A laser drilling apparatus for processing silicon carbide coated graphite disc

Abstract

The present application relates to the field of laser drilling, and more particularly to a laser drilling device for processing silicon carbide coated graphite disc. It comprises an operation box, a positioning heating assembly, a laser drilling assembly and a supporting ventilation assembly. The operation box is provided with a feeding port on one side, and a belt feeding assembly I penetrating through the feeding port and a belt feeding assembly II above the belt feeding assembly I are arranged inside; the positioning heating assembly is dispersedly arranged in two layers along the feeding direction of the belt feeding assembly I; the laser drilling assembly with a laser head is dispersedly arranged in two layers along the feeding direction of the belt feeding assembly II; and the supporting ventilation assembly is arranged corresponding to the positioning heating assembly. Through the cooperation and linkage of the positioning heating assembly, the laser drilling assembly and the supporting ventilation assembly, batch, efficient and accurate laser drilling is realized, and the problems of silicon carbide coating peeling and graphite slag flying during drilling are effectively alleviated.

Description

TECHNICAL FIELD

[0001] The application relates to the field of laser drilling, and in particular to a laser drilling device for processing a silicon carbide coated graphite disc. BACKGROUND

[0002] The silicon carbide coated graphite disc is prepared by physical or chemical vapor deposition, spraying and other methods to prepare a layer of silicon carbide protective layer on the surface of graphite. Silicon carbide (SiC) is a material with high temperature resistance, corrosion resistance and high hardness, which is made of quartz sand, petroleum coke (or coal coke), wood chips (salt is needed when producing green silicon carbide) and other raw materials through resistance furnace high temperature smelting, and is a compound of C element and Si element. The prepared silicon carbide protective layer can be firmly attached to the graphite matrix, making the graphite matrix surface dense and free of voids, and endowing the graphite matrix with special properties such as oxidation resistance, acid and alkali resistance and corrosion resistance.

[0003] The graphite material itself has good thermal conductivity, and the silicon carbide coating further enhances its high temperature resistance and oxidation resistance. Drilling can increase the heat dissipation area of the graphite disc surface, which is beneficial to the rapid transfer and dissipation of heat, thereby improving the heat dissipation performance of the graphite disc. Through drilling design, the weight of the graphite disc can be effectively reduced without sacrificing the overall structural strength of the graphite disc. For equipment that needs to withstand high temperature and high strength environment, this is an important optimization direction. In some applications, the silicon carbide coated graphite disc needs to serve as a channel or support structure for fluid flow. Drilling can optimize the flow path of the fluid, reduce the flow resistance and improve the transmission efficiency of the fluid.

[0004] A laser drilling device for processing a silicon carbide coated graphite disc is disclosed in Chinese patent document CN115781038B, which comprises a rack, a laser head moving device, a graphite plate moving device and a laser head moving device, which can realize the movement of the laser head in the first direction, the second direction and the vertical direction.

[0005] The above-mentioned laser drilling device for processing a silicon carbide coated graphite disc has the following disadvantages: 1. The silicon carbide coated graphite disc is prepared by physical or chemical vapor deposition, spraying and other methods to prepare a layer of silicon carbide protective layer on the surface of graphite. During laser drilling, if the local energy is too high or the drilling scanning method is improper, the silicon carbide coating may fall off or be damaged, thereby affecting the performance of the silicon carbide coating after drilling. 2. A certain amount of graphite slag will be generated during drilling. The graphite slag will adhere to the surface of the silicon carbide coated graphite disc, thereby affecting the processing effect, and the graphite slag itself also has certain recyclability. SUMMARY

[0006] To address the problems existing in the background technology, a laser drilling device for processing silicon carbide coated graphite disks is proposed. Through the cooperation and linkage of the positioning heating component, the laser drilling component, and the supporting ventilation component, batch, efficient, and precise laser drilling is achieved, and the problems of silicon carbide coating peeling and graphite slag flying during drilling are effectively alleviated.

