Cooling system for vacuum ion plating equipment

Abstract

The invention relates to a cooling system for vacuum ion plating equipment, which comprises a liquid inlet distribution unit, a liquid outlet distribution unit, a heat exchange unit and an adjusting unit, each plating source device is arranged on a plating chamber, the plating chamber is provided with a cooling cavity unit A, each plating source device is provided with a cooling cavity unit B, and each cooling cavity unit B is provided with a cooling cavity unit C; the adjusting unit is used for adjusting the flow velocity or flow of the fluid, a detection unit is further arranged on the coating chamber, the detection unit transmits a detected signal to the control unit to be analyzed and processed, and the control unit regulates and controls the operation state of each component according to an analysis and processing result. According to the technical scheme provided by the invention, the water flow is regulated and controlled, so that the temperature of the coating chamber is accurately controlled, heat generated in the coating chamber is reliably discharged, the vacuum state in the coating chamber is prevented from being damaged due to temperature rise, the coating environment in the coating chamber is ensured, the service life of coating equipment and the service life of a coating source device are prolonged, and the production efficiency is improved. And the stability and uniformity of the film layer are improved.

Description

Technical Field

[0001] The invention relates to the field of vacuum coating, and in particular to a cooling system for vacuum ion coating equipment. Background Art

[0002] Vacuum ion plating is a means of giving products a layer of "super nano-coat". After vacuum ion plating, the quality and life of the products are "qualitatively" improved. Dry plating is basically "zero pollution" during the plating process. In recent years, it has been widely used in various fields such as cutting tools, molds, automobiles, aerospace, medical treatment, 3C consumer electronics and military industry. Temperature control during the plating process is the key to the quality of the film layer. In order to ensure the smooth progress of the plating work and improve the quality of the film layer, a cooling system for vacuum ion plating equipment is required. Summary of the invention

[0003] The object of the present invention is to provide a cooling system for vacuum ion plating equipment, which can meet the precise control of temperature during the vacuum ion plating process.

[0004] The technical solution adopted by the present invention is:

[0005] A cooling system for vacuum ion plating equipment, characterized in that: it includes a liquid inlet distribution unit, a liquid outlet distribution unit and a heat exchange unit, each plating source device is arranged on the plating chamber, the plating chamber has an A cooling channel unit for supplying fluid flow and for cooling the plating chamber, each plating source device has a B cooling channel unit for supplying fluid flow and for cooling the plating source device; the A cooling channel unit, the B cooling channel unit, the liquid inlet distribution unit, the liquid return collection unit, and the heat exchange unit form a flow path for circulating fluid, the liquid inlet distribution unit has various liquid inlet joint components, and each liquid inlet joint component is used to connect to the A cooling channel The liquid inlets on the A cooling channel unit and the B cooling channel unit are interconnected, the liquid return collection unit is provided with liquid return joint assemblies, and the liquid return joint assemblies are respectively used to be interconnected with the liquid outlets on the A cooling channel unit and the B cooling channel unit. The heat exchange unit is arranged between the liquid return collection unit and the liquid inlet distribution unit, and the heat exchange unit is used to reduce the temperature of the fluid. The flow passage is also provided with a regulating unit, and the regulating unit is used to regulate the flow rate or flow rate of the fluid. The coating chamber is also provided with a detection unit for detecting the temperature in the coating chamber, and the detection unit transmits the detection signal to the control unit for analysis and processing, and the control unit adjusts the operating status of each component according to the result of the analysis and processing.

[0006] A further solution is: the liquid inlet distribution unit includes an A1 liquid inlet distribution pipe arranged vertically, the upper end of the A1 liquid inlet distribution pipe is configured to be sealed, and each liquid inlet distribution connecting sub-unit is arranged at intervals along the height direction of the A1 liquid inlet distribution pipe, and each liquid inlet distribution connecting sub-unit respectively includes each liquid inlet joint assembly arranged at intervals along the circumferential direction of the A1 liquid inlet distribution pipe.

[0007] The liquid return collection unit includes a B1 liquid return collection pipe arranged vertically, the upper end of the B1 liquid return collection pipe is configured to be sealed, and liquid return collection connecting sub-units are arranged at intervals along the height direction of the B1 liquid return collection pipe, and each liquid return collection connecting sub-unit includes liquid return joint assemblies arranged at intervals along the circumference of the B1 liquid return collection pipe.

