Tail gas treatment equipment, tail gas treatment method and tail gas treatment system

Abstract

The invention provides tail gas treatment equipment, method and system, the equipment is used for treating tail gas generated by boron diffusion equipment, the components of the tail gas comprise first particles and second particles, the equipment comprises a catalysis assembly used for receiving the tail gas, and under the influence of a first preset condition and a catalyst, the first particles are converted into third particles easy to ionize; the ionization assembly is used for receiving the tail gas passing through the catalysis assembly, and under a second preset condition, the ionization assembly is used for converting the second particles and the third particles into ionic state particles; the ion capturing assembly is used for receiving the tail gas passing through the ionization assembly, the ion capturing assembly comprises a reaction box, a capturing agent is arranged in the reaction box, and the capturing agent is used for capturing ionic state particles. Harmful particles in tail gas are converted, separated and captured from the molecular level, the size of the particles in the tail gas cannot affect the filtering effect, the situation that only particles with the size within a specific range can be filtered is relieved, and the overall filtering effect of the tail gas is ideal.

Description

Technical Field

[0001] The present application belongs to the technical field of photovoltaic cells, and in particular relates to an exhaust gas treatment device, an exhaust gas treatment method and an exhaust gas treatment system. Background Art

[0002] In the production of solar cells, a diffusion process is involved, which will produce exhaust gas. In order to discharge the exhaust gas safely, the exhaust gas needs to be filtered before it can be discharged.

[0003] The existing exhaust gas filtering method is usually filter element filtering, but filter element filtering can only filter relatively large exhaust gas particles in the exhaust gas, and the overall filtering effect is not ideal. Summary of the invention

[0004] The embodiments of the present application provide an exhaust gas treatment device, an exhaust gas treatment method and an exhaust gas treatment system to solve or alleviate one or more technical problems in the prior art.

[0005] As one aspect of an embodiment of the present application, an embodiment of the present application provides an exhaust gas treatment device for treating exhaust gas generated by a boron diffusion device, wherein the components of the exhaust gas include first particles and second particles, and the device includes: A catalytic component is used to receive the exhaust gas, wherein the catalytic component is provided with a catalyst; under the influence of the first preset condition and the catalyst, the first particles are converted into easily ionized third particles; an ionization component, used for receiving the exhaust gas after passing through the catalytic component; under a second preset condition, the ionization component is used for converting the second particles and the third particles into ionic particles, wherein the ionic particles include positive ions and negative ions; The ion capture component is used to receive the tail gas after passing through the ionization component. The ion capture component includes a reaction box. A capture agent is arranged in the reaction box. The capture agent is used to capture the positive ions and the negative ions.

[0006] Optionally, the catalyst includes any one of a platinum metal catalyst, a rhodium metal catalyst, a vanadium oxide catalyst, and a tungsten oxide catalyst.

[0007] Optionally, the first preset condition includes: The catalytic assembly contains a reactive gas.

[0008] Optionally, the ionization component includes an ionization chamber, the ionization chamber is used to receive the exhaust gas passing through the catalytic component, and the second preset condition includes: A preset electric field strength is applied in the ionization chamber.

[0009] Optionally, the ionization assembly further comprises a high curvature needle, wherein the high curvature needle is disposed in the ionization chamber and is used to apply the preset electric field strength in the ionization chamber.

[0010] Optionally, the ion capture component further includes an electric field component disposed in the reaction box, and opposite ends of the reaction box are respectively provided with a first air inlet and a first air outlet, and the electric field component includes: A positive electrode plate, disposed on the first inner wall of the reaction box; A negative electrode plate, spaced apart from the positive electrode plate and disposed on the second inner wall of the reaction box; Wherein, the first inner wall and the second inner wall are located between the first air inlet and the first air outlet and are arranged opposite to each other; An offset electric field is formed between the positive plate and the negative plate, and the offset electric field guides the negative ions to approach the positive plate and guides the positive ions to approach the negative plate.

[0011] Optionally, the electric field component further comprises: A direct current power supply, wherein the positive electrode is electrically connected to the positive plate, and the negative electrode is electrically connected to the negative plate; A capacitor is connected in parallel to the DC power supply.

