A diversion pipe and a gallium nitride production waste gas exhaust device

Abstract

The present invention relates to the technical field of pipe shunt, and specifically to a shunt pipe and a gallium nitride production waste gas exhaust device. In the shunt pipe, a control core is matched with a main pipe body. A shunt port is also provided on the side wall of the main pipe body. A matching ring is sleeved on the main pipe body, and the matching ring closes the shunt port. The shunt pipe is connected to the matching ring. The matching ring is provided with a connecting hole for connecting the shunt port and the shunt pipe. When the mobile phase is not introduced into the main pipe body, the control core abuts against the stop block, and the control core closes all the shunt ports, and the end of the shunt pipe naturally droops and is disconnected from the matching channel. When the mobile phase is introduced into the main pipe body, the mobile phase pushes the control core to open the shunt port. At this time, the driving rod drives the sliding bar to move, and the sliding bar lifts the shunt pipe corresponding to the opened shunt port, so that the corresponding shunt pipe is connected to the matching channel. It can automatically match the appropriate number of shunt branches according to the real-time flow rate of the fluid, and improves the adaptability to the fluid whose flow rate may change at any time.

Description

Technical Field

[0001] The present invention relates to the technical field of pipe splitting, and in particular to a splitting pipe and a gallium nitride production waste gas exhaust device. Background Art

[0002] In industrial production activities, for fluids whose flow rates may change at any time, corresponding adjustments need to be made according to real-time flow changes during processing or use, which makes operation and control difficult and related operations are also cumbersome to perform.

[0003] In view of this, this application is hereby filed. Summary of the invention

[0004] The first purpose of the present invention is to provide a diversion pipe fitting, which can automatically match the appropriate number of diversion branches according to the real-time flow rate of the fluid. For each diversion branch, there is no need to frequently adjust its relevant parameters, which greatly improves the adaptability to fluids whose flow rate may change at any time and reduces the control difficulty.

[0005] The second object of the present invention is to provide a gallium nitride production waste gas exhaust device, which can automatically match the appropriate number of diversion branches according to the real-time flow of the waste gas, ensure that the residual hydrogen in the waste gas can be processed in time, improve the safety of emptying, and avoid waste gas backlog during the production process.

[0006] The embodiment of the present invention is achieved as follows:

[0007] A flow-dividing pipe fitting comprises: a main pipe body, a control core, a driving rod, a slide rail, a slide bar, a matching ring, a flow-dividing pipe and a matching seat.

[0008] The control core can be slidably matched in the main pipe body, and a sliding seal is formed between the control core and the main pipe body.

[0009] One end of the main body is used to communicate with the external pipeline, and the other end is closed by a sealing block. The inner side wall of the main body is fixedly connected with a stop block, the control core is located on the side of the stop block close to the sealing block, and an elastic member is abutted between the control core and the sealing block.

[0010] The driving rod is connected to the control core, and the driving rod penetrates the sealing block and extends to the outside of the main pipe body.

[0011] The slide rail is arranged parallel to the main pipe body, the slide bar is slidably matched with the slide rail, and the slide bar is fixedly connected with the driving rod.

[0012] The side wall of the main body is also provided with a diversion opening, which extends in an arc shape along the circumference of the main body and is located on a side of the stop block close to the sealing block. Along the axial direction of the main body, a plurality of diversion openings are arranged at intervals.

[0013] The matching ring is rotatably sleeved on the main body, and each diversion port is correspondingly provided with a matching ring, which closes the diversion port. The diversion pipe is fixedly connected to the matching ring. The matching ring is provided with a connecting hole for connecting the diversion port and the diversion pipe.

[0014] The matching seat is located at one end of the shunt tube away from the matching ring. The matching seat has a fitting wall for fitting with the end of the shunt tube. The fitting wall is provided with a matching channel for communicating with the shunt tube.

[0015] When the mobile phase is not introduced into the main body, the control core contacts the stop block, the control core closes all the shunt ports, and the end of the shunt tube naturally droops and is disconnected from the matching channel. When the mobile phase is introduced into the main body, the mobile phase pushes the control core to open the shunt port. At this time, the driving rod drives the sliding bar to move, and the sliding bar lifts the shunt tube corresponding to the opened shunt port, so that the corresponding shunt tube is connected to the matching channel.

