Particle detection device for dust-free cloth

Abstract

The invention discloses a particle detection device for dust-free cloth, and relates to the technical field of dust-free cloth production, the particle detection device comprises a detection cabinet, the front side of the detection cabinet is hinged with a cabinet door, and the top of the detection cabinet is provided with an air inlet fan. According to the particle detection device for the dust-free cloth, the dust-free cloth is pulled by the dust-free cloth spreading device to be tensioned and spread, external air is guided by the air inlet fan and is gathered and blown to the dust-free cloth, airflow can be distributed more uniformly to increase the particle falling rate, detection dead angles are reduced due to uniform spreading of the dust-free cloth, and the detection efficiency is improved. Furthermore, a cloth vibrator is arranged, dust-free cloth is impacted under the action of airflow, vibration falling of the particles can be assisted, the direct adhesive force between the particles and the dust-free cloth can be overcome, the particles can comprehensively and effectively fall off, then the particles are captured and counted through a particle counting detector, and the detection efficiency is improved. Therefore, the detection sensitivity and the accurate quantification of the cleanliness of the dust-free cloth are ensured.

Description

Technical Field

[0001] The invention relates to the technical field of dust-free cloth production, and in particular to a particle detection device for dust-free cloth. Background Art

[0002] Dust-free cloth is a special wiping material specially designed for cleaning surfaces in high-cleanliness environments. It is usually made of polyester fiber, microfiber and other materials, and has good water absorption, oil absorption and wiping performance. It is mostly used in semiconductor manufacturing, biotechnology laboratories, pharmaceutical industry, optics and precision machining and other places that are extremely sensitive to particulate contamination. In the production process of dust-free cloth, particle detection of dust-free cloth is a key quality control process. Particle detection devices are often used to quantify the number of particles on the surface of dust-free cloth, size distribution and possible contaminant types to ensure that the dust-free cloth meets strict cleanliness standards.

[0003] When detecting particles on a dust-free cloth, air flow is sprayed through the surface of the dust-free cloth. However, the air flow on the surface of the dust-free cloth may be unevenly distributed, which may result in particles in certain areas not being effectively knocked down, leading to low detection results. Summary of the invention

[0004] To achieve the above objectives, the present invention is implemented through the following technical solutions: a particle detection device for a dust-free cloth, including a detection cabinet, the detection cabinet provides an overall installation frame and a protective shell to ensure the stability of the internal structure and avoid external interference from affecting the detection results. The front of the detection cabinet is hinged with a cabinet door, which can keep the internal environment relatively closed when the cabinet door is closed during detection. An air intake fan is installed on the top of the detection cabinet, and the air intake fan introduces external air to form an airflow to provide power for the flow and detection of particles. The air intake fan is used to guide the external air and gather it to blow toward the dust-free cloth. A dust-free cloth spreader is installed on the inner wall of the detection cabinet. , the dust-free cloth spreader is located below the air intake fan, and the dust-free cloth spreader is used to pull the dust-free cloth so that the dust-free cloth is stretched and stretched, thereby ensuring the comprehensiveness and accuracy of the detection and preventing wrinkles from affecting the detection results. A cloth vibrator is installed on the inner surface of the dust-free cloth spreader, and the cloth vibrator is used to impact the dust-free cloth to shake off the particles, and the particles on the dust-free cloth are easier to fall off through vibration, thereby improving the sensitivity and accuracy of the detection. A particle counting detector is arranged below the dust-free cloth spreader, and the particle counting detector is installed at the bottom of the inner cavity of the detection cabinet, and the particle counting detector is used to collect particles on the dust-free cloth for counting detection; Among them, the air intake fan includes an air gathering casing, which allows the airflow to enter subsequent components more concentratedly and stably. The air gathering casing is fixedly installed on the top of the detection cabinet, and a symmetrically arranged fan is fixedly installed on the top of the air gathering casing. The fan is used to guide the flow of external air. A dust-proof screen is detachably installed on the top of the inner wall of the fan to filter out impurities in the external air and prevent them from entering the inside of the device to interfere with detection. An airflow gathering component is installed at the output end of the fan, and the airflow gathering component is installed on the top of the inner cavity of the detection cabinet to gather the airflow so that the airflow is evenly blown toward the dust-free cloth. The airflow gathering component is used to further concentrate the airflow and increase the speed of the airflow.

[0005] Preferably, the airflow gathering member includes an air gathering cone, which is used to gather the airflow in a cone shape to enhance the impact of the airflow. The top of the air gathering cone is fixed to the top of the inner cavity of the detection cabinet, and the output end of the fan extends to the inside of the detection cabinet and is connected to the air gathering cone. An air guide plate is fixedly installed on the top of the inner wall of the air gathering cone, and guide vanes are fixedly installed on the inner wall of the air guide plate. The guide vanes are symmetrically arranged about the center line of the air guide plate, and the guide vanes are evenly distributed on the inner wall of the air guide plate, and the guide vanes are inclined. The air guide plate and the guide vanes are used to guide the flow of air and fine-tune the direction and speed distribution of the airflow to make the airflow cover the surface of the dust-free cloth more evenly.

