first support plates, and the clamping portion also includes a second roller, which is adapted to the first roller, and is concentric and coaxial with the first roller. The second roller is located at an end of one of the first support plates away from the first roller, and one end of the first connecting shaft is inserted into the U-shaped connecting hole of one of the first support plates, and the other end of the first connecting shaft is inserted into the U-shaped connecting hole of the other first support plate and connected to the second roller.

5. The crystal ingot transport device for preventing the crystal ingot from falling according to claim 1, characterized in that: The crystal rod transport device for preventing the crystal rod from falling also includes a second anti-drop component, there is at least one second anti-drop component, the first anti-drop component and the second anti-drop component are distributed at intervals, the first anti-drop component is concentric and coaxial with the second anti-drop component, the second anti-drop component includes a second bearing part and a transition clamping part, the upper end of the second bearing part also has a trapezoidal groove adapted to the crystal rod, the number of the transition clamping parts is two, the transition clamping part is adapted to the clamping part, the second bearing part is located at the upper end of the bracket, the second bearing part is concentric and coaxial with the first bearing part, the two transition clamping parts are located on both sides of the second bearing part, the two transition clamping parts are respectively concentric and coaxial with the two clamping parts, the second bearing part is detachably connected to the bracket, the transition clamping part is rotatably connected to the second bearing part, and the opposite surfaces of the two transition clamping parts jointly resist the crystal rod, so that the crystal rod part between the two first anti-drop components can be fixed.

6. The crystal ingot transport device for preventing the crystal ingot from falling according to claim 5, characterized in that: The transition clamping portion includes a second connecting shaft and a third roller, the number of the third rollers is two, the second connecting shaft is located on the second bearing portion, the third rollers are located at both ends of the second connecting shaft, the second connecting shaft is rotatably connected to the second bearing portion, one end of the second connecting shaft is connected to the axis center of one of the third rollers, and the other end of the second connecting shaft passes through the second bearing portion and is connected to the axis center of another third roller.

7. The crystal ingot transport device for preventing the crystal ingot from falling according to claim 1, characterized in that: The crystal rod transport device for preventing the crystal rod from falling also includes a lifting and sliding assembly, and there is at least one lifting and sliding assembly. The lifting and sliding assembly includes a driving part, a lifting part, and a sliding part. The number of the lifting parts is two, and the number of the sliding parts is the same as that of the lifting parts. The driving part and the lifting part are both located in the middle of the bracket, and the driving part is located between the two first anti-dropping assemblies. The two lifting parts are respectively located below the two first anti-dropping assemblies, and the two sliding parts are respectively located at the upper ends of the two lifting parts, and the sliding part is located between the two clamping parts. The driving part is fixedly connected to the bracket, and the driving part is key-connected to the lifting part. The lower end of the lifting part is fixedly connected to the bracket, and the upper end of the lifting part is connected to the sliding part. The driving part drives the two lifting parts, and the two lifting parts respectively push the two sliding parts up or down, so that the two sliding parts cooperate to jointly drive the crystal rod to rise or fall, and the two sliding parts push up the crystal rod so that the crystal rod can slide along the axial direction of the two clamping parts.

8. The crystal ingot transport device for preventing the crystal ingot from falling according to claim 7, characterized in that: The sliding portion includes a connecting plate and a fourth roller. The vertical section of the connecting plate is U-shaped. The fourth roller is adapted to the crystal rod. The connecting plate is located at the upper end of the lifting portion. The fourth roller is located on the connecting plate. The fourth roller and the two clamping portions are perpendicular to each other. The connecting plate is fixedly connected to the lifting portion. The fourth roller is rotatably connected to the connecting plate. The connecting plate supports the fourth roller and is located between the two clamping portions so that the crystal rod slides on the fourth roller.

9. The crystal ingot transport device for preventing the crystal ingot from falling according to claim 7 or 8, characterized in that: The driving part includes a reducer and a driving member. The reducer is located on the bracket, and the driving member is located on the reducer. The driving member is key-connected to the input end of the reducer, and the two output ends of the reducer are key-connected to the two lifting parts respectively. The driving member drives the reducer to rotate, and the reducer drives the lifting parts.

10. A crystal rod cutting system, characterized in that: It comprises a crystal rod transfer device for preventing the crystal rod from falling and a vertical crystal rod cutter as described in any one of claims 1 to 9, wherein the crystal rod transfer device for preventing the crystal rod from falling is used to transfer the crystal rod to the vertical crystal rod cutter, and the vertical crystal rod cutter performs cutting processing on the crystal rod.

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