[0007] This invention proposes a laser drilling device for processing silicon carbide coated graphite disks, including an operating box, a positioning heating component, a laser drilling component, and a support ventilation component. A material inlet is located on one side of the control box, and a belt conveyor assembly 1 passing through the material inlet and a belt conveyor assembly 2 located above the belt conveyor assembly 1 are installed inside. Positioning heating assemblies are arranged in two layers along the conveying direction of belt conveyor assembly 1. Each set of positioning heating assemblies positions the silicon carbide coated graphite disks on both sides through vacuum adsorption and heats the silicon carbide coated graphite disks on both sides through electrical conductivity. Laser drilling assemblies are arranged in two layers along the conveying direction of belt conveyor assembly 2. Multiple sets of laser drilling assemblies are equipped with laser heads of different specifications that can move in circular or spiral trajectories. Support ventilation assemblies are arranged in multiple sets above and below the positioning heating assemblies 1 on both sides, and guide and support belt conveyor assembly 1 through a groove structure. The upper support ventilation assembly supplies hot air, which both insulates and cleans the silicon carbide coated graphite disks during drilling, while the lower support ventilation assembly extracts air, both to collect graphite slag and to cool the silicon carbide coated graphite disks after drilling.

[0008] Preferably, the belt conveyor assembly includes two sets of belts and a drive unit for driving the two sets of belts to rotate synchronously; the positioning heating assembly is arranged between the two sets of belts.

[0009] Preferably, the positioning heating assembly includes an insulating positioning sleeve with open ends; an adsorption component is provided inside the insulating positioning sleeve, and conductive plates with adsorption holes are provided at both ends; a positioning groove is formed between the conductive plates and the opening of the insulating positioning sleeve; and a second driving component is provided on the outer periphery of the insulating positioning sleeve to drive the insulating positioning sleeve to rotate horizontally and flip vertically.

[0010] Preferably, a ring of positioning elements is provided on the positioning groove; an installation groove is provided on the groove wall of the positioning groove; the positioning elements include positioning wheels that are driven by a three-way drive unit to move in and out of the installation groove; the positioning wheels are rotatable and made of insulated material.

[0011] Preferably, the adsorption component includes an adsorption box for adsorption at both ends; the adsorption box divides the interior of the insulating positioning sleeve into two independent adsorption chambers; the two adsorption chambers correspond one-to-one with two conductive plates with adsorption holes; an annular filter screen is set in the center of the adsorption box, an air pump is set in the outer periphery of the interior, and adsorption valves corresponding one-to-one with the two adsorption chambers are respectively set on the upper and lower end of the box cover; the air outlet of the adsorption valve is connected to the inner periphery of the filter screen.

[0012] Preferably, the belt conveying assembly two comprises a belt two and a driving member four for driving the belt two to rotate synchronously; the driving member four can also drive the belt two to move up and down and move forward and backward; a plurality of laser perforating assemblies are arranged along the belt two, and the positions are adjusted by moving up and down, left and right, and forward and backward.

[0013] Preferably, the laser perforating assembly comprises a base connected to the belt two through a mounting seat two; a rotating seat is arranged on the base in a rotating manner; a mounting sleeve is driven by a driving member five to move horizontally on the rotating seat, and the moving track is perpendicular to the rotating axis of the rotating seat; and a laser head is detachably mounted on the mounting sleeve.

[0014] Preferably, the supporting ventilation assembly comprises a ventilation box arranged through the operation box; a ventilator is arranged in the ventilation box; a filter core is arranged on one side of the ventilation box extending out of the operation box; a supporting ventilation frame is arranged on one side of the ventilation box extending into the operation box, and a ventilation head is arranged on the supporting ventilation frame; the supporting ventilation assembly arranged corresponding to the upper layer of the belt one is provided with a heating ventilator; and the supporting ventilation assembly arranged corresponding to the lower layer of the belt one is provided with an exhaust ventilator.

[0015] Preferably, four supporting ventilation assemblies are arranged, which are respectively arranged corresponding to the two sides of the upper layer of the belt one and the two sides of the lower layer of the belt one, and are arranged in a mirror image.