[0006] Preferably, the dust-free cloth spreader includes a pulling member, which is used to realize the pulling action of the dust-free cloth, and the pulling member is installed on the inner wall of the detection cabinet. A working chamber shell is installed on the outer edge surface of the output end of the pulling member, and the working chamber shell provides a specific space for placing the dust-free cloth. The working chamber shell is fixedly installed on the inner cavity side of the detection cabinet, and the bottom end of the gas gathering cone extends to the inside of the working chamber shell and is fixed to the working chamber shell. A clamping member is installed at the output end of the pulling member, and the clamping member is used to firmly clamp the dust-free cloth to ensure that its position is fixed during the detection process and does not move. A dust collecting hopper is installed on the inner side of the clamping member, and the bottom surface of the dust collecting hopper is in contact with the top of the particle counting detector. The dust collecting hopper is used to collect particles blown off the dust-free cloth.

[0007] Preferably, the pulling member includes a first cylinder, the outer edge surface of the first cylinder is fixed to the inner wall of the detection cabinet, the outer edge surface of the output shaft of the first cylinder is adaptively slidable with the inner wall of the working chamber shell, the end of the output shaft of the first cylinder is fixedly connected with a pulling plate, the first cylinder provides power to drive the pulling plate to move, the pulling plate directly acts on the dust-free cloth to pull and position it, the top of the pulling plate slides with the top of the inner cavity of the working chamber shell, a through hole is opened at the top of the outer edge surface of the pulling plate, and a limit rod is adaptively slidable on the inner wall of the through hole, and one end of the limit rod is fixed to the inner wall of the working chamber shell.

[0008] Preferably, the clamping member includes a fixing plate, the inner surface of the fixing plate is fixed to the outer surface of the pulling plate, a second cylinder is fixedly installed on the inner extension plate of the fixing plate, the fixing plate is used to fix and support the second cylinder and provide a stable installation base, a clamping plate is fixedly installed on the top of the second cylinder, the top of the clamping plate is adapted to the bottom surface of the pulling plate so as to clamp the dust-free cloth, the second cylinder provides power for the clamping plate to realize the clamping action, an upper partition is fixedly installed on the inner side of the clamping plate, the top of the outer edge surface of the dust collecting hopper slides with the inner surface of the upper partition, a lower partition is adaptively slid on the outer surface of the upper partition, and the outer surface of the lower partition is fixed to the side of the inner extension plate of the fixing plate.

[0009] Preferably, the cloth vibrator includes a connecting piece, which is used to connect various components to ensure the integrity of the device. The end of the connecting piece is connected to the inner surface of the pulling plate, and an impact piece is installed at the bottom of the connecting piece. The impact piece generates vibration through impact to assist particles to detach from the dust-free cloth, so that the dust-free cloth is impacted by the airflow to assist particles to fall off. A rebound piece is installed on one side of the impact piece, and the end of the rebound piece away from the impact piece is fixed to the connecting piece. The rebound piece enables the impact piece to return to its original state and prepare for the next action.

[0010] Preferably, the connecting member includes a hollow sleeve, an end of the hollow sleeve is fixed to a pulling plate on one side, a connecting slide is adaptively slid on the inner wall of the hollow sleeve, the hollow sleeve provides a guide space for the sliding of the connecting slide, the end of the connecting slide is fixed to the surface of the pulling plate on the other side, and a fixed baffle is fixedly installed on the outer edge surface of the hollow sleeve.

[0011] Preferably, the impact member includes an articulated seat, which realizes an articulated connection of the components so that the components can rotate flexibly. The top of the articulated seat is fixed to the bottom surface of the hollow sleeve, and the bottom of the articulated seat is hinged with a folding plate, which changes the direction of airflow to withstand the impact of airflow. A sliding groove is provided on the outer edge surface of the folding plate, and an impact roller is fixedly installed on the end of the folding plate away from the articulated seat. One end of the rebound member contacts the side surface of the folding plate close to the fixed baffle to reset the elastic top support folding plate, and the impact roller collides with the dust-free cloth to generate vibration to help the particles fall off.

[0012] Preferably, the rebound member includes a guide sleeve, an end of the guide sleeve is fixed to a side surface of the fixed baffle close to the folding plate, a push rod is adaptively slid on the inner edge surface of the guide sleeve, the guide sleeve ensures the linear movement of the push rod to prevent deviation and shaking, the end of the push rod away from the guide sleeve is fixedly installed with a fixed block, the inner wall of the fixed block is fixedly installed with a sliding block, the outer edge surface of the sliding block is adaptively slid with the inner wall of the sliding groove, the end of the push rod away from the fixed block is fixedly connected with a spring member, the spring member provides elastic restoring force to realize the resetting effect of the push rod and the folding plate, the end of the spring member away from the push rod is fixed to the inner cavity side of the guide sleeve, the end of the guide sleeve close to the fixed block is fixedly connected with a sealing ring, the outer edge surface of the push rod is adaptively slid with the inner wall of the sealing ring.

