High-speed auxiliary nozzle cooperated special-shaped micro-rib jet flow micro-channel for chip heat dissipation

Abstract

The invention provides a high-speed auxiliary nozzle cooperated special-shaped micro-rib jet flow micro-channel. The high-speed auxiliary nozzle cooperated special-shaped micro-rib jet flow micro-channel comprises a bottom plate, a middle plate and a top cover plate, a plurality of free special-shaped micro-ribs distributed in an array are arranged on the bottom plate, and gaps are reserved between the top ends of the free special-shaped micro-ribs and the middle plate; the periphery of the bottom plate is closed by coamings; the middle plate comprises a plurality of micro-channel inlet grooves and a plurality of micro-channel outlet grooves, a plurality of nozzles and a plurality of high-speed auxiliary nozzles are arranged at the bottoms of the micro-channel inlet grooves, the diameters of inlets of the high-speed auxiliary nozzles are the same as those of the nozzles, and the diameters of outlets of the high-speed auxiliary nozzles are smaller than those of the nozzles; the nozzles and the high-speed auxiliary nozzles are arranged at intervals. The special-shaped micro-ribs are used for promoting steam bubble nucleation, maintaining a liquid film and breaking large steam bubbles / steam films through jet flow impact, the problems that jet flow boiling of a traditional large-size smooth surface is not prone to nucleation, and steam bubbles are combined to cover a heating surface to deteriorate heat transfer can be effectively solved, and the boiling heat exchange performance is remarkably improved.

Description

Technical Field

[0001] The invention relates to the technical field of electronic chip heat dissipation, and in particular to a high-speed auxiliary nozzle coordinated with a special-shaped micro-fin jet microchannel for chip heat dissipation. Background Art

[0002] Miniaturization and integration are the development direction of modern electronic devices, which leads to more and more components integrated per unit area, and the operating power consumption and heat generation are rising sharply. In order to ensure the safe, reliable and stable operation of high-power electronic devices such as lasers, radars, microelectronic devices, etc., thermal management technology plays an extremely important role in ensuring the safety, reliability and stability of high-power electronic devices.

[0003] Microchannel jet impingement boiling heat transfer has broad application prospects in the field of high heat flux electronic chip heat dissipation due to its advantages of high heat transfer coefficient, small pressure drop and thermal resistance, and compact system. The typical microchannel jet boiling heat transfer process is that the fluid vertically impacts the smooth wall from the nozzle, absorbs heat and flows out in the form of cross flow. The surface of this channel is smooth, and bubbles are not easy to nucleate and are even more difficult to nucleate under jet impact. Sometimes they are still not nucleated at a wall temperature far exceeding the safe temperature; once the bubbles nucleate, explosive boiling is prone to occur accompanied by a sudden drop in wall temperature, causing unstable flow; at the same time, the liquid film on the smooth wall is not easy to maintain, and critical dry burning and wall temperature soaring problems are prone to occur. In particular, when a boiling phase change occurs in a large area of ​​the heat source channel, a large number of bubbles aggregate to form a vapor film covering the heat source surface, which is easy to trigger the critical heat flow prematurely, which poses a huge safety hazard to heat exchange equipment and power systems.

[0004] In view of this, promoting boiling bubble nucleation, maintaining wall liquid film, breaking large bubbles / vapor film and increasing critical heat flux are the key issues that need to be solved in the development of high heat flux jet microchannel heat exchange. However, in the existing technology, there is no jet microchannel that can solve the above technical problems at the same time. Summary of the invention

[0005] In view of the shortcomings of the prior art, the present invention proposes a high-speed auxiliary nozzle for chip heat dissipation in coordination with a special-shaped micro-fin jet microchannel, which utilizes special-shaped micro-ribs to promote bubble nucleation, maintain liquid film and jet impact to break up large bubbles / vapor film, effectively solving the problems of traditional smooth surface jet boiling that is difficult to nucleate and bubbles merging and covering the heating surface to deteriorate heat transfer, and significantly improves the boiling heat transfer performance.

