Magneto-optical Kerr detection device and waveguide combination end structure

Abstract

According to the magneto-optical Kerr detection device provided by the invention, the multi-path waveguide is arranged and the light-emitting end surfaces of the multi-path waveguide are combined into the preset shape, so that the detection conditions such as the incident direction, the incident angle, the shape and the intensity of light incident to a detected object, the shape and the size of a formed light spot and the like can be adjusted by controlling whether the light-emitting end surfaces emit light or not; errors caused by factors such as motion vibration brought by a motion mechanism are completely eliminated, the magnetic detection precision is improved, and the equipment cost and the control difficulty are greatly reduced; the invention also provides a waveguide combination end structure for the magneto-optical Kerr detection device, which can control the light emitted from the waveguide and the shape of the light by controlling the on-off of the corresponding waveguide or receiving the incident light, thereby controlling the direction, the incident angle, the intensity, the shape and other characteristics of the light emitted from the detected object in the magneto-optical Kerr detection device.

Description

Technical Field

[0001] The invention belongs to the technical field of magnetic measurement, relates to measurement using magneto-optical effect, and specifically relates to a magneto-optical Kerr detection device and a waveguide combination end structure. Background Art

[0002] The Kerr effect refers to the phenomenon that the polarization state changes when plane polarized light is irradiated onto the surface of a magnetic material. It is mainly manifested as the polarization plane of the reflected light rotates relative to the polarization plane of the incident light. The rotation angle is proportional to the magnetization vector of the surface of the magnetic material. Therefore, this effect can be used to measure magnetism.

[0003] Some existing technologies use the Kerr effect to detect the magnetism of the object to be measured. The corresponding equipment generally includes a light source, a polarizer, and a polarization detection device. The polarization state of the light irradiated to the object to be measured is adjusted, and the polarization state of the reflected light of the object to be measured is detected by using the polarization detection device. For example, CN115453434A discloses a multifunctional micro-nano focusing polar longitudinal integrated magneto-optical Kerr effect device, which includes a laser arranged on an optical platform, a first total reflection mirror, a beam expander, a first aperture, a first flip-up optical frame, a longitudinal optical path system, a polar optical path system, a third flip-up optical frame, a third aperture, a photoelectric detection system, a third total reflection mirror, an electric control system, a white light system and a computer. The longitudinal optical path system and the polar optical path system are both provided with a polarizer to make the light irradiated to the object to be measured polarized light. A Wollaston prism and an optical bridge detector are arranged in the photoelectric detection system to detect and analyze the polarization state of the light incident on the photoelectric detection system, thereby realizing the measurement of magnetic thin film samples and magnetic micro-nano devices.

[0004] Furthermore, some existing technologies add optical fibers (or waveguides) to the equipment to transmit light in order to optimize the component layout of the magneto-optical Kerr detection equipment. When it is necessary to adjust the light irradiated to the object to be measured, for example, to adjust the angle and position of the incident light, it can be adjusted by adjusting the optical fiber posture, or by adjusting the optical path components and their positions. However, during the adjustment process, a motion mechanism is required to drive the corresponding components to move in order to achieve posture changes. The motion errors and motion vibrations of the motion mechanism itself will cause the irradiation position of the light incident on the object to be measured to be offset, making it difficult to reach the preset position, greatly affecting the detection process.

[0005] The above information disclosed in this Background section is only for enhancement of understanding of the background of the invention and therefore it may contain information that does not form the prior art that is already known to a person of ordinary skill in the art. Summary of the invention

[0006] According to the above content, in the process of using the magneto-optical Kerr effect to detect the magnetism of the object to be measured, in order to ensure the stability of the incident light position, it is necessary to avoid adding a motion mechanism to the corresponding equipment; in order to adjust the incident light, it is necessary to add a motion mechanism to the corresponding equipment. The two form an irreconcilable contradiction.

[0007] In order to solve the above problems, the present invention provides a magneto-optical Kerr detection device, including a light source, a waveguide, a beam splitter, a first lens group, and a light sensor, one end of the waveguide is close to the light source and is at least used to receive light emitted by the light source, the other end of the waveguide is provided with a light emitting end face, the waveguide is provided with multiple paths, the light emitting end faces of the multiple waveguides are combined with each other into a preset shape, the light emitted from the light emitting end face passes through the beam splitter and the first lens group to irradiate the measured position of the object to be measured, the light irradiated to the object to be measured is polarized light, the light reflected by the object to be measured enters the light sensor through the first lens group and the beam splitter, and the light sensor is configured to output a corresponding electrical signal in the form of a polarization state of the received light.

