Wafer carrier feeding and discharging mechanism

Abstract

The invention discloses a wafer carrier feeding and discharging mechanism, and relates to the technical field of wafer carrier feeding and discharging, the wafer carrier feeding and discharging mechanism comprises an anti-falling mechanism, the anti-falling mechanism is composed of an adjusting assembly and a detecting assembly, the adjusting assembly comprises a rotating base plate, the rotating base plate is arranged on the upper surface of a positioning mounting plate and can rotate, and the detecting assembly is arranged on the rotating base plate; two driven supporting rods are arranged on the upper surface of the rotating base plate, a lifting motor is arranged on the upper surface of the rotating base plate, a bottom stress plate is fixedly mounted at the tail end of an output shaft of the upper surface of the lifting motor, and the bottom stress plate is located on the bottom face of the unlocking rod mounting plate; the anti-falling ring is arranged at the tail ends of a plurality of vacuum rods at the center of the unlocking rod mounting plate in a sleeving manner, a sliding convex block is arranged on the side close to the surface of one side of the anti-falling ring, a limiting ring capable of ascending and descending is arranged on the surface of one side of the anti-falling ring, and in the scheme, by arranging the anti-falling mechanism, the stability and the safety of the wafer carrier in the feeding and discharging process are ensured.

Description

Technical Field

[0001] The present invention relates to the technical field of wafer carrier loading and unloading, and in particular to a wafer carrier loading and unloading mechanism. Background Art

[0002] In the field of semiconductor manufacturing, wafer carriers are key auxiliary equipment, and their design and application are directly related to the efficiency and quality of wafer manufacturing. With the rapid development of semiconductor technology, wafer processing procedures are becoming increasingly complex, and the technical requirements for the loading and unloading mechanisms of wafer carriers are also increasing accordingly.

[0003] In the field of semiconductor manufacturing, the efficient and stable operation of the loading and unloading mechanism of the wafer carrier is crucial to ensure the continuity of the production line and the quality of the product. However, the opening mechanism in the existing technology, especially the design using a vacuum suction cup for adsorption, faces the problem of decreased adsorption force due to fatigue of the suction cup material. As the number of uses increases, the suction cup gradually loses its original elasticity and sealing effect, making it easy to leak during the adsorption process, thereby reducing the stability and reliability of the adsorption. This not only affects the precise positioning and stable grasping of the wafer carrier, but may also cause the wafer carrier to fall off during transportation or handling due to insufficient adsorption force, causing equipment damage or even production accidents. Summary of the invention

[0004] The object of the present invention is to provide a wafer carrier loading and unloading mechanism to solve the problems raised in the above background technology.

[0005] To achieve the above object, the present invention provides the following technical solution, a wafer carrier loading and unloading mechanism, comprising:

[0006] The anti-slip mechanism includes an adjustment component, and the adjustment component includes: a rotating base plate, the rotating base plate is arranged on the upper surface of the positioning mounting plate and can rotate, the upper surface of the rotating base plate is provided with two driven support rods, the upper surface of the rotating base plate is provided with a lifting motor, the upper surface output shaft end of the lifting motor is fixedly installed with a bottom force plate, the upper surface of the bottom force plate is fixedly installed with a plurality of connecting columns, the end of the connecting column is provided with a horizontal lifting plate, the horizontal lifting plate is composed of a plurality of sub-plates, and each sub-plate is connected by a spring;

[0007] The cover opening mechanism comprises: a cover opening electric cylinder, an open cover mounting plate is arranged at the end of the output shaft of the open cover electric cylinder, an open cover column is arranged on the bottom surface of the open cover mounting plate, an open cover guide shaft is fixedly installed on the upper surface of the open cover mounting plate, an open cover mounting frame is arranged on the bottom surface of the open cover mounting plate, a plurality of open cover suction cups are arranged on the bottom surface of the open cover mounting frame, a buffer is also arranged on the bottom surface of the open cover mounting frame, a limiting bolt is arranged on the side surface of the open cover mounting frame, a plurality of pressing blocks are arranged on the side surface of the open cover mounting frame, a cylinder seat is arranged on one side surface of the open cover mounting plate, an open cover cylinder is arranged on one side surface of the cylinder seat, an open cover connecting buckle is arranged on the bottom surface of the cylinder seat, one end of the open cover connecting buckle is connected to the end of the output shaft of the cylinder seat, a open cover rotating shaft is arranged on one side surface of the open cover connecting buckle, and an open cover rotating shaft is arranged between the open cover connecting buckle and the open cover finger buckle;

[0008] The bearing mechanism comprises: a bearing installation frame, the bearing installation frame is located on the upper surface of the platform base plate and can be raised and lowered, a plurality of bearing columns are fixedly installed on the upper surface of the bearing installation frame, and bearing lifting cylinders are arranged on the bottom surfaces of both sides of the bearing installation frame. A lifting cylinder and a clamping cylinder are also fixedly installed on the upper surface of the platform base plate, and a clamping L seat is also arranged at the end of the output shaft on the upper surface of the lifting cylinder.

[0009] Furthermore, the adjustment assembly also includes: an engaging gear ring, a side surface of the engaging gear ring is engaged with an engaging disk, the upper surface of the rotating base plate is provided with a brake motor for driving the engaging disk, the bottom surface of the engaging gear ring is provided with a deflection ring, the engaging gear ring is attached to the upper surface of the deflection ring for rotation, the bottom surface of the engaging gear ring is fixedly connected with an adjusting gear cylinder, both side surfaces of the adjusting gear cylinder are provided with fixed gear disks engaged therewith, a side surface of the fixed gear disk is provided with a fixing frame, the top surface of the fixing frame is fixedly connected to the bottom surface of the positioning mounting plate, and the bottom surface of the adjusting gear cylinder is provided with an engaging rod engaged therewith.