[0006] The technical solution adopted by the present invention is as follows:

[0007] A high-speed auxiliary nozzle coordinated special-shaped micro-fin jet microchannel is provided, comprising: a bottom plate, a middle plate and a top cover plate;

[0008] The bottom plate is provided with a plurality of free-shaped micro-ribs distributed in an array, and a gap is left between the top of the free-shaped micro-ribs and the middle plate; the bottom plate is closed by a surrounding plate on all sides;

[0009] The middle plate includes a plurality of microchannel inlet slots and a plurality of microchannel outlet slots. A plurality of nozzles and a plurality of high-speed auxiliary nozzles are arranged at the bottom of the microchannel inlet slots. The diameter of the inlet of the high-speed auxiliary nozzle is the same as the diameter of the nozzle, and the diameter of the outlet is smaller than the diameter of the nozzle. The nozzles and the high-speed auxiliary nozzles are arranged at intervals.

[0010] The top cover plate is arranged above the middle plate.

[0011] Furthermore, the ratio x of the gap to the bottom wall depth satisfies:

[0012] x=g / H≤0.3

[0013] In the above formula, g represents the gap between the top of the free-shaped micro-rib and the middle plate, and H represents the depth of the inner wall of the bottom plate.

[0014] Furthermore, the free-shaped shapes include: single-slit cylindrical shaped micro-ribs, double-slit cylindrical shaped micro-ribs, cylindrical double-slit cylindrical shaped micro-ribs, single-slit square column shaped micro-ribs, double-slit square column shaped micro-ribs and / or cylindrical double-slit square column shaped micro-ribs.

[0015] Furthermore, the slit gap and cylinder diameter of the cylindrical double-slit cylindrical special-shaped micro-ribs meet the following requirements:

[0016] m=s / D≤0.2,n=d / D≤0.3

[0017] In the above formula, m represents the ratio of the slit gap to the large circle diameter of the cylinder, n represents the ratio of the small circle diameter of the cylinder to the large circle diameter of the cylinder, s represents the slit gap, D represents the large circle diameter of the cylinder, and d represents the small circle diameter of the cylinder.

[0018] Furthermore, the ratio y between the nozzle length and the middle plate thickness satisfies:

[0019] y=l0 / L≤0.6

[0020] In the above formula, l0 represents the length of the nozzle, and L represents the thickness of the middle plate.

[0021] Furthermore, the high-speed auxiliary nozzle includes a front half and a rear half structure; the front half structure is consistent with the structure of the same part of the nozzle; the rear half is a contracted structure, and its diameter is smaller than the diameter of the same part of the nozzle.

[0022] Furthermore, the length and aspect ratio of the rear half of the high-speed auxiliary nozzle are determined according to the high-speed auxiliary nozzle and the fluid pressure drop requirements in the nozzle. The fluid pressure drop requirements include:

[0023]

[0024] In the above formula, ΔPa represents the pressure drop of the fluid in the high-speed auxiliary nozzle, and ΔP0 represents the pressure drop of the fluid in the nozzle; the diameter of the front half of the high-speed auxiliary nozzle is d1, the length is l1, and the friction coefficient is f1, and the diameter of the rear half is d2, the length is l2, and the friction coefficient is f2; the diameter of the nozzle is d0, and the length is l0;

[0025] The aspect ratio of the rear half of the high-speed auxiliary nozzle is r=l2 / d2.

[0026] Furthermore, the second half includes multiple sections of the contraction structure, and the diameter of each section of the contraction structure decreases successively from top to bottom.

[0027] Furthermore, the material of the base plate includes semiconductor material, metal or high thermal conductivity material;

[0028] The materials of the middle plate and the top cover plate include semiconductor materials, metals, high thermal conductivity materials or high temperature resistant polymer materials.

[0029] Furthermore, multiple inlet grooves of the microchannel and multiple outlet grooves of the microchannel are arranged in parallel on an intermediate plate. The inlet fluid is first evenly distributed through multiple parallel microchannel grooves, and then sprayed toward the microchannel bottom plate through the nozzle and the height auxiliary nozzle, and then passes through the interval distance of a horizontal inlet and outlet channel, and then flows vertically to the multiple parallel microchannel outlets and flows out.

[0030] It can be seen from the above technical solution that the beneficial technical effects of the present invention are as follows:

[0031] 1. The array structure of nozzle-high-speed auxiliary nozzles arranged at intervals replaces the defect of low inlet flow rate of the conventional manifold structure microchannel, and can significantly increase the inlet flow rate. High flow rate can improve the convective heat transfer performance, and the high flow rate of the auxiliary nozzle can inhibit the merging of boiling phase change bubbles into large bubbles / vapor films to deteriorate the heat transfer performance.