[0008] Optionally, the light sensor includes a polarizer, and at least one of a photodetector and an imaging device.

[0009] Preferably, a plurality of the light sources are provided, and there is a one-to-one correspondence between the plurality of light sources and the plurality of waveguides.

[0010] Optionally, the light source is provided with one, and the light emitted by the light source enters at least one of the multiple waveguides.

[0011] Preferably, the light source comprises a light generating device and a polarizer, and the light emitted by the light generating device passes through the polarizer and then enters the corresponding waveguide.

[0012] Optionally, the detection device further includes a polarizer, and the polarizer is arranged in the light path between the light emitting end surface and the first lens group.

[0013] Optionally, at least two of the light-emitting end faces are combined in at least one of a centrally symmetrical, axially symmetrical, and asymmetrical form.

[0014] Optionally, the first lens group is configured to converge the light incident on the first lens group to a detection position of the object to be measured.

[0015] Optionally, the first lens group is configured to project the shape of the light-emitting end surface to a detection position of the object to be measured using light emitted from the light-emitting end surface.

[0016] Optionally, the plane where the light emitting end face is located is perpendicular to the light emitted from the light emitting end face.

[0017] Optionally, the detection device further comprises a waveguide assembly device, and one end of the waveguide provided with the light emitting end face is fixed by the waveguide assembly device.

[0018] The present invention also provides a waveguide combination end structure that can be used in a magneto-optical Kerr detection device, wherein one end of the waveguide is close to a light source and is used to receive light emitted by a corresponding light source, and the other end of the waveguide is provided with a light emitting end face and is used to emit the light received by the waveguide; the light emitting end faces of a plurality of the waveguides are coplanarly arranged and close to each other, and the light emitting end faces of a plurality of the waveguides are combined to form a preset shape.

[0019] The present invention has at least the following beneficial effects: a magneto-optical Kerr detection device provided by the present invention can adjust the incident direction, incident angle, shape, strength of the light incident to the object to be detected, as well as the shape and size of the light spot formed, by controlling whether each light-emitting end face emits light, completely eliminating the errors caused by factors such as motion vibration caused by the motion mechanism, improving the accuracy of magnetic detection, and greatly reducing the equipment cost and control difficulty. The present invention also provides a waveguide combination end structure that can be used in a magneto-optical Kerr detection device, which can control the light and shape of the output waveguide by controlling the on and off of the corresponding waveguide or whether to receive the incident light, thereby controlling the direction, incident angle, strength, shape and other characteristics of the light incident on the object to be detected in the magneto-optical Kerr detection device. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the overall structure of an implementation method of the present invention.

[0021] Figure 2 The figure is a schematic diagram of a waveguide light-emitting end face combination involved in the present invention.

[0022] Figure 3 The figure is a schematic diagram of the positional relationship between a first lens group and an object to be measured involved in the present invention.

[0023] Figure 4 for Figure 3 Schematic diagram of the schematic diagram shown in three dimensions.

[0024] Figure 5 for Figure 4 A schematic diagram of another state of the schematic diagram shown.

[0025] Figure 6 This is another schematic diagram of the positional relationship between the first lens group and the object to be measured involved in the present invention.

[0026] Figure 7 for Figure 6 Schematic diagram of the schematic diagram shown in three dimensions.

[0027] Figure 8 for Figure 7 A schematic diagram of another state of the schematic diagram shown.

[0028] Fig. 9 The figure is a schematic diagram of a waveguide light-emitting end face combination involved in the present invention.

[0029] Fig.10 The figure is a schematic diagram of a waveguide light-emitting end face combination involved in the present invention.

[0030] Fig.11 The figure is a schematic diagram of a waveguide light-emitting end face combination involved in the present invention.

[0031] Fig.12 The figure is a schematic diagram of a waveguide light-emitting end face combination involved in the present invention.

[0032] Fig.13 It is a schematic diagram of the overall structure of another embodiment of the present invention.

[0033] Fig.14 It is a schematic diagram of the overall structure of another embodiment of the present invention.

[0034] Fig.15 It is a schematic diagram of the overall structure of another embodiment of the present invention.

[0035] Fig.16 This is a schematic diagram of the structure of the end of a waveguide combination provided by the present invention. DETAILED DESCRIPTION

[0036] In order to make the purpose and features of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are further described below in conjunction with the accompanying drawings. It should be noted that the accompanying drawings are all in a very simplified form and use inaccurate ratios, which are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention.

