Water-vapor separation pressure control device

Abstract

The invention relates to the technical field of semiconductor manufacturing, in particular to a water vapor separation pressure control device which comprises a first condenser and a second condenser, the inlet connecting end of the first condenser is used for being connected with a process chamber, and a pressure control module is arranged between the first condenser and the second condenser. The first condenser is connected with a collecting tank through a vertical pipe, the side wall of the vertical pipe is connected with a gas outlet main pipe, the gas outlet main pipe is used for being connected with a pressure control module, the pressure control module is connected with a controller, the controller is used for adjusting the flow speed of the pressure control module, and the controller is connected with a pressure detection pipe. The pressure detection pipe is connected to the gas outlet main pipe and used for detecting pressure on the gas outlet main pipe; and an outlet of the second condenser is connected with a pressure stabilizing valve. The pressure control module has the effect of reducing the condensation amount of water vapor in the pressure control module.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor manufacturing, and in particular to a water vapor separation pressure control device. Background Art

[0002] The wet oxygen oxidation process is used in the semiconductor processing process to form insulating silicon dioxide on the surface of the silicon wafer. The wet oxygen oxidation process uses water vapor to react with the surface of the silicon wafer in a high-temperature and high-pressure process chamber. The silicon dioxide formed by the wet oxygen oxidation process is fast and widely used. The silicon dioxide film is also relatively dense and uniform, and has good insulation properties. Of course, the formation of the silicon dioxide film is closely related to the pressure stability of the process chamber, and the pressure of the process chamber needs to be kept stable.

[0003] At present, the pressure control module is often used to control the pressure of the exhaust gas discharged from the process chamber during the wet oxygen oxidation process, so as to regulate the pressure in the process chamber. The pressure control module is a key component to achieve pressure stability in the process chamber. However, with the development of process technology, the wet oxygen oxidation process time is getting longer and longer, and the hydrogen-oxygen ratio of the wet oxygen oxidation process is getting larger and larger, which means that more and more high-temperature process exhaust gas is discharged from the process chamber per unit time. Part of the water vapor is retained in the pressure control module to form condensed liquid and adheres to the piston of the pressure control module to hinder the movement of the piston, reducing the reaction sensitivity of the pressure control module, slowing down the response of the pressure control module, and reducing the pressure control accuracy, resulting in unstable pressure control, causing the pressure in the process chamber to fluctuate greatly in the later stage of the wet oxygen oxidation process. Summary of the invention

[0004] In order to reduce the amount of water vapor condensation in the pressure control module, the present application provides a water vapor separation pressure control device.

[0005] The present application provides a water vapor separation pressure control device, which adopts the following technical solution: A water vapor separation pressure control device comprises a first condenser and a second condenser, wherein the inlet connection end of the first condenser is used to connect to a process chamber, a pressure control module is arranged between the first condenser and the second condenser, the first condenser is connected to a collection tank through a vertical pipe, a gas outlet main pipe is connected to the side wall of the vertical pipe, the gas outlet main pipe is used to connect to the pressure control module, the pressure control module is connected to a controller, the controller is used to adjust the flow rate of the pressure control module, the controller is connected to a pressure detection tube, the pressure detection tube is connected to the gas outlet main pipe for detecting the pressure on the gas outlet main pipe; the outlet of the second condenser is connected to a pressure regulating valve.

[0006] By adopting the above technical solution, when in use, the first condenser is used to connect the process chamber. Since the first condenser is in direct contact with the process chamber, most of the water vapor is first cooled and condensed in the first condenser, and then discharged into the collection tank, and then enters the gas outlet main pipe from the side wall of the vertical pipe. The airflow is controlled through the pressure control module through the gas outlet main pipe, and the pressure detection tube connected to the controller is on the gas outlet main pipe, so that the pressure change on the gas outlet main pipe is reflected to the controller, and then the flow rate in the gas outlet main pipe is controlled by the controller, so as to control the pressure at the front end of the first condenser. At the same time, the second condenser further condenses the uncondensed water vapor again. Since the first condenser can reduce the water vapor in the airflow, the amount of water vapor condensation in the pressure control module can be reduced.

