Production process of one-step molding isostatic pressing graphite for semiconductor

Abstract

The invention belongs to the technical field of semiconductor production equipment, and discloses a production process of one-step molding isostatic pressing graphite for a semiconductor. The method comprises the following steps: S1, calcining petroleum coke and pitch coke at the temperature of subzero DEG C to remove moisture and volatile components, and adding additives including carbon black and artificial graphite as required; s2, putting the ground powder and a coal pitch adhesive into a heating type kneading machine according to a ratio, and carrying out primary kneading; the motion mode that the second rotating rod and the stirring blades are ingeniously driven through rotation and vertical reciprocating motion of the first rotating rod is adopted, so that the second rotating rod and the stirring blades conduct efficient rotation motion around the axes of the second rotating rod and the stirring blades, vertical reciprocating mixing motion is achieved in the vertical direction, and it is ensured that raw materials are fully stirred and mixed in the horizontal direction through rotation motion; the adhesion between aggregates and particles in the raw materials can be broken, so that various components can be uniformly distributed, and the mixing and kneading uniformity is further enhanced through the up-and-down reciprocating mixing motion.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor production equipment, in particular to a production process of one-step forming isostatic graphite for semiconductors. Background Art

[0002] Isostatic graphite is a new type of graphite material with a series of excellent properties. The production process of one-shot isostatic graphite for semiconductors is mainly based on the excellent properties of isostatic graphite and its key applications in the semiconductor industry. Through advanced production technology and strict quality control, high-quality one-shot isostatic graphite products can be produced to meet the semiconductor industry's demand for high-performance materials.

[0003] Usually, kneading is a crucial step before compression molding. Traditional kneading devices mainly rely on a driving power source to drive the stirring blade to perform a single rotational motion to mix and knead the raw materials. However, this single rotation method has obvious limitations: first, it leads to a long kneading time. Since the stirring blade only mixes the raw materials by rotation, this single stirring mode may not be able to effectively break the adhesion between agglomerates and particles in the raw materials, thereby extending the time required for the kneading process. Secondly, a single rotation is difficult to improve the fluidity and plasticity of the raw materials. The particles and fibers in the raw materials may not be fully intertwined and fused during the rotation process, resulting in the formed mixture being not tight and uniform enough. This mixture may encounter the problem of insufficient fluidity in the subsequent compression molding process, and it is difficult to flow smoothly into the mold or production equipment. At the same time, due to the unevenness of the mixture, its plasticity may also be limited, and the shape and size cannot be flexibly adjusted as needed. Therefore, it needs to be improved and optimized. Summary of the invention

[0004] In order to solve the problems proposed in the above background technology that the single rotary stirring method leads to long kneading time, poor raw material fluidity and plasticity, and uneven mixture, which makes it difficult to meet the high requirements of compression molding, the present invention provides a production process for one-time molding isostatic graphite for semiconductors.

[0005] To achieve the above object, the present invention provides the following technical solution: a production process of one-step molding isostatic graphite for semiconductors, comprising the following steps;

[0006] S1. calcining petroleum coke and asphalt coke at ℃ to remove moisture and volatiles, and adding additives including carbon black and artificial graphite as needed;

[0007] S2, putting the ground powder and coal tar binder into a heating kneading machine in proportion for preliminary kneading, so that a layer of asphalt is evenly attached to the surface of the powder coke particles;

[0008] S3, the kneaded paste is crushed, stirred and mixed evenly, and used as a molding material. The pressed powder is filled into a rubber mold by cold isostatic pressing technology, and the pressed powder is compacted by high-frequency electromagnetic vibration, and then sealed and vacuumed to remove the air between the powder particles;

[0009] S4, roasting the pressed material, the temperature in the roasting furnace is uniform, the roasted product is preheated, vacuumed and degassed in the impregnation tank, and then the melted coal tar is added to the impregnation tank, and pressurized to allow the impregnating agent asphalt to enter the interior of the product;

[0010] S5. Heat the impregnated and calcined product to about ℃ to carbonize the asphalt into a graphite structure.

