Micro-electronic chip vertical injection precision packaging device and method

Abstract

The invention provides a microelectronic chip vertical injection precision packaging device and method, and relates to the technical field of electronic packaging. The microelectronic chip vertical injection precise packaging device comprises a control case, a driving mold closing mechanism, two fluid one-way valves, two fluid extrusion mechanisms, a chip driving mechanism, a melt cavity, a lower mold assembly, an upper mold assembly and a mold closing plate, and the two fluid extrusion mechanisms are installed on the upper side wall of the control case; the two fluid one-way valves are connected to the output ends of the two fluid extrusion mechanisms through flanges correspondingly. The problem that in the high-speed packaging process, fluid is subjected to turbulence caused by multidirectional pressure under the condition that the fluid enters the piston and is not stable is solved, the filling and extruding processes are executed through flow division, the stability of the fluid is guaranteed, the stable state of the packaging fluid is guaranteed through the centrifugal effect before the packaging fluid is extruded into a melt cavity, and the packaging efficiency is improved. And the packaging quality of the microelectronic chip is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of electronic packaging, and in particular to a device and method for vertical injection precision packaging of microelectronic chips. Background Art

[0002] In the field of electronic packaging, vertical injection is a packaging process, which means that after the device is placed in the packaging mold, it is immediately filled with injection molding to form a packaging shell. This process is efficient and fast, and can meet the needs of large-scale production. At the same time, the vertical injection packaging process can also provide good protection and support, and improve the mechanical strength and reliability of the device. Therefore, in the field of electronic manufacturing, the vertical injection packaging process is widely used in various miniaturized and highly integrated device packaging.

[0003] Existing vertical injection packaging equipment generally injects the completely plasticized packaging fluid into a piston device for storage, and then through the cooperation between the piston device and the eccentric crank, the eccentric crank drives the upper mold to press on the surface of the lower mold while driving the movable end of the piston to descend and press the fluid stored in the piston device into the mold cavities of the upper and lower molds. After the packaging fluid is cooled and formed, the eccentric crank drives the upper mold to separate from the lower mold, and the microelectronic drive device drives the next microelectronic chip to move to the lower mold to wait for injection molding.

[0004] This type of equipment utilizes the high degree of coordination between the eccentric crank and the piston injection equipment to speed up the injection speed of the packaging fluid, ensure the high efficiency of vertical injection precision packaging, and greatly improve production efficiency. However, technical personnel in this field have found that this type of equipment will cause certain problems in the packaging quality of microelectronic chips when used: since the packaging fluid enters the piston through the one-way valve and then pushes the piston rod to enter the piston cavity for storage, although the one-way valve is closed when the eccentric crank rotates to press the piston rod, and the injection of packaging fluid into the piston cavity is stopped, the packaging process is carried out at high speed, which results in that even if the injection channel of the packaging fluid into the piston cavity is closed, the packaging fluid entering the piston cavity is still in an unstable flow state. At this time, the packaging fluid is squeezed by the eccentric crank, and the speed and pressure of the fluid change rapidly in space and time, making the packaging fluid prone to turbulence, which in turn causes the packaging material to form an uneven coverage on the surface of the packaged object, affecting the packaging quality. Therefore, technical personnel in this field have proposed a microelectronic chip vertical injection precision packaging device and method to solve the above-mentioned problems. Summary of the invention

[0005] 1. Technical issues to be resolved In view of the deficiencies in the prior art, the present invention provides a device and method for vertical injection precision packaging of microelectronic chips, which solves the turbulence problem caused by multi-directional pressure when the fluid is not stable when entering the piston during high-speed packaging. The filling and extrusion processes are performed by diversion, thereby ensuring the stability of the fluid. The centrifugal effect ensures that the packaging fluid is in a stable state before being extruded into the melt cavity, thereby improving the packaging quality of the microelectronic chip.

[0006] (II) Technical solution To achieve the above objectives, the present invention is implemented through the following technical solutions: a microelectronic chip vertical injection precision packaging device, including a control chassis, a driving mold clamping mechanism, two fluid one-way valves, two fluid extrusion mechanisms, a chip driving mechanism, a melt cavity, a lower mold assembly, an upper mold assembly and a clamping plate, the two fluid extrusion mechanisms are installed on the upper side wall of the control chassis, the two fluid one-way valves are respectively connected to the output ends of the two fluid extrusion mechanisms through flanges, the output ends of the two fluid one-way valves are respectively connected to flow stabilizing components through flanges, the upper side walls of the two flow stabilizing components are installed at one end close to each other, the side walls of the two piston assemblies close to each other and fixedly connected to a connecting air pipe at a position below, the other ends of the two connecting air pipes are respectively fixedly connected to a variable pressure fluid delivery pipe, and the two variable pressure fluid delivery pipes are respectively connected to the output ends of the two flow stabilizing components through flanges; The flow stabilizing component includes an external fixed component, a rotating cylinder component, two flow storage components, four stirring drive components and four internal fluid drive components. The external fixed component includes an external fixed sleeve, a piston connecting frame and a flow storage cylinder driving gear. The piston connecting frame is fixedly connected to the upper side wall of the external fixed sleeve, and the flow storage cylinder driving gear is arranged on the outer side of the lower end surface of the upper side wall of the piston connecting frame. The rotating cylinder component is limited and rotatably connected to the inside of the external fixed sleeve. The two flow storage components are arranged in the inside of the rotating cylinder component. The four stirring drive components are all arranged in the inside of the rotating cylinder component and are respectively arranged on the front and rear sides of the two flow storage components. The four internal fluid drive components are respectively limited and slidably connected to the bottom of the rotating cylinder component and are respectively used in conjunction with the four stirring drive components.

[0007] Preferably, the melt chamber is connected between two variable pressure fluid delivery pipes through a flange and installed on the upper end surface of the control chassis, the lower mold assembly is installed on the upper side wall of the melt chamber, the driving clamping mechanism is installed on the upper side wall of the control chassis, the clamping plate pin is connected to the movable end of the driving clamping mechanism, the upper mold assembly is installed in the middle position of the lower side wall of the clamping plate, and the chip driving mechanism is installed on the upper side wall of the control chassis and is located on the front side of the melt chamber.