[0007] Preferably, an air pipe interface is provided at one end of the air outlet main pipe close to the vertical pipe, and the air pipe interface is used to connect an air replenishing device that replenishes pressurized gas to the air outlet main pipe.

[0008] By adopting the above technical solution, the trachea interface is connected to the gas outlet main pipe. When the pressure of the gas outlet main pipe suddenly fluctuates greatly, and the pressure control module still cannot reach the required pressure in the gas outlet main pipe even if the gas flow is shut down, air can be supplemented from the trachea interface to control the stability of the pressure.

[0009] Preferably, the pressure control module comprises a regulating valve, the regulating valve is used to be connected to the air outlet main pipe, the regulating valve is connected to a stepper motor for driving the regulating valve to adjust the flow rate, and the controller is used to control the rotation angle of the stepper motor.

[0010] By adopting the above technical solution, the regulating valve is connected to the air outlet main pipe, the regulating valve is connected to a stepper motor, and the controller adjusts the rotation angle of the stepper motor to accurately adjust the flow rate of the regulating valve to control the pressure in the air outlet main pipe.

[0011] Preferably, the pressure control module also includes a straight pipe, which is vertically arranged and connected to the air outlet main pipe. The straight pipe is connected to a shut-off valve. The regulating valve is connected to the straight pipe by bypassing the shut-off valve through an upper bend pipe and a lower bend pipe. The shut-off valve is opened or closed pneumatically, and the upper bend pipe is connected to one end of the straight pipe and is arranged to tilt downward.

[0012] By adopting the above technical solution, a shut-off valve is arranged on the straight pipe, and an upper bend pipe is arranged between the regulating valve and the straight pipe. When the gas in the upper bend pipe condenses after passing through the regulating valve, it can flow from the upper bend pipe into the straight pipe, reducing the situation of gathering in the regulating valve.

[0013] Preferably, the first condenser comprises a double-walled tube, the interior of the double-walled tube is ventilated, a water channel is formed between the two side walls of the double-walled tube, and a water inlet joint and a water outlet joint for introducing cooling medium into the water channel are connected to the side walls of the double-walled tube.

[0014] By adopting the above technical solution, a water channel is formed between the two side walls of the double-walled tube, so that when the cooling medium is passed into the water channel, the gas in the double-walled tube can be cooled, thereby achieving the effect of condensation and separation of water vapor after the temperature drops.

[0015] Preferably, a plurality of partitions are arranged in the double-walled tube, the partitions are arranged perpendicular to the axis of the double-walled tube, and the plurality of partitions are arranged at intervals along the axis of the double-walled tube, and a gap for airflow to pass through is left between the edge of the partition and the inner wall of the double-walled tube.

[0016] By adopting the above technical solution, multiple partitions are arranged in the double-walled tube. When the gas passes through the partition, the gas passes through the edge of the partition, so that the gas is moved close to the inner wall of the double-walled tube, so that heat is transferred between the gas and the inner wall of the double-walled tube, and the temperature of the water vapor is easier to reduce.

[0017] Preferably, a movable plate is provided inside the double-walled tube, and the movable plate is slidably connected inside the double-walled tube along the axis of the double-walled tube. A partition is provided below the movable plate, and the edge of the movable plate is sealed with the inner wall of the double-walled tube. A plurality of through holes are opened in the middle of the movable plate. The movable plate is connected to a screw for driving the movable plate to move along the axis of the double-walled tube, and the distance between the movable plate and the partition is adjusted by the screw.

[0018] By adopting the above technical solution, a movable plate is arranged inside the double-walled cylinder. When the distance between the movable plate and the partition is adjusted, the movable plate can reduce the flow rate of the gas in the double-walled cylinder and adjust the pressure of the inlet connection end of the first condenser, thereby assisting in controlling the pressure of the process chamber.

[0019] Preferably, there are multiple movable plates, and each movable plate is arranged corresponding to a partition plate. The movable plates are all threadedly connected to the screw rod, and one end of the screw rod is connected to a driving motor, which is used to drive the screw rod to rotate. The movable plates are arranged corresponding to the multiple partition plates at the lower part of the double-walled tube.