[0012] Optionally, the reaction capture agent comprises: A positive ion capture agent is located between the positive electrode plate and the negative electrode plate and is arranged close to the negative electrode plate; The negative ion capture agent is located between the positive electrode plate and the negative electrode plate and is arranged close to the positive electrode plate.

[0013] Optionally, the device further comprises a membrane filtration component, which is in communication with the ion capture component, and the membrane filtration component comprises: A filter box, with a second air inlet and a second air outlet at both ends, respectively, wherein the second air inlet is used to receive the exhaust gas after passing through the ion capture component; The filter membrane is intercepted between the second air inlet and the second air outlet, and is used for filtering the residual first particles and second particles in the exhaust gas.

[0014] As another aspect of the embodiment of the present application, the embodiment of the present application further provides a tail gas treatment method for treating tail gas by using any of the tail gas treatment devices described above, the method comprising the following steps: Passing the exhaust gas into the catalytic component, and converting the first particles into easily ionizable third particles under a first preset condition; Passing the exhaust gas after passing through the catalytic component into an ionization component, and ionizing the first particles and the third particles in the exhaust gas into ionized particles under a second preset condition; The tail gas after passing through the ionization component is passed into the ion capture component, and the ion capture component is used to capture ionized particles.

[0015] As another aspect of the embodiments of the present application, the embodiments of the present application also provide a diffusion system, comprising any of the exhaust gas treatment devices described above.

[0016] The embodiment of the present application converts the first particles in the exhaust gas into easily ionized third particles, then passes the exhaust gas into an ionization component to convert the second particles and the third particles in the exhaust gas into ionized particles, and then passes the exhaust gas into an ion capture component to capture the ionized particles in the exhaust gas, so as to filter the exhaust gas. The embodiment of the present application converts, separates, and captures harmful particles in the exhaust gas at the molecular level. The size of the particles in the exhaust gas will not affect the filtering effect, which alleviates the situation where only particles of a specific size range can be filtered, and the overall filtering effect of the exhaust gas is relatively ideal.

[0017] The above summary is for illustrative purposes only and is not intended to be limiting in any way. In addition to the illustrative aspects, embodiments and features described above, further aspects, embodiments and features of the present application will be readily apparent by reference to the accompanying drawings and the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In the accompanying drawings, unless otherwise specified, the same reference numerals throughout the multiple drawings represent the same or similar parts or elements. These drawings are not necessarily drawn to scale. It should be understood that these drawings only depict some embodiments disclosed in the present application and should not be regarded as limiting the scope of the present application.

[0019] Figure 1 A schematic diagram of the structure of the exhaust gas treatment equipment according to an embodiment of the present application; Figure 2 A schematic diagram of the structure of an ion capture component of an exhaust gas treatment device according to an embodiment of the present application; Figure 3 Another structural schematic diagram of the exhaust gas treatment equipment according to an embodiment of the present application; Figure 4 A flow chart of an exhaust gas treatment method according to an embodiment of the present application is schematically shown.

[0020] Description of reference numerals: Condensation component 10; catalytic component 20; ionization component 30; ion capture component 40; membrane filtration component 50; diaphragm pump 60; exhaust gas emission pipeline 70; reaction gas input component 21; positive electrode plate 401; positive ion capture agent 402; negative electrode plate 404; negative ion capture agent 405; DC power supply 408; capacitor 409; filter membrane 501; one-way valve 505. DETAILED DESCRIPTION

[0021] Embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings. In the accompanying drawings, for clarity, the sizes of layers, regions, elements and their relative sizes may be exaggerated. The same or similar reference numerals throughout represent the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0022] It should be understood that when an element or layer is referred to as "on ...", "adjacent to ...", "connected to" or "coupled to" other elements or layers, it can be directly on, adjacent to, connected to or coupled to other elements or layers, or there can be intervening elements or layers. On the contrary, when an element is referred to as "directly on ...", "directly adjacent to ...", "directly connected to" or "directly coupled to" other elements or layers, there is no intervening element or layer. It should be understood that although the terms first, second, third, etc. can be used to describe various elements, components, regions, layers and / or parts, these elements, components, regions, layers and / or parts should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or part from another element, component, region, layer or part. Therefore, without departing from the teachings of the present application, the first element, component, region, layer or part discussed below can be represented as the second element, component, region, layer or part. When the second element, component, region, layer or part is discussed, it does not indicate that the present application necessarily has the first element, component, region, layer or part.