[0008] Preferably, the piston assembly includes a piston tube and a double-plate piston rod, the double-plate piston rod is limitedly slidably connected at the center of the upper side wall of the piston tube, the tops of the double-plate piston rods of the two piston assemblies are fixed to the top of the joint plate by bolts, the lower side wall of the joint plate is sleeved on the outside of the piston tube, and the variable pressure fluid delivery pipe includes an outer pipe and an elastic hose, and the elastic hose is arranged inside the outer pipe.

[0009] Preferably, the external fixed component also includes two fluid circulation pipes, a trigger switch and an extrusion hole, the extrusion hole is opened on the piston connecting frame and is located directly below the double-plate piston rod, the trigger switch is installed on the lower side wall of the piston connecting frame and is located on the side close to the fluid one-way valve, and the two fluid circulation pipes are fixedly connected to the left and right side walls of the external fixed sleeve near the bottom.

[0010] Preferably, the rotating cylinder assembly includes a rotating sleeve, a sleeve gear and two fluid storage cylinder connecting bearings, the sleeve gear is arranged at the bottom of the outer side wall of the rotating sleeve, and the two fluid storage cylinder connecting bearings are installed on the left and right sides of the upper end surface of the lower side wall of the rotating sleeve.

[0011] Preferably, a rotating assembly is installed on the upper end surface of the control chassis and located in front of the two rotating cylinder assemblies. The rotating assembly includes a rotating motor and a rotating gear. The rotating gear is installed on the movable end of the rotating motor and meshes with the sleeve gear.

[0012] Preferably, the fluid storage assembly includes a fluid storage cylinder, a piston groove, a piston plate, a fluid storage cylinder gear, a plurality of connecting springs, a multi-stage telescopic sleeve, a cylinder fixed tooth plate, a stirring rod slide groove and two sealing elastic components, the multi-stage telescopic sleeve is fixedly connected to the lower side wall of the fluid storage cylinder and the top of the outer side wall of the multi-stage telescopic sleeve is connected to the inner shaft of the fluid storage cylinder connecting bearing, the fluid storage cylinder gear is arranged on the top of the fluid storage cylinder and meshes with the fluid storage cylinder driving gear, the piston groove is opened on the inner side wall of the fluid storage cylinder, the piston plate is limitedly slidably connected in the piston groove, a plurality of the connecting springs are distributed in a circular array and fixedly connected to the outer side of the lower side wall of the fluid storage cylinder, a plurality of the connecting springs are fixedly connected to the upper side wall of the inner shaft of the fluid storage cylinder connecting bearing, the cylinder fixed tooth plate is fixedly connected to the middle position of the front and rear side walls of the fluid storage cylinder, the stirring rod slide groove is opened at the top of the multi-stage telescopic sleeve, and two sealing elastic components are fixedly connected to the two side walls of the stirring rod slide groove.

[0013] Preferably, the stirring drive assembly includes a first drive double tooth, a drive rack, a second drive double tooth, a reversing gear and a transmission gear, the outer teeth of the first drive double tooth are meshed with the fixed tooth plate of the cylinder, the top of the drive rack is meshed with the inner teeth of the first drive double tooth, the inner teeth of the second drive double tooth are meshed with the bottom of the drive rack, the top of the reversing gear is meshed with the outer teeth of the second drive double tooth, and the transmission gear is meshed with the bottom of the reversing gear.

[0014] Preferably, the internal fluid driving component includes a stirring rod transmission tooth plate, an anti-wear bearing, a stirring connecting rod, a stirring head and a connecting magnetic block, the stirring rod transmission tooth plate is meshed with the transmission gear, the stirring connecting rod is fixedly connected to the top of the stirring rod transmission tooth plate, the anti-wear bearing is sleeved on the bottom of the stirring connecting rod and clamped between two sealing elastic components, the stirring head is fixedly connected to the top of the stirring connecting rod, and the connecting magnetic block is fixedly connected to the bottom of one side wall of the stirring connecting rod.

[0015] Preferably, the method for using the microelectronic chip vertical injection precision packaging device specifically comprises the following steps: S1. The packaged fluid is squeezed out through the fluid extrusion mechanism. While the packaged fluid is being squeezed out, the fluid one-way valve is opened to fill the packaged fluid into the flow stabilizing component. The packaged fluid enters the flow storage component on the outside. When the fluid enters the fluid storage cylinder, the fluid will push the piston plate to slide along the top of the piston groove. When the piston plate slides to the top of the piston groove, as the volume entering the fluid storage cylinder continues to increase, the fluid will push the multi-stage telescopic sleeve to extend, thereby increasing the storage volume of the fluid storage cylinder. When the multi-stage telescopic sleeve is extended, the fluid storage cylinder rises, driving the fixed tooth plate of the cylinder to rise, thereby driving the first drive double teeth to rotate, driving the rack to move downward and driving the second drive double teeth to rotate. After the reversing of the reversing gear, the transmission gear rotates in the same direction as the first drive double teeth.

[0016] S2. When the transmission gear rotates, the two stirring rod transmission tooth plates move along the center of the stirring rod slide groove until the connecting magnetic blocks of the two internal fluid drive components are attracted and fixed, and the two stirring heads are spliced ​​with each other. When the flow storage component is squeezed upward to the trigger switch, the trigger switch will feedback the trigger instruction to the control chassis, and the control chassis controls the rotation motor to work, driving the rotating gear to rotate rapidly, and then driving the rotating drum component to rotate and reverse rapidly. While the rotating drum assembly is rotating, the flow storage component starts to rotate rapidly under the drive of the flow storage drum drive gear, and uses centrifugal force to make the encapsulated fluid move outward along the direction of the rotation axis. As the rotation proceeds, the particles of the fluid will gradually arrange into the rotation axis to form a relatively stable structure, effectively avoiding internal turbulence and mixing caused by rapid changes in speed and pressure of the fluid, thereby improving the stability of the fluid. While the flow storage component is rotating rapidly, the two merged internal fluid drive components rotate relative to the flow storage component, and the stirring head can drive the inner fluid that is subjected to less centrifugal force to rotate, thereby ensuring the stability of the fluid at the center.

