Vacuum pump testing device and vacuum pump testing method

Abstract

The invention relates to the field of vacuum pump testing devices, and provides a vacuum pump testing device and a vacuum pump testing method. The vacuum pump testing device comprises a sample gas tank, an extraction valve, a pressure release valve and a control module. The control module can test the pumping speed of the vacuum pump to be tested only by controlling the pumping valve and the pressure release valve to be opened alternately. The control module obtains air pressure parameters in the pumping speed testing process and generates a pumping speed testing result corresponding to the tested vacuum pump based on the air pressure parameters. According to the vacuum pump testing method and device, a tester does not need to manually control the extraction valve and / or the pressure release valve and does not need to manually record or calculate data in the testing process, automatic testing of the vacuum pump is achieved, and the testing efficiency of the vacuum pump is improved.

Description

Technical Field

[0001] The present application belongs to the technical field of vacuum pump testing devices, and in particular, relates to a vacuum pump testing device and a vacuum pump testing method. Background Art

[0002] A vacuum pump is used to evacuate and / or maintain a vacuum environment in a confined space or container, such as a closed warehouse or gas tank. At present, when using a vacuum pump to create or maintain a vacuum environment in a confined space, it is usually necessary to build a corresponding simulation environment to test the vacuum pump. For example, a test environment for a vacuum pump is built using a closed container, a valve, etc., and by controlling the valve switch, the tester records the data during the operation of the vacuum pump to achieve the test operation of the vacuum pump.

[0003] However, in the relevant test scheme, the tester needs to manually control the valve switch, manually record the data during the test, and perform calculations and analysis based on the recorded data to complete the test of the vacuum pump. It can be seen that the relevant vacuum pump test scheme is overly dependent on the tester's test experience and hands-on ability, and the test results of the vacuum pump are easily affected by the tester's actual operation. Therefore, a new solution that can realize automatic testing of vacuum pumps is urgently needed. Summary of the invention

[0004] The purpose of the present application is to provide a vacuum pump testing device and a vacuum pump testing method, and to provide a new solution that can realize automated testing of a vacuum pump.

[0005] A first aspect of an embodiment of the present application provides a vacuum pump testing device for testing a vacuum pump under test, the vacuum pump testing device comprising:

[0006] The sample gas tank comprises a gas extraction port and a pressure relief port, wherein the gas extraction port is used to connect to the gas inlet of the vacuum pump to be tested;

[0007] An air extraction valve is provided corresponding to the air extraction port;

[0008] A pressure relief valve is provided corresponding to the pressure relief port;

[0009] The control module is connected to the exhaust valve and the pressure relief valve respectively. The control module is used to control the exhaust valve and the pressure relief valve to open alternately according to a preset exhaust speed test strategy to perform an exhaust speed test on the vacuum pump under test, obtain the air pressure parameters of the sample gas tank during the exhaust speed test, and generate the exhaust speed test results corresponding to the vacuum pump under test based on the air pressure parameters.

[0010] A vacuum pump testing device provided in an embodiment of the present application includes a sample gas tank, an air extraction valve, a pressure relief valve and a control module. The sample gas tank includes an air extraction port and a pressure relief port, and the air extraction port is used to connect the air inlet of the vacuum pump to be tested. The air extraction valve is set correspondingly to the air extraction port, and the pressure relief valve is set correspondingly to the pressure relief port. The control module can control the air extraction valve and the pressure relief valve to be opened alternately according to the preset pumping speed test strategy. Since the air extraction port of the sample gas tank is connected to the air inlet of the vacuum pump to be tested, when the air extraction valve is controlled to be opened, the vacuum pump to be tested can perform a vacuum operation on the sample gas tank. When the pressure relief valve is opened, the sample gas tank can be changed from a vacuum state to a non-vacuum state, such as to an atmospheric pressure state. In this way, the control module can realize the pumping speed test of the vacuum pump to be tested by simply controlling the air extraction valve and the pressure relief valve to be opened alternately. The control module obtains the air pressure parameters of the sample gas tank during the execution of the pumping speed test, and generates the pumping speed test result corresponding to the vacuum pump to be tested based on the air pressure parameters. There is no need for the tester to manually control the exhaust valve and / or the pressure relief valve, nor is there any need for the tester to manually record or calculate the data during the test, thereby realizing automated testing of the vacuum pump and improving the efficiency of testing the vacuum pump.

[0011] In addition, since the vacuum pump testing device provided by the above scheme does not require the tester to manually control the exhaust valve and / or the pressure relief valve, and does not require the tester to manually record or calculate the data during the test, the vacuum pump testing device can be applied to more testing scenarios, that is, it provides a new scheme that can adapt to more vacuum pump testing scenarios.

[0012] A second aspect of an embodiment of the present application provides a vacuum pump testing method, which is applied to the vacuum pump testing device provided in the first aspect above, and the method includes:

[0013] According to the preset pumping speed test strategy, the air extraction valve and the pressure relief valve are controlled to be opened alternately to perform a pumping speed test on the vacuum pump under test;

[0014] Obtain the air pressure parameters during the pumping speed test;

[0015] Based on the air pressure parameters, the pumping speed test results corresponding to the vacuum pump under test are generated.

[0016] It can be understood that the beneficial effects of the second aspect mentioned above can be found in the relevant description of the first aspect mentioned above, and will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 A schematic diagram of the structure of a vacuum pump testing device provided in an embodiment of the present application;

[0018] Figure 2 A specific structural diagram of a vacuum pump testing device provided in an embodiment of the present application Figure 1;

[0019] Figure 3 A specific structural diagram of a vacuum pump testing device provided in an embodiment of the present application Figure 2 ;

[0020] Figure 4 A schematic structural diagram of a vacuum pump testing device provided in another embodiment of the present application;

[0021] Figure 5 A schematic structural diagram of a vacuum pump testing device provided in yet another embodiment of the present application;

[0022] Figure 6 A schematic diagram of the specific structure of a vacuum pump testing device provided in yet another embodiment of the present application;

[0023] Figure 7 A flowchart for implementing a vacuum pump testing method provided in an embodiment of the present application. DETAILED DESCRIPTION

[0024] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0025] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0026] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0027] See also Figure 1 , Figure 1 The following is a schematic diagram of the structure of a vacuum pump testing device provided in an embodiment of the present application. For ease of explanation, only the parts related to the present embodiment are shown, which are described in detail as follows:

[0028] exist Figure 1 In the present invention, a vacuum pump testing device 100 is used to test a vacuum pump 110 to be tested. The vacuum pump testing device 100 includes: a sample gas tank 10, a vacuum valve 20, a pressure relief valve 30 and a control module 40. Specifically:

[0029] The sample gas tank 10 includes an air suction port 11 and a pressure relief port 12. The air suction port 11 is used to connect to the air inlet 111 of the vacuum pump 110 under test. The air suction valve 20 is provided corresponding to the air suction port 11. The pressure relief valve 30 is provided corresponding to the pressure relief port 12. The control module 40 is connected to the air suction valve 20 and the pressure relief valve 30 respectively. The control module 40 is used to control the air suction valve 20 and the pressure relief valve 30 to open alternately according to a preset pumping speed test strategy, so as to perform a pumping speed test on the vacuum pump 110 under test, obtain the air pressure parameters of the sample gas tank 10 during the execution of the pumping speed test, and generate a pumping speed test result corresponding to the vacuum pump under test based on the air pressure parameters.

[0030] In this embodiment, the sample gas tank 10 generally refers to a sealed gas tank that is evacuated by the vacuum pump 110 to be tested. In specific implementation, a suitable sealed gas tank can be selected as the sample gas tank 10 according to the specifications of the vacuum pump 110 to be tested.

[0031] Exemplarily, the volume of the sample gas tank 10 is proportional to or positively correlated with the vacuum pumping capacity of the tested vacuum pump 110. For example, when the power of the tested vacuum pump 110 is relatively large, a gas tank with a larger volume can be selected as the sample gas tank 10. For another example, when the tested vacuum pump 110 has a large number of vacuuming gears, a gas tank with a larger volume can be selected as the sample gas tank 10. Here, the sealable gas tank used as the sample gas tank 10 can be an industrial gas storage tank, oil storage tank, etc., which is not limited here.

[0032] In all embodiments of the present application, the air extraction port 11 and the pressure relief port 12 are both provided on the sample gas tank 10. Furthermore, the air extraction valve 20 is provided corresponding to the air extraction port 11, and the pressure relief valve 30 is provided corresponding to the pressure relief port 12. Here, the air extraction valve 20 is provided corresponding to the air extraction port 11, which means that the air extraction valve 20 is provided correspondingly in the air extraction path of the air extraction port 11. Similarly, the pressure relief valve 30 is provided correspondingly to the pressure relief port 12, which means that the pressure relief valve 30 is provided correspondingly in the air extraction path of the pressure relief port 12.

[0033] For example, in a specific implementation, the air extraction port 11 can be connected to the air inlet 111 of the vacuum pump 110 under test through a pipeline. Accordingly, the air extraction valve 20 is arranged corresponding to the air extraction port 11, and specifically, the air extraction valve 20 can be arranged at the air extraction port 11, or at any point on the pipeline between the air extraction port 11 and the air inlet 111 of the vacuum pump 110 under test. Similarly, the pressure relief valve 30 can be arranged at the pressure relief port 12, or on the pressure relief pipeline connected to the pressure relief port 12.

[0034] It is easy to understand that, since the control module 40 is connected to the air extraction valve 20 and the pressure relief valve 30 respectively, the control module 40 can control the air extraction valve 20 and the pressure relief valve 30 respectively.

[0035] It can be understood that in all the embodiments of the present application, the control module 40 controls the air extraction valve 20 and the pressure relief valve 30 to open alternately according to the preset pumping speed test strategy. Specifically, the air extraction valve 20 is controlled to open to vacuum the sample gas tank, and then the pressure relief valve 30 is opened to relieve the pressure on the vacuumed sample gas tank.

[0036] As an example, in the process of the control module 40 controlling the air extraction valve 20 and the pressure relief valve 30 to be alternately opened according to the preset pumping speed test strategy, the air extraction valve 20 is controlled to be opened for a time equal to or greater than the time required for the sample gas tank 10 to be changed from a non-vacuum state (such as an atmospheric pressure state) to a vacuum state. Similarly, the pressure relief valve 30 is controlled to be opened for a time equal to or greater than the time required for the sample gas tank 10 to be changed from a vacuum state to a non-vacuum state (such as an atmospheric pressure state).

[0037] For example, in actual applications, the opening operation of the air extraction valve 20 and the opening operation of the vacuum pump 110 under test can be synchronized, or the opening operation of the air extraction valve 20 is later than the opening operation of the vacuum pump 110 under test. That is, in the process that the control module 40 controls the air extraction valve 20 and the pressure relief valve 30 to be opened alternately according to the preset pumping speed test strategy, when the control module 40 controls the air extraction valve 20 to be opened, the vacuum pump 110 under test is also opened at the same time, or before the control module 40 controls the air extraction valve 20 to be opened, the vacuum pump 110 under test has been opened. Accordingly, when the control module 40 controls the air extraction valve 20 to be closed, the vacuum pump 110 under test is also closed or shut down at the same time.

[0038] In a specific implementation, the vacuum pump 110 under test may be controlled by a built-in controller thereof, or may be controlled by a control module 40 and / or other control devices, such as a remote controller.

[0039] In combination with the above examples, in one example, in order to synchronize the opening operation of the air extraction valve 20 with the opening operation of the vacuum pump 110 under test, or to realize that the opening operation of the air extraction valve 20 is later than the opening operation of the vacuum pump 110 under test, the control module 40 may also be connected to the vacuum pump 110 under test. Accordingly, in the process of controlling the air extraction valve 20 and the pressure relief valve 30 to be opened alternately according to the preset pumping speed test strategy, the control module 40 controls the vacuum pump 110 under test to be opened while controlling the air extraction valve 20 to be opened for the first time, or controls the vacuum pump 110 under test to be opened before controlling the air extraction valve 20 to be opened for the first time. In addition, while controlling the air extraction valve 20 to be closed, the vacuum pump 110 under test may be controlled to be closed at the same time.

[0040] In other examples, the vacuum pump 110 under test is controlled by other control devices, such as a remote controller, a mobile terminal, etc. The control module 40 can achieve a switching frequency of the vacuum pump 110 under test corresponding to the frequency of alternating opening of the exhaust valve 20 and the pressure relief valve 30 by communicating with other control devices.

