High-protection storage tank for storing semiconductor electronic chemicals

Abstract

The invention is applicable to the technical field of electronic chemical storage, and provides a high-protection storage tank for storing semiconductor electronic chemicals, which comprises a base, a storage tank body, a buffer tank and a water storage tank are fixedly mounted on the base, and an inner tank body is fixedly mounted in the storage tank body through a plurality of connecting frames; an electronic pressure release valve is fixedly installed on the outer wall of the storage tank body, one end of the electronic pressure release valve communicates with the inner tank body through a pipeline, the other end of the electronic pressure release valve communicates with a buffer tank through a pipeline, and a plurality of buffer air bags are arranged in the buffer tank, longitudinally arranged in the buffer tank and connected through folding parts. The buffering air bags are communicated with the electronic pressure release valve through the connecting hose, when the internal pressure of the inner tank body is large, the electronic pressure release valve is opened, gas generated by the inner tank body is conveyed into the multiple buffering air bags, the buffering air bags are supported, the multiple buffering air bags achieve the pressure release purpose, and the safety of the protective storage tank is improved.

Description

Technical Field

[0001] The present invention belongs to the technical field of electronic chemical storage, and in particular relates to a high-protection storage tank for storing semiconductor electronic chemicals. Background Art

[0002] In the current field of electronic chemical storage technology, semiconductors refer to materials with electrical conductivity between conductors and insulators at room temperature. Semiconductors are used in integrated circuits, consumer electronics, communications systems, photovoltaic power generation, lighting, and high-power power conversion. Diodes, for example, are devices made from semiconductors. Their processing requires electronic chemicals as raw materials, also known as electronic chemical materials. This broad term refers to specialized chemicals and chemical materials used in the electronics industry, specifically the various chemicals and materials used in the production and packaging of electronic components, printed circuit boards, and industrial and consumer devices. These chemicals can be categorized by application, including substrates, photoresists, electroplating chemicals, packaging materials, high-purity reagents, specialty gases, solvents, pre-cleaning dopants, solder masks, acids and etchants, specialized electronic adhesives, and auxiliary materials. Due to the toxicity of some electronic chemicals, they must be stored in protective tanks.

[0003] The invention patent with authorization announcement number CN110294220B discloses an anti-expansion storage tank for storing semiconductor super chemicals, including a tank body, which is a hollow cylindrical body. A feed pipe is fixedly connected to the center of the top surface of the tank body, and the feed pipe is connected to the interior of the tank body. A support foot is fixedly installed on the bottom of the tank body. The anti-expansion storage tank for storing semiconductor super chemicals, through the provision of a pressure relief column, can absorb the pressure when the liquid in the tank body expands, thereby avoiding chemical gushing when the tank is opened, and the pressure relief column will protrude from the pressure relief hole as the pressure increases to help the user observe the pressure condition of the liquid in the tank body. The anti-expansion storage tank for storing semiconductor super chemicals, through the provision of a leakage box, can receive the liquid that cannot be decompressed inside the tank body and causes it to seep out of the pressure relief hole, thereby avoiding pollution problems caused by the chemical liquid seeping into the external environment. The user can observe the leakage condition through the glass plate, and can also remove the glass plate to operate the pressure relief column.

[0004] However, the above patents have the following shortcomings:

[0005] 1. The above patent can absorb the pressure through the pressure relief column to avoid the gushing of chemicals when the can is opened. However, the chemicals are prone to produce harmful gases, which are easily leaked from the pressure relief column during pressure relief, causing safety hazards.

[0006] 2. When semiconductor chemicals are stored in the above-mentioned patents and commonly used storage tanks, some chemicals are easily affected by external temperature and easily react when heated after long-term storage. They cannot be cooled in time and are prone to expansion, which reduces the safety of the storage tanks. Summary of the Invention

[0007] The present invention provides a high-protection storage tank for storing semiconductor electronic chemicals, aiming to solve the problems mentioned in the above background that the chemicals are prone to produce harmful gases, are prone to leakage from the pressure relief column when the pressure is released, and some chemicals are easily affected by the external temperature and heated during long-term storage, and are prone to reaction and expansion due to failure to cool down in time, which poses a safety hazard.

[0008] The present invention is achieved by providing a high-protection storage tank for storing semiconductor electronic chemicals, comprising a base;

[0009] A storage tank body, which is fixedly mounted on the base via a support frame;

[0010] The inner tank body is arranged inside the storage tank body, and the outer wall of the inner tank body is fixedly installed with multiple connecting frames.

