Coating ring for silicon carbide growth device

Abstract

The invention discloses a coating ring for a silicon carbide growth device, which comprises a ring body, the front surface of the ring body is a horizontal plane, and the middle part of the ring body is provided with a through groove embedded with a graphite tray; the inner edge of the ring body comprises an arc surface and a vertical surface, and the vertical surface of the ring body forms a positioning flat edge which is in contact with the flat edge of the lug boss of the graphite tray; four blind holes are formed in the positions close to the inner edge of the ring body, two blind holes are close to the two flat corners of the ring body respectively, and the other two blind holes are close to the arc surface of the ring body; the four fixing columns are embedded into the four blind holes respectively, the edges of the four fixing columns and the edge of the substrate form two tangent circle structures so that the substrate can be positioned on the horizontal plane of the ring body, and therefore the contact face between the outer edge of the substrate and the inner edge of the ring body is reduced. According to the method, the situation that the inner circle of the coating ring gradually shrinks due to the fact that by-products grow on the inner edge of the coating ring in the epitaxial growth process and adhere to the edge of the substrate can be avoided, the chip taking and breaking phenomena are obviously improved, and the cost is obviously reduced.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor silicon carbide epitaxial growth, and in particular, relates to a coating ring for a silicon carbide growth device. Background Art

[0002] At present, the graphite coating ring of the silicon carbide growth auxiliary accessory is an embedded shape. After the substrate is embedded in the coating ring, it will not be thrown away during the growth rotation process. However, the above solution has the following problems:

[0003] ① The byproducts grown on the inner edge of the coating ring during the epitaxial growth process will stick to the edge of the substrate, which may cause the substrate to break when the epitaxial wafer is subsequently removed.

[0004] ② The inner edge of the coating ring will gradually shrink due to the growth of byproducts over a long period of time, causing a card. At this time, the coating ring needs to be replaced, resulting in high costs. Summary of the invention

[0005] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention provides a graphite coating ring for a silicon carbide growth device, aiming to improve the phenomenon of chip removal and extend the service life of the coating ring.

[0006] To achieve the above-mentioned purpose, the present invention adopts the following technical scheme: a coating ring for a silicon carbide growth device, comprising: a ring body, the front face of the ring body is a horizontal plane, and a through groove is provided in the middle of the ring body, the through groove is used to be embedded with the raised portion of a graphite tray to jointly form a carrier suitable for carrying a substrate; the inner edge of the ring body comprises an arc surface and a vertical surface, the two ends of the arc surface are connected to the two ends of the vertical surface, and the vertical surface of the ring body forms a positioning flat edge in contact with the flat edge of the raised portion of the graphite tray; four blind holes are provided at a position close to the inner edge of the ring body, two of the blind holes are respectively close to two flat edge corners of the ring body, and the other two blind holes are both close to the arc surface of the ring body; fixing posts, four of the fixing posts are respectively embedded in the four blind holes, and the edges of the four fixing posts form two tangent circle structures with the edges of the substrate to position the substrate on the horizontal plane of the ring body, thereby reducing the contact surface between the outer edge of the substrate and the inner edge of the ring body.

[0007] Preferably, the positioning flat edge of the through slot is located between 5 o'clock and 7 o'clock.

[0008] Preferably, the two blind holes on the arc surface close to the through groove are respectively located between 10 o'clock and 11 o'clock and between 1 o'clock and 2 o'clock.

[0009] Preferably, a flange extending downward is formed on one side of the back side of the ring body, and the flange is used to be combined with the edge of the graphite tray.

[0010] Preferably, the fixing column and the blind hole are embedded in a detachable manner.

[0011] Preferably, the shape of the blind hole is a circle or a regular polygon.

[0012] Preferably, the fixing column is in the shape of a cylinder or a regular polygonal column.

[0013] Preferably, the fixing column is in the shape of a cylinder or a regular polygonal column.

