Reflecting mirror bending system capable of being monitored and adjusted on line based on piezoelectric ceramics

Abstract

The invention provides a piezoelectric ceramic-based reflecting mirror bending system capable of being monitored and adjusted on line, which comprises a reflecting mirror supporting mechanism, a piezoelectric ceramic clamping and adjusting mechanism and a laser interferometer supporting and moving mechanism, and is characterized in that the reflecting mirror supporting mechanism comprises a restraining assembly for restraining a reflecting mirror; the piezoelectric ceramic clamping and adjusting mechanism comprises a first fixing part, a second fixing part and piezoelectric ceramic adjusting assemblies, the first fixing part and the second fixing part are arranged above and below the reflecting mirror respectively, and the piezoelectric ceramic adjusting assemblies are arranged on the first fixing part and / or the second fixing part and used for bending the reflecting mirror. The laser interferometer supporting and moving mechanism is used for obtaining the real-time bending radius of the reflecting mirror, and the piezoelectric ceramic adjusting assemblies adjust the real-time bending radius of the reflecting mirror on line till the real-time bending radius reaches the target bending radius. According to the invention, the difficulty of online adjustment of the piezoelectric reflector is reduced, and accurate bending of the reflector can be realized.

Description

Technical Field

[0001] The invention relates to the technical field of synchrotron radiation beam line engineering, and in particular to a piezoelectric ceramic-based reflector bending system capable of online monitoring and adjustment. Background Art

[0002] Mirrors are commonly used optical elements in synchrotron radiation for beamline focusing, collimation, deflection and suppression of high-order harmonics. Surface accuracy is an important factor affecting its optical performance. Excluding the effects of mirror surface roughness and surface error, mechanical errors in the mirror bending process, the mirror's own gravity and the thermal load of X-rays during use are the main reasons for poor surface accuracy. Compared with traditional mechanical bending, piezoelectric ceramic bending mirrors have the advantages of simple mechanical structure and dynamic adaptive adjustable surface shape. Therefore, in recent years, piezoelectric ceramic bending mirrors have begun to be used in synchrotron radiation beamlines, such as the ID-13 beamline of ESRF, the B16 beamline of Diamond and the BL29-XUL beamline of Spring-8. In the past, before the mirror was installed and adjusted online, the long-range profilometer LTP or nano-profiler NOM was generally used in the laboratory to conduct a systematic analysis of the bending surface of the mirror. Since the detection environment of the optical laboratory and the beam line environment cannot be exactly the same, some wavefront detection technologies for X-rays, such as the fine beam method, phase iterative recovery method, ray tracing method, Hartmann detection method, etc., are currently needed to test the actual characteristics of the bending mirror installed on the beam line. These methods have the problem of difficulty in accurately distinguishing the mirror surface due to the increase in the number of piezoelectric plates, slow response speed due to huge calculations, and even manual adjustment by the experimenter, which brings great difficulties to the online adjustment of the bending mirror. On the other hand, the adjustable spot size of multiple stations on one line and the same experimental station is the development demand of synchrotron radiation experimental stations, and the high-precision real-time adjustment of the curvature radius is an important requirement of synchrotron radiation beam lines for mirrors. Therefore, in the design of the mirror bending system, while ensuring the bending accuracy, gravity and thermal deformation compensation, achieving large-scale bending of the mirror is also a problem that engineers need to solve urgently. Summary of the invention

[0003] In order to solve the problem of real-time monitoring of large-scale bending of bent mirrors and online precise bending, the purpose of the present invention is to provide a mirror bending system based on piezoelectric ceramics that can be monitored and adjusted online, which reduces the difficulty of online installation and adjustment of piezoelectric mirrors and can achieve precise bending of the mirrors.

[0004] In order to solve the above technical problems, the technical solution adopted by the present invention is:

[0005] The mirror bending system based on piezoelectric ceramics with online monitoring and adjustment includes:

[0006] A reflector support mechanism, including a restraining assembly for restraining the reflector;

[0007] The piezoelectric ceramic fixing and adjustment mechanism comprises a first fixing part, a second fixing part and a piezoelectric ceramic adjustment assembly, wherein the first fixing part is arranged above the reflector, the second fixing part is arranged below the reflector, the first fixing part and / or the second fixing part are both provided with a plurality of piezoelectric ceramic adjustment assemblies in parallel, the piezoelectric ceramic adjustment assembly has a piezoelectric ceramic for bending the reflector, and the first fixing part is provided with a through groove;

[0008] The laser interferometer support and motion mechanism comprises a plurality of laser interferometers arranged side by side above the first fixing part, wherein the laser interferometers emit lasers which pass through the through slots and enter the reflective mirror;

[0009] Among them, a target bending radius of the reflector is set, several of the laser interferometers emit lasers to fit the real-time bending radius of the reflector, and several of the piezoelectric ceramic adjustment components adjust the real-time bending radius of the reflector online until the real-time bending radius reaches the target bending radius.

[0010] Furthermore, the reflector support mechanism further comprises a reflector support, and the constraint assembly comprises an X-direction constraint assembly, a Y-direction constraint assembly and a follow-up constraint assembly;

[0011] The X-direction constraint assembly is arranged on the reflector support for clamping the reflector in the X direction, the Y-direction constraint assembly is arranged on the reflector support for clamping the reflector in the Y direction, and the follower constraint assembly is arranged on the reflector support for supporting the reflector in the Z direction, the X direction is the width direction of the reflector, the Y direction is the length direction of the reflector, and the Z direction is the height direction of the reflector.

[0012] Further, the reflector support includes two supports, one of which corresponds to the X-ray incident end of the reflector, and the other supports corresponds to the X-ray emitting end of the reflector. The support is provided with a accommodating cavity, and the two ends of the reflector are respectively accommodated in the two accommodating cavities. Both supports are provided with X-direction constraint components to clamp both ends of the reflector in the X direction. The Y-direction constraint component includes a first Y-direction constraint component and a second Y-direction constraint component. The two supports are respectively provided with a first Y-direction constraint component and a second Y-direction constraint component to clamp both ends of the reflector in the Y direction. The follow-up constraint component includes a first follow-up constraint component and a second follow-up constraint component. The first follow-up constraint component is arranged on one of the supports to rotatably support the bottom of the reflector, and the second follow-up constraint component is arranged on the other support to movably support the bottom of the reflector.

[0013] Furthermore, the X-direction constraint assembly includes a reflector locking nut, a reflector ball head adjustment screw, and a first hemispherical head screw, wherein the first hemispherical head screw includes a first hemispherical head and a first rod, the first rod is fixed to the support, the first hemispherical head abuts against the reflector, and the reflector ball head adjustment screw includes a second hemispherical head and a second rod, the second hemispherical head abuts against the reflector, and the second rod is threadedly connected to the support.

[0014] Further, the first Y-direction constraint assembly includes a fixed end baffle and a second hemispherical head screw, the fixed end baffle is fixed to one of the supports, the second hemispherical head screw includes a third hemispherical head and a third rod, the third rod is fixed to the fixed end baffle, and the third hemispherical head abuts against one end of the reflector;

[0015] The second Y-direction constraint component includes a free end baffle, a spring and a mushroom ball head. The free end baffle is fixed to the other support. One end of the spring is fixed to the free end baffle, and the other end is fixed to the mushroom ball head. The spring extends along the Y direction, and the spring provides an elastic force in the Y direction to the other end of the reflector. The mushroom ball head abuts against the reflector.

