RF power supply test system, RF power supply performance optimization method and related equipment

Abstract

The present invention provides a radio frequency power supply test system, a radio frequency power supply performance optimization method and related equipment, and relates to the field of radio frequency power supply test technology. It includes a radio frequency power supply and a test device, the test device is connected to the radio frequency power supply and includes a phase shift circuit and a variable load circuit, and the test device is used to adjust the phase through the phase shift circuit and adjust the load impedance through the variable load circuit to simulate the changing load. The radio frequency power supply test system of the present invention solves the problem that the traditional radio frequency power supply load test equipment lacks the test for different phase changes on the standing wave circle of the radio frequency power supply load, so as to achieve the effect of facilitating the user to adjust the test parameters and facilitating the optimization of the radio frequency power supply performance.

Description

Technical Field

[0001] The present invention relates to the technical field of radio frequency power supply testing, and in particular to a radio frequency power supply testing system, a radio frequency power supply performance optimization method and related equipment. Background Art

[0002] In the application of RF power supply, the matching performance between load and power supply directly affects the stability, efficiency and reliability of RF signal transmission. When the load impedance does not match the impedance of the RF power supply transmission line, it will cause power reflection at the load end. In addition, under certain specific impedance conditions, the DC power supply of the RF power supply will show instability due to instantaneous large current, which will affect the overall performance of the system. Therefore, accurately measuring and analyzing the power output characteristics of the RF power supply when the RF power supply changes at different phases on the load isostanding wave circle is of great significance for optimizing system matching, improving transmission efficiency and improving the stability of the RF power supply.

[0003] However, most of the existing RF power load test equipment can only adjust the load impedance but lacks the test for different phase changes on the standing wave circle of the RF power load, making it difficult to adjust the target test parameters, thereby hindering users from optimizing the performance of the RF power supply.

[0004] There is currently no effective technical solution to the above problems. Summary of the invention

[0005] The purpose of the present invention is to provide a radio frequency power supply test system, a radio frequency power supply performance optimization method and related equipment to solve the problem that traditional radio frequency power supply load test equipment lacks tests for different phase changes on the standing wave circle of the radio frequency power supply load, so as to facilitate users to adjust test parameters and optimize the performance of the radio frequency power supply.

[0006] In a first aspect, the present invention provides a radio frequency power supply test system, comprising a radio frequency power supply and a test device, wherein the test device is connected to the radio frequency power supply and comprises a phase shift circuit and a variable load circuit;

[0007] The phase shift circuit includes a first capacitor, a second capacitor and a first inductor; wherein the first end of the first capacitor is connected to the RF power supply and the first end of the first inductor at the same time, the second end of the first capacitor is grounded, the second end of the first inductor is connected to the first end of the second capacitor, and the second end of the second capacitor is grounded;

[0008] The variable load circuit comprises a resistance matrix formed by connecting a plurality of resistance groups in parallel, wherein a first end of the resistance matrix is ​​connected to a second end of the first inductor, and a second end of the resistance matrix is ​​grounded; each of the resistance groups comprises a first resistor and a second resistor, and the first resistor is connected in series with the second resistor in the same resistance group;

[0009] The testing device is used to adjust the phase through the phase shift circuit and adjust the load impedance through the variable load circuit to simulate a variable load;

[0010] The RF power supply test system further comprises a detection device connected to the RF power supply and the test device, wherein the detection device is used to measure parameter characteristics of the RF power supply; the parameter characteristics comprise output power characteristics and direct current values.

[0011] The RF power supply test system provided by the present invention combines a variable load circuit and a phase shift circuit to achieve accurate testing of different standing wave ratios and different phase points under the same standing wave ratio, so as to facilitate users to adjust test parameters and optimize the performance of the RF power supply.

[0012] In a second aspect, the present invention provides a method for optimizing the performance of a radio frequency power supply based on the radio frequency power supply test system described above, comprising the following steps:

[0013] S1. Determine the configuration of the resistor matrix according to a specific plurality of standing wave ratios;

[0014] S2. Determine the configuration of the phase shift circuit according to a specific plurality of phases;

[0015] S3. After determining the configuration of the resistor matrix and the phase shift circuit, the parameter characteristics of the RF power supply at various standing wave ratios and various phases are measured by the detection device; the parameter characteristics include output power characteristics and DC current values;

[0016] S4. Add an impedance matching network between the RF power source and the load according to the parameter characteristics to match the RF power source.

