Three-dimensional geometry measurement apparatus, three-dimensional geometry measurement method, storage medium, and computer program product

Abstract

The invention relates to a three-dimensional geometrical shape measuring device, a three-dimensional geometrical shape measuring method, a storage medium and a computer program product. The three-dimensional geometry measurement apparatus (100) and (300) includes: a first recognition unit (541) that recognizes a primary absolute phase value corresponding to each of a plurality of pixels of a first imaging unit (3); a second identification unit (542) for identifying a secondary absolute phase value corresponding to each of the plurality of pixels of the second imaging unit (4); a conversion recognition unit (55) for recognizing a conversion value for converting the primary coordinate or the secondary coordinate; and a geometry recognition unit (56) for converting the primary coordinates or the secondary coordinates on the basis of the conversion value, and recognizing the three-dimensional geometry of the object to be measured on the basis of the converted coordinates.

Description

Technical Field

[0001] The present disclosure relates to a three-dimensional geometry measuring device, a three-dimensional geometry measuring method, and a storage medium storing a program. Background Art

[0002] A method has been proposed for measuring the geometric shape of an object to be measured without contacting the object by projecting a projection pattern onto the object and analyzing a captured image obtained by capturing the object to be measured on which the projection pattern is projected (for example, see Japanese Patent Laid-Open No. 2017-146298). Summary of the invention

[0003] Problem that the invention aims to solve

[0004] In the three-dimensional geometry measuring device described in Japanese Patent Laid-Open No. 2017-146298, when the object to be measured is relatively large, it may not be possible to obtain a captured image of the entire object to be measured using a single camera, which may hinder the measurement of the geometry of the entire object to be measured. In such a case, it is conceivable to obtain multiple three-dimensional geometry data by analyzing multiple captured images obtained using multiple camera devices in the three-dimensional geometry measuring device. The three-dimensional geometry measuring device measures the geometry of the entire object to be measured by aligning multiple three-dimensional geometry data. However, due to the influence of time or temperature changes, the alignment accuracy of the three-dimensional geometry data is reduced. The reduction in the alignment accuracy leads to a decrease in the measurement accuracy of the geometry of the entire object to be measured. The alignment accuracy may be affected by aging or temperature changes of the instrument used for alignment, for example.

[0005] The present disclosure has been made in view of these points, and an object thereof is to prevent acquisition of a three-dimensional geometric shape with reduced measurement accuracy caused by alignment in a state where alignment accuracy of a plurality of three-dimensional geometric shape data generated based on a plurality of captured images is reduced.

[0006] Solutions for solving problems

[0007] According to a first aspect of the present disclosure, a three-dimensional geometric shape measuring device includes: a projection unit for projecting a first fringe projection image and a second fringe projection image onto an object to be measured, the first fringe projection image having a first pattern whose brightness changes along a first direction, and the second fringe projection image having a second pattern whose brightness changes along a second direction different from the first direction; a first camera unit for generating a first fringe captured image by photographing the object to be measured in a state where the first fringe projection image is projected, and generating a second fringe captured image by photographing the object to be measured in a state where the second fringe projection image is projected; a first recognition unit for recognizing a primary absolute phase value corresponding to each pixel of a plurality of pixels of the first camera unit based on an image of the first pattern in the first fringe captured image generated by the first camera unit and an image of the second pattern in the second fringe captured image generated by the first camera unit; and a second camera unit for capturing a first fringe captured image of the object to be measured by photographing a second fringe captured image of the object to be measured in a state where the second fringe projection image is projected. a first fringe captured image by capturing the object to be measured in a state where the second fringe projection image is projected, and a second fringe captured image by capturing the object to be measured in a state where the second fringe projection image is projected; a second recognition unit for recognizing a secondary absolute phase value corresponding to each pixel of a plurality of pixels of the second imaging unit based on an image of the first pattern in the first fringe captured image generated by the second imaging unit and an image of the second pattern in the second fringe captured image generated by the second imaging unit; a conversion recognition unit for recognizing a conversion value for converting a primary coordinate corresponding to the primary absolute phase value or a secondary coordinate corresponding to a secondary absolute phase value equal to the primary absolute phase value in a three-dimensional space so that the primary coordinate and the secondary coordinate become closer to each other in the three-dimensional space; and a geometric shape recognition unit for converting the primary coordinate or the secondary coordinate based on the conversion value, and recognizing a three-dimensional geometric shape of the object to be measured based on the converted coordinates.

[0008] The conversion identification unit may identify the conversion value, the conversion value including a translation amount and a rotation amount, wherein the primary coordinate is translated by the translation amount to make the primary coordinate consistent with the secondary coordinate, and the primary coordinate is rotated by the rotation amount to make the primary coordinate consistent with the secondary coordinate.

[0009] The three-dimensional geometric shape measuring device may also include: an area segmentation unit, used to segment a three-dimensional area including multiple primary coordinates corresponding to multiple primary absolute phase values ​​identified by the first identification unit into multiple primary partial areas, and to segment a three-dimensional area including multiple secondary coordinates corresponding to multiple secondary absolute phase values ​​identified by the second identification unit into multiple secondary partial areas, wherein the conversion identification unit can identify the following conversion value for each primary partial area among the multiple primary partial areas, and the conversion value is used to convert the primary coordinates included in the primary partial area or the secondary coordinates included in the secondary partial area corresponding to the absolute phase value same as the absolute phase value of the primary coordinates included in the primary partial area, so that the primary coordinates included in the primary partial area and the secondary coordinates included in the secondary partial area become closer to each other in the three-dimensional space.

[0010] The first identification unit can respectively identify multiple primary absolute phase values ​​in multiple measurement instances, the second identification unit can respectively identify multiple secondary absolute phase values ​​in the multiple measurement instances, the conversion identification unit can respectively identify the following conversion values ​​and identify the statistics of the identified multiple conversion values, the conversion values ​​are used to convert multiple primary coordinates in the three-dimensional space corresponding to each of the multiple primary absolute phase values ​​corresponding to the multiple measurement instances, or multiple secondary coordinates corresponding to the secondary absolute phase value equal to the primary absolute phase value, so that the multiple primary coordinates and the multiple secondary coordinates become closer to each other in the three-dimensional space, and the geometric shape identification unit can convert the primary coordinates or the secondary coordinates based on the statistics of the identified conversion values.

[0011] The conversion identification unit can identify the following part based on the conversion value, in which the primary coordinate corresponding to the primary absolute phase value and the secondary coordinate corresponding to the secondary absolute phase value equal to the primary absolute phase value in the three-dimensional space cannot be closer to each other in the three-dimensional space.

[0012] The first recognition section may extract a primary feature quantity from the first fringe captured image generated by the first imaging section and the second fringe captured image generated by the first imaging section, and recognize a primary reliability indicating the reliability of the primary absolute phase value based on the extracted primary feature quantity, and the second recognition section may extract a secondary feature quantity from the first fringe captured image generated by the second imaging section and the second fringe captured image generated by the second imaging section, and recognize a secondary reliability indicating the reliability of the secondary absolute phase value based on the extracted secondary feature quantity, and the conversion recognition section may recognize the three-dimensional coordinates included in the object to be measured by statistical processing based on the primary reliability and the secondary reliability.

[0013] The first recognition section may extract a primary feature quantity from the first fringe captured image generated by the first camera section and the second fringe captured image generated by the first camera section, and recognize a primary reliability indicating the reliability of the primary absolute phase value based on the extracted primary feature quantity, the second recognition section may extract a secondary feature quantity from the first fringe captured image generated by the second camera section and the second fringe captured image generated by the second camera section, and recognize a secondary reliability indicating the reliability of the secondary absolute phase value based on the extracted secondary feature quantity, and the conversion recognition section may recognize the three-dimensional geometric shape of the object to be measured by selecting one of the primary coordinate after alignment and the secondary coordinate that has been converted in the alignment to become closer to the primary coordinate after alignment for each of the primary coordinates based on a comparison result between the primary reliability and the secondary reliability. In addition, the conversion recognition section may recognize the next timing for recognizing the conversion value based on a result of comparing the recognized conversion value with a previously recognized conversion value.

[0014] The conversion recognition section may recognize the conversion value every predetermined time period, and the three-dimensional geometric shape measuring device may further include a display control section for displaying a transition of the conversion value recognized by the conversion recognition section in the past. In addition, a portion of the imaging range of the first imaging section and the imaging range of the second imaging section do not need to overlap with each other.

[0015] According to a second aspect of the present disclosure, a three-dimensional geometric shape measuring device includes: a projection unit for projecting a first fringe projection image and a second fringe projection image onto an object to be measured, the first fringe projection image having a first pattern whose brightness changes along a first direction, and the second fringe projection image having a second pattern whose brightness changes along a second direction different from the first direction; a first camera unit for generating a first fringe captured image by photographing the object to be measured in a state where the first fringe projection image is projected, and generating a second fringe captured image by photographing the object to be measured in a state where the second fringe projection image is projected; a first recognition unit for recognizing a primary absolute phase value corresponding to each pixel of a plurality of pixels of the first camera unit based on an image of the first pattern in the first fringe captured image generated by the first camera unit and an image of the second pattern in the second fringe captured image generated by the first camera unit; and a second camera unit for capturing a first fringe captured image of the object to be measured in a state where the first fringe projection image is projected. a first fringe captured image by capturing the object to be measured in a state where the second fringe projection image is projected, and a second fringe captured image by capturing the object to be measured in a state where the second fringe projection image is projected; a second recognition unit for recognizing a secondary absolute phase value corresponding to each of a plurality of pixels of the second imaging unit based on an image of the first pattern in the first fringe captured image generated by the second imaging unit and an image of the second pattern in the second fringe captured image generated by the second imaging unit; a conversion recognition unit for recognizing a conversion value for converting a primary coordinate corresponding to the primary absolute phase value or a secondary coordinate corresponding to a secondary absolute phase value equal to the primary absolute phase value in a three-dimensional space so that the primary coordinate and the secondary coordinate become closer to each other in the three-dimensional space; a judgment unit for judging that misalignment has occurred between the primary coordinate and the secondary coordinate when the conversion value is greater than a predetermined reference value; and an output unit for outputting a judgment result from the judgment unit.

[0016] In addition, after the alignment between the primary coordinate and the secondary coordinate is performed, the judgment unit can identify the similarity between the primary coordinate and the secondary coordinate by calculating the coordinate difference between the primary coordinate and the secondary coordinate, and when the similarity is equal to or less than a threshold value, it can be judged that a defect has occurred in at least one or more of the projection unit, the first camera unit and the second camera unit.

[0017] According to a third aspect of the present disclosure, a three-dimensional geometric shape measurement method is executed by a computer and includes the following steps: projecting a first fringe projection image having a first pattern with brightness changing along a first direction onto an object to be measured; projecting a second fringe projection image having a second pattern with brightness changing along a second direction different from the first direction onto the object to be measured; using a first camera unit, generating a first fringe captured image by photographing the object to be measured in a state where the first fringe projection image is projected, and generating a second fringe captured image by photographing the object to be measured in a state where the second fringe projection image is projected; based on an image of the first pattern in the first fringe captured image generated by the first camera unit and an image of the second pattern in the second fringe captured image generated by the first camera unit, identifying a primary absolute phase value corresponding to each pixel of a plurality of pixels of the first camera unit; using the second camera unit, photographing the object to be measured in a state where the second fringe projection image is projected The method comprises the steps of: generating a first fringe captured image by capturing the object to be measured in a state where the first fringe projection image is projected, and generating a second fringe captured image by capturing the object to be measured in a state where the second fringe projection image is projected; identifying a secondary absolute phase value corresponding to each pixel of a plurality of pixels of the second imaging unit based on an image of the first pattern in the first fringe captured image generated by the second imaging unit and an image of the second pattern in the second fringe captured image generated by the second imaging unit; determining a conversion value, the conversion value being used to convert a primary coordinate corresponding to the primary absolute phase value or a secondary coordinate corresponding to a secondary absolute phase value equal to the primary absolute phase value in a three-dimensional space so that the primary coordinate and the secondary coordinate become closer to each other in the three-dimensional space; and converting the primary coordinate or the secondary coordinate based on the conversion value, thereby identifying a three-dimensional geometric shape of the object to be measured based on the converted coordinates.

[0018] According to a fourth aspect of the present disclosure, a three-dimensional geometric shape measuring method is executed by a computer and includes the following steps: projecting a first fringe projection image having a first pattern with brightness changing along a first direction onto an object to be measured; projecting a second fringe projection image having a second pattern with brightness changing along a second direction different from the first direction onto the object to be measured; using a first camera unit, generating a first fringe captured image by photographing the object to be measured in a state where the first fringe projection image is projected, and generating a second fringe captured image by photographing the object to be measured in a state where the second fringe projection image is projected; identifying a primary absolute phase value corresponding to each pixel of a plurality of pixels of the first camera unit based on an image of the first pattern in the first fringe captured image generated by the first camera unit and an image of the second pattern in the second fringe captured image generated by the first camera unit; using the second camera unit, photographing the object to be measured in a state where the first fringe projection image is projected, and generating a second fringe captured image by photographing the object to be measured in a state where the second fringe projection image is projected. The method comprises the steps of: generating a first fringe captured image by capturing an object to be measured in a state of projecting a projection image, and generating a second fringe captured image by capturing an object to be measured in a state of projecting the second fringe projection image; identifying a secondary absolute phase value corresponding to each pixel of a plurality of pixels of the second imaging unit based on an image of the first pattern in the first fringe captured image generated by the second imaging unit and an image of the second pattern in the second fringe captured image generated by the second imaging unit; determining a conversion value for converting a primary coordinate corresponding to the primary absolute phase value or a secondary coordinate corresponding to a secondary absolute phase value equal to the primary absolute phase value in a three-dimensional space so that the primary coordinate and the secondary coordinate become closer to each other in the three-dimensional space; determining that a misalignment has occurred between the primary coordinate and the secondary coordinate when the conversion value is greater than a predetermined reference value; and outputting a judgment result related to whether the misalignment has occurred.