[0010] Furthermore, a lifting mechanism comprises: two lifting frames, a platform base plate is arranged between the two lifting frames, a conveying motor is arranged on the bottom surface of the platform base plate, lifting platform baffles are fixedly installed on the front and rear side surfaces of the platform base plate, mounting vertical plates are fixedly installed on the left and right side surfaces of the platform base plate, a slider is arranged on one side surface of the mounting vertical plate, a screw rod matched with the slider is arranged on the adjacent side of the two lifting frames, and a lifting motor for driving the lifting mechanism to move is arranged on the bottom surface of the platform base plate.

[0011] Furthermore, the conveying mechanism comprises: a carrier positioning block, the carrier positioning block is fixedly mounted on the upper surface of the platform base plate, both sides of the upper surface of the platform base plate are respectively provided with conveying guard plates, the surfaces of the two conveying guard plates adjacent to each other are respectively provided with a fixed side guide plate and an active side guide plate, an active side cylinder and an active side guide shaft are respectively provided at the center of the active side guide plate, a plurality of roller shafts are provided between the two conveying guard plates, a plurality of wheel blades are provided on the surface of the roller shaft, and a carrier body is placed on the upper surface of the wheel blades.

[0012] Furthermore, an unlocking mechanism comprises: an unlocking rod mounting plate, a plurality of guide telescopic rods are arranged on the upper surface of the unlocking rod mounting plate, a positioning mounting plate is arranged below the unlocking rod mounting plate, a plurality of positioning linear bearings are arranged on the upper surface of the positioning mounting plate, a large bottom plate is arranged below the positioning mounting plate, a positioning electric cylinder and an unlocking electric cylinder are arranged on the bottom surface of the large bottom plate, the upper surface of the positioning electric cylinder is fixedly connected to the bottom surface of the positioning mounting plate, a plurality of vacuum rods are arranged on the upper surface of the positioning mounting plate, an exhaust port is arranged on one side surface of the vacuum rod, a product positioning suction cup is arranged on the end of the vacuum rod, an unlocking guide shaft is also arranged on the upper surface of the positioning mounting plate, and an unlocking guide shaft is sleeved with an unlocking linear bearing.

[0013] Furthermore, the detection component and the anti-slip mechanism also include a detection component, which includes: an anti-slip ring, which is sleeved on the ends of several vacuum rods at the center of the unlocking rod mounting plate, a sliding protrusion is provided on one side of the anti-slip ring, and a liftable limiting ring is provided on one side of the anti-slip ring.

[0014] Furthermore, the detection component also includes: a bottom spring, the bottom spring is arranged on the bottom surface of the vacuum rod, a top pressure pile is arranged at the center of the bottom spring, the upper surface of the top pressure pile is fixedly installed on the bottom surface of the vacuum rod, a trigger switch is arranged below the top pressure pile, and a prompt alarm is arranged on the bottom surface of the trigger switch.

[0015] Furthermore, the adjustment component also includes: a horizontal detector, which is located on the bottom surface of the horizontal lifting plate, a signal broadcaster is provided on one side surface of the horizontal detector, and a plurality of positioning pins are provided on the side surface at the center of the horizontal lifting plate.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] 1. In this solution, an anti-slip mechanism is provided, and the position of the horizontal lifting plate can be accurately adjusted through the coordinated work of the lifting motor, the brake motor and the small motor, so as to correct the deformation of the product positioning suction cup caused by long-term use, ensure the close fit between the product positioning suction cup and the bottom surface of the carrier body, improve the vacuum sealing effect and adsorption force, prevent the leakage problem caused by deformation, ensure the stability and safety of the wafer carrier during loading and unloading, and realize the real-time monitoring of the status of the product positioning suction cup through the cooperation of the anti-slip ring, the limit ring and the bottom spring and the trigger switch in the detection component. Once it is detected that the product positioning suction cup falls off due to insufficient adsorption force caused by deformation, the system will immediately trigger the prompt alarm, send out visual and auditory alarms, and remind the operator to intervene in time to check and replace the deformed suction cup, shorten the troubleshooting time, and reduce the risk of production interruption;

[0018] 2. In this solution, by providing a cover opening mechanism, the cooperation of the cover opening electric cylinder, the cover opening air cylinder and the cover opening suction cup and other components is used to realize the efficient opening of the upper cover of the wafer carrier. During the cover opening process, the cover opening finger buckle can accurately clamp the two sides of the upper cover, and a plurality of cover opening suction cups provide a stable adsorption force to ensure the smooth opening action, significantly shorten the loading and unloading time of the wafer carrier, and improve the overall efficiency of the production line. The operator does not need to manually open the upper cover of the carrier, which reduces the labor cost and operation risk;