[0013] Preferably, the particle counting detector includes a particle counter, which is used to count and analyze the detected particles to obtain detection results. The bottom surface of the particle counter is fixed to the bottom surface of the inner cavity of the detection cabinet, and a soft bellows is fixedly installed on the top of the particle counter. The soft bellows connects different components and prevents gas leakage. The top of the soft bellows is fixedly connected to a push plate, and a particle collector is fixedly installed on the top of the push plate. The particle collector collects detection particles for subsequent detection. The top of the particle collector contacts the bottom of the dust hopper to transport the collected particles for detection. A lifting cylinder is fixedly installed on the edge bottom surface of the push plate, and the lifting cylinder provides lifting power. The bottom surface of the lifting cylinder is fixed to the top of the particle counter, and the lifting cylinder is symmetrically arranged about the center line of the push plate.

[0014] The present invention provides a particle detection device for a dust-free cloth, which has the following beneficial effects: 1. The particle detection device for dust-free cloth uses a dust-free cloth spreader to pull the dust-free cloth to make it stretched and stretched, and uses an air intake fan to guide the outside air and gather it to blow toward the dust-free cloth, so that the airflow can be more evenly distributed to increase the particle drop rate, and the uniform spreading of the dust-free cloth reduces the blind spots of detection, further improving the coverage of particle detection. In addition, the setting of the cloth vibrator can be used to impact the dust-free cloth under the action of the airflow, which can assist in the vibration of particles and help overcome the direct adhesion between the particles and the dust-free cloth, so that the particles can fall off comprehensively and effectively, and then the particle counting detector is used to capture and count the particles, thereby ensuring the sensitivity of detection and accurate quantification of the cleanliness of the dust-free cloth.

[0015] 2. The particle detection device for dust-free cloth, through the cooperation of the air gathering housing and the air gathering cone, concentrates the airflow generated by the fan, and guides the direction of the airflow with the cone shape of the air gathering cone, while increasing the impact force of the airflow on the surface of the dust-free cloth, which is helpful for the shedding of particles. In addition, by using the setting of the dust-proof mesh plate, impurities in the outside air can be filtered and intercepted to ensure the cleanliness of the airflow entering the detection space, thereby improving the accuracy of the detection. Furthermore, by using the inclined setting and equidistant distribution of the guide blades, the airflow forms a uniform flow field when passing through the air guide plate, and smoothes the airflow, ensuring that all parts of the dust-free cloth can be effectively impacted by the airflow, reducing blind spots in the detection process, and thereby improving the dust removal efficiency of the airflow impacting the dust-free cloth.

[0016] 3. The particle detection device for the dust-free cloth can stably clamp the dust-free cloth through the cooperation of the second cylinder and the clamping plate and the pulling plate, and use the first cylinder to pull the pulling plate to achieve the pulling and positioning of the dust-free cloth, thereby ensuring that the dust-free cloth is spread evenly to avoid wrinkles or looseness, so as to improve the effect of airflow. In addition, the dust hopper and the upper and lower partitions cooperate to form a collection area to guide the shed particles to move toward the particle counting detector to prevent particles from scattering, thereby ensuring that the shed particles are collected and counted, and improving the integrity and accuracy of the detection.

[0017] 4. The particle detection device for dust-free cloth makes the folding plate swing through the action of airflow, and cooperates with the impact roller to impact the dust-free cloth, and cooperates with the opening and closing of the fan to make the folding plate reset after impact under the action of the rebound member, and then periodically impact the dust-free cloth to assist the separation of particles and enhance the cleaning effect of the airflow on the dust-free cloth. In addition, the cooperation of the guide sleeve and the push rod ensures the stable movement and impact of the impact roller. At the same time, the setting of the spring member can ensure that in the state without airflow impact, the elastic force of the spring member can be used to move the push rod to push the folding plate and the impact roller to reset, thereby improving the applicability and flexibility of the vibrator.

[0018] 5. The particle detection device for the dust-free cloth realizes effective collection of particles through the contact between the particle collector and the dust hopper, and cooperates with the particle counter to directly detect and count the particles to determine the quality of the dust-free cloth. In addition, the lifting cylinder is used to push the push plate, and the flexible connection provided by the soft bellows is used to adjust the position of the particle collector to improve the efficiency and accuracy of particle transportation, reduce the loss of particles during transportation, and ensure the uniform distribution and smooth transportation of particles. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic diagram of the external structure of a particle detection device for a dust-free cloth according to the present invention; Figure 2 It is a schematic diagram of the internal structure of the present invention; Figure 3It is a schematic diagram of the three-dimensional structure of the dust-free cloth spreader and the cloth vibrator of the present invention; Figure 4 It is a schematic diagram of the cross-sectional structure of the dust-free cloth spreader and the cloth vibrator of the present invention; Figure 5 It is a partial structural schematic diagram of the pulling member and the clamping member of the present invention; Figure 6 It is a schematic diagram of the three-dimensional structure of the cloth vibrator of the present invention; Figure 7 It is a schematic diagram of the cross-sectional structure of the cloth vibrator of the present invention; Figure 8 It is a partial structural schematic diagram of the cloth vibrator of the present invention; Fig. 9 It is a schematic diagram of a partial cross-sectional structure of the resilient member of the present invention; Fig.10 It is a schematic diagram of the three-dimensional structure of the airflow gathering member of the present invention; Fig.11 It is a schematic diagram of the three-dimensional structure of the air guide plate and the guide vane of the present invention; Fig.12 It is a schematic diagram of the cross-sectional structure of the air guide plate and the guide vane of the present invention; Fig.13 It is a schematic diagram of the three-dimensional structure of the dust collecting hopper and the particle counting detector of the present invention.