[0014] The present invention adopts the above technical solution, which has the following advantages:

[0015] 1. The present invention designs the front side of the coating ring to be flat, and uses the principle of fixing a circle with three points to open holes at corresponding positions of the coating ring, and embeds fixing columns at the openings to position the substrate, so as to reduce the contact area between the outer edge of the substrate and the inner edge of the coating ring. This can prevent the inner edge of the coating ring from growing byproducts during the epitaxial growth process and sticking to the edge of the substrate, and significantly improve the phenomenon of chip fragmentation. At the same time, it can prevent the inner circle of the coating ring from gradually shrinking after the byproducts grow for a long time, and the service life can be significantly extended, and the cost can be significantly reduced.

[0016] 2. The present invention designs a fixing column at each of the two flat corners of the coating ring, thereby preventing the substrate from rotating during the rotation process of epitaxial growth.

[0017] 3. The present invention designs the combination of the fixing column and the coating ring to be detachable, so that they can be disassembled and replaced during subsequent maintenance. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Various other advantages and benefits will become apparent to those of ordinary skill in the art by reading the detailed description of the preferred embodiments below. The accompanying drawings are only for the purpose of illustrating the preferred embodiments and are not to be considered as limiting the present invention. Throughout the accompanying drawings, the same reference numerals are used to represent the same components. In the accompanying drawings:

[0019] Figure 1 A schematic diagram of a top view of a coating ring for a silicon carbide growth device provided in one embodiment of the present invention;

[0020] Figure 2 A schematic side view of the structure of a coating ring for a silicon carbide growth device provided in this embodiment of the present invention.

[0021] The reference numerals in the figures are as follows:

[0022] 1- ring body; 2- fixing column; 3- through groove; 4- positioning flat edge; 5- blind hole; 6- flange. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical scheme and advantages of the present invention clearer, the specific embodiments of the present invention are further described below in conjunction with the accompanying drawings. Although the exemplary embodiments of the present invention are shown in the accompanying drawings, it should be understood that the present invention can be implemented in various forms and should not be limited by the embodiments described herein. On the contrary, these embodiments are provided in order to enable a more thorough understanding of the present invention and to fully convey the scope of the present invention to those skilled in the art.

[0024] In the description of the present invention, it is to be understood that the terms “center”, “longitudinal”, “lateral”, “length”, “width”, “thickness”, “up”, “down”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inside”, “outside”, “clockwise”, “counterclockwise”, “axial”, “radial”, “circumferential”, etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0025] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is more than two, unless otherwise clearly and specifically defined.

[0026] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0027] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0028] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0029] The coating ring for silicon carbide growth device provided by the present invention comprises: a ring body, the front of which is a horizontal plane, and a through groove engaged with a graphite tray is provided in the middle of the ring body; the inner edge of the ring body comprises an arc surface and a vertical surface, and the vertical surface of the ring body forms a positioning flat edge in contact with the flat edge of the raised portion of the graphite tray; four blind holes are provided at a position close to the inner edge of the ring body, wherein two blind holes are respectively close to two flat edge corners of the ring body, and the other two blind holes are both close to the arc surface of the ring body; a fixing column, wherein four fixing columns are respectively embedded in four blind holes, and the edges of the four fixing columns and the edges of the substrate form two tangent circle structures to position the substrate on the horizontal plane of the ring body, thereby reducing the contact surface between the outer edge of the substrate and the inner edge of the ring body. The present invention can avoid the inner edge of the coating ring from growing byproducts during epitaxial growth and sticking to the edge of the substrate, and causing the inner circle of the coating ring to gradually shrink, and the phenomenon of chip removal and fragmentation is significantly improved, and the cost is significantly reduced.

[0030] The coating ring for a silicon carbide growth device provided by an embodiment of the present invention is described in detail below with reference to the accompanying drawings.

