Silicon carbide raw material synthesis furnace

Abstract

The invention provides a silicon carbide raw material synthesis furnace. The silicon carbide raw material synthesis furnace comprises a furnace cover, a first lifting lug on the furnace cover, a hearth, a second lifting lug, a third lifting lug and a first lifting mechanism, the first lifting mechanism comprises a stand column, a sliding mounting plate, a lifting driving assembly, a guide rod, a rotating driving assembly, a first connecting assembly, a second connecting assembly and a third connecting assembly. The lifting driving assembly is arranged on the stand column, and the sliding installation plate is arranged on the stand column in a sliding mode and connected with the lifting driving assembly. The guide rod is arranged on the sliding mounting plate, the first connecting assembly, the second connecting assembly and the third connecting assembly are rotatably arranged on the guide rod, the first connecting assembly can be connected or disconnected with the first lifting lug, the second connecting assembly can be connected or disconnected with the second lifting lug, and the third connecting assembly can be connected or disconnected with the third lifting lug. The rotation driving assembly is used for driving the first connecting assembly to rotate around the guide rod. The furnace cover can be lifted independently or the furnace cover and the hearth can be lifted at the same time.

Description

Technical Field

[0001] The present application relates to the field of silicon carbide raw material synthesis, and specifically to a silicon carbide raw material synthesis furnace. Background Art

[0002] The existing silicon carbide raw material synthesis furnace is large in size and heavy in weight. When disassembling and assembling its furnace cover and furnace, it is necessary to use two sets of different lifting devices to disassemble and assemble the furnace cover and furnace in turn. This disassembly and assembly method makes the structure of the silicon carbide raw material synthesis furnace more complicated and the disassembly and assembly efficiency is low. Summary of the invention

[0003] In view of the above-mentioned defects of the existing silicon carbide raw material synthesis furnace, the present application provides a silicon carbide raw material synthesis furnace, and its detailed technical features are as follows:

[0004] A silicon carbide raw material synthesis furnace comprises a furnace cover, a first lifting lug fixedly arranged on the furnace cover, a furnace, a second lifting lug fixedly arranged on the furnace, a third lifting lug fixedly arranged on the furnace and located below the second lifting lug, and a first lifting mechanism, wherein the first lifting mechanism comprises a column, a sliding mounting plate, a lifting drive assembly, a guide rod, a rotating drive assembly, a first connecting assembly, a second connecting assembly, and a third connecting assembly, wherein:

[0005] The columns are arranged on the sides of the furnace cover and the furnace in the vertical direction, and the lifting drive components are arranged on the columns;

[0006] The sliding mounting plate is slidably arranged on the column and connected to the driving end of the lifting driving assembly, and the lifting driving assembly is used to drive the sliding mounting plate to slide and rise and fall along the column;

[0007] The guide rod is fixedly arranged on the sliding mounting plate; the first connecting assembly, the second connecting assembly and the third connecting assembly are rotatably arranged on the guide rod in sequence from top to bottom, wherein the first connecting assembly can be connected or disconnected with the first lifting ear, the second connecting assembly can be connected or disconnected with the second lifting ear; and the third connecting assembly can be connected or disconnected with the third lifting ear;

[0008] The driving end of the rotation driving assembly is transmission-connected to the first connecting assembly, and is used to drive the first connecting assembly to rotate around the guide rod;

[0009] When the first connecting assembly, the second connecting assembly, and the third connecting assembly are connected to the first lifting lug, the second lifting lug, and the third lifting lug respectively, the lifting drive assembly drives the guide rod on the sliding mounting plate to lift and lower, thereby realizing the simultaneous lifting and lowering of the furnace cover connected to the first connecting assembly and the furnace connected to the second connecting assembly and the third connecting assembly; the rotating drive assembly drives the furnace cover connected to the first connecting assembly to rotate and the furnace connected to the second connecting assembly and the third connecting assembly to rotate;

[0010] When the first connecting component is connected to the first lifting ear, and the second connecting component and the third connecting component are disconnected from the second lifting ear and the third lifting ear respectively, the lifting drive component drives the guide rod on the sliding mounting plate to lift and lower, thereby realizing the lifting and lowering of the furnace cover connected to the first connecting component; the rotating drive component drives the furnace cover connected to the first connecting component to rotate.

[0011] The silicon carbide raw material synthesis furnace provided by the present application can choose to lift the furnace cover alone, or lift the furnace cover and the furnace at the same time by setting a first lifting mechanism. The furnace cover and the furnace can be lifted by a set of first lifting mechanisms, thereby improving the efficiency of disassembly and assembly of the furnace cover and the furnace of the silicon carbide raw material synthesis furnace, and simplifying the structure of the silicon carbide raw material synthesis furnace. In addition, since the first connecting assembly, the second connecting assembly, and the third connecting assembly can all disconnect the corresponding first lifting lug, the second lifting lug, and the third lifting lug, the first lifting mechanism can be removed and transferred to the furnace cover and the furnace of other silicon carbide raw material synthesis furnaces, thereby reducing costs.

[0012] In some embodiments, the rotary drive assembly includes a rotary motor, a driving gear and a driven gear, wherein: the driving gear is arranged on the first connecting assembly and is transmission-connected to the driving end of the rotary motor, and the driven gear is fixedly arranged at the first end of the guide rod and meshes with the driving gear; the rotary motor is used to drive the driving gear to rotate around the driven gear, so as to drive the first connecting assembly to rotate around the guide rod.

[0013] A rotary drive assembly with a simple structure is provided, which drives the first connecting assembly to rotate around the guide rod through the cooperation of the driving gear and the driven gear. The gear drive structure has high transmission efficiency and high precision, and can improve the efficiency of the furnace cover and the furnace rotation.

[0014] In some embodiments, the first lifting mechanism further includes a first limit assembly, the first limit assembly includes a first proximity switch, a first sensing sheet, and a second sensing sheet, the first proximity switch is arranged on the first connecting assembly or the second connecting assembly or the third connecting assembly, the first sensing sheet and the second sensing sheet are arranged on the guide rod at intervals along the circumferential direction, and are located on the rotation path of the first connecting assembly or the second connecting assembly or the third connecting assembly;

[0015] Alternatively, the first limit assembly includes a second proximity switch, a third proximity switch and a third induction sheet, the third induction sheet is arranged on the driving gear, and the second proximity switch and the third proximity switch are arranged on the driven gear at intervals along the circumferential direction and are located on the rotation path of the driving gear;

[0016] Alternatively, the first limit assembly includes a seventh proximity switch, an eighth proximity switch and a fifth sensor plate, the fifth sensor plate is arranged on the guide rod, the fifth sensor plate has a fan-shaped area, and the seventh proximity switch and the eighth proximity switch are arranged below the fan-shaped area at intervals.

[0017] By setting up a first limit component and setting the first limit component to an inductive switch type limit structure including an inductive switch and an inductive plate, the inductive limit of the rotation stroke of the first lifting mechanism is achieved, thereby preventing the furnace cover that is lifted alone, or the furnace cover and furnace that are lifted at the same time from rotating at too large an angle, thereby preventing them from touching other surrounding devices and causing unnecessary safety accidents.