[0016] Furthermore, the first follower constraint assembly includes a first roller and a first roller shaft, the first roller shaft is arranged in the Z direction and fixed to one of the supports, the first roller shaft is provided with two abutment parts, the abutment parts protrude from the first roller shaft, the first roller is rotatably mounted on the first roller shaft and the two ends of the first roller abut against the two abutment parts respectively.

[0017] Furthermore, the second follower constraint assembly includes a second roller and a second roller shaft, the second roller shaft is arranged in the Z direction and fixed to another support, a first smooth surface is arranged on the outer side of the second roller shaft, and a convex ring protruding from the first smooth surface is arranged in the middle part of the outer side of the second roller shaft, and a second smooth surface is arranged on the inner side of the second roller, the first smooth surface and the second smooth surface are clearance fit, and the convex ring and the second smooth surface are interference fit.

[0018] Furthermore, the piezoelectric ceramic adjustment assembly also includes two groups of piezoelectric ceramic kits, which are symmetrically arranged along the X direction. The piezoelectric ceramic kit includes an adjustment member and an adjustment rod. The adjustment member is fixed to the first fixed part or the second fixed part. A receiving cavity is provided in the adjustment member, and the piezoelectric ceramic is received in the receiving cavity. The adjustment rod extends along the Z direction, and the adjustment rod is used to drive the piezoelectric ceramic to move along the Z direction to adjust the position of the piezoelectric ceramic.

[0019] Furthermore, it also includes a pressure sensor, which is arranged in the accommodating cavity. The piezoelectric ceramic has a ball head. The piezoelectric ceramic is accommodated in the accommodating cavity and fixed to the pressure sensor. The ball head abuts against the reflector. The adjusting rod is threadedly connected to the adjusting member and one end of the adjusting rod abuts against the pressure sensor to adjust the position of the piezoelectric ceramic.

[0020] Furthermore, the through groove penetrates along the Z direction and extends along the Y direction, the laser interferometer support and motion mechanism includes a linear motion slide, a laser head mounting plate and a laser interferometer, the linear motion slide extends along the X direction, the laser head mounting plate is slidably connected to the linear motion slide, the laser head mounting plate extends along the Y direction, and a plurality of laser interferometers arranged along the Y direction are arranged on the laser head mounting plate, and each of the laser interferometers emits a laser along the Z direction.

[0021] Compared with the prior art, the present invention has the following advantages and beneficial effects:

[0022] The reflector bending system based on piezoelectric ceramics that can be monitored and adjusted online provided by the present invention realizes precise bending and real-time monitoring and adjustment of the reflector in an online state, solves the problem of independent bending and detection of the reflector in the past, and utilizes multiple groups of piezoelectric ceramics arranged up and down to achieve adaptive bending with a wide range of curvature radius changes, which has a certain improvement effect on the deformation caused by the reflector's own gravity and heat load. By adjusting the input voltage of the piezoelectric ceramics in real time, it also solves the problem of long-term instability of the piezoelectric ceramics after bending to a certain extent. It has the advantages of online, real-time monitoring, real-time adjustment, and precise bending. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of this application. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0024] Figure 1 It is a schematic diagram of the overall structure of the reflector bending system of the present invention;

[0025] Figure 2 It is a schematic diagram of the structure of the reflector supporting mechanism of the present invention supporting the reflector;

[0026] Figure 3 It is a structural schematic diagram of the reflector support mechanism of the present invention;

[0027] Figure 4 It is a schematic structural diagram of a second hemispherical head screw of the present invention;

[0028] Figure 5 It is a structural schematic diagram of the spring and the mushroom ball head of the present invention;

[0029] Figure 6 An exploded view of the first follower constraint assembly of the present invention;

[0030] Figure 7 An exploded view of the second follower constraint assembly of the present invention;

[0031] Figure 8 A schematic diagram of the piezoelectric ceramic fixing and the adjusting mechanism for adjusting the reflector of the present invention;

[0032] Fig. 9 It is a schematic diagram of the structure of the piezoelectric ceramic adjustment component of the present invention;

[0033] Fig.10 It is a structural schematic diagram of the support and motion mechanism of the laser interferometer of the present invention;

[0034] Fig.11 It is a structural schematic diagram of the reflector of the present invention;

[0035] FIG12( a ) is a comparison diagram of a back-bending curve of an elliptical surface type including a reflector bending under its own weight and a target bending curve with a target bending radius of 1900 m according to a specific embodiment of the present invention;

[0036] FIG12( b ) is a comparison diagram of the actual bending slope and the target slope of an elliptical bending surface including the deadweight bending of the reflector with a target bending radius of 1900 m according to a specific embodiment of the present invention;

[0037] FIG12( c ) is a comparison diagram of a back-bending profile curve and a target curve of an elliptical surface of the present invention with a target bending radius of 1900 m, taking into account the deadweight and thermal deformation of the reflector;

[0038] FIG12( d ) is a comparison diagram of the actual bending slope and the target slope of the elliptical bending surface of the reflector considering the deadweight and thermal deformation of the bending mirror in a specific embodiment of the present invention, with a target bending radius of 1900 m;

[0039] FIG13( a ) is a comparison diagram of a back bending profile curve of an elliptical surface type including a reflector bending by its own weight with a target bending radius of 2857 m and a target bending profile curve according to a specific embodiment of the present invention;

[0040] FIG13( b ) is a comparison diagram of the actual bending slope and the target slope of an elliptical bending surface including the deadweight bending of the reflector with a target bending radius of 2857 m according to a specific embodiment of the present invention;

[0041] FIG13( c ) is a comparison diagram of the back-bending profile curve and the target curve of the elliptical bending surface of the reflector considering the deadweight and thermal deformation of the reflector in a specific embodiment of the present invention with a target bending radius of 2857 m;

[0042] FIG13( d ) is a comparison diagram of the actual bending slope and the target slope of the elliptical bending surface of the reflector considering the deadweight and thermal deformation of the bending mirror in a specific embodiment of the present invention, with a target bending radius of 2857 m;

[0043] FIG. 14( a ) is a comparison diagram of a back-bending curve of an elliptical surface type including a reflector bending under deadweight with a target bending radius of 7400 m and a target bending curve according to a specific embodiment of the present invention;

[0044] FIG14( b ) is a comparison diagram of the actual bending slope and the target slope of an elliptical bending surface including the deadweight bending of the reflector with a target bending radius of 7400 m according to a specific embodiment of the present invention;

[0045] FIG14( c ) is a comparison diagram of a back-bending profile curve and a target curve of an elliptical surface of a specific embodiment of the present invention with a target bending radius of 7400 m, taking into account the deadweight and thermal deformation of the reflector;

[0046] 14( d ) is a comparison diagram of the actual bending slope and the target slope of the elliptical bending surface of the reflector considering its own weight and thermal deformation in a specific embodiment of the present invention with a target bending radius of 7400 m.