[0020] In the figure: 1. detection cabinet; 2. cabinet door; 3. air intake fan; 31. air collecting housing; 32. fan; 33. dust screen; 34. air flow collecting member; 341. air collecting cone; 342. air guide plate; 343. guide vane; 4. dust-free cloth spreader; 41. pulling member; 411. first cylinder; 412. pulling plate; 413. limit rod; 414. through hole; 42. clamping member; 421. fixing plate; 422. second cylinder; 423. clamping plate; 424. upper partition; 425. lower partition; 43. dust collecting bucket; 44. working Cavity shell; 5, vibrator; 51, connecting piece; 511, hollow sleeve; 512, connecting slide plate; 513, fixed baffle; 52, impact piece; 521, hinged seat; 522, folding plate; 523, sliding groove; 524, impact roller; 53, rebound piece; 531, guide sleeve; 532, push rod; 533, fixed block; 534, spring piece; 535, slider; 536, sealing ring; 6, particle counting detector; 61, particle counter; 62, soft bellows; 63, lifting cylinder; 64, push plate; 65, particle collector. DETAILED DESCRIPTION

[0021] The present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. The embodiments of the present invention are provided for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments are selected and described in order to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific uses.

[0022] The first embodiment, as Figure 1 , Figure 2 , Fig.10 , Fig.11 , Fig.12 As shown, the present invention provides a technical solution: a particle detection device for a dust-free cloth, comprising a detection cabinet 1, a cabinet door 2 is hinged on the front of the detection cabinet 1, an air intake fan 3 is installed on the top of the detection cabinet 1, the air intake fan 3 is used to guide the outside air and gather it to blow toward the dust-free cloth, a dust-free cloth spreader 4 is installed on the inner wall of the detection cabinet 1, the dust-free cloth spreader 4 is located below the air intake fan 3, and the dust-free cloth spreader 4 is used to pull the dust-free cloth so that the dust-free cloth is stretched and spread, a cloth vibrator 5 is installed on the inner side surface of the dust-free cloth spreader 4, the cloth vibrator 5 is used to impact the dust-free cloth to shake off the particles, and a particle counting detector 6 is arranged below the dust-free cloth spreader 4, and the particle counting detector 6 is installed in the inner cavity of the detection cabinet 1. At the bottom, the particle counting detector 6 is used to collect particles on the dust-free cloth for counting detection. The dust-free cloth spreader 4 is used to pull the dust-free cloth to make it stretched and stretched, and the air intake fan 3 is used to guide the outside air and gather and blow it to the dust-free cloth, so that the airflow can be more evenly distributed to increase the particle drop rate, and the uniform spreading of the dust-free cloth reduces the dead angle of detection, further improving the coverage of particle detection. In addition, the setting of the cloth vibrator 5 can be used to hit the dust-free cloth under the action of the airflow, which can assist in the vibration of particles, help overcome the direct adhesion between the particles and the dust-free cloth, so that the particles can be fully and effectively shed, and then the particle counting detector 6 is used to capture and count the particles, thereby ensuring the sensitivity of the detection and the accurate quantification of the cleanliness of the dust-free cloth; Among them, the air intake fan 3 includes an air gathering casing 31, which is fixedly installed on the top of the detection cabinet 1, and a symmetrically arranged fan 32 is fixedly installed on the top of the air gathering casing 31. A dust-proof screen 33 is detachably installed on the top of the inner wall of the fan 32 to filter impurities in the external air. An airflow gathering piece 34 is installed at the output end of the fan 32, and the airflow gathering piece 34 is installed at the top of the inner cavity of the detection cabinet 1 to gather the airflow so that the airflow is evenly blown to the dust-free cloth. The airflow gathering piece 34 includes an air gathering cone 341, and the top of the air gathering cone 341 is fixed to the top of the inner cavity of the detection cabinet 1. The output end of the fan 32 extends to the inside of the detection cabinet 1 and is connected to the air gathering cone 341. An air guide plate 342 is fixedly installed on the top of the inner wall of the air gathering cone 341, and a guide vane 343 is fixedly installed on the inner wall of the air guide plate 342. The guide vane 343 is about the air guide plate The center line of 342 is symmetrically arranged, and the guide blades 343 are evenly spaced on the inner wall of the air guide plate 342, and the guide blades 343 are tilted. Through the cooperation of the air gathering casing 31 and the air gathering cone 341, the airflow generated by the fan 32 is concentrated, and the cone shape of the air gathering cone 341 is cooperated to guide the airflow direction, while increasing the impact force of the airflow on the surface of the dust-free cloth, which is helpful for the shedding of particles. In addition, by utilizing the setting of the dust-proof mesh plate 33, impurities in the outside air can be filtered and intercepted to ensure that the airflow entering the detection space is clean, thereby improving the accuracy of the detection. Furthermore, by utilizing the tilted setting and evenly spaced distribution of the guide blades 343, a uniform flow field is formed when the airflow passes through the air guide plate 342, and the airflow is smoothed to ensure that all parts of the dust-free cloth can be effectively impacted by the airflow, reducing blind spots in the detection process, and thereby improving the dust removal efficiency of the airflow impacting the dust-free cloth.