[0019] According to a fifth aspect of the present disclosure, a storage medium storing a program causes a computer to execute the following steps: projecting a first fringe projection image having a first pattern with brightness changing along a first direction onto an object to be measured; projecting a second fringe projection image having a second pattern with brightness changing along a second direction different from the first direction onto the object to be measured; using a first camera unit, generating a first fringe captured image by photographing the object to be measured in a state where the first fringe projection image is projected, and generating a second fringe captured image by photographing the object to be measured in a state where the second fringe projection image is projected; identifying a primary absolute phase value corresponding to each pixel of a plurality of pixels of the first camera unit based on an image of the first pattern in the first fringe captured image generated by the first camera unit and an image of the second pattern in the second fringe captured image generated by the first camera unit; using the second camera unit, photographing the object to be measured in a state where the second fringe projection image is projected, The method comprises the steps of: generating a first fringe captured image by capturing the object to be measured in a state where the first fringe projection image is projected, and generating a second fringe captured image by capturing the object to be measured in a state where the second fringe projection image is projected; identifying a secondary absolute phase value corresponding to each pixel of a plurality of pixels of the second imaging unit based on an image of the first pattern in the first fringe captured image generated by the second imaging unit and an image of the second pattern in the second fringe captured image generated by the second imaging unit; determining a conversion value, the conversion value being used to convert a primary coordinate corresponding to the primary absolute phase value or a secondary coordinate corresponding to a secondary absolute phase value equal to the primary absolute phase value in a three-dimensional space so that the primary coordinate and the secondary coordinate become closer to each other in the three-dimensional space; and converting the primary coordinate or the secondary coordinate based on the conversion value, thereby identifying a three-dimensional geometric shape of the object to be measured based on the converted coordinates.

[0020] According to a sixth aspect of the present disclosure, a storage medium storing a program causes a computer to execute the following steps: projecting a first fringe projection image having a first pattern with brightness changing along a first direction onto an object to be measured; projecting a second fringe projection image having a second pattern with brightness changing along a second direction different from the first direction onto the object to be measured; using a first camera unit, generating a first fringe captured image by photographing the object to be measured in a state where the first fringe projection image is projected, and generating a second fringe captured image by photographing the object to be measured in a state where the second fringe projection image is projected; identifying a primary absolute phase value corresponding to each pixel of a plurality of pixels of the first camera unit based on an image of the first pattern in the first fringe captured image generated by the first camera unit and an image of the second pattern in the second fringe captured image generated by the first camera unit; using a second camera unit, photographing the object to be measured in a state where the first fringe projection image is projected, and generating a second fringe captured image by photographing the object to be measured in a state where the second fringe projection image is projected. The method comprises the steps of: generating a first fringe captured image by capturing an object to be measured in a state of projecting a projection image, and generating a second fringe captured image by capturing an object to be measured in a state of projecting the second fringe projection image; identifying a secondary absolute phase value corresponding to each pixel of a plurality of pixels of the second imaging unit based on an image of the first pattern in the first fringe captured image generated by the second imaging unit and an image of the second pattern in the second fringe captured image generated by the second imaging unit; determining a conversion value for converting a primary coordinate corresponding to the primary absolute phase value or a secondary coordinate corresponding to a secondary absolute phase value equal to the primary absolute phase value in a three-dimensional space so that the primary coordinate and the secondary coordinate become closer to each other in the three-dimensional space; determining that a misalignment has occurred between the primary coordinate and the secondary coordinate when the conversion value is greater than a predetermined reference value; and outputting a judgment result related to whether the misalignment has occurred.

[0021] Effects of the Invention

[0022] According to the present disclosure, it is possible to prevent measurement of a three-dimensional geometric shape from occurring in a state where the alignment accuracy of a plurality of three-dimensional geometric shape data generated based on a plurality of captured images is reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a diagram for explaining the outline of the three-dimensional geometric shape measuring apparatus according to the first embodiment.

[0024] Figure 2 An example of a projection image projected onto an object to be measured using a three-dimensional geometry measuring device is shown.

[0025] Figure 3 The structure of a three-dimensional geometry measuring device is shown.

[0026] Figure 4 Examples of a first fringe projection image and a second fringe projection image are shown.

[0027] Figure 5 An example of a first fringe projection image projected by the projection control unit is shown.

[0028] Figure 6 An example of a first fringe projection image projected by the projection control unit is shown.

[0029] Figure 7 Another example of the arrangement of the first projection section and the second projection section is shown.

[0030] Figure 8 An example of a first fringe projection image that the projection control unit causes the first projection unit to project is shown.

[0031] Fig. 9 Another example of arrangement of the plurality of projection sections is shown.

[0032] Fig.10 Another structural example of the three-dimensional geometry measuring device is shown.

[0033] Fig.11 Another structural example of the three-dimensional geometry measuring device is shown.

[0034] Fig.12 The relationship between the phase value and the absolute phase value is shown.

[0035] Fig.13 An example of a method of identifying a primary absolute phase value and a secondary absolute phase value is shown.

[0036] Fig.14 Detailed description is a flowchart showing a process for recognizing a three-dimensional geometric shape of an object to be measured using a three-dimensional geometric shape measuring device.

[0037] Fig.15 It is shown Fig.14 Flowchart of the conversion value recognition process.

[0038] Fig.16 It is shown Fig.14 Flowchart of the process of geometric shape recognition processing.

[0039] Fig.17 The structure of a three-dimensional geometry measuring apparatus according to a second embodiment is shown.

[0040] Fig.18 The structure of a three-dimensional geometry measuring apparatus according to a third embodiment is shown.

[0041] Fig.191 is a flowchart showing a processing procedure for determining whether misalignment has occurred in primary coordinates or secondary coordinates in a three-dimensional geometric shape measuring apparatus.

[0042] Description of Reference Numerals

[0043] 1First projection part

[0044] 2 Second projection unit

[0045] 3First Camera Unit

[0046] 4Second Camera Unit

[0047] 5. Control Unit

[0048] 6 Display unit

[0049] 7 Storage

[0050] 10 Projection Department

[0051] 10a Framework

[0052] 10b Framework

[0053] 31 Lenses

[0054] 32 camera elements

[0055] 41 Lens

[0056] 42 Camera Components

[0057] 51 Projection Control Unit

[0058] 52 Shooting control unit

[0059] 53 Area Division

[0060] 54 Identification Department

[0061] 55 conversion recognition unit

[0062] 56Geometric shape recognition unit

[0063] 57 Display control unit

[0064] 81 Third Camera Department

[0065] 82 Fourth Camera Department

[0066] 100 3D geometry measuring equipment

[0067] 200 3D geometry measuring equipment

[0068] 201 Auxiliary Camera Department

[0069] 300 3D geometry measuring equipment

[0070] 301 Judgment Department

[0071] 302 display control unit

[0072] 541 First Identification Unit

[0073] 542 Second Identification Unit DETAILED DESCRIPTION

[0074] <First Embodiment>

[0075] [Overview of Three-Dimensional Geometry Measuring Apparatus 100]

[0076] Figure 1 1 is a diagram for explaining the outline of a three-dimensional geometric shape measuring apparatus 100 according to the first embodiment. Figure 2 An example of a projection image projected onto an object to be measured using the three-dimensional geometry measuring device 100 is shown. The three-dimensional geometry measuring device 100 projects a projection image onto a measurement surface of the object to be measured using two projection units (a first projection unit 1 and a second projection unit 2). The object to be measured is a target for measuring a three-dimensional geometry.

[0077] The three-dimensional geometric shape measuring apparatus 100 uses two imaging units, namely, the first imaging unit 3 and the second imaging unit 4, to photograph the object to be measured in a state where the projection image projected by the first projection unit 1 or the second projection unit 2 is projected onto the object to be measured. The three-dimensional geometric shape measuring apparatus 100 optically measures the three-dimensional geometric shape of the object to be measured by analyzing the photographed image generated by the three-dimensional geometric shape measuring apparatus 100.

[0078] The first projection unit 1 and the second projection unit 2 are projection devices having a light source such as a light emitting diode or a laser, etc. The first projection unit 1 projects a first fringe projection image having a first pattern with brightness changing along a first direction onto the object to be measured. Figure 2 An example of a first fringe projection image projected by the first projection unit 1 or the second projection unit 2 onto the object to be measured is shown. Figure 2 The example of shows a first fringe projection image including a binary fringe pattern. The second projection unit 2 projects a second fringe projection image having a second pattern whose brightness changes along a second direction onto the object to be measured. The first direction and the second direction are, for example, directions orthogonal to each other on the object to be measured, but may be directions not orthogonal to each other. The projected image is used as a mark for identifying the three-dimensional coordinates of the object to be measured.

[0079] Figure 1The first imaging unit 3 in the embodiment includes a lens 31 and an imaging element 32. The first imaging unit 3 generates a first fringe captured image by capturing the object to be measured in a state where the first fringe projection image is projected. The first imaging unit 3 generates a second fringe captured image by capturing the object to be measured in a state where the second fringe projection image is projected.

[0080] The second imaging unit 4 includes a lens 41 and an imaging element 42. The second imaging unit 4 generates a secondary first fringe captured image by capturing the object to be measured in a state where the first fringe projection image is projected. The second imaging unit 4 generates a secondary second fringe captured image by capturing the object to be measured in a state where the second fringe projection image is projected.

[0081] For example, in the case where the entire object to be measured cannot be photographed by only the first imaging unit 3 because the object to be measured is large or has a large number of concavities and convexities, the second imaging unit 4 photographs the portion that cannot be photographed by the first imaging unit 3. The first imaging unit 3 and the second imaging unit 4 generate a first fringe photographed image and a second fringe photographed image (hereinafter referred to as a first photographed image), and a second first fringe photographed image and a second second fringe photographed image (hereinafter referred to as a second photographed image), so that a portion of the object to be measured included in the first photographed image overlaps in the second photographed image. At this time, a portion of the photographing range of the first imaging unit 3 and a portion of the photographing range of the second imaging unit 4 do not need to overlap each other.

[0082] The control unit 5 is implemented by a computer, for example. The control unit 5 measures the geometric shape of the object to be measured based on the multiple captured images generated by the first camera unit 3 and the second camera unit 4. The control unit 5 identifies the three-dimensional coordinates by identifying the phase value of the pattern in each pixel of the projection image projected onto the object to be measured. The phase value indicates the progression stage of the repetition cycle of the pattern of brightness change. The phase value indicates the same value for each cycle. The absolute phase value uniquely indicates the progression stage of the repetition cycle of the pattern. The pattern is, for example, a stripe pattern. The pattern may be a two-dimensional pattern such as a random pattern.

[0083] The control unit 5 aligns the three-dimensional geometric shape data of the object to be measured based on the primary captured image captured by the first camera unit 3 and the three-dimensional geometric shape data of the object to be measured based on the secondary captured image captured by the second camera unit 4. Hereinafter, the following process performed by the control unit 5 will be described: i) aligning the three-dimensional geometric shape data generated based on the primary captured image generated by the first camera unit 3 and ii) aligning the three-dimensional geometric shape data generated based on the secondary captured image generated by the second camera unit 4. The control unit 5 generates a primary first fringe captured image and a primary second fringe captured image by photographing the object to be measured using the first camera unit 3. The three-dimensional geometric shape measuring device 100 generates a secondary first fringe captured image and a secondary second fringe captured image ( Figure 1 (1) in the figure.

[0084] The control unit 5 recognizes the primary absolute phase values ​​of the plurality of pixels of the first imaging unit 3 in the first direction based on the image of the first pattern included in the primary first fringe captured image. The control unit 5 recognizes the primary absolute phase values ​​of the plurality of pixels of the first imaging unit 3 in the second direction based on the image of the second pattern included in the primary second fringe captured image ( Figure 1 The control unit 5 identifies the secondary absolute phase values ​​of the plurality of pixels of the second imaging unit 4 in the first direction based on the image of the first pattern included in the secondary first fringe captured image. The control unit 5 identifies the secondary absolute phase values ​​of the plurality of pixels of the second imaging unit 4 in the second direction based on the image of the second pattern included in the secondary second fringe captured image ( Figure 1 (3) in the figure.

[0085] The control unit 5 identifies the three-dimensional coordinates (hereinafter referred to as the primary coordinates) corresponding to the primary absolute phase value in at least one of the identified first direction and the second direction. The control unit 5 identifies the three-dimensional coordinates (hereinafter referred to as the secondary coordinates) corresponding to the secondary absolute phase value in the identified first direction or the second direction. Here, in the case where the primary absolute phase value and the secondary absolute phase value are consistent with each other, the primary coordinate corresponding to the primary absolute phase value and the secondary coordinate corresponding to the secondary absolute phase value should also be consistent with each other. However, due to measurement errors in the first camera unit 3 or the second camera unit 4 caused by the passage of time or temperature changes, the primary coordinates and the secondary coordinates may be inconsistent with each other. Therefore, the control unit 5 identifies a conversion value, which is used to convert the primary coordinates so that the primary coordinates corresponding to the primary absolute phase value in the three-dimensional space and the secondary coordinates corresponding to the secondary absolute phase value equal to the primary absolute phase value become closer to each other in the three-dimensional space ( Figure 1 (4) in the figure.

[0086] Next, the three-dimensional geometry measuring apparatus 100 generates a primary captured image obtained by re-photographing the object to be measured using the first imaging section 3, and recognizes again a plurality of primary absolute phase values ​​in the first direction and the second direction corresponding to the primary first fringe captured image. Similarly, the three-dimensional geometry measuring apparatus 100 generates a secondary captured image obtained by re-photographing the object to be measured using the second imaging section 4, and recognizes again a plurality of secondary absolute phase values ​​in the first direction and the second direction corresponding to the secondary captured image.