[0047] Among them, 100, reflector support mechanism; 110, reflector support; 111, support; 1111, accommodating cavity; 120, X-direction constraint assembly; 121, reflector locking nut; 122, reflector ball head adjustment screw; 123, first hemispherical head screw; 130, Y-direction constraint assembly; 131, first Y-direction constraint assembly; 1311, fixed end baffle; 1312, second hemispherical head screw; 132, second Y-direction constraint assembly; 1321, free end baffle; 13 22. Spring; 1323. Mushroom ball head; 140. Follow-up constraint assembly; 141. First follow-up constraint assembly; 1411. First roller; 1412. First roller shaft; 14121. First roller shaft body; 14122. Roller end cover; 14123. Abutment portion; 142. Second follow-up constraint assembly; 1421. Second roller; 14211. Second smooth surface; 1422. Second roller shaft; 14221. First smooth surface; 14222. Protruding ring; 150. Metal hanging ear;

[0048] 200, piezoelectric ceramic fixing and adjustment mechanism; 210, first fixing part; 211, through groove; 220, second fixing part; 221, bottom plate; 222, support block; 230, piezoelectric ceramic adjustment assembly; 231, piezoelectric ceramic assembly; 2311, adjustment member; 23111, first connecting plate; 23112, second connecting plate; 23113, third connecting plate; 2312, adjustment rod; 232, piezoelectric ceramic; 233, pressure sensor;

[0049] 300, laser interferometer support and motion mechanism; 310, linear motion slide; 311, linear guide rail; 312, motion slide; 313, guide rail clamp; 314, guide rail clamp connecting plate; 315, limit nut; 320, laser head mounting plate; 330, laser interferometer; 340, support frame; 341, slide fixing legs; 342, slide mounting tube;

[0050] 400, reflector; 401, first side surface; 402, second side surface; 403, third side surface; 404, fourth side surface; 405, fifth side surface; 406, sixth side surface. DETAILED DESCRIPTION

[0051] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0052] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "several" means two or more.

[0053] like Figure 1 As shown, the piezoelectric ceramic-based reflector bending system capable of online monitoring and adjustment provided by the embodiment of the present invention mainly includes three major components, namely, a reflector support mechanism 100, a piezoelectric ceramic fixed support and adjustment mechanism 200, and a laser interferometer support and motion mechanism 300. For the convenience of description, it is stipulated that the width direction of the reflector 400 is the X direction, the length direction of the reflector 400 is the Y direction, that is, the extension direction of the reflector 400 is the Y direction, and the height direction of the reflector 400 is the Z direction. The reflector support mechanism 100 is used to constrain the reflector 400 in the X direction, the Y direction and the Z direction, the piezoelectric ceramic fixed support and adjustment mechanism 200 is used to adjust the reflector 400 according to the bending target, and the laser interferometer support and motion mechanism 300 is used to obtain the bending radius of the reflector 400. The coordinate system directions in the following description all follow this rule. In addition, the sagittal direction and the meridian direction of the reflector 400 that may be involved in the description represent the X direction and the Y direction, respectively.

[0054] like Figure 1 and Figure 2 As shown, the reflector support mechanism 100 includes a constraint component for constraining the reflector. The reflector support mechanism 100 provides the reflector 400 with a simply supported beam constraint and good support stiffness.

[0055] like Figure 1 and Figure 8 As shown, the piezoelectric ceramic fixing and adjustment mechanism 200 includes a first fixing part 210, a second fixing part 220 and a piezoelectric ceramic adjustment component 230. The first fixing part 210 is arranged above the reflector 400, and the second fixing part 220 is arranged below the reflector 400. The first fixing part 210 and the second fixing part 220 are both provided with a plurality of piezoelectric ceramic adjustment components 230. The piezoelectric ceramic adjustment component 230 has a piezoelectric ceramic 232 for bending the reflector 400. The first fixing part 210 is provided with a through groove 211.

[0056] like Figure 1 and Fig.10 As shown, the laser interferometer support and motion mechanism 300 includes a plurality of laser interferometers 330 arranged side by side above the first fixing portion 210 . The laser interferometer 300 emits laser light through the through slot 211 and enters the reflector 400 .

[0057] A target bending radius of the reflector 400 is set, and a plurality of laser interferometers 330 emit lasers to fit the real-time bending radius of the reflector 400, and a plurality of piezoelectric ceramic adjustment components 230 adjust the real-time bending radius of the reflector online until the real-time bending radius reaches the target bending radius.

[0058] The piezoelectric ceramic-based reflector bending system with online monitoring and adjustment provided by the present invention realizes precise bending and real-time monitoring and adjustment of the reflector 400 in an online state, solves the problem of independent bending and detection of the reflector 400 in the past, and utilizes multiple groups of piezoelectric ceramic adjustment components 230 arranged up and down to achieve adaptive bending with a wide range of curvature radius changes, which has a certain improvement effect on the deformation of the reflector 400 caused by its own gravity and heat load. By adjusting the input voltage in real time, it also solves the problem of long-term instability of piezoelectric ceramics after bending to a certain extent. It has the advantages of online, real-time monitoring, real-time adjustment, and precise bending.

[0059] In this embodiment, Fig.11 As shown, the reflector 400 is a rectangular parallelepiped structure, including a first side surface 401, a second side surface 402, a third side surface 403, a fourth side surface 404, a fifth side surface 405 and a sixth side surface 406. The first side surface 401 and the second side surface 402 are arranged opposite to each other, the third side surface 403 and the fourth side surface 404 are arranged opposite to each other, and the fifth side surface 405 and the sixth side surface 406 are arranged opposite to each other.

[0060] In the specific implementation manner of this embodiment, the reflector 400 is a single-sided polished silicon crystal reflector with a size of 410*50*50mm*mm*mm, and the bending targets are elliptical curves with equivalent radii of 7400m, 2857m, and 1900m, respectively.

[0061] The mirror support mechanism 100 will be described in detail below.

[0062] During the bending process, the reflector 400 is approximately supported by a simply supported beam. The reflector support mechanism 100 includes a reflector support 110 that provides structural support stiffness and various structures that provide simply supported beam constraints for the reflector 400. The reflector support mechanism 100 also includes the reflector support 110. The constraint components include an X-direction constraint component 120, a Y-direction constraint component 130 and a follow-up constraint component 140. The X-direction constraint component 120 is arranged on the reflector support 110 for constraining the reflector 400 in the X direction, the Y-direction constraint component 130 is arranged on the reflector support 110 for constraining the reflector 400 in the Y direction, and the follow-up constraint component 140 is arranged on the reflector support 110 for supporting the reflector 400 in the Z direction.

[0063] In this embodiment, Figure 1-Figure 3 As shown, the reflector support 110 includes two supports 111, one of which corresponds to the X-ray incident end of the reflector 400, and the other corresponds to the X-ray emitting end of the reflector 400. The support 111 is provided with a accommodating cavity 1111, and the two ends of the reflector 400 are respectively accommodated in the two accommodating cavities 1111.

[0064] like Figure 1-Figure 2 As shown, the two supports 111 are both provided with an X-direction restraining assembly 120 to clamp both ends of the reflector 400 in the X-direction to prevent the reflector 400 from moving in the X-direction.