[0008] The liquid inlet joint assembly includes an A flexible joint arranged on the A1 liquid inlet distribution pipe, the A flexible joint is connected to one end of the A switch joint, the other end of the A switch joint is connected to the A pipe joint, and the A pipe joint is connected to the liquid inlet on the A cooling cavity unit or the B cooling cavity unit through the A water inlet pipe.

[0009] The liquid inlet distribution unit also includes horizontally arranged A2 liquid inlet distribution pipe and A3 liquid inlet distribution pipe. The A3 liquid inlet distribution pipe is connected to the lower end of the A1 liquid inlet distribution pipe through the A2 liquid inlet distribution pipe. The A2 liquid inlet distribution pipe is vertically arranged with the A1 liquid inlet distribution pipe and the A3 liquid inlet distribution pipe respectively. The front side of the water inlet end of the A3 liquid inlet distribution pipe is provided with an A flow meter and an A water inlet valve.

[0010] The A flowmeter is a turbine water flowmeter, which is connected to the control unit. The A water inlet valve is a ball valve. The A1 liquid inlet distribution pipe, the A2 liquid inlet distribution pipe, and the A3 liquid inlet distribution pipe are all square tubes. The liquid inlet distribution connection subunit consists of liquid inlet joint assemblies respectively arranged on the three pipe surfaces of the A1 liquid inlet distribution pipe.

[0011] The liquid return joint assembly includes a B flexible joint arranged on the B1 liquid return collection pipe, the B flexible joint is connected to one end of the B switch joint, the other end of the B switch joint is connected to one end of the B flow meter, the other end of the B flow meter is connected to the B pipe joint, and the liquid outlet on the A cooling cavity unit or the B cooling cavity unit is connected to the B pipe joint through the B return pipe.

[0012] The return liquid collection unit also includes a horizontally arranged B2 return liquid collection pipe, the B1 return liquid collection pipe and the B2 return liquid collection pipe are connected, the B1 return liquid collection pipe and the B2 return liquid collection pipe are arranged in an L shape, and a B return valve is provided at the rear side of the water outlet end of the B2 return liquid collection pipe.

[0013] The B flow meter is a CKD water flow meter, which is connected to the control unit. The B return valve is a ball valve. The B1 return liquid collecting pipe and the B2 return liquid collecting pipe are respectively composed of square tube bodies. The return liquid distribution connection subunit is composed of return liquid joint assemblies respectively arranged on the three pipe surfaces of the B1 return liquid collecting pipe.

[0014] A heating unit is also provided on the coating chamber, and the heating unit is used to heat the coating chamber. The heating unit includes heating rods arranged in the coating chamber. The detection unit is composed of temperature-controlled thermocouples arranged on the coating chamber. The heat exchange unit is composed of a chiller, and the control unit is a PLC control device.

[0015] The above-mentioned technical solution provided by the present invention can accurately control the temperature of the coating chamber by regulating the water flow rate, reliably discharge the heat generated in the coating chamber, prevent the vacuum state in the coating chamber from being destroyed due to the increase in temperature, ensure the coating environment in the coating chamber, extend the life of the coating equipment and the coating source device, and improve the stability and uniformity of the film layer. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of the present invention.

[0017] Figure 2 Schematic diagram of the liquid inlet distribution unit.

[0018] Figure 3 Schematic diagram of the liquid distribution unit.

[0019] Explanation of the figure numbers: 10-chamber body, 11-chamber door, 12-coating source device, 13-heating rod, 14-temperature control thermocouple, 15-A water inlet pipe, 16-B water return pipe, 21-A1 liquid inlet distribution pipe, 22-A3 liquid inlet distribution pipe, 23-A flow meter, 24-A water inlet valve, 25-A flexible joint, 26-A switch joint, 27-A pipe joint, 31-B1 liquid return collection pipe, 32-B2 liquid return collection pipe, 33-B water return valve, 34-B flexible joint, 35-B switch joint, 36-B flow meter, 37-B pipe joint, 40-chiller, 41-A connecting pipe, 42-B connecting pipe, 50-control device. DETAILED DESCRIPTION

[0020] In order to make the purpose and advantages of the present invention more clearly understood, the present invention is specifically described below in conjunction with embodiments. It should be understood that the following text is only used to describe one or several specific embodiments of the present invention, and does not strictly limit the scope of protection of the specific claims of the present invention.

