Crucible automatic crushing device for monocrystalline silicon preparation

Abstract

The utility model discloses an automatic crucible crushing device for monocrystalline silicon preparation. The automatic crucible crushing device comprises a rack, a rotary supporting mechanism, a walking clamping mechanism, a crushing mechanism and a lifting mechanism, the lifting mechanism comprises a lifting oil cylinder and a lifting frame; the crushing mechanism comprises a crushing frame, a crushing arm and a crushing tool bit arranged at the bottom of the crushing arm; according to the utility model, the walking holding and clamping mechanism, the rotary supporting mechanism and the crushing mechanism are arranged, the self-walking holding and clamping mechanism extends out to hold and clamp a crucible to a crucible crushing position to continuously clamp and fix the crucible, the crushing mechanism descends at a constant speed to crush the crucible, and the rotary supporting mechanism bears the crucible to rotate by a certain angle according to the crushing requirement; the actions are repeated for multiple times for automatic crushing, so that the crushing of the crucible is efficiently and quickly solved and the damage to the crucible side is reduced on the premise of not damaging the crucible side, and the production efficiency is improved by 3-5 times compared with manual treatment.

Description

Technical Field

[0001] The utility model belongs to the technical field of metallurgical machinery manufacturing, and particularly relates to an automatic crushing device for a crucible used for preparing single crystal silicon. Background Art

[0002] A single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas (mainly nitrogen and helium) environment and grows single crystals without dislocation using the Czochralski method. The single crystal furnace mainly includes a furnace body, an electrical control cabinet, a heater, a power cabinet, a main vacuum pump, a sub-chamber vacuum pump, vacuum pipes, a hydraulic system, an argon system, and a cooling water system.

[0003] The quartz crucible produced on the inner wall of the carbon-carbon crucible during the crystal pulling process will affect the secondary recycling of the carbon-carbon crucible. The quartz crucible needs to be removed for secondary use. The existing production process is to manually break the quartz crucible using tools, but it is time-consuming and labor-intensive and easily damages the carbon-carbon crucible. Summary of the invention

[0004] The utility model provides an automatic crushing device for a crucible used for preparing single crystal silicon. The automatic crushing device for a crucible used for preparing single crystal silicon is provided with a walking clamping mechanism, a rotary supporting mechanism and a crushing mechanism. The self-walking clamping mechanism extends the clamping mechanism to send the crucible to the crucible crushing position and continues to clamp the crucible for fixing. The crushing mechanism opens the crushing head and rotates according to the inner diameter of the crucible. The crushing mechanism descends at a uniform speed and crushes the crucible. According to the requirements of crushing, the rotary mechanism carries the crucible to rotate a certain angle. The above actions are repeated for multiple times to automatically crush. Under the premise of not damaging the crucible side, the crushing of the crucible is solved efficiently and quickly and the damage to the crucible side is reduced. Compared with manual processing, the production efficiency is improved by 3-5 times.

[0005] In order to solve the above technical problems, the utility model discloses an automatic crushing device for a crucible for preparing single crystal silicon, comprising a frame, on which a rotary support mechanism, a walking clamping mechanism and a crushing mechanism located above the rotary support mechanism are arranged, and lifting mechanisms are arranged on both sides of the frame.

[0006] The lifting mechanism includes a pair of lifting cylinders symmetrically arranged on both sides of the frame and a lifting frame located on the top of the lifting cylinders;

[0007] The crushing mechanism comprises a crushing frame installed in the middle of the lifting frame, crushing arms evenly distributed around the crushing frame, and a crushing cutter head arranged at the bottom of the crushing arm;

[0008] The rotary support mechanism comprises a rotary seat arranged for supporting the crucible, a rotary bearing supported in the rotary seat, and a rotary mechanism for driving the rotary seat to rotate;

[0009] The walking clamping mechanism comprises a walking slide rail arranged transversely, a walking clamping frame sliding on the walking slide rail, a pair of walking clamping slide seats moving longitudinally and towards each other along the walking clamping frame, and a clamping seat arranged on the walking clamping slide seat.

[0010] Furthermore, the rotary mechanism includes a rotary motor, a driving bevel gear arranged on the motor shaft of the rotary motor, a driven bevel gear meshing with the driving bevel gear, a rotary drive gear coaxial with the driven bevel gear, and a large gear arranged on the side wall of the rotary seat and meshing with the rotary drive gear.

[0011] Furthermore, the clamping seats are each provided with a pair of clamping rollers for clamping the side wall of the crucible.

