Sample detection method and device

Abstract

According to the sample detection method and device, when a light source, a polarization splitting prism, a beam splitter, an objective lens, a barrel lens and a detector are configured to be located in a light path, the propagation path of a light beam emitted by the light source is determined based on a target polarization state. When the target polarization state is a p polarization state, enabling the light beam to transmit in the polarization splitting prism based on the propagation path to obtain transmission light; the polarization state of the transmission light is p polarization state; when the target polarization state is the s polarization state, the light beam is reflected in the polarization splitting prism based on the propagation path to obtain reflected light; the polarization state of the reflected light is s polarization state. Therefore, when light in a certain polarization state needs to be utilized to illuminate and detect a sample to be detected, the light beam can be realized by changing the propagation path of the light beam, so that the light beam is transmitted and emitted in the polarization splitting prism to obtain light in a p polarization state, and is reflected and emitted to obtain light in an s polarization state, and a linear polarizer does not need to be manually switched; the light in the required polarization state can be quickly and accurately obtained, and the sample detection precision is improved.

Description

Technical Field

[0001] The present application relates to the field of sample detection, and in particular to a sample detection method and device. Background Art

[0002] In semiconductor measurement equipment, microscopic imaging technology is often required to measure the samples to be measured, such as wafers. At high-end wafer manufacturing nodes, different illumination polarization states are often required to illuminate the samples to be measured, so as to obtain better imaging quality and improve detection accuracy. In related technologies, linear polarizers in different directions are often used to switch between p-polarization state and s-polarization state, which results in low accuracy of switching position and direction, and slow switching speed. Summary of the invention

[0003] In view of this, the purpose of this application is to provide a sample detection method and device, which can quickly and accurately obtain the required polarization state of light, thereby improving the detection accuracy of the sample. The specific scheme is as follows: In one aspect, the present application provides a sample detection method, comprising: When a light source (101), a polarization beam splitter (102), a beam splitter (103), an objective lens (104), a tube lens (105), and a detector (106) are arranged in an optical path, a propagation path of a light beam emitted by the light source (101) is determined based on a target polarization state; When the target polarization state is a p polarization state, based on the propagation path, the light beam is transmitted in the polarization beam splitting prism (102) to obtain transmitted light; the polarization state of the transmitted light is the p polarization state, and the transmitted light is used to be reflected by the sample to be measured (107) after passing through the beam splitter (103) and the objective lens (104), and enter the detector (106) through the tube lens (105) to form an image; When the target polarization state is the s polarization state, based on the propagation path, the light beam is reflected in the polarization beam splitting prism (102) to obtain reflected light; the polarization state of the reflected light is the s polarization state, and the reflected light is used to be reflected by the sample to be measured (107) after passing through the beam splitter (103) and the objective lens (104), and enter the detector (106) through the tube lens (105) to form an image.

[0004] In a possible implementation manner, a light splitting surface is provided inside the polarization light splitting prism (102), and the polarization light splitting prism (102) comprises a first surface (1021), a second surface (1022), and a third surface (1023); When the target polarization state is a p polarization state, based on the propagation path, the light beam is transmitted in the polarization beam splitting prism (102) to obtain transmitted light, comprising: Based on the propagation path, the light beam is incident from the first surface (1021) to the light splitting surface, and is emitted from the second surface (1022), thereby obtaining the transmitted light; the first surface (1021) and the second surface (1022) are two surfaces arranged opposite to each other; When the target polarization state is an s polarization state, based on the propagation path, the light beam is reflected in the polarization beam splitting prism (102) to obtain reflected light, comprising: Based on the propagation path, the light beam is incident from the third surface (1023) to the beam splitting surface and is emitted from the second surface (1022) to obtain the reflected light; the second surface (1022) and the third surface (1023) are two adjacent surfaces.

[0005] In a possible implementation, a first lens (108) and a first shutter (109) are arranged on a first optical path between the light source (101) and a first surface (1021) of the polarization beam splitter prism (102), and a second lens (110) and a second shutter (111) are arranged on a second optical path between the light source (101) and a third surface (1023) of the polarization beam splitter prism (102); Based on the propagation path, the light beam is incident from the first surface (1021) to the light splitting surface, and is emitted from the second surface (1022) to obtain the transmitted light, comprising: Based on the propagation path, controlling the first shutter (109) to open and the second shutter (111) to close, so that the light beam is incident on the light splitting surface from the first surface (1021) and emerges from the second surface (1022), thereby obtaining the transmitted light; Based on the propagation path, the light beam is incident on the light splitting surface from the third surface (1023) and emitted from the second surface (1022) to obtain the reflected light, comprising: Based on the propagation path, the second shutter (111) is controlled to open and the first shutter (109) is controlled to close, so that the light beam is incident on the light splitting surface from the third surface (1023) and is emitted from the second surface (1022), thereby obtaining the reflected light.