[0020] By adopting the above technical solution, when the driving motor drives the screw to rotate, the screw is threadedly connected to multiple movable plates, so that the positions of the multiple movable plates can be adjusted, and the heat transfer between the movable plates and the inner wall of the double-walled tube is faster, so that the movable plates can further cool the water vapor in the lower part of the double-walled tube and reduce the amount of water vapor flowing out.

[0021] Preferably, the second condenser includes an outer cylinder, an inner cylinder and an intermediate tube, wherein the inner cylinder is inside the outer cylinder, the intermediate tube penetrates the outer cylinder and the inner cylinder from the bottom of the outer cylinder, and is connected with the interior of the inner cylinder, a plurality of through holes are provided on the bottom wall of the inner cylinder, a water outlet is provided at the bottom of the outer cylinder, and the end of the intermediate tube exposed outside the outer cylinder is used for connecting the pressure control module.

[0022] By adopting the above technical solution, the inner cylinder is arranged inside the outer cylinder and supported by the middle tube. At the same time, the water vapor entering the inner cylinder can also be collected on the side wall during the process of passing through the through hole, and then fall into the outer cylinder and discharged from the water outlet.

[0023] Preferably, a hand valve is connected behind the pressure stabilizing valve, the hand valve is in a normally closed state, a bypass pipe is arranged in parallel with the hand valve, and both ends of the bypass pipe are respectively connected to the front and rear positions of the hand valve.

[0024] By adopting the above technical solution, a hand valve is connected behind the pressure regulating valve, the hand valve is in a normally closed state, and the gas flows out from the bypass pipe. When the bypass pipe is blocked, the staff can open the hand valve to buffer the abnormality of the bypass pipe in time.

[0025] In summary, the present application includes at least one of the following beneficial technical effects: 1. The airflow is controlled through the pressure control module through the outlet main pipe, so as to control the pressure at the front end of the first condenser. Since the first condenser can reduce the water vapor in the airflow, the amount of water vapor condensed in the pressure control module can be reduced; 2. When the pressure in the outlet pipe suddenly fluctuates greatly and the pressure control module cannot reach the required pressure in the outlet pipe even if the gas flow is shut down, the pressure can be stabilized by replenishing gas from the air pipe interface; 3. An upper bend pipe is arranged between the regulating valve and the straight pipe. When the gas in the upper bend pipe condenses after passing through the regulating valve, it can flow from the upper bend pipe into the straight pipe, reducing the situation of gathering in the regulating valve. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram of the overall structure of the first embodiment of the present application; Figure 2 is a schematic diagram of the structure of the pressure control module in the first embodiment of the present application; Figure 3 is a schematic structural diagram of the second condenser in Example 1 of the present application; Figure 4 is a schematic structural diagram of the first condenser in Example 1 of the present application; Figure 5 It is a structural schematic diagram of the first condenser in Example 2 of the present application.

[0027] Explanation of reference numerals: 1. first condenser; 11. double-walled cylinder; 12. water channel; 13. water inlet joint; 14. water outlet joint; 15. partition; 16. fixed rod; 17. movable plate; 171. through hole; 18. screw rod; 19. drive motor; 21. inlet connection end; 22. outlet connection end; 23. vertical pipe; 24. collection tank; 25. water outlet pipe; 26. valve; 27. drain pipe; 3. outlet Gas main pipe; 31. Gas pipe interface; 4. Pressure control module; 41. Straight pipe; 42. Upper bend pipe; 43. Lower bend pipe; 44. Regulating valve; 45. Shut-off valve; 46. Stepper motor; 5. Second condenser; 51. Outer tube; 52. Inner tube; 53. Intermediate tube; 54. Water outlet; 55. Check valve; 56. Through hole; 6. Pressure stabilizing valve; 7. Controller; 71. Pressure detection tube; 8. Hand valve; 82. Bypass pipe. DETAILED DESCRIPTION

[0028] The following is combined with Figure 1-5 This application is described in further detail.

[0029] The embodiment of the present application discloses a water vapor separation pressure control device.