[0011] One end of each of the plurality of connecting frames is fixedly connected to the outer wall of the inner tank body, and the other end is fixedly connected to the inner wall of the storage tank body;

[0012] The plurality of connecting frames are evenly distributed on the outer walls of both sides of the inner tank body;

[0013] A buffer tank is fixedly mounted on the base via a second support frame, and an electronic pressure relief valve is fixedly mounted on the outer wall of the storage tank body;

[0014] One end of the electronic pressure relief valve is connected to the inner tank body through a pipeline, and the other end is connected to the buffer tank through a pipeline.

[0015] Preferably, a plurality of buffer airbags are provided in the buffer tank, the plurality of buffer airbags are longitudinally arranged in the buffer tank, and the plurality of buffer airbags are connected by folding parts;

[0016] The buffer airbag is connected to the electronic pressure relief valve through a connecting hose. In this solution, the gas generated by the chemical is transported to multiple buffer airbags through the connecting hose, and the buffer airbags store the gas. The gas passes through the multiple buffer airbags in turn, thereby propping up the folded part, and then expanding the multiple buffer airbags, slowing down the gas flow rate, and achieving the purpose of pressure relief.

[0017] Preferably, a fixing frame is detachably installed inside the buffer tank, the fixing frame is arranged below the plurality of buffer airbags, and the fixing frame is filled with an adsorption layer;

[0018] An exhaust valve is installed at the bottom end of the buffer tank; in this solution, the adsorption layer is arranged below the buffer airbag, and the adsorption layer is used to filter and adsorb the gas, thereby reducing toxic substances in the gas and facilitating its discharge.

[0019] Preferably, a feed pipe is installed on the storage tank body, the feed pipe is connected to the inner tank body, and a sealing cover is threadedly connected to the feed pipe;

[0020] A discharge valve is fixedly installed at the lower end of the storage tank body, and the discharge valve is connected to the inner tank body through a pipeline. In this solution, the raw materials are injected into the inner tank body through the feed pipe, and the discharge valve is opened at the same time to facilitate the discharge of chemicals stored in the inner tank body.

[0021] Preferably, a water tank is fixedly mounted on the base, and a water pump is mounted on the water tank;

[0022] An annular water pipe is fixedly installed on the inner wall of the storage tank, and a plurality of nozzles are fixedly installed on the lower surface of the water pipe;

[0023] One end of the water pump is connected to the water tank through a pipeline, and the other end is connected to the water pipe through a solenoid valve;

[0024] A drain valve is installed on the lower surface of the storage tank. In this solution, cooling water is stored in a water tank, and a water pump transports the cooling water to the water pipe, where it is sprayed out by multiple nozzles to cool the inner tank body and prevent safety accidents caused by overheating of chemicals.

[0025] Preferably, a thermometer and a pressure gauge are installed on the storage tank body, the detection end of the thermometer is arranged inside the storage tank body, and the detection end of the pressure gauge is arranged inside the inner tank body; in this solution, the temperature of the storage tank body is detected by the thermometer, which is convenient for timely cooling of the storage tank body, and the pressure gauge detects the pressure inside the inner tank body, which is convenient for timely pressure relief.

[0026] Preferably, the inner wall of the inner tank body is provided with a corrosion-resistant layer, and the inner wall of the storage tank body is provided with an insulation layer, and the insulation layer is filled with insulation material; in this solution, the corrosion-resistant layer improves the corrosion resistance of the inner tank body and extends the service life of the inner tank body. At the same time, the insulation layer uses insulation material to improve the thermal insulation of the storage tank body and reduce the impact of external temperature on chemicals.

[0027] Preferably, a plurality of hydraulic dampers are rotatably mounted on the outer wall of the inner tank body, one end of the hydraulic damper is rotatably connected to the outer wall of the inner tank body, and the other end is rotatably connected to the inner wall of the storage tank body; in this solution, the hydraulic damper is used to reduce the vibration of the inner tank body during transportation, thereby improving safety during transportation.