[0006] In a possible implementation, the first shutter (109) is located on the light-entering side of the first lens (108), and the second shutter (111) is located on the light-entering side of the second lens (110).

[0007] In a possible implementation, an optical fiber (112) and an optical fiber beam splitter (113) are provided on an optical path between the light source (101) and the polarization beam splitter prism (102); the optical fiber (112) is connected to the light source (101); and the optical fiber beam splitter (113) is used to split a light beam in the optical fiber (112) into a first light beam propagating in the first light path and a second light beam propagating in the second light path; Based on the propagation path, controlling the first shutter (109) to open and the second shutter (111) to close, so that the light beam is incident from the first surface (1021) to the light splitting surface and is emitted from the second surface (1022), thereby obtaining the transmitted light, comprising: Based on the propagation path, controlling the first shutter (109) to open and the second shutter (111) to close, so that the first light beam is incident on the light splitting surface from the first surface (1021) and emerges from the second surface (1022), thereby obtaining the transmitted light; Based on the propagation path, controlling the second shutter (111) to open and the first shutter (109) to close, so that the light beam is incident on the light splitting surface from the third surface (1023) and is emitted from the second surface (1022), thereby obtaining the reflected light, comprising: Based on the propagation path, the second shutter (111) is controlled to open and the first shutter (109) is controlled to close, so that the second light beam is incident on the light splitting surface from the third surface (1023) and is emitted from the second surface (1022), thereby obtaining the reflected light.

[0008] In a possible implementation manner, a Kohler illumination module (114) is provided on the optical path between the polarization beam splitting prism (102) and the beam splitter (103).

[0009] In another aspect, the present application also provides a sample detection device, comprising: A light source (101), a polarization beam splitter (102), a beam splitter (103), an objective lens (104), a tube lens (105), and a detector (106); The polarization beam splitter prism (102) is used to make the light beam emitted by the light source (101) obtain light with different polarization states under different propagation paths; when the target polarization state is the p polarization state, the polarization beam splitter prism (102) is used to make the light beam transmit in the polarization beam splitter prism (102) to obtain transmitted light; the polarization state of the transmitted light is the p polarization state; when the target polarization state is the s polarization state, the polarization beam splitter prism (102) is used to make the light beam reflect in the polarization beam splitter prism (102) to obtain reflected light; the polarization state of the reflected light is the s polarization state; The beam splitter (103) is used to allow light emitted from the polarization beam splitting prism (102) to pass through the objective lens (104) and be incident on the sample to be tested (107); the detector (106) is used to image the light reflected by the sample to be tested (107) after passing through the objective lens (104), the beam splitter (103) and the tube lens (105).

[0010] In a possible implementation, a splitting surface is provided inside the polarization beam splitter prism (102), and the polarization beam splitter prism (102) comprises a first surface (1021), a second surface (1022), and a third surface (1023); the first surface (1021) and the second surface (1022) are two surfaces arranged opposite to each other; the second surface (1022) and the third surface (1023) are two adjacent surfaces; When the target polarization state is a p-polarization state, the first surface (1021) is used to make the light beam incident on the light splitting surface from the first surface (1021), and the second surface (1022) is used to make the light beam emerge to obtain the transmitted light; When the target polarization state is the s polarization state, the third surface (1023) is used to make the light beam incident on the beam splitting surface from the third surface (1023), and the second surface (1022) is used to make the light beam emerge to obtain the reflected light.

[0011] In a possible implementation, a first lens (108) and a first shutter (109) are arranged on a first optical path between the light source (101) and a first surface (1021) of the polarization beam splitter prism (102), and a second lens (110) and a second shutter (111) are arranged on a second optical path between the light source (101) and a third surface (1023) of the polarization beam splitter prism (102).

[0012] In a possible implementation, an optical fiber (112) and an optical fiber beam splitter (113) are provided on an optical path between the light source (101) and the polarization beam splitter prism (102); the optical fiber (112) is connected to the light source (101); and the optical fiber beam splitter (113) is used to split a light beam in the optical fiber (112) into a first light beam propagating in the first light path and a second light beam propagating in the second light path; The first light beam is used to be incident on the light splitting surface from the first surface (1021) and to be emitted from the second surface (1022) to obtain the transmitted light; The second light beam is used to be incident on the light splitting surface from the third surface (1023) and to be emitted from the second surface (1022) to obtain the reflected light.