[0037] The present invention provides a magneto-optical Kerr effect detection device, which detects the magnetism of a measured object 600 by using the magneto-optical Kerr effect, so as to obtain the magnetic properties of the measured object. Specifically, the detection device includes a light source 100, a waveguide 200, a spectroscope 400, a first lens group 500, and a light sensor 1000. One end of the waveguide 200 is close to the light source 100 and is at least used to receive the light emitted by the light source 100. The other end of the waveguide 200 is provided with a light emitting end face 210. The waveguide 200 is provided with a plurality of The light-emitting end faces 210 of the multi-path waveguide 200 are combined into a preset shape. The light emitted from the light-emitting end face 210 passes through the beam splitter 400 and the first lens group 500 to irradiate the measured position of the measured object 600. The light irradiated to the measured object 600 is polarized light. The light reflected by the measured object 600 enters the optical sensor 1000 through the first lens group 500 and the beam splitter 400. The optical sensor 1000 is configured to output a corresponding electrical signal according to the polarization state of the received light. According to the electrical signal fed back by the optical sensor 1000 in response to the polarization state of the light received by it, the polarization state of the light received by the optical sensor 1000 (i.e., the reflected light of the measured object 600) is analyzed, and combined with the polarization state of the light irradiated to the measured object 600, the change in the polarization state of the reflected light caused by the magnetism of the measured object 600 is analyzed, and then the magnetism of the measured object 600 is analyzed.

[0038] More specifically, see Figure 2 , shows a preset shape of the light emitting end face 210. The light emitted from each light emitting end face 210 of the preset shape passes through the beam splitter 400 and the first lens group 500 and irradiates the measured plane of the measured object 600. Figure 3 , showing a general form of a light irradiated to the object to be measured 600 irradiated to the detection point P in the detection surface S2 of the object to be measured. Since the light emitted from the light-emitting end surface 210 has a preset shape, the light passing through the beam splitter 400 and incident on the first lens group 500 also has a shape matching the light-emitting end surface 210. Accordingly, the emission surface S1 of the first lens group 500 also has a shape matching the light-emitting end surface 210, for example, the same, enlarged, reduced or similar shape. Figure 4 FIG. 5 shows a form of light emitted from the first lens group 500 and irradiated to the object 600 in a three-dimensional space. The first lens group 500 can bend the light to the detection point P. Since the shape of the emission surface S1 of the first lens group 500 is substantially similar to or identical to the shape of the light emitting end surface 210, the light deflected by the first lens group 500 and propagating to the object 600 has a cross section similar to that of at least a portion of the area between the first lens group 500 and the detection surface S2. Figure 5 The shape shown, for example, gradually converges to the detection point P through an emission surface S1 that is substantially the same as the preset shape of the light emitting end surface 210 .

[0039] Please combine Figures 1 to 4, and further combined with Figure 5 When each light-emitting end surface 210 emits light, the light converges to the detection point P in a cone-like manner; when part of each light-emitting end surface 210 emits light and part of each light-emitting end surface 210 does not emit light, incident light with different incident angles can be achieved at the detection surface S2 of the object to be measured 600, for example, see Figure 5 When only the second light source 102 is turned on, light is emitted from the second light emitting end surface 212 and enters the first lens group 500 through the beam splitter 400. The light deflected by the first lens group 500 propagates toward the detection surface S2 of the object to be measured 600 through the second emission surface 212' in the emission surface, and converges to the detection point P, so as to be incident on the detection surface S2 at a smaller incident angle and incident on the detection surface S2 in a corresponding direction. For example, Figure 5 In the example shown, the light is incident from the right side of the optical axis of the first lens group 500; when only the fifth light source 105 is turned on, light is emitted from the fifth light-emitting end surface 215 and enters the first lens group 500 through the beam splitter 400, and the light deflected by the first lens group 500 propagates toward the detection surface S2 of the object to be measured 600 through the fifth emission surface 215' in the emission surface, and converges to the detection point P, thereby achieving a larger incident angle to the detection surface S2, and incident on the detection surface S2 in a corresponding direction, for example, in Figure 5 In the example shown, the incident light is incident from the left side of the optical axis of the first lens group 500 .

