A film reversing system based on magnetic levitation transmission line

Abstract

The present application provides a film reversing system based on a magnetic levitation transmission line, which belongs to the field of semiconductor automation process technology, and specifically includes a magnetic levitation transmission line unit, a wafer transmission unit and a carrier flipping and handling unit. The magnetic levitation transmission line unit includes a transmission main line, and the magnetic levitation transmission line unit also includes a carrier loading port, a carrier unloading port, a vertical warehouse loading port, a vertical warehouse unloading port, and a magnetic levitation line mover moving on the transmission line. The magnetic levitation line mover pulls the first carrier and the second carrier to move on the transmission line. The vertical warehouse loading port and the vertical warehouse unloading port are respectively provided with a carrier flipping and handling unit; the transmission main line is provided with a plurality of film reversing forks connected in sequence, and each film reversing fork is equipped with a wafer transmission unit, and the first carrier and the second carrier are cached and scheduled when the wafer transmission unit performs a film reversing action on the wafer through the film reversing fork. The present application scheme improves the film reversing efficiency and makes the fully automatic transmission of the carrier feasible.

Description

Technical Field

[0001] The present application relates to the field of semiconductor automation process technology, and in particular to a wafer flipping system based on a magnetic levitation transmission line. Background Art

[0002] Currently, wafer rewinding before loading and unloading in wafer factories is completed by traditional film rewinding machines. This type of film rewinding machine has high requirements on the carrier (i.e. cassette) handling efficiency, occupies a large area, and is inconvenient to enter and exit the warehouse after processing. It relies on high-frequency manual handling. Although the use of AGV transportation can solve the manpower problem, it is costly and has extremely high requirements for the software system.

[0003] A typical scenario for wafer fab product off-line is that the operator moves the full carrier used for production to the wafer rewinder. The wafer rewinder separates the wafers into batches according to the command issued by the factory automation and moves them to the carrier used for storage, and stores the NG wafers separately in a specific carrier. Generally speaking, the materials and number of slots of the carriers used for production and storage will be different. It is common to move wafers from a 13-slot carrier to a 25-slot carrier or from a 25-slot carrier to a 36-slot carrier. The number of slots and size of the carriers are determined according to the wafer size or the specifications of each wafer fab. The processed carriers are moved to the offline vertical warehouse for storage.

[0004] Existing film rewinders are all independent devices. Generally speaking, a single film rewinder can provide 3 to 8 carrier interfaces. A vertical warehouse needs to be equipped with multiple film rewinders to ensure the productivity of the entire line. In this process, manual handling is difficult to meet the discrete handling of large quantities of multiple types of carriers. The automated carrier transmission solution is not feasible due to the decentralization of the film rewinders. Therefore, the safety and stability risks brought by this production model put great pressure on the factory automation system. Summary of the invention

[0005] In view of this, an embodiment of the present application provides a film rewinding system based on a magnetic levitation transmission line, which at least partially solves the problem in the prior art that the decentralized film rewinding machines cause manual handling to be difficult to meet the discrete handling of large quantities of multiple types of carriers and brings safety and stability risks.

[0006] The embodiment of the present application provides a film flipping system based on a magnetic levitation transmission line, the system comprising a magnetic levitation transmission line unit, a wafer transmission unit and a carrier flipping and transporting unit, the magnetic levitation transmission line unit is used to transport a first carrier and a second carrier for film flipping, the wafer transmission unit is used to flip the wafer in the first carrier to the second carrier, and the carrier flipping and transporting unit is used to flip and transport the second carrier after film flipping is completed;

[0007] The maglev transmission line unit includes a transmission line, the middle position of the transmission line is a transmission main line, the maglev transmission line unit also includes a carrier loading port and a carrier unloading port located on one side of the transmission line, a vertical warehouse loading port and a vertical warehouse unloading port located on the other side of the transmission line, and a maglev line mover moving on the transmission line, the maglev line mover is used to pull the first carrier and the second carrier to move on the transmission line, and a carrier flipping and handling unit is respectively provided at the vertical warehouse loading port and the vertical warehouse unloading port;

[0008] The main transmission line is provided with a plurality of rewinding forks connected in sequence, each of which is equipped with a wafer transmission unit, and the first carrier and the second carrier are cached and scheduled when the wafer transmission unit performs a wafer rewinding operation on the wafer through the rewinding forks.