[0018] In some embodiments, the first lifting mechanism also includes a second limiting assembly, the second limiting assembly includes a first limiting member, a second limiting member and a limiting block, wherein: the limiting block is arranged on the driving gear, the first limiting member and the second limiting member are arranged on the driven gear at intervals along the circumferential direction, the first limiting member and the second limiting member both protrude from the meshing teeth of the driven gear to form a first limiting portion and a second limiting portion, and the first limiting portion and the second limiting portion are located on the rotation path of the driving gear.

[0019] Only the first limit assembly implements inductive limit on the rotation stroke of the first lifting mechanism. When the inductive switch of the first limit assembly fails, effective limit cannot be achieved. Therefore, by setting the second limit assembly, the mechanical limit of the rotation stroke of the first lifting mechanism is achieved, further ensuring that the rotation angle of the furnace cover lifted alone, or the furnace cover and furnace lifted at the same time, is limited within a predetermined range.

[0020] In some embodiments, the limiting block is arc-shaped and is extended along the root circle of the driving gear.

[0021] The limit block is set in an arc shape, which can be close to the driven gear without interfering with the normal meshing of the driving gear and the driven gear, thereby improving the stability of the meshing transmission. In addition, the limit block can abut against the first limit part and the second limit part at a closer distance, thereby improving the limit effect.

[0022] In some embodiments, the limiting stroke of the first limiting assembly is less than or equal to the limiting stroke of the second limiting assembly.

[0023] Since the second limit component adopts a mechanical limit method, it is inevitable that mechanical wear will be caused to components such as gears when the limit is implemented. By setting the limit stroke of the first limit component to be less than or equal to the limit stroke of the second limit component, it can be achieved that: when the first limit component is not invalid, the first limit component implements the inductive limit of the rotation stroke of the first lifting mechanism through inductive control, and the second limit component does not need to implement mechanical limit, thereby realizing anti-wear protection for components such as gears.

[0024] In some embodiments, two first lifting holes are sequentially provided on the first lifting ear along the vertical direction; the first connecting assembly includes a first rotating seat, two first connecting plates and two first pins, wherein: the first rotating seat can be rotatably set on the guide rod, the two first connecting plates are fixedly arranged in pairs on the first rotating seat, and the two first connecting plates are each provided with a first connecting hole; the first lifting ear is located between the two first connecting plates, and the two first pins respectively pass through the first connecting hole and the two first lifting holes to connect the first lifting ear to the two first connecting plates.

[0025] By setting the first lifting lug and the first connecting assembly, it is ensured that the first connecting assembly can realize rotation on the horizontal plane relative to the guide rod, and that the first connecting assembly and the first lifting lug can form a stable connection, preventing the first connecting assembly and the first lifting lug from rotating relative to each other, causing the furnace cover lifted alone to tilt.

[0026] In some embodiments, the first connecting member also includes a first latch pushing portion, which is arranged on the first lifting ear, and the first ends of the two first latches are connected to the movable part of the first latch pushing portion; the first lifting ear is located between the two first connecting plates, and the first latch pushing portion is used to drive the two first latches to pass through or disengage from the first connecting hole and the first lifting hole at the same time.

[0027] By providing the first latch pushing portion, the first connecting member can be automatically connected to and disconnected from the first lifting ear, thereby improving work efficiency.

[0028] In some embodiments, a second lifting hole is provided on the second lifting ear; the second connecting assembly and the third connecting assembly have the same structure, and the second connecting assembly includes a second rotating seat, two second connecting plates, a second latch and a second latch pushing portion, wherein: the second rotating seat can be rotatably set on the guide rod, the two second connecting plates are fixedly set in pairs on the second rotating seat, and the two second connecting plates are both provided with second connecting holes; the second latch pushing portion is set on the second lifting ear, and the first end of the second latch is connected to the movable part of the second latch pushing portion; the second lifting ear is located between the two second connecting plates, and the second latch pushing portion is used to drive the second latch to pass through or disengage from the second connecting hole and the second lifting hole.

[0029] By setting a second lifting hole on the second lifting ear, and setting the second connecting component and the third connecting component to include a second rotating seat, two second connecting plates, a second pin and a second pin pushing part, it is ensured that the second connecting component and the third connecting component can be rotated on the horizontal plane relative to the guide rod, and the second connecting member and the third connecting member can be automatically connected and disconnected with the second lifting ear, thereby improving work efficiency.

[0030] In some embodiments, the second latch pushing portion includes a mounting plate, a cylinder and a push plate, wherein: the push plate is connected to the driving end of the cylinder, the push plate has a mounting groove along the extension direction of the second latch, the first end of the second latch is fixedly mounted in the mounting groove, the mounting plate is fixedly connected to the second lifting ear, and the cylinder is fixedly mounted on the mounting plate, and is used to drive the second latch to pass through or disengage from the second connecting hole and the second lifting hole.

[0031] A second latch pin pushing part with a simple structure and convenient control is provided, which pushes the second latch pin to move through a cylinder to achieve automatic connection and automatic disconnection of the second lifting ear.

[0032] In some embodiments, the second latch pushing portion further includes a guide plate, which is close to the first end of the second latch and fixedly disposed on the mounting plate, and is provided with an arc-shaped guide groove adapted to the outer surface of the second latch.

[0033] By providing the guide plate, the movement guidance of the second latch pin is achieved, ensuring that the second latch pin can smoothly penetrate into the second connecting hole and the second hanging hole.

[0034] In some embodiments, the first lifting mechanism also includes a fourth proximity switch, a fifth proximity switch, a sixth proximity switch and a fourth sensor plate, the lifting drive assembly includes a motor, a lead screw and a nut, the fourth sensor plate is fixedly arranged on a sliding mounting plate, the sliding mounting plate is fixedly arranged on the nut, the fourth proximity switch, the fifth proximity switch and the sixth proximity switch are arranged in sequence from top to bottom along the lifting stroke of the nut, and the motor is used to drive the nut to rise and fall along the lead screw; when the lifting drive assembly drives the furnace cover to rise to the first high position, the fourth sensor plate moves to the vicinity of the fifth proximity switch, and the fifth proximity switch is triggered to generate an induction signal; when the lifting drive assembly drives the furnace cover to descend to the first low position, the fourth sensor plate moves to the vicinity of the sixth proximity switch, and the sixth proximity switch is triggered to generate an induction signal; when the lifting drive assembly drives the furnace chamber to rise to the second high position, the fourth sensor plate moves to the vicinity of the fourth proximity switch, and the fourth proximity switch is triggered to generate an induction signal, and the second high position is higher than the first high position; when the lifting drive assembly drives the furnace chamber to descend to the first low position, the fourth sensor plate moves to the vicinity of the sixth proximity switch, and the sixth proximity switch is triggered to generate an induction signal.

[0035] Lifting the furnace cover alone is generally only for opening the furnace cover, and the required lifting height of the furnace cover is generally low. Lifting the furnace cover and the furnace at the same time is generally for the purpose of disassembling and assembling the furnace cover and the furnace as a whole, and the lifting height of the furnace is generally high. By setting the fourth proximity switch, the fifth proximity switch, the sixth proximity switch and the fourth induction sheet, the inductive limit of the lifting stroke of the lifting drive component when the furnace cover is lifted alone is realized, ensuring that the lifting height of the furnace cover is within a predetermined target range, and the inductive limit of the lifting stroke of the lifting drive component when the furnace cover and the furnace are lifted at the same time is realized, ensuring that the lifting height of the furnace is within another predetermined target range.