[0017] Furthermore, the specific steps in step S2 include:

[0018] S21. Determine the capacitance of the first capacitor and the second capacitor and the inductance of the first inductor according to a specific phase.

[0019] Furthermore, the specific steps in step S21 include:

[0020] S211. Calculate the capacitance of the first capacitor and the second capacitor according to the following formula:

[0021] ;

[0022] in, is the capacitance of the first capacitor, is the capacitance of the second capacitor, is the transmission line characteristic impedance, is the frequency of the RF output signal, is the phase;

[0023] S212. Calculate the inductance of the first inductor according to the following formula:

[0024] ;

[0025] in, is the inductance of the first inductor.

[0026] In a third aspect, the present invention provides a radio frequency power supply performance optimization device, comprising:

[0027] A first determination module is used to determine the configuration of the resistance matrix according to a specific plurality of standing wave ratios;

[0028] A second determination module, used to determine the configuration of the phase shift circuit according to a specific plurality of phases;

[0029] A measuring module, configured to measure the parameter characteristics of the radio frequency power supply at various standing wave ratios and various phases through a detection device after determining the configuration of the resistance matrix and the phase shift circuit; the parameter characteristics include output power characteristics and direct current values;

[0030] The adjustment module is used to add an impedance matching network between the radio frequency power source and the load according to the parameter characteristics to match the radio frequency power source.

[0031] In a fourth aspect, the present invention provides an electronic device, comprising a processor and a memory, wherein the memory stores computer-readable instructions, and when the computer-readable instructions are executed by the processor, the steps in the RF power supply performance optimization method provided in the second aspect are executed.

[0032] In a fifth aspect, the present invention provides a computer-readable storage medium having a computer program stored thereon, wherein when the computer program is executed by a processor, the steps in the method for optimizing the performance of a radio frequency power supply provided in the second aspect are executed.

[0033] From the above, it can be seen that the RF power supply test system provided by the present invention uses a variable load circuit to adjust the load impedance and uses a phase shift circuit to adjust the phase, thereby realizing accurate testing of different standing wave ratios and different phase points under the same standing wave ratio, meeting different test target requirements, and providing sufficient data support for the optimization of system matching performance. The overall structure is simple, easy to operate, easy to maintain and upgrade, and it is convenient for users to adjust test parameters, which is conducive to optimizing the performance of the RF power supply.

[0034] Other features and advantages of the present invention will be described in the following description, and partly become apparent from the description, or be understood by implementing the embodiments of the present invention. The purpose and other advantages of the present invention can be realized and obtained by the structures particularly pointed out in the written description and the drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 A schematic diagram of the structure of a radio frequency power supply testing system provided in an embodiment of the present invention.

[0036] Figure 2 Schematic diagram of the structure of the testing device in the embodiment of the present invention.

[0037] Figure 3 A flow chart of a method for optimizing radio frequency power supply performance provided by an embodiment of the present invention.

[0038] Figure 4 It is a Smith chart when the standing wave ratio is equal to 2 in an embodiment of the present invention.

[0039] Figure 5 A schematic diagram of the structure of a radio frequency power supply performance optimization device provided in an embodiment of the present invention.

[0040] Figure 6 A schematic diagram of the structure of an electronic device provided by an embodiment of the present invention.