[0040] On this basis, we can further adjust the light emission and non-light emission of each light emitting end face 210 to form different incident directions, incident angles, and incident light shapes on the detection surface S2. For example, the second light emitting end surface 212, the fourth light emitting end surface 214, the sixth light emitting end surface 216, and the eighth light emitting end surface 218 emit light, and the other light emitting end surfaces do not emit light, so that the second emitting surface 212', the fourth emitting surface 214', the sixth emitting surface 216', and the eighth emitting surface 218' in the emitting surface S1 emit light, forming a light with a generally circular cross-section and converging to the detection point P, forming an incident light that is approximately perpendicular to the detection surface S2; all the light emitting end surfaces (211-218) emit light, and then all the emitting surfaces (211'-218') in the emitting surface S1 emit light, forming a light with a generally circular cross-section and a larger cross-sectional area and converging to the detection point P, forming an incident light that is approximately perpendicular to the detection surface S2 and has a higher light intensity. Strong incident light; makes the first light emitting end surface 211 and the second light emitting end surface 212 emit light, while no light emerges from other light emitting end surfaces, and then makes the first emitting surface 211' and the second emitting surface 212' emit light and converge to the detection point P, forming an incident light with stronger light intensity and similar incident direction compared with the light emitting from the second light emitting end surface 212 alone; makes the first light emitting end surface 211, the third light emitting end surface 213, the fifth light emitting end surface 215, and the eighth light emitting end surface 218 emit light, while no light emerges from other light emitting end surfaces, and then makes the first emitting surface 211', the third emitting surface 213', the fifth emitting surface 215', and the seventh emitting surface 217' in the emitting surface S1 emit light and converge to the detection point P, and a light with a cross-section approximately in a ring shape is incident on the detection surface S2.

[0041] Figure 6 Shows a Figure 3 Different forms of light between the first lens group 500 and the object 600 to be measured, wherein the light irradiated from the first lens group 500 to the object 600 forms an irradiation area d on the measured surface of the object 600 to be measured. Figure 7 , showing Figure 6A three-dimensional form is shown, wherein the light emitted from the first lens group 500 is irradiated onto the detection surface S2 of the object to be measured 600 to form an illuminated area Q, and at least a part of the area of ​​the illuminated area Q realizes or assists the detection of the object to be measured 600, such as realizing magnetic imaging, magnetic detection, and regional lighting. The emission surface S1 of the first lens group 500 has a shape similar to or the same as the shape of the light-emitting end surface 210. For specific reasons, please refer to the corresponding description in the previous text. The first lens group 500 is constructed in a form that can use the light emitted from the light-emitting end surface 210 to project the shape of the light-emitting end surface 210 to the detection position of the object to be measured 600. The light emitted by the first lens group 500 is converged and forms an illuminated area Q on the detection surface S2. Since the detection surface S2 is located outside the focus of the first lens group 500, the first lens group 500 can form a light spot on the detected surface S2 with a shape similar to the shape of the exit surface S1 (or the shape of the light emitting end surface 210); therefore, the shape of the illuminated area Q is the same as or similar to the light emitting end surface 210, and corresponds one-to-one to the shape of each light emitting end surface 210.

[0042] Please combine Figure 1 , Figure 2 , Figures 6 to 8 When each light emitting end surface 210 emits light, the illuminated area Q generally presents a shape similar to the shape of the light emitting end surface 210; when each light emitting end surface 210 partially emits light and partially does not emit light, illuminated areas Q of different shapes can be formed on the detection surface S2 of the object to be measured 600, for example, see Figure 5 When only the second light source 102 is turned on, the light emitted by the second light source 102 is transmitted through the waveguide 200 and propagates through the second light emitting end face 212, the beam splitter 400, the first lens group 500 and the second output surface 212' to the detection surface S2 of the object to be measured 600, forming an illuminated area 212', and the shape of the illuminated area 212' is substantially the same as or similar to the shapes of the second light emitting end face 212 and the second output surface 212'; when the fifth light source 105 is turned on and the other light sources are turned off, the light emitted by the fifth light source 105 is transmitted through the waveguide 200 and propagates through the fifth light emitting end face 215, the beam splitter 400, the first lens group 500 and the fifth output surface 215' to the detection surface S2 of the object to be measured 600, forming an illuminated area 215', and the shape of the illuminated area 215' is substantially the same as or similar to the shapes of the fifth light emitting end face 215 and the fifth output surface 215'. In this way, different positions, different shapes and different incident angles of the object to be measured 600 can be illuminated.