[0016] Preferably, two layers of supporting ventilation frames are arranged on each supporting ventilation assembly; the two layers of supporting ventilation frames form a groove structure, and support and guide the belt one by respectively fitting the upper and lower ends of the belt one.

[0017] Compared with existing technologies, this invention has the following beneficial technical effects: By setting up an upper positioning heating component and a belt conveyor component, and a lower laser drilling component and a belt conveyor component, the laser head can be flexibly changed while performing cyclic drilling. The positioning heating component uses an adsorption component and a positioning component to position the silicon carbide coated graphite disk by adsorption and clamping, and is designed to rotate in multiple directions, making the silicon carbide coated graphite disk stable while its position is adjustable to meet the needs of different drilling scenarios. Based on the properties of graphite, a conductive plate is used to preheat the silicon carbide coated graphite disk by energizing it. On the one hand, preheating can prevent localized overheating during laser drilling, which could cause the silicon carbide coating to peel off. On the other hand, preheating can cause pyrolysis reactions of impurities such as grease and organic matter on the surface of the graphite disk, thereby removing them from the surface. The support ventilation assembly not only guides and supports the belt conveyor assembly through its grooved structure, but also features an upper support ventilation assembly that supplies hot air to both insulate and clean the silicon carbide-coated graphite disk during drilling. The lower support ventilation assembly extracts air to collect graphite slag and cool the silicon carbide-coated graphite disk after drilling. During drilling, the laser head moves in a circular or spiral trajectory to ensure uniform laser energy distribution. Simultaneously, the drilling position is adjusted by moving the laser head and rotating the silicon carbide-coated graphite disk. Ultimately, through the coordinated operation of these structures, batch, efficient, and precise laser drilling is achieved, effectively mitigating the problems of silicon carbide coating peeling and graphite slag flying during drilling. Attached Figure Description

[0018] Figure 1 This is an external view of the laser drilling equipment used for processing silicon carbide coated graphite disks in this invention;

[0019] Figure 2 This is a cross-sectional view of the laser drilling equipment used for processing silicon carbide coated graphite disks in this invention;

[0020] Figure 3 This is a schematic diagram of the structure of the belt conveyor assembly and the positioning heating assembly in this invention;

[0021] Figure 4 This is a schematic diagram of the positioning heating component in this invention;

[0022] Figure 5 This is a cross-sectional view of the positioning heating component in this invention;

[0023] Figure 6 for Figure 5 Enlarged view of point A in the middle;

[0024] Figure 7 for Figure 5 Enlarged view at point B in the middle;

[0025] Figure 8Split view of the suction accessory in the application;

[0026] Figure 9 Structure diagram of the belt feeding assembly two and the laser drilling assembly in the application;

[0027] Figure 10 Structure diagram of the driving member four in the application;

[0028] Figure 11 Split view of the laser drilling assembly in the application;

[0029] Figure 12 Structure diagram of the support ventilation assembly in the application.

[0030] Label: 1, operation box; 101, feeding port; 2, belt feeding assembly one; 201, belt one; 202, transmission roller; 203, motor one; 3, positioning heating assembly; 301, insulating positioning sleeve; 302, conductive plate; 303, suction accessory; 30301, suction box; 30302, box cover; 30303, suction valve; 30304, filter screen; 30305, air suction pump; 304, mounting frame; 305, motor two; 306, mounting seat one; 307, positioning member; 30701, positioning wheel; 30702, translation shaft; 30703, lead screw one; 30704, motor four; 308, mounting ring; 309, gear; 310, tooth ring; 30101, mounting groove; 4, belt feeding assembly two; 401, belt two; 402, driving member four; 40201, lifting block; 40202, lead screw two; 40203, motor five; 40204, driving seat; 40205, rotating seat; 40206, threaded shaft; 40207, sleeve belt cylinder; 40208, guide rod; 5, laser drilling assembly; 501, base; 502, mounting seat two; 503, rotating seat; 504, lead screw three; 505, translation block; 506, mounting sleeve; 507, laser head; 6, support ventilation assembly; 601, ventilation box; 602, support ventilation frame; 603, ventilation head; 604, ventilator; 605, filter element; 7, silicon carbide coated graphite disc. DETAILED DESCRIPTION