[0019] 3. In the present solution, a bearing mechanism is provided, and through the cooperation of the bearing mounting frame, bearing column, roller shaft and other components, a stable bearing and transmission platform is provided for the chip carrier. The bearing lifting cylinder, clamping cylinder and other components in the bearing mechanism can realize the flexible lifting and lowering of the bearing mounting frame and the adjustment of the clamping force, so that the bearing mechanism can adapt to chip carriers of different sizes and weights, thereby improving the versatility and flexibility of the equipment. At the same time, by adjusting the clamping force, the stability of the chip carrier during the transmission and positioning process can be ensured, and the risk of the carrier slipping or damage due to insufficient clamping force can be avoided. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0021] Figure 2 It is a schematic diagram of the lifting mechanism structure of the present invention;

[0022] Figure 3 It is a schematic diagram of the structure of the cover opening mechanism of the present invention;

[0023] Figure 4 It is a schematic diagram of the structure of the conveying mechanism of the present invention;

[0024] Figure 5 It is a structural schematic diagram of the bearing mechanism of the present invention;

[0025] Figure 6 It is a schematic diagram of the unlocking mechanism structure of the present invention;

[0026] Figure 7 It is a schematic diagram of the structure of the anti-slip mechanism of the present invention;

[0027] Figure 8 It is a schematic diagram of the structure of the adjustment component of the present invention;

[0028] Fig. 9 It is a schematic diagram of the structure of the detection component of the present invention;

[0029] Fig.10 For the present invention Fig. 9 Enlarged view of point A in the middle.

[0030] In the figure: 1. lifting frame; 2. connecting column; 3. carrier body; 4. bottom force plate; 5. lifting motor; 6. driven support rod; 7. exhaust port; 8. level detector; 9. signal broadcaster; 10. lifting platform baffle; 11. lifting motor; 12. cover opening electric cylinder; 13. cover opening guide shaft; 14. cover opening installation plate; 15. cover opening installation frame; 16. pressure block; 17. cover opening column; 18. cover opening cylinder; 19. Cylinder seat; 20. Open cover connection buckle; 21. Open cover shaft; 22. Open cover finger buckle; 23. Limit bolt; 24. Buffer; 25. Open cover suction cup; 26. Limit ring; 27. Anti-slip ring; 28. Horizontal lifting plate; 29. ​​Rotating base plate; 30. Positioning pin; 31. Conveying guard plate; 32. Wheel; 33. Roller shaft; 34. Active side guide plate; 35. Active side guide shaft; 36. Active side air cylinder; 37, fixed side guide plate; 38, bottom spring; 39, carrier positioning block; 40, platform base plate; 41, conveying motor; 42, load-bearing column; 43, load-bearing mounting frame; 44, clamping L seat; 45, lifting cylinder; 46, clamping cylinder; 47, load-bearing lifting cylinder; 48, warning alarm; 49, vacuum rod; 50, product positioning suction cup; 51, unlocking guide shaft; 52, unlocking rod mounting plate; 53, positioning mounting plate; 54, bottom large flat plate; 55, positioning electric cylinder; 56, guide telescopic rod; 57, unlocking linear bearing; 58, positioning linear bearing; 59, unlocking electric cylinder; 60, slider; 61, mounting vertical plate; 62, top pressure pile; 63, trigger switch; 64, deflection ring; 65, meshing gear ring; 66, adjusting gear cylinder; 67, fixing gear disc; 68, meshing rod; 69, meshing disc; 70, fixing frame. DETAILED DESCRIPTION

[0031] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0032] Example 1: Please refer to Figures 1 to 10 , a wafer carrier loading and unloading mechanism, comprising:

[0033] The lifting mechanism comprises: two lifting frames 1, a platform base plate 40 is arranged between the two lifting frames 1, a conveying motor 41 is arranged on the bottom surface of the platform base plate 40, lifting platform baffles 10 are fixedly installed on the front and rear surfaces of the platform base plate 40, mounting vertical plates 61 are fixedly installed on the left and right surfaces of the platform base plate 40, a slider 60 is arranged on one side of the mounting vertical plates 61, a screw rod matched with the slider 60 is arranged on the adjacent side of the two lifting frames 1, and a lifting motor 11 for driving the lifting mechanism to move is arranged on the bottom surface of the platform base plate 40;

[0034] The lifting mechanism supports the platform base plate 40 through two lifting frames 1 to achieve vertical movement. The conveying motor 41 is installed on the bottom surface of the platform base plate 40 to provide initial power. The lifting motor 11 drives the screw rod to rotate and cooperates with the slider 60 on the mounting vertical plate 61 to make the platform base plate 40 and all the mechanisms thereon rise and fall smoothly. The lifting platform baffle 10 ensures stability during the lifting process to prevent the platform base plate 40 from shifting.

[0035] The cover opening mechanism comprises: a cover opening electric cylinder 12, a cover opening mounting plate 14 is arranged at the end of the output shaft of the cover opening electric cylinder 12, a cover opening column 17 is arranged on the bottom surface of the cover opening mounting plate 14, the bottom surface of the cover opening column 17 is fixedly connected to the upper surface of the platform large bottom plate 40, a cover opening guide shaft 13 is fixedly installed on the upper surface of the cover opening mounting plate 14, a cover opening mounting frame 15 is arranged on the bottom surface of the cover opening mounting plate 14, a plurality of cover opening suction cups 25 are arranged on the bottom surface of the cover opening mounting frame 15, and a buffer 2 is also arranged on the bottom surface of the cover opening mounting frame 15 4. A limiting bolt 23 is provided on the side surface of the cover opening installation frame 15, a plurality of pressing blocks 16 are provided on the side surface of the cover opening installation frame 15, a cylinder seat 19 is provided on one side surface of the cover opening installation plate 14, a cover opening cylinder 18 is provided on one side surface of the cylinder seat 19, a cover opening connecting buckle 20 is provided on the bottom surface of the cylinder seat 19, one end of the cover opening connecting buckle 20 is connected to the end of the output shaft of the cylinder seat 19, a cover opening rotating shaft 21 is provided on one side surface of the cover opening connecting buckle 20, and a cover opening rotating shaft 21 is provided between the cover opening connecting buckle 20 and the cover opening finger buckle 22;

