Preparation method of sandwich type hyperfine nano coating

Abstract

The invention relates to a preparation method of a sandwich type hyperfine nano coating. The preparation method comprises the following steps: rinsing a workpiece with ultrasonic deionized water, dehydrating and drying; loading the workpiece into a vacuum working furnace, vacuumizing, and injecting nitrogen at the same time; the ion source works, and workpiece surface treatment is conducted; arc source adaptive switching surface nano coating equipment carrying a vacuum working furnace is debugged, and an unfiltered arc source supply part, an A-type filtering arc source supply part and a B-type filtering arc source supply part are arranged; the unfiltered arc source supply part supplies an ion source to bombard the surface of the workpiece to form a base layer; the A-type filtering type arc source supply part supplies an ion source, ion beams formed by ions filtered by the rough A-type filtering type arc source supply part bombard the surface of the workpiece, and a rough filtering type middle precision layer is formed; the A-type filtering type arc source supply part supplies an ion source, and ion beams formed by ions filtered by the rough A-type filtering type arc source supply part bombard the surface of a workpiece to form a precise filtering type surface.

Description

Technical Field

[0001] The invention relates to a surface coating preparation technology and a use equipment thereof, and specifically to a sandwich type ultra-fine nano coating preparation method. Background Art

[0002] The arc source supplies the ion source. The ion beam formed by the ion source is accelerated and hits the surface of the target material at high speed. The ion impact of the ion beam will cause the atoms on the surface of the target material to escape and deposit on the surface of the base material to form a nano coating.

[0003] However, the current arc sources produce ions of varying diameters. Relatively large ions bombarding the workpiece surface will produce relatively large pits, similar to large pits in liquid droplets. This will cause uneven nano-coating, which will directly affect the quality of the surface coating.

[0004] Therefore, it is necessary to provide a sandwich-type ultra-fine nano-coating preparation method to solve the above problems. Summary of the invention

[0005] The purpose of the present invention is to provide a method for preparing a sandwich-type ultra-fine nano coating.

[0006] A method for preparing a sandwich-type ultra-fine nano coating, comprising the following steps:

[0007] 1) The workpiece is rinsed with ultrasonic deionized water, dehydrated and dried;

[0008] 2) The workpiece is loaded into the vacuum furnace and evacuated to a vacuum degree lower than 1×10-3Pa. Nitrogen is injected at the same time to a vacuum degree greater than 1.01x10-3Pa.

[0009] 3) The ion source works to treat the workpiece surface for 2-4 minutes with a bias voltage of 100V;

[0010] 4) Debugging the surface nano coating equipment equipped with an arc source adaptive switch of a vacuum working furnace, the vacuum working furnace is provided with an arc source supply module, the arc source supply module includes an arc source loading plate, the arc source loading plate is provided with an unfiltered arc source supply part, an A-type filtered arc source supply part, and a B-type filtered arc source supply part;

[0011] 5) The unfiltered arc source supply is used to supply the ion source, and the ion beam composed of unfiltered ions bombards the surface of the workpiece for 8-10 minutes, an arc current of 80A, a bias voltage of 100V, and forms a base layer of a nano coating with a thickness of 30-40%;

[0012] 6) The A-type filtered arc source supply is used to supply the ion source, and the ion beam composed of the ions filtered by the A-type filtered arc source supply bombards the surface of the workpiece for 5-7 minutes, with an arc current of 85A and a bias voltage of 130-150V to form a roughly filtered intermediate precision layer of a nano coating with a thickness of 30-40%;

[0013] 7) The A-type filtered arc source supply is used to supply the ion source, and the ion beam composed of the ions filtered by the A-type filtered arc source supply bombards the surface of the workpiece for 2-4 minutes, with an arc current of 100A and a bias voltage of 130-150V to form a precision filtered surface of a nano coating with a thickness of 10-20%;

[0014] 8) Allow the temperature to drop naturally to below 100°C, turn off the vacuum system, and remove the workpiece.

[0015] Furthermore, the A-type filtered arc source supply element includes a straight-cylindrical filter body for filtering ion sources with a diameter of more than 20 μm.

[0016] Furthermore, the B-type filtered arc source supply element includes a special-shaped cylindrical filter body, and the special-shaped cylindrical filter body filters ions with a diameter greater than 10 μm.

[0017] Furthermore, the special-shaped cylindrical filter body is an L-shaped filter body.

[0018] Furthermore, the special-shaped cylindrical filter body is an S-type filter body.

[0019] Furthermore, the vacuum working furnace is an octagonal or hexagonal furnace.

[0020] Furthermore, the number of arc source supply modules is one quarter or one third of the number of inner walls of the vacuum working furnace.

[0021] Compared with the prior art, the present invention forms a sandwich-type surface super-slow nano coating preparation by direct bombardment of unfiltered ion beams, bombardment of ion beams after rough ion filtering, and bombardment of ion beams after selective filtration. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the structure of the surface nano-coating equipment with arc source adaptive switching.

[0023] Figure 2 It is a schematic diagram of the structure of a straight-cylindrical filter.

[0024] Figure 3 It is a structural schematic diagram of an L-type filter.

[0025] Figure 4 It is a structural schematic diagram of an S-type filter.

[0026] Figure 5 It is a structural schematic diagram of the present invention. DETAILED DESCRIPTION

[0027] Example:

[0028] Reference Figure 1-5 This embodiment shows a method for preparing a sandwich-type ultra-fine nano coating, the steps comprising:

[0029] 1) The workpiece is rinsed with ultrasonic deionized water, dehydrated and dried;

[0030] 2) The workpiece is loaded into the vacuum furnace and evacuated to a vacuum degree lower than 1×10-3Pa. Nitrogen is injected at the same time to a vacuum degree greater than 1.01x10-3Pa.

