Driving device of wafer mounting mechanism

Abstract

The invention provides a driving device of a wafer mounting mechanism. The rotating seat is rotationally connected to the base; the rotating seat is rotationally connected to a fixed base; two supports are arranged at the lower end of the base, and the rotating base is located between the two supports. The two supports are respectively connected with a semicircular upper rotating ring and a semicircular lower rotating ring which can move up and down, the two semicircular upper rotating rings and the two semicircular lower rotating rings respectively surround the left side and the right side of the rotating seat, and each semicircular upper rotating ring and each semicircular lower rotating ring are respectively provided with a semicircular slide way; the rotating seat drives the two swing arms to rotate, and the two swing arms can move up and down relative to the rotating seat, so that one swing arm can grab a wafer, and the other swing arm simultaneously installs the wafer on the other swing arm on a graphite disc, thereby improving the efficiency of picking up the wafer through the swing arms.

Description

[0001] This application is a divisional application with application number 2019103751946, application date May 7, 2019, and invention name “Wafer mounting mechanism”. Technical Field

[0002] The invention relates to a driving device of a wafer mounting mechanism. Background Art

[0003] Wafers are generally stored on a wafer expansion ring. There are currently two methods for picking up wafers on the wafer expansion ring and placing them on a graphite plate. The first method is to manually use a suction cup, but this method is not efficient and is not suitable for high-speed production. The second method is to automatically grab the wafers through a swing arm. The swing arm rotates to pick up the wafers on the wafer expansion ring and place them on the graphite plate. However, this picking method can only grab first and then place. Only one wafer can be installed in one process, and the efficiency cannot be substantially improved. Summary of the invention

[0004] The object of the present invention is to provide a wafer mounting mechanism to solve the problem of low efficiency when picking up wafers by a swing arm.

[0005] The above-mentioned purpose of the present invention can be achieved by adopting the following technical solutions: The present invention provides a wafer mounting mechanism, comprising: A rotating seat, the rotating seat is rotatably connected to a fixed base; Two swing arms, the two swing arms are symmetrically arranged on the left and right sides of the rotating seat, and the two swing arms are located on the same horizontal straight line, and the rotating seat can drive the two swing arms to rotate; The two swing arms are connected to the rotating seat so as to slide up and down respectively, and the free ends of the two swing arms are provided with clamps for grabbing wafers.

[0006] Furthermore, the two swing arms are respectively connected to two connecting seats, and the two side surfaces of the rotating seat are connected to a pair of first guide rails arranged along the vertical direction. Each of the first guide rails is slidably connected to a first slider, and the first slider is connected to the corresponding connecting seat.

[0007] Furthermore, two supports are provided at the lower end of the base, and the rotating seat is located between the two supports; The two supports are respectively connected with semicircular upper and lower rotating rings that can move up and down, and the two semicircular upper and lower rotating rings are respectively surrounded on the left and right sides of the rotating seat, and each of the semicircular upper and lower rotating rings has a semicircular slideway; The two connecting seats are both connected with supporting blocks, the two supporting blocks are both rotatably connected with rollers, and the two rollers roll in the corresponding semicircular slideways respectively.

[0008] Furthermore, a linear motor is respectively arranged on the two supports, a fixed end of the linear motor is connected to the support, and a moving end of the linear motor is connected to the semicircular upper and lower rotating rings via a slide.

[0009] Furthermore, the support is connected to two second guide rails arranged in a vertical direction, and the linear motor is located between the two second guide rails; Each of the second guide rails is slidably connected with a second sliding block, and each of the second sliding blocks is connected to the corresponding sliding seat.

[0010] Furthermore, two semicircular wear-resistant plates are provided in the semicircular slideway, and the two semicircular wear-resistant plates are arranged up and down to form the semicircular slideway, and the roller is rollingly arranged between the two semicircular wear-resistant plates.

[0011] Furthermore, the two semicircular upper and lower rotating rings are arranged at intervals in the vertical direction.

[0012] Furthermore, lens barrels are respectively connected to both sides of the base, and a ring light is connected to the lower end of the lens barrel.

[0013] Furthermore, a driving motor is installed on the base, the rotating shaft of the driving motor is arranged vertically downward, and the rotating seat is fixedly arranged on the rotating shaft of the driving motor.

