Diamond wire outer circle machining equipment

Abstract

The invention discloses diamond wire outer circle machining equipment, and belongs to the technical field of diamond wire cutting machining. The linear moving device comprises a moving platform, a moving driving source, a screw rod driving part, a guide wheel part and a protective cover; the rotating device is used for providing rotating power for the processed material; the vacuum chuck is used for adsorbing and fixing the processed material in vacuum; the diamond wire cutting device comprises a tensioning reel, a driving reel, a plurality of groups of driven reels and a diamond wire; after machining, the semiconductor crystal blank is divided into the machined crystal with the standard size on the inner side and the redundant crystal circular ring waste on the outer side, so that the workload of grinding machining and the abrasion consumption of a grinding wheel are greatly reduced, the production cost is reduced, meanwhile, the problem that in the prior art, part of crystals crack in the machining process is effectively solved, and the machining quality is improved. And the economical efficiency is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of diamond wire cutting processing, and in particular relates to a diamond wire outer circle processing device. Background Art

[0002] Semiconductor materials such as silicon carbide, lithium tantalate, and lithium niobate are widely used in high temperature, high frequency, high power, low energy consumption, optical technology industries, etc. due to their unique excellent physical and chemical properties, and related industries are developing rapidly in my country.

[0003] At present, the common processing technology of this type of crystal material is: 1. Crystal orientation - 2. Surface grinder processes the two end faces of the crystal - 3. Cylindrical grinder grinds the outer circle of the crystal to obtain a crystal with a quasi-standard diameter - 4. Cylindrical grinder fine-grinds the silicon carbide crystal of quasi-standard diameter to obtain a crystal with a standard diameter - 5. Surface grinder grinds the OFF surface (plane) of the outer circle - 6. Multi-wire cutting machine cuts the crystal into wafers - 7. Wafer grinding - 8. Wafer polishing - 9. Wafer inspection and cleaning.

[0004] At present, this type of crystal outer circle processing has several common pain points:

[0005] 1. The process of grinding the excess material of the outer ring into powder by a grinding wheel to obtain a crystal with a quasi-standard diameter requires the entire outer circle to be processed into powder, which is a large workload, causes large wear and tear on the grinding wheel and machine tools, and results in high processing costs;

[0006] 2. Some crystal materials are expensive, and grinding the outer ring into powder will cause great waste. Calculated at a unit price of 1,000 yuan per kilogram, each ton of material ground into powder will cause a direct economic loss of 1 million yuan, not including the manpower and material costs of the processing process;

[0007] 3. During the tightening process on the grinding machine, due to the large tightening force, large feed volume and large grinding force during rough grinding, crystal cracking often occurs during processing, thereby reducing the yield and causing economic losses. For this reason, we propose a diamond wire external cylindrical processing equipment. Summary of the invention

[0008] The present invention provides a diamond wire outer circle processing device to solve the problems raised in the above background technology.

[0009] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a diamond wire outer circle processing equipment, a base, providing an installation foundation for the equipment;

[0010] Rack, which provides a foundation for equipment installation;

[0011] A linear moving device, comprising a moving platform, a moving driving source, a screw driving component, a guide rail component and a protective cover;

[0012] A rotating device for providing rotational power to the material being processed;

[0013] Vacuum suction cup, used for vacuum adsorption and fixing of processed materials;

[0014] A diamond wire cutting device comprises a tensioning winding wheel, a driving winding wheel, a plurality of groups of driven winding wheels and a diamond wire.

[0015] Furthermore, the linear moving device comprises:

[0016] The guide rail component is arranged on the base, and comprises a guide rail and a slider which slides linearly on the guide rail;

[0017] A moving platform, connected to a slider that slides linearly on the guide rail component, is used to achieve linear movement of the processed material;

[0018] A mobile driving source, the mobile driving source is connected to the screw driving component through a coupling, and is used to drive the screw driving component to rotate so as to drive the mobile platform to move linearly;

[0019] A screw drive component for converting the rotational motion of the mobile drive source into horizontal linear motion;

[0020] The protective cover is used to isolate the coolant and processing powder during the processing, and prevent the coolant and processing powder from entering the guide components and the screw drive components.