[0011] Preferably, the heating kneading machine in S comprises a temperature control box, wherein a preliminary kneading box, a feeding box and a deep kneading box are fixedly installed in sequence from top to bottom inside the temperature control box, wherein the preliminary kneading box, the feeding box and the deep kneading box are respectively connected through hollow tubes, wherein each of the hollow tubes is respectively provided with a one-way valve inside, wherein a feeding port is provided at the top of the preliminary kneading box, and a discharging port is provided at the bottom of the deep kneading box, wherein a worm is rotatably installed at the top of the deep kneading box, and a gear 2 is fixedly sleeved on the outer wall of the worm, and a rotating rod 1 is rotatably installed at the top center of the deep kneading box, and the bottom end of the rotating rod 1 extends into the deep kneading box, and a gear 3 and a plurality of annular sheets are fixedly sleeved on the top outer wall of the deep kneading box, wherein the gear 2 is located above the plurality of annular sheets, and the gear 3 is meshed with the gear 2.

[0012] Preferably, a second motor is fixedly mounted on the top of the preliminary kneading box, a third rotating rod is fixedly mounted on the output shaft of the second motor, and a plurality of L-shaped stirring blades are fixedly mounted on the outer wall of the third rotating rod.

[0013] Preferably, a motor 1 is fixedly mounted on the top of the deep kneading box, a gear 1 is fixedly sleeved on the output shaft of the motor 1, and the gear 1 is meshed with a gear 2.

[0014] Preferably, a fixing block 1 and a fixing block 2 are fixedly installed on the top of the deep kneading box, a turbine and a gear 4 are rotatably installed on the sides of the fixing block 1 and the fixing block 2 close to each other, a connecting rod 1 and a connecting rod 2 are hingedly installed on the sides of the fixing block 2 and the gear 4 close to each other, a connecting rod 3 is hingedly installed on the sides of the connecting rod 1 and the connecting rod 2 close to each other, and the gear 4 is meshed with the circular ring sheet.

[0015] Preferably, a mounting frame is fixedly sleeved on the outer wall of the rotating rod 1, a plurality of rotating rods 2 are rotatably mounted on the bottom of the mounting frame, and a plurality of stirring blades are fixedly sleeved on the outer walls of the plurality of rotating rods 2 respectively.

[0016] Preferably, a plurality of rectangular frames are fixedly sleeved on the outer wall of the rotating rod 1, the plurality of rectangular frames are all located below the mounting frame, and the plurality of rectangular frames are designed to be distributed in a spiral shape with the rotating rod 1 as the center.

[0017] Preferably, the sides of the plurality of rectangular frames away from the rotating rod are respectively designed to be arc-shaped, and are all in contact with the inner wall of the deep kneading box.

[0018] Preferably, the plurality of L-shaped stirring blades are divided into two groups, an upper group and an lower group, and the two groups of connecting rods are respectively designed to be distributed in circles with equal distances around the rotating rod three as the center.

[0019] Preferably, a motor three is fixedly mounted on an outer wall of one side of the temperature control box, a rotating rod three is fixedly mounted on the output shaft of the motor three, a section of the rotating rod three extends into the feed box and is rotatably connected to the feed box, and an auger is fixedly sleeved on the outer wall of the rotating rod three.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] The present invention ingeniously drives the motion mode of the second rotating rod and the stirring blades through the rotation and vertical reciprocating motion of the first rotating rod, so that they not only perform efficient rotational motion around their own axes, but also realize up and down reciprocating mixing motion in the vertical direction. The rotational motion ensures that the raw materials are fully stirred and mixed in the horizontal direction, which helps to break the adhesion between the agglomerates and particles in the raw materials, so that various components can be evenly distributed, and the up and down reciprocating mixing motion further enhances the uniformity of kneading, which enables the raw materials to be continuously exchanged and mixed in the vertical direction, avoiding the problems of kneading dead angles and local uneven concentration, which is different from the traditional On the device side, the compound motion mode also significantly improves the kneading efficiency. The combination of rotation and up and down reciprocating motion enables the stirring blades to cut, squeeze and knead the raw materials more effectively, thereby accelerating their physical and chemical changes and shortening the kneading time. The compound motion mode also helps to improve the fluidity and plasticity of the raw materials. Through continuous stirring and mixing, the particles and fibers in the raw materials can be intertwined and fused to form a more compact and uniform mixture. This mixture not only has better fluidity and can flow more smoothly into the mold or production equipment, but also has high plasticity and can adjust its shape and size as needed.