[0009] According to a specific implementation method of an embodiment of the present application, the film rewinding fork is set to an E-shape, and the film rewinding fork includes side forks, an upper fork, a middle fork and a lower fork of the E-shape, and the wafer transfer unit is located on the outside of the side forks, and the opening side of the E-shape faces one side of the carrier loading port and the carrier unloading port. The upper fork is used for input transmission of the first carrier, the lower fork is used for input transmission of the second carrier, the middle fork is used for output transmission of the first carrier and the second carrier, and the side fork is used to reverse the wafer in the first carrier to the second carrier through the wafer transfer unit.

[0010] According to a specific implementation method of an embodiment of the present application, the wafer transfer unit includes a linear motion module, a wafer manipulator and a wafer suction fork. The wafer manipulator is arranged on the linear motion module and moves linearly on the linear motion module. The wafer suction fork is arranged on the upper side of the wafer manipulator, and the wafer is suctioned and moved by the wafer suction fork.

[0011] According to a specific implementation method of an embodiment of the present application, the wafer transfer unit also includes a wafer calibrator, a wafer mapping sensor and a character recognition code reader. The wafer calibrator is used to correct the wafer direction and center position to ensure the repeatability of the wafer position; the wafer mapping sensor is used to scan the wafer inside the carrier to confirm the presence or absence of wafers in each layer in the carrier and whether there are abnormally placed wafers; the character recognition code reader is used to read the wafer identity information.

[0012] According to a specific implementation method of an embodiment of the present application, the carrier flipping and transporting unit includes a fixed frame, a motion module, a carrier clamp and a carrier transfer mechanism. The fixed frame is respectively arranged at the loading port and the unloading port of the vertical warehouse, the motion module is fixed on the fixed frame, the carrier clamp is arranged on the motion module, and the carrier transfer mechanism is arranged on the side of the fixed frame away from the loading port of the vertical warehouse. The second carrier is clamped by the carrier clamp, and the movement of the motion module drives the carrier clamp to rotate and move, thereby realizing the transportation of the second carrier between the carrier transfer mechanism and the loading port and the unloading port of the vertical warehouse.

[0013] According to a specific implementation method of an embodiment of the present application, the motion module includes a horizontal motion module, a vertical motion module, a rotating motor and a clamp driving assembly. The horizontal motion module is fixed on a fixed frame, the vertical motion module is fixed on the horizontal motion module, the rotating motor is fixed on the bottom of the vertical motion module, and the rotating motor is connected to the carrier clamp through a connecting piece, and the connecting piece is provided with a clamp driving assembly connected to the carrier clamp.

[0014] According to a specific implementation of the embodiment of the present application, the clamping jaw driving assembly is configured as a clamping jaw driving cylinder or a clamping jaw driving electric cylinder.

[0015] According to a specific implementation method of an embodiment of the present application, the magnetic levitation transmission line unit also includes a carrier identification component and a carrier position correction sensor. The carrier identification component is located at the carrier loading port and the carrier unloading port. The carrier position correction sensor is arranged close to the carrier flipping and handling unit. The carrier identification component is used to identify the carrier information. The carrier position correction sensor is used to avoid the risk of collision when flipping the wafer in the first carrier to the second carrier.

[0016] According to a specific implementation of an embodiment of the present application, the vehicle identification component is configured as a vehicle type detection sensor and / or a vehicle code reader.

[0017] According to a specific implementation of the embodiment of the present application, two adjacent film reversing forks are provided with a group of common paths.

[0018] Beneficial effects:

[0019] The film rewinding system based on the magnetic levitation transmission line in the embodiment of the present application is a high-speed film rewinding and loading and unloading module based on the magnetic levitation transmission line, which takes advantage of the flexible combination of the magnetic levitation line to achieve the unified loading and unloading interface of the carrier during multi-station parallel film rewinding;

[0020] Based on the material scheduling advantage brought by the multi-movement structure of the magnetic levitation line, the present invention reduces the average single running distance of the robot during the wafer rewinding process, realizes the real-time entry and exit of the carrier according to the wafer rewinding process, and improves the utilization rate of the wafer robot unit;

[0021] The parallel operation of multiple rewinding stations and carrier scheduling based on the magnetic levitation transmission line greatly reduces the manpower consumption in the production process. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0023] Figure 1 is a structural diagram of a film reversing system based on a magnetic levitation transmission line according to an embodiment of the present invention;