[0031] Example one

[0032] As Figures 1-2As shown, the laser drilling equipment for processing silicon carbide coated graphite disc is provided, which comprises an operation box 1, a positioning and heating assembly 3, a laser drilling assembly 5 and a supporting and ventilation assembly 6. The operation box 1 is provided with a feeding port 101 on one side, and a belt feeding assembly one 2 penetrating through the feeding port 101 and a belt feeding assembly two 4 above the belt feeding assembly one 2 are arranged inside; the positioning and heating assembly 3 is dispersedly arranged in two layers along the feeding direction of the belt feeding assembly one 2, each positioning and heating assembly 3 positions the silicon carbide coated graphite disc 7 on both sides by vacuum adsorption and heats the silicon carbide coated graphite disc 7 on both sides by conduction; the laser drilling assembly 5 is dispersedly arranged in two layers along the feeding direction of the belt feeding assembly two 4, and a plurality of laser heads 507 with different specifications and capable of moving in circular or spiral tracks are arranged on the laser drilling assembly 5; the supporting and ventilation assembly 6 is arranged in multiple groups above and below the positioning and heating assembly 3 in two layers, and guides and supports the belt feeding assembly one 2 through the groove structure; the upper supporting and ventilation assembly 6 sends hot air, which on one hand keeps the silicon carbide coated graphite disc 7 warm during drilling and on the other hand cleans the silicon carbide coated graphite disc 7 during drilling, and the lower supporting and ventilation assembly 6 exhausts air, which on one hand collects graphite slag and on the other hand cools the silicon carbide coated graphite disc 7 after drilling.

[0033] As shown, Figure 3 the belt feeding assembly one 2 comprises two groups of belts one 201 and a driving member one driving the two groups of belts one 201 to rotate synchronously, and the positioning and heating assembly 3 is arranged between the two groups of belts one 201.

[0034] It should be further explained that the driving member one comprises a motor one 203 and a transmission roller 202 driven by the motor one 203, and the two ends of the belt one 201 are respectively sleeved on the corresponding side of the transmission roller 202.

[0035] By arranging the double-layer belt structure, sufficient space is reserved for the positioning and heating assembly 3 to realize overturning of the positioning and heating assembly 3 and drilling of the silicon carbide coated graphite disc 7 on both sides.

[0036] As shown, Figures 4-5 the positioning and heating assembly 3 comprises an insulating positioning sleeve 301 with open ends; the insulating positioning sleeve 301 is internally provided with a suction member 303, and the two ends are provided with conductive plates 302 with suction holes; the conductive plates 302 and the sleeve opening of the insulating positioning sleeve 301 form a positioning groove; and the outer periphery of the insulating positioning sleeve 301 is provided with a driving member two driving the insulating positioning sleeve 301 to rotate horizontally and overturn vertically.

[0037] It should be further explained that, as shown, Figure 6As shown, the second driving member includes a mounting frame 304 sleeved on the outer periphery of the insulating positioning sleeve 301; two sides of the mounting frame 304 are provided with the second motor 305, and the mounting seat one 306 is connected through the second motor 305; the mounting seat one 306 is connected on the belt one 201; the inner wall of the mounting frame 304 is provided with a gear ring 310 coaxial with the insulating positioning sleeve 301; the outer wall of the insulating positioning sleeve 301 is provided with a mounting ring 308 coaxial with the gear ring 310; the mounting ring 308 is provided with a gear 309 driven to rotate by the third motor; the gear 309 extends into the mounting frame 304 and meshes with the gear ring 310.

[0038] Before laser drilling, the silicon carbide coated graphite disc 7 is respectively adsorbed in the upper and lower positioning grooves. The silicon carbide coated graphite disc 7 is conductive through the conductive plate 302. When the current flows in the graphite disc, a certain resistance is encountered, thereby generating heat, causing the graphite disc to heat, and further achieving the effect of preheating. On the one hand, preheating can avoid local temperature rise during laser drilling to cause the silicon carbide coating to peel off. On the other hand, preheating can cause the impurities such as grease and organic matter on the surface of the graphite disc to undergo a pyrolysis reaction, thereby removing them from the surface.