[0021] Furthermore, the rotating device comprises:

[0022] The rotating device housing is used to provide a mounting base for the components of the rotating device;

[0023] A turntable bearing is installed on the housing of the rotating device to provide rotation support for the rotating device;

[0024] The turntable bearing seat is used to install the turntable bearing and provide physical support for the turntable bearing;

[0025] A rotating platform, mounted on the inner ring of the turntable bearing, for providing a rotating output platform;

[0026] A rotating connector, used to connect the rotating platform and the vacuum suction cup;

[0027] A rotary drive source is installed in the housing of the rotary device to provide rotary power for the rotary device;

[0028] A driving source protection cover is installed on the rotating device housing and is used to isolate the rotating driving source from the external environment;

[0029] A reduction device, one end of which is connected to the rotary drive source, and the other end of which is connected to the rotary platform, is used to reduce the rotation speed output by the rotary drive source according to a reduction ratio and output the rotation speed to the rotary platform.

[0030] Furthermore, the vacuum suction cup is threadedly connected to the rotating connector, the surface of the vacuum suction cup is a planar structure, and a plurality of staggered grooves are arranged on the upper surface of the vacuum suction cup along the circumferential direction and the diameter direction.

[0031] Furthermore, the active winding wheel is arranged on the surface of the frame, and the active winding wheel is connected to the output end of the driving source installed in the frame through a coupling, the tensioning winding wheel and the driven winding wheel are rotatably connected to the base through a rotating shaft, and the surfaces of the tensioning winding wheel, the diamond wire and the driven winding wheel are sequentially sleeved with diamond wire.

[0032] Furthermore, the tensioning winding wheel is also a driven winding wheel.

[0033] The beneficial effects of the present invention are:

[0034] 1. There is no need to process all the excess crystal materials on the outer circle into powder to obtain a standard diameter crystal. Instead, high-speed diamond wire is used for grinding. Only the crystal ring area with the width of the diamond wire diameter needs to be processed into powder. After processing, the semiconductor crystal blank is divided into the processed crystal of the inner quasi-standard size and the excess crystal ring waste on the outer side. This greatly reduces the workload of grinding and the wear and tear of the grinding wheel, and reduces the production cost.

[0035] 2. The outer circle and OFF edge (flat edge) of the crystal can be cut into shape at one time, replacing the traditional process of first grinding the outer circle with an external cylindrical grinder and then grinding the OFF edge with a surface grinder, saving time, labor and processing costs.

[0036] 3. When there are local defects on the periphery of the crystal, the cylindrical grinder needs eccentric clamping, which is difficult to adjust, takes a long time to process, and is difficult to process. However, the present invention only needs to offset the crystal on the suction cup by a certain distance, which hardly increases the workload and is easy to use.

[0037] 4. The crystal is fixed with a vacuum chuck, which greatly reduces the clamping force of the crystal and the grinding force is also very small, effectively solving the problem of cracking in the processing of some crystals in the prior art and improving the economic efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0039] Figure 2 It is a schematic diagram of the three-dimensional structure of the rotating device of the present invention;

[0040] Figure 3It is a schematic diagram of the top view of the base of the present invention;

[0041] Figure 4 It is a front view structural schematic diagram of the rotating device of the present invention.

[0042] In the figure:

[0043] 1. Base; 2. Vacuum suction cup; 3. Rotating device; 31. Speed ​​reduction device; 32. Rotating connector; 33. Rotating platform; 34. Turntable bearing seat; 35. Turntable bearing; 36. Driving source protection cover; 37. Rotating device housing; 38. Rotating driving source; 4. Tensioning winding wheel; 5. Diamond wire; 6. Active winding wheel; 7. Driven winding wheel; 8. Moving platform; 9. Support member; 10. Rotating device mounting plate; 11. Screw drive component; 12. Moving driving source; 13. Guide rail component; 14. Protective cover; 15. Frame; 16. Processed material. DETAILED DESCRIPTION

[0044] In order to further understand the content, features and effects of the present invention, the following embodiments are given as examples and described in detail with reference to the accompanying drawings.