[0032] 2. The free-form micro-rib structure has abundant surface energy mutation points, which can promote the nucleation of fluid bubbles; the slits inside the special-shaped micro-ribs help maintain the liquid film, which is beneficial to improving the boiling heat transfer performance.

[0033] 3. Collaborative nozzles - high-speed auxiliary nozzle arrays and free-shaped micro-fin arrays, through the collaborative use of the spontaneous spreading and wetting of the wall of the self-wetting fluid, the promotion of bubble nucleation by the shaped micro-fins, the maintenance of the liquid film and the jet impact breaking of large bubbles / vapor films, can effectively solve the problem of difficult nucleation of jet boiling on the smooth surface of traditional heat dissipation, and the deterioration of heat transfer due to bubble merging and covering the heating surface, and significantly improve the boiling heat transfer performance.

[0034] 4. After the fluid vertically impacts the heating base plate, the fluid does not need to flow horizontally for a long distance to the outlet, but flows in vertically, briefly passes through the interval distance of a horizontal inlet and outlet channel, and then flows out of the channel vertically. The bubbles on the base plate are not easy to generate large bubbles / vapor films. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following is a brief introduction to the drawings required for the specific embodiments or the prior art description. In all the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, the elements or parts are not necessarily drawn according to the actual scale.

[0036] Figure 1 An exploded view of a high-speed auxiliary nozzle in cooperation with a special-shaped micro-fin jet microchannel according to an embodiment of the present invention;

[0037] Figure 2 A schematic diagram of the bottom plate structure of an embodiment of the present invention;

[0038] Figure 3 is a cross-sectional schematic diagram of a bottom plate and a middle plate of an embodiment of the present invention;

[0039] Figure 4 Schematic diagram of the local structure of various special-shaped micro-ribs according to an embodiment of the present invention;

[0040] Figure 5 It is a schematic diagram of the local dimensions of a cylindrical double-slit special-shaped micro-rib according to an embodiment of the present invention;

[0041] Figure 6 A schematic diagram of the structure of the intermediate plate according to an embodiment of the present invention;

[0042] Figure 7 This is a schematic cross-sectional view of a unit nozzle-high-speed auxiliary nozzle according to an embodiment of the present invention;

[0043] Figure 8 This is a schematic diagram of the dimensions of a unit nozzle-high-speed auxiliary nozzle according to an embodiment of the present invention;

[0044] Fig. 9 This is a schematic diagram of a unit step nozzle-high-speed auxiliary nozzle according to an embodiment of the present invention;

[0045] Reference numerals:

[0046] 1-bottom plate, 10-special-shaped micro-ribs, 19-enclosure plate, 2-middle plate, 21-micro-channel inlet, 22-micro-channel outlet, 23-nozzle, 24-high-speed auxiliary nozzle, 3-top cover plate. DETAILED DESCRIPTION

[0047] The following embodiments of the technical solution of the present invention are described in detail in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present invention, and are therefore only used as examples, and cannot be used to limit the protection scope of the present invention.

[0048] It should be noted that, unless otherwise specified, the technical terms or scientific terms used in this application should have the common meanings understood by those skilled in the art to which the present invention belongs.

[0049] Example

[0050] In order to promote the nucleation of boiling bubbles and maintain the liquid film on the wall, the inventors found through research that the micro-fin structure can enhance heat transfer. The mechanism is that the micro-structure reduces the surface energy, and the micro-fins with special-shaped structures have more surface energy mutations, which are more likely to promote bubble nucleation. At the same time, a suitable micro-fin array is also conducive to maintaining the liquid film on the wall, which is conducive to boiling phase change heat transfer.

[0051] As for breaking large bubbles / steam films, the inventors found through research that jet impingement heat exchange requires a higher jet inlet velocity to achieve a better cooling effect, and usually requires a very small inlet nozzle diameter; especially for jet microchannel jet impingement heat exchange, since the size of a single microchannel used in current engineering practice is usually less than 1mm, the diameter of the jet nozzle must be less than 1mm. On the other hand, jet impingement can also use high-speed jets to destroy large bubbles / steam films, which further puts forward higher requirements for smaller nozzle sizes and suitable nozzle structures.