[0041] Description of labels:

[0042] 100, RF power supply; 200, testing device; 210, phase shift circuit; 220, variable load circuit; C1, first capacitor; C2, second capacitor; L1, first inductor; R11, eleventh resistor; R12, twelfth resistor; R21, twenty-first resistor; R22, twenty-second resistor; R31, thirty-first resistor; R32, thirty-second resistor; R41, forty-first resistor; R42, forty-second resistor; R51, fifty-first resistor; R52, fifty-second resistor; R61, sixty-first resistor; R62, sixty-second resistor; 300, detecting device; 400, first determining module; 500, second determining module; 600, measuring module; 700, adjusting module; 13, electronic device; 1301, processor; 1302, memory; 1303, communication bus. DETAILED DESCRIPTION

[0043] The embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0044] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0045] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or mutual communication; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0046] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0047] The disclosure below provides many different embodiments or examples to realize different structures of the present invention. In order to simplify the disclosure of the present invention, the parts and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the present invention. In addition, the present invention can repeat reference numbers and / or reference letters in different examples, and this repetition is for the purpose of simplicity and clarity, which itself does not indicate the relationship between the various embodiments and / or settings discussed. In addition, the present invention provides various specific examples of processes and materials, but those of ordinary skill in the art can be aware of the application of other processes and / or the use of other materials.

[0048] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. The components of the embodiments of the present invention generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed invention, but merely represents the selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the present invention.

[0049] It should be noted that similar numbers and letters represent similar items in the following figures, so once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined. At the same time, in the description of the present invention, the terms "first", "second", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0050] Reference Figure 1 and attached Figure 2 The present invention provides a radio frequency power supply test system, including a radio frequency power supply 100 and a test device 200. The test device 200 is connected to the radio frequency power supply 100 and includes a phase shift circuit 210 and a variable load circuit 220. The test device 200 is used to adjust the phase through the phase shift circuit 210 and adjust the load impedance through the variable load circuit 220 to simulate a changing load.

[0051] In this embodiment, in actual application, the user can set the required load impedance through the variable load circuit 220 and set the required phase through the phase shift circuit 210 as needed, so as to simulate different loads. As a result, the test system can adjust the test circuit load parameters according to the test target value to achieve accurate testing of different standing wave ratios and different phase points under the same standing wave ratio, meet different test target requirements, and provide sufficient data support for the optimization of system matching performance. The overall structure is simple, easy to operate, easy to maintain and upgrade, and it is convenient for users to adjust test parameters, which is conducive to optimizing the performance of the RF power supply.

[0052] In certain embodiments, referring to Figure 2 , the phase shift circuit 210 includes a first capacitor C1, a second capacitor C2 and a first inductor L1;

[0053] The first end of the first capacitor C1 is connected to the RF power supply 100 and the first end of the first inductor L1, the second end of the first capacitor C1 is grounded, the second end of the first inductor L1 is connected to the first end of the second capacitor C2, and the second end of the second capacitor C2 is grounded.

[0054] In certain embodiments, referring to Figure 2 The variable load circuit 220 includes a resistor matrix formed by connecting a plurality of resistor groups in parallel, wherein a first end of the resistor matrix is ​​connected to a second end of the first inductor L1, and a second end of the resistor matrix is ​​grounded; each resistor group includes a first resistor and a second resistor, and the first resistor is connected in series with the second resistor in the same resistor group.

[0055] In this embodiment, the variable load circuit 220 includes not only the impedance of the resistance matrix but also the impedance of the transmission line, so the reflection coefficient should be: ,in, is the voltage reflection coefficient, is the impedance of the resistor matrix, is the characteristic impedance of the transmission line; therefore, the standing wave ratio should be: ,in, is the standing wave ratio; in practical applications, in order to simplify the design, and is a real number and Less than , so the standing wave ratio can be simplified to: .

[0056] In certain embodiments, referring to Figure 1 The RF power supply test system also includes a detection device 300 connected to the RF power supply 100 and the test device 200. The detection device 300 is used to measure the parameter characteristics of the RF power supply 100. The parameter characteristics, for example, reflect the output power characteristics, stability performance, and temperature performance of the RF power supply, such as the forward power value, reflected power, standing wave ratio, reflection coefficient, and the size of the DC current value inside the RF power supply.