[0065] like Figure 1-Figure 5As shown, the Y-direction constraint assembly 130 includes a first Y-direction constraint assembly 131 and a second Y-direction constraint assembly 132, and the two supports 111 are respectively provided with the first Y-direction constraint assembly 131 and the second Y-direction constraint assembly 132 to clamp the two ends of the reflector 400 in the Y direction. Specifically, in this embodiment, the first Y-direction constraint assembly 131 is provided on one of the supports 111 to provide fixed support for the third side surface 403 of the reflector 400 in the Y direction, and the second Y-direction constraint assembly 132 is provided on the other support 111 and provides elastic support for the fourth side surface 404 of the reflector 400 in the Y direction, so that not only can the reflector 400 be able to achieve a slight movement in the Y direction, but also can ensure that the third side surface 403 and the fourth side surface 404 of the reflector 400 are supported, so as to prevent the reflector 400 from tipping over or twisting when the reflector 400 is bent.

[0066] like Figure 1-Figure 3 , Figure 6 and Figure 7 As shown, the follower constraint assembly 140 includes a first follower constraint assembly 141 and a second follower constraint assembly 142. The first follower constraint assembly 141 is arranged on one of the supports 111 to rotatably support the reflector 400, and the second follower constraint assembly 142 is arranged on the other support 111 to movably support the reflector 400, so as to eliminate the torsional effect of the reflector 400 during the bending process and avoid hyperstatics.

[0067] In this embodiment, Figure 2 and Figure 3As shown, the X-direction constraint assembly 120 includes a reflector locking nut 121, a reflector ball head adjustment screw 122, and a first hemispherical head screw 123. The reflector ball head adjustment screw 122 and the first hemispherical head screw 123 are arranged opposite to each other, and the first hemispherical head screw 123 includes a first hemispherical head and a first rod, the first rod is fixed to the support 111, and the first hemispherical head abuts against one of the first side surface 401 and the second side surface 402 of the reflector 400. The reflector ball head adjustment screw 122 includes a second hemispherical head and a second rod, and the second hemispherical head abuts against the other side surface of the first side surface 401 and the second side surface 402 of the reflector 400. The second rod is threadedly connected to the support 111, and the reflector ball head adjustment screw 122 is screwed along the X The reflector lock nut 121 is used to lock the reflector ball head adjusting screw 122. The two ends of the reflector 400 are respectively constrained in the X direction through the two X-direction constraint assemblies 120, so as to perform point contact clamping on the reflector 400 to prevent the reflector 400 from moving in the X direction. The positions of the reflector ball head adjusting screw 122 are adjusted to make the two ends of the reflector 400 located in the middle of the two supports 111, so as to prevent the reflector 400 from tipping over or twisting when being bent, so that the reflector 400 constrained by the simply supported beam is not allowed to move horizontally or rotate in the X direction.

[0068] In this embodiment, Figure 2-Figure 5 As shown, the Y-direction constraint component 130 includes a first Y-direction constraint component 131 and a second Y-direction constraint component 132 .

[0069] The first Y-direction constraint component 131 is arranged at the X-ray incident end, and the second Y-direction constraint component 132 is arranged at the X-ray exit end. The first Y-direction constraint component 131 includes a fixed end baffle 1311 and a second hemispherical head screw 1312. The fixed end baffle 1311 is fixed to one of the supports 111. The second hemispherical head screw 1312 includes a third hemispherical head and a third rod. The third rod is fixed to the fixed end baffle 1311. The third hemispherical head abuts against one of the third side surface 403 and the fourth side surface 404 of the reflector 400.

[0070] The second Y-direction constraint component 132 includes a free end baffle 1321, a spring 1322 and a mushroom ball head 1323. The mushroom ball head 1323 and the second hemispherical head screw 1312 are arranged opposite to each other. The free end baffle 1321 is fixed to another support 111. One end of the spring 1322 is fixed to the free end baffle 1321, and the other end is fixed to the mushroom ball head 1323. The spring 1322 extends along the Y direction. The spring 1322 provides an elastic force in the Y direction to the other end of the reflector 400. The mushroom ball head 1323 abuts against the other side of the third side 403 and the fourth side 404 of the reflector 400. By setting the second Y-direction constraint component 132, the reflector 400 can freely extend on one side of the Y direction.

[0071] Specifically, the diameters of the reflector ball head adjustment screw 122 and the first hemispherical head screw 123 are both 10 mm, and the diameter of the second hemispherical head screw 1312 is 5 mm. A circular hole with a depth of 4 mm and a diameter of 4 mm is opened at the center of the free end baffle 1321. The inner diameter of the spring 1322 is 4 mm, and the length of the spring 1322 is 5 mm. One end of the spring 1322 is fixed in the circular hole, and the other end of the spring 1322 is suspended. The extension direction of the spring 1322 is the Y direction. The mushroom ball head 1323 has a cylindrical end at one end and a hemispherical head end at the other end, which is shaped like a mushroom. The cylindrical end is pressed into the other end of the spring 1322, and the hemispherical head end abuts against the reflector. 400, to ensure the initial contact of the spring 1322, the spring 1322 is compressed by 1 mm to provide a pre-tightening force, the second hemispherical head screw 1312 and the mushroom ball head 1323 are respectively abutted against the center position of the third side surface 403 of the reflector 400 and the center position of the fourth side surface 404 of the reflector 400, and the fixed end baffle 1311 and the free end baffle 1321 of the two end surfaces of the reflector 400 are respectively fixed to the two supports 111 using 4 M3 hexagon socket head screws.

[0072] In this embodiment, Figure 2 , Figure 3 , Figure 6 and Figure 7 As shown, the follower constraint assembly 140 includes a first follower constraint assembly 141 and a second follower constraint assembly 142. The first follower constraint assembly 141 is arranged on one of the supports 111 to form a rotating roller structure, and the second follower constraint assembly 142 is arranged on the other support 111 to form a dragging roller structure. The rotating roller structure and the dragging roller structure further support the reflector 400 to eliminate the torsional effect of the reflector 400 during the bending process.

[0073] In this embodiment, Figure 2 , Figure 3 , Figure 6 and Figure 7As shown, the first follower constraint assembly 141 includes a first roller 1411 and a first roller shaft 1412. The first roller shaft 1412 is arranged along the X direction and fixed to one of the supports 111. The first roller shaft 1412 is provided with two abutment portions 14123. The abutment portions 14123 protrude from the first roller shaft 1412. The first roller 1411 is rotatably sleeved on the first roller shaft 1412 and the two ends of the first roller 1411 abut against the two abutment portions 14123 respectively. In addition, the first roller 1412 includes a first roller body 14121 and a roller end cap 14122. The first roller body 14121 is a columnar structure. The roller end cap 14122 is fixed to both ends of the first roller body 14121. An abutment portion 14123 is provided inside the roller end cap 14122. The abutment portion 14123 is an abutment surface. Both ends of the first roller 1411 abut against the two abutment surfaces one by one. During use, since the first roller 1411 is rotatably sleeved on the first roller 1412 and both ends of the first roller 1411 abut against the two abutment portions 14123 one by one, the first roller 1411 cannot move along the X direction and can only rotate with the axis of the first roller 1412 as the central axis to ensure that the first roller 1411 is in continuous linear contact with the bottom of the reflector 400.