[0014] The characteristics and advantages of the wafer mounting mechanism of the present invention are: the two swing arms are driven to rotate by the rotating seat, and the two swing arms can move up and down relative to the rotating seat, so that one swing arm can grab the wafer, and the other swing arm can simultaneously mount the wafer on it onto the graphite disk, thereby improving the efficiency of picking up the wafer by the swing arm. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0016] Figure 1 is a schematic diagram of a wafer mounting mechanism of the present invention; Figure 2 is a schematic diagram of a wafer mounting mechanism of the present invention; Figure 3It is a schematic diagram of a connecting seat and semicircular upper and lower rotating rings in the wafer mounting mechanism of the present invention; Figure 4 It is a schematic diagram of the semicircular upper and lower rotating rings in the wafer mounting mechanism of the present invention; Figure 5 is a schematic diagram of a support block in a wafer mounting mechanism of the present invention; Description of Figure Numbers: 1. Rotating seat; 11. First guide rail; 2. Base; 21. Support; 211. Linear motor; 212. Second guide rail; 213. Inductive limiter; 214. Reading head; 3. Swing arm; 31. Clamp; 4. Connecting seat; 41. First slider; 42. Support block; 421. Roller; 5. Semicircular upper and lower rotating rings; 51. Semicircular slideway; 52. Slide seat; 521. Second slider; 522. Limiting photoelectric sheet; 53. Semicircular wear-resistant plate; 6. Lens barrel; 61. Ring light; 7. Driving motor. DETAILED DESCRIPTION

[0017] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0018] Embodiment 1; like Figures 1 to 5 As shown, the present invention provides a wafer mounting mechanism, comprising: a rotating seat 1, which is rotatably connected to a fixed base 2; two swing arms 3, which are symmetrically arranged on the left and right sides of the rotating seat 1, and the two swing arms 3 are located on the same horizontal straight line, and the rotating seat 1 can drive the two swing arms 3 to rotate; and the two swing arms 3 can be connected to the rotating seat 1 so as to slide up and down respectively, and the free ends of the two swing arms 3 have clamps 31 for grabbing wafers.

[0019] In the present invention, the two swing arms 3 are connected to the two connecting seats 4 respectively, and the two sides of the rotating seat 1 are connected to a pair of first guide rails 11 arranged in the vertical direction, and each of the first guide rails 11 is slidably connected to a first slider 41, and the first slider 41 is connected to the corresponding connecting seat 4. Further, the lower end of the base 2 is provided with two supports 21, and the rotating seat 1 is located between the two supports 21; the two supports 21 are respectively connected to semicircular upper and lower rotating rings 5 ​​that can move up and down, and the two semicircular upper and lower rotating rings 5 ​​surround the left and right sides of the rotating seat 1 respectively, and the two semicircular upper and lower rotating rings 5 ​​are arranged at intervals in the vertical direction, and each of the semicircular upper and lower rotating rings 5 ​​has a semicircular slide 51; the two connecting seats 4 are connected to support blocks 42, and the two support blocks 42 are rotatably connected to rollers 421, and the two rollers 421 roll in the corresponding semicircular slides 51 respectively.

[0020] In the present invention, a linear motor 211 is respectively provided on the two supports 21, the fixed end of the linear motor 211 is connected to the support 21, the moving end of the linear motor 211 is connected to the semicircular upper and lower rotating rings 5 ​​through a slide 52, and two second guide rails 212 arranged in the vertical direction are connected to the support 21, and the linear motor 211 is located between the two second guide rails 212; each second guide rail 212 is slidably connected with a second slider 521, and each second slider 521 is connected to the corresponding slide 52. Further, two semicircular wear-resistant plates 53 are provided in the semicircular slide 51, and the two semicircular wear-resistant plates 53 are arranged up and down to form the semicircular slide 51, and the roller 421 is rollingly arranged between the two semicircular wear-resistant plates 53.

[0021] In the present invention, lens barrels 6 are respectively connected to both sides of the base 2, and a ring light 61 is connected to the lower end of the lens barrel 6. Further, a driving motor is installed on the base 2, and the rotating shaft of the driving motor is vertically arranged downward, and the rotating seat 1 is fixedly arranged on the rotating shaft of the driving motor.

[0022] Embodiment 2: like Figures 1 to 5 As shown, the present invention provides a wafer mounting mechanism, comprising: a rotating seat 1, which is rotatably connected to a base 2; two swing arms 3, which are symmetrically arranged on the left and right sides of the rotating seat 1, and the two swing arms 3 are located on a straight line in the same horizontal direction, and the rotating seat 1 can drive the two swing arms 3 to rotate left and right; and the two swing arms 3 are connected to the rotating seat 1 so as to be able to move up and down respectively, and the free ends of the two swing arms 3 have clamps 31 for grabbing wafers.

[0023] The wafer mounting mechanism of the present invention drives two swing arms 3 to rotate through a rotating base 1, and the two swing arms 3 can move up and down relative to the rotating base 1, so that one swing arm 3 can grab a wafer, and the other swing arm 3 can simultaneously mount the wafer on it onto a graphite disk, thereby improving the efficiency of picking up wafers through the swing arms 3.