[0043] On this basis, we can further adjust the light emission and non-light emission of each light emitting end face 210 to form different incident directions, incident angles, and incident light shapes on the detection surface S2. For example, the second light emitting end surface 212, the fourth light emitting end surface 214, the sixth light emitting end surface 216, and the eighth light emitting end surface 218 emit light, while the other light emitting end surfaces do not emit light, thereby making the second light emitting surface 212', the fourth light emitting surface 214', the sixth light emitting surface 216', and the eighth light emitting surface 218' in the emission surface S1 emit light, forming a smaller circular illuminated area at the detection surface S2 of the object to be measured 600, and can also roughly form an incident light that is approximately perpendicular to the incident detection surface S2; all light emitting end surfaces (211-218) emit light, thereby making all the emission surfaces (211'-218') in the emission surface S1 emit light, forming a larger circular illuminated area, and can also roughly form an incident light that is approximately perpendicular to the incident detection surface S2. light; so that the first light emitting end surface 211 and the second light emitting end surface 212 emit light, and no light emits from the other light emitting end surfaces, thereby causing the first emitting surface 211' and the second emitting surface 212' to emit light and form a generally fan-shaped illumination area, forming incident light with a similar shape but a larger range and a similar incident direction compared to when the second light emitting end surface 212 emits light alone; so that the first light emitting end surface 211, the third light emitting end surface 213, the fifth light emitting end surface 215, and the eighth light emitting end surface 218 emit light, and no light emits from the other light emitting end surfaces, thereby causing the first emitting surface 211', the third emitting surface 213', the fifth emitting surface 215', and the seventh emitting surface 217' in the emitting surface S1 to emit light and form an annular illuminated area on the detection surface S2 of the object to be measured 600. And, based on the above, different combinations of light-emitting end faces are selected to be turned on or off to form a variety of lighting areas and shapes.

[0044] According to the above content, it is known that the incident direction, incident angle, shape, intensity, and detection conditions such as the shape and size of the light spot formed by the light incident on the object to be measured 600 can be adjusted by controlling whether each light emitting end face emits light. Since there is no motion mechanism, the process of adjusting the incident light completely eliminates the errors caused by factors such as motion vibration caused by the motion mechanism, thereby improving the detection accuracy; there is no need for complex and precise motion mechanisms, which greatly reduces the equipment cost and control difficulty.

[0045] See also Figure 1, shows an embodiment of the present invention. The light source 100 includes a plurality of light sources, and the plurality of light sources correspond to the multi-path waveguide 200 one by one. Specifically, the light source 100 includes a first light source 101 to an eighth light source 108, and accordingly, the waveguide 200 is provided with 8 paths, the light emitted by the first light source 101 propagates through the first waveguide 201, the light emitted by the second light source 102 propagates through the second waveguide 202, and so on. On this basis, whether light is emitted from the light emitting end face 210 can be controlled by controlling the opening and closing of the light source.

[0046] See also Fig.15 , showing another embodiment of the present invention. Among them, the light source 100 is provided with a light emitting end face 210 at one end of the multi-path waveguide 200 away from the light source 100, and the light emitted by the light source 100 enters at least one of the multi-path waveguides 200. Specifically, as a feasible way, the waveguide 200 is provided with 8 paths, and the light emitted by the light source 100 enters at least one of the first waveguide 201 to the eighth waveguide 208. By changing the waveguide 200 that the light of the light source 100 enters, or changing the on-off of the waveguide 200, it can be controlled whether there is light emitted from the light emitting end face 210. For further information, please continue to refer to Fig.15 A waveguide on-off switch 110 for controlling the on-off of the waveguide 200 may be further provided, thereby adjusting whether light is emitted from each output end face 210 .

[0047] In order to make the light irradiated to the object to be measured 600 polarized light, the light source 100 may optionally include a light generating device and a polarizer, and the light emitted by the light generating device becomes polarized light after passing through the polarizer, and the polarized light further enters the corresponding waveguide 200. In addition, the polarization state of the light generated by the light source 100 may not be limited, and a polarizer 120 may be added to the detection device, and the polarizer 120 may be arranged in the optical path between the light emitting end face 210 and the first lens group 500, so that the light irradiated to the object to be measured 600 is polarized light.

[0048] In order to analyze the light reflected by the object 600 to obtain the magnetism of the measured position of the object 600, the optical sensor may include a polarizer 710, and at least one of a photodetector and an imaging device, and the light passing through the polarizer 710 is detected by the photodetector and the imaging device, so as to analyze the polarization state of the light reflected by the object 600. More specifically, the magnetism of a smaller area can be measured by using a photodetector; and the magnetic imaging device can be used to perform magnetic imaging on at least the detection area of ​​the object 600.

[0049] In addition, as required, a second lens group 800 may be disposed before the light sensor to adjust the light incident on the light sensor through the second lens group 800 to enhance the detection effect.