[0030] Embodiment 1: This embodiment discloses a water vapor separation pressure control device, referring to Figure 1 , including a first condenser 1, which is vertically arranged, and an inlet connection end 21 is arranged at the upper end of the first condenser 1, and the inlet connection end 21 of the first condenser 1 is used to connect to the process chamber, and the water vapor flowing out of the process chamber will first enter the first condenser 1 through the inlet connection end 21, and the first condenser 1 is connected with a gas outlet main pipe 3, and the gas inside the gas outlet main pipe 3 first passes through the first condenser 1 to condense the water vapor to reduce the water content in the gas, and then a pressure control module 4 is connected to the gas outlet main pipe 3, and the pressure control module 4 is used to adjust the pressure after the first condenser 1, thereby adjusting the pressure of the inlet connection end 21 of the first condenser 1, and a second condenser 5 is connected after the pressure control module 4, and the second condenser 5 condenses the water vapor flowing through again to avoid damage to the subsequent pressure equipment connected.

[0031] The lower part of the first condenser 1 is provided with an outlet connection end 22, which is at the lowest position of the first condenser 1, and a vertical pipe 23 is installed on the outlet connection end 22, and the lower end of the vertical pipe 23 is connected to a collection tank 24, and the collection tank 24 is connected to a water outlet pipe 25, and the water outlet pipe 25 is used to discharge the water collected in the collection tank 24, and at least one valve 26 for closing the water outlet pipe 25 is connected to the water outlet pipe 25, so that the vertical pipe 23 is in a sealed and pressure-bearing state. The end of the gas outlet main pipe 3 away from the pressure control module 4 is connected to the side wall of the vertical pipe 23, so that the gas flowing out of the vertical pipe 23 flows out through the gas outlet main pipe 3, and the liquid flowing out of the vertical pipe 23 flows directly into the collection tank 24 by gravity.

[0032] An air pipe interface 31 is provided at one end of the gas outlet main pipe 3 close to the vertical pipe 23. The air pipe interface 31 is used to connect the air supply equipment. The air supply equipment supplies gas to the gas outlet main pipe 3 through the air pipe connection port, thereby increasing the pressure in the first condenser 1, which is used to adjust the pressure in the process chamber. When the air is supplied through the air pipe interface 31, the pressure control module 4 should be in a closed state. A drain pipe 27 is also provided at the bottom of the second condenser 5. The upper end of the drain pipe 27 connected to the second condenser 5 is the highest point of the drain pipe 27. The end of the drain pipe 27 away from the second condenser 5 is connected to the vertical pipe 23 and is located below the connection position of the gas outlet main pipe 3, so that the liquid discharged from the drain pipe 27 is also collected in the collection tank 24 through the vertical pipe 23.

[0033] A pressure stabilizing valve 6 is also provided above the second condenser 5, and the pressure stabilizing valve 6 is connected to the outlet of the second condenser 5, so that the pressure stabilizing valve 6 is used to control the pressure in the entire pressure control device, and is used to protect the safety of the entire pressure control device, and then a hand valve 8 is connected behind the pressure stabilizing valve 6, and the hand valve 8 is in a normally closed state, and a bypass pipe 82 is provided in parallel with the hand valve 8, and the two ends of the bypass pipe 82 are respectively connected to the front and rear positions of the hand valve 8, and the bypass pipe 82 is used to flow through the gas, and is in a normally open state. When a special situation occurs, such as the pressure in the gas outlet main pipe 3 increases, or the bypass pipe 82 needs to be replaced, the staff can open the hand valve 8 to extract the gas from the position of the hand valve 8.

[0034] A controller 7 is connected to the air outlet main pipe 3, and the controller 7 is connected to a pressure detection tube 71. One end of the pressure detection tube 71 is connected to the side wall of the air outlet main pipe 3, and the other end is connected to the controller 7, so that the pressure on the air outlet main pipe 3 can be detected by the controller 7, and the pressure detection tube 71 is located at the position where the pressure control module 4 is connected to the air outlet main pipe 3, so that the pressure detection of the air outlet main pipe 3 by the controller 7 is located in front of the pressure control module 4, and the controller 7 is used to control the pressure control module 4 so that the pressure control module 4 adjusts the pressure in the air outlet main pipe 3. When the pressure in the air outlet main pipe 3 is low, the controller 7 reduces the air flow speed of the pressure control module 4 until it is closed, and then replenishes air from the position of the air pipe interface 31, so that the air pressure can be adjusted when it is reduced and the required pressure can be reached; when the pressure in the air outlet main pipe 3 is too high and needs to be adjusted, the controller 7 adjusts the air flow rate through the pressure control module 4 to increase the flow rate, thereby relieving the pressure in the air outlet main pipe 3.

