623results about "Particle charging/ionising stations" patented technology

An EUV photon source includes a plasma chamber filled with a gas mixture, multiple electrodes within the plasma chamber defining a plasma region and a central axis, a power supply circuit connected to the electrodes for delivering a main pulse to the electrodes for energizing the plasma around the central axis to produce an EUV beam output along the central axis, and a preionizer for ionizing the gas mixture in preparing to form a dense plasma around the central axis upon application of the main pulse from the power supply circuit to the electrodes. The EUV source preferably includes an ionizing unit and precipitator for collecting contaminant particulates from the output beam path. A set of baffles may be disposed along the beam path outside of the pinch region to diffuse gaseous and contaminant particulate flow emanating from the pinch region and to absorb or reflect acoustic waves emanating from the pinch region away from the pinch region. A clipping aperture, preferably formed of ceramic and / or Al2O3, for at least partially defining an acceptance angle of the EUV beam. The power supply circuit may generates the main pulse and a relatively low energy prepulse for homogenizing the preionized plasma prior to the main pulse. A multi-layer EUV mirror is preferably disposed opposite a beam output side of the pinch region for reflecting radiation along the central axis for output along the beam path of the EUV beam. The EUV mirror preferably has a curved contour for substantially collimating or focusing the reflected radiation. In particular, the EUV mirror may preferably have a hyperbolic contour.

A filtration device including a filtration medium having a plurality of nanofibers of diameters less than 1 micron formed into a fiber mat in the presence of an abruptly varying electric field. The filtration device includes a support attached to the filtration medium and having openings for fluid flow therethrough. A device for making a filter material. The device includes an electrospinning element configured to electrospin a plurality of fibers from a tip of the electrospinning element, a collector opposed to the electrospinning element configured to collect electrospun fibers on a surface of the collector, and an electric field modulation device configured to abruptly vary an electric field at the collector at least once during electrospinning of the fibers. A method for making a filter material. The method provides a support having openings for fluid flow therethrough, electrospins nanofibers across an entirety of the openings, and abruptly varies an electric field at the collector at least once during electrospinning of the fibers.

A process for forming a porous nanoscale membrane is described. The process involves applying a nanoscale film to one side of a substrate, where the nanoscale film includes a semiconductor material; masking an opposite side of the substrate; etching the substrate, beginning from the masked opposite side of the substrate and continuing until a passage is formed through the substrate, thereby exposing the film on both sides thereof to form a membrane; and then simultaneously forming a plurality of randomly spaced pores in the membrane. The resulting porous nanoscale membranes, characterized by substantially smooth surfaces, high pore densities, and high aspect ratio dimensions, can be used in filtration devices, microfluidic devices, fuel cell membranes, and as electron microscopy substrates.

The method and system herein pertain to an EUV photon source which includes a plasma chamber filled with a gas mixture, multiple electrodes within the plasma chamber defining a plasma region and a central axis, a power supply circuit connected to the electrodes for delivering a main pulse to the electrodes for energizing the plasma around the central axis to produce an EUV beam. The system can also include a preionizer for ionizing the gas mixture in preparing to form a dense plasma around the central axis upon application of the main pulse from the power supply circuit to the electrodes. A set of baffles may be disposed along the beam path outside of the pinch region to diffuse gaseous and contaminant particulate flow emanating from the pinch region and to absorb or reflect acoustic waves emanating from the pinch region away from the pinch region.

Air purifier systems particularly suitable for motor vehicles are provided that comprise an air flow passage; a glow discharging device; a photo-catalyst device; and a negative ion generator. Preferred air purifiers comprise a glow discharging device having mesh-structured electrodes which can purify air via dielectric barrier discharge, a photo-catalyst device that can further purify the air firstly purified by the glow discharging device, and a negative ion generator having nano tubes, which can treat the purified air with negative ions.