[0039] In order to avoid oxidation of the silicon carbide coated graphite disc 7 during electrification, it is selected to be electrified in a low-oxygen or inert gas environment to reduce contact and reaction with oxygen. Inert gases that can be used include argon, nitrogen, etc.

[0040] During drilling, the gear 309 meshes with the gear ring 310, the third motor drives the insulating positioning sleeve 301 to rotate from the origin, and cooperates with the positioning and heating assembly 3 to move, so that the position of drilling can be adjusted. The insulating positioning sleeve 301 is driven to flip up and down by the second motor 305, so that the silicon carbide coated graphite disc 7 for drilling can be switched.

[0041] As shown in Figure 7 A circle of positioning members 307 is arranged on the positioning groove; a mounting groove 30101 is arranged on the groove wall of the positioning groove; the positioning member 307 includes a positioning wheel 30701 driven to translate in and out of the mounting groove 30101 by the third driving member; the positioning wheel 30701 is rotatable and made of insulating material.

[0042] It needs to be further explained that a guide groove is arranged on the groove wall of the mounting groove 30101; the third driving member includes a fourth motor 30704 and a lead screw one 30703 driven to rotate by the fourth motor 30704; the lead screw one 30703 is located in the guide groove; a translation shaft 30702 penetrates through the positioning wheel 30701, and the middle part is rotatably connected with the positioning wheel 30701, and the two ends respectively extend into the guide groove and are threadedly connected with the lead screw one 30703.

[0043] When feeding, a positioning wheel 30701 moves horizontally to match the circumference size of the silicon carbide coated graphite disc 7 (slightly larger than the circumference size of the silicon carbide coated graphite disc 7). The silicon carbide coated graphite disc 7 is placed in the positioning groove, and the positioning wheel 30701 rolls to assist it to be attached to the conductive plate 302. Then the screw rod 30703 rotates, and the translation shaft 30702 drives the positioning wheel 30701 to move close to the outer wall of the silicon carbide coated graphite disc 7, and the silicon carbide coated graphite disc 7 is clamped and positioned at multiple points from the outer circumference.

[0044] As shown in Figure 8 , the suction accessory 303 includes a suction box 30301 that suctions two ends; the suction box 30301 divides the inner part of the insulating positioning sleeve 301 into two independent suction cavities; the two suction cavities correspond to the two conductive plates 302 with suction holes one by one; the inner center of the suction box 30301 is provided with an annular filter screen 30304, the inner periphery is provided with a suction pump 30305, and the box covers 30302 at the upper and lower ends are respectively provided with suction valves 30303 corresponding to the two suction cavities one by one; the gas outlet end of the suction valve 30303 is connected through the inner circumference of the filter screen 30304.

[0045] After positioning, negative pressure is formed on the two conductive plates 302 through the cooperation of the suction valve 30303 and the suction pump 30305. The silicon carbide coated graphite disc can be suctioned and fixed. When drilling, if a through hole is formed, the drilling dust enters the filter screen 30304 of the suction box 30301 through the suction holes on the conductive plate 302, achieving the effect of cleaning the silicon carbide coated graphite disc 7.

[0046] As shown in Figure 9 , the belt feeding assembly two 4 includes a belt two 401 and a driving member four 402 that drives the belt two 401 to rotate synchronously; the driving member four 402 can also drive the belt two 401 to move up and down and move forward and backward; a plurality of laser drilling assemblies 5 are arranged along the belt two 401, and the positions are adjusted by moving up and down, left and right, forward and backward.

[0047] It needs to be further explained that, as shown in Figure 10 , the driving member four 402 includes a screw rod two 40202 that is driven to rotate by a motor five 40203; a lifting block 40201 is connected to the screw rod two 40202 through threads to realize lifting, and is also connected to a driving seat 40204 with a motor six; a rotating seat 40205 with a motor seven is driven by the motor six to rotate and sleeve the driving seat 40204; a threaded shaft 40206 is located between the two rotating seats 40205 and is driven to rotate by a motor seven; a sleeve belt cylinder 40207 is connected to the threaded shaft 40206 through threads to realize horizontal movement of the whole; the two ends of the belt two 401 are respectively sleeved on the corresponding side sleeve belt cylinder 40207.