[0035] refer to Figure 2 The pressure control module 4 includes a straight pipe 41, an upper curved pipe 42, a lower curved pipe 43 and a regulating valve 44. The straight pipe 41 is vertically arranged, and a shut-off valve 45 is arranged in the middle of the straight pipe 41. The shut-off valve 45 is used to make the straight pipe 41 in an intermittent switching state, that is, it is opened according to a designed cycle when the regulating valve 44 is opened. The shut-off valve 45 adopts a liquid pneumatic valve and is opened or closed pneumatically. One end of the upper curved pipe 42 is connected to the regulating valve 44, and the other end is connected to the side wall of the straight pipe 41 and is located above the shut-off valve 45. The upper curved pipe 42 is connected to the gas outlet position of the regulating valve 44. One end of the lower curved pipe 43 is connected to the regulating valve 44, and the other end is connected to the side wall of the straight pipe 41 and is located below the shut-off valve 45. The lower curved pipe 43 is connected to the gas inlet position of the regulating valve 44, so that the lower end of the straight pipe 41 is connected to the gas outlet main pipe 3. The gas in the gas outlet main pipe 3 mainly passes through the lower curved pipe 43, the regulating valve 44 and the upper curved pipe 42 and passes through the pressure control module 4. The ends of the upper curved pipe 42 and the lower curved pipe 43 connected to the straight pipe 41 are lower than the ends connected to the regulating valve 44, so that the condensation generated in the process of the gas passing through the upper curved pipe 42 and the lower curved pipe 43 automatically falls back into the straight pipe 41 from the upper curved pipe 42 and the lower curved pipe 43, thereby reducing the aggregation occurring at the regulating valve 44. At the same time, the lower bend pipe 43 adopts a metal bellows, which makes it easier for condensation to occur at the lower bend pipe 43, further reducing the condensation in the regulating valve 44. The condensed liquid of the upper bend pipe 42 will be collected at the shutoff valve 45 of the straight pipe 41, and can flow downward along the straight pipe 41 as the shutoff valve 45 is opened.

[0036] The regulating valve 44 is connected to a stepper motor 46, which is connected to a controller 7. The regulating valve 44 is a butterfly valve and is driven by the stepper motor 46. The controller 7 drives the stepper motor 46 so that the stepper motor 46 can control the flow through the regulating valve 44 by adjusting the opening of the regulating valve 44. The output shaft of the stepper motor 46 is connected to the valve core of the regulating valve 44.

[0037] refer to Figure 3 The second condenser 5 includes an outer tube 51, an inner tube 52 and an intermediate tube 53. The inner tube 52 is arranged at the center of the outer tube 51, and the intermediate tube 53 passes through the outer tube 51 and the inner tube 52 from the bottom of the outer tube, and is connected with the inner tube 52. One end of the intermediate tube 53 located outside the outer tube 51 is used to connect the upper end of the straight tube 41 in the pressure control module 4. A plurality of through holes 56 are opened on the bottom wall of the inner tube 52. The diameter of the through holes 56 is 1-2 mm. The water vapor in the gas passes through the bottom wall of the inner tube 52. When the through hole 56 is opened, it will adhere to the bottom wall of the inner tube 52 and form water drops that fall into the bottom of the outer tube 51. A water outlet 54 is also provided at the bottom of the outer tube 51. The water outlet 54 is installed with a one-way valve 55, which is connected to the drain pipe 27 through the one-way valve 55. The one-way valve 55 is used to allow the water in the second condenser 5 to flow to the drain pipe 27 through the one-way valve 55. The top of the outer tube 51 is spaced apart from the top of the inner tube 52, and the middle of the top of the outer tube 51 is ventilated and used to connect the pressure-stabilizing valve 6.

