Sand blasting method for protecting disc body product

Abstract

The invention relates to the technical field of semiconductor processing, and particularly discloses a sand blasting method for protecting a disc body product, which comprises the following steps: processing a to-be-blasted surface of a to-be-blasted part to a size required by a drawing, then processing a non-blasted surface opposite to the to-be-blasted surface, and reserving a certain processing allowance, then, according to the roughness requirement of the drawing, the to-be-sandblasted surface is subjected to sandblasting treatment, the to-be-sandblasted part obtained after sandblasting is completed is machined again, it is guaranteed that the flatness of the to-be-sandblasted part meets the drawing requirement, the to-be-sandblasted surface obtained after machining again is protected, and the non-sandblasted surface is machined to the size needed by the drawing; and finally, the two to-be-sandblasted side faces of the to-be-sandblasted part are sandblasted, and the sandblasted to-be-sandblasted faces are repaired. The device can adapt to the situation that the to-be-sandblasted surface deforms after sandblasting treatment, so that the flatness of the to-be-sandblasted part meets the drawing requirement, the form and location tolerance of the finished product state of the protective disc body product is effectively ensured, and the use requirement of a user is met.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor processing, and in particular to a sandblasting method for protecting a disk product. Background Art

[0002] At present, in the semiconductor equipment industry, various process components have high dimensional accuracy requirements, and the requirements for processing technology are gradually increasing. Mechanical processing is difficult to ensure dimensional accuracy. In the existing technology, protective disc products are usually sandblasted after being processed into finished products. Since sand particles continuously hit the surface of the product under a certain pressure, this method will cause large deformation of the product. However, the product has reached the finished product size and cannot be re-machined and repaired. Plastic shaping will cause damage to the sandblasted surface. This cycle is repeated, and the product cannot be effectively sandblasted, resulting in unstable product quality. Summary of the invention

[0003] The purpose of the present invention is to provide a sandblasting method for protecting a tray product, so as to solve the problem that the sandblasting method in the prior art causes large deformation of the product and unstable product quality.

[0004] On the one hand, the present invention provides a sandblasting method for protecting a disk body product, and the sandblasting method for protecting a disk body product comprises: S1: processing the to-be-sandblasted surface of the part to be sandblasted to the size required by the drawing, and retaining a certain processing allowance for the non-sandblasted surface of the part to be sandblasted opposite to the to-be-sandblasted surface; S2: sandblasting the to-be-sandblasted surface according to the roughness requirements of the drawing; S3: reprocessing the part to be sandblasted after sandblasting to ensure that the flatness of the part to be sandblasted meets the requirements of the drawing; S4: protecting the reprocessed surface to be sandblasted, and processing the non-sandblasted surface to the size required by the drawing; S5: sandblasting the two to-be-sandblasted sides of the part to be sandblasted, and repairing the to-be-sandblasted surface that has been sandblasted.

[0005] As a preferred technical solution for the sandblasting method for protecting the tray product, retaining a certain processing allowance on the non-sandblasting surface of the to-be-sandblasted part opposite to the to-be-sandblasted surface includes:

[0006] In terms of the thickness of the workpiece to be sandblasted, the machining allowance reserved for the non-sandblasted surface is 0.5 mm to 2 mm.

[0007] As a preferred technical solution for the sandblasting method for protecting the tray product, S1 also includes:

[0008] The flatness of the surface to be sandblasted and the flatness of the surface not to be sandblasted are both processed to 0.1 mm-0.2 mm.

[0009] As a preferred technical solution for the sandblasting method for protecting the tray product, S2 includes:

[0010] According to the roughness requirements of the drawing, the corresponding grit number is selected, and the blasting pressure of the sandblasting treatment is 20psi-60psi.

[0011] As the preferred technical solution for sandblasting to protect the disc body product, according to the roughness requirements of the drawing, the corresponding grit number is selected:

[0012] When the drawing requires a roughness of 6um, the selected grit number is 24 meshes;

[0013] When the drawing requires a roughness of 7um, the selected grit number is 26 meshes;

[0014] When the drawing requires a roughness of 8um, the selected grit size is 28 meshes.

[0015] As a preferred technical solution for the sandblasting method for protecting the tray product, S3 includes:

[0016] The flatness of the surface to be sandblasted and the flatness of the surface without sandblasting are processed to 0.1 mm-0.2 mm by using a hydraulic press.

[0017] As a preferred technical solution for the sandblasting method for protecting the tray product, S3 also includes:

[0018] The workpiece to be sandblasted is wrapped with a non-sticky membrane after the sandblasting is completed.