[0048] It needs to be further explained that the guide rod 40208 of the movable through sleeve band cylinder 40207 is arranged between the two rotating seats 40205; the guide rod 40208 is arranged in parallel with the threaded shaft 40206, and guides the horizontal movement of the sleeve band cylinder 40207.

[0049] By rotating the threaded shaft 40206, the belt two 401 is driven to move horizontally forward and backward. By rotating the rotating seat 40205, the belt two 401 is driven to rotate left and right. By lifting the lifting block 40201, the belt two 401 is driven to move up and down, finally realizing the position adjustment of the laser drilling assembly 5.

[0050] As shown in Figure 11 , the laser drilling assembly 5 includes a base 501 connected to the belt two 401 through a mounting seat two 502; a rotating seat 503 is driven by a motor eight and is rotatably arranged on the base 501; a mounting sleeve 506 is driven by a driving piece five and moves horizontally on the rotating seat 503, and the moving track is perpendicular to the rotation axis of the rotating seat 503; a laser head 507 is detachably mounted on the mounting sleeve 506.

[0051] It needs to be further explained that a sliding groove is arranged on the rotating seat 503; the driving piece five includes a lead screw three 504 driven by a motor nine and rotating in the sliding groove; a translation block 505 moves horizontally in the sliding groove by being threadedly connected with the lead screw three 504; the mounting sleeve 506 is connected to the translation block 505.

[0052] It needs to be further explained that the laser head 507 is clamped on the mounting sleeve 506.

[0053] When laser drilling is performed, the laser head 507 can drill along a circular or spiral track by rotating the rotating seat 503 and moving the mounting sleeve 506 horizontally. This drilling method can uniformly distribute laser energy and reduce local overheating, thereby reducing the risk of coating peeling.

[0054] As shown in Figure 12 , the support ventilation assembly 6 includes a ventilation box 601 arranged through the operation box 1; a ventilation fan 604 is located in the ventilation box 601; a filter core 605 is located on the side of the ventilation box 601 extending out of the operation box 1; a support ventilation frame 602 is located on the side of the ventilation box 601 extending into the operation box 1, and a ventilation head 603 is arranged; corresponding to the support ventilation assembly 6 arranged on the upper layer of the belt one 201, the ventilation fan 604 is a heating air supply fan; corresponding to the support ventilation assembly 6 arranged on the lower layer of the belt one 201, the ventilation fan 604 is an exhaust fan.

[0055] By setting different ventilators 604, the support ventilation assembly 6 corresponding to the upper layer of the first belt 201 sends hot air to the upper layer of the silicon carbide coated graphite disc 7 in the hole to achieve the purpose of preheating and cleaning. The support ventilation assembly 6 corresponding to the lower layer of the first belt 201 draws air to the lower layer of the silicon carbide coated graphite disc 7 after the hole to achieve the purpose of collecting graphite slag and cooling and shaping.

[0056] It needs to be further explained that the support ventilation assembly 6 is provided with four groups, which correspond to the two sides of the upper layer of the first belt 201 and the two sides of the lower layer of the first belt 201 respectively, and are arranged in mirror image. Since the first belt 201 is provided with two groups, the support ventilation assembly 6 corresponding to the first belt 201 is provided with four groups, so that the silicon carbide coated graphite disc 7 on the two groups of first belts 201 can be ventilated specifically.

[0057] It needs to be further explained that two layers of support ventilation racks 602 are arranged on each group of support ventilation assemblies 6; the two layers of support ventilation racks 602 form a groove structure, which supports and guides the first belt 201 by fitting the upper and lower ends of the first belt 201 respectively, and maintains the stability of the moving track of the silicon carbide coated graphite disc 7.