[0087] The three-dimensional geometry measuring apparatus 100 converts the plurality of primary coordinates corresponding to the plurality of primary absolute phase values ​​recognized again based on the conversion value. The three-dimensional geometry measuring apparatus 100 recognizes the three-dimensional geometry of the entire object to be measured by connecting the plurality of converted primary coordinates to the plurality of secondary coordinates corresponding to the plurality of secondary absolute phase values ​​recognized again. Figure 1 In this way, the control unit 5 can prevent the decrease in the alignment accuracy of the primary coordinates and the secondary coordinates due to the influence of the passage of time or temperature changes.

[0088] [Structure of Three-Dimensional Geometry Measuring Apparatus 100]

[0089] Figure 3 1 shows the structure of the three-dimensional geometric shape measuring device 100. The three-dimensional geometric shape measuring device 100 includes a first camera 3, a second camera 4, a control unit 5, a display unit 6, a storage unit 7, and a projection unit 10. The control unit 5 includes a projection control unit 51, a shooting control unit 52, a region division unit 53, a recognition unit 54, a conversion recognition unit 55, a geometric shape recognition unit 56, and a display control unit 57. The number of the camera units 3 and 4 and the number of the projection units 1 and 2 are not limited to two, and may be more.

[0090] The display section 6 is, for example, a display. The display section 6 displays various types of information. The storage section 7 includes storage media such as a read-only memory (ROM), a random access memory (RAM), and a hard disk. The storage section 7 stores programs executed by the control section 5.

[0091] The projection unit 10 projects a first fringe projection image having a first pattern with brightness changing along a first direction and a second fringe projection image having a second pattern with brightness changing along a second direction onto the object to be measured. The projection unit 10 includes a first projection unit 1 and a second projection unit 2.

[0092] The control unit 5 is, for example, a central processing unit (CPU) and functions as a projection control unit 51 , an imaging control unit 52 , an area division unit 53 , a recognition unit 54 , a conversion recognition unit 55 , a geometric shape recognition unit 56 , and a display control unit 57 by executing programs stored in the storage unit 7 .

[0093] The projection control unit 51 controls the projection unit 10 to project the first fringe projection image or the second fringe projection image onto the object to be measured. The projection control unit 51 causes the first projection unit 1 to project the first fringe projection image having a first pattern whose brightness changes along the first direction onto the object to be measured. The projection control unit 51 causes the second projection unit 2 to project the second fringe projection image having a second pattern whose brightness changes along the second direction onto the object to be measured. The second direction is, for example, a direction orthogonal to the first direction on the object to be measured. The first direction and the second direction do not need to be orthogonal to each other.

[0094] Figure 4 (a) and Figure 4 (b) each shows an example of a first fringe projection image and a second fringe projection image. Figure 4 (a) shows an example of a first fringe projection image that the projection control unit 51 causes the first projection unit 1 to project. Figure 4 (b) shows an example of the second fringe projection image that the projection control unit 51 causes the second projection unit 2 to project. Figure 4 The first fringe projection image shown in (a) has a first pattern in which brightness changes along a horizontal direction as a first direction. Figure 4 The second fringe projection image shown in (b) has a second pattern in which brightness changes along a vertical direction serving as a second direction.

[0095] exist Figure 4 (a) and Figure 4 In the example of (b), the second direction forms an angle of 90 degrees with the first direction. The projection control section 51 can cause only the first projection section 1 or only the second projection section 2 to project the first fringe projection image and the second fringe projection image onto the object to be measured. The projection control section 51 can cause three or more projection sections to project the first fringe projection image and the second fringe projection image onto the object to be measured. As an example, in the case where the projection control section 51 causes the first projection section 1, the second projection section 2, and the third projection section (not shown) to project the first fringe projection image and the second fringe projection image onto the object to be measured, the projection control section 51 can cause the first projection section 1 to project the first fringe projection image, the second projection section 2 to project another first fringe projection image, and the third projection section to project the second fringe projection image. In addition to causing the first projection section 1 to project the first fringe projection image and the second fringe projection image onto the object to be measured, the projection control section 51 can also cause the second projection section 2 to project the first fringe projection image and the second fringe projection image onto the object to be measured.

[0096] Figure 5 (a) to Figure 5 (f) and Figure 6 (a) to Figure 6(d) shows an example of the first fringe projection image projected by the projection control section 51 . Figure 5 (a) to Figure 5 (f) shows an example of a binary stripe pattern. Figure 6 (a) to Figure 6 (d) shows an example of a grayscale stripe pattern with a sinusoidal brightness distribution.

[0097] exist Figure 6 (a) to Figure 6 In the grayscale stripe pattern of (d), the shading changes sinusoidally from white areas to black areas along the width of the stripes.

[0098] Figure 6 (a) to Figure 6 The grayscale stripe patterns of (d) are different from each other in the following aspects: the phases of the sine waves indicating the brightness distribution differ from each other by 90 degrees, and the brightness distributions of these grayscale stripe patterns are the same in other aspects. The binary stripe pattern projected onto the object to be measured is analyzed by the recognition unit 54 using the spatial encoding method. The grayscale stripe pattern with a sinusoidal brightness distribution projected onto the object to be measured is analyzed by the recognition unit 54 using the phase shift method. By combining the analysis results of the two patterns, the absolute phase value is calculated using the recognition unit 54 to be described later. In addition to the above-mentioned patterns, any stripe pattern can be used. For example, multiple sinusoidal patterns with different stripe periods can be used.

[0099] Figure 7 Another example of the arrangement of the first projection unit 1 and the second projection unit 2 is shown. Figure 7 In the example of FIG. 6 , the first camera unit 3 and the first projection unit 1 are housed in the same frame 60a. The second projection unit 2 and the second camera unit 4 are housed in the same frame 60b. Figure 7 In FIG. , W indicates the object to be measured. Figure 7 The dotted line in indicates the optical axis of the first imaging unit 3 or the second imaging unit 4 and the outermost part of the imaging range, etc. In addition, in the three-dimensional geometric shape measuring device 100, the number of imaging units or projection units accommodated in one frame 60a or 60b can be increased. The geometric shape recognition unit 56 (to be described later) can respectively recognize a plurality of three-dimensional geometric shapes corresponding to a plurality of captured images captured by a plurality of imaging units accommodated in one frame, and align the recognized plurality of three-dimensional geometric shapes.

[0100] Figure 8 (a) shows an example of a primary projection image that the projection control unit 51 causes the first projection unit 1 to project. Figure 8 (b) shows an example of a secondary projection image that the projection control unit 51 causes the second projection unit 2 to project. Figure 8In the example of (b), the projection control unit 51 causes the second projection unit 2 facing in a direction different from that of the first projection unit 1 to project the same Figure 8 The same image as the first fringe projection image shown in (a) is projected onto the object to be measured. Figure 8 In the state (b), the direction of the stripes looks different from Figure 8 The direction of the first fringe projection image shown in (a). In addition, the projection unit 10 is not limited to the example including the first projection unit 1 and the second projection unit 2, and may include more projection units. In addition, the camera unit, the projection unit, and the frame accommodating the camera unit or the projection unit may be configured to be able to change their positions.

[0101] Fig. 9 Another example of the arrangement of the plurality of projection units is shown. Fig. 9 In the example of FIG. 1 , in addition to the first imaging unit 3 and the first projection unit 1 accommodated in the frame 60a and the second projection unit 2 and the second imaging unit 4 accommodated in the frame 60b, the three-dimensional geometric shape measuring device 100 further includes an auxiliary projection unit 70. By increasing the number of projection units, the three-dimensional geometric shape measuring device 100 can prevent the occurrence of a shadow portion on which a projection image is not projected on the object to be measured, and prevent the possibility that the parallax between the imaging unit and the projection unit cannot be sufficiently ensured.

[0102] The projection section 10 is not limited to the example including the first projection section 1 and the second projection section 2 , and may include one of the first projection section 1 and the second projection section 2 . Fig.10 The structural example of the three-dimensional geometry measuring device 100 in which the projection unit 10 includes only the first projection unit 1 is shown. The first projection unit 1 projects a first fringe projection image having a first pattern whose brightness changes along a first direction onto the object to be measured W. The first projection unit 1 also projects a second fringe projection image having a second pattern whose brightness changes along a second direction onto the object to be measured W. The projection control unit 51 can control the projection unit 10 to project a projection image including a fringe pattern onto the object to be measured W, wherein the directions in which the fringe pattern extends are different from each other in a plurality of measurement instances. In the three-dimensional geometry measuring device 100, the first projection unit 1, the second projection unit 2, and the first camera unit 3 can be accommodated in one frame.

[0103] The photographing control unit 52 generates a photographed image obtained by photographing the object to be measured using the first camera unit 3 or the second camera unit 4. The photographing control unit 52 generates a first fringe photographed image by photographing the object to be measured in a state where the first fringe projection image is projected using the first camera unit 3. The photographing control unit 52 generates a second first fringe photographed image by photographing the object to be measured in a state where the first fringe projection image is projected using the second camera unit 4. The photographing control unit 52 generates a first second fringe photographed image by photographing the object to be measured in a state where the second fringe projection image is projected using the first camera unit 3. The photographing control unit 52 generates a second second fringe photographed image by photographing the object to be measured in a state where the second fringe projection image is projected using the second camera unit 4.

[0104] The imaging control unit 52 may generate a plurality of primary captured images in a plurality of measurement instances using the first imaging unit 3. The imaging control unit 52 may generate a plurality of secondary captured images in a plurality of measurement instances using the second imaging unit 4. The imaging control unit 52 outputs the generated first fringe captured images and second fringe captured images to the region segmentation unit 53 and the recognition unit 54.

[0105] The imaging control unit 52 may generate a captured image using an additional imaging unit in addition to the first imaging unit 3 and the second imaging unit 4 . Fig.11 An example of the structure of a three-dimensional geometry measuring device 100 with an additional imaging unit is shown. In addition to the first imaging unit 3 and the second imaging unit 4, the three-dimensional geometry measuring device 100 further includes a third imaging unit 81 and a fourth imaging unit 82. The imaging control unit 52 generates a primary first fringe imaging image by imaging the object to be measured W in a state where the first fringe projection image is projected using the first imaging unit 3. The imaging control unit 52 generates a secondary first fringe imaging image by imaging the object to be measured W in a state where the first fringe projection image is projected using the second imaging unit 4. The imaging control unit 52 generates a tertiary first fringe imaging image by imaging the object to be measured W in a state where the first fringe projection image is projected using the third imaging unit 81. The imaging control unit 52 generates a quaternary first fringe imaging image by imaging the object to be measured W in a state where the first fringe projection image is projected using the fourth imaging unit 82.

[0106] In addition, the three-dimensional geometry measuring device 100 may include a first frame, a second frame, a third frame, and a fourth frame instead of the first camera unit 3, the second camera unit 4, the third camera unit 81, and the fourth camera unit 82. The first frame to the fourth frame may include one or more camera units and one or more projection units, respectively.

[0107] The photographing control unit 52 generates a first second fringe photographed image by photographing the object to be measured W in a state where the second fringe projection image is projected using the first camera unit 3. The photographing control unit 52 generates a second second fringe photographed image twice by photographing the object to be measured W in a state where the second fringe projection image is projected using the second camera unit 4. The photographing control unit 52 generates a third second fringe photographed image by photographing the object to be measured W in a state where the second fringe projection image is projected using the third camera unit 81. The photographing control unit 52 generates a fourth second fringe photographed image by photographing the object to be measured W in a state where the second fringe projection image is projected using the fourth camera unit 82. In this way, since the number of photographed images used to identify the three-dimensional geometric shape of the object to be measured can be increased, the photographing control unit 52 can improve the measurement accuracy of triangulation.

[0108] The region segmentation unit 53 segments a three-dimensional region including a plurality of three-dimensional coordinates of the object to be measured into a plurality of partial regions. First, the region segmentation unit 53 identifies a plurality of primary coordinates corresponding to a plurality of primary absolute phase values ​​identified by the first identification unit 541. The region segmentation unit 53 identifies a three-dimensional region including the identified plurality of primary coordinates, and segments the three-dimensional region into a plurality of primary partial regions.

[0109] Similarly, the region segmentation unit 53 segments the three-dimensional region including multiple secondary coordinates corresponding to the multiple secondary absolute phase values ​​identified by the second identification unit 542 into multiple secondary partial regions. At this time, the region segmentation unit 53 makes the three-dimensional region including multiple primary coordinates before segmentation consistent with the three-dimensional region including multiple secondary coordinates before segmentation. For example, the region segmentation unit 53 segments each three-dimensional region so that the boundary for segmenting the three-dimensional region including multiple primary coordinates and the boundary for segmenting the three-dimensional region including multiple secondary coordinates are consistent with each other. The boundary between the primary coordinate side and the secondary coordinate side does not necessarily have to be consistent with each other, as long as the area on the primary coordinate side and the area on the secondary coordinate side partially overlap with each other.

[0110] In addition, the region segmentation unit 53 can segment the three-dimensional region specified by the user. The three-dimensional region can have any shape such as a circle or a rectangle. The region segmentation unit 53 can segment only the three-dimensional region of interest to the user so that the primary coordinates included in the segmented primary partial region are aligned with the corresponding secondary coordinates. The region segmentation unit 53 is not limited to the example of segmenting the three-dimensional region including the primary coordinates or the secondary coordinates. For example, the region segmentation unit 53 can form a plurality of primary partial regions by segmenting at least a portion of the primary captured image. The region segmentation unit 53 can form a plurality of secondary partial regions by segmenting at least a portion of the secondary captured image.

[0111] Similarly, the region segmentation unit 53 segments the image of the object to be measured included in the secondary first fringe captured image into a plurality of images of the secondary first fringe partial region. The region segmentation unit 53 segments the image of the object to be measured included in the secondary second fringe captured image into a plurality of images of the secondary second fringe partial region at the same boundary lines as the boundary lines of the plurality of regions generated by segmenting the secondary first fringe captured image. The region segmentation unit 53 outputs information indicating the segmented plurality of primary partial regions and the segmented plurality of secondary partial regions to the recognition unit 54.

