A quartz crucible automatic detection device capable of remote monitoring

Abstract

The present invention relates to the field of quartz crucible detection technology, and specifically to a remotely monitored automatic detection device for quartz crucibles, comprising a detection base frame, a detection dark box, a conveyor belt and an output conveyor frame. The device detects the appearance, size, bottom, internal defects and heat distribution of the quartz crucible through multiple groups of detection dark boxes. The detection dark boxes include first, second and third detection dark boxes, which respectively detect the characteristics of various parts of the quartz crucible in different postures. The device is equipped with high-definition industrial cameras, laser rangefinders, ultrasonic probes, infrared thermal imagers and other equipment, and can detect the appearance defects, dimensional parameters, internal defects and heat distribution of the crucible. Through the data processing and communication module inside the detection dark box, the detection data can be transmitted to the remote monitoring system in real time to realize automatic detection and waste removal. The present invention can greatly improve the detection efficiency and accuracy of quartz crucibles, reduce manual operations, and improve the level of production automation.

Description

Technical Field

[0001] The invention relates to the technical field of quartz crucible detection, in particular to an automatic detection device for quartz crucible capable of remote monitoring. Background Art

[0002] Quartz crucible is an important container for crystal growth in high-tech industries such as semiconductors and photovoltaics. Its quality directly affects the purity and performance of crystal materials. With the rapid development of the industry, the quality requirements for quartz crucibles are getting higher and higher. However, the existing quartz crucible detection equipment has many shortcomings in practical applications, which are mainly manifested in the following aspects: Traditional quartz crucible detection equipment can usually only detect a specific part or a single angle of the crucible. For example, only the outer surface or top of the crucible can be detected, and the bottom, interior and side walls cannot be fully detected. This limited detection range easily leads to some hidden defects (such as microcracks, inclusions, bottom defects, etc.) that cannot be discovered in time, affecting the service life and safety of the crucible. In addition, most of the existing detection equipment requires manual participation, including loading and unloading, flipping and position adjustment of the crucible; this not only increases the labor intensity of the operator, but also easily introduces human errors, resulting in instability of the detection results. At the same time, the efficiency of manual operation is low, and it is difficult to meet the needs of mass production for high-efficiency detection.

[0003] In view of this, research and improvement are carried out on the existing problems, and a quartz crucible automatic detection device that can be remotely monitored is provided to solve the current problems. The purpose is to solve the problems and improve the practical value through this technology. Summary of the invention

[0004] The present invention aims to solve one of the technical problems existing in the prior art or related technology.

[0005] To this end, the technical solution adopted by the present invention is: an automatic detection device for quartz crucibles capable of remote monitoring, comprising a detection base frame, a detection dark box, a conveyor belt and an output conveyor frame, wherein a waste plate group is provided on one side of the output conveyor frame, and a waste discharge push rod for pushing materials into the surface of the waste plate group is provided on the surface of the output conveyor frame. Fixed transmission bars and torsion guide bars are fixedly installed on the surface of the detection base frame, and transmission shaft teeth are provided on the surface of the detection base frame. The number of detection dark boxes is several and evenly distributed on the surface of the detection base frame. The torsion guide bar includes a reverse guide portion and a flipping portion located at both ends of the reverse guide portion, and a guide groove for the transmission belt is provided between the flipping portion and the reverse guide portion.

[0006] The device uses a design of multiple sets of inspection dark boxes to perform multi-angle inspections on the appearance, size, internal defects and thermal distribution of the quartz crucible during the transmission process to ensure the accuracy of the inspection.

[0007] In a possible implementation, the inspection dark box includes a first inspection dark box, a second inspection dark box and a third inspection dark box, which are respectively used to inspect the quartz crucible in different postures, and the first inspection dark box, the second inspection dark box and the third inspection dark box are arranged along the conveying direction of the twisting guide bar, and the first inspection dark box, the second inspection dark box and the third inspection dark box are respectively sleeved on the surface of the flip part, the reverse guide part and another flip part. The first inspection dark box is used for appearance and size inspection of the quartz crucible in the initial state; the second inspection dark box is used for bottom and internal defect inspection of the quartz crucible in the inverted state; the third inspection dark box is used for specific parts and heat distribution inspection of the quartz crucible after 180-degree rotation.

[0008] By setting the first, second and third inspection dark boxes, the device can inspect different parts of the quartz crucible in different postures, ensuring comprehensive coverage of the inspection requirements of the crucible and improving the detection rate of defects.