[0036] In some embodiments, the first lifting mechanism also includes a first limit platform and a second limit platform for limiting the lifting and lowering stroke of the nut. The first limit platform and the second limit platform are arranged on the column. The first limit platform is located above the second highest position or at the same height as the second highest position, and the second limit platform is located below the first low position or at the same height as the first low position.

[0037] By setting the first limit platform above the second highest position or at the same height as the second highest position, and setting the second limit platform below the first low position or at the same height as the first low position, when any one of the fourth proximity switch, the fifth proximity switch, the sixth proximity switch and the fourth sensor plate fails, the lifting and lowering stroke of the first lifting mechanism can be doubly limited by mechanical limiting, thereby improving the limiting reliability.

[0038] In some embodiments, the lifting drive assembly also includes a retractable first dust cover and a second dust cover, the first dust cover is sleeved on the screw rod, and the first end of the first dust cover is fixedly connected to the first end of the screw rod, and the second end of the first dust cover is fixedly connected to the nut; the second dust cover is sleeved on the screw rod, and the first end of the second dust cover is fixedly connected to the second end of the screw rod, and the second end of the second dust cover is fixedly connected to the nut.

[0039] By providing a retractable first dust cover and a second dust cover, dust protection for the screw rod is achieved.

[0040] In some embodiments, the first lifting mechanism also includes a reinforcing column, which is arranged in parallel with the guide rod. The first connecting assembly, the second connecting assembly and the third connecting assembly are all installed on the reinforcing column. The rotation drive assembly drives the first connecting assembly to rotate around the guide rod, thereby driving the reinforcing column to rotate around the guide rod.

[0041] By providing the reinforcing column, the stability of the first lifting mechanism when driving the furnace chamber and the furnace cover to rotate together can be effectively improved.

[0042] In some embodiments, the silicon carbide raw material synthesis furnace also includes a second lifting mechanism, which is used to lift the internal components of the furnace. The second lifting mechanism includes a lifting and rotating assembly, a lifting plate and a plurality of connecting rods, wherein: the lifting plate is connected to the movable part of the lifting and rotating assembly; the upper end of each connecting rod is circumferentially connected to the lifting plate, and the lower end of each connecting rod is provided with a hook for connecting the components inside the furnace.

[0043] By providing the second lifting mechanism, the components inside the furnace can be lifted.

[0044] In some embodiments, the lifting plate is provided with a plurality of lifting ring groups arranged circumferentially and corresponding to the connecting rods one by one; each lifting ring group includes a plurality of lifting rings, and the distances between each lifting ring in the same lifting ring group and the center of the lifting plate are different, and the upper end of the connecting rod is connected to a lifting ring in the corresponding lifting ring group.

[0045] According to the outer contour size of the furnace components to be lifted, each connecting rod is selected to be connected to a suitable lifting ring in the corresponding lifting ring group, so that each connecting rod can connect and lift the furnace components to be lifted, thereby realizing the lifting compatibility of the second lifting mechanism with furnace components with different outer contour sizes. BRIEF DESCRIPTION OF THE DRAWINGS

[0046] Figure 1 A schematic diagram of the structure of a silicon carbide raw material synthesis furnace provided in an embodiment of the present application;

[0047] Figure 2A This is a schematic diagram of the structure of the first lifting mechanism in the embodiment of the present application;

[0048] Figure 2B for Figure 2A A side view of the first lifting mechanism;

[0049] Figure 3A for Figure 2A A partial enlarged view of the A area;

[0050] Figure 3B A schematic diagram of an implementation of the first limiting component;

[0051] Figure 4 for Figure 2A A local enlarged view of the B area;

[0052] Figure 5 It is a structural schematic diagram of the rotation drive assembly and the first connecting assembly in the embodiment of the present application;

[0053] Figure 6 A schematic diagram of the structure of the second connecting component and the third connecting component in the embodiment of the present application;

[0054] Figure 7This is a schematic diagram of the structure of the second lifting mechanism in the embodiment of the present application;

[0055] Figures 1 to 7 Included:

[0056] Furnace cover 1;

[0057] Furnace 2;

[0058] First lifting mechanism 3:

[0059] Column 31;

[0060] Sliding mounting plate 32;

[0061] Lifting drive assembly 33: motor 331, screw rod 332, nut 333;

[0062] Guide rod 30;

[0063] Rotation drive assembly 34: a rotation motor 341, a driving gear 342, and a driven gear 343;

[0064] The first connecting component 35 includes a first rotating seat 351 , a first connecting plate 352 , and a first latch 353 ;

[0065] The second connecting assembly 36 includes a second rotating seat 361, a second connecting plate 362, a second latch 363, a mounting plate 364, a cylinder 365, and a push plate 366;

[0066] A third connection component 37;

[0067] The first limit assembly 38 includes a first proximity switch 381, a first sensing sheet 382, ​​and a second sensing sheet 383;

[0068] The second limiting assembly 39 includes a first limiting member 391, a second limiting member 392, and a limiting block 393;

[0069] A fourth proximity switch 310;

[0070] A fifth proximity switch 320;

[0071] A sixth proximity switch 330;

[0072] Reinforcement column 340;

[0073] The first limit table 350;

[0074] The second limit table 360;

[0075] Support plate 370;

[0076] Fourth sensing sheet 380;

[0077] Seventh proximity switch 301;

[0078] Eighth proximity switch 302;

[0079] The fifth sensing sheet 303;

[0080] First lifting lug 4;

[0081] Second lifting lug 5;

[0082] The third lifting lug 6;

[0083] Second lifting mechanism 7:

[0084] Lifting and rotating assembly 71;

[0085] Lifting plate 72;

[0086] Connecting rod 73;

[0087] Ring set 74. DETAILED DESCRIPTION

[0088] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, the present application is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0089] The existing silicon carbide raw material synthesis furnace is large in size and heavy in weight. When disassembling and assembling its furnace cover and furnace, it is necessary to use two sets of different lifting devices to disassemble and assemble the furnace cover and furnace in turn. This disassembly and assembly method makes the structure of the silicon carbide raw material synthesis furnace more complicated and the disassembly and assembly efficiency is low.

[0090] In response to the above-mentioned defects of the existing silicon carbide raw material synthesis furnace, the present application provides a silicon carbide raw material synthesis furnace, which can choose to lift the furnace cover alone, or lift the furnace cover and the furnace chamber at the same time. The lifting of the furnace cover and the furnace chamber can be completed through a set of first lifting mechanism, thereby improving the efficiency of disassembly and assembly of the furnace cover and the furnace chamber of the silicon carbide raw material synthesis furnace, and simplifying the structure of the silicon carbide raw material synthesis furnace.

[0091] like Figure 1 and Figure 2A As shown, the silicon carbide raw material synthesis furnace provided in the embodiment of the present application includes a furnace cover 1, a first lifting ear fixedly arranged on the furnace cover 1, a furnace 2, a second lifting ear fixedly arranged on the furnace 2, a third lifting ear fixedly arranged on the furnace 2 and located below the second lifting ear, and a first lifting mechanism 3.