[0112] [Identification of absolute phase value]

[0113] The recognition section 54 recognizes the absolute phase value of the pattern of the first fringe projection image or the second fringe projection image included in each pixel of the primary captured image or the secondary captured image. Fig.12 The relationship between the phase value and the absolute phase value is shown. Fig.12 The vertical axis in indicates the phase value or the absolute phase value. Fig.12 The horizontal axis in indicates the positions of pixels of the projected image. Fig.12 The solid line in indicates the phase value, and Fig.12 The dotted line in indicates an absolute phase value. The phase value indicates the progress stage of the repetition cycle of the pattern of brightness change. The phase value indicates the same value for each cycle. The absolute phase value is a value for uniquely identifying the progress stage of the repetition cycle of the pattern without repeating the same value in different cycles.

[0114] The recognition unit 54 includes a first recognition unit 541 and a second recognition unit 542. The first recognition unit 541 recognizes a first absolute phase value in a first direction corresponding to each of a plurality of pixels of the first imaging unit 3 based on an image of a first pattern in a first fringe captured image. The first recognition unit 541 recognizes a first absolute phase value in a second direction corresponding to each of a plurality of pixels of the first imaging unit 3 based on an image of a second pattern in a second fringe captured image.

[0115] For example, the projection control unit 51 Figure 5 (a) to Figure 5 (f) and Figure 6 (a) to Figure 6 When the first fringe projection image (d) is projected onto the object to be measured W, the first recognition unit 541 recognizes the absolute phase value by recognizing the brightness of each pixel of the projected first fringe projection image. AP,S1 (i s1 ,j s1 ) is represented by the following formula (1).

[0116] I AP，s1 (is1 , j s1 )=(I AP，s1，1 (i s1 , j sl ), I AP，s1，2 (i s1 , j s1 )) (1)

[0117] (i s1 , j s1 ) represents the coordinates of the pixels of the first imaging unit 3. AP，s1，1 (i s1 , j s1 ) represents the first absolute phase value of the pixel of the first imaging unit 3 in the first direction. AP，s1，2 (i s1 , j s1 ) represents the first absolute phase value of the pixel of the first camera unit 3 in the second direction.

[0118] Similarly, the second recognition unit 542 recognizes the secondary absolute phase value in the first direction corresponding to each pixel in the plurality of pixels of the second imaging unit 4 based on the image of the first pattern in the secondary first fringe captured image. The second recognition unit 542 recognizes the secondary absolute phase value in the second direction corresponding to each pixel in the plurality of pixels of the second imaging unit 4 based on the image of the second pattern in the secondary second fringe captured image. For example, the secondary absolute phase value I AP，S2 (i s2 , j s2 ) is represented by the following formula (2).

[0119] I AP，s2 (i s2 , j s2 )=(I AP，s2，1 (i s2 , j s2 ), I AP，s2，2 (i s2 , j s2 )) (2)

[0120] (i s2 , j s2 ) represents the coordinates of the pixels of the second imaging unit 4. AP，s2，1 (i s2 , j s2 ) represents the secondary absolute phase value of the pixel of the second imaging unit 4 in the first direction. AP，s2，2 (i s2 , j s2 ) represents the secondary absolute phase value of the pixel of the second camera unit 4 in the second direction.

[0121] In the case where the region segmentation unit 53 segments the image of the object to be measured included in the primary first stripe captured image into a plurality of images of the primary first stripe partial region, the first recognition unit 541 recognizes a plurality of primary absolute phase values ​​in the first direction corresponding to each of a plurality of pixels of the image of the primary first stripe partial region. In the case where the region segmentation unit 53 segments the image of the object to be measured included in the primary second stripe captured image into a plurality of images of the primary second stripe partial region, the first recognition unit 541 recognizes a plurality of primary absolute phase values ​​in the second direction corresponding to each of a plurality of pixels of the image of the primary second stripe partial region.

[0122] In the case where the region segmentation unit 53 segments the image of the object to be measured included in the secondary first fringe captured image into a plurality of images of the secondary first fringe partial region, the second recognition unit 542 recognizes a plurality of secondary absolute phase values ​​in the first direction corresponding to each of a plurality of pixels of the image of the secondary first fringe partial region. In the case where the region segmentation unit 53 segments the image of the object to be measured included in the secondary second fringe captured image into a plurality of images of the secondary second fringe partial region, the second recognition unit 542 recognizes a plurality of secondary absolute phase values ​​in the second direction corresponding to each of a plurality of pixels of the image of the secondary second fringe partial region.

[0123] In the case where the shooting control unit 52 generates multiple first-order first fringe shooting images in multiple measurement instances, the first recognition unit 541 can respectively recognize multiple first-order absolute phase values ​​in the first direction corresponding to the multiple first fringe shooting images. The first recognition unit 541 can respectively recognize multiple first-order absolute phase values ​​in the second direction in multiple measurement instances. Similarly, the second recognition unit 542 can respectively recognize multiple first-order absolute phase values ​​in the first direction in multiple measurement instances. The second recognition unit 542 can respectively recognize multiple second-order absolute phase values ​​in the second direction in multiple measurement instances.

[0124] [Reliability Identification]

[0125] The first recognition unit 541 extracts a primary feature quantity in the first direction from a first fringe captured image. The first recognition unit 541 recognizes a primary reliability in the first direction indicating the reliability of a primary absolute phase value in the first direction based on the extracted primary feature quantity in the first direction. For example, the brightness value of a pixel of the first fringe captured image can be used as the primary feature quantity.

[0126] More specifically, the first recognition section 541 recognizes the difference or ratio between: i) the brightness of any pixel of the primary captured image in a state where light is projected onto the entire object to be measured; and ii) the brightness of the same pixel of the captured image in a state where light is not projected onto the object to be measured as a primary feature quantity. The first recognition section 541 determines the primary reliability of the pixel included in the primary captured image based on the value of the primary feature quantity. As an example, as the value of the primary feature quantity increases, the first recognition section 541 assigns a higher primary reliability to the pixel.

[0127] For example, when the identified difference is equal to or greater than a threshold value, the first recognition unit 541 assigns a relatively high primary reliability to the pixel. Conversely, when the identified difference is less than a threshold value, the first recognition unit 541 assigns a relatively low primary reliability to the pixel. The threshold value is determined, for example, by obtaining in advance the relationship between the reliability and the measurement error.

[0128] The first recognition unit 541 may recognize the brightness value extracted from the plurality of binary stripe patterns as a primary feature quantity. For example, in the case where the difference between the maximum and minimum brightness values ​​of the plurality of binary stripe patterns for the same pixel is equal to or greater than a predetermined amount, the first recognition unit 541 may assign a relatively high primary reliability to the plurality of pixels in the primary partial area. In the case where the difference between the maximum and minimum brightness values ​​of the plurality of binary stripe patterns is less than a predetermined amount, the first recognition unit 541 may assign a relatively low primary reliability to the plurality of pixels in the primary partial area.

[0129] In addition, when the projection control unit 51 projects a grayscale stripe pattern with a sinusoidal brightness distribution onto the object to be measured W, the first recognition unit 541 can recognize the amplitude of the sine wave, the offset of the sine wave, the contrast of the sine wave, and the waveform distortion of the sine wave as primary feature quantities for each pixel. The offset indicates the average value of the brightness in the grayscale stripe pattern with a sinusoidal brightness distribution. The contrast is obtained by the following formula (3).

[0130] (Contrast) = (half amplitude of sine wave) / (deviation of sine wave) (3)

[0131] In the case where multiple fringe patterns of sine waves having different phases from each other and the same period are projected onto an object to be measured, the brightness values ​​of the multiple fringe patterns of the sine waves observed at a specific pixel position are different depending on the multiple fringe patterns of the sine waves projected. Ideally, the change in brightness value over time becomes a sine wave, but a deviation from the sine wave occurs due to the generation of noise, etc. In the case where the change in brightness value over time of the fringe pattern corresponding to the pixel position in the image of the sine wave observed at the same pixel position is recognized as a signal waveform, the waveform distortion of the sine wave indicates the amount by which the signal waveform is distorted relative to the ideal sine wave.

[0132] For example, when a plurality of grayscale fringe patterns of a sine wave with a phase difference of 90 degrees are projected onto an object to be measured, the phase corresponding to the brightness of the fringe pattern projected onto the same pixel should differ by 90 degrees, but due to the influence of distortion, the phase corresponding to the observed value of the brightness of the fringe pattern at the pixel may not differ by 90 degrees. For example, the first recognition unit 541 recognizes the deviation between i) the value when the observed value of the pixel is applied to the sine wave and ii) the observed value of the pixel, and recognizes the waveform distortion of the grayscale fringe pattern of the sine wave as a primary feature quantity based on the recognized deviation.

[0133] The first recognition unit 541 can recognize the values ​​of these primary feature quantities as the primary reliability of the pixel basically as is. In addition, the first recognition unit 541 can determine the primary reliability based on the value of the primary feature quantity, or can determine the primary reliability based on the values ​​of multiple primary feature quantities. For example, when the amplitude or offset of the brightness of the identified pixel is within a predetermined range, the first recognition unit 541 can assign a relatively high primary reliability to the pixel. In contrast, when the amplitude or offset of the brightness of the identified pixel is greater than the maximum value of the predetermined range, and when the amplitude or offset of the brightness of the identified pixel is less than the minimum value of the predetermined range, the first recognition unit 541 can assign a relatively low primary reliability to the pixel.

[0134] Similarly, the first recognition unit 541 extracts a primary feature quantity in the second direction from the first second fringe captured image. The first recognition unit 541 recognizes the primary reliability in the second direction indicating the reliability of the primary absolute phase value in the second direction based on the extracted primary feature quantity in the second direction. The second recognition unit 542 extracts a secondary feature quantity in the first direction from the second first fringe captured image. The second recognition unit 542 recognizes the secondary reliability in the first direction indicating the reliability of the secondary absolute phase value in the first direction based on the extracted secondary feature quantity in the first direction. The second recognition unit 542 extracts a secondary feature quantity in the second direction from the second second fringe captured image. The second recognition unit 542 recognizes the secondary reliability in the second direction indicating the reliability of the secondary absolute phase value in the second direction based on the extracted secondary feature quantity in the second direction.

[0135] The first recognition section 541 may recognize the primary reliability of each pixel based on the primary feature amount in the first direction or the second direction, or may recognize the primary reliability of each pixel based on the primary feature amount in both the first direction and the second direction.

[0136] Similarly, the second recognition unit 542 can recognize the secondary reliability of each pixel based on the secondary feature quantity in the first direction or the second direction, or can recognize the secondary reliability of each pixel based on the feature quantity in both the first direction and the second direction. The first recognition unit 541 and the second recognition unit 542 can recognize the reliability based on various feature quantities that can be recognized by known techniques according to the captured image, or the phase value or three-dimensional coordinates of the fringe pattern.

[0137] [Identification of conversion value]

[0138] The conversion identification unit 55 identifies a conversion value for converting i) a primary coordinate or ii) a secondary coordinate, wherein the primary coordinate is a three-dimensional coordinate corresponding to the primary absolute phase value in the first direction and the second direction identified by the first identification unit 541, and the secondary coordinate is a three-dimensional coordinate corresponding to the secondary absolute phase value in the first direction and the second direction identified by the second identification unit 542. Fig.13 An example of a method for identifying a primary absolute phase value and a secondary absolute phase value is shown. Fig.13 Indicated by the dotted ellipse in . Fig.13 The fringes φ1 of the first pattern included in the first projection image projected onto the object to be measured and the fringes φ2 of the second pattern included in the second projection image projected onto the object to be measured are shown.

[0139] The first imaging unit 3 and the second imaging unit 4 generate a primary captured image and a secondary captured image obtained by capturing the object to be measured. Fig.13In the example of , the first recognition unit 541 recognizes the primary absolute phase value in the first direction corresponding to the fringe φ1 in the left primary captured image obtained by capturing the object to be measured. The first recognition unit 541 recognizes the primary absolute phase value in the second direction corresponding to the fringe φ2 in the primary captured image.

[0140] The second recognition section 542 recognizes the secondary absolute phase value in the first direction corresponding to the fringe φ1 in the secondary captured image on the right side obtained by capturing the object to be measured. The second recognition section 542 recognizes the secondary absolute phase value in the second direction corresponding to φ2 in the secondary captured image. Here, the intersection point (a) between the fringe φ1 and the fringe φ2 in the primary captured image corresponds to the same three-dimensional coordinates on the object to be measured as the intersection point (b) between the fringe φ1 and the fringe φ2 in the secondary captured image. Therefore, the conversion recognition section 55 recognizes the pair of primary coordinates and secondary coordinates corresponding to the same absolute phase value, and recognizes the conversion value for aligning the primary coordinates and the secondary coordinates in the recognized pair.

[0141] The conversion recognition unit 55 may output an error when the number of pairs of primary and secondary coordinates identified is less than a reference value due to reasons such as the small size of the object to be measured. The reference value is determined based on the maximum value of the allowable measurement error in the measurement of a three-dimensional geometric shape, for example.

[0142] For example, the conversion recognition section 55 may output the following message to the display section 6 as an error, which is used to notify the user that another component needs to be placed around the object to be measured within the range in which the first fringe projection image and the second fringe projection image are projected. The user places the other component within the range in which the first fringe projection image and the second fringe projection image are projected, and thus the first fringe projection image and the second fringe projection image are also projected onto the component. This makes it possible to increase the number of pairs of primary coordinates and secondary coordinates corresponding to the same absolute phase value to a number equal to or greater than the reference value.

[0143] The operation of the conversion recognition unit 55 will be described in detail below. First, the first absolute phase values ​​I identified by the first recognition unit 541 are AP,S1 (i s1 ,j s1 ) and a plurality of secondary absolute phase values ​​I identified by the second identification unit 542 AP,S2 (i s2 ,j s2 ), the conversion identification unit 55 identifies the absolute phase value I AP,S1 (i s1 ,j s1 ) and the secondary absolute phase value I AP,S2 (i s2 ,js2 ) are equal. In the identified pairs, the conversion identification unit 55 calibrates the primary coordinates or the secondary coordinates so that the first absolute phase value I in the three-dimensional space is equal to AP,S1 (i s1 ,j s1 ) corresponding to the primary coordinate P on the object to be measured W, etc. s1 (i s1 ,j s1 ) and the secondary absolute phase value I AP,S2 (i s2 ,j s2 ) The corresponding secondary coordinate P on the object to be measured W, etc. s2 (i s2 ,j s2 ) become closer to each other in three-dimensional space.