A modular ductwork assembly decontaminates an air stream circulating within an heating, ventilation and air conditioning (HVAC) system. The assembly includes (a) an ionizing module for removing particulates from the air stream, (b) a sterilization module for neutralizing airborne pathogens present in the air stream, (c) an ozone treatment module for neutralizing odoriferous constituents or volatile organic compounds (VOCs) present in the air stream, optionally (d) baffles for slowing and disrupting the flow rate and promoting turbulence in the air stream traveling through the modules and optionally (e) a fan module for directing a treated air stream. Each of the modules is arranged substantially adjacent to at least one of the other modules.

The present invention relates to a separating apparatus for separating particles from a fluid flow. Particularly, but not exclusively, the invention relates to a vacuum cleaner having such a separating apparatus for removing dust particles from a dust laden airstream. The separating apparatus includes a first cyclonic cleaning stage, a second cyclonic cleaning stage arranged downstream from the first cyclonic cleaning stage, and an elongate filter arranged downstream from the second cyclonic cleaning stage, wherein the filter is at least partially surrounded by the first cyclonic cleaning stage.

A method and apparatus for the separation of particles from a flow of gas, where both large, heavy and small, light particles can be separated off from the gas by means of the combined effect of an electrostatic attraction force and a centrifugal force in a centrifugal separator (10) of the type that comprises a rotor (14) that has a plurality of adjacent surface elements (16) with intermediate gas flow gaps (48) and that is mounted in such a way that it can rotate in a surrounding casing (12), which casing has an inlet (18) for unclean gas and an outlet (22) for clean gas and an outlet (24) for separated-of f particles. A charging unit (44) ionizes the particles upstream of the rotor (14). An electrical field is generated between adjacent surface elements (16) of the rotor in order to attract the ionized light particles towards a face of the surface elements by means of the electrostatic force. By means of the centrifugal force created by the rotor, the particles that have accumulated on the surface elements are thrown towards the inside of the casing and are led out through the outlet.

The invention relates to polymeric ultrafiltration or microfiltration membranes of, for instance, Halar, PVDF or PP, incorporating PVME or vinyl methyl ether monomers. The PVME may be present as a coating on the membrane or dispersed throughout the membrane or both. The membranes are preferably hydrophilic with a highly asymmetric structure with a reduced pore size and / or absence of macrovoids as a result of the addition of PVME. The PVME maybe cross-linked. The invention also relates to methods of hydrophilising membranes and / or preparing hydrophilic membranes via thermal or diffusion induced phase separation processed.

The present invention belongs to the technical field of air sterilizing and purification and in particular relates to a plasma air sterilizing and purifying device and an air sterilizing and purifying method. The plasma air sterilizing and purifying device comprises a plasma reactor, a pulse power supply, a fan component, a control device, a power adaptor, and a housing case, wherein the reactor is provided with positive electrodes formed by several nickel-chromium alloy wires or nickel-chromium alloy belts, and the two ends of each positive electrodes are fixed in the corresponding grooves on the micro-discharge preventive conductor rail; and a pulse power supply has a digital control circuit with an oscillator, an error amplifier and a PWM comparator inside which converts signals into a digital control current to control the width of the high-voltage pulse.

Porous polymeric membranes formed from a hydrophobic polymer, such as halar having membrane pores of a size sufficient to permit gas and / or vapor permeation 0.05 μm to 5 μm without permitting the flow of a hydrophilic fluid across the membrane. Pore distribution is uniform and porosity is high, in some cases up to 80%. Membranes may be in the form of a flay sheet or hollow fibre for example and can be used in a variety of applications such as stripping HF gas, degassing of caustic solution, chlorine gas / alkaline filtration, degassing tap water to remove dissolved chlorine. Processes used to make such membranes can be carried out using relatively non toxic solvents such as citric acid ethyl ester or glycerol triacetate.

An air purifier includes a vertically disposed housing provided with a wire gauze filter, electric fans and air filter elements. The electric fans draw outside air around the floor vertically into the bottom air intake port toward the top air output port of the housing so that the flow of air, when passed out of the air output port, flows upwards to a certain elevation and is then diffused and lowered in all directions around the housing. By means of the traction of the flow of air, the pressure difference of the convection of air between the low air pressure and the high air pressure at the bottom and top sides of the housing, high concentration of car waste gas, micro dust particles, hair dust, micro fibers and other harmful industrial odors that fall to the floor due to the effect of gravity or floating nearly above the floor are sucked into the inside of the housing by the low air pressure zone at the open bottom side of the housing and then removed by the filter elements.