[0019] As a preferred technical solution for the sandblasting method for protecting the tray product, protecting the surface to be sandblasted after the reprocessing includes:

[0020] Wrap the surface to be blasted with tape.

[0021] As a preferred technical solution for the sandblasting method for protecting the tray product, repairing the sandblasted surface to be sandblasted includes:

[0022] The surface to be sandblasted that has been sandblasted is subjected to low-pressure sandblasting again.

[0023] As a preferred technical solution for the sandblasting method for protecting the tray product, the sandblasting treatment of the surface to be sandblasted after the sandblasting is completed includes:

[0024] The blasting pressure of the low-pressure blasting process is 20psi-30psi.

[0025] The beneficial effects of the present invention are:

[0026] The invention provides a sandblasting method for protecting a disk body product. The sandblasting method for protecting a disk body product comprises: firstly, processing a to-be-sandblasted surface of a to-be-sandblasted part to a size required by a drawing, then processing a non-sandblasted surface relative to the to-be-sandblasted surface, and retaining a certain processing margin, and then sandblasting the to-be-sandblasted surface according to the roughness requirement of the drawing. Since the to-be-sandblasted surface will be deformed after the sandblasting, the to-be-sandblasted part after the sandblasting is processed again to ensure that the flatness of the to-be-sandblasted part meets the requirements of the drawing, and then protecting the reprocessed to-be-sandblasted surface, and processing the non-sandblasted surface to the size required by the drawing, and finally sandblasting the two to-be-sandblasted side surfaces of the to-be-sandblasted part, and repairing the to-be-sandblasted surface that has been sandblasted. The sandblasting method for protecting the disc body product provided by the present invention can adapt to the situation where the surface to be sandblasted is deformed after sandblasting, so that the flatness of the part to be sandblasted meets the requirements of the drawing, effectively ensures the shape and position tolerances of the finished product state of the protective disc body product, meets the user's usage needs, and solves the problem that the sandblasting method in the prior art causes large deformation of the product and unstable product quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 Flow chart of a sandblasting method for protecting a tray product in an embodiment of the present invention;

[0028] Figure 2 Schematic diagram of a sandblasting method for protecting a tray product in an embodiment of the present invention.

[0029] In the figure:

[0030] 1. Parts to be sandblasted;

[0031] 11. Surface to be sandblasted; 12. Surface not to be sandblasted; 13. Side to be sandblasted. DETAILED DESCRIPTION

[0032] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0033] In the description of the present invention, it should be noted that the orientations or positional relationships indicated by the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc. are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions, and the first feature "above", "above" and "above" the second feature include the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. The first feature "below", "below" and "below" the second feature include the first feature being directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0034] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0035] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0036] like Figure 1 to Figure 2 As shown, this embodiment provides a sandblasting method for protecting a tray product, and the sandblasting method for protecting a tray product includes:

[0037] S1: machining the to-be-sandblasted surface 11 of the to-be-sandblasted workpiece 1 to the required size of the drawing, and leaving a certain machining allowance for the non-sandblasted surface 12 of the to-be-sandblasted workpiece 1 opposite to the to-be-sandblasted surface 11;

[0038] S2: According to the roughness requirement of the drawing, the surface to be sandblasted 11 is sandblasted;

[0039] S3: reprocessing the workpiece 1 after the sandblasting is completed to ensure that the flatness of the workpiece 1 meets the requirements of the drawing;

[0040] S4: Protect the surface to be sandblasted 11 after the re-processing, and process the non-sandblasting surface 12 to the size required by the drawing;

[0041] S5: Sandblast the two side surfaces 13 of the part 1 to be sandblasted, and repair the sandblasted surface 11 to be sandblasted.

[0042] First, the sandblasting surface 11 of the part to be sandblasted 1 is processed to the size required by the drawing, and then the non-sandblasting surface 12 opposite to the sandblasting surface 11 is processed, and a certain processing allowance needs to be retained. Then, the sandblasting surface 11 can be sandblasted according to the roughness requirements of the drawing. Since the sandblasting surface 11 will be deformed after the sandblasting, the part to be sandblasted 1 is processed again after the sandblasting is completed to ensure that the flatness of the part to be sandblasted 1 meets the requirements of the drawing, and then the re-processed sandblasting surface 11 is protected, and the non-sandblasting surface 12 is processed to the size required by the drawing, and finally the two sandblasting side surfaces 13 of the part to be sandblasted 1 are sandblasted, and the sandblasted surface 11 is repaired. The sandblasting method for protecting the disc body product provided by the present invention can adapt to the situation where the surface to be sandblasted 11 is deformed after the sandblasting process, so that the flatness of the part to be sandblasted 1 meets the requirements of the drawing, effectively ensures the shape and position tolerances of the finished product state of the protective disc body product, meets the user's usage needs, and solves the problem that the sandblasting method in the prior art causes large deformation of the product and unstable product quality.