[0036] When it is necessary to open the cover, the cover-opening electric cylinder 12 of the cover-opening mechanism is started, driving the cover-opening mounting frame 15 and all internal components to move in the vertical direction, so that the cover-opening finger buckle 22 is close to the upper cover of the carrier body 3. When the cover-opening finger buckle 22 reaches the preset position, the cover-opening cylinder 18 starts to work, and its output shaft is extended and retracted, and the cover-opening finger buckle 22 is driven to rotate around a certain axis through the cover-opening connecting buckle 20 and the cover-opening rotating shaft 21, so as to clamp the upper cover of the carrier body 3 on both sides, and then use multiple cover-opening suction cups 25 to suck the upper cover of the carrier body 3, and as the subsequent cover-opening mechanism rises, the upper and lower covers of the carrier body 3 are separated, and the buffer 24 provides buffering when the cover-opening finger buckle 22 contacts the upper cover to reduce impact and vibration.

[0037] The conveying mechanism includes: a carrier positioning block 39, which is fixedly mounted on the upper surface of the platform base plate 40, and conveying guard plates 31 are respectively arranged on both sides of the upper surface of the platform base plate 40, and a fixed side guide plate 37 and an active side guide plate 34 are respectively arranged on the side surfaces of the two conveying guard plates 31, and an active side cylinder 36 and an active side guide shaft 35 are arranged at the center of the active side guide plate 34, and a plurality of roller shafts 33 are arranged between the two conveying guard plates 31, and a plurality of wheel pieces 32 are arranged on the surface of the roller shafts 33, and a carrier body 3 is arranged on the upper surface of the wheel pieces 32;

[0038] After the carrier body 3 is placed at one end of the conveying mechanism, the conveying mechanism supports and transmits the carrier body 3 through the roller shaft 33 and the wheel 32, and uses the fixed side guide plate 37 to cooperate with the active side guide plate 34 to ensure the stability and directionality of the carrier body 3 during the transmission process. After moving to a certain position, the carrier body 3 is blocked by the carrier positioning block 39, ensuring the safety and accuracy of the carrier during the transmission process.

[0039] The bearing mechanism includes: a bearing installation frame 43, which is located on the upper surface of the platform base plate 40 and can be lifted and lowered. A plurality of bearing columns 42 are fixedly installed on the upper surface of the bearing installation frame 43. The bottom surfaces of both sides of the bearing installation frame 43 are provided with bearing lifting cylinders 47. A lifting cylinder 45 and a clamping cylinder 46 are also fixedly installed on the upper surface of the platform base plate 40. A clamping L seat 44 is also provided at the end of the output shaft on the upper surface of the lifting cylinder 45.

[0040] After the carrier body 3 reaches the designated working position, the active side cylinder 36 cooperates with the active side guide shaft 35. According to the characteristics of the active side guide plate 34 and the active side guide shaft 35 connected to the active side cylinder 36, the active side guide plate 34 is driven to extend and retract by the active side cylinder 36, thereby clamping or releasing the combined carrier 3.

[0041] The unlocking mechanism comprises: an unlocking rod mounting plate 52, a plurality of guiding telescopic rods 56 are arranged on the upper surface of the unlocking rod mounting plate 52, a positioning mounting plate 53 is arranged below the unlocking rod mounting plate 52, a plurality of positioning linear bearings 58 are arranged on the upper surface of the positioning mounting plate 53, a bottom large flat plate 54 is arranged below the positioning mounting plate 53, a positioning electric cylinder 55 and an unlocking electric cylinder 59 are arranged on the bottom surface of the bottom large flat plate 54, the upper surface of the positioning electric cylinder 55 is fixedly connected to the bottom surface of the positioning mounting plate 53, a plurality of vacuum rods 49 are arranged on the upper surface of the positioning mounting plate 53, an exhaust port 7 is arranged on one side surface of the vacuum rod 49, a product positioning suction cup 50 is arranged on the end of the vacuum rod 49, an unlocking guide shaft 51 is also arranged on the upper surface of the positioning mounting plate 53, and an unlocking linear bearing 57 is sleeved on the surface of the unlocking guide shaft 51;

[0042] When unlocking is required, the unlocking electric cylinder 59 is started, and its output shaft pushes the telescopic rod 48 to rise vertically along the unlocking guide shaft 51, and the movement of the telescopic rod 48 drives the unlocking rod mounting plate 52 to move synchronously. After unlocking is completed, the positioning electric cylinder 55 is started, and drives the positioning mounting plate 53 to rise and fall vertically along the unlocking guide shaft 51. The movement of the positioning mounting plate 53 drives the vacuum rod 49 and the product positioning suction cup 50 to move synchronously, until the product positioning suction cup 50 accurately contacts the bottom surface of the carrier body 3, the vacuum rod 49 is immediately started, and negative pressure is generated by the suction cup to firmly adsorb the product in the specified position to complete product positioning.

[0043] The above is the basic process of using this device.