[0052] From the above, it can be seen that designing a smaller nozzle diameter, a suitable nozzle structure and a micro-fin structure array is expected to simultaneously achieve the promotion of boiling bubble nucleation, wall liquid film maintenance and large bubble / vapor film breaking in high-heat jet microchannel flow boiling heat transfer.

[0053] In view of the above research findings, this embodiment provides a high-speed auxiliary nozzle for chip heat dissipation in coordination with a special-shaped micro-fin jet microchannel, such as Figure 1 As shown, it consists of a bottom plate 1 with a free-shaped micro-fin array, an intermediate plate 2 with a nozzle-high-speed auxiliary nozzle structure, and a top cover plate 3. The coolant fluid flows in from the nozzle-high-speed auxiliary nozzle on the bottom surface of multiple parallel microchannels in the intermediate plate, vertically impacts the shaped micro-fin bottom plate, absorbs the heat generated by the bottom plate, and then flows vertically to the multiple parallel microchannel outlets of the intermediate plate.

[0054] A bottom plate 1 having a free-form micro-rib array, such as Figure 2 As shown, the bottom plate 1 is provided with an array of a plurality of free-shaped micro-ribs 10, and the bottom plate is enclosed by a surrounding plate 19. Figure 3As shown, the top of the free-shaped micro-rib is not in direct contact with the middle plate 2, and a gap g is left in the middle to provide space for the gas to expand after the boiling phase change. Preferably, the ratio x of the gap g and the depth H of the bottom plate inner wall satisfies:

[0055] x=g / H≤0.3 (1)

[0056] It can be seen from the above formula that for microchannels of different sizes, the gap g should increase with the increase of the bottom plate inner wall depth H, and the ratio x of the gap g and the bottom plate inner wall depth H is controlled to be always less than or equal to 0.3, which can ensure that the gap between the top of the free-shaped micro-rib and the middle plate will not be too large, and avoid the small bubbles after nucleation passing through the top of the micro-rib and merging with the bubbles generated by the adjacent micro-ribs to form large bubbles covering the heating surface.

[0057] For the free-shaped micro-rib 10, in some embodiments, it can be as follows Figure 4 The single-slit cylindrical shaped micro-rib 11, double-slit cylindrical shaped micro-rib 12, cylindrical double-slit cylindrical shaped micro-rib 13, single-slit square column shaped micro-rib 14, double-slit square column shaped micro-rib 15, cylindrical double-slit square column shaped micro-rib 16, or other shaped structures similar to the present invention are shown. The above-mentioned free shaped micro-rib structure has abundant surface energy mutation points, which can promote fluid bubble nucleation; the slits inside the shaped micro-rib help maintain the liquid film, which is beneficial to improve the boiling heat transfer performance. In a specific embodiment, one or more of the above-mentioned free shaped micro-ribs can be set on the bottom plate.

[0058] For the slit design inside the special-shaped micro-rib, such as Figure 5 As shown, taking the cylindrical double-slit cylindrical special-shaped micro-rib 13 as an example, the ratio m of the slit gap s to the cylinder large circle diameter D, and the ratio n of the cylinder small circle diameter d to the cylinder large circle diameter D, respectively satisfy:

[0059] m=s / D≤0.2 (2)

[0060] n=d / D≤0.3 (3)

[0061] From the above formula, we can know that the ratio m of the slit gap s and the large diameter D of the cylinder is always less than or equal to 0.2, which can ensure that the slit gap s will not be too large, so that the capillary force of the gap is large enough to lock and maintain the liquid film to avoid dry burning of the wall. At the same time, the ratio n of the small diameter d of the cylinder and the large diameter D of the cylinder is always controlled to be less than or equal to 0.3, which can ensure that the hollow part of the cylinder will not be too large, and avoid the formation of large bubbles covering the heating surface after the bubble nucleation in the large hollow structure, causing the wall temperature to rise rapidly.