[0012] Furthermore, an articulated shaft and a centering connecting plate are arranged in the middle of the walking clamping frame, an articulated hole adapted to the articulated shaft is arranged in the middle of the centering connecting plate, the walking clamping slides are hingedly connected to the ends of the centering connecting plate through connecting rods, and a centering cylinder is arranged between a pair of the walking clamping slides.

[0013] Furthermore, the frame is provided with 2-3 guide rods which are sleeved on the traveling clamping slide.

[0014] Furthermore, a rack plate arranged parallel to the walking slide rail is provided on one side, and a walking motor and a gear connected to the walking motor and meshed with the rack plate are provided on the walking clamping frame.

[0015] Furthermore, a crushing arm folding mechanism is provided on the crushing frame, and the crushing arm folding mechanism includes a folding cylinder vertically arranged in the middle of the crushing frame, a crushing arm folding block located at the bottom of the folding cylinder, a pair of connecting plates hinged at the upper and lower parts of the crushing arm, and a folding adjustment plate hingedly connected to the middle part of the lower end connecting plate, the other ends of the pair of connecting plates are respectively hingedly connected to the upper and lower parts of the crushing frame, and the other ends of the folding adjustment plates are hinged to the crushing arm folding block.

[0016] Furthermore, a crushing tool holder is arranged at the lower part of the crushing arm, and a cutter head replacement motor for driving the crushing tool holder to rotate and a gear box connected to the cutter head replacement motor are arranged on the lower outer wall of the crushing arm. The output shaft on the gear box is installed in the middle part of the crushing tool holder. The crushing cutter heads are arranged in three and distributed on the outer wall of the crushing tool holder, and the crushing parts of the three crushing cutter heads are different.

[0017] The beneficial effects of the utility model are:

[0018] The utility model discloses an automatic crucible crushing device for preparing single crystal silicon, which is provided with a walking clamping mechanism, a rotary supporting mechanism and a crushing mechanism. The self-walking clamping mechanism extends the clamping mechanism to send the crucible to the crucible crushing position and continues to clamp the crucible for fixing. The crushing mechanism opens the crushing head and rotates according to the inner diameter of the crucible. The crushing mechanism descends at a uniform speed and crushes the crucible. According to the requirements of crushing, the rotary mechanism carries the crucible to rotate a certain angle. The above actions are repeated for multiple times to automatically crush the crucible. Under the premise of not damaging the crucible side, the crushing of the crucible is solved efficiently and quickly and the damage to the crucible side is reduced. Compared with manual processing, the production efficiency is improved by 3-5 times. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] FIG1 is a schematic diagram of the structure of the automatic crucible crushing device for preparing single crystal silicon according to the present invention;

[0020] FIG2 is a partial enlarged view of the crushing mechanism in the automatic crushing device for preparing single crystal silicon crucible of the utility model;

[0021] FIG. 3 is a schematic diagram of the structure of the walking clamping mechanism in the automatic crushing device for the crucible used for preparing single crystal silicon of the present invention.

[0022] Figure numerals: 1. frame; 2. crushing mechanism; 3. walking clamping mechanism; 4. slewing support mechanism; 5. lifting mechanism; 6. lifting cylinder; 7. walking slide rail; 8. clamping seat; 9. crushing frame; 10. slewing motor; 11. slewing drive gear; 12. slewing bearing; 13. folding cylinder; 14. crushing arm; 15. connecting plate; 16. crushing arm folding block; 17. folding adjustment plate; 18. crushing cutter head; 19. crushing cutter frame; 20. cutter head replacement motor; 21. gear box; 22. rack plate; 23. walking clamping frame; 24. walking clamping slide seat; 25. clamping roller; 26. guide rod; 27. centering connecting plate; 28. connecting rod; 29. ​​centering cylinder. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0024] like Figure 1-3 The utility model is a structural schematic diagram of an automatic crucible crushing device for preparing single crystal silicon. The utility model is an automatic crucible crushing device for preparing single crystal silicon, comprising a frame 1, on which a rotary support mechanism 4, a walking clamping mechanism 3 and a crushing mechanism 2 located above the rotary support mechanism 4 are arranged, and lifting mechanisms 5 are arranged on both sides of the frame 1.