[0043] It should be noted that the object to be sandblasted 1 has four interconnected surfaces, the surface to be sandblasted 11 is opposite to the non-sandblasted surface 12, and the two side surfaces to be sandblasted 13 are opposite to each other. The shape of the object to be sandblasted 1 can be processed according to the shape of the drawing.

[0044] Sand blasting: refers to the use of high-speed jetting of fine abrasives (such as micropowders, nano-scale sand) to treat the surface of semiconductor materials in order to achieve a specific surface texture, cleanliness or provide an ideal adhesion surface for subsequent processes.

[0045] Specifically, in this solution, a certain machining allowance is reserved for the non-sandblasted surface 12 of the workpiece 1 to be sandblasted that is opposite to the surface 11 to be sandblasted, including: in terms of the thickness of the workpiece 1 to be sandblasted, the machining allowance reserved for the non-sandblasted surface 12 is 0.5mm-2mm. In this way, when the workpiece 1 to be sandblasted is deformed after sandblasting, the flatness of its surface 11 to be sandblasted and the non-sandblasted surface 12 becomes 0.5-1mm. At this time, the workpiece 1 to be sandblasted can be re-processed by retaining the machining allowance to avoid the situation where the size does not meet the requirements of the drawing after re-processing. Among them, the machining allowance reserved for the non-sandblasted surface 12 can be set according to actual needs, and the machining allowance reserved for the non-sandblasted surface 12 can be selected as 0.5mm, 1mm, 1.5mm or 2mm, etc.

[0046] In this embodiment, S1 also includes: processing the flatness of the surface to be sandblasted 11 and the flatness of the surface without sandblasting 12 to 0.1mm-0.2mm. In this way, before sandblasting, the flatness of the surface to be sandblasted 11 and the flatness of the surface without sandblasting 12 can be ensured to be within a suitable range, thereby improving the product quality of the protective disc product. Among them, the flatness of the surface to be sandblasted 11 and the flatness of the surface without sandblasting 12 can be selected according to the specific requirements of the drawing, and the flatness of the surface to be sandblasted 11 and the flatness of the surface without sandblasting 12 can be selected as 0.1mm, 0.15mm or 0.2mm, etc.

[0047] In this embodiment, S2 includes: according to the roughness requirements of the drawing, the corresponding grit number is selected, and the sandblasting pressure of the sandblasting treatment is 20psi-60psi. In this way, the sandblasting pressure of the sandblasting treatment is limited to the above-mentioned numerical range, so that the roughness requirements of the drawing can be guaranteed, and the sandblasting surface 11 to be sandblasted after sandblasting can be avoided to produce a large deformation. Among them, the sandblasting pressure of the sandblasting treatment can be adjusted according to the specific roughness requirements of the drawing, and the sandblasting pressure of the sandblasting treatment can be 20psi, 30psi, 40psi, 50psi or 60psi.

[0048] Among them, in some embodiments, according to the roughness requirement of the drawing, selecting the corresponding grit number includes: when the drawing requires a roughness of 6um, the selected grit number is 24 meshes; when the drawing requires a roughness of 7um, the selected grit number is 26 meshes; when the drawing requires a roughness of 8um, the selected grit number is 28 meshes. This can meet the roughness requirement of the drawing.

[0049] In this solution, S3 includes: using a hydraulic press to process the flatness of the surface to be sandblasted 11 and the flatness of the non-sandblasted surface 12 to 0.1mm-0.2mm. When the workpiece to be sandblasted 1 is processed again after sandblasting, the flatness of the surface to be sandblasted 11 and the flatness of the non-sandblasted surface 12 are between 0.1mm-0.2mm, thereby satisfying the form and position tolerance of the finished product state and meeting the user's usage requirements. Among them, the flatness values ​​of the surface to be sandblasted 11 and the non-sandblasted surface 12 can be adjusted according to actual needs. The flatness of the surface to be sandblasted 11 and the non-sandblasted surface 12 can be selected as 0.1mm, 0.15mm or 0.2mm, etc.