[0144] In the example of the present specification, the conversion recognition unit 55 recognizes a conversion value for converting the primary coordinate or the secondary coordinate so that the primary coordinate and the secondary coordinate become closer to each other in the three-dimensional space. The conversion value includes a translation amount and a rotation amount, wherein the primary coordinate is translated by the translation amount to make the primary coordinate consistent with the secondary coordinate, and the primary coordinate is rotated by the rotation amount to make the primary coordinate consistent with the secondary coordinate.

[0145] In the case where the first recognition unit 541 recognizes a plurality of primary absolute phase values ​​corresponding to the respective pixels of the plurality of primary partial regions, the conversion recognition unit 55 recognizes a plurality of primary coordinates corresponding to the plurality of primary absolute phase values ​​in the three-dimensional space. Similarly, in the case where the second recognition unit 542 recognizes a plurality of secondary absolute phase values ​​corresponding to the respective pixels of the plurality of secondary partial regions, the conversion recognition unit 55 recognizes a plurality of secondary coordinates corresponding to the plurality of secondary absolute phase values ​​in the three-dimensional space. The conversion recognition unit 55 recognizes a plurality of pairs in which the primary absolute phase value and the secondary absolute phase value are equal to each other.

[0146] For each of the multiple pairs identified, the conversion identification unit 55 can identify a conversion value, which is used to convert multiple primary coordinates or multiple secondary coordinates so that the primary coordinates corresponding to the primary absolute phase value of any pair and the secondary coordinates corresponding to the secondary absolute phase value of the same pair become closer to each other in three-dimensional space.

[0147] For each of the plurality of primary partial regions or the plurality of secondary partial regions, the conversion identification unit 55 may respectively identify a plurality of conversion values ​​for converting a plurality of primary coordinates corresponding to the primary partial region or a plurality of secondary coordinates corresponding to the secondary partial region. The conversion identification unit 55 identifies the conversion value for each individual primary partial region segmented by the region segmentation unit 53.

[0148] At this time, for each of the plurality of primary partial regions, the conversion recognition section 55 recognizes a conversion value for converting the primary coordinates or the secondary coordinates so that the primary coordinates included in the primary partial region in the three-dimensional space and the secondary coordinates corresponding to the absolute phase value identical to the absolute phase value of the primary coordinates become closer to each other in the three-dimensional space. The conversion recognition section 55 recognizes the conversion value for each of the primary partial regions, thereby enabling alignment between smaller regions. Therefore, the conversion recognition section 55 can improve the accuracy of alignment between the primary coordinates and the secondary coordinates.

[0149] The conversion recognition unit 55 performs alignment for each primary partial area using only the pre-specified primary partial area required for measurement, so that more efficient measurement can be performed. In addition, the conversion recognition unit 55 is not limited to the example of segmenting the three-dimensional area. For example, the conversion recognition unit 55 can generate partial images by segmenting the primary captured image or the secondary captured image to identify the conversion value for each partial image. In this way, since the conversion recognition unit 55 recognizes multiple conversion values ​​corresponding to multiple primary partial areas or secondary partial areas, even if uneven measurement errors occur in the primary coordinates or secondary coordinates due to the passage of time or temperature changes, the primary coordinates or secondary coordinates can be accurately aligned.

[0150] The conversion recognition section 55 may recognize a primary feature quantity for each primary partial region, and recognize a primary reliability based on the recognized primary feature quantity. The conversion recognition section 55 may recognize a secondary feature quantity for each secondary partial region, and recognize a secondary reliability based on the recognized secondary feature quantity. The conversion recognition section 55 may prevent the use of a primary partial region whose recognized primary reliability is equal to or less than a threshold value in the calculation of the conversion value. The conversion recognition section 55 may exclude a primary partial region whose recognized primary reliability is equal to or less than a threshold value from the three-dimensional geometric shape of the object to be measured after alignment.

[0151] In the case where the first identification unit 541 and the second identification unit 542 identify multiple primary absolute phase values ​​and secondary absolute phase values ​​in multiple measurement instances, the conversion identification unit 55 identifies multiple pairs in which the primary absolute phase value and the secondary absolute phase value become equal to each other in each measurement. The conversion identification unit 55 identifies conversion values ​​for the multiple pairs identified in each measurement so that the primary coordinates corresponding to the primary absolute phase values ​​of the pair and the secondary coordinates corresponding to the secondary absolute phase value of the same pair become closer to each other in three-dimensional space. The conversion identification unit 55 identifies multiple conversion values ​​for multiple measurement instances. The conversion identification unit 55 identifies statistics of the multiple conversion values. The statistic is, for example, the average value of the multiple conversion values ​​corresponding to the multiple measurement instances. The statistic can be the median value of the multiple conversion values ​​corresponding to the multiple measurement instances.

[0152] In addition, in the case where the conversion identification section 55 identifies the statistics of multiple conversion values ​​corresponding to multiple measurement instances, multiple measurement instances can be performed by repeatedly projecting the same fringe image using the same projection section 1 or 2, but the present disclosure is not limited thereto. One projection section 1 can project a bidirectional fringe image, or the projection section 1 or 2 can project a bidirectional fringe image. At this time, the conversion identification section 55 can identify the statistics of multiple conversion values ​​corresponding to multiple measurement instances obtained by a combination of different projection sections.

[0153] In the case where the primary absolute phase value or the secondary absolute phase value includes noise, the conversion recognition section 55 may not be able to accurately align the primary coordinate or the secondary coordinate so that the primary coordinate corresponding to the primary absolute phase value and the secondary coordinate corresponding to the secondary absolute phase value are closer to each other. Therefore, the conversion recognition section 55 can identify a portion in which the primary coordinate corresponding to the primary absolute phase value and the secondary coordinate corresponding to the secondary absolute phase value equal to the primary absolute phase value in the three-dimensional space cannot be closer to each other in the three-dimensional space based on the conversion value.

[0154] For example, in the case where there is still a part in the primary coordinate that is inconsistent with the secondary coordinate, the conversion recognition unit 55 recognizes the part. The primary coordinate is a coordinate obtained by conversion using the recognized conversion value. In the case where there are a first predetermined number or more of parts where the primary coordinate and the secondary coordinate cannot be closer to each other, the conversion recognition unit 55 can determine that alignment cannot be performed. The first predetermined number is determined, for example, according to the size of the object to be measured. In the case where there are a second predetermined number or more of parts where the primary coordinate and the secondary coordinate cannot be closer to each other, the conversion recognition unit 55 can recognize that there is an abnormality in the first camera unit 3, the second camera unit 4, or the projection unit. The second predetermined number is, for example, a number larger than the first predetermined number.

[0155] After the primary coordinate or the secondary coordinate is converted using the identified conversion value, the conversion identification unit 55 identifies the three-dimensional coordinate included in the object to be measured by statistical processing based on the primary reliability identified by the first identification unit 541 and the secondary reliability identified by the second identification unit 542. The statistical processing is, for example, calculating the average value. More specifically, the conversion identification unit 55 identifies the primary weight of the primary coordinate value based on the primary reliability in at least one of the first direction and the second direction identified by the first identification unit 541. For example, as the primary reliability identified by the first identification unit 541 becomes higher, the conversion identification unit 55 sets the primary weight of the primary coordinate value to a larger value. The conversion identification unit 55 identifies the secondary weight of the secondary coordinate value based on the secondary reliability in at least one of the first direction and the second direction.

[0156] The conversion identification section 55 identifies the average three-dimensional coordinates by performing weighted averaging using the primary weight and the secondary weight. The conversion identification section 55 identifies the average three-dimensional coordinates by calculating the weighted average of the sum of the following two values: i) a value obtained by multiplying the primary weight by the primary coordinate corresponding to the primary absolute phase value; and ii) a value obtained by multiplying the secondary weight by the secondary coordinate corresponding to the secondary absolute phase value.

[0157] The conversion recognition unit 55 can evaluate the quality of the alignment based on the primary reliability and the secondary reliability. For example, when the primary reliability is equal to or greater than the threshold value and the secondary reliability is equal to or greater than the threshold value, the conversion recognition unit 55 can determine that the alignment can be performed. On the contrary, when the primary reliability is less than the threshold value, or when the secondary reliability is less than the threshold value, the conversion recognition unit 55 can determine that the alignment cannot be performed.

[0158] The conversion recognition unit 55 compares the primary reliability recognized by the first recognition unit 541 with the secondary reliability recognized by the second recognition unit 542. At this time, the conversion recognition unit 55 compares the primary reliability corresponding to the primary coordinates after alignment with the secondary reliability corresponding to the coordinates converted from the secondary coordinates in the alignment to become closer to the primary coordinates.

[0159] Based on the comparison result, the conversion recognition unit 55 selects one of i) the primary coordinate after alignment and ii) the coordinate converted from the secondary coordinate in order to become closer to the primary coordinate in the alignment for each primary coordinate. For example, the conversion recognition unit 55 selects the coordinate with higher corresponding reliability among the primary coordinate and the coordinate converted from the secondary coordinate in order to become closer to the primary coordinate. The conversion recognition unit 55 can identify the three-dimensional geometric shape of the object to be measured by integrating the selected multiple coordinates.

[0160] The conversion identification unit 55 can identify the next timing for identifying the conversion value by predicting the degree of decrease in the measurement accuracy of the three-dimensional geometric shape due to factors such as the passage of time or temperature changes. For example, the conversion identification unit 55 can identify the difference or ratio as a comparison between the identified conversion value and the previously identified conversion value, and identify the next timing for identifying the conversion value based on the identified difference. More specifically, the conversion identification unit 55 predicts the timing at which the translation amount included in the conversion value becomes greater than a predetermined translation threshold based on the identified difference and the time period from the previously identified conversion value. As the identified difference becomes larger, the conversion identification unit 55 shortens the time period from the previously identified conversion value until the next identification of the conversion value. In this way, the conversion identification unit 55 can accurately set the timing for re-identifying the conversion value according to whether an error caused by the passage of time or temperature changes is likely to occur.

[0161] The conversion recognition section 55 can predict the timing at which the rotation amount included in the conversion value becomes larger than a predetermined rotation threshold based on the recognized difference and the time period since the conversion value was previously recognized. The conversion recognition section 55 recognizes the predicted timing as the next timing to recognize the conversion value.

[0162] When the ambient temperature of the three-dimensional geometry measuring device 100 has changed a predetermined amount or more compared to the ambient temperature when the conversion value was previously identified, the conversion recognition unit 55 can identify the conversion value. The predetermined amount is, for example, several degrees. When the ambient temperature of the three-dimensional geometry measuring device 100 has not changed a predetermined amount or more, the conversion recognition unit 55 does not need to identify the conversion value. Whenever a predetermined time period has passed since the conversion value was previously identified, the conversion recognition unit 55 can identify the conversion value. The predetermined time period is, for example, several hours or tens of days. When the arrangement of the first camera 3, the second camera 4, the first projection unit 1 or the second projection unit 2 has been changed, the conversion recognition unit 55 can identify the conversion value.

[0163] The conversion recognition unit 55 does not need to recognize pairs where the primary absolute phase value and the secondary absolute phase value are equal to each other for all pixels of the first imaging unit 3 and all pixels of the second imaging unit 4. That is, the conversion recognition unit 55 may recognize pairs where the primary absolute phase value and the secondary absolute phase value are equal to each other for a portion of the pixels of the first imaging unit 3 and a portion of the pixels of the second imaging unit 4.

[0164] For example, after excluding a part of the plurality of pixels of the first imaging section 3 and the second imaging section 4, the conversion recognition section 55 can recognize pairs in which the primary absolute phase value and the secondary absolute phase value are equal to each other for the plurality of pixels of the first imaging section 3 after exclusion and the plurality of pixels of the second imaging section 4 after exclusion. The conversion recognition section 55 outputs information indicating the recognized conversion value to the geometric shape recognition section 56. The conversion recognition section 55 operating in this manner makes it possible to reduce the time required to recognize the conversion value. The conversion recognition section 55 can exclude only some pixels of one of the first imaging section 3 and the second imaging section 4.

[0165] The conversion recognition section 55 can evaluate the accuracy of the alignment between the primary coordinates and the secondary coordinates based on the size of the area in the object to be measured that is commonly included in both the primary captured image and the secondary captured image. For example, when the area of ​​the area in the object to be measured that is commonly included in both the primary captured image and the secondary captured image is equal to or greater than a threshold, the conversion recognition section 55 can determine that the alignment between the primary coordinates and the secondary coordinates can be performed. The threshold is determined, for example, according to the size of the object to be measured.

[0166] When the area of ​​the region commonly included in both the primary captured image and the secondary captured image in the object to be measured is smaller than the threshold value, the conversion recognition section 55 may determine that the alignment of the primary coordinates and the secondary coordinates cannot be performed. The conversion recognition section 55 may display the region commonly included in both the primary captured image and the secondary captured image on the display section 6. The administrator may appropriately place a frame or the like that houses the imaging section or the projection section by referring to the display section 6 for displaying the region commonly included in both the primary captured image and the secondary captured image.

[0167] In the case where the three-dimensional geometry measuring apparatus 100 includes three or more imaging units, the conversion recognition unit 55 can recognize, for each combination of imaging units, whether a plurality of three-dimensional coordinates recognized by the geometry recognition unit 56 from captured images captured by two of the three or more imaging units can be aligned. The conversion recognition unit 55 can recognize a combination of two imaging units that is determined to enable alignment.