[0057] Reference Figure 3 The present invention provides a method for optimizing the performance of a radio frequency power supply based on the radio frequency power supply test system in the above embodiment, comprising the following steps:

[0058] S1. Determine the configuration of the resistor matrix according to a specific plurality of standing wave ratios;

[0059] S2. Determine the configuration of the phase shift circuit according to a specific plurality of phases;

[0060] S3. After determining the configuration of the resistor matrix and the phase shift circuit, the parameter characteristics of the RF power supply at various standing wave ratios and various phases are measured by a detection device; the parameter characteristics include output power characteristics and DC current values;

[0061] S4. Add an impedance matching network between the RF power supply and the load according to the parameter characteristics to match the RF power supply.

[0062] In some embodiments, the specific steps in step S2 include:

[0063] S21. Determine the capacitance of the first capacitor and the second capacitor and the inductance of the first inductor according to a specific phase.

[0064] In some embodiments, the specific steps in step S21 include:

[0065] S211. Calculate the capacitance of the first capacitor and the second capacitor according to the following formula:

[0066] ;

[0067] in, is the capacitance of the first capacitor, is the capacitance of the second capacitor, is the transmission line characteristic impedance, is the frequency of the RF output signal, is the phase;

[0068] S212. Calculate the inductance of the first inductor according to the following formula:

[0069] ;

[0070] in, is the inductance of the first inductor.

[0071] Specifically, , MHz, Ω, phase change interval For example, the phase shift circuit can be configured according to the following table:

[0072]

[0073] At the same time, refer to the attached Figure 2 ,by For example, the resistor matrix can be configured according to the following table:

[0074]

[0075] Among them, the resistance values ​​of the eleventh resistor R11, the twelfth resistor R12, the twenty-first resistor R21, the twenty-second resistor R22, the thirty-first resistor R31, the thirty-second resistor R32, the forty-first resistor R41, the forty-second resistor R42, the fifty-first resistor R51, the fifty-second resistor R52, the sixty-first resistor R61 and the sixty-second resistor R62 are all R, and R=50Ω.

[0076] Reference Figure 4 , attached Figure 4 Shown in The phase changes in the Smith chart when the power is turned on. In the actual test process, the user configures different phases and different standing wave ratios according to the table above, and forms different combinations of different phases and different standing wave ratios for testing, so that the test data (i.e. parameter characteristics) of different standing wave ratios and different phase points under the same standing wave ratio can be obtained, which makes it convenient to add an impedance matching network between the RF power supply and the load according to the measurement results, so as to improve the matching of the load impedance and the RF power supply, thereby achieving the effect of optimizing the performance of the RF power supply. The entire test process is simple, fast and convenient to operate. The high-precision phase shifting technology can accurately control the standing wave ratio and phase, ensure the accuracy and reliability of the measurement results, and provide reliable data support for the optimization of the matching performance between the RF power supply and the load.

[0077] Please refer to Figure 5 , Figure 5 A radio frequency power supply performance optimization device in some embodiments of the present invention is integrated into a back-end control device in the form of a computer program, including:

[0078] A first determination module 400 is used to determine the configuration of the resistance matrix according to a specific plurality of standing wave ratios;

[0079] A second determination module 500 is used to determine the configuration of the phase shift circuit according to a specific plurality of phases;

[0080] The measuring module 600 is used to measure the parameter characteristics of the RF power supply at various standing wave ratios and various phases through a detection device after determining the configuration of the resistance matrix and the phase shift circuit; the parameter characteristics include output power characteristics and DC current values;

[0081] The adjustment module 700 is used to add an impedance matching network between the RF power source and the load according to the parameter characteristics to match the RF power source.

[0082] In some embodiments, the second determination module 500 is executed when used to determine the configuration of the phase shift circuit according to specific multiple phases:

[0083] S21. Determine the capacitance of the first capacitor and the second capacitor and the inductance of the first inductor according to a specific phase.

[0084] In some embodiments, the second determination module 500 performs the following when used to determine the capacitance of the first capacitor and the second capacitor and the inductance of the first inductor according to a specific phase:

[0085] S211. Calculate the capacitance of the first capacitor and the second capacitor according to the following formula:

[0086] ;

[0087] in, is the capacitance of the first capacitor, is the capacitance of the second capacitor, is the transmission line characteristic impedance, is the frequency of the RF output signal, is the phase;

[0088] S212. Calculate the inductance of the first inductor according to the following formula:

[0089] ;

[0090] in, is the inductance of the first inductor.