[0092] The first lifting mechanism 3 includes a column 31, a sliding mounting plate 32, a lifting drive assembly 33, a guide rod 30, a rotation drive assembly 34, a first connecting assembly 35, a second connecting assembly 36 and a third connecting assembly 37, wherein:

[0093] The columns 31 are arranged on the sides of the furnace cover 1 and the furnace chamber 2 in the vertical direction, and the lifting drive assembly 33 is arranged on the columns 31 .

[0094] The sliding mounting plate 32 is slidably disposed on the column 31 and is connected to a driving end of a lifting driving assembly 33 . The lifting driving assembly 33 is used to drive the sliding mounting plate 32 to slide and rise and fall along the column 31 .

[0095] The guide rod 30 is fixedly arranged on the sliding mounting plate 32. The first connecting assembly 35, the second connecting assembly 36 and the third connecting assembly 37 are rotatably arranged on the guide rod 30 in sequence from top to bottom, wherein the first connecting assembly 35 can be connected or disconnected with the first hanging ear, the second connecting assembly 36 can be connected or disconnected with the second hanging ear, and the third connecting assembly 37 can be connected or disconnected with the third hanging ear.

[0096] The driving end of the rotation driving assembly 34 is transmission-connected to the first connecting assembly 35 , and is used to drive the first connecting assembly 35 to rotate around the guide rod 30 .

[0097] The working principle of the first lifting mechanism 3 of the silicon carbide raw material synthesis furnace of the present application is as follows:

[0098] When it is necessary to lift the furnace cover 1 separately, for example, it is necessary to open the furnace cover 1 to add materials to the furnace 2, the lifting process of the first lifting mechanism 3 is as follows:

[0099] Firstly, the first connecting component 35 is controlled to be connected to the first lifting lug on the furnace cover 1 , and at the same time, the second connecting component 36 and the third connecting component 37 are controlled to be disconnected from the second lifting lug and the third lifting lug on the furnace chamber 2 respectively.

[0100] Next, the lifting drive assembly 33 is controlled to drive the sliding mounting plate 32 to rise, and the rotating drive assembly 34 is controlled to drive the first connecting assembly 35 to rotate. The furnace cover 1 is separated from the furnace chamber 2 under the drive of the first connecting assembly 35 .

[0101] When it is necessary to lift the furnace cover 1 and the furnace chamber 2 simultaneously, for example, when it is necessary to disassemble and assemble the furnace cover 1 and the furnace chamber 2 as a whole, the lifting process of the first lifting mechanism 3 is as follows:

[0102] First, the first connecting assembly 35 is controlled to be connected to the first lifting lug on the furnace cover 1 , and the second connecting assembly 36 and the third connecting assembly 37 are controlled to be connected to the second lifting lug and the third lifting lug on the furnace chamber 2 , respectively.

[0103] Next, the lifting drive assembly 33 is controlled to drive the sliding mounting plate 32 to rise, and the rotating drive assembly 34 is controlled to drive the first connecting assembly 35 to rotate. In this way, the furnace cover 1 and the furnace chamber 2 are lifted synchronously. At the same time, the furnace cover 1 rotates driven by the first connecting assembly 35, and the furnace chamber 2 also rotates synchronously with the furnace cover 1.

[0104] It can be seen that, by setting the first lifting mechanism 3, the silicon carbide raw material synthesis furnace provided by the present application can choose to lift the furnace cover 1 alone, or can choose to lift the furnace cover 1 and the furnace 2 at the same time. In other words, the present application can complete the lifting of the furnace cover 1 and the furnace 2 by only setting a set of first lifting mechanisms 3, thereby improving the efficiency of disassembly and assembly of the furnace cover 1 and the furnace 2 of the silicon carbide raw material synthesis furnace, and simplifying the structure of the silicon carbide raw material synthesis furnace.

[0105] In addition, since the first connecting assembly 35, the second connecting assembly 36, and the third connecting assembly 37 can be disconnected from the corresponding first lifting lug, the second lifting lug, and the third lifting lug, the first lifting mechanism 3 can be removed as a whole and transferred to the furnace cover 1 and the furnace chamber 2 of other silicon carbide raw material synthesis furnaces, thereby reducing costs.

[0106] In the embodiment of the present application, the first connecting component 35 and the first lifting ear, the second connecting component 36 and the second lifting ear, and the third connecting component 37 and the third lifting ear can be manually connected and disconnected, or can be automatically connected and disconnected by an automatic connecting device.

[0107] When the furnace cover 1 and the furnace chamber 2 need to be lifted simultaneously, considering the heavy weight of the furnace cover 1 and the furnace chamber 2, when the furnace cover 1 and the furnace chamber 2 are lifted and rotated synchronously, the connection between the three connecting components and the three lifting ears is fixed, and each connecting component may be unstable relative to the guide rod 30. In order to further improve the stability of each connecting component relative to the guide rod 30 during simultaneous lifting and rotation, the present application provides the following optional implementation:

[0108] like Figure 2A As shown, the first lifting mechanism 3 further includes a reinforcing column 340 , which is arranged in parallel with the guide rod 30 , and the first connecting assembly 35 , the second connecting assembly 36 and the third connecting assembly 37 are all mounted on the reinforcing column 340 .

[0109] Since the first connecting component 35, the second connecting component 36 and the third connecting component 37 can also be optionally rotatably arranged on the guide rod 30, when the rotation drive component 34 drives the first connecting component 35 to rotate around the guide rod 30, under the connection of the reinforcement column 340, the reinforcement column 340, the first connecting component 35, the second connecting component 36 and the third connecting component 37 rotate synchronously around the guide rod 30.

[0110] By providing the reinforcing column 340 , the connection stability of each connecting component relative to the guide rod 30 can be effectively improved.

[0111] like Figure 4 and Figure 5As shown, optionally, the rotation drive assembly 34 includes a rotation motor 341, a driving gear 342 and a driven gear 343, wherein: the driving gear 342 is arranged on the first connection assembly 35 and is drivingly connected to the driving end of the rotation motor 341, and the driven gear 343 is fixedly arranged at the first end (such as the upper end) of the guide rod 30 and meshes with the driving gear 3. The rotation motor 341 is used to drive the driving gear 342 to rotate around the driven gear 343, so as to drive the first connection assembly 35 to rotate around the guide rod 30.

[0112] The gear drive structure composed of the driving gear 342 and the driven gear 343 has high transmission efficiency and high precision, which can ensure that the furnace cover 1 that is lifted alone or the furnace chamber of the furnace cover 1 that is lifted simultaneously can be rotated and returned to their original positions efficiently.

[0113] Optionally, the first lifting mechanism 3 further includes a first limit assembly 38. The first limit assembly 38 includes a first proximity switch 381, a first sensing sheet 382, ​​and a second sensing sheet 383, wherein: the first proximity switch 381 is arranged on the first connecting assembly 35 or the second connecting assembly 36 or the third connecting assembly 37, and the first sensing sheet 382 and the second sensing sheet 383 are arranged on the guide rod 30 at intervals along the circumferential direction and are located on the rotation path of the first connecting assembly 35 or the second connecting assembly 36 or the third connecting assembly 37.