[0022] The present invention uses a spirally distributed rectangular frame design to enable the raw materials to be subjected to a more uniform and continuous stirring force during the kneading process. As the rotating rod rotates, the rectangular frame moves along a spiral trajectory, constantly changing the position and state of the raw materials, thereby achieving a more efficient kneading effect. This design avoids local accumulation and dead corners of the raw materials during the kneading process, ensuring uniform mixing of the raw materials. In addition, the spirally distributed design of the rectangular frame also has a certain self-cleaning function. During the kneading process, as the rectangular frame rotates and moves, they will continuously scrape the inner wall of the kneading box, thereby removing the raw material residues attached to the wall surface. This self-cleaning function helps to maintain the cleanliness of the kneading box, extend the service life of the equipment, and reduce the downtime for maintenance during the production process. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of the structure of the present invention;

[0024] Figure 2 This is a schematic diagram of the internal structure of the temperature control box of the present invention;

[0025] Figure 3 This is a schematic diagram of the internal structure of the preliminary kneading box of the present invention;

[0026] Figure 4 This is a schematic diagram of the front cross-sectional structure of the feeding box of the present invention;

[0027] Figure 5 This is a schematic diagram of the front cross-sectional structure of the deep kneading box of the present invention;

[0028] Figure 6 It is a schematic diagram of the local structure of the present invention;

[0029] Figure 7 It is a schematic diagram of the partial explosion structure of the present invention;

[0030] Figure 8 It is a schematic diagram of the structure of the circular ring sheet of the present invention.

[0031] In the figure: 1. temperature control box; 2. preliminary kneading box; 3. feeding box; 4. deep kneading box; 5. motor 1; 6. gear 1; 7. worm rod; 8. gear 2; 9. rotating rod 1; 10. gear 3; 11. circular ring; 12. mounting frame; 13. rotating rod 2; 14. stirring blade; 15. fixed block 1; 16. turbine; 17. connecting rod 1; 18. fixed block 2; 19. gear 4; 20. connecting rod 2; 21. connecting rod 3; 22. rectangular frame; 23. motor 2; 24. rotating rod 3; 25. L-shaped stirring blade; 26. motor 3; 27. rotating rod 3; 28. auger; 29. ​​hollow tube; 30. feeding port; 31. discharging port. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0033] like Figures 1 to 8 As shown, the present invention provides a production process of one-step forming isostatic graphite for semiconductors, comprising the following steps:

[0034] S1. calcining petroleum coke and asphalt coke at 1200-1400°C to remove moisture and volatiles, and adding additives including carbon black and artificial graphite as needed;

[0035] S2, putting the ground powder and coal tar binder into a heating kneading machine in proportion for preliminary kneading, so that a layer of asphalt is evenly attached to the surface of the powder coke particles;

[0036] S3, the kneaded paste is crushed, stirred and mixed evenly, and used as a molding material. The pressed powder is filled into a rubber mold by cold isostatic pressing technology, and the pressed powder is compacted by high-frequency electromagnetic vibration, and then sealed and vacuumed to remove the air between the powder particles;

[0037] S4, roasting the pressed material, the temperature in the roasting furnace is uniform, the roasted product is preheated, vacuumed and degassed in the impregnation tank, and then the melted coal tar is added to the impregnation tank, and pressurized to allow the impregnating agent asphalt to enter the interior of the product;

[0038] S5. The impregnated and calcined product is heated to about 3000° C. to carbonize the asphalt into a graphite structure.