[0017] S3. After the reversal of the two fluid storage components is completed, the upper mold component and the lower mold component are driven to close the mold by driving the mold closing mechanism, and at the same time, the double-plate piston rod is pressed down, and the bottom of the double-plate piston rod squeezes the piston plate. Since the connecting spring pulls the fluid storage cylinder, the multi-stage telescopic sleeve shrinks and resets, and drives the two internal fluid driving components to separate and embed into the fluid storage cylinder, and part of the fluid enters the melt cavity. When the multi-stage telescopic sleeve is completely reset, the double-plate piston rod continues to press down, which will drive the piston plate to move along the bottom of the piston groove, and continue to press the encapsulated fluid into the melt cavity.

[0018] S4. Two independent cavities are arranged inside the piston tube. When the packaged fluid stored in the flow storage assembly is pressed into the melt cavity, the plate on the double-plate piston rod controls the change of air pressure in the upper cavity of the piston tube. When the upper cavity of the piston tube is compressed, the gas enters between the outer pipe and the elastic hose through the connecting air pipe, causing the inner diameter of the elastic hose to narrow. As the compression process continues, the volume of the packaged fluid in the flow storage assembly gradually decreases, resulting in a decrease in the pressure of the packaged fluid. The pipeline of the variable pressure fluid delivery pipe continues to narrow, increasing the pressure of the packaged fluid, ensuring that the pressure of the packaged fluid is in a stable state, and avoiding packaging quality problems caused by turbulence of the packaged fluid.

[0019] S5. While the encapsulated fluid is pressed into the melt cavity through the piston assembly, the fluid extrusion mechanism squeezes the encapsulated fluid into the interior of another fluid storage assembly, and controls the fluid extrusion speed through the control chassis. When the encapsulated fluid enters the melt cavity, the clamping mechanism is driven to move the clamping plate upward, so that the bottom of the double-plate piston rod leaves the extrusion hole. However, due to the action of the spring on the clamping plate, the upper mold assembly is still pressed on the lower mold assembly and the clamping force is maintained. At this time, the fluid filling of the fluid storage assembly on the other side is completed and contacts the trigger switch. The two fluid storage assemblies reverse again and perform a new round of fluid extrusion.

[0020] (III) Beneficial effects The present invention provides a device and method for vertical injection precision packaging of microelectronic chips. It has the following technical points and beneficial effects: The present invention ensures that the fluid tends to be stable before entering the melt cavity by setting two flow storage components, avoiding the uneven coverage of the packaging material on the surface of the packaged object caused by the turbulence effect when the fluid is subjected to multi-directional pressure. When filling the fluid, the packaged fluid enters the flow storage component on the outside. When the fluid enters the fluid storage cylinder, the fluid will push the piston plate to slide along the top of the piston groove. When the piston plate slides to the top of the piston groove, as the volume entering the fluid storage cylinder continues to increase, the fluid will push the multi-stage telescopic sleeve to extend. The storage volume of the fluid storage cylinder is increased, and the two internal fluid driving components are spliced ​​in pairs. When the fluid storage cylinder rises to the top, the two flow storage components begin to reverse, and the flow storage component with fluid quickly rotates, using centrifugal force to make the packaged fluid move outward along the direction of the rotation axis. As the rotation proceeds, the high-viscosity packaged fluid is pushed toward the cylinder wall under the action of the centrifugal force generated by the cylinder rotation. After the packaged fluid contacts the cylinder wall, it is driven and rotates along with the cylinder due to the action of friction and viscosity. Through this rotation, the fluid The movement of the fluid is uniform, and the particles of the fluid will gradually arrange into a rotation axis to form a relatively stable structure, which effectively avoids the internal turbulence and mixing caused by the rapid change of speed and pressure of the fluid, improves the stability of the fluid, and while the reservoir assembly rotates, the stirring head can drive the inner fluid with less centrifugal force to rotate, ensures the stability of the fluid at the center, and makes the fluid tend to be stable before entering the melt cavity. During the extrusion process, the reservoir assembly that is not filled with fluid is filled with fluid at the same time, and keeps synchronization with the fluid extrusion speed, ensuring the high efficiency of microelectronic chip packaging. When the extruded fluid enters the melt cavity, when the upper cavity of the piston tube is compressed, the gas enters between the outer pipe and the elastic hose through the connecting air pipe, so that the inner diameter of the elastic hose becomes narrower. With the continuous compression process, the volume of the encapsulated fluid in the reservoir assembly gradually decreases, resulting in a decrease in the pressure of the encapsulated fluid, and the pipeline through the variable pressure fluid delivery pipe continues to narrow, increasing the pressure of the encapsulated fluid, ensuring that the pressure of the encapsulated fluid is in a stable state, avoiding the packaging quality problem caused by the turbulence effect caused by the pressure change of the encapsulated fluid. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the structure of the present invention.

[0022] Figure 2 It is a three-dimensional schematic diagram of the piston assembly, the flow stabilizing assembly, the variable pressure fluid delivery pipe, the connecting air pipe and the rotating assembly in the present invention.

[0023] Figure 3 It is a first top view of the piston assembly, the flow stabilizing assembly, the variable pressure fluid delivery pipe, the connecting air pipe and the rotating assembly in the present invention.

[0024] Figure 4 for Figure 3 Isometric section view along AA.

[0025] Figure 5 It is a second top view of the piston assembly, the flow stabilizing assembly, the variable pressure fluid delivery pipe, the connecting air pipe and the rotating assembly in the present invention.

[0026] Figure 6 for Figure 5 Cross-sectional view along BB.

[0027] Figure 7 It is a schematic diagram of the coordination of the flow storage component, the stirring drive component and the internal fluid drive component in the present invention.

[0028] Figure 8 It is a bottom schematic diagram of the flow storage component, the stirring drive component and the internal fluid drive component in the present invention.

[0029] Fig. 9 It is a schematic diagram of the coordination between the stirring drive component and the internal fluid drive component in the present invention.

[0030] Fig.10 It is a bottom schematic diagram of the external fixing assembly in the present invention.