[0062] The middle plate 2 having a nozzle-high-speed auxiliary nozzle structure, such as Figure 6As shown, the middle plate 2 includes a plurality of parallel microchannel inlet grooves 21 and a plurality of parallel microchannel outlet grooves 22. A plurality of array-arranged nozzles 23 are provided at the bottom of the microchannel inlet grooves, and a high-speed auxiliary nozzle 24 with a smaller diameter is provided between every two nozzles 23. The high-speed auxiliary nozzle 24 is designed as a concave-contracted structure on the basis of the shape of the nozzle 23, so that the diameter at the inlet of the high-speed auxiliary nozzle is the same as the nozzle diameter, and the diameter at the outlet is smaller than the nozzle diameter. The cross-section of the inlet and outlet microchannels of the middle plate perpendicular to the flow direction is rectangular or square; the shape of the nozzle is preferably circular, and can also be elliptical, square or other commonly used shapes.

[0063] Different from the conventional microchannel heat exchanger in which the nozzle is directly arranged in the inlet manifold, the inlet fluid in this embodiment is first evenly diverted through a plurality of parallel microchannels, and then sprayed toward the microchannel bottom plate through the nozzle and the height auxiliary nozzle. This design can further improve the uniformity of fluid distribution. After the fluid in this embodiment vertically impacts the heating bottom plate, the fluid does not need to flow horizontally for a long distance to the outlet, but flows in vertically, and then flows out of the channel vertically after passing through a horizontal inlet and outlet channel for a short time. Therefore, it is not easy for the bubbles on the bottom plate to generate large bubbles / vapor films, and there is no need to worry about the problem that a large amount of fluid in the conventional microchannel needs to flow horizontally for a long distance to the outlet after absorbing the heat from the bottom plate. In particular, in some embodiments, the inlet and outlet channels and nozzle array of the free-shaped micro-fin array and the intermediate plate can be expanded according to the size of the heat dissipation area, and can be widely used for cooling and heat dissipation of chips with large area sizes.

[0064] like Figure 7 As shown, the depth h of the microchannel inlet groove 21 is ≤ 1 mm, and the ratio y of the length l0 of the nozzle 23 and the thickness L of the intermediate plate 2 satisfies:

[0065] y=l0 / L≤0.6 (4)

[0066] From the above formula, it can be seen that by controlling the depth of the microchannel inlet groove 21 to be less than or equal to 1mm, it can be ensured that the flow channel is always a microchannel to improve the flow heat exchange effect; because when the size of the microchannel is ≤1mm, the microchannel has obvious advantages over the conventional size channel in terms of flow heat exchange. Secondly, the ratio of the nozzle length and the thickness of the middle plate is controlled to be less than or equal to 0.6 to avoid the plate where the nozzle is located being too thin to withstand the plate vibration caused by the high-speed jet flow.

[0067] The high-speed auxiliary nozzle is mainly used to destroy large bubbles or vapor films. The diameter at its outlet can be infinitely small in theory, but in practice it is greater than or equal to 10 microns according to the machining capabilities. In actual applications, the thickness of the middle plate is usually several millimeters to several centimeters, and when the nozzle diameter is tens of microns, the aspect ratio of the nozzle increases rapidly. For example, when the thickness of the plate where the nozzle is located is 5mm and the nozzle diameter is 0.1mm, the aspect ratio reaches as high as 50. This large aspect ratio through hole not only brings challenges to manufacturing and processing, but also causes a sharp increase in the pressure drop of the fluid at the inlet section, which is obviously not conducive to jet injection heat exchange. For this reason, the present embodiment designs a high-speed auxiliary nozzle with a contraction structure in the second half of the conventional nozzle. This design not only reduces the aspect ratio of the auxiliary nozzle and facilitates processing, but also has the advantage of reducing the flow pressure drop and pump work at the jet inlet section. The following method is used to determine the length and aspect ratio of the second half of the high-speed auxiliary nozzle:

[0068] like Figure 8 As shown, assuming that the density of the fluid is ρ, the fluid of the same volume flow rate V flows into the nozzle 23 and the high-speed auxiliary nozzle 24 respectively. The diameter of the first half of the high-speed auxiliary nozzle 24 is d1, the length is l1, and the friction coefficient is f1, and the diameter of the second half is d2, the length is l2, and the friction coefficient is f2. Since the friction loss of the fluid flowing through the local contraction is very small compared to the loss in the main pipeline, this part of the loss is ignored; assuming that the diameter of the nozzle 23 is d0 and the length is l0; then the pressure drop of the fluid in the high-speed auxiliary nozzle 24 is the sum of the pressure drops of the first half and the second half:

[0069]

[0070] in: d0=d1, then

[0071]

[0072] The pressure drop of the fluid in the nozzle 23 is:

[0073]

[0074] Therefore, the pressure drop ratio z of the fluid in the high-speed auxiliary nozzle 24 and the nozzle 23 satisfies:

[0075]

[0076] Among them, the aspect ratio r of the rear half of the auxiliary nozzle is defined as:

[0077] r=l2 / d2 (9)

[0078] It can be seen from the aspect ratio r of the second half of the auxiliary nozzle that although the diameter d2 of the auxiliary nozzle is very small, its length l2 is less than l0. Therefore, the aspect ratio of the second half of the auxiliary nozzle is smaller than the aspect ratio of this section when there is no auxiliary nozzle structure, which is very beneficial to machining. Its specific value can be adjusted according to formulas (8) and (9) to the pressure drop requirements in the high-speed auxiliary nozzle 24 and the nozzle 23, as well as the comprehensive machining capacity.

[0079] In some embodiments, when the thickness of the intermediate plate where the nozzle is located is very large, in order to manufacture a high-speed auxiliary nozzle, a stepped aperture structure can be used for processing. A typical stepped aperture structure is as follows: Fig. 9 As shown, a four-level aperture structure is adopted. When necessary, the number of aperture gradients can be further increased.

[0080] The nozzle-high-speed auxiliary nozzle array structure designed in this embodiment replaces the defect of low inlet flow rate of the conventional manifold structure microchannel, and can significantly improve the inlet flow rate. High flow rate can improve the convective heat transfer performance, and the high flow rate of the auxiliary nozzle can suppress the merging of boiling phase change bubbles into large bubbles / vapor film to deteriorate the heat transfer performance. At the same time, the nozzle-high-speed auxiliary nozzle array does not design a high-speed auxiliary nozzle on each nozzle. This is because when the flow rate is high, it is not conducive to the nucleation of fluid bubbles, so a relatively low nozzle inlet flow rate is required. The wall bubbles corresponding to the relatively low nozzle inlet flow rate will grow around after nucleation, and the high-speed auxiliary nozzle next to the nozzle can play a role in destroying the bubble growth with a high jet velocity. On the other hand, if each nozzle is designed as a high-speed auxiliary nozzle, the flow pressure drop and pump work of the jet inlet section will increase, while the interval arrangement of high-speed auxiliary nozzles can reduce the flow pressure drop.

[0081] In a specific embodiment, the bottom plate, middle plate and cover plate of the microchannel are made of semiconductor materials, such as common semiconductor materials such as silicon and germanium, metals such as copper, aluminum and stainless steel, precious metals such as titanium and tungsten, or high thermal conductivity materials such as nickel-based alloys. In addition, the middle plate and cover plate can also be made of high temperature resistant polymer materials, such as polyetheretherketone (Peek), polycarbonate (PC), polymethylmethacrylate (PMMA), etc.

[0082] The coolant of the present invention is preferably a self-wetting fluid, such as n-butanol solution, or a common low-boiling point electronic fluoride liquid such as HFE7100, HFE7000, FC72, etc., or deionized water, etc.

[0083] By adopting the technical solution of the present embodiment, the nozzle-high-speed auxiliary nozzle array and the free-shaped micro-fin array are coordinated, and at the same time, a fluid with a self-wetting function is preferably used. By synergistically utilizing the spontaneous spreading and wetting of the wall of the self-wetting fluid, the special-shaped micro-ribs to promote bubble nucleation, maintain the liquid film and the jet impact to break up large bubbles / vapor film, the difficult problems of traditional large-size smooth surface jet boiling being difficult to nucleate and the bubbles merging and covering the heating surface to deteriorate heat transfer can be effectively solved, and the boiling heat transfer performance can be significantly improved.

[0084] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein by equivalents. These modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention, and they should all be included in the scope of the claims and specification of the present invention.

Claims

1. A high-speed auxiliary nozzle cooperates with a special-shaped micro-fin jet microchannel, characterized in that: include: Bottom plate, middle plate and top cover plate; The bottom plate is provided with a plurality of free-shaped micro-ribs distributed in an array, and a gap is left between the top of the free-shaped micro-ribs and the middle plate; the bottom plate is enclosed by a surrounding plate on all sides; The middle plate comprises a plurality of microchannel inlet slots and a plurality of microchannel outlet slots, a plurality of nozzles and a plurality of high-speed auxiliary nozzles are arranged at the bottom of the microchannel inlet slots, the inlet diameter of the high-speed auxiliary nozzles is the same as the nozzle diameter, and the outlet diameter is smaller than the nozzle diameter; the nozzles and the high-speed auxiliary nozzles are arranged at intervals; The top cover plate is arranged above the middle plate.