[0023] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0024] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the terms used in this way can be interchangeable where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein, for example. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0025] In the present application, when it comes to a numerical interval (i.e., a numerical range), unless otherwise specified, the distribution of the optional numerical values ​​in the numerical interval is considered to be continuous, and includes the two numerical endpoints (i.e., the minimum and maximum values) of the numerical interval, and each numerical value between the two numerical endpoints. Unless otherwise specified, when the numerical interval only refers to an integer in the numerical interval, it includes the two endpoint integers of the numerical range, and each integer between the two endpoints, which is equivalent to directly listing each integer. When multiple numerical ranges are provided to describe features or characteristics, these numerical ranges can be merged. In other words, unless otherwise specified, the numerical range disclosed in the present application should be understood to include any and all sub-ranges included therein. The "numerical value" in the numerical interval can be any quantitative value, such as a number, a percentage, a ratio, etc. "Numerical interval" allows for broadly including quantitative intervals such as percentage intervals, ratio intervals, and ratio intervals.

[0026] The embodiment of the present application provides a tail gas treatment device, a tail gas treatment method and a tail gas treatment system technical solution. Based on this, the effect of tail gas filtration is improved. See below for details.

[0027] Hereinafter, exemplary embodiments according to the present application will be described in more detail with reference to the accompanying drawings. It should be noted that these exemplary embodiments can be implemented in many different forms and should not be construed as being limited to the embodiments described herein.

[0028] See also Figure 1 and Figure 2 The embodiment of the present application provides an exhaust gas treatment device for treating the exhaust gas generated by a boron diffusion device. Based on the solar cell diffusion process, the exhaust gas components may include first particles and second particles, and the exhaust gas components may also include other harmless particles, which are not described here. The exhaust gas treatment device includes a catalytic component 20, an ionization component 30, and an ion capture component 40, which are described in detail below: The catalytic component 20 is used to receive the exhaust gas, and a catalyst is provided in the catalytic component 20. Under the influence of the first preset condition and the catalyst, the first particle is converted into a third particle that is easily ionized. The catalyst is not consumed during the reaction, but provides a reaction path to catalyze and accelerate the conversion of the first particle. In this embodiment, the catalyst in the catalytic component 20 may include any one of a platinum metal catalyst, a rhodium metal catalyst, a vanadium oxide catalyst, and a tungsten oxide catalyst. Specifically, the first preset condition may be that there is a reaction gas in the catalytic component 20, and the reaction gas may provide a reducing atmosphere in the catalytic component 20 so that the first particle is converted into a third particle that is easily ionized. The reaction gas may be stored in the reaction gas input component 21, and then input into the catalytic component 20 when needed.

[0029] The ionization component 30 is used to receive the exhaust gas after passing through the catalytic component 20. Under the second preset condition, the ionization component 30 is used to convert the second particles and the third particles into ionic particles, and the ionic particles include positive ions (positively charged ions) and negative ions (negatively charged ions). Specifically, the second preset condition may include: the ionization component 30 is also applied with a preset electric field strength, and / or a preset temperature, and / or a preset power laser, so as to break the particle bonds to make them ionic particles.

[0030] The ion capture component 40 is used to receive the exhaust gas after passing through the ionization component 30. The ion capture component 40 includes a reaction box (not shown), in which a capture agent is provided, and the capture agent is used to capture positive ions and negative ions. The ionization component 30 converts the second particle and the third particle into ionic particles. Ionic particles are more active than neutral particles, making it easier for them to undergo chemical reactions in subsequent processes. That is, ionic particles can more easily react with the capture agent in the ion capture component 40. The capture agent can capture ionic particles in a variety of ways, including but not limited to adsorption, neutralization, and capture.

[0031] In the embodiment of the present application, the first particles in the exhaust gas are converted into easily ionized third particles, and then the exhaust gas is passed into the ionization component 30 to convert the second particles and the third particles in the exhaust gas into ionized particles, and then passed into the ion capture component 40 to capture the ionized particles in the exhaust gas, so as to achieve the filtration of the exhaust gas. That is, the harmful particles in the exhaust gas are converted, separated, and captured at the molecular level, and the size of the particles in the exhaust gas will not affect the filtering effect, which alleviates the situation that only particles of a specific size range can be filtered, and improves the overall filtering effect of the exhaust gas.