[0013] The embodiment of the present application provides a sample detection method and device. When a light source (101), a polarization beam splitter (102), a beam splitter (103), an objective lens (104), a tube lens (105) and a detector (106) are arranged in an optical path, a propagation path of a light beam emitted by the light source is determined based on a target polarization state. The target polarization state may be a p-polarization state or an s-polarization state. When the target polarization state is the p polarization state, based on the propagation path, the light beam is transmitted in the polarization beam splitter prism (102) to obtain the transmitted light; the polarization state of the transmitted light is the p polarization state, and the transmitted light is used to be reflected by the sample to be measured (107) after passing through the beam splitter (103) and the objective lens (104), and enters the detector (106) through the tube lens (105) to form an image; when the target polarization state is the s polarization state, based on the propagation path, the light beam is reflected in the polarization beam splitter prism (102) to obtain the reflected light; the polarization state of the reflected light is the s polarization state, and the reflected light is used to be reflected by the sample to be measured (107) after passing through the beam splitter (103) and the objective lens (104), and enters the detector (106) through the tube lens (105) to form an image. In this way, when it is necessary to use light of a certain polarization state to illuminate and detect the sample to be tested (107), this can be achieved by changing the propagation path of the light beam, so that the light beam is transmitted through the polarization beam splitter prism (102) to obtain light of the p-polarization state, and the light beam is reflected to obtain light of the s-polarization state. There is no need to manually switch the linear polarizer, and the light of the desired polarization state can be obtained quickly and accurately, thereby improving the detection accuracy of the sample. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0015] Figure 1 A schematic diagram of a sample detection method provided in an embodiment of the present application is shown; Figure 2 A schematic diagram of the structure of a sample detection device provided in an embodiment of the present application. DETAILED DESCRIPTION

[0016] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below with reference to the accompanying drawings.

[0017] In the following description, many specific details are set forth to facilitate a full understanding of the present application, but the present application may also be implemented in other ways different from those described herein, and those skilled in the art may make similar generalizations without violating the connotation of the present application. Therefore, the present application is not limited to the specific embodiments disclosed below.

[0018] For ease of understanding, a sample detection method and device provided in an embodiment of the present application are described in detail below with reference to the accompanying drawings.

[0019] refer to Figure 1 As shown, it is a schematic diagram of a flow chart of a sample detection method provided in an embodiment of the present application, and the method may include the following steps.

[0020] S101, when a light source (101), a polarization beam splitter (102), a beam splitter (103), an objective lens (104), a tube lens (105), and a detector (106) are arranged in an optical path, a propagation path of a light beam emitted by the light source is determined based on a target polarization state.

[0021] Specifically, the light source (101) is used to emit a light beam, the polarization beam splitter PBS (102) is used to split the polarization state of the light beam incident therein, the beam splitter (103) is used to split the light beam into two light beams with different emission directions, the sample to be tested (107) is located on the focal plane of the objective lens (104) so ​​that the light beam converges on the surface of the sample to be tested (107), and the detector (106) is located on the focal plane of the tube lens (105) so as to image the surface of the sample to be tested (107).

[0022] refer to Figure 2 As shown, a light beam emitted by a light source (101) passes through a polarization beam splitter (102), a beam splitter (103), and an objective lens (104) in sequence, is incident on the surface of a sample to be tested (107), is reflected by the sample to be tested (107), and then passes through the objective lens (104), the beam splitter (103), and the tube lens (105) in sequence to be imaged in a detector (106).

[0023] The target polarization state can be understood as a preset desired polarization state, and the target polarization state can be a p polarization state or an s polarization state. The propagation path of the light beam emitted by the light source (101) can be determined according to the target polarization state, and different polarization states correspond to different light beam propagation paths.

[0024] S102, when the target polarization state is a p polarization state, based on the propagation path, the light beam is transmitted in a polarization beam splitting prism (102) to obtain transmitted light.

[0025] When the target polarization state is the p polarization state, the propagation path determined thereby can cause the light beam to be transmitted through the polarization beam splitter prism (102), thereby obtaining transmitted light. The polarization state of the transmitted light is the p polarization state. In short, after the light beam emitted by the light source (101) passes through the polarization beam splitter prism (102), the emitted light is the transmitted light.

[0026] The transmitted light is used to be reflected by the sample to be tested (107) after passing through the beam splitter (103) and the objective lens (104), and enter the detector (106) through the tube lens (105) to form an image. That is, the transmitted light continues to be transmitted along the optical path, passes through the beam splitter (103) and the objective lens (104) in sequence, and then irradiates the surface of the sample to be tested (107). After being reflected by the sample to be tested (107), it passes through the objective lens (104), the beam splitter (103), and the tube lens (105) in sequence and enters the detector (106) to form an image. The image is an image formed by illuminating the sample to be tested (107) with a light beam in the p-polarization state.