[0028] Compared with the prior art, the beneficial effects of the present invention are: a high-protection storage tank for storing semiconductor electronic chemicals of the present invention,

[0029] 1. An electronic pressure relief valve is fixedly installed on the outer wall of the storage tank. One end of the electronic pressure relief valve is connected to the inner tank through a pipe, and the other end is connected to the buffer tank through a pipe. Multiple buffer air bags are arranged longitudinally in the buffer tank and connected by folded parts. The buffer air bags are connected to the electronic pressure relief valve through a connecting hose. When the internal pressure of the inner tank is high, the electronic pressure relief valve is opened to transport the gas generated by the inner tank into the multiple buffer air bags, which prop up the buffer air bags. The multiple buffer air bags serve the purpose of pressure relief, thereby improving the safety of the protective storage tank.

[0030] 2. A water tank is fixedly installed on the base, and a water pump is installed on the water tank. A circular water pipe is fixedly installed on the inner wall of the storage tank, and a plurality of nozzles are fixedly installed on the lower surface of the water pipe. One end of the water pump is connected to the water tank through a pipe, and the other end is connected to the water pipe through a solenoid valve. The water pump transports cooling water to the water pipe, which is sprayed out by multiple nozzles to cool the inner tank. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 A schematic diagram of the overall structure of the present invention

[0032] Figure 2 This is a structural diagram of the storage tank of the present invention.

[0033] Figure 3 Schematic diagram of the structure of the inner tank body of the present invention

[0034] Figure 4 For the present invention Figure 2 Enlarged view of point A in the middle

[0035] In the picture:

[0036] 1. Base

[0037] 2. Storage tank; 21. Insulation layer; 22. Feed pipe; 23. Sealing cover; 24. Drain valve; 25. Thermometer; 26. Pressure gauge; 27. Support frame 1;

[0038] 3. Inner tank; 31. Connecting frame; 32. Discharge valve; 33. Electronic pressure relief valve; 34. Corrosion-resistant layer; 35. Hydraulic damper;

[0039] 4. Buffer tank; 41. Connecting hose; 42. Buffer airbag; 421. Folding portion; 43. Fixing frame; 431. Adsorption layer; 44. Exhaust valve; 45. Support frame 2;

[0040] 5. Water tank; 51. Water pump; 511. Solenoid valve; 52. Water pipe; 53. Nozzle. DETAILED DESCRIPTION

[0041] The technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0042] The components of the embodiments of the present invention generally described and shown in the drawings herein may be arranged and designed in a variety of different configurations. Therefore, the following detailed description of the embodiments of the invention provided in the drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the invention.

[0043] Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative work shall fall within the scope of protection of the present invention.

[0044] In the description of the present invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate and simplify the description of the present invention. They are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation, and therefore should not be construed as limitations on the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0045] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0046] See also Figure 1-4 The present invention provides a technical solution: a high-protection storage tank for storing semiconductor electronic chemicals, comprising a base 1, a storage tank body 2, which is fixedly mounted on the base 1 via a support frame 27, an inner tank body 3, which is arranged inside the storage tank body 2, a plurality of connecting frames 31 being fixedly mounted on the outer wall of the inner tank body 3, the plurality of connecting frames 31 being fixedly connected to the outer wall of the inner tank body 3 at one end and the inner wall of the storage tank body 2 at the other end, the plurality of connecting frames 31 being evenly distributed on the outer walls on both sides of the inner tank body 3, a plurality of hydraulic dampers 35 being rotatably mounted on the outer wall of the inner tank body 3, the hydraulic dampers 35 being rotatably connected to the outer wall of the inner tank body 3 at one end and the inner wall of the storage tank body 2 at the other end.

[0047] Among them, the base 1 can be made of cement, which has higher stability. The inner tank body 3 is fixedly connected to the storage tank body 2 through multiple connecting frames 31. When the inner tank body 3 leaks, the storage tank body 2 will take over the chemicals. At the same time, multiple hydraulic dampers 35 are rotated to connect the inner tank body 3. When transporting and installing the storage tank body 2, the hydraulic dampers 35 reduce the vibration of the inner tank body 3.

[0048] A thermometer 25 and a pressure gauge 26 are installed on the storage tank body 2. The detection end of the pressure gauge 26 is arranged inside the inner tank body 3. The buffer tank 4 is fixedly mounted on the base 1 through a support frame 45. An electronic pressure relief valve 33 is fixedly mounted on the outer wall of the storage tank body 2. One end of the electronic pressure relief valve 33 is connected to the inner tank body 3 through a pipe, and the other end is connected to the buffer tank 4 through a pipe. A plurality of buffer air bags 42 are arranged in the buffer tank 4 longitudinally, and the plurality of buffer air bags 42 are connected by a folding portion 421. The buffer air bags 42 are connected to the electronic pressure relief valve 33 through a connecting hose 41.