[0045] Example:

[0046] See also Figure 1 - Figure 4 , a diamond wire outer circle processing equipment, comprising:

[0047] The base 1 provides a mounting base for the device. The base 1 is a square frame structure, and its bottom is placed on the ground.

[0048] The linear moving device includes a moving platform 8, a moving driving source 12, a screw driving component 11, a guide rail component 13 and a shield 14. The linear moving device is used to push the rotating device 3 to move linearly horizontally, so that the linear moving device pushes the vacuum suction cup 2 to move through the rotating device 3, and the vacuum suction cup 2 pushes the workpiece to be processed to move, so as to facilitate moving the workpiece to be processed to the diamond wire 5;

[0049] The rotating device 3 is used to provide rotational power for the processed material;

[0050] Vacuum suction cup 2, used for vacuum adsorption and fixing of processed materials;

[0051] The diamond wire cutting device comprises a tensioning winding wheel 4, an active winding wheel 6, a plurality of groups of driven winding wheels 7 and a diamond wire 5. The active winding wheel 6 is connected to the output end of a driving source installed in a frame 15. The tensioning winding wheel 4 and the driven winding wheel 7 are both rotatably connected to a base 1 through a rotating shaft. The diamond wire 5 is sequentially sleeved on the surfaces of the tensioning winding wheel 4, the active winding wheel 6 and the driven winding wheel 7. The tensioning winding wheel 4 is also the driven winding wheel 7. When the output end of the driving source drives the active winding wheel 6 to rotate, the active winding wheel 6 pulls the tensioning winding wheel 4 and the driven winding wheel 7 through the diamond wire 5 to rotate at high speed. The driven winding wheel 7 rotates at high speed following the active winding wheel 6 driven by the diamond wire 5. Under the action of the tensioning winding wheel 4, the diamond wire 5 forms a section of diamond wire 5 with a certain tension between the two winding wheels.

[0052] In other embodiments, the linear motion device comprises:

[0053] The guide rail component 13 is arranged on the base 1, and includes a guide rail and a slider that slides linearly on the guide rail;

[0054] The moving platform 8 is connected to a slider that slides linearly on the guide rail component 13, and is used to achieve linear movement of the processed material;

[0055] A mobile driving source 12, the mobile driving source 12 is connected to the screw driving component 11 through a coupling, and is used to drive the screw driving component 11 to rotate so as to drive the mobile platform 8 to move linearly;

[0056] The screw drive component 11 is used to convert the rotational motion of the mobile drive source 12 into linear motion. The screw drive component 11 includes a screw bearing seat, a screw arranged in parallel with the guide rail component 13, a coupling, and a screw nut connected to the screw. When the mobile drive source 12 performs a rotational motion, the motion is transmitted to the screw through the coupling so that the screw and the mobile drive source 12 perform a rotational motion together, thereby driving the screw nut to convert the rotational motion into linear motion.

[0057] The shield 14 is used to isolate the coolant and processing powder during the processing, and prevent the coolant and processing powder from entering the guide rail component 13 and the screw drive component 11.

[0058] In other embodiments, the rotating device 3 comprises:

[0059] The rotating device housing 37 is used to provide a mounting base for the components of the rotating device 3;

[0060] The turntable bearing 35 is mounted on the rotating device housing 37 to provide rotation support for the rotating device 3;

[0061] The turntable bearing seat 34 is used to install the turntable bearing 35 and provide physical support for the turntable bearing 35;

[0062] The rotating platform 33 is mounted on the inner ring of the turntable bearing seat 34 and is used to provide a rotating output platform;

[0063] A rotating connector 32, used to connect the rotating platform 33 and the vacuum suction cup 2;

[0064] The rotation driving source 38 is installed in the rotating device housing 37 to provide rotation power for the rotating device 3 .

[0065] The driving source protection cover 36 is installed on the rotating device housing 37 and is used to isolate the rotating driving source from the external environment.

[0066] The reduction device 31 is connected to the rotation driving source 38 at one end and to the rotating platform 33 at the other end, and is used to reduce the rotation speed output by the rotation driving source 38 according to the reduction ratio and output it to the rotating platform 33 .

[0067] In other embodiments, the vacuum suction cup 2 is threadedly connected to the rotating connector 32, the surface of the vacuum suction cup 2 is a planar structure, and a plurality of staggered grooves are arranged on the upper surface of the vacuum suction cup 2 along the circumferential direction and the diameter direction.