[0031] Among them, 1. control chassis; 2. driving mold clamping mechanism; 3. fluid one-way valve; 4. fluid extrusion mechanism; 5. chip driving mechanism; 6. melt cavity; 7. lower mold assembly; 8. upper mold assembly; 9. clamping plate; 1000. piston assembly; 1100. flow stabilizing assembly; 1200. variable pressure fluid delivery pipe; 13. connecting air pipe; 1400. rotating assembly; 1001, piston tube; 1002, double-plate piston rod; 11010, external fixing assembly; 11020, rotating drum assembly; 11030, fluid storage assembly; 11040, stirring drive assembly; 11050, internal fluid drive assembly; 1201, external pipe; 1202, elastic hose; 1401, rotating motor; 1402, rotating gear; 11011, external fixed sleeve; 11012, fluid circulation pipeline; 11013, piston connecting frame; 11014, reservoir driving gear; 11015, extrusion hole; 11016, trigger switch; 11021, rotating sleeve; 11022, sleeve gear; 11023, reservoir connecting bearing; 11031, fluid storage cylinder; 11032, piston groove; 11033, piston plate; 11034, fluid storage cylinder gear; 11035, connecting spring; 11036, multi-stage telescopic sleeve; 11037, cylinder fixing tooth plate; 11038, stirring rod slide groove; 11039, sealing elastic component; 11041, first driving double teeth; 11042, driving rack; 11043, second driving double teeth; 11044, reversing gear; 11045, transmission gear; 11051. stirring rod transmission tooth plate; 11052. anti-wear bearing; 11053. stirring connecting rod; 11054. stirring head; 11055. connecting magnetic block. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention. Example:

[0033] like Figure 1-10As shown, an embodiment of the present invention provides a microelectronic chip vertical injection precision packaging device, including a control chassis 1, a driving mold clamping mechanism 2, two fluid one-way valves 3, two fluid extrusion mechanisms 4, a chip driving mechanism 5, a melt cavity 6, a lower mold assembly 7, an upper mold assembly 8 and a clamping plate 9, the two fluid extrusion mechanisms 4 are installed on the upper side wall of the control chassis 1, the two fluid one-way valves 3 are respectively connected to the output ends of the two fluid extrusion mechanisms 4 through flanges, the output ends of the two fluid one-way valves 3 are respectively connected with flow stabilizing components 1100 through flanges, a piston assembly 1000 is installed at one end of the upper side walls of the two flow stabilizing components 1100 that are close to each other, a connecting air pipe 13 is fixedly connected to one side wall of the two piston assemblies 1000 that are close to each other and at a position below, the other ends of the two connecting air pipes 13 are respectively fixedly connected with variable pressure fluid delivery pipes 1200, and the two variable pressure The fluid delivery pipe 1200 is respectively connected to the output ends of the two flow stabilizing components 1100 through flanges, the melt cavity 6 is connected between the two pressure variable fluid delivery pipes 1200 through flanges and is installed on the upper end surface of the control chassis 1, the lower mold assembly 7 is installed on the upper side wall of the melt cavity 6, the driving mold clamping mechanism 2 is installed on the upper side wall of the control chassis 1, the clamping plate 9 is pin-connected to the movable end of the driving mold clamping mechanism 2, the upper mold assembly 8 is installed in the middle position of the lower side wall of the clamping plate 9, the chip driving mechanism 5 is installed on the upper side wall of the control chassis 1 and is located on the front side of the melt cavity 6, and the upper mold assembly 8 and the lower mold assembly 7 are driven to clamp the mold by driving the clamping mechanism 2, and at the same time drive the piston assembly 1000 to work, so as to press the encapsulated fluid into the melt cavity 6. After the encapsulated fluid enters the melt cavity 6, it enters the mold cavity through the encapsulation flow channel of the lower mold assembly 7 and the upper mold assembly 8, and is quickly solidified and formed.

[0034] The flow stabilizing component 1100 includes an external fixed component 11010, a rotating cylinder component 11020, two flow storage components 11030, four groups of stirring drive components 11040 and four groups of internal fluid drive components 11050. The external fixed component 11010 includes an external fixed sleeve 11011, a piston connecting frame 11013 and a flow storage cylinder driving gear 11014. The piston connecting frame 11013 is fixedly connected to the upper side wall of the external fixed sleeve 11011. The flow storage cylinder driving gear 11014 is arranged at a position close to the outer side of the lower end surface of the upper side wall of the piston connecting frame 11013. The rotating cylinder component 11020 is limitedly rotatably connected to the inside of the external fixed sleeve 11011. The two flow storage components 110 30 is arranged inside the rotating cylinder assembly 11020, four groups of stirring drive assemblies 11040 are all arranged inside the rotating cylinder assembly 11020 and are respectively arranged on the front and rear sides of the two flow storage assemblies 11030, the four groups of internal fluid drive assemblies 11050 are respectively limited and slidably connected to the bottom of the rotating cylinder assembly 11020 and are respectively used in conjunction with the four groups of stirring drive assemblies 11040, the packaged fluid is squeezed out by the fluid extrusion mechanism 4, and the fluid one-way valve 3 is opened while the packaged fluid is squeezed out, and the packaged fluid is filled into the flow stabilizing assembly 1100, and the fluid enters the flow storage assembly 11030 on the outside. As the volume of the fluid filled in increases, the flow storage assembly 11030 rises, As the reservoir assembly 11030 rises, it drives the stirring drive assembly 11040 to work, and the internal fluid drive assemblies 11050 are spliced ​​in pairs until the reservoir assembly 11030 rises to the top of the piston connecting frame 11013, and the reservoir assembly 11030 contacts the switch, and the rotating assembly 1400 drives the rotating cylinder assembly 11020 to rotate and reverse rapidly. While the rotating cylinder assembly 11020 rotates, the reservoir assembly 11030, driven by the reservoir cylinder driving gear 11014, starts to rotate rapidly, and uses centrifugal force to move the packaged fluid outward along the direction of the rotation axis. As the rotation proceeds, the high-viscosity packaged fluid is packaged under the action of the centrifugal force generated by the cylinder rotation. The fluid is pushed toward the cylinder wall, and after the encapsulated fluid contacts the cylinder wall, it is driven and rotates along with the cylinder due to the effects of friction and viscosity. This rotation makes the movement of the fluid uniform, and the particles of the fluid are gradually arranged into a rotation axis to form a relatively stable structure, which effectively avoids the internal turbulence and mixing of the fluid caused by the rapid changes in speed and pressure, thereby improving the stability of the fluid. While the flow storage component 11030 rotates rapidly, the two merged internal fluid drive components 11050 rotate relative to the flow storage component 11030, driving the sealed fluid in the center area with less centrifugal force to rotate, thereby ensuring the stability of the fluid in the center and making the fluid tend to be stable before entering the melt cavity.