[0091] Please refer to Figure 6 , Figure 6 A structural schematic diagram of an electronic device provided in an embodiment of the present invention, the present invention provides an electronic device 13, including: a processor 1301 and a memory 1302, the processor 1301 and the memory 1302 are interconnected and communicate with each other through a communication bus 1303 and / or other forms of connection mechanisms (not marked), the memory 1302 stores computer-readable instructions executable by the processor 1301, when the electronic device is running, the processor 1301 executes the computer-readable instructions to execute the radio frequency power supply performance optimization method in any optional implementation of the above-mentioned embodiment to achieve the following functions: determining the configuration of the resistance matrix according to a specific plurality of standing wave ratios; determining the configuration of the phase shifting circuit according to a specific plurality of phases; after determining the configuration of the resistance matrix and the phase shifting circuit, measuring the parameter characteristics of the radio frequency power supply under various standing wave ratios and various phases through a detection device; the parameter characteristics include output power characteristics and DC current values; according to the parameter characteristics, adding an impedance matching network between the radio frequency power supply and the load to match the radio frequency power supply.

[0092] An embodiment of the present invention provides a computer-readable storage medium having a computer program stored thereon. When the computer program is executed by a processor, the RF power supply performance optimization method in any optional implementation of the above-mentioned embodiment is executed to achieve the following functions: determining the configuration of the resistance matrix according to a specific plurality of standing wave ratios; determining the configuration of the phase shift circuit according to a specific plurality of phases; after determining the configuration of the resistance matrix and the phase shift circuit, measuring the parameter characteristics of the RF power supply under various standing wave ratios and various phases by a detection device; the parameter characteristics include output power characteristics and DC current values; and adding an impedance matching network between the RF power supply and the load to match the RF power supply according to the parameter characteristics.

[0093] Among them, the computer-readable storage medium can be implemented by any type of volatile or non-volatile storage device or a combination thereof, such as static random access memory (SRAM), electrically erasable programmable read-only memory (EEPROM), erasable programmable read-only memory (EPROM), programmable red-only memory (PROM), read-only memory (ROM), magnetic storage, flash memory, magnetic disk or optical disk.

[0094] In the embodiments provided by the present invention, it should be understood that the disclosed devices and methods can be implemented in other ways. The device embodiments described above are only schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some communication interfaces, and the indirect coupling or communication connection of devices or units can be electrical, mechanical or other forms.

[0095] In addition, the units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0096] Furthermore, the functional modules in the various embodiments of the present invention may be integrated together to form an independent part, or each module may exist independently, or two or more modules may be integrated to form an independent part.

[0097] In this document, relational terms such as first and second, etc. are used merely to distinguish one entity or operation from another entity or operation, but do not necessarily require or imply any such actual relationship or order between these entities or operations.

[0098] Descriptions with reference to the terms "one embodiment", "certain embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" are intended to mean that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0099] The above description is only an embodiment of the present invention and is not intended to limit the protection scope of the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A method for optimizing radio frequency power supply performance, applied to a radio frequency power supply test system, characterized in that: The radio frequency power supply test system comprises a radio frequency power supply (100) and a test device (200); the test device (200) is connected to the radio frequency power supply (100) and comprises a phase shift circuit (210) and a variable load circuit (220); The phase shift circuit (210) comprises a first capacitor C1, a second capacitor C2 and a first inductor L1; wherein the first end of the first capacitor C1 is connected to the radio frequency power source (100) and the first end of the first inductor L1 at the same time, the second end of the first capacitor C1 is grounded, the second end of the first inductor L1 is connected to the first end of the second capacitor C2, and the second end of the second capacitor C2 is grounded; The variable load circuit (220) comprises a resistance matrix formed by connecting a plurality of resistance groups in parallel, wherein a first end of the resistance matrix is ​​connected to a second end of the first inductor L1, and a second end of the resistance matrix is ​​grounded; each resistance group comprises a first resistor and a second resistor, and the first resistor is connected in series with the second resistor in the same resistance group; The testing device (200) is used to adjust the phase through the phase shift circuit (210) and adjust the load impedance through the variable load circuit (220) to simulate a variable load; The radio frequency power supply test system further comprises a detection device (300) connected to the radio frequency power supply (100) and the test device (200), the detection device (300) being used to measure parameter characteristics of the radio frequency power supply (100); the parameter characteristics comprising output power characteristics and direct current values; The method for optimizing the performance of a radio frequency power supply comprises the following steps: S1. Determine the configuration of the resistor matrix according to a specific plurality of standing wave ratios; S2. Determine the configuration of the phase shift circuit according to a specific plurality of phases; S3. After determining the configuration of the resistor matrix and the phase shift circuit, the parameter characteristics of the RF power supply at various standing wave ratios and various phases are measured by the detection device; the parameter characteristics include output power characteristics and DC current values; S4. Add an impedance matching network between the RF power source and the load according to the parameter characteristics to match the RF power source.