[0041] For example, the control module 40 can communicate with other control devices to send the preset pumping speed test strategy to other control devices, so that other control devices can also control the opening and closing of the vacuum pump 110 under test according to the frequency of alternating opening of the exhaust valve 20 and the pressure relief valve 30.

[0042] For another example, the control module 40 can communicate with other control devices, and when controlling the opening and closing of the air extraction valve 20, notify other control devices to control the opening and closing of the vacuum pump 110 under test accordingly. Thus, the switching frequency of the vacuum pump 110 under test is achieved, corresponding to the frequency of the alternating opening of the air extraction valve 20 and the pressure relief valve 30. Alternatively, the opening of the vacuum pump 110 under test is made before the opening of the air extraction valve 20.

[0043] In this embodiment, when the control module 40 controls the air extraction valve 20 and the pressure relief valve 30 to open alternately according to the preset pumping speed test strategy, and performs a pumping speed test on the vacuum pump 110 under test, the control module 40 obtains the air pressure parameters of the sample gas tank 10 during the execution of the pumping speed test, and generates a pumping speed test result corresponding to the vacuum pump 110 under test based on the air pressure parameters. Here, the air pressure parameters are used to describe the air pressure change trend of the vacuum pump 110 under test during the pumping speed test. Specifically, the air pressure parameters may include: air pressure value, vacuum degree, etc. Among them, both the air pressure value and the vacuum degree are used to indicate the vacuum degree in the sample gas tank 10.

[0044] It should be noted that vacuum refers to the rarefaction of the gas in a vacuum state. If the pressure in the sample gas tank 10 is lower than the atmospheric pressure, a vacuum gauge or a vacuum gauge is required to measure the pressure. The value read from the vacuum gauge or the vacuum gauge is the vacuum. The vacuum value indicates that the actual pressure value in the vacuum pump 110 under test is lower than the atmospheric pressure. The rarefaction of the gas is usually expressed as "high vacuum" and "low vacuum". A high vacuum indicates a stronger vacuum, and a low vacuum indicates a weaker vacuum.

[0045] As an embodiment, the control module 40 is also used to, during the execution of the pumping speed test, when the air pressure parameters of the sample gas tank 10 meet the preset vacuum conditions, control the vacuum valve 20 to close, and control the pressure relief valve 30 to open for a preset time to perform a pressure relief operation on the sample gas tank.

[0046] Here, the preset vacuum condition can specifically be a preset vacuum degree. During the execution of the pumping speed test, when the vacuum valve 20 is controlled to be opened, the pressure relief valve 30 is in a closed state. Since the control module 40 can obtain the air pressure parameters of the sample gas tank 10 during the execution of the pumping speed test, it can be known whether the vacuum degree of the internal environment of the sample gas tank 10 meets the preset vacuum degree when the vacuum valve 20 is opened, and when the vacuum degree of the internal environment of the sample gas tank 10 meets the preset vacuum degree, the vacuum valve 20 can be controlled to be closed, and the pressure relief valve 30 can be controlled to be opened for a preset time, thereby performing a pressure relief operation on the sample gas tank.

[0047] In this embodiment, the process of testing the vacuum pump 110 under test can be specifically to use the vacuum pump 110 under test to evacuate the sample gas tank 10, and then release the pressure of the sample gas tank 10 to a non-vacuum state (restore to atmospheric pressure), and repeat this cycle N times (N≥1, and N is an integer). Based on this, the control module 40 generates the pumping speed test result corresponding to the vacuum pump 110 under test based on the air pressure parameter, which actually uses the air pressure change rate of the sample gas tank 10 during the vacuum operation of the sample gas tank 10 to characterize the pumping speed of the vacuum pump 110 under test.

[0048] As an example, the pumping speed test result can be specifically formed into a curve that changes with time according to the air pressure parameter. For example, a pressure value change curve that changes with time is generated. For another example, a vacuum degree change curve that changes with time is generated.

[0049] As another example, the pumping speed test result can also be specifically at least one of the total time, average time and vacuum cubic value per unit time taken to vacuum the sample gas tank 10 N times (N≥1, and N is an integer) using the vacuum pump 110 under test, calculated based on the air pressure parameters.

[0050] It is easy to understand that, in specific use, the above-mentioned method of generating pumping speed test results can be selected according to the actual use environment or configuration environment of the vacuum pump 110 under test, and the pumping speed test results corresponding to the vacuum pump 110 under test can be generated based on the air pressure parameters. No restrictions or elaborations are made here.

[0051] In some embodiments, the pumping speed test of the vacuum pump 110 under test may also be a process of using the vacuum pump 110 under test to evacuate the sample gas tank 10 at least once. It can also be understood that the vacuum pump 110 under test is used to convert the sample gas tank 10 from a non-vacuum state (such as an atmospheric pressure state) to a vacuum state at least once.

[0052] It is easy to understand that in all embodiments of the application, the control module 40 can also evacuate the sample gas tank 10 by controlling the opening of the air extraction valve 20, that is, the internal air pressure of the sample gas tank 10 is changed from equal to one atmospheric pressure to less than one atmospheric pressure, or the sample gas tank 10 is converted to a vacuum state. The control module 40 can depressurize the sample gas tank 10 by controlling the opening of the pressure relief valve 30, that is, the internal air pressure of the sample gas tank 10 is changed from less than one atmospheric pressure to equal to one atmospheric pressure, or the sample gas tank 10 is converted to a non-vacuum state. Here, when the control module 40 controls the opening of the air extraction valve 20, the internal air pressure of the sample gas tank 10 can be in a negative pressure state or a completely vacuum state by controlling the opening time of the air extraction valve 20, that is, the vacuum degree of the sample gas tank 10 is controlled. Similarly, when the control module 40 controls the opening of the pressure relief valve 30, the internal air pressure of the sample gas tank 10 can be restored to one atmospheric pressure by controlling the opening time of the pressure relief valve 30.

[0053] The above scheme provides a vacuum pump testing device 100, including a sample gas tank 10, an air extraction valve 20, a pressure relief valve 30 and a control module 40. The control module 40 can realize the pumping speed test of the vacuum pump 110 under test by controlling the air extraction valve 20 and the pressure relief valve 30 to be opened alternately. The control module 40 obtains the air pressure parameters during the pumping speed test and generates the pumping speed test result corresponding to the vacuum pump under test based on the air pressure parameters. There is no need for the tester to manually control the air extraction valve 20 and / or the pressure relief valve 30, nor is there any need for the tester to manually record or calculate the data during the test, thereby realizing the automatic test of the vacuum pump and improving the efficiency of the vacuum pump test.