[0068] In other embodiments, the active winding wheel 6 is connected to the output end of the driving source installed in the frame 15 through a coupling, the tensioning winding wheel 4 and the driven winding wheel 7 are rotatably connected to the base 1 through a rotating shaft, and the surfaces of the tensioning winding wheel 4, the active winding wheel 6 and the driven winding wheel 7 are sequentially sleeved with diamond wire 5. When the diamond wire 5 maintaining a certain tension between the two winding wheels moves at high speed driven by the active winding wheel 6, the processed material fixed on the vacuum suction cup 2 is translated in a direction close to the diamond wire 5 driven by the rotating device 3, and the diamond wire 5 cuts into the processed material along the diameter direction of the processed material.

[0069] The base 1 is a square frame structure, the bottom of which is placed on the ground. The guide rail component 13 and the screw drive component 11 are installed on the base 1. The screw drive component 11 is connected to the slider of the guide rail component 13 and the screw nut of the screw drive component 11 respectively. The screw drive component 11 and the guide rail component 13 are symmetrically threaded with a shield 14 on both sides. When working, the mobile drive source 12 performs a rotational motion, and the mobile drive source 12 drives the screw drive component 11 to perform a rotational motion. At the same time, the screw in the screw drive component 11 is threadedly matched with the screw nut, so that the nut moves linearly on the surface of the screw, driving the mobile platform 8 connected to the screw nut to perform a linear horizontal motion along the slider set in the guide rail component 13.

[0070] The rotating device 3 is fixed on the rotating device mounting plate 10, and the rotating device mounting plate 10 is connected to the support member 9, and the support member 9 is fixed on the mobile platform 8. When the mobile driving source 12 performs a rotational motion, the rotating device 3 and the mobile platform 8 perform a linear movement along the direction of the guide rail component 13. The rotating driving source 38 is installed on the rotating device housing 37, and the rotating output shaft of the rotating driving source 38 is connected to the reduction gear 31. The driving source protection cover 36 is installed on the outer periphery of the rotating device housing 37 to isolate the rotating driving source 38 from the external environment; the reduction gear 31 is installed on the rotating device housing 37, and the input end of the reduction gear 31 is connected to the rotating driving source 38, and the output end is connected to the rotating platform 33. The rotating driving source 38 When rotating, the rotating platform 33 is decelerated by the reduction gear 31, and the rotation speed is slowed down after being decelerated by the reduction gear 31; the turntable bearing seat 34 is installed on the rotating device housing 37, the outer ring of the turntable bearing 35 is installed on the turntable bearing seat 34, and the inner ring of the turntable bearing 35 is connected to the rotating platform 33, providing physical support for the rotating platform 33 so that it can withstand larger axial and radial forces during rotation; the rotating connector 32 is installed on the rotating platform 33, and rotates synchronously with the rotating platform 33 during operation; the vacuum suction cup 2 is connected to the rotating connector 32, and rotates synchronously with the rotating connector 32 during operation, providing vacuum adsorption force for the processed material, and firmly adsorbing the processed material on the vacuum suction cup 2.

[0071] The diamond wire cutting device consists of an active winding wheel 6, at least one driven winding wheel, and at least one tensioning winding wheel 4. The diamond wire cutting device consists of an active winding wheel 6, two driven winding wheels 7 and a tensioning winding wheel 4, and the tensioning winding wheel 4 can also be a driven winding wheel 7. The annular diamond wire 5 is wound on the four winding wheels. After the tensioning winding wheel 4 is tensioned, the diamond wire moves at high speed as the active winding wheel 6 rotates at high speed during operation.