Fine particles of dust and other pollutants in gas streams are agglomerated to form larger particles which are more easily filtered in downstream processing. In one embodiment, particles in successive portions of the gas stream are charged with opposite polarity, and the gas stream is introduced into an Evasé portion (12) to slow it down. Particles of different sizes have differential deceleration and therefore mix generally in the direction of flow, leading to agglomeration of oppositely-charged particles. In another embodiment, a gas stream is divided into substreams in respective parallel passages, and the particles in adjacent passages are charged to opposite polarity. Deflectors at the downstream end of the passages cause substreams of particles of opposite polarity to mix, with resultant agglomeration of oppositely charged particles.

An electrostatic room air cleaner includes a housing having a given profile and a plurality of electrostatic precipitation collector units arrayed in the housing with a common fan to circulate room air through the plurality of electrostatic precipitation collector units simultaneously. A total clean air delivery rate is delivered that is determined as the arithmetic sum of the clean air delivery rates of the plurality of electrostatic precipitation collector units arrayed in the housing of given profile. The greater the number of units arrayed, the smaller may be their size, and the easier they are to handle, maintain and replace.

An air cleaner electrode assembly includes an elongated collector electrode and a plurality of elongated discharge electrodes arranged around the collector electrode. A fan may move air in a direction parallel to a length of the electrodes. The collector electrode may have a plurality of distinct faces where at least one discharge electrode is associated with a corresponding face. A cleaning shuttle may be configured to ride on and remove debris from the elongated electrodes. A voltage differential across the electrodes and the fan speed may be adjusted independently of each other.

Embodiments of the present invention are directed to a method and apparatus for moving air using an air-conditioning system therein, whereby the air-conditioning system preferably includes at least one emitter electrode, at least one collector electrode, at least one driver electrode disposed adjacent to the collector electrode, and / or at least one trailing electrode positioned downstream of the collector electrode. The collector electrode and the driver electrode are removable from the device. In one embodiment, the driver electrodes are removable from the device and / or the collector electrode. The ability of remove the collector electrode as well as driver electrode allow for easy cleaning of the electrodes. In one embodiment, the present device includes a removable exhaust grill upon which the driver electrode and / or the trailing electrode are coupled to. The removable grill allows the user to easily clean the driver electrode without having to remove the collector electrode.

An air filtration system including a filter (4) for separation of particles and an ionizer (3) for ionization of the air. In use of the system, ionization of the air occurs before the air passes the filter (4). The filter (4) is made up of fibers of polypropylene mixed with acrylic.

When an ionization section is taken out of a main body housing of a conventional air cleaner in order to wash the ionization section, an ionization line may be cut by being accidentally touched. In order to avoid this problem, a pre-filter (7) is mounted on a front surface of an ionization and dust collection unit (6) so as to be detachable. The pre-filter (7) is slidably guided by guide furrings (23) in a sub-frame (12), and is mounted on a front surface of the sub-frame (12). When the pre-filter (7) is mounted, ionization lines (15) are not exposed, so that the pre-filter (7) protects the ionization lines (15). When the ionization and dust collection unit (6) is detached from the main body housing, therefore, there is no problem that the ionization lines (15) might be cut by being accidentally touched with worker's hands, for example.

Positive and negative electrode needles, an air-blowing outlet, and a protection cover for covering these electrode needles and the air-blowing outlet are attached to an electrode cartridge which is attached to a housing, and an air-blowing hole positioned in front of the air-blowing outlet in a concentric manner therewith, for blowing out air from the air-blowing outlet toward the outside, and two air-flowing-out holes positioned in a concentric manner with the respective positive and negative electrode needles, and respectively surrounding outer peripheries of respective tip end portions of respective electrode needles via respective gaps for flowing out the air are formed in the protection cover.