[0054] In addition, since the vacuum pump testing device 100 provided by the above scheme does not require the tester to manually control the exhaust valve 20 and / or the pressure relief valve 30, and does not require the tester to manually record or calculate the data during the test process, the vacuum pump testing device can be applicable to more testing scenarios, that is, it provides a new scheme that can adapt to more vacuum pump testing scenarios.

[0055] Figure 2 A schematic diagram showing the specific structure of a vacuum pump testing device provided in an embodiment of the present application is shown.

[0056] 1. As an example, in Figure 2 In the embodiment, the air extraction port 11 includes a first air extraction port 1101. The air extraction valve 20

[0057] It includes a first air extraction valve 21 corresponding to the first air extraction port 1101. Accordingly, the control module 40 is specifically used to control the first air extraction valve 21 to open to vacuum the sample gas tank 10, and control the first air extraction valve 21 to close when the air pressure parameter is not greater than the first air pressure threshold.

[0058] In this embodiment, the first air extraction port 1101 can be connected to the air inlet 111 of the vacuum pump 110 under test through the first air extraction valve 21. When the control module 40 controls the first air extraction valve 21 to open, the vacuum pump 110 under test can perform a vacuum operation on the sample gas tank 10 through the air extraction channel composed of the air inlet 111, the first air extraction valve 21 and the first air extraction port 1101. During the vacuum operation, the control module 40 can obtain the air pressure parameter of the sample gas tank 10 in real time, and control the first air extraction valve 21 to close when the air pressure parameter is not greater than the first air pressure threshold.

[0059] It is easy to understand that the first air pressure threshold refers to the internal air pressure threshold of the sample gas tank 10 in a vacuum state, and the first air pressure threshold is specifically a negative pressure value. Here, when the air pressure parameter is not greater than the first air pressure threshold, it means that the sample gas tank 10 is in a vacuum state, and the first air extraction valve 21 can be closed at this time.

[0060] In some embodiments, in order to maintain the vacuum state of the sample gas tank 10, when the air pressure parameter is not greater than the first air pressure threshold, the first air extraction valve 21 can also be kept open. Accordingly, the control module 40 can obtain the first energy consumption parameter when the sample gas tank 10 maintains the vacuum state. The control module 40 can also generate a first energy consumption curve related to the corresponding time according to the first energy consumption parameter. Here, the first energy consumption curve can characterize the power consumption of the vacuum pump 110 under test to maintain the vacuum state of the sample gas tank 10.

[0061] In some embodiments, in order to improve the efficiency of the pumping speed test, while the control module 40 controls the first air pumping valve 21 to close, the control module 40 also controls the pressure relief valve 30 to open for a preset time to perform a pressure relief operation on the sample gas tank 10. In this way, the vacuumed sample gas tank 10 can be restored or converted to a non-vacuum state, so that the sample gas tank 10 can be directly vacuumed again using the vacuum pump 110 under test next time.

[0062] As an embodiment, the preset pumping speed test strategy is at least used to describe the threshold value of the number of times the first air extraction valve 21 and the pressure relief valve 30 are alternately opened. Accordingly, the control module 40 is also used to stop the pumping speed test of the vacuum pump 110 under test when the value of the number of times the first air extraction valve 21 and the pressure relief valve 30 are alternately opened is not less than the threshold value.

[0063] In this embodiment, the number of times the first air extraction valve 21 and the pressure relief valve 30 are alternately opened can be understood as the number of cycles of vacuuming and pressure relief operations on the sample gas tank 10 using the vacuum pump 110 under test. Therefore, the threshold of the number of times the first air extraction valve 21 and the pressure relief valve 30 are alternately opened can be understood as the cycle threshold of the pumping speed test of the vacuum pump 110 under test.

[0064] It is understandable that in the actual use scenario of the vacuum pump, there is a situation where the vacuum pump 110 under test is controlled to be turned on for multiple consecutive times. Therefore, in order to be able to test whether the vacuum pump 110 under test meets the relevant scenarios, the number threshold in the preset pumping speed test strategy can be configured according to actual use requirements, which will not be repeated here.

[0065] Figure 3 The specific structure of a vacuum pump testing device provided in an embodiment of the present application is shown in FIG. Figure 2 .and Figure 2 The difference is that, as an example, in Figure 3 In the embodiment, the air extraction port 11 further includes a second air extraction port 1102. The air extraction valve 20 further includes a second air extraction valve 22 corresponding to the second air extraction port 1102, and the diameter of the second air extraction valve 22 is smaller than the diameter of the first air extraction valve 21.

[0066] In this embodiment, the control module 40 is further used to control the second air extraction valve 22 to open to perform a pre-air extraction operation on the sample gas tank 10 before controlling the first air extraction valve 21 to open to perform a vacuum operation on the sample gas tank 10, and to control the second air extraction valve 22 to close when the air pressure parameter is not greater than the second air pressure threshold. The second air pressure threshold is greater than the first air pressure threshold.

[0067] It is easy to understand that the tube diameter of the second exhaust valve 22 is smaller than the tube diameter of the first exhaust valve 21, that is, the exhaust speed of the vacuum pump 110 under test when performing a pre-exhaust operation on the sample gas tank 10 through the second exhaust valve 22 must be smaller than the exhaust speed of the vacuum pump 110 under test when performing a vacuum operation on the sample gas tank 10 through the first exhaust valve 21.

[0068] It should be noted that in some usage scenarios, when the internal air pressure of the sample gas tank 10 is relatively high, if the first air extraction valve 21 is directly opened and the sample gas tank 10 is vacuumed using the vacuum pump 110 under test, it is easy to cause the frequency converter in the vacuum pump 110 under test to generate an overload alarm or an overcurrent alarm. In this embodiment, in order to avoid directly performing a vacuum extraction operation on the sample gas tank 10, which causes the frequency converter in the vacuum pump 110 under test to generate an overload alarm or an overcurrent alarm, a second air extraction port 1102 is provided on the sample gas tank 10, and a second air extraction valve 22 with a smaller diameter than the first air extraction valve 21 is used. The sample gas tank 10 can be pre-extracted by first opening the second air extraction valve 22 until the air pressure parameter is no greater than the second air pressure threshold, and then the control module 40 can control the second air extraction valve 22 to close. Here, the second air pressure threshold is used to indicate or characterize the maximum air pressure at which the sample gas tank 10 is suitable for vacuuming operation using the vacuum pump 110 under test, that is, when the air pressure parameter is not greater than the second air pressure threshold, when the sample gas tank 10 is vacuumed using the vacuum pump 110 under test, the frequency converter in the vacuum pump 110 under test will not generate an overload alarm or an overcurrent alarm.