[0035] The piston assembly 1000 includes a piston tube 1001 and a double-plate piston rod 1002. The double-plate piston rod 1002 is limitedly slidably connected to the center of the upper side wall of the piston tube 1001. The tops of the double-plate piston rods 1002 of the two piston assemblies 1000 are fixed to the top of the joint plate 9 by bolts. The lower side wall of the joint plate 9 is sleeved on the outer side of the piston tube 1001. The variable pressure fluid delivery pipe 1200 includes an outer pipe 1201 and an elastic hose 1202. The elastic hose 1202 is arranged inside the outer pipe 1201. Two independent cavities are arranged inside the piston tube 1001. The plates on the double-plate piston rod 1002 are used to control the upper cavity of the piston tube 1001. While the air pressure changes, the packaged fluid stored in the flow storage component 11030 can be pressed into the melt cavity 6. When the upper cavity of the piston tube 1001 is compressed, the gas enters between the outer pipe 1201 and the elastic hose 1202 through the connecting air pipe 13, causing the inner diameter of the elastic hose 1202 to become narrower. As the compression process continues, the volume of the packaged fluid in the flow storage component 11030 gradually decreases, resulting in a decrease in the pressure of the packaged fluid. The pipeline of the variable pressure fluid delivery pipe 1200 continues to narrow, increasing the pressure of the packaged fluid, thereby ensuring that the pressure and output rate of the packaged fluid are in a stable state, and avoiding packaging quality problems caused by turbulence of the packaged fluid.

[0036] The external fixed component 11010 also includes two fluid circulation pipes 11012, a trigger switch 11016 and an extrusion hole 11015. The extrusion hole 11015 is opened on the piston connecting frame 11013 and is located directly below the double-plate piston rod 1002. The trigger switch 11016 is installed on the lower side wall of the piston connecting frame 11013 and is located on the side close to the fluid one-way valve 3. The two fluid circulation pipes 11012 are fixedly connected to the left and right side walls of the external fixed sleeve 11011 near the bottom. The rotating cylinder assembly 11020 includes a rotating sleeve 11021, a sleeve gear 11022 and two fluid storage cylinder connecting bearings 11023. The sleeve gear 11022 is set at the bottom of the outer side wall of the rotating sleeve 11021. The two The flow storage cylinder connecting bearing 11023 is installed on the left and right sides of the upper end surface of the lower side wall of the rotating sleeve 11021. The upper end surface of the control chassis 1 and the front side of the two rotating cylinder assemblies 11020 are installed with a rotating assembly 1400. The rotating assembly 1400 includes a rotating motor 1401 and a rotating gear 1402. The rotating gear 1402 is installed on the movable end of the rotating motor 1401 and meshes with the sleeve gear 11022. When the flow storage assembly 11030 is squeezed upward to the trigger switch 11016, the trigger switch 11016 feeds back the trigger instruction to the control chassis 1. The control chassis 1 controls the rotating motor 1401 to work, drives the rotating gear 1402 to rotate rapidly, and then drives the rotating cylinder assembly 11020 to rotate rapidly.

[0037] The fluid storage assembly 11030 includes a fluid storage cylinder 11031, a piston groove 11032, a piston plate 11033, a fluid storage cylinder gear 11034, a plurality of connecting springs 11035, a multi-stage telescopic sleeve 11036, a cylinder fixed tooth plate 11037, a stirring rod slide groove 11038 and two sealing elastic components 11039, the multi-stage telescopic sleeve 11036 is fixedly connected to the lower side wall of the fluid storage cylinder 11031 and the top of the outer side wall of the multi-stage telescopic sleeve 11036 is connected to the inner shaft of the fluid storage cylinder connecting bearing 11023, the fluid storage cylinder gear 11034 is arranged on the top of the fluid storage cylinder 11031 and meshes with the fluid storage cylinder driving gear 11014, the piston groove 11032 is opened on the inner side wall of the fluid storage cylinder 11031, the piston plate 11033 is limitedly slidably connected in the piston groove 11032, and a plurality of connecting springs 11035 are arranged in a circular array. It is arranged and fixedly connected to the outer side of the lower side wall of the fluid storage cylinder 11031, a number of connecting springs 11035 are fixedly connected to the upper side wall of the inner shaft of the fluid storage cylinder connecting bearing 11023, the cylinder fixing tooth plate 11037 is fixedly connected to the middle position of the front and rear side walls of the fluid storage cylinder 11031, the stirring rod slide groove 11038 is opened at the top of the multi-stage telescopic sleeve 11036, and two sealing elastic components 11039 are fixedly connected to the two side walls of the stirring rod slide groove 11038. When the fluid enters the fluid storage cylinder 11031, the fluid will push the piston plate 11033 to slide along the top of the piston groove 11032. When the piston plate 11033 slides to the top of the piston groove 11032, as the volume entering the fluid storage cylinder 11031 continues to increase, the fluid will push the multi-stage telescopic sleeve 11036 to extend, thereby increasing the storage volume of the fluid storage cylinder 11031.

[0038] The stirring drive assembly 11040 includes a first driving double tooth 11041, a driving rack 11042, a second driving double tooth 11043, a reversing gear 11044 and a transmission gear 11045. The outer teeth of the first driving double tooth 11041 are meshed with the cylinder fixed tooth plate 11037, the top of the driving rack 11042 is meshed with the inner teeth of the first driving double tooth 11041, the inner teeth of the second driving double tooth 11043 are meshed with the bottom of the driving rack 11042, the top of the reversing gear 11044 is meshed with the second driving double tooth The outer teeth of 11043 are meshed, and the transmission gear 11045 is meshed with the bottom of the reversing gear 11044. When the multi-stage telescopic sleeve 11036 is extended, the fluid storage cylinder 11031 rises, driving the cylinder fixed tooth plate 11037 to rise, and then driving the first drive double teeth 11041 to rotate, the driving rack 11042 moves downward and drives the second drive double teeth 11043 to rotate. After reversing the reversing gear 11044, the transmission gear 11045 rotates in the same direction as the first drive double teeth 11041.