[0024] Specifically, in the present invention, the two swing arms 3 are respectively connected to the two connecting seats 4, and the two side surfaces of the rotating seat 1 are connected to a pair of first guide rails 11 arranged along the vertical direction, and the two connecting seats 4 are connected to a pair of first sliders 41 arranged along the vertical direction, and the two first guide rails 11 are located between the two first sliders 41, and the two first sliders 41 can be slidably connected to the two corresponding first guide rails 11 respectively.

[0025] In this embodiment, two supports 21 are connected to the lower end of the base 2, and the rotating seat 1 is located between the two supports 21; the two supports 21 are respectively connected with semicircular upper and lower rotating rings 5 ​​that can move up and down, and the two semicircular upper and lower rotating rings 5 ​​respectively surround the left and right sides of the rotating seat 1, and each of the semicircular upper and lower rotating rings 5 ​​has a semicircular slide 51; the two connecting seats 4 are respectively connected with support blocks 42, and the two support blocks 42 are rotatably connected with rollers 421, and the two rollers 421 are respectively rotatably connected in the semicircular slide 51.

[0026] In this embodiment, the two supports 21 are connected to a linear motor 211, and the two semicircular upper and lower rotating rings 5 ​​are respectively connected to two slides 52. The two slides 52 can be connected to the two supports 21 by sliding up and down through the two linear motors 211.

[0027] In this embodiment, the support 21 is connected to two second guide rails 212 arranged in the vertical direction, and the linear motor 211 is located between the two second guide rails 212; the slide 52 is connected to two second sliders 521, and the two second sliders 521 are connected to the two second guide rails 212 so as to slide up and down. In this embodiment, two semicircular wear-resistant plates 53 are connected in the semicircular slide 51, and the roller 421 is rotatably connected between the two semicircular wear-resistant plates 53. The two semicircular upper and lower rotating rings 5 ​​are arranged at intervals in the vertical direction. When the roller 421 rotates in the semicircular slide 51, the rotating seat 1 drives the swing arm 3 to rotate through the connecting seat 4, providing a fulcrum to improve the strength of the swing arm 3.

[0028] In the present invention, the slide 52 is connected with a limit photoelectric sheet 522, and the support 21 is connected with an inductive stopper 213, and the limit photoelectric sheet 522 can limit the up and down movement of the slide 52 through the inductive stopper 213. In the present invention, the support 21 is connected with a reading head 214, and the slide 52 can record the number of movements through the reading head. In the present invention, the two sides of the base 2 are respectively connected with a lens barrel 6, and the lower end of the lens barrel 6 is connected with a ring light 61.

[0029] When picking up the wafer through the swing arm 3, the linear motor 211 drives the two swing arms 3 to move up and down, one of the swing arms 3 grabs the wafer on the wafer expansion ring through the clamp 31, and the other swing arm 3 simultaneously installs the wafer on it onto the graphite disk, thereby improving the efficiency of picking up the wafer through the swing arm 3. After a process is completed, the rotating seat 1 drives the swing arm 3 to rotate through the driving motor 7 installed on the base 2. At this time, when the rotating seat 1 drives the swing arm 3 to rotate through the connecting seat 4, a fulcrum is provided to improve the strength of the swing arm 3 to ensure the movement accuracy of the swing arm 3 during rotation.

[0030] The above are only several embodiments of the present invention. Those skilled in the art may make various changes or modifications to the embodiments of the present invention based on the contents disclosed in the application documents without departing from the spirit and scope of the present invention.

Claims

1. A driving device for a wafer mounting mechanism, characterized in that: include; A rotating seat, the rotating seat is rotatably connected to a fixed base; Two supports are provided at the lower end of the base, and the rotating seat is located between the two supports; The two supports are respectively connected with semicircular upper and lower rotating rings that can move up and down, and the two semicircular upper and lower rotating rings are respectively surrounded on the left and right sides of the rotating seat, and each of the semicircular upper and lower rotating rings has a semicircular slideway; The two connecting seats are both connected with supporting blocks, the two supporting blocks are both rotatably connected with rollers, and the two rollers roll in the corresponding semicircular slideways respectively.

2. The driving device of the wafer mounting mechanism according to claim 1, characterized in that: A linear motor is respectively arranged on the two supports, the fixed end of the linear motor is connected to the support, and the moving end of the linear motor is connected to the semicircular upper and lower rotating rings through a slide.

3. The driving device of the wafer mounting mechanism according to claim 2, characterized in that: The support is connected to two second guide rails arranged in a vertical direction, and the linear motor is located between the two second guide rails; Each of the second guide rails is slidably connected with a second sliding block, and each of the second sliding blocks is connected to the corresponding sliding seat.

Images