[0074] In the specific implementation manner of this embodiment, the first roller 1411 is in continuous line contact with the intersection line of the third side surface 403 and the sixth side surface 406 of the reflector 400 .

[0075] like Figure 2 , Figure 3 , Figure 6 and Figure 7 As shown, the second follower constraint assembly 142 includes a second roller 1421 and a second roller shaft 1422, the second roller shaft 1422 is arranged along the X direction and fixed to another support 111, a first smooth surface 14221 is arranged on the outer side of the second roller shaft 1422, and a convex ring 14222 protruding from the first smooth surface 14221 is arranged on the middle part of the outer side of the second roller shaft 1422, and a second smooth surface 14211 is arranged on the inner side of the second roller 1421, the first smooth surface 14221 and the second smooth surface 14211 are clearance fit, and the convex ring 14222 and the second smooth surface 14211 are interference fit. During the bending process of the reflector 400, the reflector 400 will move slightly. Through the clearance fit between the first smooth surface 14221 and the second smooth surface 14211 and the interference fit between the convex ring 14222 and the second smooth surface 14211, the second roller 1421 can swing relative to the second roller shaft 1422 with the convex ring 14222 as the fulcrum.

[0076] This embodiment uses the first follower constraint component 141 and the second follower constraint component 142 to form a combination of a rotating roller and a dragging roller to achieve follow-up, which can not only provide support constraints in the Z direction for the reflector 400, but also avoid the deflection of the reflector 400 along the sagittal direction. The purpose is to eliminate the torsional influence on the reflector 400 during the bending process, and the structure designed in this way can avoid hyperstatics.

[0077] In this embodiment, the arrangement positions of the plurality of piezoelectric ceramic adjustment components 230 are determined by using a particle swarm algorithm according to the bending target.

[0078] The piezoelectric ceramic fixing and adjusting mechanism 200 is described in detail below.

[0079] In this embodiment, Figure 8 and Fig. 9 As shown, the piezoelectric ceramic fixing support and adjustment mechanism 200 provide fixed support for the piezoelectric ceramic 232, and fine-tune the initial contact state between the piezoelectric ceramic 232 and the reflector 400. In order to achieve multi-point precise bending of the reflector 400, the piezoelectric ceramic 232 adopts a stacked ball head piezoelectric ceramic, the model is Core Mingtian PSt150 / 5*5 / 27L, the actual size is 6*6*27mm^3, the square height is 27mm, the ball head radius is 2.5mm, and the piezoelectric ceramic 232 acts symmetrically at 2.5mm from the edge of the reflector 400. The use of stacked ball head piezoelectric ceramics can, on the one hand, accurately control the bending displacement by adjusting the input voltage, and on the other hand, ensure that the ball head and the contact surface are always approximately in point contact, so that the point of force application can be as consistent as possible with the theoretical calculated position.

[0080] In this embodiment, Figure 8 and Fig. 9 As shown, two ends of the first fixing portion 210 are fixed to two supports 111 respectively, and two ends of the second fixing portion 220 are fixed to two supports 111 respectively.

[0081] In this embodiment, Figure 8 and Fig. 9 As shown, the piezoelectric ceramic fixing and adjustment mechanism 200 also includes a piezoelectric ceramic adjustment component 230, and a plurality of piezoelectric ceramic adjustment components 230 are respectively arranged on the first fixing portion 210 and the second fixing portion 220 along the Y direction. By setting the piezoelectric ceramic adjustment component 230, a guide installation is provided for the piezoelectric ceramic 232.

[0082] In this embodiment, Figure 8 and Fig. 9As shown, the first fixing part 210 is a plate-like structure, and a plurality of piezoelectric ceramic adjustment components 230 are arranged on the first fixing part 210 along the Y direction. The second fixing part 220 includes a bottom plate 221 and a support block 222. The two ends of the bottom plate 221 are respectively fixed to two supports 111, and a plurality of support blocks 222 are arranged at the bottom along the Y direction, and the support blocks 222 are fixed on the bottom plate 221. The plurality of piezoelectric ceramic adjustment components 230 are fixed to the plurality of support blocks 222 one by one along the Y direction.

[0083] In this embodiment, Figure 8 and Fig. 9 As shown, the piezoelectric ceramic adjustment assembly 230 includes two groups of piezoelectric ceramic kits 231, and the two groups of piezoelectric ceramic kits 231 are symmetrically arranged along the X direction. The piezoelectric ceramic kit 231 includes an adjustment member 2311 and an adjustment rod 2312. The adjustment member 2311 is fixed to the first fixed part 210 or the second fixed part 220. A receiving cavity is provided in the adjustment member 2311, and the piezoelectric ceramic 232 is received in the receiving cavity. The adjustment rod 2312 extends along the Z direction. The adjustment rod 2312 is used to drive the piezoelectric ceramic 232 to move along the Z direction to adjust the position of the piezoelectric ceramic 232. The adjustment rod 2312 can be locked by an adjustment rod locking nut.

[0084] Specifically, the two groups of piezoelectric ceramic assemblies 231 are symmetrically distributed along the meridian axis of the reflector 400, and the symmetrical bending can improve the accuracy of the bending radius.

[0085] In this embodiment, Figure 8 and Fig. 9 As shown, the adjusting member 2311 includes a first connecting plate 23111, a second connecting plate 23112 and a third connecting plate 23113, the first connecting plate 23111 is fixed to the first fixing portion 210 or the second fixing portion 220, the first connecting plate 23111, the second connecting plate 23112 and the third connecting plate 23113 enclose a receiving cavity, the piezoelectric ceramic 232 has a ball head, the piezoelectric ceramic 232 is received in the receiving cavity, the ball head abuts against the reflector 400, and the adjusting rod 2312 is provided On the third connecting plate 23113, the adjusting rod 2312 is threadedly connected to the third connecting plate 23113. The adjusting rod 2312 is penetrated through the third connecting plate 23113 and one end extends from the other side of the third connecting plate 23113 to adjust the position of the piezoelectric ceramic 232. The other end extends from one side of the third connecting plate 23113 for easy holding. By rotating the adjusting rod 2312, the rising or falling distance of the adjusting rod 2312 along the Z direction can be adjusted, thereby adjusting the position of the piezoelectric ceramic 232.

[0086] In the specific implementation manner of this embodiment, Figure 8 and Fig. 9As shown, to ensure that the piezoelectric ceramic 232 is bent, the first fixing part 210 is selected as a stainless steel block, both ends of which are fixed to the two supports 111 respectively by two M5 hexagonal cylindrical countersunk screws. The first fixing part 210 is used to fix the piezoelectric ceramic adjustment component 230 above the reflector 400. A plurality of support blocks 222 are arranged on the second fixing part 220. The piezoelectric ceramic adjustment component 230 below the reflector 400 is fixed to the support block 222. The support block 222 is fixed to the second fixing part 220 by 6 M3 countersunk cylindrical head screws. To ensure that the piezoelectric ceramic 232 is symmetrically bent, the bottom surface of the first fixing part 210 should be parallel to the fifth side surface 405 of the reflector 400, and the top surface of the support block 222 should be parallel to the sixth side surface 406 of the reflector 400.