[0023] During operation, the staff places the dust-free cloth in the detection cabinet 1, pulls the dust-free cloth through the dust-free cloth spreader 4 to make it stretched and stretched, then guides the outside air through the fan 32, and cooperates with the dust-proof screen 33 to filter and intercept impurities in the air, and cooperates with the air gathering casing 31 and the air gathering cone 341 to concentrate the airflow generated by the fan 32, and guide the airflow direction through the cone shape of the air gathering cone 341, so that the airflow impacts the surface of the dust-free cloth, and utilizes the inclined setting and equidistant distribution of the guide blades 343 to form a uniform flow field when the airflow passes through the air guide plate 342, and smooth the airflow to reduce blind spots in the detection process, and then utilizes the vibrator 5 to impact the dust-free cloth under the action of the airflow to assist in the vibration of particles, so that the particles fall off effectively, and then utilizes the particle counting detector 6 to capture and count the particles, so as to quantify the cleanliness of the dust-free cloth.

[0024] The second embodiment is based on the first embodiment. Figures 2 to 5As shown, the dust-free cloth spreader 4 includes a pulling member 41, which is installed on the inner wall of the detection cabinet 1, and a working chamber shell 44 is installed on the outer edge surface of the output end of the pulling member 41, and the working chamber shell 44 is fixedly installed on the inner chamber side of the detection cabinet 1, and the bottom end of the gas collecting cone 341 extends to the inside of the working chamber shell 44 and is fixed to the working chamber shell 44, and a clamping member 42 is installed at the output end of the pulling member 41, and a dust collecting hopper 43 is installed on the inner side of the clamping member 42, and the bottom surface of the dust collecting hopper 43 is in contact with the top of the particle counting detector 6, and the pulling member 41 is installed on the inner wall of the detection cabinet 1. As a key component of the dust-free cloth spreader 4, it is responsible for pulling and positioning the dust-free cloth, and the working chamber shell 44 provides support for the output end of the pulling member 41 to ensure the stability of the pulling action, and the bottom end of the gas collecting cone 341 extends to the inside of the working chamber shell 44 to ensure that the airflow blows smoothly from the gas collecting cone 341 to the dust-free cloth; The pulling member 41 includes a first cylinder 411, the outer edge surface of the first cylinder 411 is fixed to the inner wall of the detection cabinet 1, the outer edge surface of the output shaft of the first cylinder 411 is adapted to slide with the inner wall of the working chamber shell 44, and the end of the output shaft of the first cylinder 411 is fixedly connected with a pulling plate 412, the top of the pulling plate 412 slides with the inner cavity top of the working chamber shell 44, and a through hole 414 is provided at the top of the outer edge surface of the pulling plate 412, and a limiting rod 413 is adaptively slidably provided on the inner wall of the through hole 414, and one end of the limiting rod 413 is fixed to the inner wall of the working chamber shell 44, and the pulling of the pulling plate 412 by the first cylinder 411 is realized to pull the dust-free cloth, thereby ensuring that the dust-free cloth is spread evenly to avoid wrinkles or looseness, so as to improve the effect of airflow; The clamping member 42 includes a fixing plate 421, the inner surface of the fixing plate 421 is fixed to the outer surface of the pulling plate 412, a second cylinder 422 is fixedly installed on the inner extension plate of the fixing plate 421, a clamping plate 423 is fixedly installed on the top of the second cylinder 422, the top of the clamping plate 423 is adapted to the bottom surface of the pulling plate 412 to clamp the dust-free cloth, an upper partition 424 is fixedly installed on the inner side of the clamping plate 423, the top of the outer edge surface of the dust collecting hopper 43 slides with the inner surface of the upper partition 424, and the upper partition 424 A lower partition 425 is adaptively slidably provided on the outer surface, and the outer surface of the lower partition 425 is fixed to the side of the inner extension plate of the fixed plate 421. Through the cooperation of the second cylinder 422 and the clamping plate 423, and the synergistic effect with the pulling plate 412, the dust-free cloth can be stably clamped, and the cooperation of the dust hopper 43 and the upper partition 424 and the lower partition 425 is utilized to form a collection area, guiding the shed particles to move toward the particle counting detector 6 to prevent the particles from scattering, thereby ensuring that the shed particles are collected and counted, thereby improving the integrity and accuracy of the detection.

[0025] During operation, the clamping plate 423 is driven to rise by the extension and retraction of the output shaft of the second cylinder 422, and cooperates with the pulling plate 412 to stably clamp the dust-free cloth, and the pulling plate 412 is pulled by the extension and retraction of the output shaft of the first cylinder 411 to achieve the pulling and spreading of the dust-free cloth, and the dust collecting hopper 43 and the upper partition plate 424 and the lower partition plate 425 form a collecting area to guide the detached particles to move toward the particle counting detector 6 to prevent the particles from scattering.