[0032] For example, the first particle in the tail gas generated by the boron diffusion device is B2O3, and the second particle is BCl3. The catalyst is a platinum metal catalyst, and H2 is introduced as a reaction gas to convert the first particle (B2O3) into the third particle (B2O2). The specific reaction process includes:

[0033] After passing through the catalytic component 20, the second particles and the third particles enter the ionization component 30, wherein a preset electric field strength is applied in the ionization component 30. Specifically, a high curvature needle (not shown) may be provided in the ionization chamber to apply a preset electric field strength in the ionization chamber through the high curvature needle. Specifically, the high curvature needle may generate a predetermined voltage in the ionization chamber to generate a preset electric field strength in the ionization chamber.

[0034] In this example, the preset electric field strength is not less than 50 KV / mm. In other embodiments, the preset electric field strength may also be in other ranges, or high temperature may be applied in the ionization chamber to coordinate ionization.

[0035] The second and third particles are ionized into positively / negatively charged ionized particles, where the positive ions include B 3+ , negative ions include Cl - , O 2- and / or O2 - .

[0036] The ionic particles in the exhaust gas continue to enter the ion capture component 40 with the exhaust gas, and the exhaust gas contacts the capture agent therein, so that the positive ions and negative ions in the exhaust gas react with the corresponding capture agent respectively to remove B in the exhaust gas. 3+ , Cl - , to achieve the filtration of exhaust gas (O is harmless particles and does not need to be removed), and then discharge the filtered exhaust gas out of the exhaust gas treatment device.

[0037] It should be noted that the exhaust gas generated by the boron diffusion device may also contain other particles. Specifically, the catalyst type or reaction gas can be adjusted according to the specific composition of the particles in the exhaust gas so that the particle composition in the exhaust gas entering the ionization component 30 is easily ionized particles.

[0038] In one embodiment, the exhaust gas treatment device may further include a condensation component 10, which receives the exhaust gas before the catalytic component 20, and the exhaust gas is processed by the condensation component 10 before entering the catalytic component 20. The condensation component 10 is used to cool the exhaust gas, and can perform primary filtration on some harmful substances (such as B2O3, BCl3) and condensable substances (such as water vapor) in the exhaust gas, and the temperature of the cooled exhaust gas is relatively low, which can protect the components to be subsequently processed, and prevent the high-temperature exhaust gas from damaging the subsequent components or reducing their working efficiency.

[0039] In one embodiment, the ion capture component 40 also includes an electric field component disposed in a reaction box, and a first air inlet (not marked in the figure) and a first air outlet (not marked in the figure) are respectively provided at opposite ends of the reaction box. The exhaust gas in the ionization component 30 enters the reaction box through the first air inlet, and the exhaust gas is processed in the ion capture component 40 and then discharged through the first air outlet of the reaction box.

[0040] like Figure 2 As shown, the electric field assembly includes a positive plate 401 and a negative plate 404. The positive plate 401 is arranged on the first inner wall of the reaction box (not marked in the figure). The negative plate 404 is arranged at a distance from the positive plate 401 and is arranged on the second inner wall of the reaction box (not marked in the figure). The first inner wall and the second inner wall are located between the first air inlet and the first air outlet and are arranged opposite to each other.

[0041] The capture agents in the reaction box include a positive ion capture agent 402 and a negative ion capture agent 405. The positive ion capture agent 402 is located between the positive plate 401 and the negative plate 404, and is arranged close to the negative plate 404. The negative ion capture agent 405 is located between the positive plate 401 and the negative plate 404, and is arranged close to the positive plate 401. Separating the positive ion capture agent 402 and the negative ion capture agent 405 can also avoid the reaction between the positive ion capture agent 402 and the negative ion capture agent 405.