[0024] Figure 2 is a structural diagram of a magnetic levitation transmission line unit according to an embodiment of the present invention;

[0025] Figure 3 is a structural diagram of a wafer transfer unit according to an embodiment of the present invention;

[0026] Figure 4 is a structural diagram of a carrier flipping and transporting unit according to an embodiment of the present invention;

[0027] Figure 5 is a structural diagram of a carrier according to an embodiment of the present invention;

[0028] Figure 6 is a distribution diagram of the reversing bifurcations according to an embodiment of the present invention;

[0029] Figure 7 4 is a structural diagram of a film reversing fork according to an embodiment of the present invention.

[0030] In the figure: 100, maglev transmission line unit, 101, carrier type detection sensor, 102, carrier code reader, 103, carrier position correction sensor, 104, maglev line mover, 105, carrier loading port, 106, carrier unloading port, 107, transmission main line, 108, reversing fork, 1081, upper fork, 1082, middle fork, 1083, lower fork, 1084, side fork, 109, vertical warehouse loading port, 110, vertical warehouse unloading port, 111, first carrier Tool, 112, second carrier, 200, wafer transfer unit, 201, wafer robot, 202, linear motion module, 203, wafer calibrator, 204, wafer mapping sensor, 205, wafer adsorption fork, 206, character recognition reader, 300, carrier flipping and handling unit, 301, horizontal motion module, 302, vertical motion module, 303, rotating motor, 304, clamping jaw drive assembly, 305, carrier clamping jaw, 306, carrier transfer mechanism. DETAILED DESCRIPTION

[0031] The embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0032] The following describes the implementation methods of the present application through specific examples, and those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The present application can also be implemented or applied through other different specific implementation methods, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that, in the absence of conflict, the following embodiments and the features in the embodiments can be combined with each other. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work belong to the scope of protection of the present application.

[0033] It should be noted that various aspects of the embodiments within the scope of the appended claims are described below. It should be apparent that the aspects described herein can be embodied in a wide variety of forms, and any specific structure and / or function described herein is merely illustrative. Based on the present application, it should be understood by those skilled in the art that an aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number of aspects described herein can be used to implement the device and / or practice the method. In addition, other structures and / or functionalities other than one or more of the aspects described herein can be used to implement this device and / or practice this method.

[0034] It should also be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the present application. The illustrations only show the components related to the present application rather than being drawn according to the number, shape and size of the components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed at will, and the component layout may also be more complicated.

[0035] Additionally, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, it will be understood by those skilled in the art that the aspects described may be practiced without these specific details.

[0036] The present application embodiment provides a film reversing system based on a magnetic levitation transmission line. Figures 1 to 7 Describe in detail.

[0037] Reference Figures 1 to 4The system includes a magnetic levitation transmission line unit 100, a wafer transmission unit 200 and a carrier flipping and transporting unit 300. The magnetic levitation transmission line unit 100 is used to transmit a first carrier 111 and a second carrier 112 for flipping. The wafer transmission unit 200 is used to flip the wafer in the first carrier 111 to the second carrier 112. The carrier flipping and transporting unit 300 is used to flip and transport the second carrier 112 after flipping. The magnetic levitation transmission line unit 100 includes a transmission line, the middle position of the transmission line is a transmission main line 107, and the magnetic levitation transmission line unit 100 also includes a carrier loading port 105 and a carrier unloading port 105 located on one side of the transmission line. 6. A vertical warehouse loading port 109 and a vertical warehouse unloading port 110 located on the other side of the transmission line and a magnetic levitation line mover 104 moving on the transmission line, the magnetic levitation line mover 104 is used to pull the first carrier 111 and the second carrier 112 to move on the transmission line, and a carrier flipping and handling unit 300 is respectively provided at the vertical warehouse loading port 109 and the vertical warehouse unloading port 110; a plurality of film reversing forks 108 connected in sequence are provided on the main transmission line 107, each film reversing fork 108 is equipped with a wafer transfer unit 200, and the first carrier 111 and the second carrier 112 are cached and scheduled when the wafer transfer unit 200 performs a wafer reversing action on the wafer through the film reversing fork 108.