[0044] However, during the actual use of the device, the cover opening mechanism uses the suction cup to generate adsorption force by forming a vacuum seal. However, with the increase in the number of uses, the shape of the suction cup will gradually change. The suction cup is usually made of elastic materials. These materials will experience material fatigue after multiple deformations, that is, their elasticity gradually weakens, which means that the suction cup can no longer quickly and fully restore its original shape when under pressure, and thus cannot fit tightly on the adsorption surface. The reduction in elasticity directly affects the sealing effect and adsorption force of the suction cup, making it difficult to maintain a stable adsorption state, especially the center area may no longer be flat or slightly concave, and the edges may also become curled or uneven. These deformations destroy the originally designed sealing structure, making it impossible for the suction cup to form a tight fit when contacting the surface, resulting in air leakage, reducing the vacuum sealing effect, and further weakening the adsorption force.

[0045] Therefore, based on the above problem, we designed an anti-slip mechanism, which consists of an adjustment component and a detection component. The adjustment component includes: a rotating base plate 29, which is arranged on the upper surface of the positioning mounting plate 53 and can rotate. Two driven support rods 6 are arranged on the upper surface of the rotating base plate 29. A lifting motor 5 is arranged on the upper surface of the rotating base plate 29. A bottom force plate 4 is fixedly installed at the end of the upper surface output shaft of the lifting motor 5. The bottom force plate 4 is located on the bottom surface of the unlocking rod mounting plate 52. A plurality of connecting columns 2 are fixedly installed on the upper surface of the bottom force plate 4. A horizontal lifting plate 28 is arranged at the end of the connecting column 2. The horizontal lifting plate 28 is located on the upper surface of the platform large bottom plate 40 and below the wheel 32. The horizontal lifting plate 28 is composed of a plurality of sub-plates, each of which is connected by a spring. A horizontal detector 8 is arranged on the bottom surface of the horizontal lifting plate 28, and a surface on one side of the horizontal detector 8 is provided. Signal broadcaster 9, a plurality of positioning pins 30 are arranged on the side surface at the center of the horizontal lifting plate 28, and the adjustment component also includes: an engaging gear ring 65, a side surface of the engaging gear ring 65 is engaged with an engaging disk 69, a brake motor for driving the engaging disk 69 is arranged on the upper surface of the rotating base plate 29, a deflection ring 64 is arranged on the bottom surface of the engaging gear ring 65, the engaging gear ring 65 is attached to the upper surface of the deflection ring 64 for rotation, an adjusting gear cylinder 66 is fixedly connected to the bottom surface of the engaging gear ring 65, a fixed gear disk 67 engaged with the adjusting gear cylinder 66 is arranged on both side surfaces of the adjusting gear cylinder 66, a fixing frame 70 is arranged on one side surface of the fixed gear disk 67, the top surface of the fixing frame 70 is fixedly connected to the bottom surface of the positioning mounting plate 53, an engaging rod 68 engaged with the adjusting gear cylinder 66 is arranged on the bottom surface of the adjusting gear cylinder 66, a small motor for driving the engaging rod 68 is arranged on one side surface of the engaging rod 68, and the small motor is fixedly mounted on one side surface of the fixed gear disk 67;

[0046] When it is necessary to adjust the position of the product positioning suction cup 50 or correct its deformation, the lifting motor 5 is started by the staff signal, and its output shaft rotates, driving the bottom force plate 4 and the connecting column 2 and the horizontal lifting plate 28 connected thereto to rise. When the horizontal lifting plate 28 is not in the rising state, it is located below the wheel piece 32, and the spring is in the contracted state. At this time, the horizontal lifting plate 28 does not contact the bottom surface of the wheel piece 32 and does not interfere with the wheel piece 32. The horizontal detector 8 monitors the flatness of the horizontal lifting plate 28 in real time to ensure that it remains horizontal during the rising process to avoid adjustments caused by tilting. Error, if unevenness is detected, the signal broadcaster 9 will sound an alarm to prompt the operator to make adjustments. The operator controls the brake motor to drive the meshing disk 69 to rotate, and through the meshing action of the meshing gear ring 65, the deflection ring 64 and the entire adjustment structure above it are driven to rotate to complete the lateral position adjustment, and through the meshing action of the adjusting gear cylinder 66 and the fixed gear disk 67, the meshing rod 68 is driven by a small motor to rotate, and the meshing effect with the adjusting gear cylinder 66 drives the equipment to adjust the vertical position, thereby completing the position adjustment of the horizontal lifting plate 28 until it is horizontal. The lifting plate 28 is in a horizontal state. As the horizontal lifting plate 28 rises, the sub-plate below the horizontal lifting plate 28 fits the bottom surface of the wheel piece 32 and stops rising, while the upper sub-plate continues to rise, stretching the spring, and finally fits the bottom surface of the carrier body 3, driving the carrier body 3 to rise slightly. At this time, the distance between the vacuum rod 49 and the product positioning suction cup 50 and the bottom surface of the carrier body 3 will also change slightly. In this process, the product positioning suction cup 50 that has been deformed has changed in shape, and the reduction in elasticity directly affects the sealing effect and adsorption force of the suction cup. , making it difficult to maintain a stable adsorption state, and unable to fit tightly on the adsorption surface like a good product positioning suction cup 50. As the horizontal lifting plate 28 rises, the deformed product positioning suction cup 50 will fall off, thereby detecting which specific product positioning suction cup 50 has been deformed. Subsequently, the lifting motor 5 drives the horizontal lifting plate 28 to descend slightly, so that the detached product positioning suction cup 50 is re-adsorbed onto the bottom surface of the carrier body 3 and the work is completed. After the work is completed, the staff can replace the deformed carrier body 3 according to the detection results.