[0026] The third embodiment is based on the first and second embodiments. Figure 3 , Figure 4 , Figure 6 , Figure 7 , Figure 8 , Fig. 9 , Fig.13 As shown, the cloth vibrator 5 includes a connecting member 51, the end of the connecting member 51 is connected to the inner surface of the pulling plate 412, and an impact member 52 is installed at the bottom of the connecting member 51, so that the dust-free cloth is impacted by the airflow to assist the particles to fall off, and a rebound member 53 is installed on one side of the impact member 52, and the end of the rebound member 53 away from the impact member 52 is fixed to the connecting member 51. When the impact member 52 receives the airflow, the impact member 52 swings and hits the dust-free cloth under the impact of the airflow, and the auxiliary particles fall off; The connecting member 51 includes a hollow sleeve 511, the end of the hollow sleeve 511 is fixed to the pulling plate 412 on one side, a connecting slide 512 is adaptively slid on the inner wall of the hollow sleeve 511, the end of the connecting slide 512 is fixed to the surface of the pulling plate 412 on the other side, and a fixed baffle 513 is fixedly installed on the outer edge surface of the hollow sleeve 511. The arrangement of the hollow sleeve 511 and the connecting slide 512 allows the pulling plate 412 to slide relatively between the hollow sleeve 511 and the connecting slide 512 when pulling. The impact member 52 includes a hinge seat 521, which is hinged. The top of the seat 521 is fixed to the bottom surface of the hollow sleeve 511, and a folding plate 522 is hinged at the bottom of the hinged seat 521. A sliding groove 523 is provided on the outer edge surface of the folding plate 522. A collision roller 524 is fixedly installed on the end of the folding plate 522 away from the hinged seat 521. One end of the resilient member 53 contacts the side surface of the folding plate 522 close to the fixed baffle 513 to elastically support the folding plate 522 to reset, and the folding plate 522 is connected to the hollow sleeve 511 through the hinged seat 521. The bottom of the folding plate 522 is connected to the collision roller 524 by a hinged manner to form a swingable structure. The rebound member 53 includes a guide sleeve 531, the end of the guide sleeve 531 is fixed to the side surface of the fixed baffle 513 close to the folding plate 522, a push rod 532 is adaptively slid on the inner edge surface of the guide sleeve 531, a fixed block 533 is fixedly installed on the end of the push rod 532 away from the guide sleeve 531, a slider 535 is fixedly installed on the inner wall of the fixed block 533, the outer edge surface of the slider 535 is adaptively slid with the inner wall of the sliding groove 523, the end of the push rod 532 away from the fixed block 533 is fixedly connected to a spring member 534, the end of the spring member 534 away from the push rod 532 is fixed to the inner cavity side of the guide sleeve 531, the end of the guide sleeve 531 close to the fixed block 533 is fixedly connected to a blocking ring 536, The outer edge surface of the rod 532 is adapted to slide with the inner wall of the blocking ring 536, and the folding plate 522 is swung by the action of the airflow, and the impact roller 524 is used to impact the dust-free cloth. In addition, in conjunction with the opening and closing of the fan 32, the folding plate 522 can be reset after the impact under the action of the rebound member 53, and then the dust-free cloth is periodically impacted to assist the separation of particles and enhance the cleaning effect of the airflow on the dust-free cloth. In addition, the cooperation of the guide sleeve 531 and the push rod 532 ensures the stable movement and impact of the impact roller 524. At the same time, the setting of the spring member 534 can ensure that in the state without airflow impact, the elastic force of the spring member 534 is used to make the push rod 532 move to push the folding plate 522 and the impact roller 524 to reset, thereby improving the applicability and flexibility of the vibrator 5. The particle counting detector 6 includes a particle counter 61, the bottom surface of the particle counter 61 is fixed to the bottom surface of the inner cavity of the detection cabinet 1, a soft bellows 62 is fixedly installed on the top of the particle counter 61, a push plate 64 is fixedly connected to the top of the soft bellows 62, a particle collector 65 is fixedly installed on the top of the push plate 64, the top of the particle collector 65 is in contact with the bottom of the dust hopper 43, so that the collected particles can be transported and detected, and a lifting cylinder 63 is fixedly installed on the bottom surface of the edge of the push plate 64, and the bottom surface of the lifting cylinder 63 is fixed to the top of the particle counter 61. The lifting cylinder 63 is fixed and symmetrically arranged about the center line of the push plate 64. The effective collection of particles is achieved through the contact between the particle collector 65 and the dust hopper 43. The particle counter 61 is used to directly detect and count the particles to determine the quality of the dust-free cloth. In addition, the lifting cylinder 63 is used to push the push plate 64. The flexible connection provided by the soft bellows 62 can adjust the position of the particle collector 65 to improve the efficiency and accuracy of particle transportation, reduce the loss of particles during transportation, and ensure the uniform distribution and smooth transportation of particles.