[0038] In a specific implementation, the first carrier 111 or the second carrier 112 can be provided or taken away at the carrier loading port 105 or the carrier unloading port 106 by manual or AGV. The first carrier 111 and the second carrier 112 generally refer to two wafer carriers of different specifications, and the differences include but are not limited to the number of slots, material, color and other features. In the subsequent description of the embodiment, this difference is specifically manifested in the different number of slots of the two carriers (the height of the appearance is different, and the first carrier 111 is shorter). Figure 5 The diagram is a diagram of the wafer carrier structure. The magnetic levitation line can provide multiple rewinding forks 108, which can complete the carrier caching and scheduling when the robot performs wafer rewinding. Each wafer transmission system is equipped with a set of rewinding forks 108. After the carrier is processed on the rewinding fork 108, it returns to the transmission main line 107. The first carrier 111 returns to the carrier unloading port 106 through the main line, and the second carrier 112 reaches the vertical warehouse unloading port 110 through the main line.

[0039] In one embodiment, referring to Figure 6 and Figure 7The wafer rewinding fork 108 is set to be E-shaped, and the wafer rewinding fork 108 includes an E-shaped side fork 1084, an upper fork 1081, a middle fork 1082 and a lower fork 1083. The wafer transfer unit 200 is located on the outside of the side fork 1084, and the opening side of the E-shape faces one side of the carrier loading port 105 and the carrier unloading port 106. The upper fork 1081 is used for input transmission of the first carrier 111, the lower fork 1083 is used for input transmission of the second carrier 112, the middle fork 1082 is used for output transmission of the first carrier 111 and the second carrier 112, and the side fork 1084 is used to reverse the wafer in the first carrier 111 to the second carrier 112 through the wafer transfer unit 200.

[0040] In specific implementation, the E-shaped film rewinding fork 108 is arranged horizontally with an E-shaped opening facing downward on the magnetic levitation line, that is, the E-shaped opening faces one side of the carrier loading port 105 and the carrier unloading port 106. During the film rewinding process, the first carrier 111 enters from the upper fork 1081 and is transferred to the side fork 1084, the second carrier 112 enters from the lower fork 1083 and is cached at the side fork 1084, and the wafer transfer unit 200 is used to unload the wafers in the second carrier 112 at the side fork 1084 and load them into the first carrier 111 located at the side fork 1084. After the film rewinding is completed, the unloaded second carrier 112 and the loaded first carrier 111 leave the middle fork 1082.

[0041] Furthermore, the wafer transfer unit 200 includes a linear motion module 202, a wafer robot 201, and a wafer suction fork 205. The wafer robot 201 is arranged on the linear motion module 202 and moves linearly on the linear motion module 202. The wafer suction fork 205 is arranged on the upper side of the wafer robot 201, and the wafer is suctioned and moved by the wafer suction fork 205. The wafer transfer unit 200 also includes a wafer calibrator 203, a wafer mapping sensor 204, and a character recognition reader 206. The wafer calibrator 203 is used to calibrate the direction and center position of the wafer to ensure the repeatability of the wafer position; the wafer mapping sensor 204 is used to scan the wafer inside the carrier to confirm the presence of each layer of wafers in the carrier and whether there are abnormally placed wafers, such as tilted or stacked wafers; the character recognition reader 206 is used to read the wafer identity information.

[0042] Generally speaking, the wafer transfer unit 200 of the factory automation system is used for transferring wafers between different types of carriers and managing material information during the process. Specifically, the wafer robot 201 moves along the track on the linear motion module 202, and the wafer suction fork 205 is used to suction the wafer in the carrier to complete the wafer flipping process.

[0043] Furthermore, the carrier flipping and transporting unit 300 includes a fixed frame, a moving module, a carrier clamp 305 and a carrier transfer mechanism 306. The fixed frame is respectively arranged at the vertical warehouse loading port 109 and the vertical warehouse unloading port 110, the moving module is fixed on the fixed frame, the carrier clamp 305 is arranged on the moving module, and the carrier transfer mechanism 306 is arranged on the side of the fixed frame away from the vertical warehouse loading port 109. The second carrier 112 is clamped by the carrier clamp 305, and the movement of the moving module drives the carrier clamp 305 to rotate and move, thereby realizing the transportation of the second carrier 112 between the carrier transfer mechanism 306 and the vertical warehouse loading port 109 and the vertical warehouse unloading port 110.

[0044] In specific implementation, the carrier flipping and handling unit 300 adjusts the carrier that has completed wafer flipping from a vertical state (when the carrier is vertical, the wafer is in a horizontal state in the carrier) to a horizontal state, and the carrier transfer mechanism 306 completes the docking with the vertical warehouse.