[0047] Detection component, the detection component includes: an anti-slip ring 27, the anti-slip ring 27 is sleeved on the ends of several vacuum rods 49 at the center of the unlocking rod mounting plate 52, a sliding protrusion is arranged on the side close to the surface of one side of the anti-slip ring 27, a lifting and lowering limiting ring 26 is arranged on the surface of one side of the anti-slip ring 27, and sliding channels matched with the sliding protrusion are opened on the two side surfaces of the limiting ring 26. The limiting ring 26 cooperates with the positioning pin 30 to limit the distance between the horizontal lifting plate 28 and the product positioning suction cup 50. The detection component also includes: a bottom spring 38, the bottom spring 38 is arranged on the bottom surface of the vacuum rod 49, a top pressure pile 62 is arranged at the center of the bottom spring 38, the upper surface of the top pressure pile 62 is fixedly installed on the bottom surface of the vacuum rod 49, a trigger switch 63 is arranged below the top pressure pile 62, and a prompt alarm 48 is arranged on the bottom surface of the trigger switch 63, a prompt light is arranged on the bottom surface of the prompt alarm 48, and a speaker is arranged on the side surface of the prompt alarm 48;

[0048] The anti-slip ring 27 is sleeved on the end of the vacuum rod 49, and its sliding protrusion cooperates with the sliding path of the limiting ring 26. When the horizontal lifting plate 28 rises, the positioning pin 30 on the side of the horizontal lifting plate 28 contacts the limiting ring 26 from the bottom and rises with the limiting ring 26. After the limiting ring 26 reaches the limit distance, the horizontal lifting plate 28 is also restricted, which prevents the horizontal lifting plate 28 from driving the carrier body 3 to rise too high, causing the product positioning suction cup 50 with an intact bottom surface to fall off due to excessive pulling effect. When the deformed product positioning suction cup 50 falls off due to insufficient adsorption force, the compression amount of the bottom spring 38 will change. When the compression amount reaches a certain level, the jacking pile 62 will trigger the trigger switch 63, and the trigger switch 63 will immediately activate the warning alarm 48, issuing a visual (warning light) and an auditory (speaker) alarm to remind the operator to check and adjust the status of the product positioning suction cup 50 in time.

[0049] The working principle of the present invention is:

[0050] When the equipment is in use, the staff uses the lifting mechanism to support the platform base plate 40 through two lifting frames 1 to achieve vertical movement. The conveying motor 41 is installed on the bottom surface of the platform base plate 40 to provide initial power. The lifting motor 11 drives the screw rod to rotate and cooperates with the slider 60 on the mounting vertical plate 61 to make the platform base plate 40 and all the mechanisms thereon rise and fall smoothly. The lifting platform baffle 10 ensures stability during the lifting process to prevent the platform base plate 40 from deflecting.

[0051] Subsequently, after the robot arm is provided to place the carrier body 3 at one end of the conveying mechanism, the conveying mechanism supports and transmits the carrier body 3 through the roller shaft 33 and the wheel piece 32, and uses the fixed side guide plate 37 to cooperate with the active side guide plate 34 to ensure the stability and directionality of the carrier body 3 during the transmission process. After the carrier body 3 moves to a certain position, it is blocked by the carrier positioning block 39, ensuring the safety and accuracy of the carrier during the transmission process;

[0052] After the carrier body 3 reaches the designated working position, the active side cylinder 36 cooperates with the active side guide shaft 35. According to the characteristics of the active side guide plate 34 and the active side guide shaft 35 connected to the active side cylinder 36, the active side cylinder 36 drives the active side guide plate 34 to extend and retract, thereby clamping or releasing the combined carrier 3.

[0053] When unlocking is required, the unlocking electric cylinder 59 is started, and its output shaft pushes the telescopic rod 48 to rise vertically along the unlocking guide shaft 51, and the unlocking rod mounting plate 52 is driven to move synchronously with the movement of the telescopic rod 48. After unlocking is completed, the positioning electric cylinder 55 is started, and the positioning mounting plate 53 is driven to rise and fall vertically along the unlocking guide shaft 51. The movement of the positioning mounting plate 53 drives the vacuum rod 49 and the product positioning suction cup 50 to move synchronously until the product positioning suction cup 50 accurately contacts the bottom surface of the carrier body 3. The vacuum rod 49 is then started, and negative pressure is generated by the suction cup to firmly adsorb the product at the specified position, thereby completing product positioning.