[0031] 3) The ion source works to treat the workpiece surface for 2-4 minutes with a bias voltage of 100V;

[0032] 4) Debugging an arc source adaptively switchable surface nano-coating device equipped with a vacuum working furnace, the arc source adaptively switchable surface nano-coating device comprising a vacuum working furnace 100, an arc source supply module 200 being provided on the vacuum working furnace 100, the arc source supply module 200 comprising an arc source loading plate 1, the arc source loading plate 1 being provided with an unfiltered arc source supply component 2, an A-type filtered arc source supply component 3, and a B-type filtered arc source supply component 4;

[0033] 5) The unfiltered arc source supplying member 2 supplies an ion source, and an ion beam composed of unfiltered ions bombards the workpiece surface 10 for 8-10 minutes, an arc current of 80A, a bias voltage of 100V, and forms a nano-coating base layer 20 with a thickness of 30-40%;

[0034] 6) The A-type filtered arc source supply component 3 supplies an ion source, and the ion beam composed of ions filtered by the A-type filtered arc source supply component bombards the surface of the workpiece for 5-7 minutes, an arc current of 85A, and a bias voltage of 130-150V to form a roughly filtered intermediate precision layer 30 of a nano coating with a thickness of 30-40%;

[0035] 7) The A-type filter arc source supply component 4 supplies the ion source, and the ion beam composed of the ions filtered by the A-type filter arc source supply component bombards the surface of the workpiece for 2-4 minutes, an arc current of 100A, and a bias voltage of 130-150V to form a precision filter surface 40 of a nano coating with a thickness of 10-20%;

[0036] 8) Allow the temperature to drop naturally to below 100°C, turn off the vacuum system, and remove the workpiece.

[0037] The A-type filtered arc source supply element 3 includes a straight cylindrical filter body 31 for filtering ion sources with a diameter of 20 μm or more.

[0038] The B-type filtered arc source supply element 4 comprises a special-shaped cylindrical filter body, which filters ions with a diameter greater than 10 μm.

[0039] The special-shaped cylindrical filter body is an L-shaped filter body 41 .

[0040] Meanwhile, the special-shaped cylindrical filter body may also be an S-type filter body 42 .

[0041] The vacuum working furnace 100 is an octagonal or hexagonal furnace.

[0042] The number of the arc source supply modules 200 is one quarter or one third of the number of the inner wall surfaces of the vacuum working furnace 100 .

[0043] Compared with the prior art, the present invention can adaptively select the preparation of surface nano-coatings by direct bombardment of unfiltered ion beams, bombardment of ion beams after rough ion filtration, and bombardment of ion beams after selective filtration, so as to meet the preparation of nano-coatings for products with different surface requirements.

[0044] The above are only some embodiments of the present invention. For those skilled in the art, several modifications and improvements can be made without departing from the creative concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. A method for preparing a sandwich type ultra-fine nano coating, characterized in that: include: 1) The workpiece is rinsed with ultrasonic deionized water, dehydrated and dried; 2) The workpiece is loaded into the vacuum furnace and evacuated to a vacuum degree lower than 1×10-3Pa. Nitrogen is injected at the same time to a vacuum degree greater than 1.01x10-3Pa. 3) The ion source works to treat the workpiece surface for 2-4 minutes with a bias voltage of 100V; 4) Debugging the surface nano coating equipment equipped with an arc source adaptive switch of a vacuum working furnace, the vacuum working furnace is provided with an arc source supply module, the arc source supply module includes an arc source loading plate, the arc source loading plate is provided with an unfiltered arc source supply part, an A-type filtered arc source supply part, and a B-type filtered arc source supply part; 5) The unfiltered arc source supply is used to supply the ion source, and the ion beam composed of unfiltered ions bombards the surface of the workpiece for 8-10 minutes, an arc current of 80A, a bias voltage of 100V, and forms a base layer of a nano coating with a thickness of 30-40%; 6) The A-type filtered arc source supply is used to supply the ion source, and the ion beam composed of the ions filtered by the A-type filtered arc source supply bombards the surface of the workpiece for 5-7 minutes, with an arc current of 85A and a bias voltage of 130-150V, to form a roughly filtered intermediate precision layer of a nano coating with a thickness of 30-40%; 7) The A-type filtered arc source supply is used to supply the ion source, and the ion beam composed of the ions filtered by the A-type filtered arc source supply bombards the surface of the workpiece for 2-4 minutes, with an arc current of 100A and a bias voltage of 130-150V, to form a precision filtered surface with a nano coating of 10-20% thickness; 8) Allow the temperature to drop naturally to below 100°C, turn off the vacuum system, and remove the workpiece.

2. The method for preparing a sandwich-type ultrafine nano coating according to claim 1, characterized in that: Type A filtered arc source supply includes a straight filter body for filtering ion sources with a diameter of more than 20μm.

3. The method for preparing a sandwich-type ultrafine nano coating according to claim 2, characterized in that: The B-type filtered arc source supply comprises a special-shaped cylindrical filter body, which filters ions with a diameter greater than 10 μm.

4. The method for preparing a sandwich-type ultrafine nano coating according to claim 3, characterized in that: The special-shaped cylindrical filter body is an L-shaped filter body.

5. The method for preparing a sandwich-type ultrafine nano coating according to claim 4, characterized in that: The special-shaped cylindrical filter body is an S-type filter body.

6. The method for preparing a sandwich-type ultrafine nano coating according to claim 5, characterized in that: The vacuum working furnace is an octagonal or hexagonal furnace.

7. The method for preparing a sandwich-type ultrafine nano coating according to claim 6, characterized in that: The number of arc source supply modules is one quarter or one third of the number of inner walls of the vacuum working furnace.

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