[0027] S103, when the target polarization state is the s polarization state, based on the propagation path, the light beam is reflected in the polarization beam splitting prism (102) to obtain reflected light.

[0028] When the target polarization state is the s polarization state, the determined propagation path is different from the aforementioned propagation path. Under the propagation path corresponding to the s polarization state, the light beam can be reflected in the polarization beam splitter prism (102), and the emitted light is the reflected light. The polarization state of the reflected light is the s polarization state.

[0029] The reflected light is used to be reflected by the sample to be tested (107) after passing through the beam splitter (103) and the objective lens (104), and enter the detector (106) through the tube lens (105) to form an image. That is, the reflected light continues to be transmitted along the optical path, passes through the beam splitter (103) and the objective lens (104) in sequence, and then irradiates the surface of the sample to be tested (107), and after being reflected by the sample to be tested (107), passes through the objective lens (104), the beam splitter (103), and the tube lens (105) in sequence, and enters the detector (106) to form an image. The image is an image formed by illuminating the sample to be tested (107) with a light beam in the s-polarization state.

[0030] In this way, a corresponding propagation path can be selected according to the required polarization state (i.e., the target polarization state) to obtain a light beam with the required polarization state. When it is necessary to use light of a certain polarization state to illuminate and detect the sample to be tested (107), this can be achieved by changing the propagation path of the light beam, so that the light beam is transmitted through the polarization beam splitter prism (102) to obtain light of the p-polarization state, and the light beam is reflected to obtain light of the s-polarization state. There is no need to manually switch the linear polarizer, and the light of the required polarization state can be obtained quickly and accurately, thereby improving the detection accuracy of the sample.

[0031] In a possible implementation, a polarization beam splitter prism (102) has a beam splitting surface inside, and a light beam can be transmitted and reflected on the beam splitting surface. The polarization beam splitter prism (102) further includes a first surface (1021), a second surface (1022), and a third surface (1023).

[0032] refer to Figure 2 As shown, the first surface (1021) is the surface of the polarization beam splitter prism (102) facing left, the second surface (1022) is the surface of the polarization beam splitter prism (102) facing right, and the third surface (1023) is the surface of the polarization beam splitter prism (102) facing backward or forward. The first surface (1021) and the second surface (1022) are two surfaces arranged opposite to each other, and the second surface (1022) and the third surface (1023) are two adjacent surfaces that share the same edge. In addition, the directions involved in the present application are divided based on the same reference, that is, the six surfaces of the polarization beam splitter prism (102) are divided into six different directions.

[0033] S102, when the target polarization state is the p polarization state, causes the light beam to be transmitted in the polarization beam splitting prism (102) based on the propagation path to obtain transmitted light, which can be specifically S1021.

[0034] S1021, based on the propagation path, make the light beam incident from the first surface (1021) to the splitting surface, and emit from the second surface (1022), so as to obtain transmitted light.

[0035] Specifically, when the target polarization state is the p-polarization state, the light beam emitted by the light source (101) can be made incident on the beam splitting surface from the first surface (1021), that is, the light beam is incident on the left surface of the polarization beam splitting prism (102), and is emitted from the right surface, that is, from the second surface (1022). In this way, the light beam will penetrate the beam splitting surface, and the obtained light is the transmitted light.

[0036] S103, when the target polarization state is the s polarization state, based on the propagation path, causing the light beam to be reflected in the polarization beam splitting prism (102) to obtain reflected light, which may specifically be S1031.

[0037] S1031, based on the propagation path, the light beam is incident on the beam splitting surface from the third surface (1023) and emitted from the second surface (1022) to obtain reflected light.

[0038] Specifically, when the target polarization state is the s polarization state, the light beam emitted by the light source (101) can be made incident on the beam splitting surface from the third surface (1023), that is, the light beam is incident on the rearward (or forward) surface of the polarization beam splitting prism (102), and is emitted from the rightward surface, that is, from the second surface (1022). In this way, the light beam is reflected on the beam splitting surface, and the obtained light is the reflected light.

[0039] It can be seen that by controlling the light beam to be incident on different surfaces of the polarization beam splitter prism (102), the switching of the propagation path can be achieved. It is only necessary to change the incident direction of the light beam. The operation is simple and the light path adjustment process is simplified. There is no need to manually switch the linear polarizer. The required polarization state of light can be obtained quickly and accurately, thereby improving the detection accuracy of the sample.