[0009] In a possible embodiment, the conveying strip includes a flexible strip and a plurality of chain link plates distributed on the surface of the flexible strip, wherein a clamping ear is fixedly mounted on the surface of the chain link plate, a sliding guide groove is provided on the surface of the chain link plate, and the flexible strip is slidably arranged inside the guide grooves of the fixed transmission bar and the torsion guide bar. The surface of the flexible strip is provided with tooth grooves for transmission with the transmission shaft teeth. The sliding guide groove is in sliding contact with the surface of the fixed transmission bar and the torsion guide bar, and the clamping ear is a flexible material component, which is used to clamp and abut the quartz crucible during the conveying process. By adopting a clamping ear clamping system made of flexible material, the device can stably clamp the quartz crucible during the conveying process, effectively avoiding damage to the crucible caused by shaking or impact during the conveying process.

[0010] In a possible implementation, the first detection dark box includes: a high-definition industrial camera installed inside the dark box, used to obtain an image of the outer surface of the quartz crucible; a laser rangefinder arranged in the dark box, used to measure the size parameters of the quartz crucible; and a ring-shaped LED light source, used to provide uniform lighting and reduce detection interference. By using a detection solution combining a high-definition industrial camera and a laser rangefinder, the device can accurately obtain the appearance image and size parameters of the quartz crucible, ensuring the accuracy and consistency of the detection data.

[0011] In a possible implementation, the second detection dark box includes: an ultrasonic probe installed inside the dark box, located at the bottom of the inverted quartz crucible, for detecting defects inside the crucible; an anti-vibration structure for reducing the impact of mechanical vibration during the transmission process on ultrasonic detection; and a photoelectric sensor for detecting the entry and positioning of the quartz crucible. By integrating the ultrasonic probe and the anti-vibration structure, the device can accurately detect internal defects of the quartz crucible in an inverted state, while reducing the interference of external vibration on the detection results.

[0012] In a possible implementation, the third inspection dark box includes: a high-magnification industrial camera for detecting minute defects in specific parts of the quartz crucible; an infrared thermal imager for detecting the heat distribution of the quartz crucible and identifying the internal stress concentration area; a constant temperature control system for maintaining a stable temperature inside the dark box to ensure the accuracy of infrared detection. By combining a high-magnification industrial camera with an infrared thermal imager, the device can detect minute defects in the quartz crucible while identifying the heat distribution inside the crucible, helping to determine the stress concentration area and improving the overall detection effect.

[0013] In one possible implementation, a data processing and communication module is provided inside the detection black box to transmit the detection data to the remote monitoring system in real time, so as to facilitate the analysis and storage of the detection results. The real-time data processing and communication module of the device enables the detection data to be quickly transmitted to the remote monitoring system, helping the user to analyze the detection results in time and store the relevant data for subsequent use.

[0014] In a possible implementation, the detection dark box is configured to generate a detection signal reflecting the detection result of the quartz crucible, and the detection signal is used to indicate whether the quartz crucible is qualified. The surface of the output conveyor rack is provided with a material sensor for detecting the existence and position of the quartz crucible. The detection signal generated by the detection dark box is connected to the information of the material sensor through communication to control the driving of the waste discharge push rod. Through the linkage control of the material sensor and the detection signal, the device can automatically determine the detection result of the quartz crucible, and realize the automatic removal of unqualified products by controlling the waste discharge push rod, thereby reducing human intervention and improving the level of automation.

[0015] In a possible implementation, the number of fixed transmission bars and torsion guide bars is two groups, and they are arranged symmetrically about the center line of the detection base frame surface, the two ends of the fixed transmission bars and the two ends of the torsion guide bars are fixedly connected to form a ring, and the conveying strips on the surfaces of the fixed transmission bars and torsion guide bars on both sides rotate in opposite directions. By symmetrically arranging the fixed transmission bars and torsion guide bars, the device can balance the mechanical stress during the conveying process, ensuring the stability and reliability of the crucible conveying process.

[0016] The beneficial effects achieved by the present invention are:

[0017] 1. In the present invention, by setting the first, second and third inspection dark boxes, the quartz crucible is inspected in different postures, namely, initial, inverted and after 180-degree rotation, to ensure that all parts of the crucible can be accurately inspected. The multi-angle and multi-posture inspection method improves the detection rate of crucible defects and reduces the possibility of missed inspection.