A multi-stage particulate matter collector of the type used to collect particles from waste industrial gas. The collector can contain multiple narrow and wide zones formed by a plurality of parallel corrugated plates. Contained in the narrow zones are elongated electrodes with sharp leading and / or trailing edges. These electrodes provide a non-uniform electric field near their sharp edges leading to corona discharge. The corona discharge causes particulate matter in the gas flow to become charged. The region in narrow zones away from the sharp edges of the electrodes resembles a parallel plate capacitor with relatively uniform electric field. In this region, particles can be collected on the plates and on the electrode. Wide regions can contain barrier filters (bag filters) with conductive surfaces. The electric field is also relatively uniform in this region causing electrostatic collection on the plates and filter surface. Gas exits the array through the sides of the barrier filters which provides additional highly efficient filtering.

There is provided a fine particle sensor for detecting fine particles in exhaust gas, including an ion generating unit for generating ions by corona discharge, a charging unit for charging the fine particles by some of the generated ions, an ion trapping ions for trapping a remainder of the generated ions and a casing for accommodating therein the charging unit and the ion trapping unit in a given arrangement direction. The casing has a gas inlet hole and a gas outlet hole formed in a circumferential wall thereof so that the exhaust gas flows in the charging unit through the gas inlet hole and flows out of the ion trapping unit through the gas outlet hole. The gas inlet hole and the gas outlet hole are arranged in such a manner as to at least partially overlap each other when viewed in the given arrangement direction.

A gas purifying device (10) includes a first electric field forming unit which forms an electric field for discharge in a gas channel (36) in which a purification target gas (EG) flows to generate a discharge plasma (P), and charges and burns PM included in the purification target gas (EG) by action of the discharge plasma (P), a second electric field forming unit which forms an electric field for dust collection to capture the charged PM by an electrical dust collection function and draw out the discharge plasma (P) to the gas channel side, and a charge electrode (35) for charging a flowing purification target gas (EG), which is disposed on an upstream side positions where the first electric field forming unit and the second electric field forming unit are disposed.

A dual-filter electrically enhanced air-filtration apparatus and method are described. One embodiment includes an upstream electrically enhanced filter; a downstream electrically enhanced filter; a first control electrode adjacent to an upstream side of the upstream electrically enhanced filter; a second control electrode adjacent to a downstream side of the downstream electrically enhanced filter; and an ionizing electrode disposed between the upstream and downstream electrically enhanced filters, the ionizing electrode having an electrical potential with respect to the first and second control electrodes. Optional field electrodes may be included to enhance the electric fields associated with the upstream and downstream electrically enhanced filters.

A process for measuring particle concentrations in a gas using an ejector for producing an essentially constant sample flow and for efficient mixing of the particle-containing sample and and essentially clean, ionized gas. The invention also relates to an apparatus implementing such process. The process and the apparatus can be utilized for example in measuring particle concentrations in an exhaust system of a combustion engine.

Contaminant particles travelling with a projection beam in a lithographic projection apparatus are ionized. A purge gas may be attracted towards getter plates provided upstream of the purge gas supply. A magnetic field traps electrons generated by the ionizer to improve the ionization of the purge gas. The contaminant particles can be ionized by generating a plasma in a tube having a greater length than width.

The invention relates to a device for charging or adjusting the charge of gas-borne particles into a defined charge distribution under utilization of corona discharge in the aerosol space. In addition to an appropriate geometry of the charger and the electrodes, the voltage waveform and the voltage regulation are of great significance for the result. The application further relates to a method for operating the device.

A filter is made with heat-insulating ceramic fibers, and where the filter is increased in pressure loss due to particulate matter captured after filtration of exhaust gas, gas flow is blocked, a heating element is used to heat the surface of the filter, thereby burning and removing particulate matter. The filter is of heat insulating properties, by which a heat insulating material is arranged near the particulate matter capturing face of the filter, and the heating element is incorporated between the surface of the filter and the heat insulating material. The filter can be regenerated at a higher heating efficiency in a smaller quantity of thermal energy. The heat insulating material is also used as a filter, by which the apparatus can be made more compact. A charging element is arranged upstream of the filter material, by which the filter material is increased in particulate matter capturing performance, thereby suppressing the rate of increase in the pressure loss and improving heating efficiency of particulate matter.