[0039] like Figures 5 and 6 As shown, the heating kneading machine in S2 includes a temperature control box 1, and a preliminary kneading box 2, a feeding box 3 and a deep kneading box 4 are fixedly installed in the temperature control box 1 from top to bottom in sequence. The preliminary kneading box 2, the feeding box 3 and the deep kneading box 4 are respectively connected through a hollow tube 29, and a one-way valve is respectively arranged inside each hollow tube 29. A feeding port 30 is provided at the top of the preliminary kneading box 2, and a discharging port 31 is provided at the bottom of the deep kneading box 4. A worm 7 is rotatably installed on the top of the deep kneading box 4, and a gear 2 8 is fixedly sleeved on the outer wall of the worm 7. A rotating rod 1 9 is rotatably installed at the top center of the deep kneading box 4, and the bottom end of the rotating rod 1 9 extends into the deep kneading box 4. A gear 3 10 and a plurality of annular plates 11 are fixedly sleeved on the top outer wall of the deep kneading box 4, and the gear 2 8 is located above the plurality of annular plates 11, and the gear 3 10 is meshed with the gear 2 8.

[0040] The rotation and vertical reciprocating motion of the rotating rod 1 9 cleverly drives the movement mode of the rotating rod 2 13 and the stirring blade 14, so that they not only perform efficient rotational motion around their own axis, but also realize reciprocating mixing motion in the vertical direction. The rotational motion ensures that the raw materials are fully stirred and mixed in the horizontal direction, which helps to break the adhesion between the agglomerates and particles in the raw materials, so that various components can be evenly distributed, and the reciprocating mixing motion further enhances the uniformity of kneading, which enables the raw materials to be continuously exchanged and mixed in the vertical direction, avoiding the problems of kneading dead angles and local uneven concentration, which is different from the traditional On both sides of the device, the composite motion mode also significantly improves the kneading efficiency. The combination of rotation and up and down reciprocating motion enables the stirring blade 14 to cut, squeeze and knead the raw materials more effectively, thereby accelerating its physical and chemical change process and shortening the kneading time. The composite motion mode also helps to improve the fluidity and plasticity of the raw materials. Through continuous stirring and mixing, the particles and fibers in the raw materials can be intertwined and fused with each other to form a more compact and uniform mixture. This mixture not only has better fluidity and can flow more smoothly into the mold or production equipment, but also has higher plasticity and can adjust its shape and size as needed.

[0041] like Figure 6 As shown, a second motor 23 is fixedly mounted on the top of the preliminary kneading box 2, a third rotating rod 24 is fixedly mounted on the output shaft of the second motor 23, and a plurality of L-shaped stirring blades 25 are fixedly mounted on the outer wall of the third rotating rod 24.

[0042] By using the motor 23 as a power source and accurately controlling the rotation speed and direction of the motor 23, accurate stirring of the raw materials can be achieved, thereby meeting the initial mixing uniformity of the raw materials in the production of one-step isostatic graphite for semiconductors.

[0043] like Figure 6 As shown, a motor 5 is fixedly installed on the top of the deep kneading box 4, and a gear 6 is fixedly sleeved on the output shaft of the motor 5, and the gear 6 is meshed with the gear 2 8.

[0044] By using motor 1 5 as the power source of the entire mixing system, the meshing design of gear 1 6 and gear 2 8 realizes efficient power transmission. The meshing of the gears also has a certain self-locking function, which can prevent the backflow or leakage of raw materials caused by unexpected shutdown or failure to a certain extent.

[0045] like Figure 6As shown, a fixing block 15 and a fixing block 2 18 are fixedly installed on the top of the deep kneading box 4, and a turbine 16 and a gear 4 19 are rotatably installed on the side where the fixing block 15 and the fixing block 2 18 are close to each other, respectively. A connecting rod 17 and a connecting rod 20 are hingedly installed on the side where the fixing block 2 18 and the gear 4 19 are close to each other, and a connecting rod 3 21 is hingedly installed on the side where the connecting rod 17 and the connecting rod 2 20 are close to each other, and the gear 4 19 is meshed with the annular sheet 11.