[0040] In a possible implementation, a first lens (108) and a first shutter (109) may be provided on a first optical path between a light source (101) and a first surface (1021) of a polarization beam splitter prism (102). Specifically, the optical path between the light source (101) and the first surface (1021) of the polarization beam splitter prism (102) may be recorded as a first optical path, and a first lens (108) and a first shutter (109) may be provided on the first optical path. The first lens (108) may ensure that a light beam incident on the polarization beam splitter prism (102) is parallel light, and by controlling the opening and closing of the first shutter (109), it may be controlled whether the light propagating in the first optical path enters the polarization beam splitter prism (102).

[0041] A second lens (110) and a second shutter (111) may be provided on a second optical path between the light source (101) and the third surface (1023) of the polarization beam splitter prism (102). Specifically, the optical path between the light source (101) and the third surface (1023) of the polarization beam splitter prism (102) may be recorded as the second optical path, and the second lens (110) may ensure that the light beam incident on the polarization beam splitter prism (102) is parallel light. By controlling the opening and closing of the second shutter (111), it may be controlled whether the light propagating in the second optical path enters the polarization beam splitter prism (102).

[0042] Then S1021, based on the propagation path, makes the light beam incident from the first surface (1021) to the splitting surface and emerges from the second surface (1022) to obtain the transmitted light, which can be specifically S10211.

[0043] S10211, based on the propagation path, control the first shutter (109) to open and the second shutter (111) to close, so that the light beam is incident on the light splitting surface from the first surface (1021) and is emitted from the second surface (1022), thereby obtaining transmitted light.

[0044] Specifically, when the target polarization state is the p-polarization state, the first shutter (109) can be opened and the second shutter (111) can be closed, so that the light beam emitted by the light source (101) can only propagate along the first light path, and then be incident on the first surface (1021) of the polarization beam splitting prism (102), enter the beam splitting surface and be transmitted, and the transmitted light is emitted from the second surface (1022) and propagates backward.

[0045] Then S1031, based on the propagation path, makes the light beam incident on the splitting surface from the third surface (1023) and emerges from the second surface (1022) to obtain reflected light, which can be specifically S10311.

[0046] S10311, based on the propagation path, control the second shutter (111) to open and the first shutter (109) to close, so that the light beam is incident on the beam splitting surface from the third surface (1023) and is emitted from the second surface (1022), thereby obtaining reflected light.

[0047] Specifically, when the target polarization state is the s-polarization state, the second shutter (111) can be opened and the first shutter (109) can be closed, so that the light beam can only propagate along the second optical path and enter the splitting surface from the third surface (1023), and will not enter from the first surface (1021). Since the beam splitter (103) is located on the side of the second surface (1022), the light beam needs to exit from the second surface (1022). That is, the light beam is incident from the third surface (1023) and exits from the second surface (1022), and the exit light is reflected light, thereby obtaining a light beam in the s-polarization state. In addition, when the first shutter (109) and the second shutter (111) are both opened, the light beam exiting from the second surface (1022) is in a non-polarized state.

[0048] In this way, by dividing the light beam emitted by the light source (101) into two beams, one beam can be incident on the first surface (1021) along the first light path, and the other beam can be incident on the third surface (1023) along the second light path. Two shutters can be used to determine in which light path the light beam propagates. By closing the shutters, the s-polarization state and the p-polarization state can be switched without moving the position of the light source (101), thereby further simplifying the light path structure and making the switching operation of the polarization state easier.

[0049] In a possible implementation, the first shutter (109) can be located on the light-entering side of the first lens (108), and the second shutter (111) can be located on the light-entering side of the second lens (110), so as to avoid the illumination range of the parallel light emitted from the lens being too large. When the shutter is set on the light-exiting side, light shielding cannot be effectively achieved, thereby ensuring that the light beam incident on the polarization beam splitter prism (102) is incident from only one surface, thereby ensuring the effective realization of the polarization state. In addition, when the shutter is set on the light-entering side, its size can be set smaller, and the shutter can be as close to the lens as possible.

[0050] In a possible implementation, an optical fiber (112) and an optical fiber beam splitter (113) may be arranged on the optical path between the light source (101) and the polarization beam splitter prism (102), and the optical fiber (112) is connected to the light source (101), so that the light beam emitted by the light source (101) can propagate in the optical fiber (112), thereby reducing light loss. The optical fiber beam splitter (113) is used to split the light beam in the optical fiber (112) into a first light beam propagating in the first light path and a second light beam propagating in the second light path, that is, two optical fibers may be arranged after the optical fiber beam splitter (113), and the two optical fibers are used to propagate the first light beam and the second light beam, respectively.