[0027] During operation, the folding plate 522 is swung by the action of airflow, and the impact roller 524 is used to impact the dust-free cloth. The opening and closing of the fan 32 is used to make the folding plate 522 reset after impact under the action of the rebound member 53, and periodically impact the dust-free cloth to assist the separation of particles. The elastic force of the spring member 534 is used to move the push rod 532 to push the folding plate 522 and the impact roller 524 to reset in the absence of airflow impact. The particles are effectively collected through the contact between the particle collector 65 and the dust hopper 43. The particle counter 61 is used to directly detect and count the particles. The lifting cylinder 63 is used to push the push plate 64 to cooperate with the flexible connection provided by the soft bellows 62 to adjust the position of the particle collector 65 to reduce the loss of particles during transportation.

[0028] The working principle of the particle detection device for dust-free cloth is described in detail below.

[0029] During use, the staff places the dust-free cloth in the detection cabinet 1, and drives the clamping plate 423 to rise through the extension and retraction of the output shaft of the second cylinder 422, and cooperates with the pulling plate 412 to stably clamp the dust-free cloth, and uses the extension and retraction of the output shaft of the first cylinder 411 to pull the pulling plate 412 to achieve the pulling and spreading of the dust-free cloth, and uses the dust collecting hopper 43 and the upper partition plate 424 and the lower partition plate 425 to form a collection area to guide the detached particles to move to the particle counting detector 6, and then guides the outside air through the fan 32, and at the same time cooperates with the dust isolation mesh plate 33 to filter and intercept impurities in the air, and uses the air collecting housing 31 and the air collecting cone 341 to concentrate the airflow generated by the fan 32, and guide the airflow direction through the cone shape of the air collecting cone 341, so that the airflow impacts the surface of the dust-free cloth, and uses the inclined setting and equal spacing distribution of the guide blades 343 to make the airflow pass through the air guide plate When the dust-free cloth is cleaned, the dust-free cloth is cleaned and the dust-free cloth is cleaned. ...

[0030] Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field and related fields without creative work should fall within the scope of protection of the present invention. The structures, devices and operating methods not specifically described and explained in the present invention are implemented according to the conventional means in the field unless otherwise specified and limited.

Claims

1. A particle detection device for a dust-free cloth, characterized in that: The detection cabinet (1) comprises a detection cabinet (1), the front of which is hingedly provided with a cabinet door (2), the top of which is provided with an air intake fan (3), the air intake fan (3) being used to guide external air and gather and blow it toward a dust-free cloth, the inner wall of which is provided with a dust-free cloth spreader (4), the dust-free cloth spreader (4) being located below the air intake fan (3), and the dust-free cloth spreader (4) being used to pull the dust-free cloth so that the dust-free cloth is stretched and spread, the inner surface of which is provided with a cloth vibrator (5), the cloth vibrator (5) being used to impact the dust-free cloth so that particles are shaken off, and a particle counting detector (6) being provided below the dust-free cloth spreader (4), the particle counting detector (6) being installed at the bottom of the inner cavity of the detection cabinet (1), and the particle counting detector (6) being used to collect particles on the dust-free cloth for counting detection; The air intake fan (3) comprises an air gathering casing (31), the air gathering casing (31) is fixedly mounted on the top of the detection cabinet (1), a symmetrically arranged fan (32) is fixedly mounted on the top of the air gathering casing (31), a dust-proof screen (33) is detachably mounted on the top of the inner wall of the fan (32) to filter impurities in the external air, an airflow gathering member (34) is mounted on the output end of the fan (32), and the airflow gathering member (34) is mounted on the top of the inner cavity of the detection cabinet (1) to gather the airflow so that the airflow is evenly blown toward the dust-free cloth.

2. A particle detection device for a dust-free cloth according to claim 1, characterized in that: The airflow gathering member (34) comprises an air gathering cone (341), the top of the air gathering cone (341) is fixed to the top of the inner cavity of the detection cabinet (1), the output end of the fan (32) extends into the interior of the detection cabinet (1) and is connected to the air gathering cone (341), an air guide plate (342) is fixedly mounted on the top of the inner wall of the air gathering cone (341), a guide vane (343) is fixedly mounted on the inner wall of the air guide plate (342), the guide vane (343) is symmetrically arranged about the center line of the air guide plate (342), the guide vanes (343) are evenly spaced and distributed on the inner wall of the air guide plate (342), and the guide vanes (343) are inclined.

3. A particle detection device for a dust-free cloth according to claim 2, characterized in that: The dust-free cloth spreader (4) comprises a pulling member (41), the pulling member (41) being mounted on the inner wall of the detection cabinet (1), a working chamber shell (44) being mounted on the outer edge surface of the output end of the pulling member (41), the working chamber shell (44) being fixedly mounted on the inner chamber side of the detection cabinet (1), and the bottom end of the gas collecting cone (341) extending into the inside of the working chamber shell (44) and being fixed to the working chamber shell (44), a clamping member (42) being mounted on the output end of the pulling member (41), a dust collecting hopper (43) being mounted on the inner side of the clamping member (42), and the bottom surface of the dust collecting hopper (43) being in contact with the top of the particle counting detector (6).