[0046] The rotation design of the turbine 16 and the gear 4 19 provides a strong stirring power for the raw materials in the deep kneading box 4. The power generated by the rotation of the turbine 16 can drive the gear 4 19 and its connected connecting rod mechanism to move. This design allows the raw materials to be stirred in all directions during the kneading process, thereby achieving a more uniform mixing effect.

[0047] like Figure 7 As shown, a mounting frame 12 is fixedly sleeved on the outer wall of the rotating rod 1 9, and a plurality of rotating rods 13 are rotatably mounted on the bottom of the mounting frame 12. A plurality of stirring blades 14 are fixedly sleeved on the outer walls of the plurality of rotating rods 13 respectively.

[0048] By rotating the rotating rod 1 9, the mounting frame 12 and the rotating rod 2 13 and the stirring blade 14 thereunder are driven to rotate together, thereby generating strong shearing force and stirring force, so that the particles in the raw materials are fully dispersed and mixed evenly. This design not only improves the uniformity of kneading, but also helps to reduce bubbles and voids in the raw materials, improve the density and quality of the product, thereby achieving comprehensive and efficient stirring and mixing of the raw materials.

[0049] like Figure 7 As shown, a plurality of rectangular frames 22 are fixedly sleeved on the outer wall of the rotating rod 9, and the plurality of rectangular frames 22 are all located below the mounting frame 12. The plurality of rectangular frames 22 are designed to be distributed in a spiral shape with the rotating rod 9 as the center.

[0050] The design of the spirally distributed rectangular frame 22 allows the raw materials to be subjected to a more uniform and continuous stirring force during the kneading process. As the rotating rod 9 rotates, the rectangular frame 22 moves along the spiral trajectory, constantly changing the position and state of the raw materials, thereby achieving a more efficient kneading effect. This design avoids local accumulation and dead corners of the raw materials during the kneading process, ensuring uniform mixing of the raw materials. In addition, the spirally distributed design of the rectangular frame 22 also has a certain self-cleaning function. During the kneading process, as the rectangular frame 22 rotates and moves, they will continuously scrape the inner wall of the deep kneading box 4, thereby removing the raw material residues attached to the wall surface. This self-cleaning function helps to maintain the cleanliness of the kneading box, extend the service life of the equipment, and reduce the downtime for maintenance during the production process.

[0051] like Figure 5As shown, the sides of the plurality of rectangular frames 22 away from the rotating rod 9 are respectively designed in an arc shape, and are all in contact with the inner wall of the deep kneading box 4.

[0052] The edge of the arc-shaped rectangular frame 22 is closely fitted to the inner wall of the deep kneading box 4 , so that the rectangular frame 22 can highly clean the inner wall of the deep kneading box 4 .

[0053] like Figure 3 As shown, a plurality of L-shaped stirring blades 25 are divided into two groups, an upper group and an lower group, and the two groups of connecting rods 17 are respectively designed to be distributed in circles with equal distances around the rotating rod 3 24 as the center.

[0054] The distribution design of the upper and lower groups of L-shaped stirring blades makes the stirring process more three-dimensional and comprehensive. The upper group of stirring blades can fully contact and stir the raw materials on the upper part of the feeding box 3, while the lower group of stirring blades focuses on stirring the raw materials in the lower part, ensuring that the raw materials in the entire feeding box can be evenly and fully mixed. This design effectively avoids the accumulation and dead corners of raw materials during the stirring process, and improves the stirring efficiency and uniformity.

[0055] like Figure 4 As shown, a motor 3 26 is fixedly mounted on an outer wall of one side of the temperature control box 1, a rotating rod 3 24 is fixedly mounted on the output shaft of the motor 3 26, a section of the rotating rod 3 24 extends into the feeding box 3 and is rotatably connected to the feeding box 3, and an auger 28 is fixedly sleeved on the outer wall of the rotating rod 3 24.