[0039] The internal fluid driving component 11050 includes a stirring rod transmission tooth plate 11051, an anti-wear bearing 11052, a stirring connecting rod 11053, a stirring head 11054 and a connecting magnetic block 11055. The stirring rod transmission tooth plate 11051 is meshed with the transmission gear 11045. The stirring connecting rod 11053 is fixedly connected to the top of the stirring rod transmission tooth plate 11051. The anti-wear bearing 11052 is sleeved on the bottom of the stirring connecting rod 11053 and clamped between two sealing elastic components 11039. The stirring head 11054 is fixedly connected to the top of the stirring connecting rod 11053. The connecting magnetic block 11055 is fixedly connected to the bottom of a side wall of the stirring connecting rod 11053. When the transmission gear 11045 rotates, the two stirring rod transmission tooth plates 11051 move along the center of the stirring rod slide groove 11038 until the connecting magnetic blocks 11055 of the two internal fluid driving components 11050 are attracted and fixed, and the two stirring heads 11054 are spliced ​​with each other. When the flow storage component 11030 rotates, the stirring head 11054 can drive the inner fluid that is subjected to less centrifugal force to rotate, thereby ensuring the stability of the fluid in the center. The anti-wear bearing 11052 can prevent the wear caused by direct contact between the two sealing elastic components 11039 and the stirring connecting rod 11053 when the flow storage component 11030 rotates, thereby improving the service life of the sealing elastic component 11039.

[0040] The method for using the microelectronic chip vertical injection precision packaging device specifically includes the following steps: S1. The packaged fluid is squeezed out through the fluid extrusion mechanism 4. When the packaged fluid is squeezed out, the fluid one-way valve 3 is opened, and the packaged fluid is filled into the flow stabilizing component 1100. The packaged fluid enters the outer flow storage component 11030. When the fluid enters the fluid storage cylinder 11031, the fluid will push the piston plate 11033 to slide along the top of the piston groove 11032. When the piston plate 11033 slides to the top of the piston groove 11032, as the volume entering the fluid storage cylinder 11031 continues to increase, the fluid The multi-stage telescopic sleeve 11036 will be pushed out to increase the storage volume of the fluid storage cylinder 11031. When the multi-stage telescopic sleeve 11036 is extended, the fluid storage cylinder 11031 rises, driving the cylinder fixed tooth plate 11037 to rise, and then driving the first drive double teeth 11041 to rotate, driving the rack 11042 to move downward and driving the second drive double teeth 11043 to rotate. After the reversing of the reversing gear 11044, the transmission gear 11045 rotates in the same direction as the first drive double teeth 11041.

[0041] S2. When the transmission gear 11045 rotates, the two stirring rod transmission tooth plates 11051 move along the center of the stirring rod slide groove 11038 until the connecting magnetic blocks 11055 of the two internal fluid drive components 11050 are attracted and fixed, and the two stirring heads 11054 are spliced ​​with each other. When the storage flow component 11030 is squeezed upward to the trigger switch 11016, the trigger switch 11016 feeds back the trigger instruction to the control chassis 1, and the control chassis 1 controls the rotation motor 1401 to work, driving the rotating gear 1402 to rotate rapidly, and then driving the rotating cylinder component 11020 to rotate and reverse rapidly. While the rotating cylinder component 11020 rotates, the storage flow component 11030 starts to rotate rapidly under the drive of the storage flow cylinder driving gear 11014, and uses centrifugal force to make the encapsulated fluid move along the rotating cylinder. The direction of the rotating shaft moves outward, and as the rotation proceeds, the high-viscosity encapsulated fluid is pushed toward the cylinder wall under the action of the centrifugal force generated by the rotation of the cylinder. After the encapsulated fluid contacts the cylinder wall, it is driven and rotates along with the cylinder due to the action of friction and viscosity. Through this rotation, the movement of the fluid is uniformed, and the particles of the fluid will gradually arrange into the axis of rotation to form a relatively stable structure, which effectively avoids the internal turbulence and mixing of the fluid caused by the rapid changes in speed and pressure, thereby improving the stability of the fluid. While the storage component 11030 rotates rapidly, the two merged internal fluid drive components 11050 rotate relative to the storage component 11030, and the stirring head 11054 can drive the inner fluid that is subjected to less centrifugal force to rotate, thereby ensuring the stability of the fluid at the center.

[0042] S3. When the two fluid storage components 11030 are reversed, the upper mold component 8 and the lower mold component 7 are driven to close the mold by driving the mold closing mechanism 2, and at the same time, the double-plate piston rod 1002 is pressed down, and the bottom of the double-plate piston rod 1002 squeezes the piston plate 11033. Since the connecting spring 11035 pulls the fluid storage cylinder 11031, the multi-stage telescopic sleeve 11036 shrinks and resets, and drives the two internal fluid driving components 11050 to separate and embed into the fluid storage cylinder 11031, and part of the fluid enters the melt cavity 6. When the multi-stage telescopic sleeve 11036 is completely reset, the double-plate piston rod 1002 continues to press down, which will drive the piston plate 11033 to move along the bottom of the piston groove 11032, and continue to press the encapsulated fluid into the melt cavity 6.

[0043] S4. Two independent cavities are arranged inside the piston tube 1001. When the packaged fluid stored in the flow storage component 11030 is pressed into the melt cavity 6, the plate on the double-plate piston rod 1002 controls the change of the air pressure in the upper cavity of the piston tube 1001. When the upper cavity of the piston tube 1001 is compressed, the gas enters between the outer pipe 1201 and the elastic hose 1202 through the connecting air pipe 13, so that the inner diameter of the elastic hose 1202 becomes narrower. As the compression process continues, the volume of the packaged fluid in the flow storage component 11030 gradually decreases, resulting in a decrease in the pressure of the packaged fluid. The pipeline of the variable pressure fluid delivery pipe 1200 continues to narrow, which increases the pressure of the packaged fluid, ensures that the pressure of the packaged fluid is in a stable state, and avoids packaging quality problems caused by turbulence of the packaged fluid.