[0038] refer to Figure 4 The first condenser 1 includes a double-walled tube 11, the interior of the double-walled tube 11 is used for ventilation, a water channel 12 is formed between the two side walls of the double-walled tube 11, the water channel 12 is connected with a water inlet joint 13 and a water outlet joint 14, the water inlet joint 13 is located on the lower end side wall of the double-walled tube 11, and the water outlet joint 14 is located on the upper end side wall of the double-walled tube 11. The cooling medium is introduced into the water channel 12 in the double-walled tube 11 through the water inlet joint 13, so that the double-walled tube 11 cools the gas introduced into the interior and condenses the water vapor faster. A plurality of partitions 15 are arranged inside the double-walled tube 11, and the partitions 15 are arranged perpendicular to the axis of the double-walled tube 11. The plurality of partitions 15 are arranged at intervals along the axis direction of the double-walled tube 11, and the diameter of the partitions 15 is smaller than the inner diameter of the double-walled tube 11, so that a gap is left between the edge of the partition 15 and the inner wall of the double-walled tube 11, and the width of the gap is 1-2 mm. A fixing rod 16 is fixedly arranged on the plurality of partitions 15, and the fixing rod 16 is parallel to the axis of the double-walled tube 11, so that both ends of the fixing rod 16 are fixed on the double-walled tube 11, and the partitions 15 are fixed in the double-walled tube 11. When the gas enters the upper end of the double-walled tube 11, the gas is blocked by the partition 15 and flows along the inner wall of the double-walled tube 11. Since the inner wall of the double-walled tube 11 is cooled by the cooling medium, it is easier for the water vapor to condense after heat exchange.

[0039] Embodiment 2: This embodiment discloses a water vapor separation pressure control device, referring to Figure 5 , which is different from the first embodiment in that: a movable plate 17 is provided in the double-walled tube 11, a plurality of movable plates 17 are provided, and one movable plate 17 corresponds to one partition 15, and the movable plate 17 is arranged on a part of the partition 15 at the lower part of the double-walled tube 11, and no movable plate 17 is provided above the partition 15 at the upper part of the double-walled tube 11. The outer periphery of the movable plate 17 is in contact with the inner wall of the double-walled tube 11, and the water vapor condensed in the double-walled tube 11 is sealed and heat-conducted between the edge of the movable plate 17 and the double-walled tube 11. A plurality of through holes 171 are provided in the middle of the movable plate 17, and the through holes 171 are used to allow the gas to continue to move downward through the movable plate 17. A screw 18 is connected to the movable plate 17, and the screw 18 is arranged parallel to the axis of the double-walled tube 11. A drive motor 19 is fixedly arranged at one end of the screw 18. The drive motor 19 adopts a waterproof motor, and the drive motor 19 is fixed on a partition 15. The drive motor 19 is coaxially fixed with the screw 18. The screw 18 is rotatably connected to the partition 15 below and is threadedly connected to each movable plate 17. At the same time, the plurality of movable plates 17 are also slidably connected to the fixed rod 16. When the drive motor 19 drives the screw 18 to rotate, the height of the plurality of movable plates 17 can be adjusted, thereby adjusting the distance between the movable plate 17 and the partition 15 below, so that the water vapor can also contact the movable plate 17 during the flow, and transfer the heat to the cooling medium through the movable plate 17, so that the water vapor is cooled and condensed. At the same time, after the distance between the partition 15 and the movable plate 17 is adjusted, the airflow will be blocked when passing through the position between the bottom of the movable plate 17 and the partition 15, so that the movable plate 17 can adjust the resistance to the airflow, thereby adjusting the pressure on the upper part of the double-walled tube 11, and then adjusting the pressure of the process chamber.

[0040] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A water vapor separation pressure control device, characterized in that: The invention comprises a first condenser (1) and a second condenser (5), wherein the inlet connection end (21) of the first condenser (1) is used for connecting to a process chamber, a pressure control module (4) is arranged between the first condenser (1) and the second condenser (5), the first condenser (1) is connected to a collecting tank (24) via a vertical pipe (23), a gas outlet main pipe (3) is connected to the side wall of the vertical pipe (23), the gas outlet main pipe (3) is used for connecting to the pressure control module (4), the pressure control module (4) is connected to a controller (7), the controller (7) is used for adjusting the flow rate of the pressure control module (4), the controller (7) is connected to a pressure detection pipe (71), the pressure detection pipe (71) is connected to the gas outlet main pipe (3) and is used for detecting the pressure on the gas outlet main pipe (3); the outlet of the second condenser (5) is connected to a pressure stabilizing valve (6).