[0031] See also Figure 1 , Figure 2The coating ring for the silicon carbide growth device provided in this embodiment includes a ring body 1 and a fixed column 2. Among them, the front of the ring body 1 is a horizontal plane, and a through groove 3 is provided in the middle of the ring body 1, and the through groove 3 is used to fit with the raised portion of the graphite tray (not shown in the figure) to form a carrier suitable for carrying the substrate. The inner edge of the ring body 1 includes an arc surface and a vertical surface, and the two ends of the arc surface are connected to the two ends of the vertical surface. The vertical surface of the ring body 1 forms a positioning flat edge 4 that contacts the flat edge of the raised portion of the graphite tray. Four blind holes 5 are provided at a position close to the inner edge of the ring body 1, wherein two blind holes 5 are respectively close to the two flat edge corners of the ring body 1, and the other two blind holes 5 are close to the arc surface of the ring body 1. Four fixed columns 2 are respectively embedded in the four blind holes 5, and the edges of the four fixed columns 2 form two tangent circle structures with the edges of the substrate to position the substrate on the horizontal plane of the ring body 1, thereby reducing the contact surface between the outer edge of the substrate and the inner edge of the ring body 1.

[0032] In the above embodiment, preferably, the positioning flat edge 4 of the ring body 1 is located between 5 o'clock and 7 o'clock.

[0033] In the above embodiment, preferably, the two blind holes 5 close to the arc surface of the ring body 1 are respectively located between 10 o'clock and 11 o'clock and between 1 o'clock and 2 o'clock.

[0034] In the above embodiment, preferably, a flange 6 extending downward is formed on one side of the back of the ring body 1, and the flange is used to be combined with the edge of the graphite tray so that the ring body 1 can be firmly combined with the graphite tray during the subsequent rotation process and will not fly off.

[0035] In the above embodiment, preferably, the fixing column 2 and the blind hole 5 are embedded in a detachable manner to facilitate disassembly and replacement in subsequent maintenance processes.

[0036] In the above embodiments, preferably, the shape of the blind hole 5 can be circular, square or other regular shapes.

[0037] In the above embodiments, preferably, the shape of the fixing column 2 can be a cylinder, a square column or other regular columns.

[0038] In the above embodiment, preferably, the ring body 1 is made of graphite.

[0039] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them; although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein by equivalents; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application, and they should all be included in the scope of the claims and specification of the present application. In particular, as long as there is no structural conflict, the various technical features mentioned in the various embodiments can be combined in any way. The present application is not limited to the specific embodiments disclosed herein, but includes all technical solutions that fall within the scope of the claims.

Claims

1. A coating ring for a silicon carbide growth device, characterized in that: include: A ring body, wherein the front side of the ring body is a horizontal plane, and a through groove is provided in the middle of the ring body, and the through groove is used to be embedded with the raised portion of the graphite tray to jointly form a carrier suitable for carrying a substrate; the inner edge of the ring body comprises an arc surface and a vertical surface, and the two ends of the arc surface are connected to the two ends of the vertical surface, and the vertical surface of the ring body forms a positioning flat edge in contact with the flat edge of the raised portion of the graphite tray; 4 blind holes are provided at a position close to the inner edge of the ring body, wherein two of the blind holes are respectively close to the two flat edge corners of the ring body, and the other two blind holes are both close to the arc surface of the ring body; The four fixing posts are respectively embedded in the four blind holes, and the edges of the four fixing posts and the edge of the substrate form two tangent circle structures to position the substrate on the horizontal plane of the ring body, thereby reducing the contact area between the outer edge of the substrate and the inner edge of the ring body.

2. The coating ring according to claim 1, characterized in that: The positioning flat edge of the through slot is located between 5 o'clock and 7 o'clock.

3. The coating ring according to claim 2, characterized in that: The two blind holes on the arc surface close to the through groove are respectively located between 10 o'clock and 11 o'clock and between 1 o'clock and 2 o'clock.

4. The coating ring according to claim 1, characterized in that: A flange extending downward is formed on one side of the back side of the ring body, and the flange is used to be combined with the edge of the graphite tray.

5. The coating ring according to claim 1, characterized in that: The fixing column and the blind hole are embedded in a detachable manner.

6. The coating ring according to claim 1, characterized in that: The shape of the blind hole is a circle or a regular polygon.

7. The coating ring according to claim 6, characterized in that: The shape of the fixing column is a cylinder or a regular polygonal column.

8. The coating ring according to any one of claims 1 to 7, characterized in that: The shape of the fixing column is a cylinder or a regular polygonal column.

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