[0051] S10211, based on the propagation path, control the first shutter (109) to open and the second shutter (111) to close, so that the light beam is incident on the splitting surface from the first surface (1021) and is emitted from the second surface (1022) to obtain transmitted light. Specifically, based on the propagation path, control the first shutter (109) to open and the second shutter (111) to close, so that the first light beam is incident on the splitting surface from the first surface (1021) and is emitted from the second surface (1022) to obtain transmitted light.

[0052] That is to say, after the light beam emitted by the light source (101) passes through the optical fiber beam splitter (113), the light beam propagates along the two optical fibers respectively. Since only the first shutter (109) is opened, only the light beam in one optical fiber can be incident on the polarization beam splitter prism (102), and is incident from the first surface (1021), thereby obtaining transmitted light with a p-polarization state.

[0053] S10311, based on the propagation path, control the second shutter (111) to open and the first shutter (109) to close, so that the light beam is incident on the splitting surface from the third surface (1023) and is emitted from the second surface (1022) to obtain reflected light. Specifically, based on the propagation path, control the second shutter (111) to open and the first shutter (109) to close, so that the second light beam is incident on the splitting surface from the third surface (1023) and is emitted from the second surface (1022) to obtain reflected light.

[0054] Specifically, the light beams propagate along the two optical fibers respectively. Since only the second shutter (111) is opened, only the light beam in one optical fiber can be incident on the polarization beam splitter prism (102), and is incident from the third surface (1023), thereby obtaining transmitted light with an s-polarization state.

[0055] In this way, by introducing the optical fiber and the optical fiber beam splitter, the placement position of the light source (101) can be unrestricted, and the optical fiber can make the light beam propagation more concentrated, thereby improving the utilization rate of light and reducing light loss. In addition, since the light beam emitted from the optical fiber is relatively concentrated, the shutter arranged at the light outlet of the optical fiber can block the light beam from the polarization beam splitter (102) to a greater extent, and can more strictly control the light beam to be incident on only one surface of the polarization beam splitter (102), thereby ensuring the effective realization of the polarization state.

[0056] In a possible implementation, a Kohler illumination module (114) is provided on an optical path between the polarization beam splitter (102) and the beam splitter (103); the Kohler illumination module (114) comprises a fourth lens (1141), a fifth lens (1142) and a third lens (1143); the Kohler illumination module (114) can be used to provide illumination; and light emitted by the Kohler illumination module (114) can be focused at a pupil position of the objective lens (104), thereby making the imaging effect clearer.

[0057] The present application also provides a sample detection device, referring to Figure 2 As shown, the sample detection device includes: A light source (101), a polarization beam splitter (102), a beam splitter (103), an objective lens (104), a tube lens (105), and a detector (106); The polarization beam splitter prism (102) is used to make the light beam emitted by the light source (101) obtain light with different polarization states under different propagation paths; when the target polarization state is the p polarization state, the polarization beam splitter prism (102) is used to make the light beam transmit in the polarization beam splitter prism (102) to obtain transmitted light; the polarization state of the transmitted light is the p polarization state; when the target polarization state is the s polarization state, the polarization beam splitter prism (102) is used to make the light beam reflect in the polarization beam splitter prism (102) to obtain reflected light; the polarization state of the reflected light is the s polarization state; The beam splitter (103) is used to allow light emitted from the polarization beam splitting prism (102) to pass through the objective lens (104) and be incident on the sample to be tested (107); the detector (106) is used to form an image of the light reflected by the sample to be tested (107) after passing through the objective lens (104), the beam splitter (103) and the tube lens (105).

[0058] In a possible implementation, a polarization beam splitter prism (102) is provided with a beam splitting surface inside, and the polarization beam splitter prism (102) comprises a first surface (1021), a second surface (1022), and a third surface (1023); the first surface (1021) and the second surface (1022) are two surfaces arranged opposite to each other; the second surface (1022) and the third surface (1023) are two adjacent surfaces; When the target polarization state is a p polarization state, the first surface (1021) is used to allow the light beam to be incident on the light splitting surface from the first surface (1021), and the second surface (1022) is used to allow the light beam to be emitted to obtain transmitted light; When the target polarization state is the s polarization state, the third surface (1023) is used to allow the light beam to be incident on the beam splitting surface from the third surface (1023), and the second surface (1022) is used to allow the light beam to be emitted to obtain reflected light.

[0059] In a possible implementation, a first lens (108) and a first shutter (109) are arranged on a first optical path between a light source (101) and a first surface (1021) of a polarization beam splitter prism (102), and a second lens (110) and a second shutter (111) are arranged on a second optical path between the light source (101) and a third surface (1023) of the polarization beam splitter prism (102).