[0069] It is easy to understand that, in a specific implementation, the second air extraction valve 22 can be connected to the same air inlet 111 of the vacuum pump 110 under test as the first air extraction valve 21. Of course, the second air extraction valve 22 and the first air extraction valve 21 can also be connected to two different air inlets of the vacuum pump 110 under test (not shown in the figure). Here, when the second air extraction valve 22 and the first air extraction valve 21 are connected to the same air inlet 111 of the vacuum pump 110 under test, the control module 40 is only allowed to control one air extraction valve to open at a time, that is, when the control module 40 controls the second air extraction valve 22 to open, it will not control the first air extraction valve 21 to open at the same time, or when the control module 40 controls the first air extraction valve 21 to open, it will not control the second air extraction valve 22 to open at the same time.

[0070] In some embodiments, in order to test the load capacity of the vacuum pump 110 under test, the second air extraction valve 22 may be connected to the air extraction port of other sample gas tanks, and then the vacuum pump 110 under test may be operated at the maximum power state by simultaneously controlling the opening of the first air extraction valve 21 and the second air extraction valve 22. At this time, the control module 40 may determine the maximum pumping speed test result of the vacuum pump 110 under test under the maximum power state by obtaining the energy consumption parameters of the vacuum pump 110 under test under the maximum power state.

[0071] Figure 4 FIG. 2 shows a schematic diagram of the structure of a vacuum pump testing device provided by another embodiment of the present application. Figure 4 As shown, as an example, with Figure 3The difference between the illustrated embodiment and the embodiment is that the sample gas tank 10 further includes a special gas filling port 13. The vacuum pump testing device 100 further includes a special gas filling valve 50 disposed corresponding to the special gas filling port 13.

[0072] In this embodiment, the control module 40 is also connected to the special gas filling valve 50. That is, the control module 40 can control the opening of the special gas filling valve 50, and then input gas into the sample gas tank 10 through the special gas filling valve 50.

[0073] In a specific implementation, in order to restore the actual use environment of the vacuum pump 110 to be tested as realistically as possible, the special gas filling valve 50 can also be connected to a gas tank storing special gas. When the control module 40 controls the special gas filling valve 50 to open, the special gas can be input into the sample gas tank 10 through the special gas filling port 13.

[0074] It should be noted that when the pumping speed test of the vacuum pump 110 under test is performed, the air extraction valve 20 is controlled to be closed and then the pressure relief valve 30 is controlled to be opened. At this time, the sample gas tank 10 is inflated / depressurized by the atmosphere, that is, when the pumping speed test of the vacuum pump 110 under test is performed, the environment for inflating / depressurizing the sample gas tank 10 is the atmospheric environment. It can also be understood that the condition for inflating / depressurizing the sample gas tank 10 is atmospheric pressure. Different from controlling the pressure relief valve 30 to be opened, when the special gas inflation valve 50 is controlled to be opened to inflate the sample gas tank 10, the air pressure of the special gas inflation valve 50 connected to the special gas tank or the special gas pipeline (not shown in the figure) may not be equal to the atmospheric pressure.

[0075] Based on this, the speed of inflation / depressurization of the sample gas tank 10 can be controlled by setting the diameter of the special gas inflation valve 50 and the gas pressure of the special gas tank or the special gas pipeline.

[0076] As an embodiment, the control module 40 is also used to control the synchronous opening of the exhaust valve 20 and the special gas filling valve 50 to perform synchronous exhaust and filling operations on the sample gas tank 10, obtain the gas flow and / or vacuum degree during the synchronous exhaust and filling operation, generate a first curve graph according to the gas flow and / or vacuum degree, and control the exhaust valve 20 and the special gas filling valve 50 to close after the synchronous exhaust and filling operation is completed.

[0077] Exemplarily, when the exhaust valve 20 and the special gas filling valve 50 are controlled to open synchronously and the sample gas tank 10 is subjected to synchronous exhaust and inflation operations, the control module 40 can specifically control the first exhaust valve 21 and / or the second exhaust valve 22 to open. At the same time, the control module 40 can also control the special gas inflation valve 50 to open, thereby performing an inflation operation on the sample gas tank 10. The control module 40 can generate a corresponding first curve graph by obtaining the gas flow rate and / or vacuum degree during the synchronous exhaust and inflation operation. Here, the first curve graph can be used to characterize the changing trend of the internal gas flow rate and / or vacuum degree of the sample gas tank 10 when the sample gas tank 10 is subjected to synchronous exhaust and inflation operations. The control module 40 can also control the exhaust valve 20 and the special gas inflation valve 50 to close after the synchronous exhaust and inflation operations are completed.

[0078] As another embodiment, the control module 40 is also used to control the alternate opening of the exhaust valve 20 and the special gas filling valve 50 to perform alternate exhaust and filling operations on the sample gas tank 10, obtain the gas flow rate and / or vacuum degree during the alternate exhaust and filling operation, generate a second curve graph according to the gas flow rate and / or vacuum degree, and control the exhaust valve 20 and the special gas filling valve 50 to close after the alternate exhaust and filling is completed.

[0079] Exemplarily, when the air extraction valve 20 and the special gas filling valve 50 are controlled to be opened alternately and the sample gas tank 10 is subjected to alternate air extraction and filling operations, the control module 40 can specifically control the first air extraction valve 21 and / or the second air extraction valve 22 to be opened alternately with the special gas filling valve 50. That is, after the vacuum pump 110 under test is kept to perform a vacuum extraction operation or a pre-air extraction operation on the sample gas tank 10, the control module 40 controls the air extraction valve 20 to be closed, and then controls the special gas filling valve 50 to be opened, and then performs a filling operation on the sample gas tank 10. By controlling the air extraction valve 20 and the special gas filling valve 50 to be opened alternately, the control module 40 can obtain the gas flow rate and / or vacuum degree during the alternate air extraction and filling operation, and can generate a corresponding second curve graph. Here, the second curve graph can be used to characterize the changing trend of the internal gas flow rate and / or vacuum degree of the sample gas tank 10 when the sample gas tank 10 is subjected to alternate air extraction and filling operations at the same time.