[0016] Furthermore, the end of the sliding member is wedge-shaped.

[0017] A gallium nitride production waste gas exhaust device comprises: a flamethrower, a control mechanism and the above-mentioned diversion pipe.

[0018] The main body of the shunt pipe is used to communicate with the waste gas pipeline produced by gallium nitride, and the end of the matching channel of the shunt pipe away from the shunt pipe is used to communicate with the exhaust pipeline.

[0019] The flame spray gun is arranged at one end of the shunt pipe away from the matching ring, and the flame spray pipe of the flame spray gun penetrates the pipe wall of the shunt pipe and extends into the pipe cavity of the shunt pipe.

[0020] The control mechanism is used to control the switch of the flamethrower. When the shunt pipe is connected to the matching channel, the control mechanism controls the corresponding flamethrower to turn on. When the shunt pipe is disconnected from the matching channel, the control mechanism controls the corresponding flamethrower to turn off.

[0021] Furthermore, the fitting wall is arc-shaped, and the cylindrical surface corresponding to the fitting wall and the matching ring are coaxially arranged.

[0022] The main body is arranged transversely. The matching channel is located at the upper half of the fitting wall. When the shunt pipe is connected with the matching channel, the end of the shunt pipe away from the matching ring is higher than the end close to the matching ring.

[0023] Furthermore, an end of the matching channel close to the shunt tube is lower than an end thereof away from the shunt tube.

[0024] Furthermore, the end of the flow divider away from the matching ring also has a counterweight, which is in contact with the fitting wall and is in an arc shape that matches the fitting wall. The flow divider passes through the counterweight and is fixedly connected to the counterweight.

[0025] The counterweight is made of a heat-conducting material, and the flamethrower tube of the flamethrower is built into the counterweight.

[0026] When the shunt pipe is disconnected from the matching channel, the counterweight component closes the matching channel.

[0027] Furthermore, a water collecting hole is provided in the lower half of the fitting wall, and one end of the water collecting hole close to the diversion pipe is higher than the other end away from the diversion pipe, and the end of the water collecting hole away from the diversion pipe is used to communicate with the water collecting tank.

[0028] When the shunt pipe is connected to the matching channel, the counterweight seals the water collection hole. When the shunt pipe droops naturally, the shunt pipe is connected to the water collection hole, and at this time, the end of the shunt pipe close to the water collection hole is lower than the end close to the matching ring.

[0029] Furthermore, the fitting wall is provided with a water guide groove, which extends along the length direction of the fitting wall, and extends from one side edge of the matching channel close to the water collection hole to one side edge of the water collection hole close to the matching channel.

[0030] Furthermore, the control mechanism includes: a reference arm, a matching block and a control circuit.

[0031] The reference arm is arranged parallel to the main body and is located on the shunt tube. A matching groove for matching with the matching block is provided on one side of the reference arm close to the shunt tube. A first conductive contact is provided on one side of the matching groove, and a second conductive contact is provided on the other side of the matching groove. The first conductive contact is electrically connected to one pole of the control circuit, and the second conductive contact is electrically connected to the other pole of the control circuit.

[0032] The matching block is fixedly connected to the shunt pipe, and a conductive core is arranged inside the matching block, and the conductive core runs through the matching block.

[0033] When the shunt tube is connected to the matching channel, the matching block is matched to the matching groove, the conductive core electrically connects the first conductive contact and the second conductive contact, and the control circuit controls the corresponding flamethrower to turn on. When the shunt tube is disconnected from the matching channel, the matching block withdraws from the matching groove, the first conductive contact and the second conductive contact are disconnected, and the control circuit controls the corresponding flamethrower to turn off.

[0034] The beneficial effects of the technical solution of the embodiment of the present invention include:

[0035] The flow-dividing pipe fitting provided in the embodiment of the present invention realizes adaptive regulation of fluid flow, and can allocate a suitable number of flow-dividing pipes to assist in flow diversion according to the actual flow, thereby effectively reducing the workload of manual regulation.

[0036] In general, the diversion pipe provided in the embodiment of the present invention can automatically match the appropriate number of diversion branches according to the real-time flow rate of the fluid. For each diversion branch, there is no need to frequently adjust its related parameters, which greatly improves the adaptability to fluids whose flow rate may change at any time and reduces the control difficulty.