[0021] As used herein, the terms "parallel," "perpendicular," and the like are not limited to their strict geometric definitions, but include tolerances for reasonable and inconsistent machining or human errors.

[0022] like Figures 1 to 3 As shown, a cooling system for vacuum ion plating equipment includes a liquid inlet distribution unit, a liquid outlet distribution unit and a heat exchange unit. Each plating source device 12 is arranged on the plating chamber. The plating chamber has an A cooling channel unit for supplying fluid flow and for cooling the plating chamber. Each plating source device 12 has a B cooling channel unit for supplying fluid flow and for cooling the plating source device 12. The A cooling channel unit, the B cooling channel unit, the liquid inlet distribution unit, the liquid return collection unit and the heat exchange unit form a flow path for circulating fluid. The liquid inlet distribution unit has various liquid inlet joint components, and each liquid inlet joint component is used to connect with the A cooling channel. The A channel unit and the liquid inlet on the B cooling channel unit are connected, and the liquid return joint assembly is provided on the liquid return collection unit, and each liquid return joint assembly is used to be connected with the liquid outlet on the A cooling channel unit and the B cooling channel unit, respectively. The heat exchange unit is arranged between the liquid return collection unit and the liquid inlet distribution unit, and the heat exchange unit is used to reduce the temperature of the fluid. The flow passage is also provided with a regulating unit, and the regulating unit is used to regulate the flow rate or flow of the fluid. The coating chamber is also provided with a detection unit for detecting the temperature in the coating chamber, and the detection unit transmits the detection signal to the control unit for analysis and processing, and the control unit regulates the operating status of each component according to the result of the analysis and processing. The control unit automatically regulates the water turbine flow meter on the water flow main channel, the CKD water flow meter arranged on each water flow branch channel, each coating source device, the heating unit, etc.

[0023] Specifically, Figure 2As shown, the liquid inlet distribution unit includes an A1 liquid inlet distribution pipe 21 arranged in a vertical shape, the upper end of the A1 liquid inlet distribution pipe 21 is configured to be blocked, and each liquid inlet distribution connecting subunit is arranged at intervals along the height direction of the A1 liquid inlet distribution pipe 21, and each liquid inlet distribution connecting subunit includes each liquid inlet joint assembly arranged at intervals along the circumference of the A1 liquid inlet distribution pipe 21. The liquid return collection unit includes a B1 liquid return collection pipe 31 arranged in a vertical shape, the upper end of the B1 liquid return collection pipe 31 is configured to be blocked, and each liquid return collection connecting subunit is arranged at intervals along the height direction of the B1 liquid return collection pipe 31, and each liquid return collection connecting subunit includes each liquid return joint assembly arranged at intervals along the circumference of the B1 liquid return collection pipe 31. The liquid inlet joint assembly includes an A flexible joint 25 arranged on the A1 liquid inlet distribution pipe 21, the A flexible joint 25 is connected to one end of the A switch joint 26, the other end of the A switch joint 26 is connected to the A pipe joint 27, and the A pipe joint 27 is connected to the liquid inlet on the A cooling channel unit or the B cooling channel unit through the A water inlet pipe 15. The liquid inlet distribution unit also includes a horizontally arranged A2 liquid inlet distribution pipe and an A3 liquid inlet distribution pipe 22, the A3 liquid inlet distribution pipe 22 is connected to the lower end of the A1 liquid inlet distribution pipe 21 through the A2 liquid inlet distribution pipe, and the A2 liquid inlet distribution pipe is vertically arranged with the A1 liquid inlet distribution pipe 21 and the A3 liquid inlet distribution pipe 22, respectively, and the front side of the water inlet end of the A3 liquid inlet distribution pipe 22 is provided with an A flow meter 23 and an A water inlet valve 24. The A flow meter 23 is a turbine water flow meter, the A flow meter 23 is connected to the control unit, the A water inlet valve 24 is a ball valve, the A1 liquid inlet distribution pipe 21, the A2 liquid inlet distribution pipe, and the A3 liquid inlet distribution pipe 22 are all square tube bodies, and the liquid inlet distribution connection subunit is composed of liquid inlet joint assemblies respectively arranged on the three pipe surfaces of the A1 liquid inlet distribution pipe 21.