[0168] In a case where the three-dimensional coordinates recognized by the geometric shape recognition unit 56 from a captured image captured by one camera unit and the three-dimensional coordinates recognized by the geometric shape recognition unit 56 from captured images captured by multiple other camera units can be aligned, the conversion recognition unit 55 can obtain multiple alignment results between i) the three-dimensional coordinates recognized by the geometric shape recognition unit 56 from the captured image captured by the one camera unit and ii) the three-dimensional coordinates recognized by the geometric shape recognition unit 56 from the captured images captured by multiple other camera units, and average the multiple alignment results, thereby identifying the average value as the final alignment result.

[0169] [Recognition of three-dimensional geometric shapes]

[0170] The geometric shape recognition section 56 recognizes the three-dimensional geometric shape of the object to be measured W. For example, after the conversion recognition section 55 recognizes the conversion value, the geometric shape recognition section 56 recognizes the three-dimensional geometric shape of the object to be measured W photographed by the photographing control section 52 so that the conversion recognition section 55 recognizes the conversion value. For example, based on the primary photographed image and the secondary photographed image generated by the photographing control section 52 again with respect to the object to be measured W photographed by the photographing control section 52 in order for the conversion recognition section 55 to recognize the conversion value, the geometric shape recognition section 56 recognizes the three-dimensional geometric shape of the object to be measured.

[0171] When the photographing control section 52 generates the primary photographing image and the secondary photographing image again, one or more projection sections project the first fringe projection image and the second fringe projection image onto the object to be measured. In addition, the geometric shape recognition section 56 can recognize the three-dimensional geometric shape of the object to be measured that is different from the object to be measured W photographed by the photographing control section 52 when the conversion recognition section 55 recognizes the conversion value. The geometric shape recognition section 56 can use the new conversion value recognized again by the conversion recognition section 55 in each measurement of the object to be measured, or can use the conversion value that has been recognized once by the conversion recognition section 55 for the next and subsequent measurements.

[0172] When the first recognition unit 541 recognizes a primary absolute phase value corresponding to a primary captured image different from the primary captured image generated by the capture control unit 52 when the conversion recognition unit 55 recognizes the conversion value, the geometric shape recognition unit 56 recognizes the primary coordinates corresponding to the recognized primary absolute phase value. When the second recognition unit 542 recognizes a secondary absolute phase value corresponding to a secondary captured image different from the secondary captured image generated by the capture control unit 52 when the conversion recognition unit 55 recognizes the conversion value, the geometric shape recognition unit 56 recognizes the secondary coordinates corresponding to the recognized secondary absolute phase value.

[0173] In addition, the geometric shape recognition section 56 can acquire the geometric shape of the object to be measured using, as is, the primary absolute phase value or the secondary absolute phase value that has been used when the conversion recognition section 55 recognizes the conversion value. The geometric shape recognition section 56 can recognize the primary coordinates corresponding to the primary absolute phase value, and can recognize the secondary coordinates corresponding to the secondary absolute phase value.

[0174] The geometric shape recognition unit 56 converts at least one of the identified primary coordinates or the identified secondary coordinates based on the conversion value recognized by the conversion recognition unit 55. The geometric shape recognition unit 56 recognizes the three-dimensional geometric shape of the object to be measured based on the converted coordinates. For example, the geometric shape recognition unit 56 translates the primary coordinate by the translation amount included in the conversion value recognized by the conversion recognition unit 55, and rotates the primary coordinate by the rotation amount included in the conversion value recognized by the conversion recognition unit 55, thereby aligning both the primary coordinate and the secondary coordinate, so that the primary coordinate and the secondary coordinate are consistent with each other in the portion where the primary coordinate and the secondary coordinate overlap each other. The geometric shape recognition unit 56 recognizes the three-dimensional geometric shape of the entire object to be measured by connecting the converted primary coordinate and the secondary coordinate. In the case where the conversion recognition unit 55 recognizes the statistic of the conversion value, the geometric shape recognition unit 56 can convert the primary coordinate or the secondary coordinate based on the statistic of the conversion value. The statistic is, for example, an average value, but it can be a median. In this way, the geometric shape recognition unit 56 can prevent the accuracy of the alignment of the primary coordinate or the secondary coordinate from decreasing due to statistical deviation.

[0175] After the primary coordinates are converted using the conversion values, the geometric shape recognition section 56 may recognize the error between the converted primary coordinates and the secondary coordinates. The geometric shape recognition section 56 may recognize the average value of the errors for a plurality of primary coordinates included in the object to be measured, and may determine that the alignment is appropriate when the recognized average value is less than a threshold value. On the other hand, when the recognized average value is equal to or greater than the threshold value, the geometric shape recognition section 56 may determine that the alignment is inappropriate.

[0176] In the case where the conversion recognition section 55 recognizes a portion where the primary coordinates and the secondary coordinates in the object to be measured cannot be closer to each other in the three-dimensional space, the geometric shape recognition section 56 can recognize the three-dimensional geometric shape of the object to be measured W excluding the recognized portion. In this way, the geometric shape recognition section 56 can recognize the three-dimensional geometric shape of the object to be measured W except for the portion affected by noise, etc. In the case where the number of portions where the primary coordinates and the secondary coordinates in the object to be measured cannot be closer to each other in the three-dimensional space is equal to or greater than a threshold value, the geometric shape recognition section 56 can determine that alignment cannot be performed. In this way, in the case where there are many portions affected by noise, etc., the geometric shape recognition section 56 can prevent a decrease in alignment accuracy. After the conversion recognition section 55 recognizes a portion where the primary coordinates and the secondary coordinates in the object to be measured cannot be closer to each other in the three-dimensional space in the initial alignment, the geometric shape recognition section 56 performs alignment between the primary coordinates and the secondary coordinates again except for the recognized portion, so that alignment accuracy can be improved.

[0177] The geometric shape recognition section 56 can recognize the primary coordinates corresponding to the same primary captured image as the primary captured image generated by the photographing control section 52 when the conversion recognition section 55 recognizes the first conversion value, and can recognize the secondary coordinates corresponding to the same secondary captured image as the secondary captured image generated by the photographing control section 52 when the conversion recognition section 55 recognizes the second conversion value. The geometric shape recognition section 56 converts the primary coordinates using the first conversion value and converts the secondary coordinates using the second conversion value, thereby aligning the primary coordinates and the secondary coordinates in a portion where the primary coordinates and the secondary coordinates overlap each other. The geometric shape recognition section 56 can recognize the three-dimensional geometric shape of the object W to be measured by connecting the converted primary coordinates and the converted secondary coordinates.

[0178] [Display 3D geometry or conversion values]

[0179] The display control section 57 displays the three-dimensional geometric shape of the object W to be measured recognized by the geometric shape recognition section 56 on the display section 6. In the case where the conversion recognition section 55 recognizes the conversion value every predetermined time period, the display control section 57 can display the transition of the conversion value recognized by the conversion recognition section 55 in the past. For example, the display control section 57 can display a graph in which the rotation amount or translation amount included in the conversion value recognized by the conversion recognition section 55 in the past year is plotted in time series. In this way, since the display control section 57 displays the transition of the conversion value, the user can evaluate the accuracy of the alignment between the primary coordinate and the secondary coordinate by referring to the rotation amount or translation amount, etc. included in the conversion value and judge whether the alignment of the primary coordinate or the secondary coordinate is required.

[0180] [Identification of conversion value using three-dimensional geometry measuring device 100]

[0181] Fig.14 1 is a flowchart showing a process for recognizing the three-dimensional geometric shape of an object to be measured using the three-dimensional geometric shape measuring apparatus 100. This process is started, for example, when the measurement of the three-dimensional geometric shape of the object to be measured is started. In the three-dimensional geometric shape measuring apparatus 100, after the conversion recognition section 55 performs the conversion value recognition process (S101), the geometric shape recognition section 56 recognizes the three-dimensional geometric shape of the object to be measured by performing the geometric shape recognition process (S102), and ends the process.

[0182] Fig.15 It is shown Fig.14Flowchart of the process of conversion value identification processing (S101) in . First, the projection control unit 51 enables the first projection unit 1 to project the first fringe projection image onto the object to be measured (S201). The shooting control unit 52 uses the first camera unit 3 to obtain a first fringe shot image. The shooting control unit 52 uses the second camera unit 4 to obtain a second first fringe shot image (S202). The projection control unit 51 enables the second projection unit 2 to project the second fringe projection image onto the object to be measured (S203). The shooting control unit 52 uses the first camera unit 3 to obtain a second fringe shot image. The shooting control unit 52 uses the second camera unit 4 to obtain a second second fringe shot image (S204).

[0183] The first recognition unit 541 recognizes the primary absolute phase value in the first direction and the second direction corresponding to each of the plurality of pixels of the first camera unit 3. The second recognition unit 542 recognizes the secondary absolute phase value in the first direction and the second direction corresponding to each of the plurality of pixels of the second camera unit 4 (S205). The conversion recognition unit 55 recognizes the conversion value (S206) for converting the primary coordinates corresponding to the plurality of primary absolute phase values ​​recognized by the first recognition unit 541 so that the plurality of primary coordinates and the plurality of secondary coordinates corresponding to the plurality of secondary absolute phase values ​​recognized by the second recognition unit 542 become closer to each other, and ends the processing.

[0184] Fig.16 It is shown Fig.14 Flowchart of the process of geometric shape recognition processing (S102) in. Fig.16 The processing steps from S301 to S305 are the same as Fig.15 The processing procedures of S201 to S205 are the same, so their description will be omitted. The geometric shape recognition unit 56 uses the conversion value recognized by the conversion recognition unit 55 to convert the multiple primary coordinates corresponding to the multiple primary absolute phase values ​​recognized by the first recognition unit 541 (S306). The conversion recognition unit 55 recognizes the three-dimensional geometric shape of the entire object to be measured by connecting the multiple converted primary coordinates and the multiple secondary coordinates corresponding to the multiple secondary absolute phase values ​​recognized by the second recognition unit 542 (S307).

[0185] <Second Embodiment>

[0186] In the second embodiment, an example in which the three-dimensional geometric shape measuring apparatus 200 includes three or more imaging sections will be described. Fig.17The structure of the three-dimensional geometric shape measuring device 200 according to the second embodiment is shown. The three-dimensional geometric shape measuring device 200 includes an auxiliary imaging unit 201 in addition to the first imaging unit 3 and the second imaging unit 4. The shooting control unit 52 generates a first fringe shot image once by using the first imaging unit 3 to shoot the object to be measured in a state where the first projection unit 1 projects the first fringe projection image. The shooting control unit 52 generates three first fringe shot images by using the auxiliary imaging unit 201 to shoot the object to be measured in a state where the first projection unit 1 projects the first fringe projection image.

[0187] The photographing control unit 52 generates a second fringe photographed image once by using the first camera unit 3 to photograph the object to be measured in a state where the second fringe projection image is projected by the first projection unit 1. The photographing control unit 52 generates three second fringe photographed images by using the auxiliary camera unit 201 to photograph the object to be measured in a state where the second fringe projection image is projected by the first projection unit 1.

[0188] The photographing control unit 52 generates two first fringe photographed images by photographing the object to be measured in a state where the first fringe projection image is projected by the second projection unit 2 using the second imaging unit 4. The photographing control unit 52 generates four first fringe photographed images by photographing the object to be measured in a state where the first fringe projection image is projected by the second projection unit 2 using the auxiliary imaging unit 201. The photographing control unit 52 generates two second fringe photographed images by photographing the object to be measured in a state where the second fringe projection image is projected by the second projection unit 2 using the second imaging unit 4. The photographing control unit 52 generates four second fringe photographed images by photographing the object to be measured in a state where the second fringe projection image is projected by the second projection unit 2 using the auxiliary imaging unit 201.

[0189] The first recognition unit 541 recognizes the first absolute phase value in the first direction and the second direction corresponding to each of the plurality of pixels of the first imaging unit 3 based on the images of the first pattern and the second pattern in the first captured image. The first recognition unit 541 recognizes the third absolute phase value in the first direction and the second direction corresponding to each of the plurality of pixels of the auxiliary imaging unit 201 based on the images of the first pattern and the second pattern in the three first fringe captured images and the three second fringe captured images.

[0190] The second recognition unit 542 recognizes the second absolute phase value in the first direction and the second direction corresponding to each of the plurality of pixels of the second imaging unit 4 based on the images of the first pattern and the second pattern in the second captured image. The second recognition unit 542 recognizes the fourth absolute phase value in the first direction and the second direction corresponding to each of the plurality of pixels of the auxiliary imaging unit 201 based on the images of the first pattern and the second pattern in the four first fringe captured images and the four second fringe captured images.

[0191] In the case where the primary absolute phase value identified by the first recognition unit 541 is equal to the identified tertiary absolute phase value, the pixel of the first imaging unit 3 corresponding to the primary absolute phase value and the pixel of the auxiliary imaging unit 201 corresponding to the tertiary absolute phase value correspond to the same three-dimensional coordinates of the object to be measured. The conversion recognition unit 55 recognizes a plurality of pairs of pixels of the first imaging unit 3 and the auxiliary imaging unit 201 where the primary absolute phase value identified by the first recognition unit 541 and the identified tertiary absolute phase value become equal to each other. Similarly, the conversion recognition unit 55 recognizes a plurality of pairs of pixels of the second imaging unit 4 and the auxiliary imaging unit 201 where the plurality of secondary absolute phase values ​​identified by the second recognition unit 542 and the identified tertiary absolute phase value become equal to each other.

[0192] It can be said that the third-order absolute phase value and the fourth-order absolute phase value corresponding to the same pixel of the auxiliary imaging unit 201 correspond to the same three-dimensional coordinates on the object to be measured. The conversion recognition unit 55 recognizes a plurality of pairs of the third-order absolute phase value and the fourth-order absolute phase value corresponding to the same pixel of the auxiliary imaging unit 201 for a plurality of pixels of the auxiliary imaging unit 201. The conversion recognition unit 55 recognizes a plurality of combinations of the first-order absolute phase value, the third-order absolute phase value, the fourth-order absolute phase value, and the second-order absolute phase value corresponding to the same three-dimensional coordinates on the object to be measured by referring to the recognized pairs of the third-order absolute phase value and the fourth-order absolute phase value.