2. A water vapor separation pressure control device according to claim 1, characterized in that: An air pipe interface (31) is provided at one end of the air outlet main pipe (3) close to the vertical pipe (23), and the air pipe interface (31) is used to connect an air supply device for supplying pressurized air to the air outlet main pipe (3).

3. A water vapor separation pressure control device according to claim 2, characterized in that: The pressure control module (4) comprises a regulating valve (44), the regulating valve (44) being used to be connected to the gas outlet main pipe (3), the regulating valve (44) being connected to a stepping motor (46) for driving the regulating valve (44) to adjust the flow rate, and the controller (7) being used to control the rotation angle of the stepping motor (46).

4. A water vapor separation pressure control device according to claim 3, characterized in that: The pressure control module (4) further comprises a straight pipe (41), the straight pipe (41) being arranged vertically and connected to the main gas outlet pipe (3), the straight pipe (41) being connected to a shut-off valve (45), the regulating valve (44) being connected to the straight pipe (41) in a manner of bypassing the shut-off valve (45) via an upper curved pipe (42) and a lower curved pipe (43), the shut-off valve (45) being opened or closed pneumatically, and one end of the upper curved pipe (42) being connected to the straight pipe (41) being arranged to tilt downward.

5. The water vapor separation pressure control device according to claim 1, characterized in that: The first condenser (1) comprises a double-walled cylinder (11), the interior of the double-walled cylinder (11) is ventilated, a water channel (12) is formed between two side walls of the double-walled cylinder (11), and a water inlet joint (13) and a water outlet joint (14) for introducing a cooling medium into the water channel (12) are connected to the side walls of the double-walled cylinder (11).

6. A water vapor separation pressure control device according to claim 5, characterized in that: A plurality of partitions (15) are arranged in the double-walled tube (11); the partitions (15) are arranged perpendicular to the axis of the double-walled tube (11); the plurality of partitions (15) are arranged at intervals along the axis of the double-walled tube (11); and a gap for airflow to pass through is left between the edge of the partition (15) and the inner wall of the double-walled tube (11).

7. A water vapor separation pressure control device according to claim 6, characterized in that: A movable plate (17) is arranged inside the double-walled tube (11). The movable plate (17) is slidably connected inside the double-walled tube (11) along the axis of the double-walled tube (11). A partition plate (15) is arranged below the movable plate (17). The edge of the movable plate (17) is sealed against the inner wall of the double-walled tube (11). A plurality of through holes (171) are opened in the middle of the movable plate (17). The movable plate (17) is connected to a screw (18) for driving the movable plate (17) to move along the axis of the double-walled tube (11). The distance between the movable plate (17) and the partition plate (15) is adjusted by the screw (18).

8. A water vapor separation pressure control device according to claim 7, characterized in that: A plurality of movable plates (17) are provided, and each movable plate (17) is provided corresponding to a partition plate (15). The movable plates (17) are all threadedly connected to a screw rod (18). One end of the screw rod (18) is connected to a drive motor (19), and the drive motor (19) is used to drive the screw rod (18) to rotate. The movable plates (17) are provided corresponding to the plurality of partition plates (15) at the lower part of the double-walled cylinder (11).

9. The water vapor separation pressure control device according to claim 1, characterized in that: The second condenser (5) comprises an outer cylinder (51), an inner cylinder (52) and an intermediate tube (53); the inner cylinder (52) is inside the outer cylinder (51); the intermediate tube (53) penetrates the outer cylinder (51) and the inner cylinder (52) from the bottom of the outer cylinder (51) and is in communication with the interior of the inner cylinder (52); a plurality of through holes (56) are provided on the bottom wall of the inner cylinder (52); a water outlet (54) is provided at the bottom of the outer cylinder (51); and an end of the intermediate tube (53) exposed outside the outer cylinder (51) is used for connecting to a pressure control module (4).

10. The water vapor separation pressure control device according to claim 1, characterized in that: A hand valve (8) is connected behind the pressure stabilizing valve (6), the hand valve (8) is in a normally closed state, and a bypass pipe (82) is arranged in parallel with the hand valve (8), with both ends of the bypass pipe (82) respectively connected to the front and rear positions of the hand valve (8).

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