[0024] Furthermore, Figure 3 As shown: the liquid return joint assembly includes a B flexible joint 34 arranged on the B1 liquid return collection pipe 31, the B flexible joint 34 is connected to one end of the B switch joint 35, the other end of the B switch joint 35 is connected to one end of the B flow meter 36, the other end of the B flow meter 36 is connected to the B pipe joint 37, and the liquid outlet on the A cooling channel unit or the B cooling channel unit is connected to the B pipe joint 37 through the B return pipe 16. The liquid return collection unit also includes a horizontally arranged B2 liquid return collection pipe 32, the B1 liquid return collection pipe 31 and the B2 liquid return collection pipe 32 are connected, the B1 liquid return collection pipe 31 and the B2 liquid return collection pipe 32 are arranged in an L shape, and a B return valve 33 is arranged at the rear side of the water outlet end of the B2 liquid return collection pipe 32. The B flow meter 36 is a CKD water flow meter, which is connected to the control unit. The B return valve 33 is a ball valve. The B1 return liquid collecting pipe 31 and the B2 return liquid collecting pipe 32 are respectively composed of square tube bodies. The return liquid distribution connection subunit is composed of return liquid joint assemblies respectively arranged on the three pipe surfaces of the B1 return liquid collecting pipe 31.

[0025] In detail: A heating unit is also provided on the coating chamber, and the heating unit is used to heat the coating chamber. The heating unit includes heating rods 13 provided in the coating chamber, and the detection unit is composed of temperature-controlled thermocouples 14 provided in the coating chamber. The heat exchange unit is composed of a chiller 40, and the control unit is a PLC control device 50. The liquid outlet interface of the chiller 40 is connected to the inlet of the A water inlet valve 24 through the A connecting pipe 41. The liquid inlet interface of the chiller 40 is connected to the outlet of the B water inlet valve through the B connecting pipe 42. More specifically, the temperature-controlled thermocouples are respectively provided at various points in the vacuum chamber, and the temperature of each part of the vacuum chamber is accurately detected and fed back to the PLC control end (PLC control device 50). During specific operation, the liquid inlet distribution unit and the liquid outlet distribution unit can be installed in the water distribution box. A 0.5-inch A port is opened on the pipe surface of the A1 liquid inlet distribution pipe 21, and an A flexible joint 25 is installed at the A port. A 0.5-inch A switch joint 26 is installed at the other end of the A flexible joint 25, and a 0.5-inch A pipe joint 27 is installed at the other end of the A switch joint 26. Each A pipe joint 27 is connected to each A water inlet pipe 15. The inlet port of the A3 liquid inlet distribution pipe 22 is designed as a 1.5-inch port and connected to a 1.5-inch turbine water flow controller. The turbine water flow controller adopts a pulse output type, and its flow pulse signal output is connected to the PLC control end. The coating chamber is composed of a chamber body 10 and a chamber door 11. The chamber body 10 and the chamber door 11 are respectively provided with coating source devices 12. Each coating source device 12 has a B cooling channel unit. A group of B cooling channel units are connected to the A pipe joint 27 and the B pipe joint 37 on the liquid inlet distribution unit and the liquid return collection unit through a group of A water inlet pipe 15 and B water return pipe 16. The B pipe joint and the A pipe joint can be specifically composed of faucets, and the ball valve and the faucet switch can be manually operated by the operator to control.

[0026] The L-shaped structure of the liquid inlet distribution unit and the liquid return collection unit can facilitate installation and buffering. Since each coating layer requires a different temperature, the coating chamber may need to be heated or cooled. Some coating layers, such as optical glass and plastic coatings, require a very low temperature (room temperature is sufficient), but metal and rare metal film layers require a temperature of at least 80 degrees Celsius or higher (such as tungsten film, gold film, etc., which require about 500 degrees Celsius for coating). The heating unit composed of heating rods can heat the coating chamber well to meet different coating requirements. A turbine water flow meter is set on the main line of the liquid inlet distribution unit to monitor whether the cooling water inlet volume meets the requirements; each branch of the return liquid collection unit corresponds to the cooling water channel branch on the coating chamber and each coating source device. The CKD water flow meter monitors whether there is water flowing out of this cooling water channel to monitor whether the cooling of each coating source device and the cooling chamber meets the requirements. If the CKD water flow meter does not monitor the water flow of this branch, the functional components connected to this branch may heat up, short-circuit or burn out, which will damage the coating equipment and the coating source, thereby achieving a reliable monitoring effect.