[0050] In addition, based on the aforementioned implementation, the shape of the light-emitting end face of the waveguide may be further configured to adjust the light incident on the object under test 600 .

[0051] Figure 2 A preset shape of the light-emitting end face 210 is shown, specifically, it is composed of a plurality of sectors and a plurality of annular partial regions, which are combined together to form a preset shape having a substantially annular outer contour and a circular surface as a whole. More specifically, the shape of the preset shape is at least symmetrical along the center, so as to adjust the incident direction, incident angle, shape, intensity of the light incident to the object to be measured 600, as well as the detection conditions such as the shape and size of the formed light spot.

[0052] See also Fig. 9 , showing a Figure 2 The preset shapes of different light-emitting end faces 210 shown in the figure, specifically, the preset shapes have left-right symmetry and top-bottom symmetry. As an embodiment, a light-emitting end face 210 with a circular outer contour can be composed of four sectors of the same shape. When using a light-emitting end face 210 with a left-right symmetry and top-bottom symmetry, and when the first lens group 500 focuses the light on the detection point P of the detection surface S2 of the object to be measured 600, the direction of the incident light can be adjusted by controlling the opening and closing of the light source; in addition, the switching between turning on all light sources and turning on part of the light sources can realize the switching between vertical incidence and angle incidence of the light incident on the object to be measured 600; in addition, since the left-right symmetry and top-bottom symmetry generally also satisfy the central symmetry, it is also possible to calculate more abundant magnetic information of the object to be measured 600 through multiple directions and angles of central symmetry. In addition, when the first lens group 500 can make the light incident on the object to be measured 600 form an illuminated area Q, specifically, it can be when the first lens group 500 and the object to be measured 600 form a region Q as shown in FIG. Figure 6-Figure 8 In this case, the shape of the illuminated area Q can be further adjusted, for example, to form a fan-shaped spot, a semicircular spot, a circular spot, a missing circular spot, two fan-shaped spots set opposite to each other, etc., to meet different test requirements. For the specific incident process, please refer to the corresponding description in the above content, which will not be repeated here.

[0053] See also Fig.10 , showing a Figure 2 , Fig. 9 The preset shapes of the different light-emitting end faces 210 shown in the figure are, in particular, asymmetrical. Fig.10, forming a form that is neither centrally symmetrical nor axisymmetric. At this time, the incident direction, incident light shape, incident intensity, and spot shape of the measured surface S2 of the measured object 600 can be controlled by controlling the light source to be turned on or off. For more details, please refer to Fig.10 , wherein the second light emitting end face 212, the third light emitting end face 213, and the fourth light emitting end face 215, which are basically the same in shape, constitute half of the light emitting end face 210; for the other areas of the light emitting end face 210, the first light emitting end face 211, the fifth light emitting end face 215, and the sixth light emitting end face 216 constitute an outer partial annular shape, and the seventh light emitting end face 217, the eighth light emitting end face 218, and the ninth light emitting end face 219 constitute an inner semicircular shape, and the partial annular shape and the semicircular shape together constitute a larger semicircular shape. On this basis, compared with emitting light only through the seventh light emitting end surface 217, emitting light only through the eighth light emitting end surface 218 can adjust the incident direction, emitting light only through the fifth light emitting end surface 215 can adjust the incident angle, emitting light through the fifth light emitting end surface 215 and the seventh light emitting end surface 217 can adjust the incident light intensity, and emitting light only through the second light emitting end surface 212 can adjust the incident direction and the incident light intensity. In addition, when the first lens group 500 can make the light incident on the measured object 600 form an illuminated area Q, specifically, when the first lens group 500 and the measured object 600 form a region Q such as Figure 6-Figure 8 In this case, the shape of the illuminated area Q can be further adjusted. On this basis, those skilled in the art can further select the corresponding light-emitting end face according to the introduction of the above content, and adjust the incident direction, incident light shape, incident intensity, and spot shape. For the specific incident process, please refer to the corresponding description in the above content, which will not be repeated here.

[0054] See also Fig.11 , showing a Figure 2 , Fig. 9 , Fig.10 The preset shapes of the different light-emitting end faces 210 shown in FIG. 2 are, in particular, centrally symmetrical. Fig.11 One of the implementation modes is shown. At this time, the incident direction, incident light shape, incident intensity, and spot shape of the measured surface S2 of the measured object 600 can be controlled by controlling the light source to be turned on or off, and more abundant magnetic information of the measured object 600 can be calculated through multiple directions and angles with central symmetry; when the first lens group 500 can make the light incident on the measured object 600 form an illuminated area Q, the shape of the illuminated area Q can be further adjusted to meet the illumination requirements of different areas. For the specific adjustment method, please refer to the corresponding description in the above content, which will not be repeated here.