[0025] The lifting mechanism 5 includes a pair of lifting cylinders 6 symmetrically arranged on both sides of the frame 1 and a lifting frame located on the top of the lifting cylinders 6;

[0026] The crushing mechanism 2 includes a crushing frame 9 installed in the middle of the lifting frame, crushing arms 14 evenly distributed around the crushing frame 9, and a crushing cutter head 18 arranged at the bottom of the crushing arm 14;

[0027] The rotary support mechanism 4 includes a rotary seat for supporting the crucible, a rotary bearing 12 supported in the rotary seat, and a rotary mechanism for driving the rotary seat to rotate;

[0028] The walking clamping mechanism 3 includes a transversely arranged walking slide rail 7, a walking clamping frame 23 sliding on the walking slide rail 7, a pair of walking clamping slides 24 moving longitudinally and toward each other along the walking clamping frame 23, and a clamping seat 8 arranged on the walking clamping slide 23.

[0029] This embodiment is provided with a walking clamping mechanism, a rotating support mechanism and a crushing mechanism. The self-walking clamping mechanism extends the clamp to send the crucible to the crucible crushing position and continues to clamp the crucible for fixing. The crushing mechanism opens the crushing head and rotates according to the inner diameter of the crucible. The crushing mechanism descends at a uniform speed to crush the crucible. According to the requirements of crushing, the rotary mechanism carries the crucible to rotate a certain angle. The above actions are repeated for multiple times to automatically crush. Under the premise of not damaging the crucible side, the crushing of the crucible is solved efficiently and quickly and the damage to the crucible side is reduced. Compared with manual processing, the production efficiency is improved by 3-5 times.

[0030] In a preferred embodiment, the rotary mechanism includes a rotary motor 10, an active bevel gear arranged on the motor shaft of the rotary motor 10, a driven bevel gear meshing with the active bevel gear, a rotary drive gear 11 coaxial with the driven bevel gear, and a large gear arranged on the side wall of the rotary seat and meshing with the rotary drive gear 11. In this embodiment, the structure works through the rotary motor 10 to drive the active bevel gear, the driven bevel gear, the rotary drive gear 11, the large gear and the rotary seat to rotate, thereby realizing the deflection angle of the crucible.

[0031] In a preferred embodiment, a pair of clamping rollers 25 for clamping the side wall of the crucible are provided on the clamping seat 8. This structure of the present embodiment makes the clamping seat 8 compact, and the gap between the pair of clamping rollers 25 is used to clamp one side of the crucible, which facilitates clamping.

[0032] In a preferred embodiment, a hinge shaft and a centering connecting plate 27 are provided in the middle of the walking clamping frame 3, a hinge hole adapted to the hinge shaft is provided in the middle of the centering connecting plate 27, and the walking clamping slides 24 are hingedly connected to the ends of the centering connecting plate 27 through connecting rods 28, and a centering cylinder 29 is provided between a pair of walking clamping slides 24. In this embodiment, the structure is actuated by the centering cylinder 29, and the piston rod is extended to make the pair of walking clamping slides 24 move to both sides at the same time to open the walking clamping frame 3, and the piston rod is retracted to make the pair of walking clamping slides 24 move to the middle at the same time to close the walking clamping frame 3, thereby realizing clamping.

[0033] In a preferred embodiment, the frame 1 is provided with 2-3 guide rods 26 which are sleeved on the traveling clamping slide 24. This structure of the present embodiment is beneficial for the traveling clamping slide 24 to move smoothly during the clamping process.

[0034] In a preferred embodiment, a rack plate 22 arranged parallel to the walking rail 7 is provided on one side thereof, and a walking motor and a gear connected to the walking motor and meshed with the rack plate are provided on the walking clamping frame 23. The structure of this embodiment utilizes the rotation of the walking motor to drive the gear to rotate, and utilizes the reaction force between the gear and the rack plate to realize the movement of the walking clamping frame 23 on the walking rail 7.

[0035] In a preferred embodiment, a crushing arm folding mechanism is provided on the crushing frame 9, and the crushing arm folding mechanism includes a folding cylinder 13 vertically arranged in the middle of the crushing frame 9, a crushing arm folding block 16 located at the bottom of the folding cylinder 13, a pair of connecting plates 15 hinged at the upper and lower parts of the crushing arm 14, and a folding adjustment plate 17 hingedly connected to the middle of the lower end connecting plate, the other ends of the pair of connecting plates 15 are respectively hingedly connected to the upper and lower parts of the crushing frame 9, and the other ends of the folding adjustment plates 17 are hinged on the crushing arm folding block 16. In this structure of the present embodiment, the folding cylinder 13 moves downward, and the piston rod of the crushing arm folding block 16 moves downward, driving the folding adjustment plate 17 and the crushing arm 14 to move downward, so that the crushing arm 14 is folded inwardly; conversely, the piston rod of the folding cylinder 13 moves upward, and the crushing arm folding block 16 moves upward, driving the folding adjustment plate 17 and the crushing arm 14 to move upward, so that the crushing arm 14 is opened outward, thereby facilitating the folding of the crushing arm to adjust the crushing position of the crushing cutter head.