[0018] 2. In the present invention, the device integrates a variety of detection equipment such as high-definition industrial cameras, laser rangefinders, ultrasonic probes, high-magnification industrial cameras, infrared thermal imagers, etc., which can detect the appearance defects, dimensional deviations, internal defects and heat distribution of the crucible to meet different detection needs. The detection signal generated by the detection darkbox is connected with the information of the material sensor through communication, and the drive of the waste discharge push rod is automatically controlled, thereby realizing the automated linkage of the detection, transmission and rejection processes, reducing manual operations and improving production efficiency.

[0019] 3. In the present invention, the rotation directions of the conveying belts on both sides are opposite to each other, which balances the mechanical stress. The flexible strips of the conveying belts are slidably arranged on the inner side, which can adapt to the flipping and inversion of the crucible during the conveying process, thereby improving the stability and reliability of the equipment operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the present invention;

[0021] Figure 2 A schematic diagram of the surface structure of a detection base frame according to an embodiment of the present invention;

[0022] Figure 3 A schematic diagram of the structure of a fixed transmission bar, a torsion guide bar and a transmission belt according to an embodiment of the present invention;

[0023] Figure 4 It is a schematic diagram of the structure of an output conveyor rack and a waste tray assembly according to an embodiment of the present invention;

[0024] Figure 5 A schematic diagram of a detection dark box structure according to an embodiment of the present invention;

[0025] Figure 6 A schematic diagram of the surface structure of a conveyor belt according to an embodiment of the present invention;

[0026] Figure 7 A schematic diagram of a twisted guide bar structure according to an embodiment of the present invention;

[0027] Figure 8 It is a schematic diagram of the local structure of a conveyor belt according to an embodiment of the present invention.

[0028] Reference numerals:

[0029] 100, detection base frame; 110, fixed transmission bar; 120, torsion guide bar; 130, transmission shaft gear; 140, output conveyor frame; 150, waste plate group; 160, waste discharge push rod; 121, turning part; 122, reverse guide part; 123, guide groove;

[0030] 200. Detection of dark box;

[0031] 300, conveyor belt; 310, flexible strip; 320, chain link plate; 330, clamping ear; 311, tooth groove; 321, guide groove. DETAILED DESCRIPTION

[0032] To make the purpose, technical solution and advantages of the present invention more clear, the present invention is further described in detail below in combination with specific implementations and with reference to the accompanying drawings. It should be noted that the embodiments of the present invention and the features in the embodiments can be combined with each other without conflict.

[0033] It is to be understood that these descriptions are exemplary only and are not intended to limit the scope of the invention.

[0034] The following is combined with Figure 1-Figure 8 Some embodiments of the present invention provide a quartz crucible automatic detection device capable of remote monitoring.

[0035] Embodiment 1:

[0036] The invention discloses an automatic detection device for quartz crucibles capable of remote monitoring, comprising a detection base frame 100, a detection dark box 200, a conveyor belt 300 and an output conveyor frame 140, wherein a waste plate group 150 is provided on one side of the output conveyor frame 140, and a waste discharge push rod 160 for pushing materials into the surface of the waste plate group 150 is provided on the surface of the output conveyor frame 140. A fixed transmission bar 110 and a torsion guide bar 120 are fixedly installed on the surface of the detection base frame 100, and a transmission shaft tooth 130 is provided on the surface of the detection base frame 100. The number of the detection dark boxes 200 is several and evenly distributed on the surface of the detection base frame 100. The torsion guide bar 120 comprises a reverse guide portion 122 and a flip portion 121 located at both ends of the reverse guide portion 122, and a guide groove 123 for the conveyor belt 300 to conduct is provided between the flip portion 121 and the reverse guide portion 122.

[0037] The inspection dark box 200 is composed of three different inspection dark boxes, which are used to inspect the states of the quartz crucible in different postures. The first inspection dark box is installed on the surface of the flip part 121, and is used to inspect the appearance and size of the quartz crucible; the second inspection dark box is installed on the surface of the inverted guide part 122, and is used to inspect the bottom and internal defects of the quartz crucible in an inverted state; the third inspection dark box is installed on the surface of another flip part 121, and is used to inspect specific parts and heat distribution of the quartz crucible after it is rotated 180 degrees.

[0038] In the specific operation, the quartz crucible is first conveyed into the first inspection dark box by the conveyor belt 300, and the appearance and size inspection are completed in the initial state; then the quartz crucible is rotated into the second inspection dark box, and the bottom and internal defects are inspected; finally, the quartz crucible passes through the third inspection dark box after rotating 180 degrees to complete the inspection of specific parts and heat distribution. The whole process is realized by the conveying structure of the fixed transmission bar 110 and the torsion guide bar 120 to achieve continuous automatic transmission.