[0055] See also Fig.12 , showing a Figure 2 , Fig. 9 , Fig.10 , Fig.11 The preset shapes of the different light emitting end faces 210 shown are, in particular, the preset shapes are the preset shapes required for the test. More specifically, when the area to be tested of the object 600 is substantially square, the shape of the light emitting end face that is substantially square can be used. Fig.12 A feasible implementation is shown. In addition, it is also possible to further control the light source on or off, thereby controlling at least one of the incident direction, incident light shape, incident intensity, spot shape, and spot size of the measured surface S2 of the different incident objects 600. For specific adjustment methods, please refer to the corresponding description in the above content, which will not be repeated here.

[0056] In addition, a waveguide on-off switch 110 for controlling the on-off of the waveguide may be provided to adjust the emission area of ​​the light emitting end face 210. Each waveguide is provided with a waveguide on-off switch 110, and each waveguide on-off switch 110 is independent of each other. Fig.13 , Fig.14 , each waveguide 200 is connected to the first light source 101 to the eighth light source 108, respectively, and correspondingly, each waveguide is provided with a first waveguide on-off switch 111 to an eighth waveguide on-off switch 118, so as to control whether the light emitting end face 210 of the corresponding waveguide 200 emits light by at least controlling the opening and closing of each waveguide on-off switch in the first waveguide on-off switch 111 to the eighth waveguide on-off switch 118; and also referring to Fig.15 When multiple waveguides 200 are connected to the same light source 100, a waveguide on-off switch 110 is provided on each waveguide 200 to control whether the light emitting end face 210 of the corresponding waveguide 200 emits light. For example, when the light emitted by the same light source 100 enters the first waveguide 201 to the eighth waveguide 208, the first waveguide on-off switch 111 to the eighth waveguide on-off switch 118 are provided on the first waveguide 201 to the eighth waveguide 208, respectively, and then by controlling each waveguide on-off switch 111-118, it is controlled whether the corresponding light emitting end face 211-218 emits light. On this basis, it is possible to control whether each area of ​​the light emitting end face 210 emits light, and then to adjust the detection conditions such as the incident direction, incident angle, shape, strength, and shape and size of the light spot formed by the light incident on the object to be measured 600 as mentioned above.

[0057] In addition, in order to further enable the preset shape of the light-emitting end surface 210 to more effectively form a shape of a similar-shaped output surface S1 at the output surface of the first lens group 500, a coupling lens 900 can be arranged in the optical path between the light-emitting end surface 210 and the first lens group 500 to image the light-emitting end surface 210 onto the first lens group 500, so that the shape of the output surface S1 is more similar to the preset shape of the light-emitting end surface 210.

[0058] See also Fig.16 , shows a structure of the aforementioned waveguide 200 and the light-emitting end face 210. One end of the waveguide 200 is close to the light source 100 and is used to receive the light emitted by the corresponding light source 100, and the other end of the waveguide 200 is provided with a light-emitting end face and is used to emit the light received by the waveguide 200; the light-emitting end faces of the plurality of waveguides 200 are coplanarly arranged and close to each other, and the light-emitting end faces 210 of the plurality of waveguides 200 are combined to form a preset shape, so that the light and the shape of the light emitted from the waveguide 200 can be controlled by controlling the on and off of the corresponding waveguide 200 or whether to receive the incident light.

[0059] Next, combine Figure 1 , Figure 2 , Fig.16 The waveguide structure will be described. Figure 1 is a schematic diagram of the overall structure, showing the corresponding connection relationship between each light source and the waveguide; Figure 2 is a schematic diagram of a preset shape of the light emitting end face 210, Fig.16 is a schematic diagram of the structure of one end of the waveguide. Figure 2 The shape shown is Fig.16 The shape of the light emitting end face of the end of the waveguide shown in . On this basis, one end of the first waveguide 201 is connected to the first light source 101, and the other end is the first light emitting end face 211; one end of the second waveguide 202 is connected to the second light source 102, and the other end is the second light emitting end face 212; one end of the third waveguide 203 is connected to the third light source 103, and the other end is the third light emitting end face 213; and so on. In this way, the light emitted by each light source can be independently guided to the corresponding light emitting end face 210, and each light emitting end face independently emits the light of the corresponding light source, and the light emitted from each light emitting end face has a certain shape.