[0050] Specifically, S3 also includes: using a non-sticky membrane to wrap the workpiece 1 to be sandblasted after the sandblasting is completed. This can prevent the workpiece 1 to be sandblasted from being damaged when it is processed again; and the use of a non-sticky membrane can prevent the sand grains on the sandblasted surface 11 to be sandblasted from falling off, thereby affecting the roughness.

[0051] Optionally, the non-adhesive membrane includes but is not limited to a polyethylene plastic bag or the like.

[0052] In some embodiments, protecting the reprocessed sandblasted surface 11 includes: using an adhesive tape to wrap the sandblasted surface 11. In this way, the sandblasted surface 11 can be protected from being affected when the sandblasted surface 1 is processed again.

[0053] Optionally, the tape includes but is not limited to Teflon tape and the like.

[0054] Specifically, repairing the sandblasted surface 11 to be sandblasted includes: performing low-pressure sandblasting again on the sandblasted surface 11 to be sandblasted.

[0055] The sandblasting process of the sandblasted surface 11 includes: the sandblasting pressure of the low-pressure sandblasting process is 20psi-30psi. The sandblasting pressure is controlled between 20psi-30psi, so that the sandblasted surface 11 will not be deformed, and the sandblasted part 1 is ensured to meet the requirements of the drawing and meet the shape and position tolerance of the finished product state of the protective plate.

[0056] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A sandblasting method for protecting a tray product, characterized in that: include: S1: machining the to-be-sandblasted surface (11) of the to-be-sandblasted part (1) to the size required by the drawing, and leaving a certain machining allowance on the non-sandblasted surface (12) of the to-be-sandblasted part (1) opposite to the to-be-sandblasted surface (11); S2: performing sandblasting on the surface to be sandblasted (11) according to the roughness requirement of the drawing; S3: reprocessing the workpiece (1) after the sandblasting is completed to ensure that the flatness of the workpiece (1) meets the requirements of the drawing; S4: protecting the surface to be sandblasted (11) after the reprocessing, and processing the non-sandblasted surface (12) to the size required by the drawing; S5: sandblasting the two side surfaces (13) to be sandblasted of the part (1) to be sandblasted, and repairing the surface (11) to be sandblasted that has been sandblasted.

2. The sandblasting method for protecting a tray product according to claim 1, characterized in that: The method of retaining a certain machining allowance on the non-sandblasting surface (12) of the workpiece (1) to be sandblasted, which is opposite to the surface (11) to be sandblasted, comprises: In terms of the thickness of the workpiece (1) to be sandblasted, the machining allowance reserved for the non-sandblasted surface (12) is 0.5 mm to 2 mm.

3. The sandblasting method for protecting a tray product according to claim 1, characterized in that: S1 also includes: The flatness of the surface to be sandblasted (11) and the flatness of the non-sandblasted surface (12) are both processed to 0.1 mm-0.2 mm.

4. The sandblasting method for protecting a tray product according to claim 1, characterized in that S2 include: According to the roughness requirements of the drawing, the corresponding grit number is selected, and the blasting pressure of the sandblasting treatment is 20psi-60psi.

5. The sandblasting method for protecting a tray product according to claim 4, characterized in that: According to the roughness requirements of the drawing, select the corresponding grit number including: When the drawing requires a roughness of 6um, the selected grit number is 24 meshes; When the drawing requires a roughness of 7um, the selected grit number is 26 meshes; When the drawing requires a roughness of 8um, the selected grit size is 28 meshes.

6. The sandblasting method for protecting a tray product according to claim 1, characterized in that S3 include: The flatness of the surface to be sandblasted (11) and the flatness of the non-sandblasted surface (12) are processed to 0.1 mm-0.2 mm by using a hydraulic press.

7. The sandblasting method for protecting a tray product according to claim 6, characterized in that: S3 also includes: The workpiece (1) to be sandblasted is wrapped with a non-sticky membrane after the sandblasting is completed.

8. The sandblasting method for protecting a tray product according to claim 1, characterized in that: Protecting the surface to be sandblasted (11) after the reprocessing includes: The surface to be sandblasted (11) is wrapped with adhesive tape.

9. The sandblasting method for protecting a tray product according to claim 1, characterized in that: Repairing the sandblasted surface (11) includes: The surface to be sandblasted (11) that has been sandblasted is subjected to low-pressure sandblasting again.

10. The sandblasting method for protecting a tray product according to claim 9, characterized in that: The sandblasting process of the sandblasted surface (11) includes: The blasting pressure of the low-pressure blasting process is 20psi-30psi.

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