[0087] In the specific implementation manner of this embodiment, Figure 8 and Fig. 9 As shown, the piezoelectric ceramic kit 231 is the main structure for piezoelectric fixation and fine-tuning. The first connecting plate 23111 is used as a back plate and is fixed to both sides of the support block 222 by four M4 screws. There is a groove with a depth of 3mm on it, which is combined with the 3mm groove of the second connecting plate 23112 to form a vertical guide for the piezoelectric ceramic 232. The second connecting plate 23112 is connected to the first connecting plate 23111 by four M3 screws, and the two are then connected by four M4 screws through the third connecting plate 23113. The third connecting plate 23113 is provided with a threaded hole with a diameter of 5mm for installing the adjusting rod 2312, and the adjusting rod 2312 is locked by an adjusting nut.

[0088] like Figure 8 and Fig. 9 As shown, in order to obtain the pressure of the piezoelectric ceramic 232, monitor whether the piezoelectric ceramic 232 is in contact with the fifth side 405 or the sixth side 406 of the reflector 400 in an initial state and the output force of the piezoelectric ceramic 232 actually acting on the fifth side 405 or the sixth side 406 of the reflector 400, a pressure sensor 233 is also included, the pressure sensor 233 is arranged in the accommodating cavity, the piezoelectric ceramic 232 is glued to the pressure sensor 233 using epoxy resin, the probe is in contact with the fifth side 405 or the sixth side 406 of the reflector 400, the adjusting rod 2312 is threadedly connected to the adjusting member 2311 and one end of the adjusting rod 2312 is abutted against the pressure sensor 233 to adjust the position of the piezoelectric ceramic 232. To summarize the usage process, by adjusting the adjustment rod 2312, checking the reading of the pressure sensor 233, adjusting the piezoelectric ceramic 232, so that the piezoelectric ceramic 232 and the reflector 400 are just in contact, at this time the reading of the pressure sensor 233 is close to 0, when the readings of all the pressure sensors 233 are close to 0, it is the initial state of the adjustment of the reflector 400.

[0089] Specifically, the piezoelectric ceramic 232 is fixed at the center position of one end of the pressure sensor by epoxy resin to prevent the pressure sensor from being subjected to unbalanced force.

[0090] By setting up the piezoelectric ceramic kit 232, it can be used for guiding the installation of the piezoelectric ceramic, and through the adjustment rod 2312 and the pressure sensor 233 monitoring, the piezoelectric ceramic 232 can be in an initial state of just contacting the fifth side surface 405 or the sixth side surface 406 of the reflector 400.

[0091] The laser interferometer support and motion mechanism 300 is described in detail below.

[0092] In this embodiment, Fig.10 As shown, the laser interferometer support and motion mechanism 300 includes a plurality of laser interferometers 330 , through which a plurality of points of the reflector 400 are acquired, and the equivalent radius of the reflector 400 is obtained by fitting the plurality of points, and the equivalent radius is used as the real-time bending radius of the reflector 400 .

[0093] In this embodiment, Figure 1 , Figure 2 and Fig.10 As shown, the laser interferometer support and motion mechanism 300 is independent of the reflector support mechanism 100 and is located above the reflector 400 .

[0094] Specifically, the laser interferometer support and motion mechanism 300 is arranged above the first fixed part 210, and the laser interferometer support and motion mechanism 300 includes a linear motion slide 310, a laser head mounting plate 320 and a laser interferometer 330. The linear motion slide 310 extends along the X direction, the laser head mounting plate 320 is slidably connected to the linear motion slide 310, the laser head mounting plate 320 extends along the Y direction, a plurality of laser interferometers 330 are arranged on the laser head mounting plate 320, and the laser interferometers 330 emit lasers along the Z direction. The laser interferometers 330 are fixedly mounted on the laser head mounting plate 320 by threaded connection, and the positions are distributed within the effective length of the fifth side surface 405 of the entire reflector 400, and the actual bending displacement of the reflector 400 can be monitored and fed back in real time, and the piezoelectric ceramics 232 can be assisted to be accurately bent to an ideal radius. By setting the linear motion slide 310 and the laser head mounting plate 320, good structural rigidity is provided for the installation of the laser interferometer 330.

[0095] In this embodiment, Fig.10 As shown, in order not to block the laser interferometer 330 and the measurement of LTP, a through slot 221 is opened on the first fixing part 210, which passes through the Z direction and extends along the Y direction, to ensure that a plurality of laser interferometers 330 extend along the Z direction and each laser interferometer 330 emits a laser in the Z direction, and the laser passes through the through slot 221 and is emitted toward the reflector 400.

[0096] In the specific implementation manner of this embodiment, the laser interferometer 330 is an attocube laser interferometer, and two symmetrically arranged through grooves 221 are opened on the first fixed part 210. The two through grooves 221 extend along the Y direction with a length of 310 mm and a width of 2 mm, which do not interfere with the measurement of the laser probe and the long-range profilometer of the laser interferometer 330, in order to monitor whether twisting occurs during the bending process of the reflector 400.

[0097] The laser interferometer support and motion mechanism 300 also includes a support frame 340, which is a door-shaped structure. The two support frames 340 are arranged at a certain distance. The two support frames 340 are both arranged on the outside of the two supports 111. The support frames 340 are used to support the linear motion slide 310. The two linear motion slides 310 are respectively fixed on the two support frames 340, and the two ends of the laser head mounting plate 320 are respectively slidably connected to the two linear motion slides 310.

[0098] Specifically, the support frame 340 includes a slide fixed leg 341 and a slide mounting tube 342. Both the slide fixed leg 341 and the slide mounting tube 342 are rectangular square tubes with an outer contour of 12 mm and a thickness of 4 mm. The slide fixed leg 341 is fixed to the bottom plate 221 by 4 M3 screws. The slide mounting tube 342 is connected to the slide fixed leg 341 by welding. In order to facilitate the positioning and installation of the linear motion slide 310, in addition to the positioning hole of the linear motion slide 310 itself, a step with a height of 1 mm is also opened on the slide mounting tube 342 for linear positioning. The linear motion slide 310 is fixed to the slide mounting tube 342.

[0099] The linear motion slide 310 includes a linear guide rail 311, a motion slide 312, a guide rail clamp 313, a guide rail clamp connecting plate 314 and a limit nut 315. For standard components, the company's finished products can be selected. In this embodiment, the linear guide rail 311 adopts Hiwin MGN9C1R130Z1PM, the guide rail clamp 313 is HK0900M-NBK, and the guide rail clamp connecting plate 314 is respectively connected to the motion slide 312 and the guide rail by four M3 screws. The linear guide 311 is connected with the clamp 313, and both ends of the linear guide 311 are fixed to the slide mounting tube 342 by the limit nuts 315. The movable slide 312 is slidably connected to the linear guide 311, and the movable slide 312 is locked in position by the guide clamp 313. Both ends of the laser head mounting plate 320 are respectively fixed to the two movable slides 312, which can drive the laser head mounting plate 320 and a plurality of laser interferometers 330 to move in the width direction of the reflector 400 and be locked by the guide clamp 313.