[0080] In this example, since the special gas inflation valve 50 can be connected to a gas tank storing special gas, when the air pressure parameter is not greater than the first air pressure threshold, if the vacuum pump 110 under test is kept to evacuate the sample gas tank 10, the vacuum pump 110 under test can also be connected to the recovery gas tank through the recovery gas port to recover the special gas extracted from the sample gas tank 10.

[0081] The above scheme, by setting a special gas filling port 13 on the sample gas tank 10 and matching it with a special gas filling valve 50, can construct a synchronous vacuuming and filling operation scene / environment of the sample gas tank 10, and can also construct an alternating inflation and vacuuming operation scene / environment of the sample gas tank 10, thereby providing more actual use environments for the vacuum pump 110 under test, which helps to enrich the test scenarios of the vacuum pump 110 under test.

[0082] Figure 5 FIG. 2 shows a schematic diagram of a vacuum pump testing device provided in another embodiment of the present application. Figure 5 In the embodiment, the vacuum pump testing device 100 further includes an energy consumption measuring unit 60 . The energy consumption measuring unit 60 is connected to the control module 40 .

[0083] In this embodiment, the energy consumption measurement unit 60 is used to measure the energy consumption parameters of the vacuum pump 110 under test. The control module 40 is also used to generate an energy consumption curve of the vacuum pump 110 under test according to the energy consumption parameters.

[0084] In this embodiment, the energy consumption measurement unit 60 measures the energy consumption parameters of the measured vacuum pump 110 , and the energy consumption parameters specifically include at least one of the operating current value, the operating voltage value, the operating power value and the operating frequency of the measured vacuum pump 110 .

[0085] Accordingly, the control module 40 can generate an energy consumption curve related to the energy consumption parameter and time according to the energy consumption parameter. For example, at least one of an energy consumption curve of the working current value changing with time, an energy consumption curve of the working voltage value changing with time, an energy consumption curve of the working power value changing with time, and an energy consumption curve of the working frequency changing with time is generated.

[0086] In the above scheme, the energy consumption measurement unit 60 is used to measure the energy consumption parameters of the vacuum pump 110 under test, and the energy consumption parameters are sent to the control module 40. The control module 40 can generate an energy consumption curve of the vacuum pump 110 under test according to the energy consumption parameters, so that when the vacuum pump 110 under test is tested, the energy consumption curve of the vacuum pump 110 under test can be obtained synchronously as reference data for whether the vacuum pump 110 under test is qualified. Alternatively, a data analysis basis can be provided for optimizing the test strategy or use environment of the vacuum pump 110 under test.

[0087] Figure 6 FIG. 2 shows a schematic diagram of the specific structure of a vacuum pump testing device provided by another embodiment of the present application. As an embodiment, in Figure 6In the embodiment, the control module 40 includes a programmable control unit 41. The programmable control unit 41 is respectively connected to the air extraction valve 20 and the frequency converter 112 of the vacuum pump 110 under test. The programmable control unit 41 is used to control the air extraction valve 20 and the pressure relief valve 30 to be opened alternately according to the preset pumping speed test strategy, and monitor the alarm information reported by the frequency converter 112.

[0088] In this embodiment, when the vacuum pump 110 under test is opened, it is easy to cause the inverter 112 to generate an overload alarm or an overcurrent alarm because it works at a relatively high power. Here, the inverter 112 is connected to the programmable control unit 41, and the programmable control unit 41 can be used to monitor the alarm information reported by the inverter 112.

[0089] In some embodiments, the programmable control unit 41 can record the test data corresponding to the alarm information when monitoring the alarm information. Here, the test data generally refers to the data in the process of testing the pumping speed of the vacuum pump 110 under test. For example, the test data can be air pressure parameters and / or energy consumption parameters. By matching the alarm information with the test data, it can be determined whether the vacuum pump 110 under test is in an overload or overcurrent state when the alarm information is generated, that is, it can be further tested whether the vacuum pump 110 under test has defects such as overload misjudgment or overcurrent misjudgment.

[0090] For example, in combination with the embodiments of the present application, the programmable control unit 41 may be respectively connected to the first air extraction valve 21, the second air extraction valve 22, the pressure relief valve 30, and the special gas charging valve 50. In a specific implementation, the code script of the preset pumping speed test strategy may be configured into the programmable control unit 41, that is, the programmable control unit 41 controls the first air extraction valve 21 and the pressure relief valve 30 to be opened alternately according to the preset pumping speed test strategy.

[0091] It is understandable that in the actual use scenario of the vacuum pump, there is a situation where the vacuum pump 110 under test is controlled to be turned on multiple times continuously. Accordingly, the continuous control of the vacuum pump 110 under test to be turned on multiple times can easily trigger the frequency converter 112 to generate an overload alarm or an overcurrent alarm.

[0092] Based on this, the above scheme uses the programmable control unit 41 to monitor the alarm information reported by the frequency converter 112, and can determine whether the frequency converter 112 misjudges and causes the vacuum pump 110 under test to stop operating when the vacuum pump 110 under test is controlled to be turned on for multiple consecutive times, thereby providing data reference for verifying the reliability of the vacuum pump 110 under test.

[0093] It is easy to understand that, in a specific implementation, an existing air pressure detection device can be used to collect the air pressure parameters of the sample gas tank 10 .

[0094] As an embodiment, the control module 40 further includes an air pressure detection unit (not shown in the figure). The air pressure detection unit is connected to the programmable control unit 41. The air pressure detection unit is used to detect the air pressure of the sample gas tank and output a corresponding analog signal. The programmable control unit 41 is also used to perform analog-to-digital conversion on the analog signal to obtain the air pressure parameter.

[0095] In this embodiment, the air pressure detection unit may be exposed on the sample gas tank 10 , and may feed back the internal environment air pressure parameter of the sample gas tank 10 to the programmable control unit 41 .

[0096] Taking the air pressure detection unit as a vacuum gauge as an example, the vacuum gauge can feed back the vacuum degree of the internal environment of the sample gas tank 10 in the form of an analog signal to the programmable control unit 41. The programmable control unit 41 performs analog-to-digital conversion on the analog signal to obtain the air pressure parameter.

[0097] For example, the programmable control unit 41 obtains the air pressure parameter by averaging the values ​​of multiple groups of analog signals within a unit time period.