[0027] Each 0.5-inch B port is opened on the pipe surface of the B1 return liquid collection pipe 31, and a B flexible joint 34 is installed at the B port. A 0.5-inch CKD water flow controller is installed at the other end of the B flexible joint 34, and a 0.5-inch B switch joint 35 with a switch is installed at the other end of the CKD water flow controller; a 1.5-inch end is set at the outlet end of the B2 return collection pipe and connected to a 1.5-inch B return valve 33, and the signal output of each CKD water flow controller is connected to the PLC control end. The A cooling channel unit can be composed of a cooling water channel or cooling water pipe welded on the coating chamber, and the B cooling channel unit can be composed of a cooling water channel on each coating source. The A cooling channel unit and the B cooling channel unit can be implemented with reference to the existing implementation method. In order to facilitate the operator to distinguish between each pipe body, further, the A connecting pipe 41 adopts a red high-pressure explosion-proof water pipe, and the B connecting pipe 42 adopts a black high-pressure explosion-proof water pipe. The A water inlet pipe 15 connecting the A cooling channel unit and the B cooling channel unit is a blue transparent water pipe, and the B water return pipe 16 is a white transparent water pipe.

[0028] In order to ensure the film quality and stability of the coating, different coating processes need to control different temperatures. The above scheme provided by the present invention accurately controls the flow of cooling water through the water turbine flow controller on the main water flow path and the CKD water flow controller set on each water flow branch, and feeds back the detected data signal to the PLC control terminal for reference and operation control by the staff. By regulating the water flow and the operating state of the heating unit, the temperature of the coating chamber can be accurately controlled, so as to reliably discharge the heat generated in the coating chamber, prevent the vacuum state in the coating chamber from being destroyed due to the temperature increase, ensure the coating environment in the coating chamber, extend the life of the coating equipment and the coating source device 12, improve the stability and uniformity of the film layer, ensure the smooth progress of the coating process and meet different production needs.

[0029] The above is only a preferred embodiment of the present invention. It should be noted that, for those skilled in the art, several improvements and modifications can be made without departing from the principles of the present invention, and these improvements and modifications should also be considered as the protection scope of the present invention. The structures, devices and operating methods not specifically described and explained in the present invention shall be implemented according to the conventional means in the art unless otherwise specified and limited.

Claims

1. A cooling system for vacuum ion plating equipment, characterized in that: The invention comprises a liquid inlet distribution unit, a liquid outlet distribution unit and a heat exchange unit, each coating source device is arranged on the coating chamber, the coating chamber has an A cooling channel unit for supplying fluid flow and for cooling the coating chamber, each coating source device has a B cooling channel unit for supplying fluid flow and for cooling the coating source device; the A cooling channel unit, the B cooling channel unit, the liquid inlet distribution unit, the liquid return collection unit and the heat exchange unit form a flow passage for circulating fluid, the liquid inlet distribution unit has each liquid inlet joint assembly, each liquid inlet joint assembly is used to connect with the A cooling channel unit and the B cooling channel unit The liquid inlets are interconnected, and the liquid return collection unit is provided with various liquid return joint assemblies, and each liquid return joint assembly is respectively used to be interconnected with the liquid outlets on the A cooling channel unit and the B cooling channel unit. The heat exchange unit is arranged between the liquid return collection unit and the liquid inlet distribution unit, and the heat exchange unit is used to reduce the temperature of the fluid. The flow passage is also provided with a regulating unit, and the regulating unit is used to regulate the flow rate or flow rate of the fluid. The coating chamber is also provided with a detection unit for detecting the temperature in the coating chamber, and the detection unit transmits the detection signal to the control unit for analysis and processing, and the control unit adjusts the operating status of each component according to the result of the analysis and processing.