[0100] The laser head mounting plate 320 and several laser interferometers 330 are located at the top of the bending system, and are used to measure the bending displacement of each point of the reflector 400. The bending radius of the reflector 400 can be roughly calculated. The laser head mounting plate 320 is fixed to the connecting plate 32 by four M3 screws. The laser interferometer 330 includes a laser probe. Five stepped holes with diameters of 23 mm and 16 mm are opened on the laser head mounting plate 320 to place the laser probe of the laser interferometer 330. In this embodiment, the model of the laser interferometer 330 is attocube IDS3010, and the model of the laser probe is M15.5 / F40 / Flex. The laser probe of the laser interferometer 330 is connected to the laser head mounting plate 320 by its own thread. The laser head mounting plate 320 provides sufficient rigidity for the measurement of the laser probe to ensure the stability and reliability of the measurement results. For the reflector bending measurement, the specific movement position of the laser interferometer 330 is as follows: Figure 8 As shown, during normal operation, the moving slide 312 is located at the center line of the width direction of the reflector 400, and the laser interferometer 330 located above measures the actual displacement change of the reflector 400 when it is bent through the through slot 211 on the first fixing part 210. The root mean square value of the radius of the reflector 400 can be roughly fitted by 5 groups of bending displacements; when it is necessary to monitor whether the bending process of the reflector 400 is twisted, the moving slide 312 drives the laser head mounting plate 320 to move to a position 7 mm on both sides of the meridian axis of the reflector 400. At this time, the laser interferometer 330 measures the bending displacement at the symmetrical position of the meridian axis of the reflector 400 through the through slot 211 on the first fixing part 210; when it is necessary to use other radius testing methods such as the long-range profilometer LTP, the moving slide 312 moves to one end limit during the test.

[0101] In this embodiment, the entire reflector bending system is supported by a base plate 221 with a size of 520*150*15 mm. Two sets of M8 metal ears 150 are installed at both ends of the base plate 221 to facilitate the movement and lifting of the entire bending structure. The above-mentioned support 111 and support frame 340 are both fixed on the base plate 221.

[0102] During use of this embodiment, the particle swarm algorithm can first be used to determine the installation position of the piezoelectric ceramic 232 and the force at the corresponding position under the target bending radius accuracy, and the required voltage value can be determined by the force through the characteristics of the piezoelectric ceramic 232. Then, the long-range profilometer LTP is used in the optical laboratory to scan the initial radius and target bending radius of the reflector 400, and the reading values ​​of each laser interferometer 330 when the reflector obtains the target bending radius are recorded. Accordingly, when the reflector bending system is put on-line for debugging, the voltage values ​​of each corresponding piezoelectric ceramic 232 can be adjusted respectively according to the reading of the laser interferometer 330, so that the value of the laser interferometer 330 is consistent with the reading of the laser interferometer 330 when the reflector in the laboratory obtains the target bending radius. At this time, the reflector debugged on-line reaches the required target bending radius.

[0103] The particle swarm algorithm is used to optimize and calculate the radii of ellipses with different curvature radii for bending of five groups of piezoelectric ceramics 232, and the ideal solution set of bending radius under various conditions including gravity and thermal deformation is determined. Finally, the position of the piezoelectric ceramics 232 and the magnitude of the piezoelectric ceramic output force at each position are determined. In the specific implementation manner of this embodiment, bending is performed on the equivalent bending radius range of 7400m-1900m, and the comparison results shown in Figures 12 to 14 are obtained, wherein Figure 12(a) is a comparison diagram of the back-bending curve of the elliptical surface type containing the self-weight bending of the reflector with a target bending radius of 1900m in the specific implementation manner of the present invention and the target bending curve, and Figure 12( FIG12(b) is a comparison diagram of the actual bending slope and the target slope of the elliptical surface type bending with the target bending radius of 1900m including the deadweight of the reflector in a specific embodiment of the present invention; FIG12(c) is a comparison diagram of the back bending curve and the target curve of the elliptical surface type bending with the target bending radius of 1900m considering the deadweight of the reflector and thermal deformation in a specific embodiment of the present invention; FIG12(d) is a comparison diagram of the actual bending slope and the target slope of the elliptical surface type bending with the target bending radius of 1900m considering the deadweight of the reflector and thermal deformation in a specific embodiment of the present invention; FIG13(a) is a comparison diagram of the actual bending slope and the target slope of the elliptical surface type bending with the target bending radius of 2857m including the deadweight of the reflector in a specific embodiment of the present invention; FIG13( b) is a comparison diagram of the actual bending slope and the target bending slope of the elliptical bending surface type with a target bending radius of 2857 m including the deadweight of the reflector according to a specific embodiment of the present invention; FIG13( c) is a comparison diagram of the rear bending profile curve and the target curve of the elliptical bending surface type with a target bending radius of 2857 m considering the deadweight of the reflector and thermal deformation; FIG13( d) is a comparison diagram of the actual bending slope and the target slope of the elliptical bending surface type with a target bending radius of 2857 m considering the deadweight of the reflector and thermal deformation; FIG14( a) is a comparison diagram of the target bending radius ...; FIG14( b) is a comparison diagram of the target bending radius of the elliptical bending surface type with a target bending radius of 2857 m; FIG14( c) is a comparison diagram of the rear bending profile curve and the target curve of the elliptical bending surface type with a target bending radius of 2857 m considering the deadweight of the reflector and thermal deformation; FIG14( b) is a comparison diagram of the rear bending shape curve and the target bending curve of the elliptical surface type with a target bending radius of 7400 m including the self-weight of the reflector, FIG14( c) is a comparison diagram of the rear bending shape curve and the target curve of the elliptical surface type with a target bending radius of 7400 m including the self-weight of the reflector according to a specific embodiment of the present invention, and FIG14( d) is a comparison diagram of the actual bending slope and the target slope of the elliptical surface type with a target bending radius of 7400 m considering the self-weight of the reflector and thermal deformation according to a specific embodiment of the present invention.

[0104] Considering the bending of the reflector 400 due to its own weight, the position of the piezoelectric ceramic 232, the magnitude of the force at each position, and the bending radius, when the equivalent bending radius ranges from 7400m to 1900m, as shown in Figures 12(b), 13(b), and 14(b), the root mean square error of the slope is less than 0.1urad; under the action of a 20W uniformly distributed thermal load, considering the self-weight and thermal deformation of the reflector 400, the position of the piezoelectric ceramic 232, the force at each position, as shown in Figures 12(d), 13(d), and 14(d), the slope errors are all less than 0.13urad after thermal compensation.

[0105] In summary, the present invention firstly adopts the first follower constraint component 141 and the second follower constraint component 142 to form the follower structure of the rotating roller and the dragging roller, which can prevent the reflector 400 from twisting while realizing the supporting function of the reflector 400. The stacked spherical piezoelectric ceramics can be bent by point contact to ensure that the actual bending is consistent with the theoretical calculation. The voltage value of the piezoelectric ceramic 232 is controlled to achieve precise bending. The mechanical structure is simple, the precision is high, and the bending method is easy to control. The present invention supports the reflector 400 and the attocube laser interferometer respectively through two sets of independent reflector supports 110 to avoid mutual interference between the reflector 400 and the laser interferometer 330. The piezoelectric ceramic fixed support and adjustment mechanism 200 designed by the present invention can realize the vertical action of the piezoelectric ceramic 232 on the mirror surface, ensuring the initial contact state of the piezoelectric ceramic 232 and the mirror surface. The present invention can realize online monitoring and debugging of the bending mirror 400 through the coordinated use of piezoelectric ceramics 232 and laser interferometer 330. The method of the invention is simple and intuitive, reduces the difficulty of online adjustment of the piezoelectric mirror, and provides a new solution for reducing the difficulty of online adjustment of the piezoelectric mirror.