[0042] In this embodiment, the positive ion capture agent 402 / the negative ion capture agent 405 is used to capture or neutralize the positive ions / negative ions in the tail gas. Taking the positive ion capture agent 402 as an example, the positive ion capture agent can capture positive ions by charge attraction, that is, the positive ion capture agent carries a negative charge or a partial negative charge to electrically attract and bind to the positive ions. Alternatively, the positive ion capture agent has multiple coordination sites and can form multiple bonds with the positive ions, thereby firmly capturing the positive ions. Alternatively, the positive ion capture agent includes some having a large specific surface area and specific surface functional groups, so that the positive ion capture agent can capture positive ions by surface adsorption, and the adsorption can be chemical adsorption or physical adsorption.

[0043] An offset electric field is formed between the positive plate 401 and the negative plate 404 in the reaction box. Due to the effect of the offset electric field, the positive and negative ions are respectively drawn to different directions, reducing the recombination between the positive and negative ions and improving the contact and reaction effect between the positive and negative ions and the capture agent.

[0044] Specifically, the electric field component further includes a DC power supply 408 and a capacitor 409. The positive electrode and the negative electrode of the DC power supply 408 are electrically connected to the positive plate 401 and the negative plate 404, respectively, so that the positive plate 401 is positively charged and the negative plate 404 is negatively charged, thereby forming an offset electric field between the positive plate 401 and the negative plate 404. The capacitor 409 is connected in parallel to the DC power supply 408, and is mainly used to smooth voltage changes and ensure the stability of the offset electric field.

[0045] In this example, the voltage of the DC power supply 408 is not less than 1 KV, so as to form a high-intensity offset electric field between the positive plate 401 and the negative plate 404, thereby more effectively driving and separating positive and negative ions.

[0046] A current limiting resistor may also be connected in series at the end of the power supply to limit the current and prevent excessive current to protect the DC power supply 408 and other components.

[0047] The positive ions approach the negative plate 404 under the influence of the offset electric field. The positive ions may include B 3+ The positive ion capture agent 402 may include any one of hydroxy-containing boric acid resin, phthalic acid, citric acid, and aluminum hydroxide.

[0048] Negative ions approach the positive plate 401 under the influence of the offset electric field. Negative ions may include Cl - The negative ion capture agent 405 may include any one of aluminum hydroxide, calcium hydroxide, and magnesium hydroxide.

[0049] Taking the positive ion capture agent 402 as a hydroxyboric acid resin as an example, B 3+ The ions react with the hydroxyboronic acid groups on the resin; if there are other exchangeable positive ions on the resin, these positive ions can react with B 3+ An ion exchange reaction occurs, thereby converting B 3+ Ion capture.

[0050] Taking phthalic acid as an example of the positive ion capture agent 402, the reaction equation may include:

[0051] Taking the negative ion capture agent 405 as magnesium hydroxide as an example, the reaction equation may include:

[0052] In other embodiments, the negative ion capture agent 405 may also be a silver-loaded material, such as silver nanoparticles, silver-loaded activated carbon, silver-loaded zeolite, etc. + ) is released from the surface of solid materials and reacts with chloride ions (Cl - ) combine to form silver chloride (AgCl).

[0053] The negative ion capture agent 405 may also be an ion exchange resin, which captures chloride ions through an ion exchange process and exchanges them from the tail gas to the resin.

[0054] See also Figure 3In one embodiment, the tail gas treatment device may further include a membrane filter assembly 50, which is connected to the ion capture assembly 40. A one-way valve 505 may be provided between the ion capture assembly 40 and the membrane filter assembly 50, so that the tail gas can only enter the membrane filter assembly 50 from the ion capture assembly 40 to avoid the backflow of the tail gas. The membrane filter assembly 50 may include a filter box and a filter membrane 501.

[0055] Preferably, there are two one-way valves 505, both of which are connected between the ion capture component 40 and the membrane filtration component 50, one one-way valve 505 is set corresponding to the end of the positive electrode plate 401, and the other one-way valve 505 is set corresponding to the end of the negative electrode plate 404, so that positive and negative ions can be transported in different pipelines to reduce the recombination of residual ions in the exhaust gas.

[0056] The two ends of the filter box are respectively provided with a second air inlet (not marked in the figure) and a second air outlet (not marked in the figure), and the second air inlet is used to receive the exhaust gas after passing through the ion capture component 40. Specifically, the second air inlet can be connected to the first air outlet of the reaction box.