2. The high-speed auxiliary nozzle and special-shaped micro-fin jet microchannel according to claim 1 is characterized in that: The ratio x of the gap to the depth of the bottom plate inner wall satisfies: x=g / H≤0.3 In the above formula, g represents the gap between the top of the free-shaped micro-rib and the middle plate, and H represents the depth of the inner wall of the bottom plate.

3. The high-speed auxiliary nozzle and special-shaped micro-fin jet microchannel according to claim 1 is characterized in that: The free-shaped ribs include: single-slit cylindrical shaped micro-ribs, double-slit cylindrical shaped micro-ribs, cylindrical double-slit cylindrical shaped micro-ribs, single-slit square column shaped micro-ribs, double-slit square column shaped micro-ribs and / or cylindrical double-slit square column shaped micro-ribs.

4. The high-speed auxiliary nozzle and special-shaped micro-fin jet microchannel according to claim 3 is characterized in that: The slit gap and cylinder diameter of the cylindrical double-slit cylindrical special-shaped micro-ribs satisfy: m=s / D≤0.2,n=d / D≤0.3 In the above formula, m represents the ratio of the slit gap to the large circle diameter of the cylinder, n represents the ratio of the small circle diameter of the cylinder to the large circle diameter of the cylinder, s represents the slit gap, D represents the large circle diameter of the cylinder, and d represents the small circle diameter of the cylinder.

5. The high-speed auxiliary nozzle and special-shaped micro-fin jet microchannel according to claim 1 is characterized in that: The ratio y of the length of the nozzle and the thickness of the intermediate plate satisfies: y=l0 / L≤0.6 In the above formula, l0 represents the length of the nozzle, and L represents the thickness of the middle plate.

6. The high-speed auxiliary nozzle and special-shaped micro-fin jet microchannel according to claim 1 is characterized in that: The high-speed auxiliary nozzle includes a front half and a rear half structure; the front half structure is consistent with the structure of the same part of the nozzle; the rear half is a contraction structure, and its diameter is smaller than the diameter of the same part of the nozzle.

7. The high-speed auxiliary nozzle and special-shaped micro-fin jet microchannel according to claim 6, characterized in that: The length and aspect ratio of the rear half of the high-speed auxiliary nozzle are determined according to the high-speed auxiliary nozzle and the fluid pressure drop requirements in the nozzle, and the fluid pressure drop requirements include: In the above formula, ΔP a represents the pressure drop of the fluid in the high-speed auxiliary nozzle, ΔP0 represents the pressure drop of the fluid in the nozzle; the diameter of the front half of the high-speed auxiliary nozzle is d1, the length is l1, and the friction coefficient is f1, and the diameter of the rear half is d2, the length is l2, and the friction coefficient is f2; the diameter of the nozzle is d0, and the length is l0; The aspect ratio of the rear half of the high-speed auxiliary nozzle is r=l2 / d2.

8. The high-speed auxiliary nozzle and special-shaped micro-fin jet microchannel according to claim 6, characterized in that: The second half includes multiple sections of concave and convex structures, and the diameter of each section of the concave and convex structure decreases from top to bottom.

9. The high-speed auxiliary nozzle and special-shaped micro-fin jet microchannel according to claim 1, characterized in that: The material of the base plate includes semiconductor material, metal or high thermal conductivity material; The materials of the middle plate and the top cover plate include semiconductor materials, metals, materials with high thermal conductivity or high temperature resistant polymer materials.

10. The high-speed auxiliary nozzle and special-shaped micro-fin jet microchannel according to claim 1, characterized in that: The multiple inlet grooves and the multiple outlet grooves of the microchannel are arranged in parallel on an intermediate plate. The inlet fluid is first evenly distributed through the multiple parallel microchannel grooves, and then sprayed to the microchannel bottom plate through the nozzle and the height auxiliary nozzle, and then passes through the interval distance of a horizontal inlet and outlet channel, and then flows vertically to the multiple parallel microchannel outlets and flows out.

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