[0060] In a possible implementation, an optical fiber (112) and an optical fiber beam splitter (113) are arranged on an optical path between the light source (101) and the polarization beam splitter prism (102); the optical fiber (112) is connected to the light source (101); and the optical fiber beam splitter (113) is used to split a light beam in the optical fiber (112) into a first light beam propagating in a first light path and a second light beam propagating in a second light path; The first light beam is used to be incident on the light splitting surface from the first surface (1021) and to be emitted from the second surface (1022) to obtain transmitted light; The second light beam is used to be incident on the light splitting surface from the third surface (1023) and to be emitted from the second surface (1022) to obtain reflected light.

[0061] In this way, when it is necessary to use light of a certain polarization state to illuminate and detect the sample to be tested (107), this can be achieved by changing the propagation path of the light beam, so that the light beam is transmitted through the polarization beam splitter prism (102) to obtain light of the p-polarization state, and the light beam is reflected to obtain light of the s-polarization state. There is no need to manually switch the linear polarizer, and the light of the desired polarization state can be obtained quickly and accurately, thereby improving the detection accuracy of the sample.

[0062] Each embodiment in this specification is described in a progressive manner, and the same or similar parts between the embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the device embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts can be referred to the partial description of the method embodiment.

[0063] The above is only a preferred implementation of the present application. Although the present application has been disclosed as a preferred embodiment, it is not intended to limit the present application. Any technician familiar with the art can use the above disclosed methods and technical contents to make many possible changes and modifications to the technical solution of the present application without departing from the scope of the technical solution of the present application, or modify it into an equivalent embodiment of equivalent changes. Therefore, any simple modification, equivalent change and modification made to the above embodiments based on the technical essence of the present application without departing from the content of the technical solution of the present application still falls within the scope of protection of the technical solution of the present application.

Claims

1. A sample detection method, characterized in that: include: When a light source (101), a polarization beam splitter (102), a beam splitter (103), an objective lens (104), a tube lens (105), and a detector (106) are arranged in an optical path, a propagation path of a light beam emitted by the light source (101) is determined based on a target polarization state; When the target polarization state is a p polarization state, based on the propagation path, the light beam is transmitted in the polarization beam splitting prism (102) to obtain transmitted light; the polarization state of the transmitted light is the p polarization state, and the transmitted light is used to be reflected by the sample to be measured (107) after passing through the beam splitter (103) and the objective lens (104), and enter the detector (106) through the tube lens (105) to form an image; When the target polarization state is the s polarization state, based on the propagation path, the light beam is reflected in the polarization beam splitting prism (102) to obtain reflected light; the polarization state of the reflected light is the s polarization state, and the reflected light is used to be reflected by the sample to be measured (107) after passing through the beam splitter (103) and the objective lens (104), and enter the detector (106) through the tube lens (105) to form an image.

2. The method according to claim 1, characterized in that A light splitting surface is provided inside the polarization light splitting prism (102), and the polarization light splitting prism (102) comprises a first surface (1021), a second surface (1022) and a third surface (1023); When the target polarization state is a p polarization state, based on the propagation path, the light beam is transmitted in the polarization beam splitting prism (102) to obtain transmitted light, comprising: Based on the propagation path, the light beam is incident from the first surface (1021) to the light splitting surface, and is emitted from the second surface (1022), thereby obtaining the transmitted light; the first surface (1021) and the second surface (1022) are two surfaces arranged opposite to each other; When the target polarization state is an s polarization state, based on the propagation path, the light beam is reflected in the polarization beam splitting prism (102) to obtain reflected light, comprising: Based on the propagation path, the light beam is incident from the third surface (1023) to the beam splitting surface and is emitted from the second surface (1022) to obtain the reflected light; the second surface (1022) and the third surface (1023) are two adjacent surfaces.

3. The method according to claim 2, characterized in that A first lens (108) and a first shutter (109) are arranged on a first optical path between the light source (101) and a first surface (1021) of the polarization beam splitter prism (102), and a second lens (110) and a second shutter (111) are arranged on a second optical path between the light source (101) and a third surface (1023) of the polarization beam splitter prism (102); Based on the propagation path, the light beam is incident from the first surface (1021) to the light splitting surface, and is emitted from the second surface (1022) to obtain the transmitted light, comprising: Based on the propagation path, controlling the first shutter (109) to open and the second shutter (111) to close, so that the light beam is incident on the light splitting surface from the first surface (1021) and emerges from the second surface (1022), thereby obtaining the transmitted light; Based on the propagation path, the light beam is incident on the light splitting surface from the third surface (1023) and emitted from the second surface (1022) to obtain the reflected light, comprising: Based on the propagation path, the second shutter (111) is controlled to open and the first shutter (109) is controlled to close, so that the light beam is incident on the light splitting surface from the third surface (1023) and is emitted from the second surface (1022), thereby obtaining the reflected light.