[0039] Embodiment 2:

[0040] In another embodiment, the conveyor belt 300 includes a flexible strip 310 and a plurality of chain link plates 320 distributed on the surface of the flexible strip 310, wherein a clamping ear 330 is fixedly installed on the surface of the chain link plate 320, a sliding guide groove 321 is provided on the surface of the chain link plate 320, and the flexible strip 310 is slidably arranged inside the guide groove 123 of the fixed transmission bar 110 and the torsion guide bar 120. A tooth groove 311 for transmission with the transmission shaft teeth 130 is provided on the surface of the flexible strip 310, and the flexible strip 310 is slidably abutted with the surface of the fixed transmission bar 110 and the torsion guide bar 120 through the sliding guide groove 321. The clamping ear 330 is a flexible material component, which is used to clamp and abut the quartz crucible during the transmission process to ensure stable protection of the crucible during the transmission process.

[0041] In this embodiment, the device further integrates a data processing and communication module, and the detection data is transmitted to the remote monitoring system in real time through the module inside the detection dark box 200. The existence and position of the quartz crucible are detected by the material sensor, and the detection signal generated by the detection dark box 200 is communicated and connected to realize the control of the drive of the waste discharge push rod 160. During the detection process, if the quartz crucible is detected as unqualified, the system automatically controls the waste discharge push rod 160 to push the unqualified product into the waste tray group 150, thereby completing the automatic processing of the waste.

[0042] This embodiment further optimizes the structural stability design during the transmission process, and reduces the influence of mechanical stress by arranging the rotation directions of the transmission strips 300 on both sides relative to each other, thereby improving the stability and reliability of the equipment operation. At the same time, the sliding structure of the flexible strip 310 can adapt to the flipping and inversion of the quartz crucible during the transmission process, ensuring the smooth operation of the quartz crucible during the transmission and detection process.

[0043] The working principle and use process of the present invention:

[0044] This device performs fully automatic multi-angle and multi-posture detection on the quartz crucible through the coordinated action of multiple components such as the detection base frame 100, the detection dark box 200, the conveyor belt 300 and the output conveyor frame 140. First, the quartz crucible is placed on the conveyor belt 300, and the quartz crucible is sequentially conveyed to different detection positions through the conveying structure of the fixed transmission bar 110 and the torsion guide bar 120. During the process, the detection dark box 200 in the device is divided into three detection dark boxes, which respectively detect the appearance, bottom, internal defects and specific parts of the quartz crucible. Each detection dark box is equipped with corresponding detection modules, such as cameras, laser rangefinders and infrared detection equipment, to ensure the detection accuracy of various parts of the quartz crucible.

[0045] When the quartz crucible enters the first inspection dark box, the system first completes the initial appearance and size inspection of the quartz crucible. After that, the crucible is turned over and enters the second inspection dark box, and its bottom and internal defects are inspected after being inverted. Finally, the quartz crucible is rotated 180 degrees and passes through the third inspection dark box to complete the detection of subtle defects and heat distribution in specific parts. The detection data is transmitted to the remote monitoring system in real time through the communication module inside the inspection dark box 200, realizing real-time analysis and storage of data.

[0046] If a defect in the crucible is detected, the device will automatically generate a detection signal, determine the position of the crucible through the material sensor on the output conveyor rack 140, and control the waste discharge push rod 160 to push the unqualified crucible into the waste tray group 150 to complete the waste processing.

[0047] During the entire detection process, the detection data of the quartz crucible is transmitted to the remote monitoring system in real time through the data processing module in the detection dark box 200 for user analysis and storage.

[0048] Rejection of unqualified products: If the crucible is detected to be unqualified, the system generates a detection signal, and combined with the position information of the material sensor, controls the waste discharge push rod 160 to push the unqualified crucible into the waste tray group 150 to complete the automatic rejection.

[0049] Detection completed: qualified quartz crucibles are sent out of the device through the conveyor system. Users can view the test results through the remote monitoring system or directly carry out subsequent processing.