[0036] In a preferred embodiment, a crushing tool holder 19 is provided at the lower part of the crushing arm 14, and a cutter head replacement motor 20 for driving the crushing tool holder 19 to rotate and a gear box 21 connected to the cutter head replacement motor 20 are provided on the lower outer wall of the crushing arm 14, and the output shaft on the gear box is installed in the middle of the crushing tool holder 19, and three crushing cutter heads 18 are provided and distributed on the outer wall of the crushing tool holder 19, and the crushing parts of the three crushing cutter heads 18 are different. The structure of this embodiment is driven by the cutter head replacement motor 20, which is convenient for replacing the crushing cutter head 18 on the bottom crushing station, and the purpose of changing the crushing position is achieved by replacing the crushing cutter head 18.

[0037] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. An automatic crucible crushing device for preparing single crystal silicon, comprising a frame, characterized in that: The frame is provided with a slewing support mechanism, a walking clamping mechanism and a crushing mechanism located above the slewing support mechanism, and lifting mechanisms are provided on both sides of the frame; The lifting mechanism includes a pair of lifting cylinders symmetrically arranged on both sides of the frame and a lifting frame located on the top of the lifting cylinders; The crushing mechanism comprises a crushing frame installed in the middle of the lifting frame, crushing arms evenly distributed around the crushing frame, and a crushing cutter head arranged at the bottom of the crushing arm; The rotary support mechanism comprises a rotary seat arranged for supporting the crucible, a rotary bearing supported in the rotary seat, and a rotary mechanism for driving the rotary seat to rotate; The walking clamping mechanism comprises a walking slide rail arranged transversely, a walking clamping frame sliding on the walking slide rail, a pair of walking clamping slide seats moving longitudinally and towards each other along the walking clamping frame, and a clamping seat arranged on the walking clamping slide seat.

2. The automatic crushing device for a crucible for preparing single crystal silicon according to claim 1, characterized in that: The rotary mechanism comprises a rotary motor, a driving bevel gear arranged on the motor shaft of the rotary motor, a driven bevel gear meshing with the driving bevel gear, a rotary drive gear coaxial with the driven bevel gear, and a large gear arranged on the side wall of the rotary seat and meshing with the rotary drive gear.

3. The automatic crushing device for a crucible for preparing single crystal silicon according to claim 1, characterized in that: The clamping seats are each provided with a pair of clamping rollers for clamping the side wall of the crucible.

4. The automatic crushing device for a crucible for preparing single crystal silicon according to claim 3, characterized in that: A hinge shaft and a centering connecting plate are arranged in the middle of the travel clamping frame, a hinge hole adapted to the hinge shaft is arranged in the middle of the centering connecting plate, the travel clamping slides are hingedly connected to the ends of the centering connecting plate through connecting rods, and a centering cylinder is arranged between a pair of the travel clamping slides.

5. The automatic crushing device for a crucible for preparing single crystal silicon according to claim 4, characterized in that: The frame is provided with 2-3 guide rods which are sleeved on the walking clamping slide.

6. The automatic crushing device for a crucible for preparing single crystal silicon according to claim 1, characterized in that: A rack plate arranged parallel to the walking slide rail is arranged on one side thereof, and a walking motor and a gear connected to the walking motor and meshed with the rack plate are arranged on the walking clamping frame.

7. The automatic crushing device for a crucible for preparing single crystal silicon according to claim 1, characterized in that: The crushing frame is provided with a crushing arm folding mechanism, which includes a folding cylinder vertically arranged in the middle of the crushing frame, a crushing arm folding block located at the bottom of the folding cylinder, a pair of connecting plates hinged at the upper and lower parts of the crushing arm, and a folding adjustment plate hingedly connected to the middle part of the lower end connecting plate, the other ends of the pair of connecting plates are respectively hingedly connected to the upper and lower parts of the crushing frame, and the other ends of the folding adjustment plates are hinged to the crushing arm folding block.

8. The automatic crushing device for a crucible for preparing single crystal silicon according to claim 1, characterized in that: A crushing tool holder is arranged at the lower part of the crushing arm, and a cutter head replacement motor for driving the crushing tool holder to rotate and a gear box connected to the cutter head replacement motor are arranged on the outer wall of the lower part of the crushing arm. The output shaft on the gear box is installed in the middle part of the crushing tool holder. The crushing cutter heads are arranged in three numbers and distributed on the outer wall of the crushing tool holder, and the crushing parts of the three crushing cutter heads are different.

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