[0045] Furthermore, the motion module includes a horizontal motion module 301, a vertical motion module, a rotating motor 303 and a clamp driving assembly 304. The horizontal motion module 301 is fixed on a fixed frame, the vertical motion module is fixed on the horizontal motion module 301, the rotating motor 303 is fixed on the bottom of the vertical motion module, and the rotating motor 303 is connected to the carrier clamp 305 through a connecting piece, and the connecting piece is provided with a clamp driving assembly 304 connected to the carrier clamp 305.

[0046] In specific implementation, the carrier transfer mechanism 306 is located outside the fixed frame, and the carrier is vertically arranged on the magnetic levitation line mover 104. When it is transferred to the carrier flipping and transporting unit 300, the carrier clamp 305 clamps the carrier, and the rotation of the rotating motor 303 drives the rotation of the connecting piece, thereby driving the carrier clamp 305 to flip the carrier from a vertical state to a horizontal state, and then the horizontal motion module 301 and the vertical motion module are moved to transfer the carrier to the carrier transfer mechanism 306. The carrier flipping and transporting unit 300 realizes the direction conversion and transmission of the carrier, making it feasible to fully automatically transmit the carrier from the film rewinding station to the vertical warehouse.

[0047] Preferably, the clamp driving assembly 304 is configured as a clamp driving cylinder or a clamp driving electric cylinder.

[0048] In one embodiment, the magnetic levitation transmission line unit 100 also includes a carrier identification component and a carrier position correction sensor 103. The carrier identification component is located at the carrier loading port 105 and the carrier unloading port 106. The carrier position correction sensor 103 is arranged close to the carrier flipping and handling unit 300. The carrier identification component is used to identify the carrier information. The carrier position correction sensor 103 is used to avoid the risk of collision when the wafer in the first carrier 111 is flipped to the second carrier 112.

[0049] Preferably, the vehicle identification component is configured as a vehicle type detection sensor 101 and / or a vehicle code reader 102 .

[0050] In specific implementation, the carrier type detection sensor 101 is used to distinguish the carrier type, such as the height difference of the carrier body or the material difference of the carrier. Under normal circumstances, this function can be completed by the carrier code reader 102. Generally speaking, the carrier code reader 102 can obtain the type of carrier, and the read ID information includes the number of the carrier itself and the wafer number and storage layer number inside the carrier. If the information provided by the automation system is incomplete in actual application, the above information may not be provided, and the carrier type detection sensor 101 needs to be configured. Therefore, in actual application, the carrier type detection sensor 101 or the carrier code reader 102 can be selected according to the information of the system. Therefore, the carrier type detection sensor 101 and the carrier code reader 102 are used to ensure the correctness of the material information (carrier ID) provided by the host computer, or directly enter the carrier ID information when there is no material information input in the host computer. After the control system binds the carrier ID information with the magnetic levitation line mover 104, the ID management of the carrier during the magnetic levitation line transmission process can be guaranteed.

[0051] The carrier position correction sensor 103 is used to solve the risk of collision during handover caused by the size error of the carrier itself and the motion accuracy error of the magnetic levitation linear mover 104. The linear motion module 202 can adjust the appropriate handover position for each carrier based on the feedback data of this sensor.

[0052] In one embodiment, two adjacent rewinding forks 108 are provided with a set of common paths. Figure 6 and Figure 7 When the two adjacent E-shaped inverted branch roads 108 are arranged with the E-shaped opening facing downward, the upper branch road 1081 of the left E-shaped branch road and the lower branch road 1083 of the right E-shaped branch road are the same path, which is a public path.

[0053] In one embodiment, a synchronous belt transmission line can be used to replace the magnetic levitation line. Although the synchronous belt transmission line can achieve the same transmission effect, the yield will be lost.

[0054] In one embodiment, a three-axis or four-axis module is used to replace the wafer robot 201. The three-axis or four-axis module can complete the function of wafer handling, but the cleanliness and stability may be at risk.

[0055] The high-speed film rewinding system of the present application can realize multiple film rewinding modes according to the use requirements. The following lists three processes in one specific application mode:

[0056] Process 1: The carrier loading port 105 provides a fully loaded second carrier 112 (36 slots) and an empty first carrier 111 (25 slots). Five wafers need to be taken out from each of the five second carriers 112 to fill the first carrier 111. Then the second carrier 112 enters the vertical warehouse from the vertical warehouse unloading port 110, and the first carrier 111 returns to the carrier unloading port 106 (to be taken away manually or by AGV).