[0050] In the description of this specification, the description of the terms "one embodiment", "some embodiments", "specific embodiments", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0051] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A quartz crucible automatic detection device capable of remote monitoring, characterized in that: The invention comprises a detection frame (100), a detection dark box (200), a conveyor belt (300) and an output conveyor frame (140); a waste plate group (150) is provided on one side of the output conveyor frame (140); a waste discharge push rod (160) for pushing materials into the surface of the waste plate group (150) is provided on the surface of the output conveyor frame (140); a fixed transmission bar (110) and a torsion guide bar (120) are fixedly mounted on the surface of the detection frame (100); a transmission shaft tooth (130) is provided on the surface of the detection frame (100); a plurality of detection dark boxes (200) are uniformly distributed on the surface of the detection frame (100); the torsion guide bar (120) comprises a reverse guide portion (122) and a turning portion (121) located at both ends of the reverse guide portion (122); a guide groove (123) for conducting the conveyor belt (300) is provided between the turning portion (121) and the reverse guide portion (122); The detection dark box (200) comprises a first detection dark box, a second detection dark box and a third detection dark box, which are respectively used to detect the quartz crucible in different postures, and the first detection dark box, the second detection dark box and the third detection dark box are arranged along the conveying direction of the twisting guide bar (120), and the first detection dark box, the second detection dark box and the third detection dark box are respectively sleeved on the surface of the turning part (121), the reverse guide part (122) and another turning part (121), wherein: The first inspection dark box is used for the appearance and size inspection of the quartz crucible in the initial state; The second inspection dark box is used for bottom and internal defect inspection of the quartz crucible in an inverted state; The third detection dark box is used to detect the specific position and heat distribution of the quartz crucible after it rotates 180 degrees; The fixed transmission bars (110) and the torsion guide bars (120) are provided in two groups and are arranged symmetrically about the center line of the surface of the detection base frame (100); the two ends of the fixed transmission bars (110) and the two ends of the torsion guide bars (120) are fixedly connected and combined to form a ring; the transmission belts (300) on the surfaces of the fixed transmission bars (110) and the torsion guide bars (120) on both sides rotate in opposite directions.

2. The automatic detection device for quartz crucible capable of remote monitoring according to claim 1, characterized in that: The conveyor belt (300) comprises a flexible strip (310) and a plurality of chain link plates (320) distributed on the surface of the flexible strip (310); a clamping ear (330) is fixedly mounted on the surface of the chain link plate (320); a sliding guide groove (321) is provided on the surface of the chain link plate (320); the flexible strip (310) is slidably arranged inside the guide groove (123) of the fixed transmission strip (110) and the torsion guide strip (120); a tooth groove (311) for transmission with the transmission shaft teeth (130) is provided on the surface of the flexible strip (310); the sliding guide groove (321) is in sliding contact with the surface of the fixed transmission strip (110) and the torsion guide strip (120); and the clamping ear (330) is a flexible material component used to clamp and contact the quartz crucible during the conveying process.

3. The automatic detection device for quartz crucible capable of remote monitoring according to claim 1, characterized in that: The first detection dark box comprises: A high-definition industrial camera installed inside the dark box is used to obtain images of the outer surface of the quartz crucible; A laser rangefinder arranged in the dark box is used to measure the size parameters of the quartz crucible; Ring-shaped LED light source provides uniform illumination and reduces detection interference.

4. The automatic detection device for quartz crucible capable of remote monitoring according to claim 1, characterized in that: The second detection dark box comprises: The ultrasonic probe installed inside the dark box is located at the bottom of the inverted quartz crucible and is used to detect defects inside the crucible; Anti-vibration structure to reduce the impact of mechanical vibration during transmission on ultrasonic testing; Photoelectric sensor to detect the entry and positioning of the quartz crucible.

5. The automatic detection device for quartz crucible capable of remote monitoring according to claim 1, characterized in that: The third detection dark box comprises: High-magnification industrial camera to detect subtle defects in specific parts of quartz crucible; Infrared thermal imager to detect the thermal distribution of the quartz crucible and identify the internal stress concentration areas; Constant temperature control system keeps the temperature inside the darkroom stable to ensure the accuracy of infrared detection.

6. The automatic detection device for quartz crucible capable of remote monitoring according to claim 1, characterized in that: The detection dark box (200) is provided with a data processing and communication module inside, which transmits the detection data to the remote monitoring system in real time, so as to facilitate the analysis and storage of the detection results.

7. The remotely monitored automatic detection device for quartz crucible according to claim 1, characterized in that: The detection dark box (200) is configured to generate a detection signal reflecting a detection result of the quartz crucible, the detection signal being used to indicate whether the quartz crucible is qualified. A material sensor is provided on the surface of the output conveyor rack (140) for detecting the existence and position of the quartz crucible. The detection signal generated by the detection dark box (200) is connected to information from the material sensor through communication to control the driving of the waste discharge push rod (160).

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