[0114] Specifically, when the first proximity switch 381 is arranged on the first connecting component 35, the first induction sheet and the second induction sheet are located on the rotation path of the first connecting component 35, and when the rotary drive component 34 drives the furnace cover 1 alone or drives the furnace cover 1 and the furnace chamber 2 synchronously, the first proximity switch arranged on the first connecting component 35 can be used to cooperate with the induction sheet to limit the position;

[0115] When the first proximity switch 381 is arranged on the second connecting component 36, the first induction sheet and the second induction sheet are located on the rotation path of the second connecting component 36, and when the rotary drive component 34 synchronously drives the furnace cover 1 and the furnace chamber 2, the first proximity switch arranged on the second connecting component can cooperate with the induction sheet to limit the position;

[0116] When the first proximity switch 381 is set on the third connecting component 37, the first sensing plate 382 and the second sensing plate 383 are located on the rotation path of the third connecting component 37. When the rotating drive component 34 synchronously drives the furnace cover 1 and the furnace chamber 2, the first proximity switch set on the third connecting component can be used to cooperate with the sensing plate to limit the position.

[0117] When the first proximity switch 381 is arranged on the second connecting component 36 or the third connecting component 37, it is only necessary to connect the first connecting component 35, the second connecting component 36 and the third connecting component 37 in combination with the reinforcing column 340 mentioned in the present application to realize the rotation limit when the rotation drive component 34 drives the furnace cover 1 to rotate alone.

[0118] Taking the first proximity switch 381 disposed on the third connecting component 37 as an example, when the third connecting component 37 rotates to the first position in a first clockwise direction (e.g., clockwise direction), the first proximity switch 381 approaches the first sensing sheet 382, ​​thereby being triggered to generate a rotation stop signal, and the rotation drive component 34 stops rotation driving. When the third connecting component 37 rotates to the second position in a second clockwise direction (e.g., counterclockwise direction), the first proximity switch 381 approaches the second sensing sheet 383, thereby being triggered to generate a rotation stop signal, and the rotation drive component 34 stops rotation driving.

[0119] In this way, the rotation stroke of the first lifting mechanism 3 is limited, thereby ensuring that the lifted furnace cover 1 and / or furnace 2 rotates within a predetermined angle range.

[0120] In some other optional embodiments, the first limit assembly includes a second proximity switch, a third proximity switch and a third sensor plate, wherein the third sensor plate is arranged on the driving gear 342, and the second proximity switch and the third proximity switch are arranged on the driven gear 343 at circumferential intervals and are located on the rotation path of the driving gear 342.

[0121] When the furnace cover 1 is lifted alone, or the furnace cover 1 and the furnace chamber 2 are lifted simultaneously, the furnace cover 1 rotates driven by the first connecting component 35. When the first connecting component 35 rotates to the third position in the first clockwise direction (e.g., clockwise direction) driven by the driving gear 342, the third induction sheet is triggered by the second proximity switch to generate a rotation stop signal, and the rotation drive component 34 stops the rotation drive. When the first connecting component 35 rotates to the fourth position in the second clockwise direction (e.g., counterclockwise direction) driven by the driving gear 342, the third induction sheet is triggered by the third proximity switch to generate a rotation stop signal, and the rotation drive component 34 stops the rotation drive.

[0122] In this way, the rotation stroke of the first lifting mechanism 3 is limited, thereby ensuring that the lifted furnace cover 1, or the lifted furnace cover 1 and the furnace 2 rotate within a predetermined angle range.

[0123] In some optional embodiments, such as Figure 3BAs shown, the first limit assembly 38 includes a seventh proximity switch 301, an eighth proximity switch 302 and a fifth induction sheet 303, the fifth induction sheet 303 is arranged on the guide rod, the fifth induction sheet 303 has a fan-shaped area, and the seventh proximity switch 301 and the eighth proximity switch 302 are arranged below the fan-shaped area at intervals. The first limit assembly 38 can be freely selected to be arranged close to any one of the first connecting assembly, the second connecting assembly or the third connecting assembly as needed.

[0124] By using two proximity switches, the rotation direction can be determined according to the sensing signals of the proximity switches, which makes the rotation operation of the first lifting mechanism 3 more convenient.

[0125] If the rotation stroke of the first lifting mechanism 3 is limited only by the inductive switch structure composed of the proximity switch and the inductive sheet, when the inductive switch fails, the rotation stroke cannot be effectively limited. Figure 4 As shown, the first lifting mechanism 3 in the embodiment of the present application further includes a second limiting assembly 39, which includes a first limiting member 391, a second limiting member 392 and a limiting block 393, wherein: the limiting block 393 is arranged on the driving gear 342, the first limiting member 391 and the second limiting member 392 are arranged on the driven gear 343 at intervals along the circumferential direction, the first limiting member 391 and the second limiting member 392 both protrude from the meshing teeth of the driven gear 343 to form a first limiting portion and a second limiting portion, and the first limiting portion and the second limiting portion are located on the rotation path of the driving gear 342. In this way, when the driving gear 342 rotates, the limiting block 393 thereon is limited between the first limiting portion and the second limiting portion, thereby realizing the limitation of the rotation angle of the driving gear 342, that is, realizing the limitation of the rotation stroke of the first lifting mechanism 3.

[0126] It can be seen that by providing the second limiting assembly 39, the mechanical limiting of the rotation stroke of the first lifting mechanism 3 is achieved, ensuring that the lifted furnace cover, or the lifted furnace cover and the furnace rotate within a predetermined angle range.

[0127] like Figure 4 As shown, optionally, the limit block 393 is in an arc shape and is extended along the root circle of the driving gear 342. The limit block 393 is set in an arc shape, which can be close to the driven gear 343 without interfering with the normal meshing of the driving gear 342 and the driven gear 343, thereby improving the stability of the meshing transmission. In addition, the limit block 393 can abut against the first limit portion and the second limit portion at a closer distance, thereby improving the limit effect.

[0128] Optionally, the limiting stroke of the first limiting assembly 38 is less than or equal to the limiting stroke of the second limiting assembly 39 .

[0129] Since the second limit component 39 adopts a mechanical limit method, it is inevitable that mechanical wear will occur to components such as gears when implementing the limit. By setting the limit stroke of the first limit component 38 to be less than or equal to the limit stroke of the second limit component 39, it can be achieved that: when the first limit component 38 works normally, the limit of the rotation stroke of the first lifting mechanism 3 is achieved by the first limit component 38 through inductive limit, and the second limit component 39 does not need to implement mechanical limit. In this way, anti-wear protection for components such as gears can be achieved.

[0130] That is to say, only when the first limiting assembly 38 fails, the second limiting assembly 39 will implement the mechanical limiting of the rotation stroke of the first lifting mechanism 3 .

[0131] like Figure 5 As shown, optionally, two first lifting holes are sequentially arranged on the first lifting ear 4 along the vertical direction. The first connecting assembly 35 includes a first rotating seat 351, two first connecting plates 352 and two first latches 353, wherein: the first rotating seat 351 can be rotatably arranged on the guide rod 30, the two first connecting plates 352 are fixedly arranged in pairs on the first rotating seat 351, and the two first connecting plates 352 are both provided with first connecting holes. The first lifting ear 4 is located between the two first connecting plates 352.

[0132] By passing the two first latches 353 through the first connection hole and the two first hanging holes respectively, the first hanging ear 4 can be connected to the two first connection plates 352, that is, the first connection component 35 is connected to the first hanging ear 4. By pulling the two first latches 353 out of the first connection hole and the two first hanging holes respectively, the first hanging ear 4 can be separated from the two first connection plates 352, that is, the first connection component 35 is disconnected from the first hanging ear 4.