[0193] The conversion identification unit 55 identifies a conversion value with reference to the identified multiple combinations in a manner similar to that in the first embodiment, wherein the conversion value is used to convert i) a primary coordinate corresponding to a primary absolute phase value in the first direction and the second direction identified by the first identification unit 541 or ii) a secondary coordinate corresponding to a secondary absolute phase value in the first direction and the second direction identified by the second identification unit 542, so that the primary coordinate and the secondary coordinate become closer to each other.

[0194] The geometric shape recognition section 56 converts at least one of the identified primary coordinates or the identified secondary coordinates based on the conversion value recognized by the conversion recognition section 55 in a similar manner to the first embodiment. The geometric shape recognition section 56 recognizes the three-dimensional geometric shape of the object to be measured based on the converted coordinates.

[0195] The projection image that the projection control section 51 projects onto the object to be measured so that the conversion recognition section 55 recognizes a plurality of combinations of primary absolute phase values, triple absolute phase values, fourth absolute phase values, and secondary absolute phase values ​​corresponding to the same three-dimensional coordinates on the object to be measured may be different from the projection image that the projection control section 51 projects onto the object to be measured so that the conversion recognition section 55 recognizes a plurality of combinations of primary absolute phase values, triple absolute phase values, fourth absolute phase values, and secondary absolute phase values ​​corresponding to the same three-dimensional coordinates on the object to be measured may be different from the projection image that the projection control section 51 projects onto the object to be measured so that the conversion recognition section 55 recognizes a plurality of combinations of primary absolute phase values, triple absolute phase values, fourth absolute phase values, and secondary absolute phase values ​​corresponding to the same three-dimensional coordinates on the object to be measured may be different from the projection image that the projection control section 51 projects so that the geometric shape recognition section 56 recognizes the three-dimensional geometric shape of the object to be measured by converting the primary coordinates or the secondary coordinates using the conversion values.

[0196] According to the three-dimensional geometry measuring device 200 of the second embodiment, even if a part of the first pattern of the projection image projected from the first projection unit 1 is not included in the secondary captured image generated by the second imaging unit 4 due to the unevenness or surface reflectivity of the object to be measured, the conversion recognition unit 55 can recognize the pair of the primary absolute phase value and the secondary absolute phase value corresponding to the same three-dimensional coordinates of the object to be measured using the three-shot image and the four-shot image generated by the auxiliary imaging unit 201. In this way, in the three-dimensional geometry measuring device 200, since the first recognition unit 541 and the second recognition unit 542 can more appropriately acquire the pair of the primary absolute phase value and the secondary absolute phase value, the geometry recognition unit 56 can measure the object to be measured with higher accuracy.

[0197] <Third Embodiment>

[0198] In the first and second embodiments, examples are described in which the geometry recognition unit 56 converts at least one of the recognized primary coordinates or the recognized secondary coordinates based on the conversion value recognized by the conversion recognition unit 55. In the third embodiment, an example is described in which a judgment unit 301 is included that judges whether misalignment has occurred in the primary coordinates or the secondary coordinates recognized by the geometry recognition unit 56 based on the conversion value recognized by the conversion recognition unit 55.

[0199] Fig.18 The structure of a three-dimensional geometry measuring apparatus 300 according to the third embodiment is shown. Fig.18 The three-dimensional geometry measuring device 300 shown is Figure 3 The difference between the example of is that it further includes a judgment unit 301. Figure 3 Similar functional blocks in the figure are denoted by the same figure marks, and their description is omitted.

[0200] In the case where the conversion value identified by the conversion identification unit 55 is greater than a predetermined reference value, the judgment unit 301 judges that a misalignment has occurred between the primary coordinate identified by the geometric shape identification unit 56 and the identified secondary coordinate. The reference value is, for example, the conversion value last identified by the conversion identification unit 55. For example, in the case where the distance of the primary coordinate translation included in the conversion value (hereinafter referred to as the translation amount) is greater than the translation amount included in the conversion value last identified by the conversion identification unit 55, the judgment unit 301 judges that a misalignment has occurred between the primary coordinate and the secondary coordinate. In contrast, in the case where the translation amount of the primary coordinate translation included in the conversion value is equal to or less than the translation amount last identified by the conversion identification unit 55, the judgment unit 301 does not judge that a misalignment has occurred between the primary coordinate and the secondary coordinate.

[0201] In the case where the angle of rotation of the primary coordinate included in the conversion value (hereinafter referred to as the rotation amount) is greater than the rotation amount included in the conversion value last recognized by the conversion recognition unit 55, the judgment unit 301 may judge that misalignment has occurred between the primary coordinate and the secondary coordinate. In contrast, in the case where the rotation amount of the primary coordinate included in the conversion value is equal to or less than the rotation amount included in the conversion value last recognized by the conversion recognition unit 55, the judgment unit 301 does not need to judge that misalignment has occurred between the primary coordinate and the secondary coordinate.

[0202] In the case where the translation amount or the rotation amount included in the conversion value is significantly large, there is a possibility that a defect such as misalignment has occurred in the projection unit 10, the first camera unit 3, or the second camera unit 4. Therefore, in the case where at least one of i) the translation amount of the primary coordinate translation included in the conversion value and ii) the rotation amount of the primary coordinate rotation included in the conversion value is greater than a predetermined reference value, the judgment unit 301 judges that a defect has occurred in at least one or more than one of the projection unit 10, the first camera unit 3, and the second camera unit 4. At this time, in the case where the projection unit and the camera unit are accommodated in the same housing, the judgment unit 301 can judge that a change in the overall position or posture of the housing has occurred. Even if the judgment unit 301 judges that misalignment has occurred, the geometric shape recognition unit 56 uses the conversion value recognized this time, and in the case where the corresponding primary coordinates and secondary coordinates can be well aligned with each other, the geometric shape recognition unit 56 can use the conversion value recognized this time.

[0203] For example, the determination unit 301 determines whether a defect has occurred in at least one or more of the projection unit 10, the first imaging unit 3, and the second imaging unit 4 based on the difference or similarity between i) the translation amount included in the conversion value recognized last by the conversion recognition unit 55 and ii) the translation amount included in the conversion value recognized this time. For example, the determination unit 301 calculates the square root of the difference between the translation amount [X1, Y1, Z1] included in the conversion value recognized last by the conversion recognition unit 55 and the translation amount [X2, Y2, Z2] included in the conversion value recognized this time by the following formula (4).

[0204]

[0205] When the calculated square root of the difference is equal to or greater than the translation threshold, the determination unit 301 determines that a defect has occurred in at least one or more than one of the first imaging unit 3 and the second imaging unit 4. The translation threshold is determined, for example, according to the size of the object to be measured. On the other hand, when the calculated square root of the difference is less than the translation threshold, the determination unit 301 does not determine that a defect has occurred in at least one or more than one of the first imaging unit 3 and the second imaging unit 4.

[0206] The judgment unit 301 judges whether a defect has occurred in at least one or more than one of the projection unit 10, the first imaging unit 3, and the second imaging unit 4 based on the difference or similarity between i) the rotation amount included in the conversion value recognized by the conversion recognition unit 55 last time and ii) the rotation amount included in the conversion value recognized this time. For example, the judgment unit 301 calculates the square root of the difference between i) the rotation amount included in the conversion value recognized by the conversion recognition unit 55 last time and ii) the rotation amount included in the conversion value recognized this time. In the case where the calculated square root of the difference is equal to or greater than the rotation threshold, the judgment unit 301 judges that a defect has occurred in at least one or more than one of the first imaging unit 3 and the second imaging unit 4. The rotation threshold is determined, for example, according to the size of the object to be measured, etc. In contrast, in the case where the calculated square root of the difference is less than the rotation threshold, the judgment unit 301 does not judge that a defect has occurred in at least one or more than one of the first imaging unit 3 and the second imaging unit 4.

[0207] In addition, after the geometric shape recognition unit 56 performs alignment between the primary coordinates and the secondary coordinates by converting the primary coordinates or the secondary coordinates using the conversion value, the judgment unit 301 can calculate the coordinate difference between each point of the primary coordinates and each point of the corresponding secondary coordinates, thereby identifying the similarity between the primary coordinates and the secondary coordinates. The similarity is calculated by various known methods based on a plurality of calculated coordinate differences. In the case where the recognized similarity is equal to or less than a threshold value, the judgment unit 301 determines that a defect has occurred in at least one or more than one of the projection unit, the first camera unit 3, and the second camera unit 4. The threshold value is determined, for example, based on the allowable value of the error of the specified geometric shape measurement or the total number of points for which the coordinate difference has been calculated.

[0208] In the case where the recognized similarity is equal to or less than the threshold value, the determination section 301 does not determine that a defect has occurred in at least one or more than one of the projection section, the first imaging section 3, and the second imaging section 4. In this way, in the case where the alignment accuracy is reduced due to a defect in the projection section or the like, the determination section 301 can allow the user to evaluate that a defect has occurred in the projection section or the like.

[0209] The display control unit 302 (corresponding to the output unit) outputs the determination result regarding whether misalignment has occurred from the determination unit 301. Fig.18 In the example of , the display control unit 302 outputs the judgment result to the display unit 6. In this way, since the display control unit 302 outputs the judgment result regarding whether misalignment has occurred in the primary coordinates or the secondary coordinates from the judgment unit 301, the user can easily evaluate that the alignment state of the three-dimensional geometric shape data has deteriorated due to the influence of the passage of time or temperature changes, etc.

[0210] [Processing used to determine whether misalignment has occurred]

[0211] Fig.19 3 is a flowchart showing a process for determining whether misalignment has occurred in the primary coordinate or the secondary coordinate in the three-dimensional geometric shape measuring device 300. The process is started, for example, every time a predetermined time period has passed. The predetermined time period is determined, for example, based on the difference between the conversion value previously identified by the conversion identification section 55 and the conversion value identified by the conversion identification section 55 at an earlier time. As an example, the larger the difference is, the shorter the time period is determined as the predetermined time period.

[0212] because Fig.19 Steps S401 to S406 in Fig.15The determination section 301 determines whether the translation amount of the coordinate translation in the conversion value identified by the conversion identification section 55 is equal to or smaller than the translation amount included in the conversion value identified last time (S407).

[0213] In the case where it is determined that the translation amount of the primary coordinate translation in the conversion value is equal to or less than the translation amount included in the conversion value recognized last time ("Yes" in S407), the determination unit 301 determines whether the rotation amount of the primary coordinate rotation in the conversion value is equal to or less than the rotation amount included in the conversion value recognized last time (S408). In the case where it is determined that the rotation amount of the primary coordinate rotation in the conversion value is equal to or less than the rotation amount included in the conversion value recognized last time ("Yes" in S408), the determination unit 301 determines that no misalignment occurs between the primary coordinate and the secondary coordinate (S409), and ends the processing.

[0214] In the case where it is determined in the judgment of S407 that the translation amount of the primary coordinate translation in the conversion value is greater than the translation amount included in the conversion value recognized last time (No in S407), the judgment unit 301 determines that misalignment has occurred between the primary coordinate and the secondary coordinate (S410). In the case where it is determined in the judgment of S408 that the rotation amount of the primary coordinate rotation is greater than the rotation amount included in the conversion value recognized last time (No in S408), the judgment unit 301 determines that misalignment has occurred between the primary coordinate and the secondary coordinate (S410).

[0215] [Effects of the three-dimensional geometry measuring devices 100 to 300]

[0216] According to the three-dimensional geometry measuring apparatuses 100 to 300 of the first to third embodiments, the conversion recognition section 55 recognizes the conversion value based on the primary captured image and the secondary captured image obtained by capturing the object to be measured. The geometry recognition section 56 uses the conversion value to convert the primary coordinates, and then aligns the converted primary coordinates with the secondary coordinates, thereby recognizing the three-dimensional geometry of the object to be measured. This allows the geometry recognition section 56 to prevent the accuracy of the alignment between the primary coordinates and the secondary coordinates from decreasing due to the influence of the passage of time or temperature changes, etc. In addition, since the three-dimensional geometry measuring apparatus 300 outputs information indicating that misalignment has occurred when the conversion value is greater than the conversion value recognized last time, the three-dimensional geometry measuring apparatus 300 can recognize that there is a possibility that an error has occurred in the measurement result of the three-dimensional geometry. Therefore, according to the three-dimensional geometry measuring apparatuses 100 to 300, it is possible to prevent the measurement of the three-dimensional geometry from being performed in a state where the alignment accuracy of a plurality of three-dimensional geometry data is reduced.

[0217] The present disclosure is explained based on example embodiments. The technical scope of the present disclosure is not limited to the scope described in the above-mentioned embodiments, and various changes and modifications can be made within the scope of the present disclosure. For example, the specific embodiments of the distribution and integration of the equipment are not limited to the above-mentioned embodiments, and all or part of them can be configured with any units that are functionally or physically dispersed or integrated. In addition, new example embodiments generated by any combination of specific embodiments are included in the example embodiments of the present disclosure. In addition, the effects of the new example embodiments generated by the combination also have the effects of the original example embodiments.

[0218] Since the conversion recognition section 55 recognizes the correspondence between the pixel positions of the plurality of imaging sections, the geometric shape recognition section 56 can newly calculate the three-dimensional geometric shape of the object to be measured based on the correspondence recognized by the conversion recognition section 55 .

[0219] In the first to third embodiments, the first recognition unit 541 and the second recognition unit 542 recognize the values ​​in two directions as a plurality of primary absolute phase values ​​corresponding to a plurality of pixels of the first imaging unit 3 and a plurality of secondary absolute phase values ​​corresponding to a plurality of pixels of the second imaging unit 4 for each pixel. In this case, the conversion recognition unit 55 can treat the primary absolute phase values ​​and the secondary absolute phase values ​​as two types of images. The conversion recognition unit 55 can convert these images into low-resolution images. The conversion recognition unit 55 can search for a portion on the low-resolution image of absolute phase values ​​where the absolute pixel values ​​on the imaging unit 3 side and the imaging unit 4 side roughly correspond to each other. Next, the conversion recognition unit 55 uses the corresponding position on the low-resolution image of absolute phase values ​​as an initial value to search in detail for the corresponding position on the original image of absolute phase values.