[0049] Among them, the thermometer 25 and the pressure gauge 26 are both electronic meters. The pressure gauge 26 detects the pressure inside the inner tank body 3. The pressure gauge 26 is electrically connected to a corresponding controller. When the pressure inside the inner tank body 3 exceeds a preset value, an electrical signal is transmitted to the corresponding controller, and the controller opens the electronic pressure relief valve 33. At this time, the gas inside the inner tank body 3 flows into the buffer airbag 42 through the electronic pressure relief valve 33 and the connecting hose 41, thereby propping up the buffer airbag 42 and expanding the folding part 421, thereby slowing down the movement speed of the gas, thereby achieving the purpose of pressure relief.

[0050] A fixing frame 43 is detachably installed inside the buffer tank 4 . The fixing frame 43 is arranged below the plurality of buffer airbags 42 and is filled with an adsorption layer 431 . An exhaust valve 44 is installed at the bottom end of the buffer tank 4 .

[0051] Furthermore, after the decompression gas is discharged from multiple buffer airbags 42, it passes through the adsorption layer 431 inside the fixed frame 43. The adsorption layer 431 can be an activated carbon layer, which uses the adsorption properties of the activated carbon to adsorb impurities in the gas, and then the gas is discharged through the exhaust valve 44.

[0052] A feed pipe 22 is installed on the storage tank body 2, and the feed pipe 22 is connected to the inner tank body 3. A sealing cover 23 is threadedly connected to the feed pipe 22. A discharge valve 32 is fixedly installed at the lower end of the storage tank body 2, and the discharge valve 32 is connected to the inner tank body 3 through a pipe.

[0053] Furthermore, chemicals are poured in through the feed pipe 22, and a sealing ring is provided on the sealing cover 23 to improve the sealing performance of the sealing cover 23. A handle is installed on the sealing cover 23 to facilitate rotating the sealing cover 23, and the discharge valve 32 can be opened to discharge the chemicals inside the inner tank body 3.

[0054] A water tank 5 is fixedly mounted on the base 1, a water pump 51 is mounted on the water tank 5, and a ring-shaped water pipe 52 is fixedly mounted on the inner wall of the storage tank body 2, a plurality of nozzles 53 are fixedly mounted on the lower surface of the water pipe 52, one end of the water pump 51 is connected to the water tank 5 through a pipe, and the other end is connected to the water pipe 52 through a solenoid valve 511, the detection end of the thermometer 25 is arranged inside the storage tank body 2, and a drain valve 24 is mounted on the lower surface of the storage tank body 2.

[0055] Specifically, cooling water is stored inside the water tank 5, and a tank cover is installed on the water tank 5. The tank cover can be opened to inject cooled coolant or cooling water. The thermometer 25 detects the temperature inside the storage tank body 2 and transmits an electrical signal to the corresponding controller, thereby turning on the water pump 51 and the solenoid valve 511. The water pump 51 transports the cooling water to the water pipe 52, which is sprayed out by multiple nozzles 53, thereby cooling the inner tank body 3.

[0056] The inner wall of the inner tank body 3 is provided with a corrosion-resistant layer 34 , and the inner wall of the storage tank body 2 is provided with a heat-insulating layer 21 , which is filled with heat-insulating material.

[0057] It should be noted that the corrosion-resistant layer 34 can be an oxidative corrosion-resistant film to extend the service life of the inner tank body 3, and the insulation material inside the insulation layer 21 can be an aluminum silicate insulation material to improve the insulation properties of the storage tank body 2 and reduce the impact of external temperature on chemicals.

[0058] The working principle and use process of this invention: please refer to Figure 1-4 , chemicals are poured into the feed pipe 22, and the pressure gauge 26 detects the pressure inside the inner tank body 3. The pressure gauge 26 is electrically connected to the corresponding controller. When the pressure inside the inner tank body 3 exceeds the preset value, an electrical signal is transmitted to the corresponding controller, and the controller opens the electronic pressure relief valve 33. At this time, the gas inside the inner tank body 3 flows into the buffer airbag 42 through the electronic pressure relief valve 33 and the connecting hose 41, thereby propping up the buffer airbag 42 and unfolding the folding part 421, thereby slowing down the movement speed of the gas, thereby achieving the purpose of pressure relief. Cooling water is stored inside the water tank 5, and a tank cover is installed on the water tank 5. The tank cover can be opened to inject cooled coolant or cooling water. The thermometer 25 detects the temperature inside the storage tank body 2 and transmits an electrical signal to the corresponding controller, thereby opening the water pump 51 and the solenoid valve 511. The water pump 51 transports the cooling water to the water pipe 52, and is sprayed out by multiple nozzles 53, thereby cooling the inner tank body 3.