[0060] In addition, other numbers of waveguides may be used to form other shapes of the light-emitting end face 210. For example, a corresponding number of waveguides may be used to form a light-emitting end face 210 having a shape such as: Figure 9-12 The preset shape of the light emitting end face 210 is shown. Those skilled in the art can select or configure the corresponding preset shape of the light emitting end face 210 according to actual needs.

[0061] See also Fig.16In order to facilitate determining the preset shape of the light emitting end surface 210 and the shape of the light emitted from the light emitting end surface 210 after being deflected by the first lens group, the plane S0 where the light emitting end surface 210 is located can be made perpendicular to the light emitted from the light emitting end surface 210.

[0062] See also Figure 1 , Fig.13 , Fig.14 , Fig.15 In order to fix the light emitting end face 210 of the waveguide 200, a waveguide fixing device 300 matching the structure of the light emitting end face 210 can be provided. When the end structure of the waveguide 200 assembly is substantially as follows Fig.16 In the shape shown, the waveguide fixing device 300 may be provided in the form of a side wall that circumferentially surrounds and fixes the end of the waveguide 200 .

[0063] The above shows and describes the basic principles, main features and advantages of the present invention, so the above is only an embodiment of the present invention. It should be understood by those skilled in the art that the present invention is not limited by the above embodiments, and the above embodiments and descriptions only describe the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention also includes various equivalent changes and improvements, which will fall within the scope of the present invention to be protected.

Claims

1. A magneto-optical Kerr detection device, characterized in that: The invention comprises a light source, a waveguide, a beam splitter, a first lens group, and a light sensor, wherein one end of the waveguide is close to the light source and is at least used for receiving light emitted by the light source, the other end of the waveguide is provided with a light emitting end face, the waveguide is provided with multiple paths, the light emitting end faces of the multiple paths of the waveguide are combined with each other into a preset shape, the light emitted from the light emitting end face passes through the beam splitter and the first lens group to irradiate the measured position of the measured object, the light irradiated to the measured object is polarized light, the light reflected by the measured object enters the light sensor through the first lens group and the beam splitter, and the light sensor is configured to be able to output a corresponding electrical signal in the form of a polarization state of the received light.

2. A magneto-optical Kerr detection device as claimed in claim 1, characterized in that: The optical sensor includes a polarizer, and at least one of a photodetector and an imaging device.

3. A magneto-optical Kerr detection device as claimed in claim 1, characterized in that: There are multiple light sources, and there is a one-to-one correspondence between the multiple light sources and the multiple waveguides.

4. A magneto-optical Kerr detection device as claimed in claim 1, characterized in that: The light source is provided with one, and the light emitted by the light source enters at least one of the multiple waveguides.

5. A magneto-optical Kerr detection device as claimed in claim 1, characterized in that: The light source comprises a light generating device and a polarizer. The light emitted by the light generating device passes through the polarizer and then enters the corresponding waveguide.

6. A magneto-optical Kerr detection device as claimed in claim 1, characterized in that: The detection device further includes a polarizer, which is arranged in the light path between the light emitting end surface and the first lens group.

7. A magneto-optical Kerr detection device as claimed in claim 1, characterized in that: At least two of the light-emitting end faces are combined in at least one of a centrally symmetrical, an axially symmetrical, and an asymmetrical form.

8. A magneto-optical Kerr detection device as claimed in claim 1, characterized in that: The first lens group is configured to converge the light incident on the first lens group to the detection position of the object to be measured.

9. A magneto-optical Kerr detection device as claimed in claim 1, characterized in that: The first lens group is configured to project the shape of the light-emitting end surface onto a detection position of the object to be measured by utilizing the light emitted from the light-emitting end surface.

10. A magneto-optical Kerr detection device as claimed in claim 1, characterized in that: The plane where the light-emitting end face is located is perpendicular to the light emitted from the light-emitting end face.

11. A magneto-optical Kerr detection device as claimed in claim 1, characterized in that: The detection device further comprises a waveguide assembly device, and one end of the waveguide provided with a light emitting end face is fixed by the waveguide assembly device.

12. A waveguide assembly end structure that can be used in a magneto-optical Kerr detection device, characterized in that: One end of the waveguide is close to the light source and is used to receive light emitted by the corresponding light source, and the other end of the waveguide is provided with a light emitting end face and is used to emit the light received by the waveguide; the light emitting end faces of the multiple waveguides are coplanarly arranged and close to each other, and the light emitting end faces of the multiple waveguides are combined to form a preset shape.

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