2. The method for optimizing radio frequency power supply performance according to claim 1, characterized in that: The specific steps in step S2 include: S21. Determine the capacitance of the first capacitor and the second capacitor and the inductance of the first inductor according to a specific phase.

3. The method for optimizing radio frequency power supply performance according to claim 2, characterized in that: The specific steps in step S21 include: S211. Calculate the capacitance of the first capacitor and the second capacitor according to the following formula: ； in, is the capacitance of the first capacitor, is the capacitance of the second capacitor, is the transmission line characteristic impedance, is the frequency of the RF output signal, is the phase; S212. Calculate the inductance of the first inductor according to the following formula: ； in, is the inductance of the first inductor.

4. A radio frequency power supply performance optimization device, applied to a radio frequency power supply test system, characterized in that: The radio frequency power supply test system comprises a radio frequency power supply (100) and a test device (200); the test device (200) is connected to the radio frequency power supply (100) and comprises a phase shift circuit (210) and a variable load circuit (220); The phase shift circuit (210) comprises a first capacitor C1, a second capacitor C2 and a first inductor L1; wherein the first end of the first capacitor C1 is connected to the radio frequency power source (100) and the first end of the first inductor L1 at the same time, the second end of the first capacitor C1 is grounded, the second end of the first inductor L1 is connected to the first end of the second capacitor C2, and the second end of the second capacitor C2 is grounded; The variable load circuit (220) comprises a resistance matrix formed by connecting a plurality of resistance groups in parallel, wherein a first end of the resistance matrix is ​​connected to a second end of the first inductor L1, and a second end of the resistance matrix is ​​grounded; each resistance group comprises a first resistor and a second resistor, and the first resistor is connected in series with the second resistor in the same resistance group; The testing device (200) is used to adjust the phase through the phase shift circuit (210) and adjust the load impedance through the variable load circuit (220) to simulate a variable load; The radio frequency power supply test system further comprises a detection device (300) connected to the radio frequency power supply (100) and the test device (200), the detection device (300) being used to measure parameter characteristics of the radio frequency power supply (100); the parameter characteristics comprising output power characteristics and direct current values; The radio frequency power supply performance optimization device comprises: A first determination module is used to determine the configuration of the resistance matrix according to a specific plurality of standing wave ratios; A second determination module, used to determine the configuration of the phase shift circuit according to a specific plurality of phases; A measuring module, configured to measure the parameter characteristics of the radio frequency power supply at various standing wave ratios and various phases through a detection device after determining the configuration of the resistance matrix and the phase shift circuit; the parameter characteristics include output power characteristics and direct current values; The adjustment module is used to add an impedance matching network between the radio frequency power supply and the load according to the parameter characteristics to match the radio frequency power supply.

5. An electronic device, characterized in that: It includes a processor and a memory, wherein the memory stores computer-readable instructions. When the computer-readable instructions are executed by the processor, the steps in the method for optimizing the performance of a radio frequency power supply as described in any one of claims 1 to 3 are executed.

6. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by the processor, the steps in the method for optimizing the performance of a radio frequency power supply as described in any one of claims 1 to 3 are executed.

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