4. The particle detection device for a dust-free cloth according to claim 3, characterized in that: The pulling member (41) comprises a first cylinder (411), the outer edge surface of the first cylinder (411) is fixed to the inner wall of the detection cabinet (1), the outer edge surface of the output shaft of the first cylinder (411) is adaptively slidable with the inner wall of the working chamber shell (44), the end of the output shaft of the first cylinder (411) is fixedly connected to a pulling plate (412), the top of the pulling plate (412) slides with the top of the inner cavity of the working chamber shell (44), a through hole (414) is provided at the top of the outer edge surface of the pulling plate (412), and a limiting rod (413) is adaptively slidably provided on the inner wall of the through hole (414), and one end of the limiting rod (413) is fixed to the inner wall of the working chamber shell (44).

5. The particle detection device for a dust-free cloth according to claim 4, characterized in that: The clamping member (42) includes a fixing plate (421), the inner surface of the fixing plate (421) is fixed to the outer surface of the pulling plate (412), a second cylinder (422) is fixedly installed on the inner extension plate of the fixing plate (421), a clamping plate (423) is fixedly installed on the top of the second cylinder (422), the top of the clamping plate (423) is adapted to the bottom surface of the pulling plate (412) so as to clamp the dust-free cloth, an upper partition (424) is fixedly installed on the inner side of the clamping plate (423), the top of the outer edge surface of the dust collecting hopper (43) slides with the inner surface of the upper partition (424), a lower partition (425) is adaptively slid on the outer surface of the upper partition (424), and the outer surface of the lower partition (425) is fixed to the side surface of the inner extension plate of the fixing plate (421).

6. A particle detection device for a dust-free cloth according to claim 4, characterized in that: The cloth vibrator (5) comprises a connecting piece (51), the end of which is connected to the inner surface of the pulling plate (412), an impact piece (52) is installed at the bottom of the connecting piece (51) so that the dust-free cloth is impacted by the airflow to help the auxiliary particles fall off, and a rebound piece (53) is installed on one side of the impact piece (52), and the end of the rebound piece (53) away from the impact piece (52) is fixed to the connecting piece (51).

7. The particle detection device for a dust-free cloth according to claim 6, characterized in that: The connecting member (51) includes a hollow sleeve (511), an end of the hollow sleeve (511) is fixed to a pulling plate (412) on one side, a connecting slide plate (512) is adaptively slid on the inner wall of the hollow sleeve (511), an end of the connecting slide plate (512) is fixed to the surface of the pulling plate (412) on the other side, and a fixed baffle (513) is fixedly installed on the outer edge surface of the hollow sleeve (511).

8. The particle detection device for a dust-free cloth according to claim 7, characterized in that: The impact member (52) includes a hinged seat (521), the top of the hinged seat (521) is fixed to the bottom surface of the hollow sleeve (511), the bottom of the hinged seat (521) is hinged with a folding plate (522), the outer edge surface of the folding plate (522) is provided with a sliding groove (523), and an impact roller (524) is fixedly installed at the end of the folding plate (522) away from the hinged seat (521), and one end of the rebound member (53) contacts with a side surface of the folding plate (522) close to the fixed baffle (513) to reset the elastic supporting folding plate (522).

9. A particle detection device for a dust-free cloth according to claim 8, characterized in that: The resilient member (53) comprises a guide sleeve (531), an end of the guide sleeve (531) being fixed to a surface of a side of the fixed baffle (513) close to the folding plate (522), a push rod (532) being adaptively slidably disposed on the inner edge surface of the guide sleeve (531), a fixed block (533) being fixedly mounted on the end of the push rod (532) away from the guide sleeve (531), a sliding block (535) being fixedly mounted on the inner wall of the fixing block (533), and the sliding block (535) being The outer edge surface is adapted to slide with the inner wall of the sliding groove (523); the end of the push rod (532) away from the fixed block (533) is fixedly connected to a spring member (534); the end of the spring member (534) away from the push rod (532) is fixed to the inner cavity side of the guide sleeve (531); the end of the guide sleeve (531) close to the fixed block (533) is fixedly connected to a blocking ring (536); the outer edge surface of the push rod (532) is adapted to slide with the inner wall of the blocking ring (536).

10. The particle detection device for a dust-free cloth according to claim 3, characterized in that: The particle counting detector (6) comprises a particle counter (61), the bottom surface of the particle counter (61) is fixed to the bottom surface of the inner cavity of the detection cabinet (1), a soft bellows (62) is fixedly installed on the top of the particle counter (61), the top of the soft bellows (62) is fixedly connected to a push plate (64), a particle collector (65) is fixedly installed on the top of the push plate (64), the top of the particle collector (65) is in contact with the bottom of the dust hopper (43) so that the collected particles can be transported and detected, and a lifting cylinder (63) is fixedly installed on the edge bottom surface of the push plate (64), the bottom surface of the lifting cylinder (63) is fixed to the top of the particle counter (61), and the lifting cylinder (63) is symmetrically arranged about the center line of the push plate (64).

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