[0098] For another example, the programmable control unit 41 obtains the air pressure parameter by sorting the multiple groups of analog signals within a unit time period, and then excluding a maximum value and a minimum value and calculating the average.

[0099] Combination Figure 5 and Figure 6 The programmable control unit 41 can also be connected to the energy consumption measuring unit 60 to receive the energy consumption parameters provided by the energy consumption measuring unit 60.

[0100] It is easy to understand that, in a specific implementation, the programmable control unit 41 can be a programmable logic controller PLC, which can summarize and display various parameters generated in the environment in an industrial environment. That is, in specific use, the programmable control unit 41 can display all parameters and alarm information generated during the test of the vacuum pump 110 under test. For example, the data curves corresponding to the air pressure parameters and / or energy consumption parameters are drawn and displayed. For another example, the alarm information reported by the frequency converter 112 is summarized and corresponds to the opening time of the air extraction valve 20 during the test.

[0101] In the above scheme, the air pressure detection unit is used to collect the air pressure parameters of the environment inside the sample gas tank 10, and the corresponding analog signal is sent to the programmable control unit 41 for analog-to-digital conversion, thereby obtaining more accurate air pressure parameters. At the same time, since the programmable control unit 41 can also be connected to the energy consumption measurement unit 60, not only can all parameters in the test process be imaged and visualized, but also the alarm information reported by the frequency converter 112 can be made to correspond to the specific control time of the air extraction valve 20, which can further improve the reference value of the test data while ensuring the accuracy of the test data.

[0102] Figure 7 The following is a flowchart of a vacuum pump testing method provided in an embodiment of the present application. It should be noted that the vacuum pump testing method provided in this embodiment is applied to Figure 1 The vacuum pump testing device provided in the embodiment. Figure 1 The execution subject of the vacuum pump testing method may be the control module 40 in the vacuum pump testing device 100. Figure 7 As shown, the vacuum pump test method specifically includes:

[0103] S701: According to a preset pumping speed test strategy, the air extraction valve and the pressure relief valve are controlled to be opened alternately to perform a pumping speed test on the vacuum pump under test.

[0104] S702: Obtain the gas pressure parameters of the sample gas tank during the pumping speed test.

[0105] S703: Generate a pumping speed test result corresponding to the vacuum pump under test based on the air pressure parameter.

[0106] It is understandable that due to Figure 1 In the embodiment shown, the specific implementation of the control module 40 in the vacuum pump testing device 100 has been illustrated, so it will not be described again here. Figure 7 The specific implementation method and working principle of the method flow shown are described in detail.

[0107] As an embodiment, step S701 specifically includes:

[0108] During the execution of the pumping speed test, when the air pressure parameters of the sample gas tank meet the preset vacuum conditions, the air pumping valve is controlled to close, and the pressure relief valve is controlled to open for a preset time to perform pressure relief operation on the sample gas tank.

[0109] As an embodiment, the air extraction port includes a first air extraction port. The air extraction valve includes a first air extraction valve arranged corresponding to the first air extraction port. The above step: when the air pressure parameter of the sample gas tank meets the preset vacuum condition, the air extraction valve is controlled to close, specifically including:

[0110] The first air extraction valve is controlled to open to perform a vacuum operation on the sample gas tank. When the air pressure parameter is not greater than the first air pressure threshold, the first air extraction valve is controlled to close, and the pressure relief valve is controlled to open for a preset time to perform a pressure relief operation on the sample gas tank.

[0111] As an embodiment, the air extraction port further includes a second air extraction port. The air extraction valve further includes a second air extraction valve arranged corresponding to the second air extraction port, and the diameter of the second air extraction valve is smaller than the diameter of the first air extraction valve. Before controlling the first air extraction valve to open and perform a vacuum operation on the sample gas tank, the method further includes:

[0112] The second air extraction valve is controlled to open to perform pre-air extraction operation on the sample gas tank, and when the air pressure parameter is not greater than the second air pressure threshold, the second air extraction valve is controlled to close; wherein the second air pressure threshold is greater than the first air pressure threshold.

[0113] As an embodiment, the preset pumping speed test strategy is at least used to describe the threshold value of the number of times the first air extraction valve and the pressure relief valve are alternately opened. The method also includes:

[0114] When the number of times the first exhaust valve and the pressure relief valve are alternately opened is controlled to be no less than the number threshold, the exhaust speed test of the vacuum pump under test is stopped.

[0115] As an embodiment, the sample gas tank also includes a special gas filling port. The vacuum pump testing device also includes a special gas filling valve arranged corresponding to the special gas filling port. The control module is also connected to the special gas filling valve. The vacuum pump testing method also includes: controlling the exhaust valve and the special gas filling valve to open synchronously to perform synchronous exhaust and filling operations on the sample gas tank, obtaining the gas flow rate and / or vacuum degree during the synchronous exhaust and filling operation, generating a first curve graph according to the gas flow rate and / or vacuum degree, and controlling the exhaust valve and the special gas filling valve to close after the synchronous exhaust and filling operation is completed.

[0116] As an embodiment, the sample gas tank further includes a special gas filling port. The vacuum pump testing device further includes a special gas filling valve corresponding to the special gas filling port. The control module is also connected to the special gas filling valve. Accordingly, the vacuum pump testing method further includes:

[0117] Control the vacuum valve and the special gas inflation valve to open alternately to perform alternate vacuum and inflation operations on the sample gas tank, obtain the gas flow and / or vacuum degree during the alternate vacuum and inflation operations, generate a second curve graph based on the gas flow and / or vacuum degree, and control the vacuum valve and the special gas inflation valve to close after the alternate vacuum and inflation operations are completed.

[0118] As an embodiment, the control module includes a programmable control unit. The programmable control unit is connected to the exhaust valve and the frequency converter of the vacuum pump under test respectively. The method also includes:

[0119] According to the preset pumping speed test strategy, the exhaust valve and the pressure relief valve are controlled to open alternately, and the alarm information reported by the inverter is monitored.

[0120] As an embodiment, the method further includes: when the alarm information is monitored, recording the test data corresponding to the alarm information.

[0121] As an embodiment, the control module further includes an air pressure detection unit. The air pressure detection unit is connected to the programmable control unit, and the air pressure detection unit is used to detect the air pressure of the sample gas tank and output a corresponding analog signal. Accordingly, step S702 specifically includes: performing analog-to-digital conversion on the analog signal to obtain an air pressure parameter.