[0057] The filter membrane 501 is intercepted between the second air inlet and the second air outlet, and is used to filter the first particles and the second particles remaining in the exhaust gas.

[0058] The filter membrane 501 may be a semi-permeable membrane, which can effectively intercept and capture the first particles, the second particles, the third particles and other fine particles remaining in the exhaust gas, and further ensure the filtering effect of the exhaust gas.

[0059] There may be multiple filter membranes 501 , and the pore sizes of the multiple filter membranes 501 are different. The multiple filter membranes 501 are arranged at intervals to achieve cascade filtration to remove particles of different sizes.

[0060] The filter membrane 501 may also be an affinity membrane to specifically adsorb certain particles (such as the first particles, the second particles, and the third particles).

[0061] In some embodiments, the surface of the filter membrane 501 may also be charge modified to enhance the adsorption and filtration effects of ions with opposite charges.

[0062] Specifically, the material of the filter membrane 501 may include one of polyether ester, polyamide, and polypropylene.

[0063] The above materials have suitable toughness and thermal stability and can remain stable in high gas flow rate and high temperature environment.

[0064] In one embodiment, the exhaust gas emission device may further include a diaphragm pump 60 and an exhaust gas emission pipeline 70 which are connected in sequence. The diaphragm pump 60 may be connected to the second gas outlet. The diaphragm pump 60 may be used to control the air pressure of the pipeline in the exhaust gas treatment device to guide the flow direction of the exhaust gas. The exhaust gas enters the diaphragm pump 60 after being filtered by multiple components in the exhaust gas treatment device. The concentration of harmful particles in the exhaust gas is already in a safe and reasonable range. The exhaust gas may enter the exhaust gas emission pipeline 70 through the diaphragm pump 60 and then be discharged to the outside.

[0065] See also Figure 4 The embodiment of the present application also provides a tail gas treatment method for treating tail gas by using any of the tail gas treatment devices described above, the method comprising the following steps: Step S100 , passing the exhaust gas into the catalytic component, and converting the first particles into easily ionizable third particles under a first preset condition.

[0066] A catalyst is arranged in the catalytic component, and is used for converting the first particles into easily ionized third particles in accordance with the first preset condition.

[0067] Step S102 , passing the exhaust gas after passing through the catalytic component into the ionization component, and ionizing the first particles and the third particles in the exhaust gas into ionized particles under a second preset condition.

[0068] Step S104, passing the tail gas after passing through the ionization component into the ion capture component, and the ion capture component is used to capture ionized particles.

[0069] An embodiment of the present application also provides a diffusion system, which may include a diffusion furnace for performing a diffusion process on solar cells. When performing the diffusion process, the diffusion furnace may generate corresponding exhaust gas, which may be treated by the above-mentioned exhaust gas treatment equipment before being discharged.

[0070] The diffusion system may also include various devices or components for performing a boron diffusion process on the cell, such as: The gas supply device is used to provide the furnace with boron source gas (BBr3, boron tribromide) and carrier gas (oxygen, nitrogen), and to control the flow rate and mixing ratio of the gas.

[0071] The boat is used to load the cells and place them in the furnace for processing. The boat can be made of quartz material to avoid reaction with the cells or the gas in the furnace.

[0072] The temperature control component is used to adjust the temperature in the furnace body according to the diffusion process requirements of the battery cell, for example, to control the temperature in the furnace body at 800℃~1100℃.

[0073] In other embodiments, the diffusion system may further include other devices, components or systems as required.

[0074] It should be noted that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. The orientation words "inside" and "outside" refer to the inside and outside relative to the outline of each component itself. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Therefore, the exemplary term "above..." can include both "above..." and "below..." orientations. The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used here are interpreted accordingly.

[0075] It should also be noted that "one embodiment", "another embodiment", "embodiment", etc. mentioned in this application refer to the specific features, structures or characteristics described in conjunction with the embodiment included in at least one embodiment generally described in this application. The same expression appearing in multiple places in the specification does not necessarily refer to the same embodiment. Further, when describing a specific feature, structure or characteristic in conjunction with any embodiment, it is claimed that the realization of such feature, structure or characteristic in conjunction with other embodiments also falls within the scope of this application.