[0133] Since the first lifting mechanism 3 lifts the furnace cover only through the first connecting assembly 35, if only one first lifting hole and one first latch 353 are provided, relative rotation between the first connecting assembly 35 and the first lifting lug 4 is easy to occur. However, by providing two first lifting holes on the first lifting lug 4 and connecting the first lifting lug 4 to the two first connecting plates 352 through the two first latches 353, it can be ensured that the first connecting assembly 35 and the first lifting lug 4 can form a stable connection, preventing the first connecting assembly 35 and the first lifting lug 4 from relative rotation, causing the furnace cover 1 lifted alone to deflect or tilt.

[0134] Optionally, in order to reduce equipment costs, the two first latches 353 may be manually inserted into and pulled out of the first connecting hole and the two first hanging holes, respectively, to connect and disconnect the first connecting component 35 and the first hanging ear 4.

[0135] Of course, in order to improve work efficiency, a driving mechanism may also be provided to implement automatic insertion and extraction of the first latch 353. For example, optionally, the first connector in the embodiment of the present application further includes a first latch pushing portion, which is provided on the first hanging ear 4, and the first ends of the two first latches 353 are both connected to the movable part of the first latch pushing portion. The first latch pushing portion is used to drive the two first latches 353 to simultaneously pass through or detach from the first connecting hole and the first hanging hole.

[0136] like Figure 6 As shown, optionally, a second hanging hole is provided on the second lifting ear 5. The second connecting assembly 36 includes a second rotating seat 361, two second connecting plates 362, a second latch 363 and a second latch pusher, wherein: the second rotating seat 361 is rotatably arranged on the guide rod 30, the two second connecting plates 362 are fixedly arranged in pairs on the second rotating seat 361, and the two second connecting plates 362 are both provided with a second connecting hole. The second latch pusher is arranged on the second lifting ear 5, and the first end of the second latch 363 is connected to the movable part of the second latch pusher. The second lifting ear 5 is located between the two second connecting plates 362, and the second latch pusher is used to drive the second latch 363 to pass through or disengage from the second connecting hole and the second hanging hole, thereby implementing the connection and disconnection of the second connecting assembly 36 and the second lifting ear 5.

[0137] Continue to refer Figure 6 As shown, optionally, the second latch pin pushing portion includes a mounting plate 364, a cylinder 365 and a push plate 366, wherein: the push plate 366 is connected to the driving end of the cylinder 365, the push plate 366 has a mounting groove along the extension direction of the second latch pin 363, the first end of the second latch pin 363 is fixedly mounted in the mounting groove, the mounting plate 364 is fixedly connected to the second lifting ear 5, and the cylinder 365 is fixedly mounted on the mounting plate 364, and is used to drive the second latch pin 363 to pass through or disengage from the second connecting hole and the second lifting hole.

[0138] Optionally, the second latch pin pushing portion further includes a guide plate, which is close to the first end of the second latch pin 363 and fixedly disposed on the mounting plate 364, and is provided with an arc-shaped guide groove adapted to the outer surface of the second latch pin 363. By providing the guide plate, the movement of the second latch pin 363 is guided, ensuring that the second latch pin 363 can be smoothly inserted into the second connecting hole and the second hanging hole.

[0139] Similarly, a third lifting hole is provided on the third lifting ear 6. The structure and working process of the third connecting assembly 37 are the same as those of the second connecting assembly 36, and will not be described here for simplicity.

[0140] Since the first lifting mechanism 3 simultaneously lifts the furnace cover through the second connecting assembly 36 and the third connecting assembly 37 arranged at the upper and lower parts, only one lifting hole is required on each of the second lifting lug 5 and the third lifting lug 6, and only one latch is required on each of the second connecting assembly 36 and the third connecting assembly 37, so as to ensure a stable connection between the second connecting assembly 36 and the second lifting lug 5, and between the third connecting assembly 37 and the third lifting lug 6.

[0141] As known to those skilled in the art, lifting the furnace cover 1 alone is generally only for opening the furnace cover 1, and the required lifting height of the furnace cover 1 is generally low. While lifting the furnace cover 1 and the furnace chamber 2 at the same time is generally for disassembling and assembling the furnace cover 1 and the furnace chamber 2 as a whole, and the required lifting height of the furnace chamber 2 is generally high.

[0142] In order to ensure that the lifting height of the furnace cover 1 is limited within a predetermined target range, and to ensure that the lifting height of the furnace chamber 2 is limited within another predetermined target range, it is necessary to control the lifting stroke of the first lifting mechanism 3.

[0143] In view of this, optional, such as Figure 2A As shown, the first lifting mechanism 3 in the embodiment of the present application further includes a fourth proximity switch 310 , a fifth proximity switch 320 , a sixth proximity switch 330 and a fourth sensor sheet 380 .

[0144] The lifting drive assembly 33 includes a motor 331, a screw rod 332 and a nut 333. The fourth sensor plate 380 is fixedly set on the sliding mounting plate 32, the sliding mounting plate 32 is fixedly set on the nut 333, the fourth proximity switch 310, the fifth proximity switch 320 and the sixth proximity switch 330 are arranged in sequence from top to bottom along the lifting stroke of the nut 333, and the motor 331 is used to drive the nut 333 to rise and fall along the screw rod 332.

[0145] During the process of lifting the furnace cover 1 alone, when the lifting drive assembly 33 drives the furnace cover 1 to rise to the first high position, the fourth induction sheet 380 moves to the vicinity of the fifth proximity switch 320, the fifth proximity switch 320 is triggered to generate a sensing signal, and the lifting drive assembly 33 stops driving the furnace cover 1 to rise. When the lifting drive assembly 33 drives the furnace cover 1 to descend to the first low position, the fourth induction sheet 380 moves to the vicinity of the sixth proximity switch 330, the sixth proximity switch 330 is triggered to generate a sensing signal, and the lifting drive assembly 33 stops driving the furnace cover 1 to descend. In this way, it can be ensured that the lifting height of the furnace cover 1 is limited to a predetermined target range.

[0146] In the process of simultaneously lifting the furnace cover 1 and the furnace 2, when the lifting drive assembly 33 drives the furnace 2 to rise to the second highest position (higher than the first highest position), the fourth induction sheet 380 moves to the vicinity of the fourth proximity switch 310, the fourth proximity switch 310 is triggered to generate a sensing signal, and the lifting drive assembly 33 stops driving the furnace 2 to rise. When the lifting drive assembly 33 drives the furnace 2 to descend to the first lowest position, the fourth induction sheet 380 moves to the vicinity of the sixth proximity switch 330, the sixth proximity switch 330 is triggered to generate a sensing signal, and the lifting drive assembly 33 stops driving the furnace 2 to descend. In this way, it can be ensured that the lifting height of the furnace 2 is limited to another predetermined target range.

[0147] In some embodiments, Figure 2B As shown, the first lifting mechanism 3 also includes a first limit platform 350 and a second limit platform 360 for limiting the lifting and lowering stroke of the nut 333. The first limit platform 350 and the second limit platform 360 are arranged on the column 31. The first limit platform 350 is located above the second highest position or at the same height as the second highest position, and the second limit platform 360 is located below the first low position or at the same height as the first low position.