[0056] By using the motor three 26 as the power source, the rotating rod three 24 fixedly mounted on its output shaft can stably and continuously transmit torque, ensuring the smooth operation of the auger 28 in the feed box 3. The outer wall of the auger 28 fits tightly against the rotating rod three 24, and through its spiral structural design, it realizes effective transportation and mixing of the graphite raw materials, greatly improving the uniformity and efficiency of raw material processing.

[0057] The working principle and use process of the present invention:

[0058] The raw materials enter the preliminary kneading stage through the feed port 30 at the top of the preliminary kneading box 2, the motor 23 is started, and its output shaft drives the rotating rod 3 24 to rotate, and the L-shaped stirring blade 25 on the outer wall of the rotating rod 3 24 performs preliminary stirring and mixing on the raw materials to ensure the preliminary uniformity of the raw materials. The raw materials after preliminary kneading pass through the hollow tube 29 in which a one-way valve is provided to prevent backflow and enter the feeding box 3, the motor 3 26 is started, and its output shaft also drives the rotating rod 3 24 to rotate, but at this time the auger 28 on the rotating rod 3 24 plays a role, pushing the raw materials from the bottom to the top of the feeding box 3, and enters the deep kneading box 4 through another hollow tube 29. After the raw materials enter the deep kneading box 4, by starting the motor 1 5, the output shaft of the motor 1 5 rotates to drive the gear 1 6 to rotate, and through the mutual engagement of the gear 1 6, the gear 2 8 and the gear 3 10, the rotating rod 1 9 and the rotating rod 1 9 are driven to rotate, and through The rotation of the rotating rod 1 9 drives the rectangular frame 22 and the rotating rod 2 13 to rotate, and the rotating rod 2 13 drives the stirring blade 14 to rotate, thereby kneading the raw materials inside the deep kneading box 4, and the engagement of the worm 7 with the turbine 16 drives the turbine 16 to rotate, and the turbine 16 drives the connecting rod 1 17 to rotate. Through the connecting rod action of the connecting rod 3 21 and the connecting rod 2 20, the connecting rod 2 20 drives the gear 4 19 to rotate forward and reverse repeatedly, and the engagement of the gear 4 19 with the annular sheet 11 drives the rotating rod 1 9 to reciprocate vertically up and down, and the rotating rod 2 13 is rotated and reciprocated up and down through the rotating rod 1 9. The raw materials that have been deeply kneaded are discharged through the discharge port 31 at the bottom of the deep kneading box 4, and are ready for the subsequent isostatic pressing process. During the entire kneading process, the temperature control box 1 is responsible for maintaining an appropriate temperature environment to ensure that the physical and chemical changes of the raw materials can proceed smoothly.

[0059] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0060] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A production process for isostatically pressed graphite for semiconductors, characterized in that: The steps include: S1. calcining petroleum coke and asphalt coke at 1200-1400°C to remove moisture and volatiles, and adding additives including carbon black and artificial graphite as needed; S2, putting the ground powder and coal tar binder into a heating kneading machine in proportion for preliminary kneading, so that a layer of asphalt is evenly attached to the surface of the powder coke particles; S3, the kneaded paste is crushed, stirred and mixed evenly, and used as a molding material. The pressed powder is filled into a rubber mold by cold isostatic pressing technology, and the pressed powder is compacted by high-frequency electromagnetic vibration, and then sealed and vacuumed to remove the air between the powder particles; S4, roasting the pressed material, the temperature in the roasting furnace is uniform, the roasted product is preheated, vacuumed and degassed in the impregnation tank, and then the melted coal tar is added to the impregnation tank, and pressurized to allow the impregnating agent asphalt to enter the interior of the product; S5. The impregnated and calcined product is heated to about 3000° C. to carbonize the asphalt into a graphite structure.