[0076] In the above embodiments, the description of each embodiment has its own emphasis. For parts that are not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0077] It should also be noted that the above are only preferred embodiments of the present application, and the patent protection scope of the present application is not limited thereto. Any equivalent structure or equivalent process transformation made using the contents of the present application specification and drawings, or directly or indirectly used in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. An exhaust gas treatment device, characterized in that: Used for treating tail gas generated by a boron diffusion device, the components of the tail gas include first particles and second particles, and the device comprises: A catalytic component is used to receive the exhaust gas, wherein the catalytic component is provided with a catalyst; under the influence of the first preset condition and the catalyst, the first particles are converted into easily ionized third particles; an ionization component, used for receiving the exhaust gas after passing through the catalytic component; under a second preset condition, the ionization component is used for converting the second particles and the third particles into ionic particles, wherein the ionic particles include positive ions and negative ions; The ion capture component is used to receive the tail gas after passing through the ionization component. The ion capture component includes a reaction box. A capture agent is arranged in the reaction box. The capture agent is used to capture the positive ions and the negative ions.

2. The tail gas treatment equipment according to claim 1, characterized in that: The catalyst includes any one of a platinum metal catalyst, a rhodium metal catalyst, a vanadium oxide catalyst, and a tungsten oxide catalyst.

3. The tail gas treatment equipment according to claim 1, characterized in that: The first preset condition includes: The catalytic assembly contains a reactive gas.

4. The tail gas treatment equipment according to claim 1, characterized in that: The ionization component includes an ionization chamber, and the ionization chamber is used to receive the exhaust gas passing through the catalytic component. The second preset condition includes: A preset electric field strength is applied in the ionization chamber.

5. The tail gas treatment equipment according to claim 4, characterized in that: The ionization assembly also includes a high curvature needle, which is arranged in the ionization chamber and is used to apply the preset electric field strength in the ionization chamber.

6. The tail gas treatment equipment according to claim 1, characterized in that: The ion capture assembly further includes an electric field assembly disposed in the reaction box, and opposite ends of the reaction box are respectively provided with a first air inlet and a first air outlet, and the electric field assembly includes: A positive electrode plate, arranged on the first inner wall of the reaction box; A negative electrode plate, spaced apart from the positive electrode plate and disposed on the second inner wall of the reaction box; Wherein, the first inner wall and the second inner wall are located between the first air inlet and the first air outlet and are arranged opposite to each other; An offset electric field is formed between the positive plate and the negative plate, and the offset electric field guides the negative ions to approach the positive plate and guides the positive ions to approach the negative plate.

7. The tail gas treatment equipment according to claim 6, characterized in that: The electric field assembly also includes: A direct current power supply, wherein the positive electrode is electrically connected to the positive plate, and the negative electrode is electrically connected to the negative plate; A capacitor is connected in parallel to the DC power supply.

8. The tail gas treatment equipment according to claim 6, characterized in that: The reaction capture agent comprises: A positive ion capture agent is located between the positive electrode plate and the negative electrode plate and is arranged close to the negative electrode plate; The negative ion capture agent is located between the positive electrode plate and the negative electrode plate and is arranged close to the positive electrode plate.

9. The tail gas treatment equipment according to any one of claims 1 to 8, characterized in that: The device also includes a membrane filtration component, which is in communication with the ion capture component, and the membrane filtration component includes: A filter box, with a second air inlet and a second air outlet at both ends, respectively, wherein the second air inlet is used to receive the exhaust gas after passing through the ion capture component; The filter membrane is intercepted between the second air inlet and the second air outlet, and is used for filtering the residual first particles and second particles in the exhaust gas.

10. A method for treating tail gas, characterized in that: For treating tail gas by the tail gas treatment device according to any one of claims 1 to 9, the method comprises the following steps: Passing the exhaust gas into the catalytic component, and converting the first particles into easily ionizable third particles under a first preset condition; Passing the exhaust gas after passing through the catalytic component into an ionization component, and ionizing the first particles and the third particles in the exhaust gas into ionized particles under a second preset condition; The tail gas after passing through the ionization component is passed into the ion capture component, and the ion capture component is used to capture ionized particles.

11. A diffusion system, characterized in that: The exhaust gas treatment device comprises the exhaust gas treatment device according to any one of claims 1 to 9.

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