[0037] The gallium nitride production waste gas exhaust device provided in the embodiment of the present invention can automatically match the appropriate number of diversion branches according to the real-time flow rate of the waste gas, ensuring that the residual hydrogen in the waste gas can be processed in time, improving the safety of emptying, and avoiding waste gas backlog during the production process. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0039] Figure 1 It is a schematic diagram of the overall structure of the diversion pipe fitting;

[0040] Figure 2 is a schematic diagram of the internal structure of the flow distribution pipe;

[0041] Figure 3 It is a schematic diagram of the internal structure of the main body;

[0042] Figure 4 It is a schematic diagram of the coordination between the main body and the control core;

[0043] Figure 5 It is a structural diagram of the slider;

[0044] Figure 6 It is a schematic diagram when the matching ring of the flow-dividing pipe is at the first rotation stop point;

[0045] Figure 7 It is a schematic diagram when the matching ring of the flow-dividing pipe is at the second rotation dead point;

[0046] Figure 8 Schematic diagram of the overall structure of the exhaust gas exhaust device for gallium nitride production;

[0047] Fig. 9 Schematic diagram of the mating ring of the exhaust gas exhaust device for gallium nitride production when it is at the first rotation dead center;

[0048] Fig.10 Schematic diagram of the mating ring of the exhaust gas exhaust device for gallium nitride production when it is at the second rotation dead center;

[0049] Fig.11 It is a schematic diagram when the matching block is located outside the matching groove;

[0050] Fig.12 It is a schematic diagram of the mating block being mated into the mating groove.

[0051] Description of reference numerals:

[0052] Main body 100; sealing block 110; stopper block 120; elastic member 130; diversion port 140; control core 200; driving rod 210; slide rail 300; slide bar 310; connecting rod 320; matching ring 400; communicating hole 410; diversion pipe 420; matching seat 500; fitting wall 510; matching channel 520;

[0053] Flame-spraying tube 2100 ; counterweight 2200 ; water collecting hole 2300 ; water guide groove 2400 ; reference arm 2500 ; matching groove 2510 ; first conductive contact 2520 ; second conductive contact 2530 ; matching block 2600 ; conductive core 2610 . DETAILED DESCRIPTION

[0054] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0055] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0056] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0057] The terms “first”, “second”, etc. are only used for distinguishing descriptions and should not be understood as indicating or implying relative importance.

[0058] In addition, the terms "parallel", "vertical", etc. do not mean that the components must be absolutely parallel or vertical, but can be slightly tilted. For example, "parallel" only means that its direction is more parallel than "vertical", and does not mean that the structure must be completely parallel, but can be slightly tilted.

[0059] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "setting", "installation" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be a communication between the two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0060] In order to overcome the shortcomings of the prior art, please refer to Figure 1-Figure 6 The present embodiment provides a shunt pipe 420 , which includes: a main body 100 , a control core 200 , a drive rod 210 , a slide rail 300 , a slide bar 310 , a matching ring 400 , a shunt pipe 420 and a matching seat 500 .

[0061] In this embodiment, the main body 100 is horizontally arranged, the main body 100 is in a circular tubular shape, the control core 200 is in a cylindrical shape, the outer diameter of the control core 200 is adapted to the inner diameter of the main body 100, the control core 200 can be slidably fitted inside the main body 100, the control core 200 and the main body 100 are coaxially arranged, and the control core 200 extends along the length direction of the main body 100. Among them, the control core 200 and the main body 100 are slidably sealed.

[0062] One end of the main pipe 100 is used to communicate with an external pipeline, and the other end is closed by a sealing block 110 .

[0063] The inner wall of the main body 100 is fixedly connected with a stop block 120, which is spaced apart from the sealing block 110. The control core 200 is located on the side of the stop block 120 close to the sealing block 110, and an elastic member 130 is abutted between the control core 200 and the sealing block 110. In a natural state, the elastic member 130 pushes the control core 200 so that the control core 200 abuts against the stop block 120.

[0064] The driving rod 210 is connected to the control core 200. Specifically, the driving rod 210 is arranged along the axial direction of the main body 100. The driving rod 210 is fixedly connected to one end of the control core 200 close to the sealing block 110. The sealing block is provided with a through hole for the driving rod 210 to pass through. The driving rod 210 passes through the sealing block 110 and extends outside the main body 100. The aperture of the through hole is larger than the outer diameter of the driving rod 210.