[0057] Process 2: The second carrier 112 stored in the vertical warehouse needs to be returned to the wafer rewinding station from the vertical warehouse loading port 109 according to the production plan of the user. The carrier loading port 105 provides an empty first carrier 111 (25 slots), and transports multiple (usually about 5) wafers in the second carrier 112 to the first carrier 111. Then the second carrier 112 enters the vertical warehouse from the vertical warehouse unloading port 110, and the first carrier 111 returns to the carrier unloading port 106 to be taken away manually or by AGV.

[0058] Process 3: After multiple rewinds, the number of wafers in the second carrier 112 stored in the vertical warehouse will be less than the threshold value (temporarily set to 5). Multiple second carriers 112 that meet this condition return to the rewinding station through the vertical warehouse loading port 109, and the internal wafers are collectively transported to one of the second carriers 112. This fully loaded carrier returns to the vertical warehouse from the vertical warehouse unloading port 110, and the remaining empty carriers are transported to the carrier unloading port 106 by the magnetic levitation line.

[0059] The internal branch track division of the maglev line is as follows Figure 6 As shown, the reversing fork 108 is in the shape of an E. The detailed structure is shown in Figure 7 , adjacent rewind branches 108 will have a set of common paths.

[0060] After the carrier that has completed the film reversing process is fixed by the carrier clamp 305 at the unloading port 110 of the vertical warehouse, the vertical motion module rises, the rotary motor 303 is activated, the carrier completes the flipping action, and the horizontal motion module 301 transports the carrier to the carrier transfer mechanism 306, which distributes the carrier to the various entrances of the vertical warehouse.

[0061] In the embodiment of the present application, a magnetic levitation line is used to transmit wafer carriers, so that the wafer flipping station has mobility and improves scheduling efficiency; the loading carrier uses a rangefinder to compensate for the position accuracy in real time, and cooperates with a calibrator to ensure the loading repeatability of low-precision carriers; the E-shaped fork design of the magnetic levitation line maximizes the wafer flipping yield of the robot, and the processed carrier leaves the station immediately, and the carriers to be processed queue up in advance.

[0062] This wafer reversing system based on the maglev transmission line has both carrier handling and direction conversion functions while improving the wafer reversing yield. It utilizes the material scheduling advantages of the maglev transmission line to maximize the wafer robot's working duty cycle, eliminating the time that conventional reversing machines have to wait for carriers to load and unload materials. The maglev line can normalize the unloading interfaces of multiple reversing stations, making it feasible to fully automatically transfer carriers from the reversing station to the vertical warehouse.

[0063] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed in the present application should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A film rewinding system based on a magnetic levitation transmission line, characterized in that: The system comprises a magnetic levitation transmission line unit (100), a wafer transmission unit (200) and a carrier flipping and transporting unit (300); the magnetic levitation transmission line unit (100) is used to transmit a first carrier (111) and a second carrier (112) for flipping wafers; the wafer transmission unit (200) is used to flip the wafer in the first carrier (111) to the second carrier (112); and the carrier flipping and transporting unit (300) is used to flip and transport the second carrier (112) after flipping wafers; The maglev transmission line unit (100) comprises a transmission line, wherein the middle position of the transmission line is a transmission main line (107), and the maglev transmission line unit (100) further comprises a carrier loading port (105) and a carrier unloading port (106) located on one side of the transmission line, a vertical warehouse loading port (109) and a vertical warehouse unloading port (110) located on the other side of the transmission line, and a maglev line mover (104) moving on the transmission line, wherein the maglev line mover (104) is used to pull a first carrier (111) and a second carrier (112) to move on the transmission line, and a carrier flipping and transporting unit (300) is provided at the vertical warehouse loading port (109) and the vertical warehouse unloading port (110) respectively. A plurality of wafer reversing forks (108) connected in sequence are provided on the main transmission line (107), each wafer reversing fork (108) being equipped with a wafer transmission unit (200), and the first carrier (111) and the second carrier (112) are cached and scheduled when the wafer transmission unit (200) performs a wafer reversing action on the wafer through the wafer reversing fork (108).