2. The cooling system for vacuum ion plating equipment according to claim 1, characterized in that: The liquid inlet distribution unit includes an A1 liquid inlet distribution pipe arranged vertically, the upper end of the A1 liquid inlet distribution pipe is configured to be sealed, and liquid inlet distribution connecting subunits are arranged at intervals along the height direction of the A1 liquid inlet distribution pipe, and each liquid inlet distribution connecting subunit includes liquid inlet joint assemblies arranged at intervals along the circumference of the A1 liquid inlet distribution pipe.

3. The cooling system for vacuum ion plating equipment according to claim 1, characterized in that: The liquid return collection unit includes a B1 liquid return collection pipe arranged vertically, the upper end of the B1 liquid return collection pipe is configured to be sealed, and liquid return collection connecting sub-units are arranged at intervals along the height direction of the B1 liquid return collection pipe, and each liquid return collection connecting sub-unit includes liquid return joint assemblies arranged at intervals along the circumference of the B1 liquid return collection pipe.

4. The cooling system for vacuum ion plating equipment according to claim 2, characterized in that: The liquid inlet joint assembly includes an A flexible joint arranged on the A1 liquid inlet distribution pipe, the A flexible joint is connected to one end of the A switch joint, the other end of the A switch joint is connected to the A pipe joint, and the A pipe joint is connected to the liquid inlet on the A cooling cavity unit or the B cooling cavity unit through the A water inlet pipe.

5. The cooling system for vacuum ion plating equipment according to claim 2, characterized in that: The liquid inlet distribution unit also includes horizontally arranged A2 liquid inlet distribution pipe and A3 liquid inlet distribution pipe. The A3 liquid inlet distribution pipe is connected to the lower end of the A1 liquid inlet distribution pipe through the A2 liquid inlet distribution pipe. The A2 liquid inlet distribution pipe is vertically arranged with the A1 liquid inlet distribution pipe and the A3 liquid inlet distribution pipe respectively. The front side of the water inlet end of the A3 liquid inlet distribution pipe is provided with an A flow meter and an A water inlet valve.

6. The cooling system for vacuum ion plating equipment according to claim 5, characterized in that: The A flowmeter is a turbine water flowmeter, which is connected to the control unit. The A water inlet valve is a ball valve. The A1 liquid inlet distribution pipe, the A2 liquid inlet distribution pipe, and the A3 liquid inlet distribution pipe are all square tubes. The liquid inlet distribution connection subunit consists of liquid inlet joint assemblies respectively arranged on the three pipe surfaces of the A1 liquid inlet distribution pipe.

7. The cooling system for vacuum ion plating equipment according to claim 3, characterized in that: The liquid return joint assembly includes a B flexible joint arranged on the B1 liquid return collection pipe, the B flexible joint is connected to one end of the B switch joint, the other end of the B switch joint is connected to one end of the B flow meter, the other end of the B flow meter is connected to the B pipe joint, and the liquid outlet on the A cooling cavity unit or the B cooling cavity unit is connected to the B pipe joint through the B return pipe.

8. The cooling system for vacuum ion plating equipment according to claim 7, characterized in that: The return liquid collection unit also includes a horizontally arranged B2 return liquid collection pipe, the B1 return liquid collection pipe and the B2 return liquid collection pipe are connected, the B1 return liquid collection pipe and the B2 return liquid collection pipe are arranged in an L shape, and a B return valve is provided at the rear side of the water outlet end of the B2 return liquid collection pipe.

9. The cooling system for vacuum ion plating equipment according to claim 7, characterized in that: The B flow meter is a CKD water flow meter, which is connected to the control unit. The B return valve is a ball valve. The B1 return liquid collecting pipe and the B2 return liquid collecting pipe are respectively composed of square tube bodies. The return liquid distribution connection subunit is composed of return liquid joint assemblies respectively arranged on the three pipe surfaces of the B1 return liquid collecting pipe.

10. The cooling system for vacuum ion plating equipment according to claim 1, characterized in that: A heating unit is also provided on the coating chamber, and the heating unit is used to heat the coating chamber. The heating unit includes heating rods arranged in the coating chamber. The detection unit is composed of temperature-controlled thermocouples arranged on the coating chamber. The heat exchange unit is composed of a chiller, and the control unit is a PLC control device.

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