[0044] S5. While the encapsulated fluid is pressed into the melt cavity 6 through the piston assembly 1000, the fluid extrusion mechanism 4 squeezes the encapsulated fluid into the interior of another fluid storage assembly 11030, and controls the fluid extrusion speed by controlling the chassis 1. When the encapsulated fluid enters the melt cavity 6, the clamping mechanism 2 is driven to move the clamping plate 9 upward, so that the bottom of the double-plate piston rod 1002 leaves the extrusion hole 11015. However, due to the action of the spring on the clamping plate 9, the upper mold assembly 8 is still pressed on the lower mold assembly 7 and maintains the clamping force. At this time, the fluid filling of the fluid storage assembly 11030 on the other side is completed and contacts the trigger switch 11016. The two fluid storage assemblies 11030 reverse again and perform a new round of fluid extrusion.

[0045] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A microelectronic chip vertical injection precision packaging device, comprising a control chassis, a driving mold clamping mechanism, two fluid one-way valves, two fluid extrusion mechanisms, a chip driving mechanism, a melt cavity, a lower mold assembly, an upper mold assembly and a clamping plate, characterized in that: The two fluid extrusion mechanisms are installed on the upper side wall of the control box, the two fluid one-way valves are respectively connected to the output ends of the two fluid extrusion mechanisms through flanges, the output ends of the two fluid one-way valves are respectively connected to flow stabilizing components through flanges, piston assemblies are installed at one end of the upper side walls of the two flow stabilizing components close to each other, and a connecting air pipe is fixedly connected to a side wall of the two piston assemblies close to each other and at a position below, and the other ends of the two connecting air pipes are respectively fixedly connected to variable pressure fluid delivery pipes, and the two variable pressure fluid delivery pipes are respectively connected to the output ends of the two flow stabilizing components through flanges; The flow stabilizing component includes an external fixed component, a rotating cylinder component, two flow storage components, four stirring drive components and four internal fluid drive components. The external fixed component includes an external fixed sleeve, a piston connecting frame and a flow storage cylinder driving gear. The piston connecting frame is fixedly connected to the upper side wall of the external fixed sleeve, and the flow storage cylinder driving gear is arranged on the outer side of the lower end surface of the upper side wall of the piston connecting frame. The rotating cylinder component is limited and rotatably connected to the inside of the external fixed sleeve. The two flow storage components are arranged in the inside of the rotating cylinder component. The four stirring drive components are all arranged in the inside of the rotating cylinder component and are respectively arranged on the front and rear sides of the two flow storage components. The four internal fluid drive components are respectively limited and slidably connected to the bottom of the rotating cylinder component and are respectively used in conjunction with the four stirring drive components.

2. A microelectronic chip vertical injection precision packaging device according to claim 1, characterized in that: The melt chamber is connected between two variable pressure fluid delivery pipes through a flange and is installed on the upper end surface of the control chassis, the lower mold assembly is installed on the upper side wall of the melt chamber, the driving clamping mechanism is installed on the upper side wall of the control chassis, the clamping plate pin is connected to the movable end of the driving clamping mechanism, the upper mold assembly is installed in the middle position of the lower side wall of the clamping plate, and the chip driving mechanism is installed on the upper side wall of the control chassis and is located on the front side of the melt chamber.

3. A microelectronic chip vertical injection precision packaging device according to claim 1, characterized in that: The piston assembly includes a piston tube and a double-plate piston rod, and the double-plate piston rod is limitedly slidably connected at the center of the upper side wall of the piston tube. The tops of the double-plate piston rods of the two piston assemblies are fixed to the top of the joint plate by bolts, and the lower side wall of the joint plate is sleeved on the outside of the piston tube. The variable pressure fluid delivery pipe includes an outer pipe and an elastic hose, and the elastic hose is arranged inside the outer pipe.

4. A microelectronic chip vertical injection precision packaging device according to claim 3, characterized in that: The external fixed component also includes two fluid circulation pipes, a trigger switch and an extrusion hole. The extrusion hole is opened on the piston connecting frame and is located directly below the double-plate piston rod. The trigger switch is installed on the lower side wall of the piston connecting frame and is located on the side close to the fluid one-way valve. The two fluid circulation pipes are fixedly connected to the left and right side walls of the external fixed sleeve near the bottom.

5. The microelectronic chip vertical injection precision packaging device according to claim 1 is characterized in that: The rotating cylinder assembly includes a rotating sleeve, a sleeve gear and two fluid storage cylinder connecting bearings. The sleeve gear is arranged at the bottom of the outer side wall of the rotating sleeve, and the two fluid storage cylinder connecting bearings are installed on the left and right sides of the upper end surface of the lower side wall of the rotating sleeve.

6. A microelectronic chip vertical injection precision packaging device according to claim 5, characterized in that: The upper end surface of the control box and the front sides of the two rotating cylinder assemblies are both equipped with rotating assemblies, and the rotating assemblies include a rotating motor and a rotating gear. The rotating gear is installed on the movable end of the rotating motor and meshes with the sleeve gear.

7. A microelectronic chip vertical injection precision packaging device according to claim 5, characterized in that: The fluid storage component includes a fluid storage cylinder, a piston groove, a piston plate, a fluid storage cylinder gear, a plurality of connecting springs, a multi-stage telescopic sleeve, a cylinder fixed tooth plate, a stirring rod slide groove and two sealing elastic components. The multi-stage telescopic sleeve is fixedly connected to the lower side wall of the fluid storage cylinder and the top of the outer side wall of the multi-stage telescopic sleeve is connected to the inner shaft of the fluid storage cylinder connecting bearing. The fluid storage cylinder gear is arranged on the top of the fluid storage cylinder and meshes with the fluid storage cylinder driving gear. The piston groove is opened on the inner side wall of the fluid storage cylinder, and the piston plate is limitedly slidably connected in the piston groove. A plurality of the connecting springs are distributed in a circular array and fixedly connected to the outer side of the lower side wall of the fluid storage cylinder, and a plurality of the connecting springs are fixedly connected to the upper side wall of the inner shaft of the fluid storage cylinder connecting bearing. The cylinder fixed tooth plate is fixedly connected to the middle position of the front and rear side walls of the fluid storage cylinder, the stirring rod slide groove is opened at the top of the multi-stage telescopic sleeve, and two sealing elastic components are fixedly connected to the two side walls of the stirring rod slide groove.