[0058] Embodiment two

[0059] The embodiment proposes a method for laser drilling of a silicon carbide coated graphite disc, which uses the laser drilling equipment for processing of the silicon carbide coated graphite disc in embodiment one, and the specific steps are as follows:

[0060] S1, with the rotation of the first belt 201, the empty positioning heating assembly 3 moves to the outside of the material conveying port 101;

[0061] S2, place the two silicon carbide coated graphite discs 7 to be drilled one above the other in the positioning groove, and roll the positioning wheel 30701 to assist it to fit with the conductive plate 302; then rotate the lead screw 30703, and move the positioning wheel 30701 to the outer wall of the silicon carbide coated graphite disc 7 to clamp and position the silicon carbide coated graphite disc 7 at multiple points from the periphery;

[0062] S3, form negative pressure on the two conductive plates 302 by cooperation of the adsorption valve 30303 and the air pump 30305; the silicon carbide coated graphite disc 7 is adsorbed and fixed;

[0063] S4, move the positioning heating assembly 3 carrying the silicon carbide coated graphite disc 7 to be drilled into the operation box 1;

[0064] S5, rotate the second belt 401 to adjust the required laser head 507 to move above the silicon carbide coated graphite disc 7 to be drilled;

[0065] S6, after the conductive plate 302 is electrified, the current flows in the graphite disc, making the graphite disc heat up, thereby achieving the effect of preheating;

[0066] S7, start drilling, rotate by rotating the seat 503 and moving the installation sleeve 506 horizontally, and the laser head 507 drills along a circular or spiral trajectory; by moving forward and backward, left and right, and up and down, the position of the upper laser head 507 is further adjusted; by rotating in multiple directions, the position of the lower silicon carbide coated graphite disc 7 is further adjusted to match the drilling requirements;

[0067] At this time, the support ventilation assembly 6 arranged on the upper layer of the belt 201 sends hot air to the silicon carbide coated graphite disc 7 in the upper layer drilling hole to achieve the purpose of preheating and cleaning;

[0068] If a through hole is formed, the drilling dust enters the filter screen 30304 of the suction box 30301 through the suction holes on the conductive plate 302;

[0069] S8, after the drilling is completed, the positioning and heating assembly 3 carrying the silicon carbide coated graphite disc 7 moves to the lower layer; the support ventilation assembly 6 arranged on the lower layer of the belt 201 draws air to the silicon carbide coated graphite disc 7 after drilling in the lower layer to collect graphite slag while cooling and shaping;

[0070] S9, the positioning and heating assembly 3 moves to the outside of the material conveying port 101, and the suction and clamping positioning of the silicon carbide coated graphite disc 7 is released;

[0071] S10, replace the silicon carbide coated graphite disc 7 to be drilled, and cycle the work.

[0072] The embodiments of the application are described in detail above in combination with the drawings, but the application is not limited thereto, and various changes can be made within the knowledge of those skilled in the art without departing from the purpose of the application.