[0148] By setting the first limit platform 350 above the second highest position or at the same height as the second highest position, and setting the second limit platform 360 below the first lowest position or at the same height as the first lowest position, when any one of the fourth proximity switch 310, the fifth proximity switch 320, the sixth proximity switch 330 and the fourth sensor plate 380 fails, the lifting and lowering stroke of the first lifting mechanism 3 can be doubly limited by mechanical limiting, thereby improving the limiting reliability.

[0149] like Figure 2B As shown, in order to improve the stability of the mechanical limit, two first limit platforms 350 are symmetrically arranged on the column, and two second limit platforms 360 are also arranged in pairs on the column. The nut 333 and the sliding mounting plate 32 are connected by a support plate 370, and the surface area of ​​the support plate 370 is larger than the surface area of ​​the nut 333. The support plate 370 can be directly used to cooperate with the first limit platform 350 and the second limit platform 360.

[0150] Optionally, the lifting drive assembly 33 also includes a retractable first dust cover and a second dust cover, the first dust cover is sleeved on the screw rod 332, and the first end of the first dust cover is fixedly connected to the first end (such as the upper end) of the screw rod 332, and the second end of the first dust cover is fixedly connected to the nut. The second dust cover is sleeved on the screw rod 332, and the first end of the second dust cover is fixedly connected to the second end (such as the lower end) of the screw rod, and the second end of the second dust cover is fixedly connected to the nut. By providing the retractable first dust cover and the second dust cover, dust protection for the screw rod is achieved.

[0151] Continue to refer Figure 1 and Figure 7 As shown, optionally, the silicon carbide raw material synthesis furnace in the embodiment of the present application further includes a second lifting mechanism 7, which is used to lift the internal components of the furnace, and the second lifting mechanism 7 includes a lifting and rotating assembly 71, a lifting plate 72 and a plurality of connecting rods 73 (such as four in the figure), wherein: the lifting plate 72 is connected to the movable part of the lifting and rotating assembly 71. The upper end of each connecting rod 73 is connected to the lifting plate 72 along the circumferential direction, and the lower end of each connecting rod 73 is provided with a hook for connecting the internal components of the furnace.

[0152] When it is necessary to lift the internal components of the furnace, first, the furnace cover 1 is lifted and rotated out of the furnace 2 by the lifting drive assembly 33, so that the top of the furnace 2 is open. Then, the lifting plate 7 is driven downward by the lifting and rotating assembly 71 to drive each connecting rod 73 to enter the furnace 2 and hook the internal components to be lifted through the hook. Next, the lifting plate 7 is driven upward by the lifting and rotating assembly 71 to drive each connecting rod 73 to lift the internal components out of the furnace 2. The internal components can be, for example, the crucible in the furnace, the heater insulation layer and other components.

[0153] Since the outer contours of different furnace components are different, in order to ensure that each connecting rod 73 can continuously lift different furnace components, the lifting plate 72 is optionally provided with a plurality of (four in the figure) lifting ring groups 74 arranged along the circumference and corresponding to the connecting rods 73. Each lifting ring group 74 includes a plurality of lifting rings (such as Figure 7 The distances between the lifting rings in the same lifting ring group 74 and the center of the lifting plate 72 are not equal, and the upper end of the connecting rod 73 is connected to a lifting ring in the corresponding lifting ring group 74. For example, when it is necessary to lift a crucible with a smaller outer contour, the upper end of each connecting rod 73 is connected to the innermost lifting ring in the corresponding lifting ring group 74. When it is necessary to lift an insulating layer with a larger outer contour, the upper end of each connecting rod 73 is connected to the outermost lifting ring in the corresponding lifting ring group 74.

[0154] The present application is described in sufficient detail above with certain particularity. It should be understood by those skilled in the art that the description in the embodiments is merely exemplary, and all changes made without departing from the true spirit and scope of the present application should fall within the scope of protection of the present application. The scope of protection claimed in the present application is defined by the claims, rather than by the above description in the embodiments.

Claims

1. A silicon carbide raw material synthesis furnace, characterized in that: The silicon carbide raw material synthesis furnace comprises a furnace cover, a first lifting lug fixedly arranged on the furnace cover, a furnace, a second lifting lug fixedly arranged on the furnace, a third lifting lug fixedly arranged on the furnace and located below the second lifting lug, and a first lifting mechanism, wherein the first lifting mechanism comprises a column, a sliding mounting plate, a lifting drive assembly, a guide rod, a rotating drive assembly, a first connecting assembly, a second connecting assembly, and a third connecting assembly, wherein: The columns are arranged on the sides of the furnace cover and the furnace in the vertical direction, and the lifting drive assembly is arranged on the columns; The sliding mounting plate is slidably disposed on the column and connected to the driving end of the lifting drive assembly, and the lifting drive assembly is used to drive the sliding mounting plate to slide and rise and fall along the column; The guide rod is fixedly arranged on the sliding mounting plate; the first connecting assembly, the second connecting assembly and the third connecting assembly are rotatably arranged on the guide rod in sequence from top to bottom, wherein the first connecting assembly can be connected or disconnected with the first lifting ear, the second connecting assembly can be connected or disconnected with the second lifting ear; the third connecting assembly can be connected or disconnected with the third lifting ear; The driving end of the rotation driving assembly is drivingly connected to the first connecting assembly, and is used to drive the first connecting assembly to rotate around the guide rod; When the first connecting assembly, the second connecting assembly and the third connecting assembly are connected to the first lifting lug, the second lifting lug and the third lifting lug respectively, the lifting drive assembly drives the guide rod on the sliding mounting plate to lift and lower, thereby realizing the simultaneous lifting and lowering of the furnace cover connected to the first connecting assembly and the furnace connected to the second connecting assembly and the third connecting assembly; the rotating drive assembly drives the furnace cover connected to the first connecting assembly to rotate and the furnace connected to the second connecting assembly and the third connecting assembly to rotate; When the first connecting component is connected to the first lifting ear, and the second connecting component and the third connecting component are disconnected from the second lifting ear and the third lifting ear respectively, the lifting drive component drives the guide rod on the sliding mounting plate to lift and lower, thereby realizing the lifting and lowering of the furnace cover connected to the first connecting component; the rotating drive component drives the furnace cover connected to the first connecting component to rotate.

2. The silicon carbide raw material synthesis furnace according to claim 1, characterized in that: The rotary drive assembly comprises a rotary motor, a driving gear and a driven gear, wherein: The driving gear is arranged on the first connecting assembly and is drivingly connected to the driving end of the rotating motor, and the driven gear is fixedly arranged on the first end of the guide rod and meshes with the driving gear; The rotary motor is used to drive the driving gear to rotate around the driven gear, so as to drive the first connecting component to rotate around the guide rod.

3. The silicon carbide raw material synthesis furnace according to claim 2, characterized in that: The first lifting mechanism further includes a first limit assembly, which includes a first proximity switch, a first sensing sheet and a second sensing sheet, wherein the first proximity switch is arranged on the first connecting assembly, the second connecting assembly or the third connecting assembly, and the first sensing sheet and the second sensing sheet are arranged on the guide rod at intervals along the circumferential direction and are located on a rotation path of the first connecting assembly, the second connecting assembly or the third connecting assembly; Alternatively, the first limit assembly includes a second proximity switch, a third proximity switch and a third induction sheet, the third induction sheet is arranged on the driving gear, and the second proximity switch and the third proximity switch are arranged on the driven gear at intervals along the circumferential direction and are located on the rotation path of the driving gear; Alternatively, the first limit assembly includes a seventh proximity switch, an eighth proximity switch and a fifth sensor plate, the fifth sensor plate is arranged on the guide rod, the fifth sensor plate has a fan-shaped area, and the seventh proximity switch and the eighth proximity switch are arranged below the fan-shaped area at intervals.