[0106] Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include these modifications and variations.

Claims

1. A mirror bending system based on piezoelectric ceramics that can be monitored and adjusted online, characterized in that: include: A reflector support mechanism, including a restraining assembly for restraining the reflector; The piezoelectric ceramic fixing and adjustment mechanism comprises a first fixing part, a second fixing part and a piezoelectric ceramic adjustment assembly, wherein the first fixing part is arranged above the reflector, the second fixing part is arranged below the reflector, the first fixing part and / or the second fixing part are both provided with a plurality of piezoelectric ceramic adjustment assemblies in parallel, the piezoelectric ceramic adjustment assembly has a piezoelectric ceramic for bending the reflector, and the first fixing part is provided with a through groove; The laser interferometer support and motion mechanism comprises a plurality of laser interferometers arranged side by side above the first fixing part, wherein the laser interferometers emit lasers which pass through the through slots and enter the reflective mirror; Among them, a target bending radius of the reflector is set, several of the laser interferometers emit lasers to fit the real-time bending radius of the reflector, and several of the piezoelectric ceramic adjustment components adjust the real-time bending radius of the reflector online until the real-time bending radius reaches the target bending radius.

2. The piezoelectric ceramic-based reflector bending system capable of online monitoring and adjustment according to claim 1, characterized in that: The reflector support mechanism also includes a reflector support, and the constraint assembly includes an X-direction constraint assembly, a Y-direction constraint assembly and a follow-up constraint assembly; The X-direction constraint assembly is arranged on the reflector support for clamping the reflector in the X direction, the Y-direction constraint assembly is arranged on the reflector support for clamping the reflector in the Y direction, and the follower constraint assembly is arranged on the reflector support for supporting the reflector in the Z direction, the X direction is the width direction of the reflector, the Y direction is the length direction of the reflector, and the Z direction is the height direction of the reflector.

3. The piezoelectric ceramic-based reflector bending system capable of online monitoring and adjustment according to claim 2, characterized in that: The reflector support includes two supports, one of which corresponds to the X-ray incident end of the reflector, and the other supports corresponds to the X-ray emitting end of the reflector. The support is provided with a accommodating cavity, and the two ends of the reflector are respectively accommodated in the two accommodating cavities. Both supports are provided with X-direction constraint components to clamp both ends of the reflector in the X direction. The Y-direction constraint component includes a first Y-direction constraint component and a second Y-direction constraint component. The two supports are respectively provided with a first Y-direction constraint component and a second Y-direction constraint component to clamp both ends of the reflector in the Y direction. The follow-up constraint component includes a first follow-up constraint component and a second follow-up constraint component. The first follow-up constraint component is arranged on one of the supports to rotatably support the bottom of the reflector, and the second follow-up constraint component is arranged on the other support to movably support the bottom of the reflector.

4. The piezoelectric ceramic-based reflector bending system capable of online monitoring and adjustment according to claim 3 is characterized in that: The X-direction constraint assembly includes a reflector locking nut, a reflector ball head adjustment screw, and a first hemispherical head screw, wherein the first hemispherical head screw includes a first hemispherical head and a first rod, the first rod is fixed to the support, the first hemispherical head abuts against the reflector, the reflector ball head adjustment screw includes a second hemispherical head and a second rod, the second hemispherical head abuts against the reflector, and the second rod is threadedly connected to the support.

5. The piezoelectric ceramic-based reflector bending system capable of online monitoring and adjustment according to claim 3, characterized in that: The first Y-direction constraint assembly includes a fixed end baffle and a second hemispherical head screw, the fixed end baffle is fixed to one of the supports, the second hemispherical head screw includes a third hemispherical head and a third rod, the third rod is fixed to the fixed end baffle, and the third hemispherical head abuts against one end of the reflector; The second Y-direction constraint component includes a free end baffle, a spring and a mushroom ball head. The free end baffle is fixed to the other support. One end of the spring is fixed to the free end baffle, and the other end is fixed to the mushroom ball head. The spring extends along the Y direction, and the spring provides an elastic force in the Y direction to the other end of the reflector. The mushroom ball head abuts against the reflector.

6. The piezoelectric ceramic-based reflector bending system capable of online monitoring and adjustment according to claim 3 is characterized in that: The first follower constraint assembly includes a first roller and a first roller shaft. The first roller shaft is arranged in the Z direction and fixed to one of the supports. The first roller shaft is provided with two abutment parts, and the abutment parts protrude from the first roller shaft. The first roller is rotatably mounted on the first roller shaft and the two ends of the first roller abut against the two abutment parts one by one.

7. The piezoelectric ceramic-based reflector bending system capable of online monitoring and adjustment according to claim 3, characterized in that: The second follower constraint assembly includes a second roller and a second roller shaft. The second roller shaft is arranged in the Z direction and fixed to another support. A first smooth surface is arranged on the outer side of the second roller shaft and a convex ring protruding from the first smooth surface is arranged in the middle part of the outer side of the second roller shaft. A second smooth surface is arranged on the inner side of the second roller. The first smooth surface and the second smooth surface are clearance fit, and the convex ring and the second smooth surface are interference fit.

8. The piezoelectric ceramic-based reflector bending system capable of online monitoring and adjustment according to claim 2, characterized in that: The piezoelectric ceramic adjustment assembly also includes two groups of piezoelectric ceramic kits, which are symmetrically arranged along the X direction. The piezoelectric ceramic kit includes an adjustment member and an adjustment rod. The adjustment member is fixed to the first fixed part or the second fixed part. A receiving cavity is provided in the adjustment member, and the piezoelectric ceramic is received in the receiving cavity. The adjustment rod extends along the Z direction, and the adjustment rod is used to drive the piezoelectric ceramic to move along the Z direction to adjust the position of the piezoelectric ceramic.

9. The piezoelectric ceramic-based reflector bending system capable of online monitoring and adjustment according to claim 8, characterized in that: It also includes a pressure sensor, which is arranged in the accommodating cavity. The piezoelectric ceramic has a ball head. The piezoelectric ceramic is accommodated in the accommodating cavity and fixed to the pressure sensor. The ball head abuts against the reflector. The adjusting rod is threadedly connected to the adjusting member and one end of the adjusting rod abuts against the pressure sensor to adjust the position of the piezoelectric ceramic.

10. The piezoelectric ceramic-based reflector bending system capable of online monitoring and adjustment according to claim 2, characterized in that: The through groove penetrates along the Z direction and extends along the Y direction. The laser interferometer support and motion mechanism includes a linear motion slide, a laser head mounting plate and a laser interferometer. The linear motion slide extends along the X direction. The laser head mounting plate is slidably connected to the linear motion slide. The laser head mounting plate extends along the Y direction. A plurality of laser interferometers arranged along the Y direction are arranged on the laser head mounting plate. Each of the laser interferometers emits a laser along the Z direction.

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