[0054] When it is necessary to open the cover, the cover-opening electric cylinder 12 of the cover-opening mechanism is started, driving the cover-opening mounting frame 15 and all internal components to move in the vertical direction, so that the cover-opening finger buckle 22 is close to the upper cover of the carrier body 3. When the cover-opening finger buckle 22 reaches the preset position, the cover-opening cylinder 18 starts to work, and its output shaft is extended and retracted, and the cover-opening finger buckle 22 is driven to rotate around a certain axis through the cover-opening connecting buckle 20 and the cover-opening rotating shaft 21, and the upper cover of the carrier body 3 is clamped from both sides, and then the upper cover of the carrier body 3 is sucked by multiple cover-opening suction cups 25, and the upper and lower covers of the carrier body 3 are separated with the subsequent lifting action of the cover-opening mechanism. The buffer 24 provides buffering when the cover-opening finger buckle 22 contacts the upper cover to reduce impact and vibration;

[0055] When it is necessary to adjust the position of the product positioning suction cup 50 or correct its deformation, the lifting motor 5 is started by the staff signal, and its output shaft rotates, driving the bottom force plate 4 and the connecting column 2 and horizontal lifting plate 28 connected thereto to rise. The horizontal detector 8 monitors the flatness of the horizontal lifting plate 28 in real time to ensure that it remains horizontal during the rising process to avoid adjustment errors caused by tilting. If unevenness is detected, the signal broadcaster 9 will sound an alarm to prompt the operator to make adjustments. The operator controls the brake motor to drive the meshing disk 69 to rotate, and through the meshing action of the meshing gear ring 65, the deflection ring 64 and the entire adjustment structure above it are driven to rotate to complete the lateral position adjustment, and through the meshing action of the adjusting gear cylinder 66 and the fixed gear disk 67, the meshing rod 68 is driven by a small motor to rotate, and the equipment is driven to adjust the vertical position through the meshing effect with the adjusting gear cylinder 66, thereby completing the horizontal The position of the lifting plate 28 is adjusted until the horizontal lifting plate 28 is in a horizontal state. As the horizontal lifting plate 28 rises, it drives the carrier body 3 to rise slightly. At this time, the distance between the vacuum rod 49 and the product positioning suction cup 50 and the bottom surface of the carrier body 3 will also change slightly. In this process, the deformed product positioning suction cup 50 cannot fit tightly on the adsorption surface like the intact product positioning suction cup 50 because of the change in shape. As the horizontal lifting plate 28 rises, the deformed product positioning suction cup 50 will fall off, so as to detect which specific product positioning suction cup 50 has been deformed. Subsequently, the lifting motor 5 drives the horizontal lifting plate 28 to descend slightly, so that the detached product positioning suction cup 50 is adsorbed again on the bottom surface of the carrier body 3, and the work is completed. After the work is completed, the staff can replace the deformed carrier body 3 according to the detection results.

[0056] The anti-slip ring 27 is sleeved on the end of the vacuum rod 49, and its sliding protrusion cooperates with the sliding path of the limiting ring 26. When the horizontal lifting plate 28 rises, the positioning pin 30 on the side of the horizontal lifting plate 28 contacts the limiting ring 26 from the bottom and rises with the limiting ring 26. After the limiting ring 26 reaches the limit distance, the horizontal lifting plate 28 is also restricted. When the deformed product positioning suction cup 50 falls off due to insufficient adsorption force, the compression amount of the bottom spring 38 will change. When the compression amount reaches a certain level, the jacking pile 62 will trigger the trigger switch 63, and the trigger switch 63 will immediately activate the warning alarm 48, issuing a visual (prompt light) and auditory (speaker) alarm to remind the operator to check and adjust the status of the product positioning suction cup 50 in time.

[0057] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A wafer carrier loading and unloading mechanism, characterized in that: include: The anti-slip mechanism comprises an adjustment component, wherein the adjustment component comprises: a rotating base plate (29), wherein the rotating base plate (29) is arranged on the upper surface of the positioning mounting plate (53) and can rotate, wherein two driven support rods (6) are arranged on the upper surface of the rotating base plate (29), wherein a lifting motor (5) is arranged on the upper surface of the rotating base plate (29), wherein a bottom force-bearing plate (4) is fixedly mounted on the end of the output shaft on the upper surface of the lifting motor (5), wherein a plurality of connecting columns (2) are fixedly mounted on the upper surface of the bottom force-bearing plate (4), wherein a horizontal lifting plate (28) is arranged on the end of the connecting column (2), wherein the horizontal lifting plate (28) is composed of a plurality of sub-plates, and each sub-plate is connected by a spring; The cover opening mechanism comprises: a cover opening electric cylinder (12); a cover opening mounting plate (14) is arranged at the end of the output shaft of the cover opening electric cylinder (12); a cover opening column (17) is arranged on the bottom surface of the cover opening mounting plate (14); a cover opening guide shaft (13) is fixedly mounted on the upper surface of the cover opening mounting plate (14); a cover opening mounting frame (15) is arranged on the bottom surface of the cover opening mounting plate (14); a plurality of cover opening suction cups (25) are arranged on the bottom surface of the cover opening mounting frame (15); a buffer (24) is also arranged on the bottom surface of the cover opening mounting frame (15); and a side surface of the cover opening mounting frame (15) is provided with a plurality of suction cups (25). A limiting bolt (23) is arranged, a plurality of pressure blocks (16) are arranged on the side surface of the cover opening installation frame (15), a cylinder seat (19) is arranged on one side surface of the cover opening installation plate (14), a cover opening cylinder (18) is arranged on one side surface of the cylinder seat (19), a cover opening connecting buckle (20) is arranged on the bottom surface of the cylinder seat (19), one end of the cover opening connecting buckle (20) is connected to the end of the output shaft of the cylinder seat (19), a cover opening rotating shaft (21) is arranged on one side surface of the cover opening connecting buckle (20), and a cover opening rotating shaft (21) is arranged between the cover opening connecting buckle (20) and the cover opening finger buckle (22); The bearing mechanism comprises: a bearing installation frame (43), the bearing installation frame (43) is located on the upper surface of the platform base plate (40) and can be raised and lowered, a plurality of bearing columns (42) are fixedly installed on the upper surface of the bearing installation frame (43), bearing lifting cylinders (47) are arranged on the bottom surfaces of both sides of the bearing installation frame (43), a lifting cylinder (45) and a clamping cylinder (46) are also fixedly installed on the upper surface of the platform base plate (40), and a clamping L seat (44) is also arranged at the end of the output shaft on the upper surface of the lifting cylinder (45).