[0220] In this way, the conversion recognition section 55 can find the corresponding position more efficiently and accurately by using the image of the absolute phase value in two directions. If necessary, the conversion recognition section 55 can create a lower resolution image from the low resolution image and repeatedly perform similar searches. The conversion recognition section 55 can obtain a conversion value based on the corresponding position thus obtained.

[0221] The conversion recognition section 55 may simply perform elimination to obtain an image with a lower resolution, but may also obtain such an image by averaging a plurality of pixels. Using an image with a lower resolution prevents the conversion recognition section 55 from being affected by noise included in the absolute phase value when roughly searching for corresponding points. This allows the conversion recognition section 55 to more accurately search for more corresponding points, so that the conversion value can be obtained with higher accuracy.

[0222] In a structure using multiple camera units, the conversion recognition unit 55 recognizes which three-dimensional geometric shape recognized from a captured image captured by one camera unit can be aligned with the three-dimensional geometric shape recognized from a captured image captured by another camera unit among the multiple camera units. The conversion recognition unit 55 judges the feasibility of alignment between the three-dimensional geometric shape corresponding to a certain camera unit and the three-dimensional geometric shape corresponding to another camera unit, respectively. For example, when the corresponding points for alignment can be fully acquired and the error between the primary coordinates and the secondary coordinates after conversion using the conversion value is relatively small, the conversion recognition unit 55 judges that alignment can be performed. The conversion recognition unit 55 can search for a combination of camera units that enables optimal alignment by repeatedly performing such judgments while changing the combination of camera units.

Claims

1. A three-dimensional geometric shape measuring device, comprising: A projection unit, configured to project a first fringe projection image and a second fringe projection image onto an object to be measured, wherein the first fringe projection image has a first pattern in which brightness changes along a first direction, and the second fringe projection image has a second pattern in which brightness changes along a second direction different from the first direction; a first camera unit, configured to generate a first fringe captured image by capturing the object to be measured in a state where the first fringe projection image is projected, and to generate a second fringe captured image by capturing the object to be measured in a state where the second fringe projection image is projected; a first recognition unit configured to recognize a primary absolute phase value corresponding to each pixel of a plurality of pixels of the first imaging unit based on an image of the first pattern in a first fringe captured image generated by the first imaging unit and an image of the second pattern in a second fringe captured image generated by the first imaging unit; a second camera unit, configured to generate a first fringe captured image by capturing the object to be measured in a state where the first fringe projection image is projected, and to generate a second fringe captured image by capturing the object to be measured in a state where the second fringe projection image is projected; a second recognition unit for recognizing a secondary absolute phase value corresponding to each pixel of a plurality of pixels of the second imaging unit based on an image of the first pattern in the first fringe captured image generated by the second imaging unit and an image of the second pattern in the second fringe captured image generated by the second imaging unit; a conversion identification unit for identifying a conversion value used to convert a primary coordinate corresponding to the primary absolute phase value or a secondary coordinate corresponding to a secondary absolute phase value equal to the primary absolute phase value in a three-dimensional space so that the primary coordinate and the secondary coordinate become closer to each other in the three-dimensional space; as well as The geometric shape recognition unit is used to transform the primary coordinate or the secondary coordinate based on the conversion value, and recognize the three-dimensional geometric shape of the object to be measured based on the transformed coordinate.

2. The three-dimensional geometric shape measuring device according to claim 1, wherein: The conversion recognition unit recognizes the conversion value, which includes a translation amount and a rotation amount, wherein the primary coordinate is translated by the translation amount to make the primary coordinate consistent with the secondary coordinate, and the primary coordinate is rotated by the rotation amount to make the primary coordinate consistent with the secondary coordinate.

3. The three-dimensional geometric shape measuring device according to claim 1 or 2, further comprising: a region segmentation unit, configured to segment a three-dimensional region including a plurality of primary coordinates corresponding to a plurality of primary absolute phase values ​​identified by the first identification unit into a plurality of primary partial regions, and to segment a three-dimensional region including a plurality of secondary coordinates corresponding to a plurality of secondary absolute phase values ​​identified by the second identification unit into a plurality of secondary partial regions, In which, the conversion identification unit identifies the following conversion value for each primary partial area among the multiple primary partial areas, and the conversion value is used to convert the primary coordinates included in the primary partial area or the secondary coordinates included in the secondary partial area corresponding to the absolute phase value same as the absolute phase value of the primary coordinates included in the primary partial area, so that the primary coordinates included in the primary partial area and the secondary coordinates included in the secondary partial area become closer to each other in the three-dimensional space.

4. The three-dimensional geometric shape measuring device according to claim 1 or 2, wherein: The first identification unit identifies a plurality of primary absolute phase values ​​in a plurality of measurement instances respectively. The second identification unit identifies a plurality of secondary absolute phase values ​​in the plurality of measurement instances respectively. The conversion identification unit respectively identifies the following conversion values, and identifies statistics of the identified multiple conversion values, the conversion values ​​being used to convert a plurality of primary coordinates corresponding to each of the plurality of primary absolute phase values ​​corresponding to the plurality of measurement instances in the three-dimensional space, or a plurality of secondary coordinates corresponding to a secondary absolute phase value equal to the primary absolute phase value, so that the plurality of primary coordinates and the plurality of secondary coordinates become closer to each other in the three-dimensional space, and The geometric shape recognition section transforms the primary coordinates or the secondary coordinates based on statistics of the identified conversion values.

5. The three-dimensional geometric shape measuring device according to claim 1 or 2, wherein: The conversion identification unit identifies, based on the conversion value, a portion in which a primary coordinate corresponding to the primary absolute phase value and a secondary coordinate corresponding to a secondary absolute phase value equal to the primary absolute phase value in the three-dimensional space cannot be closer to each other in the three-dimensional space.

6. The three-dimensional geometric shape measuring device according to claim 1 or 2, wherein: The first recognition section extracts a primary feature amount from a first fringe captured image generated by the first imaging section and a second fringe captured image generated by the first imaging section, and recognizes a primary reliability indicating the reliability of the primary absolute phase value based on the extracted primary feature amount, and the second recognition section extracts a secondary feature amount from the first fringe captured image generated by the second imaging section and a second fringe captured image generated by the second imaging section, and recognizes a secondary reliability indicating the reliability of the secondary absolute phase value based on the extracted secondary feature amount, and The conversion identification section identifies three-dimensional coordinates included in the object to be measured through statistical processing based on the primary reliability and the secondary reliability.

7. The three-dimensional geometric shape measuring device according to claim 1 or 2, wherein: The first recognition unit extracts a primary feature amount from a first fringe captured image generated by the first imaging unit and a second fringe captured image generated by the first imaging unit, and recognizes a primary reliability indicating the reliability of the primary absolute phase value based on the extracted primary feature amount. the second recognition section extracts secondary feature quantities from the first fringe captured image generated by the second imaging section and the second fringe captured image generated by the second imaging section, and recognizes secondary reliability indicating reliability of the secondary absolute phase value based on the extracted secondary feature quantities, and The conversion identification unit identifies the three-dimensional geometric shape of the object to be measured based on the comparison result between the primary reliability and the secondary reliability by, for each primary coordinate in the primary coordinates, selecting the primary coordinate after alignment and one of the secondary coordinates that has been transformed in the alignment to become closer to the primary coordinate after alignment.

8. The three-dimensional geometric shape measuring device according to claim 1 or 2, wherein: The conversion identification section identifies a next timing for identifying the conversion value based on a result of comparing the identified conversion value with a previously identified conversion value.

9. The three-dimensional geometric shape measuring device according to claim 1 or 2, wherein: The conversion recognition section recognizes the conversion value every predetermined period of time, and The three-dimensional geometric shape measuring apparatus further includes a display control section for displaying transitions of conversion values ​​recognized in the past by the conversion recognition section.

10. The three-dimensional geometric shape measuring device according to claim 1 or 2, wherein: A portion of the imaging range of the first imaging unit and the imaging range of the second imaging unit do not overlap with each other.

11. A three-dimensional geometric shape measuring device, comprising: A projection unit, configured to project a first fringe projection image and a second fringe projection image onto an object to be measured, wherein the first fringe projection image has a first pattern in which brightness changes along a first direction, and the second fringe projection image has a second pattern in which brightness changes along a second direction different from the first direction; a first camera unit, configured to generate a first fringe captured image by capturing the object to be measured in a state where the first fringe projection image is projected, and to generate a second fringe captured image by capturing the object to be measured in a state where the second fringe projection image is projected; a first recognition unit configured to recognize a primary absolute phase value corresponding to each pixel of a plurality of pixels of the first imaging unit based on an image of the first pattern in a first fringe captured image generated by the first imaging unit and an image of the second pattern in a second fringe captured image generated by the first imaging unit; a second camera unit, configured to generate a first fringe captured image by capturing the object to be measured in a state where the first fringe projection image is projected, and to generate a second fringe captured image by capturing the object to be measured in a state where the second fringe projection image is projected; a second recognition unit for recognizing a secondary absolute phase value corresponding to each pixel of a plurality of pixels of the second imaging unit based on an image of the first pattern in the first fringe captured image generated by the second imaging unit and an image of the second pattern in the second fringe captured image generated by the second imaging unit; a conversion identification unit for identifying a conversion value used to convert a primary coordinate corresponding to the primary absolute phase value or a secondary coordinate corresponding to a secondary absolute phase value equal to the primary absolute phase value in a three-dimensional space so that the primary coordinate and the secondary coordinate become closer to each other in the three-dimensional space; a determination unit configured to determine that misalignment has occurred between the primary coordinate and the secondary coordinate when the conversion value is greater than a predetermined reference value; as well as An output unit is used to output the judgment result from the judgment unit.

12. The three-dimensional geometric shape measuring device according to claim 11, wherein: After alignment between the primary coordinate and the secondary coordinate is performed, the judgment unit identifies the similarity between the primary coordinate and the secondary coordinate by calculating the coordinate difference between the primary coordinate and the secondary coordinate, and when the similarity is equal to or less than a threshold value, it is judged that a defect has occurred in at least one or more of the projection unit, the first camera unit and the second camera unit.

13. A three-dimensional geometric shape measurement method, which is executed by a computer, the three-dimensional geometric shape measurement method comprising the following steps: Projecting a first fringe projection image having a first pattern with brightness changing along a first direction onto an object to be measured; projecting a second fringe projection image having a second pattern with brightness changing along a second direction different from the first direction onto the object to be measured; Using a first camera unit, generating a first fringe captured image by capturing the object to be measured in a state where the first fringe projection image is projected, and generating a second fringe captured image by capturing the object to be measured in a state where the second fringe projection image is projected; identifying a primary absolute phase value corresponding to each of a plurality of pixels of the first imaging unit based on an image of the first pattern in a first fringe captured image generated by the first imaging unit and an image of the second pattern in a second fringe captured image generated by the first imaging unit; Using a second camera unit, generating a first fringe captured image by capturing the object to be measured in a state where the first fringe projection image is projected, and generating a second fringe captured image by capturing the object to be measured in a state where the second fringe projection image is projected; identifying a secondary absolute phase value corresponding to each of a plurality of pixels of the second imaging unit based on an image of the first pattern in a first fringe captured image generated by the second imaging unit and an image of the second pattern in a second fringe captured image generated by the second imaging unit; determining a conversion value, the conversion value being used to convert a primary coordinate corresponding to the primary absolute phase value or a secondary coordinate corresponding to a secondary absolute phase value equal to the primary absolute phase value in a three-dimensional space so that the primary coordinate and the secondary coordinate become closer to each other in the three-dimensional space; as well as The primary coordinates or the secondary coordinates are converted based on the conversion values, thereby recognizing the three-dimensional geometric shape of the object to be measured based on the converted coordinates.

14. A three-dimensional geometric shape measurement method, which is executed by a computer, the three-dimensional geometric shape measurement method comprising the following steps: Projecting a first fringe projection image having a first pattern with brightness changing along a first direction onto an object to be measured; projecting a second fringe projection image having a second pattern with brightness changing along a second direction different from the first direction onto the object to be measured; Using a first camera unit, generating a first fringe captured image by capturing the object to be measured in a state where the first fringe projection image is projected, and generating a second fringe captured image by capturing the object to be measured in a state where the second fringe projection image is projected; identifying a primary absolute phase value corresponding to each of a plurality of pixels of the first imaging unit based on an image of the first pattern in a first fringe captured image generated by the first imaging unit and an image of the second pattern in a second fringe captured image generated by the first imaging unit; Using a second camera unit, generating a first fringe captured image by capturing the object to be measured in a state where the first fringe projection image is projected, and generating a second fringe captured image by capturing the object to be measured in a state where the second fringe projection image is projected; identifying a secondary absolute phase value corresponding to each of a plurality of pixels of the second imaging unit based on an image of the first pattern in a first fringe captured image generated by the second imaging unit and an image of the second pattern in a second fringe captured image generated by the second imaging unit; determining a conversion value, the conversion value being used to convert a primary coordinate corresponding to the primary absolute phase value or a secondary coordinate corresponding to a secondary absolute phase value equal to the primary absolute phase value in a three-dimensional space so that the primary coordinate and the secondary coordinate become closer to each other in the three-dimensional space; When the conversion value is greater than a predetermined reference value, it is determined that misalignment occurs between the primary coordinate and the secondary coordinate; as well as A determination result as to whether the misalignment has occurred is output. 15 . A computer-readable storage medium storing a program for causing a computer to execute the three-dimensional geometric shape measuring method according to claim 13 or 14 . 16 . A computer program product comprising a program for causing a computer to execute the three-dimensional geometric shape measuring method according to claim 13 or 14 .

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