[0072] When the equipment is working, first start the driving power supply connected to the mobile driving source 12 and the active winding wheel 6 to start rotating motion, and when the active winding wheel 6 is rotating at high speed, the active winding wheel 6 drives the diamond wire 5 to move, and when the diamond wire 5 is moving, the diamond wire 5 drives the tensioning winding wheel 4 and the driven winding wheel 7 to move at high speed, and the processed material adsorbed on the vacuum suction cup 2 is translated toward the diamond wire 5 along with the vacuum suction cup 2 and the screw driving component 11, approaches and is cut by the diamond wire 5 along the diameter direction, when the diamond wire 5 cuts into the diameter size position of the processed material to be processed, the mobile driving source 12 stops rotating, and the processed material stops the translational motion toward the diamond wire 5, and at the same time, the rotating driving source 38 starts to rotate, driving the rotating connector 32, the vacuum suction cup 2 and the processed material to rotate, and finally the inner circle and the outer circle of the processed material are separated to complete the outer circle cutting process, and during the outer circle cutting process, the rotating driving source 38 and the mobile driving source 12 can also be linked according to the set program to process outer circles of different shapes.

[0073] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. The above embodiments and descriptions are only preferred examples of the present invention and are not intended to limit the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A diamond wire outer circle processing equipment, characterized in that: include: A base (1) provides a mounting base for the device; A rack (15) provides a foundation for equipment installation; A linear moving device comprises a moving platform (8), a moving driving source (12), a screw driving component (11), a guide rail component (13) and a protective cover (14); A rotating device (3) for providing rotational power to the material being processed; A vacuum suction cup (2) is used for vacuum adsorption and fixing of the processed material; A diamond wire cutting device comprises a tensioning winding wheel (4), a driving winding wheel (6), a plurality of groups of driven winding wheels (7) and a diamond wire (5).

2. The diamond wire outer circle processing equipment according to claim 1, characterized in that: The linear moving device comprises: A guide rail component (13) is arranged on the base (1), comprising a guide rail and a slider that slides linearly on the guide rail; A moving platform (8) connected to a slider that slides linearly on the guide rail component (13) and is used to achieve linear movement of the processed material (16); A mobile driving source (12), the mobile driving source (12) being connected to the screw driving component (11) via a coupling, and being used to drive the screw driving component (11) to rotate so as to drive the mobile platform (8) to move linearly; A screw drive component (11) for converting the rotational motion of the mobile drive source (12) into horizontal linear motion; The protective cover (14) is used to isolate the coolant and processing powder during the processing, and prevent the coolant and processing powder from entering the guide rail component (13) and the screw drive component (11).

3. The diamond wire outer circle processing equipment according to claim 1, characterized in that: The rotating device (3) comprises: A rotating device housing (37) for providing a mounting base for components of the rotating device (3); A turntable bearing (35) is mounted on the rotating device housing (37) to provide rotation support for the rotating device (3); A turntable bearing seat (34) is used to mount the turntable bearing (35) and provide physical support for the turntable bearing (35); A rotating platform (33) is mounted on the inner ring of the turntable bearing (35) and is used to provide a rotating output platform; A rotating connecting member (32) for connecting the rotating platform (33) and the vacuum suction cup (2); A rotation driving source (38) is installed in the rotating device housing (37) to provide rotational power for the rotating device (3); A driving source protection cover (36) is mounted on the rotating device housing (37) and is used to isolate the rotating driving source from the external environment; A reduction device (31) has one end connected to the rotational drive source (38) and the other end connected to the rotational platform (33), and is used to reduce the rotational speed output by the rotational drive source (38) according to a reduction ratio and output the speed to the rotational platform (33).

4. The diamond wire outer circle processing equipment according to claim 1, characterized in that: The vacuum suction cup (2) is threadedly connected to the rotating connecting piece (32); the surface of the vacuum suction cup (2) is a planar structure, and a plurality of staggered grooves are arranged on the upper surface of the vacuum suction cup (2) along the circumferential direction and the diameter direction.

5. The diamond wire outer circle processing equipment according to claim 1, characterized in that: The active winding wheel (6) is arranged on the surface of the frame (15), and is connected to the output end of a driving source installed in the frame (15) through a coupling, the tensioning winding wheel (4) and the driven winding wheel (7) are rotatably connected to the base (1) through a rotating shaft, and the surfaces of the tensioning winding wheel (4), the diamond wire (5) and the driven winding wheel (7) are sequentially sleeved with the diamond wire (5).

6. The diamond wire outer circle processing equipment according to claim 5, characterized in that: The tensioning winding wheel (4) is also a driven winding wheel (7).

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