[0122] As an embodiment, the vacuum pump testing device further includes an energy consumption measuring unit connected to the control module. Accordingly, step S702 specifically includes: measuring the energy consumption parameters of the vacuum pump under test by the energy consumption measuring unit. Accordingly, step S703 specifically includes: generating an energy consumption curve of the vacuum pump under test according to the energy consumption parameters.

[0123] It can be understood that the vacuum pump testing method provided in this embodiment, the improvements and specific implementation methods related to the present application have been Figures 1 to 6 The corresponding vacuum pump testing device 100 is described in detail in the embodiment, so please refer to Figures 1 to 6 ,as well as Figures 1 to 6 The relevant descriptions in the corresponding embodiments are not repeated here.

[0124] Those skilled in the art can clearly understand that for the convenience and simplicity of description, only the division of the above-mentioned functional units and modules is used as an example. In actual applications, the above-mentioned functions can be assigned to different functional units and modules as needed, that is, the internal structure of the device can be divided into different functional units or modules to complete all or part of the functions described above. The functional units and modules in the embodiments can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit. The above-mentioned integrated unit can be implemented in the form of hardware or in the form of software functional units.

[0125] The embodiments described above are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, a person skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features may be replaced by equivalents. Such modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application, and should all be included in the protection scope of the present application.

Claims

1. A vacuum pump testing device, used for testing a vacuum pump under test, characterized in that: The vacuum pump testing device comprises: A sample gas tank, comprising a gas extraction port and a pressure relief port, wherein the gas extraction port is used to connect to the gas inlet of the vacuum pump under test; An air extraction valve is arranged corresponding to the air extraction port; A pressure relief valve, arranged corresponding to the pressure relief port; A control module is connected to the air extraction valve and the pressure relief valve respectively, and is used to control the air extraction valve and the pressure relief valve to be opened alternately according to a preset pumping speed test strategy to perform a pumping speed test on the vacuum pump under test, obtain the air pressure parameters of the sample gas tank during the execution of the pumping speed test, and generate a pumping speed test result corresponding to the vacuum pump under test based on the air pressure parameters.

2. The vacuum pump testing device according to claim 1, characterized in that: The control module is also used to control the vacuum valve to close and control the pressure relief valve to open for a preset time period to perform pressure relief operation on the sample gas tank when the air pressure parameters of the sample gas tank meet the preset vacuum conditions during the execution of the pumping speed test.

3. The vacuum pump testing device according to claim 1, characterized in that: The air suction port includes a first air suction port and a second air suction port; The air extraction valve comprises a first air extraction valve arranged corresponding to the first air extraction port; The air extraction valve further comprises a second air extraction valve arranged corresponding to the second air extraction port, wherein the diameter of the second air extraction valve is smaller than the diameter of the first air extraction valve; The control module is specifically used to control the first air extraction valve to open to perform a vacuum operation on the sample gas tank, and when the air pressure parameter is not greater than a first air pressure threshold, control the first air extraction valve to close; The control module is also used to control the second air pumping valve to open to perform a pre-pumping operation on the sample gas tank before controlling the first air pumping valve to open to perform a vacuum operation on the sample gas tank, and to control the second air pumping valve to close when the air pressure parameter is not greater than a second air pressure threshold; wherein the second air pressure threshold is greater than the first air pressure threshold.

4. The vacuum pump testing device according to claim 3, characterized in that: The preset pumping speed test strategy is at least used to describe the threshold value of the number of times the first air extraction valve and the pressure relief valve are alternately opened; The control module is also used to stop the pumping speed test of the vacuum pump under test when the number of times the first exhaust valve and the pressure relief valve are alternately opened is not less than the number threshold.

5. The vacuum pump testing device according to claim 1, characterized in that: The sample gas tank further includes a special gas filling port, the vacuum pump testing device further includes a special gas filling valve corresponding to the special gas filling port, and the control module is further connected to the special gas filling valve; The control module is further used to control the synchronous opening of the air extraction valve and the special gas filling valve to perform synchronous air extraction and filling operations on the sample gas tank, obtain the gas flow rate and / or vacuum degree during the synchronous air extraction and filling operation, generate a first curve graph according to the gas flow rate and / or the vacuum degree, and control the air extraction valve and the special gas filling valve to close after the synchronous air extraction and filling operation is completed; or The control module is also used to control the alternate opening of the air extraction valve and the special gas inflation valve to perform alternate air extraction and inflation operations on the sample gas tank, obtain the gas flow rate and / or vacuum degree during the alternate air extraction and inflation operations, generate a second curve graph according to the gas flow rate and / or the vacuum degree, and control the air extraction valve and the special gas inflation valve to close after the alternate air extraction and inflation is completed.

6. The vacuum pump testing device according to claim 1, characterized in that: The control module includes a programmable control unit; The programmable control unit is respectively connected to the exhaust valve and the frequency converter of the vacuum pump under test, and is used to control the exhaust valve and the pressure relief valve to open alternately according to a preset pumping speed test strategy, and monitor the alarm information reported by the frequency converter.

7. The vacuum pump testing device according to claim 6, characterized in that: The programmable control unit is also used to record the test data corresponding to the alarm information when the alarm information is monitored.

8. The vacuum pump testing device according to claim 6, characterized in that: The control module also includes an air pressure detection unit; The air pressure detection unit is connected to the programmable control unit, and the air pressure detection unit is used to detect the air pressure of the sample gas tank and output a corresponding analog signal; The programmable control unit is also used to perform analog-to-digital conversion on the analog signal to obtain the air pressure parameter.

9. The vacuum pump testing device according to any one of claims 1 to 8, characterized in that: The vacuum pump testing device further comprises an energy consumption measuring unit connected to the control module, wherein the energy consumption measuring unit is used to measure energy consumption parameters of the vacuum pump under test; The control module is also used to generate an energy consumption curve of the vacuum pump under test according to the energy consumption parameters.

10. A vacuum pump testing method, characterized in that: Applicable to the vacuum pump testing device according to any one of claims 1 to 9, the vacuum pump testing method comprising: Controlling the air extraction valve and the pressure relief valve to be opened alternately according to a preset pumping speed test strategy to perform a pumping speed test on the vacuum pump under test; Obtaining air pressure parameters during the pumping speed test; Based on the air pressure parameter, a pumping speed test result corresponding to the vacuum pump under test is generated.

Images