8. A microelectronic chip vertical injection precision packaging device according to claim 7, characterized in that: The stirring drive assembly includes a first driving double tooth, a driving rack, a second driving double tooth, a reversing gear and a transmission gear. The outer teeth of the first driving double tooth are meshed with the fixed tooth plate of the cylinder, the top of the driving rack is meshed with the inner teeth of the first driving double tooth, the inner teeth of the second driving double tooth are meshed with the bottom of the driving rack, the top of the reversing gear is meshed with the outer teeth of the second driving double tooth, and the transmission gear is meshed with the bottom of the reversing gear.

9. A microelectronic chip vertical injection precision packaging device according to claim 8, characterized in that: The internal fluid driving component includes a stirring rod transmission tooth plate, an anti-wear bearing, a stirring connecting rod, a stirring head and a connecting magnetic block. The stirring rod transmission tooth plate is meshed with the transmission gear. The stirring connecting rod is fixedly connected to the top of the stirring rod transmission tooth plate. The anti-wear bearing is sleeved on the bottom of the stirring connecting rod and clamped between two sealing elastic components. The stirring head is fixedly connected to the top of the stirring connecting rod. The connecting magnetic block is fixedly connected to the bottom of one side wall of the stirring connecting rod.

10. A method for using a microelectronic chip vertical injection precision packaging device according to any one of claims 1 to 9, characterized in that: The specific steps include: S1. The packaged fluid is squeezed out through the fluid extrusion mechanism. When the packaged fluid is squeezed out, the fluid one-way valve is opened, and the packaged fluid is filled into the flow stabilizing component. The packaged fluid enters the flow storage component on the outside. When the fluid enters the fluid storage cylinder, the fluid will push the piston plate to slide along the top of the piston groove. When the piston plate slides to the top of the piston groove, as the volume entering the fluid storage cylinder continues to increase, the fluid will push the multi-stage telescopic sleeve to extend, thereby increasing the storage volume of the fluid storage cylinder. When the multi-stage telescopic sleeve is extended, the fluid storage cylinder rises, driving the fixed tooth plate of the cylinder to rise, thereby driving the first drive double teeth to rotate, driving the rack to move downward and driving the second drive double teeth to rotate. After the reversing of the reversing gear, the transmission gear rotates in the same direction as the first drive double teeth. S2. When the transmission gear rotates, the two stirring rod transmission tooth plates move along the center of the stirring rod slide groove until the connecting magnetic blocks of the two internal fluid drive components are attracted and fixed, and the two stirring heads are spliced ​​with each other. When the storage flow component is squeezed upward to the trigger switch, the trigger switch feeds back the trigger instruction to the control chassis, and the control chassis controls the rotation motor to work, driving the rotating gear to rotate rapidly, and then driving the rotating drum component to rotate and reverse rapidly. While the rotating drum component rotates, the storage flow component starts to rotate rapidly under the drive of the storage flow drum drive gear, and uses centrifugal force to make the packaged fluid move outward along the direction of the rotation axis. As the rotation proceeds, the particles of the fluid will gradually arrange into the rotation axis to form a relatively stable structure, effectively avoiding the internal turbulence and mixing of the fluid caused by the rapid changes in speed and pressure, and improving the stability of the fluid. While the storage flow component rotates rapidly, the two merged internal fluid drive components rotate relative to the storage flow component, and the stirring head can drive the inner fluid with less centrifugal force to rotate, thereby ensuring the stability of the fluid at the center. S3. After the reversal of the two fluid storage components is completed, the upper mold component and the lower mold component are driven to close the mold by driving the mold closing mechanism, and at the same time, the double-plate piston rod is pressed down, and the bottom of the double-plate piston rod squeezes the piston plate. Since the connecting spring pulls the fluid storage cylinder, the multi-stage telescopic sleeve shrinks and resets, and drives the two internal fluid driving components to separate and embed into the fluid storage cylinder, and part of the fluid enters the melt cavity. When the multi-stage telescopic sleeve is completely reset, the double-plate piston rod continues to press down, which will drive the piston plate to move along the bottom of the piston groove, and continue to press the packaged fluid into the melt cavity; S4. Two independent cavities are arranged inside the piston tube. When the packaged fluid stored in the flow storage component is pressed into the melt cavity, the plate on the double-plate piston rod controls the change of the air pressure in the upper cavity of the piston tube. When the upper cavity of the piston tube is compressed, the gas enters between the outer pipe and the elastic hose through the connecting air pipe, so that the inner diameter of the elastic hose becomes narrower. As the compression process continues, the volume of the packaged fluid in the flow storage component gradually decreases, resulting in a decrease in the pressure of the packaged fluid. The pipeline of the variable pressure fluid delivery pipe continues to narrow, increasing the pressure of the packaged fluid, ensuring that the pressure of the packaged fluid is in a stable state, and avoiding the packaging quality problem caused by the turbulence of the packaged fluid. S5. While the encapsulated fluid is pressed into the melt cavity through the piston assembly, the fluid extrusion mechanism squeezes the encapsulated fluid into the interior of another fluid storage assembly, and controls the fluid extrusion speed through the control chassis. When the encapsulated fluid enters the melt cavity, the clamping mechanism is driven to move the clamping plate upward, so that the bottom of the double-plate piston rod leaves the extrusion hole. However, due to the action of the spring on the clamping plate, the upper mold assembly is still pressed on the lower mold assembly and the clamping force is maintained. At this time, the fluid filling of the fluid storage assembly on the other side is completed and contacts the trigger switch. The two fluid storage assemblies reverse again and perform a new round of fluid extrusion.

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