[0059] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A high protection storage tank for storing semiconductor electronic chemicals, characterized in that: comprising a base (1); A storage tank (2) fixedly mounted on the base (1) via a support frame (27); An inner tank body (3) is arranged inside the storage tank body (2), and a plurality of connecting frames (31) are fixedly mounted on the outer wall of the inner tank body (3). Each of the plurality of connecting frames (31) has one end fixedly connected to the outer wall of the inner tank body (3) and the other end fixedly connected to the inner wall of the storage tank body (2); The plurality of connecting frames (31) are evenly distributed on the outer walls of both sides of the inner tank body (3); A buffer tank (4) is fixedly mounted on the base (1) via a second support frame (45), and an electronic pressure relief valve (33) is fixedly mounted on the outer wall of the storage tank body (2); One end of the electronic pressure relief valve (33) is connected to the inner tank body (3) through a pipeline, and the other end is connected to the buffer tank (4) through a pipeline.

2. A high protection storage tank for storing semiconductor electronic chemicals as claimed in claim 1, characterized in that: A plurality of buffer airbags (42) are arranged in the buffer tank (4), the plurality of buffer airbags (42) are longitudinally arranged in the buffer tank (4), and the plurality of buffer airbags (42) are connected via folding portions (421); The buffer airbag (42) is connected to the electronic pressure relief valve (33) via a connecting hose (41).

3. A high protection storage tank for storing semiconductor electronic chemicals as claimed in claim 2, characterized in that: A fixing frame (43) is detachably mounted inside the buffer tank (4), the fixing frame (43) is arranged below the plurality of buffer airbags (42), and the fixing frame (43) is filled with an adsorption layer (431); An exhaust valve (44) is installed at the bottom end of the buffer tank (4).

4. A high protection storage tank for storing semiconductor electronic chemicals as claimed in claim 1, characterized in that: A feed pipe (22) is installed on the storage tank body (2), the feed pipe (22) is connected to the inner tank body (3), and a sealing cover (23) is threadedly connected to the feed pipe (22); A discharge valve (32) is fixedly mounted at the lower end of the storage tank body (2), and the discharge valve (32) is connected to the inner tank body (3) through a pipeline.

5. A high protection storage tank for storing semiconductor electronic chemicals as claimed in claim 1, characterized in that: A water storage tank (5) is fixedly mounted on the base (1), and a water pump (51) is mounted on the water storage tank (5); A circular water pipe (52) is fixedly mounted on the inner wall of the storage tank body (2), and a plurality of spray heads (53) are fixedly mounted on the lower surface of the water pipe (52); One end of the water pump (51) is connected to the water storage tank (5) through a pipeline, and the other end is connected to the electromagnetic valve (511) and the pipeline is connected to the water pipe (52); A drainage valve (24) is installed on the lower surface of the storage tank (2).

6. A high protection storage tank for storing semiconductor electronic chemicals as claimed in claim 1, characterized in that: A temperature gauge (25) and a pressure gauge (26) are installed on the storage tank body (2); a detection end of the temperature gauge (25) is arranged inside the storage tank body (2), and a detection end of the pressure gauge (26) is arranged inside the inner tank body (3).

7. A high protection storage tank for storing semiconductor electronic chemicals as claimed in claim 1, characterized in that: The inner wall of the inner tank body (3) is provided with a corrosion-resistant layer (34), and the inner wall of the storage tank body (2) is provided with a heat-insulating layer (21), and the heat-insulating layer (21) is filled with heat-insulating material.

8. A high protection storage tank for storing semiconductor electronic chemicals as claimed in claim 1, characterized in that: A plurality of hydraulic dampers (35) are rotatably mounted on the outer wall of the inner tank body (3), one end of the hydraulic damper (35) being rotatably connected to the outer wall of the inner tank body (3), and the other end being rotatably connected to the inner wall of the storage tank body (2).

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