2. The film reversing system based on the magnetic levitation transmission line according to claim 1 is characterized in that: The wafer reversing fork (108) is configured to be in an E-shape, and the wafer reversing fork (108) comprises an E-shaped side fork (1084), an upper side fork (1081), a middle side fork (1082) and a lower side fork (1083); the wafer transfer unit (200) is located outside the side fork (1084), and the opening side of the E-shape faces one side of the carrier loading port (105) and the carrier unloading port (106); the upper side fork (1081) is used for input transmission of the first carrier (111), the lower side fork (1083) is used for input transmission of the second carrier (112), the middle side fork (1082) is used for output transmission of the first carrier (111) and the second carrier (112), and the side fork (1084) is used to reverse the wafer in the first carrier (111) to the second carrier (112) through the wafer transfer unit (200).

3. The film reversing system based on the magnetic levitation transmission line according to claim 1 is characterized in that: The wafer transfer unit (200) comprises a linear motion module (202), a wafer robot (201) and a wafer suction fork (205); the wafer robot (201) is arranged on the linear motion module (202) and moves linearly on the linear motion module (202); the wafer suction fork (205) is arranged on the upper side of the wafer robot (201), and the wafer is suctioned and moved by the wafer suction fork (205).

4. The film reversing system based on the magnetic levitation transmission line according to claim 3 is characterized in that: The wafer transfer unit (200) further comprises a wafer calibrator (203), a wafer mapping sensor (204) and a character recognition code reader (206); the wafer calibrator (203) is used for calibrating the direction and center position of the wafer to ensure the repeatability of the wafer position; the wafer mapping sensor (204) is used for scanning the wafers inside the carrier to confirm the presence or absence of wafers in each layer in the carrier and whether there are wafers placed abnormally; and the character recognition code reader (206) is used for reading wafer identity information.

5. The film reversing system based on the magnetic levitation transmission line according to claim 1 is characterized in that: The carrier flipping and transporting unit (300) comprises a fixed frame, a moving module, a carrier clamp (305) and a carrier transfer mechanism (306); the fixed frame is respectively arranged at a loading port (109) of a vertical warehouse and a unloading port (110) of the vertical warehouse; the moving module is fixed on the fixed frame; the carrier clamp (305) is arranged on the moving module; the carrier transfer mechanism (306) is arranged on a side of the fixed frame away from the loading port (109) of the vertical warehouse; the second carrier (112) is clamped by the carrier clamp (305); the movement of the moving module drives the carrier clamp (305) to rotate and move, thereby realizing the transport of the second carrier (112) between the carrier transfer mechanism (306) and the loading port (109) of the vertical warehouse and the unloading port (110) of the vertical warehouse.

6. The film reversing system based on the magnetic levitation transmission line according to claim 5 is characterized in that: The motion module comprises a horizontal motion module (301), a vertical motion module (302), a rotating motor (303) and a clamp driving assembly (304); the horizontal motion module (301) is fixed on a fixed frame; the vertical motion module (302) is fixed on the horizontal motion module (301); the rotating motor (303) is fixed on the bottom of the vertical motion module (302); the rotating motor (303) is connected to a carrier clamp (305) via a connecting piece; and a clamp driving assembly (304) connected to the carrier clamp (305) is provided on the connecting piece.

7. The film reversing system based on the magnetic levitation transmission line according to claim 6 is characterized in that: The clamping jaw driving component (304) is configured as a clamping jaw driving cylinder or a clamping jaw driving electric cylinder.

8. The film reversing system based on the magnetic levitation transmission line according to claim 1 is characterized in that: The magnetic levitation transmission line unit (100) further comprises a carrier identification component and a carrier position correction sensor (103); the carrier identification component is located at a carrier loading port (105) and a carrier unloading port (106); the carrier position correction sensor (103) is arranged close to the carrier flipping and transporting unit (300); the carrier identification component is used to identify carrier information; and the carrier position correction sensor (103) is used to avoid the risk of wafer collision when flipping a wafer in a first carrier (111) to a second carrier (112).

9. The film reversing system based on the magnetic levitation transmission line according to claim 8, characterized in that: The vehicle identification component is configured as a vehicle type detection sensor (101) and / or a vehicle code reader (102).

10. The film reversing system based on the magnetic levitation transmission line according to claim 1, characterized in that: Two adjacent reversing forks (108) are provided with a set of common paths.

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