4. The silicon carbide raw material synthesis furnace according to claim 3, characterized in that: The first lifting mechanism further includes a second limiting assembly, and the second limiting assembly includes a first limiting member, a second limiting member and a limiting block, wherein: The limiting block is arranged on the driving gear, the first limiting member and the second limiting member are arranged on the driven gear at intervals along the circumferential direction, the first limiting member and the second limiting member both protrude from the meshing teeth of the driven gear to form a first limiting portion and a second limiting portion, and the first limiting portion and the second limiting portion are located on the rotation path of the driving gear; The limiting stroke of the first limiting assembly is less than or equal to the limiting stroke of the second limiting assembly.

5. The silicon carbide raw material synthesis furnace according to claim 1, characterized in that: The first lifting ear is provided with two first lifting holes in sequence along the vertical direction; The first connecting assembly includes a first rotating seat, two first connecting plates and two first latches, wherein: The first rotating seat is rotatably arranged on the guide rod, and the two first connecting plates are fixedly arranged on the first rotating seat in pairs, and the two first connecting plates are both provided with a first connecting hole; The first lifting ear is located between the two first connecting plates, and the two first latches pass through the first connecting hole and the two first lifting holes respectively to connect the first lifting ear to the two first connecting plates.

6. The silicon carbide raw material synthesis furnace according to claim 5, characterized in that: The first connecting member further comprises a first latch pushing portion, the first latch pushing portion is arranged on the first lifting ear, and the first ends of the two first latches are both connected to a movable component of the first latch pushing portion; The first lifting ear is located between the two first connecting plates, and the first latch pushing portion is used to drive the two first latches to simultaneously pass through or disengage from the first connecting hole and the first lifting hole.

7. The silicon carbide raw material synthesis furnace according to claim 1, characterized in that: The second lifting ear is provided with a second lifting hole; The second connecting assembly has the same structure as the third connecting assembly. The second connecting assembly includes a second rotating seat, two second connecting plates, a second latch and a second latch pushing portion, wherein: The second rotating seat is rotatably arranged on the guide rod, and two second connecting plates are fixedly arranged on the second rotating seat in pairs, and the two second connecting plates are both provided with a second connecting hole; The second latch pin pushing portion is disposed on the second lifting ear, and the first end of the second latch pin is connected to a movable component of the second latch pin pushing portion; The second lifting ear is located between the two second connecting plates, and the second latch pushing portion is used to drive the second latch to pass through or disengage from the second connecting hole and the second lifting hole.

8. The silicon carbide raw material synthesis furnace according to claim 7, characterized in that: The second latch pushing portion includes a mounting plate, a cylinder and a push plate, wherein: The push plate is connected to the driving end of the cylinder, and has a mounting groove along the extension direction of the second latch, the first end of the second latch is fixedly mounted in the mounting groove, the mounting plate is fixedly connected to the second lifting ear, and the cylinder is fixedly mounted on the mounting plate, and is used to drive the second latch to pass through or disengage from the second connecting hole and the second lifting hole.

9. The silicon carbide raw material synthesis furnace according to claim 8, characterized in that: The second latch pushing portion further comprises a guide plate, which is close to the first end of the second latch and fixedly disposed on the mounting plate, and is provided with an arc-shaped guide groove adapted to the outer surface of the second latch.

10. The silicon carbide raw material synthesis furnace according to claim 1, characterized in that: The first lifting mechanism further includes a fourth proximity switch, a fifth proximity switch, a sixth proximity switch and a fourth induction sheet, the lifting drive assembly includes a motor, a lead screw and a nut, the fourth induction sheet is fixedly arranged on the sliding mounting plate, the sliding mounting plate is fixedly arranged on the nut, the fourth proximity switch, the fifth proximity switch and the sixth proximity switch are arranged in sequence from top to bottom along the lifting stroke of the nut, and the motor is used to drive the nut to lift and lower along the lead screw; When the lifting drive assembly drives the furnace cover to rise to the first high position, the fourth induction sheet moves to the vicinity of the fifth proximity switch, and the fifth proximity switch is triggered to generate an induction signal; when the lifting drive assembly drives the furnace cover to descend to the first low position, the fourth induction sheet moves to the vicinity of the sixth proximity switch, and the sixth proximity switch is triggered to generate an induction signal; When the lifting drive assembly drives the furnace to rise to the second highest position, the fourth sensor plate moves to the vicinity of the fourth proximity switch, and the fourth proximity switch is triggered to generate a sensing signal, and the second high position is higher than the first high position; when the lifting drive assembly drives the furnace to descend to the first low position, the fourth sensor plate moves to the vicinity of the sixth proximity switch, and the sixth proximity switch is triggered to generate a sensing signal.

11. The silicon carbide raw material synthesis furnace according to claim 10, characterized in that: The first lifting mechanism also includes a first limit platform and a second limit platform for limiting the lifting and lowering stroke of the nut. The first limit platform and the second limit platform are arranged on the column. The first limit platform is located above the second high position or at the same height as the second high position, and the second limit platform is located below the first low position or at the same height as the first low position.

12. The silicon carbide raw material synthesis furnace according to claim 10, characterized in that: The lifting drive assembly also includes a retractable first dust cover and a second dust cover, the first dust cover is sleeved on the screw rod, and the first end of the first dust cover is fixedly connected to the first end of the screw rod, and the second end of the first dust cover is fixedly connected to the nut; the second dust cover is sleeved on the screw rod, and the first end of the second dust cover is fixedly connected to the second end of the screw rod, and the second end of the second dust cover is fixedly connected to the nut.

13. The silicon carbide raw material synthesis furnace according to claim 1, characterized in that: The first lifting mechanism also includes a reinforcing column, which is arranged in parallel with the guide rod. The first connecting assembly, the second connecting assembly and the third connecting assembly are all installed on the reinforcing column. The rotating drive assembly drives the first connecting assembly to rotate around the guide rod, thereby driving the reinforcing column to rotate around the guide rod.

14. The silicon carbide raw material synthesis furnace according to any one of claims 1 to 13, characterized in that: The silicon carbide raw material synthesis furnace further includes a second lifting mechanism, which is used to lift the internal components of the furnace, and the second lifting mechanism includes a lifting and rotating assembly, a lifting plate and a plurality of connecting rods, wherein: The lifting plate is connected to the movable part of the lifting and rotating assembly; The upper end of each connecting rod is connected to the lifting plate along the circumferential direction, and the lower end of each connecting rod is provided with a hook for connecting the furnace internal components.

15. The silicon carbide raw material synthesis furnace according to claim 14, characterized in that: The lifting plate is provided with a plurality of lifting ring groups arranged along the circumferential direction and corresponding to the connecting rods one by one; Each of the lifting ring groups includes a plurality of lifting rings, and the distances between the lifting rings in the same lifting ring group and the center of the lifting plate are different. The upper end of the connecting rod is connected to a lifting ring in the corresponding lifting ring group.

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