2. A wafer carrier loading and unloading mechanism according to claim 1, characterized in that: The adjustment assembly also includes: an engaging toothed ring (65), one side surface of the engaging toothed ring (65) is engaged with an engaging disk (69), the upper surface of the rotating base plate (29) is provided with a brake motor for driving the engaging disk (69), the bottom surface of the engaging toothed ring (65) is provided with a deflection ring (64), the engaging toothed ring (65) is attached to the upper surface of the deflection ring (64) for rotation, the bottom surface of the engaging toothed ring (65) is fixedly connected with an adjusting gear cylinder (66), both side surfaces of the adjusting gear cylinder (66) are provided with fixed toothed disks (67) engaged therewith, one side surface of the fixed toothed disk (67) is provided with a fixing frame (70), the top surface of the fixing frame (70) is fixedly connected to the bottom surface of the positioning mounting plate (53), and the bottom surface of the adjusting gear cylinder (66) is provided with an engaging rod (68) engaged therewith.

3. The wafer carrier loading and unloading mechanism according to claim 1, characterized in that: A lifting mechanism, the lifting mechanism comprising: two lifting frames (1), a platform base plate (40) is arranged between the two lifting frames (1), a conveying motor (41) is arranged on the bottom surface of the platform base plate (40), lifting platform baffles (10) are fixedly installed on the front and rear side surfaces of the platform base plate (40), mounting vertical plates (61) are fixedly installed on the left and right side surfaces of the platform base plate (40), a slider (60) is arranged on one side surface of the mounting vertical plate (61), a screw rod matched with the slider (60) is arranged on the adjacent side of the two lifting frames (1), and a lifting motor (11) for driving the lifting mechanism to move is arranged on the bottom surface of the platform base plate (40).

4. The wafer carrier loading and unloading mechanism according to claim 1, characterized in that: A conveying mechanism, the conveying mechanism comprising: a carrier positioning block (39), the carrier positioning block (39) is fixedly mounted on the upper surface of a platform base plate (40), both sides of the upper surface of the platform base plate (40) are respectively provided with conveying guard plates (31), the surfaces of the two conveying guard plates (31) adjacent to each other are respectively provided with a fixed side guide plate (37) and an active side guide plate (34), the center of the active side guide plate (34) is provided with an active side cylinder (36) and an active side guide shaft (35), a plurality of roller shafts (33) are provided between the two conveying guard plates (31), a plurality of wheel plates (32) are provided on the surface of the roller shaft (33), and a carrier body (3) is mounted on the upper surface of the wheel plates (32).

5. The wafer carrier loading and unloading mechanism according to claim 1, characterized in that: The unlocking mechanism comprises: an unlocking rod mounting plate (52), the upper surface of which is provided with a plurality of guiding telescopic rods (56), a positioning mounting plate (53) is provided below the unlocking rod mounting plate (52), the upper surface of which is provided with a plurality of positioning linear bearings (58), a bottom large flat plate (54) is provided below the positioning mounting plate (53), and the bottom surface of which is provided with a positioning electric cylinder (55) and an unlocking electric cylinder (59), the upper surface of the positioning electric cylinder (55) is fixedly connected to the bottom surface of the positioning mounting plate (53), a plurality of vacuum rods (49) are arranged on the upper surface of the positioning mounting plate (53), an exhaust port (7) is arranged on one side surface of the vacuum rod (49), a product positioning suction cup (50) is arranged at the end of the vacuum rod (49), an unlocking guide shaft (51) is also arranged on the upper surface of the positioning mounting plate (53), and an unlocking linear bearing (57) is sleeved on the surface of the unlocking guide shaft (51).

6. The wafer carrier loading and unloading mechanism according to claim 1, characterized in that: The detection component, the anti-slip mechanism also includes a detection component, the detection component includes: an anti-slip ring (27), the anti-slip ring (27) is sleeved on the ends of several vacuum rods (49) at the center of the unlocking rod mounting plate (52), a sliding protrusion is arranged on one side of the anti-slip ring (27), and a lifting and lowering limiting ring (26) is arranged on one side of the anti-slip ring (27).

7. The wafer carrier loading and unloading mechanism according to claim 6, characterized in that: The detection component also includes: a bottom spring (38), the bottom spring (38) is arranged on the bottom surface of the vacuum rod (49), a top pressure pile (62) is arranged at the center of the bottom spring (38), the upper surface of the top pressure pile (62) is fixedly installed on the bottom surface of the vacuum rod (49), a trigger switch (63) is arranged below the top pressure pile (62), and a prompt alarm (48) is arranged on the bottom surface of the trigger switch (63).

8. The wafer carrier loading and unloading mechanism according to claim 1, characterized in that: The adjustment component also includes: a horizontal detector (8), the horizontal detector (8) is located on the bottom surface of the horizontal lifting plate (28), a signal broadcaster (9) is provided on one side surface of the horizontal detector (8), and a plurality of positioning pins (30) are provided on the side surface at the center of the horizontal lifting plate (28).

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