Claims

1. A laser drilling device for processing silicon carbide coated graphite disks, characterized in that, include: The control box (1) has a material inlet (101) on one side, and a belt conveyor assembly (2) that passes through the material inlet (101) and a belt conveyor assembly (4) located above the belt conveyor assembly (2). Positioning heating component (3) is arranged in two layers along the conveying direction of belt conveyor component (2). Each group of positioning heating components (3) positions the silicon carbide coated graphite disks (7) on both sides by vacuum adsorption and heats the silicon carbide coated graphite disks (7) on both sides by conductive means. Laser drilling assembly (5) is arranged in two layers along the conveying direction of belt conveyor assembly (4). Each of the multiple laser drilling assemblies (5) is equipped with a laser head (507) of different specifications that can make circular or spiral movement trajectories. And a support ventilation component (6), which is set with multiple sets of positioning heating components (3) on the upper and lower layers, and guides and supports the belt conveyor component (2) through the groove structure; the upper support ventilation component (6) sends in hot air, which on the one hand keeps the silicon carbide coated graphite disk (7) in the hole in the heat, and on the other hand cleans the silicon carbide coated graphite disk (7) in the hole in the hole; the lower support ventilation component (6) draws air, which on the one hand collects graphite slag, and on the other hand cools the silicon carbide coated graphite disk (7) after the hole is drilled; The positioning heating assembly (3) includes an insulating positioning sleeve (301) with open ends; an adsorption component (303) is provided inside the insulating positioning sleeve (301), and conductive plates (302) with adsorption holes are provided at both ends; a positioning groove is formed between the conductive plate (302) and the opening of the insulating positioning sleeve (301); a second driving component is provided on the outer periphery of the insulating positioning sleeve (301) to drive the insulating positioning sleeve (301) to rotate horizontally and flip vertically; A ring of positioning elements (307) is provided on the positioning groove, and an installation groove (30101) is provided on the groove wall of the positioning groove; the positioning element (307) includes a positioning wheel (30701) that is driven by a three-wheel drive to move in and out of the installation groove (30101); the positioning wheel (30701) is rotatable and made of insulated material; The adsorption component (303) includes an adsorption box (30301) for adsorption at both ends; the adsorption box (30301) divides the interior of the insulating positioning sleeve (301) into two independent adsorption chambers; the two adsorption chambers correspond one-to-one with two conductive plates (302) with adsorption holes; an annular filter screen (30304) is provided in the center of the adsorption box (30301), and an air pump (30305) is provided on the outer periphery of the interior; the upper and lower end covers (30302) are respectively provided with adsorption valves (30303) corresponding one-to-one with the two adsorption chambers; the air outlet of the adsorption valve (30303) is connected to the inner periphery of the filter screen (30304).

2. The laser drilling equipment for processing silicon carbide coated graphite disks according to claim 1, characterized in that, The belt conveyor assembly (2) includes two sets of belts (201) and a drive unit that drives the two sets of belts (201) to rotate synchronously; the positioning heating assembly (3) is arranged between the two sets of belts (201).

3. The laser drilling equipment for processing silicon carbide coated graphite disks according to claim 1, characterized in that, The belt conveyor assembly 2 (4) includes belt 2 (401) and drive component 4 (402) that drives belt 2 (401) to rotate synchronously; drive component 4 (402) can also drive belt 2 (401) to move up and down and back and forth; multiple sets of laser drilling components (5) are set along belt 2 (401) and their positions can be adjusted by moving up and down, left and right and back and forth.

4. The laser drilling equipment for processing silicon carbide coated graphite disks according to claim 3, characterized in that, The laser drilling assembly (5) includes a base (501) connected to a belt (401) via a mounting base (502); a rotating seat (503) is rotatably mounted on the base (501); a mounting sleeve (506) is driven by a drive component (5) to move horizontally on the rotating seat (503), and the movement trajectory intersects perpendicularly with the rotation axis of the rotating seat (503); and a laser head (507) is detachably mounted on the mounting sleeve (506).

5. The laser drilling equipment for processing silicon carbide coated graphite disks according to claim 2, characterized in that, The ventilation support assembly (6) includes a ventilation box (601) that runs through the control box (1); a fan (604) located inside the ventilation box (601); a filter element (605) located on the side of the ventilation box (601) that extends out of the control box (1); and a ventilation support frame (602) located on the side of the ventilation box (601) that extends into the control box (1), and is provided with a ventilation head (603). The upper support ventilation assembly (6) corresponding to belt 1 (201) is provided with a heating fan (604); The support ventilation component (6) is set on the lower layer of the corresponding belt (201), and the ventilation fan (604) is an exhaust fan.

6. The laser drilling equipment for processing silicon carbide coated graphite disks according to claim 5, characterized in that, Four sets of support ventilation components (6) are provided, corresponding to both sides of the upper belt 1 (201) and both sides of the lower belt 1 (201), and are arranged in a mirror image of each other.

7. The laser drilling equipment for processing silicon carbide coated graphite disks according to claim 6, characterized in that, Each set of support ventilation components (6) is provided with two layers of support ventilation frames (602); the two layers of support ventilation frames (602) form a groove structure, which supports and guides belt one (201) by respectively fitting the upper and lower ends of belt one (201).

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