4. The method according to claim 3, characterized in that The first shutter (109) is located on the light-entering side of the first lens (108), and the second shutter (111) is located on the light-entering side of the second lens (110).

5. The method according to claim 3, characterized in that: An optical fiber (112) and an optical fiber beam splitter (113) are arranged on the optical path between the light source (101) and the polarization beam splitter prism (102); the optical fiber (112) is connected to the light source (101); and the optical fiber beam splitter (113) is used to split a light beam in the optical fiber (112) into a first light beam propagating in the first light path and a second light beam propagating in the second light path; Based on the propagation path, controlling the first shutter (109) to open and the second shutter (111) to close, so that the light beam is incident from the first surface (1021) to the light splitting surface and is emitted from the second surface (1022), thereby obtaining the transmitted light, comprising: Based on the propagation path, controlling the first shutter (109) to open and the second shutter (111) to close, so that the first light beam is incident on the light splitting surface from the first surface (1021) and emerges from the second surface (1022), thereby obtaining the transmitted light; Based on the propagation path, controlling the second shutter (111) to open and the first shutter (109) to close, so that the light beam is incident on the light splitting surface from the third surface (1023) and is emitted from the second surface (1022), thereby obtaining the reflected light, comprising: Based on the propagation path, the second shutter (111) is controlled to open and the first shutter (109) is controlled to close, so that the second light beam is incident on the light splitting surface from the third surface (1023) and is emitted from the second surface (1022), thereby obtaining the reflected light.

6. The method according to any one of claims 1 to 5, characterized in that: A Kohler illumination module (114) is arranged on the optical path between the polarization beam splitting prism (102) and the beam splitter (103).

7. A sample detection device, characterized in that: include: A light source (101), a polarization beam splitter (102), a beam splitter (103), an objective lens (104), a tube lens (105), and a detector (106); The polarization beam splitter prism (102) is used to make the light beam emitted by the light source (101) obtain light with different polarization states under different propagation paths; when the target polarization state is the p polarization state, the polarization beam splitter prism (102) is used to make the light beam transmit in the polarization beam splitter prism (102) to obtain transmitted light; the polarization state of the transmitted light is the p polarization state; when the target polarization state is the s polarization state, the polarization beam splitter prism (102) is used to make the light beam reflect in the polarization beam splitter prism (102) to obtain reflected light; the polarization state of the reflected light is the s polarization state; The beam splitter (103) is used to allow light emitted from the polarization beam splitting prism (102) to pass through the objective lens (104) and be incident on the sample to be tested (107); the detector (106) is used to image the light reflected by the sample to be tested (107) after passing through the objective lens (104), the beam splitter (103) and the tube lens (105).

8. The device according to claim 7, characterized in that A splitting surface is provided inside the polarization beam splitter prism (102), and the polarization beam splitter prism (102) comprises a first surface (1021), a second surface (1022), and a third surface (1023); the first surface (1021) and the second surface (1022) are two surfaces arranged opposite to each other; the second surface (1022) and the third surface (1023) are two adjacent surfaces; When the target polarization state is a p-polarization state, the first surface (1021) is used to make the light beam incident on the light splitting surface from the first surface (1021), and the second surface (1022) is used to make the light beam emerge to obtain the transmitted light; When the target polarization state is the s polarization state, the third surface (1023) is used to make the light beam incident on the beam splitting surface from the third surface (1023), and the second surface (1022) is used to make the light beam emerge to obtain the reflected light.

9. The device according to claim 8, characterized in that A first lens (108) and a first shutter (109) are arranged on a first optical path between the light source (101) and a first surface (1021) of the polarization beam splitter prism (102), and a second lens (110) and a second shutter (111) are arranged on a second optical path between the light source (101) and a third surface (1023) of the polarization beam splitter prism (102).

10. The device according to claim 9, characterized in that An optical fiber (112) and an optical fiber beam splitter (113) are arranged on the optical path between the light source (101) and the polarization beam splitter prism (102); the optical fiber (112) is connected to the light source (101); and the optical fiber beam splitter (113) is used to split a light beam in the optical fiber (112) into a first light beam propagating in the first light path and a second light beam propagating in the second light path; The first light beam is used to be incident on the light splitting surface from the first surface (1021) and to be emitted from the second surface (1022) to obtain the transmitted light; The second light beam is used to be incident on the light splitting surface from the third surface (1023) and to be emitted from the second surface (1022) to obtain the reflected light.

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