2. A production device for isostatically pressed graphite for semiconductors, using the production process for isostatically pressed graphite for semiconductors as claimed in claim 1, wherein the heating kneading machine in S2 comprises a temperature control box (1), characterized in that: A preliminary kneading box (2), a feeding box (3) and a deep kneading box (4) are fixedly installed in sequence from top to bottom in the temperature control box (1); the preliminary kneading box (2), the feeding box (3) and the deep kneading box (4) are respectively connected through hollow tubes (29); each of the hollow tubes (29) is respectively provided with a one-way valve; a feed inlet (30) is provided at the top of the preliminary kneading box (2); a discharge outlet (31) is provided at the bottom of the deep kneading box (4); and a discharge outlet (32) is provided at the top of the deep kneading box (4). A worm (7) is rotatably mounted, and a second gear (8) is fixedly sleeved on the outer wall of the worm (7). A first rotating rod (9) is rotatably mounted at the top center of the deep kneading box (4), and the bottom end of the first rotating rod (9) extends into the deep kneading box (4). A third gear (10) and a plurality of circular ring pieces (11) are fixedly sleeved on the top outer wall of the deep kneading box (4). The second gear (8) is located above the plurality of circular ring pieces (11), and the third gear (10) is meshed with the second gear (8).

3. The production equipment for isostatically pressed graphite for semiconductors according to claim 2, characterized in that: A second motor (23) is fixedly mounted on the top of the preliminary kneading box (2), a third rotating rod (24) is fixedly mounted on the output shaft of the second motor (23), and a plurality of L-shaped stirring blades (25) are fixedly mounted on the outer wall of the third rotating rod (24).

4. The production equipment for isostatically pressed graphite for semiconductors according to claim 2, characterized in that: A motor 1 (5) is fixedly mounted on the top of the deep kneading box (4), and a gear 1 (6) is fixedly sleeved on the output shaft of the motor 1 (5), and the gear 1 (6) is meshed with a gear 2 (8).

5. The production equipment for isostatically pressed graphite for semiconductors according to claim 2, characterized in that: The top of the deep kneading box (4) is fixedly installed with a fixed block 1 (15) and a fixed block 2 (18); a turbine (16) and a gear 4 (19) are rotatably installed on the sides of the fixed block 1 (15) and the fixed block 2 (18) close to each other; a connecting rod 1 (17) and a connecting rod 2 (20) are hingedly installed on the sides of the fixed block 2 (18) and the gear 4 (19) close to each other; a connecting rod 3 (21) is hingedly installed on the sides of the connecting rod 1 (17) and the connecting rod 2 (20) close to each other; and the gear 4 (19) is meshed with the circular ring sheet (11).

6. The production equipment for isostatically pressed graphite for semiconductors according to claim 2, characterized in that: A mounting frame (12) is fixedly sleeved on the outer wall of the rotating rod 1 (9), and a plurality of rotating rods 2 (13) are rotatably mounted on the bottom of the mounting frame (12), and a plurality of stirring blades (14) are fixedly sleeved on the outer walls of the plurality of rotating rods 2 (13).

7. The production equipment for isostatically pressed graphite for semiconductors according to claim 6, characterized in that: A plurality of rectangular frames (22) are fixedly sleeved on the outer wall of the rotating rod (9), and the plurality of rectangular frames (22) are all located below the mounting frame (12). The plurality of rectangular frames (22) are designed to be distributed in a spiral shape with the rotating rod (9) as the center.

8. The production equipment for isostatically pressed graphite for semiconductors according to claim 7, characterized in that: The sides of the plurality of rectangular frames (22) away from the rotating rod (9) are respectively designed in an arc shape, and are all fitted with the inner wall of the deep kneading box (4).

9. The production equipment for isostatically pressed graphite for semiconductors according to claim 3, characterized in that: The plurality of L-shaped stirring blades (25) are divided into two groups, an upper group and an lower group, and the two groups of connecting rods (17) are respectively designed to be distributed in circles with equal distances around the rotating rod (24) as the center.

10. The production equipment for isostatically pressed graphite for semiconductors according to claim 2, characterized in that: A motor three (26) is fixedly mounted on an outer wall of one side of the temperature control box (1); a rotating rod three (24) is fixedly mounted on the output shaft of the motor three (26); a section of the rotating rod three (24) extends into the feed box (3) and is rotatably connected to the feed box (3); and an auger (28) is fixedly sleeved on the outer wall of the rotating rod three (24).

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