[0065] The slide rail 300 is arranged parallel to the main body 100 , the slide bar 310 is slidably matched with the slide rail 300 , the slide bar 310 extends along the length direction of the slide rail 300 , and the slide bar 310 is fixedly connected to the driving rod 210 via a connecting rod 320 .

[0066] The side wall of the main body 100 is also provided with a diversion opening 140 penetrating the side wall, and the diversion opening 140 extends in an arc shape along the circumference of the main body 100. There are multiple diversion openings 140, and the diversion openings 140 are all located on the side of the stop block 120 close to the sealing block 110. Along the axial direction of the main body 100, the diversion openings 140 are arranged in sequence at intervals.

[0067] The matching ring 400 is rotatably sleeved on the main body 100, the matching ring 400 and the main body 100 are coaxially arranged, the inner ring wall of the matching ring 400 is in contact with the outer wall of the main body 100, and the matching ring 400 and the main body 100 are rotationally sealed. Each diversion port 140 is correspondingly provided with a matching ring 400, and the matching ring 400 blocks the diversion port 140 and closes the diversion port 140.

[0068] The shunt pipe 420 is fixedly connected to the matching ring 400. The shunt pipe 420 is arranged along the radial direction of the matching ring 400 and the main body 100, and each matching ring 400 is connected to a corresponding shunt pipe 420. The matching ring 400 is provided with a connecting hole 410 for connecting the shunt port 140 and the shunt pipe 420. The slide rail 300 and the slide bar 310 are both located under the shunt pipe 420, and the end of the slide is wedge-shaped.

[0069] The matching seat 500 is located at one end of the shunt tube 420 away from the matching ring 400, and the matching seat 500 is in contact with the end of the shunt tube 420 away from the matching ring 400. Specifically, the position where the matching seat 500 and the shunt tube 420 are in contact is the contact wall 510. When the matching ring 400 rotates relative to the main body 100, the end of the shunt tube 420 moves along the contact wall 510, and the end of the shunt tube 420 always keeps in contact with the contact wall 510. The contact wall 510 is arc-shaped, and the cylindrical surface corresponding to the contact wall 510 and the matching ring 400 are coaxially arranged.

[0070] The fitting wall 510 is provided with a matching channel 520 for communicating with the shunt pipe 420. The matching channel 520 starts from the fitting wall 510 and further extends through the matching seat 500. The matching channel 520 is used to communicate with an external pipeline to realize the shunt transportation of the fluid.

[0071] When the matching ring 400 rotates relative to the main body 100 , it has a first rotation stop point and a second rotation stop point.

[0072] When the matching ring 400 is located at the first rotation stop point, Figure 6 As shown, the shunt tube 420 is aligned with and in communication with the mating channel 520 .

[0073] When the matching ring 400 is located at the second rotation stop point, Figure 7 As shown, the shunt tube 420 and the matching channel 520 are offset and no longer connected (ie, disconnected).

[0074] When the matching ring 400 moves from the first rotation stop point to the second rotation stop point, the shunt tube 420 swings downward during this process. When the matching ring 400 reaches the second rotation stop point, the shunt tube 420 just can no longer swing downward, that is, the matching ring 400 can no longer rotate. When the matching ring 400 moves from the second rotation stop point to the first rotation stop point, the shunt tube 420 swings upward during this process. When the matching ring 400 reaches the first rotation stop point, the shunt tube 420 just can no longer swing upward, that is, the matching ring 400 can no longer rotate. The rotation range of the matching ring 400 is limited between the first rotation stop point and the second rotation stop point.

[0075] It should be noted that when the matching ring 400 moves between the first rotation stop point and the second rotation stop point, the diversion port 140 and the communication hole 410 always remain connected.

[0076] In this embodiment, when the control core 200 abuts against the stop block 120 , the sliding bar 310 is located on a side of all the shunt tubes 420 away from the driving rod 210 .

[0077] When the mobile phase (fluid) is not introduced into the main body 100, the control core 200 abuts against the stop block 120 under the elastic force of the elastic member 130. At this time, the control core 200 closes all the diversion ports 140. Figure 2 In this state, the main body 100 is not connected to the shunt pipe 420, and the end of the shunt pipe 420 sags due to its own weight, so that the matching ring 400 rotates to the second rotation stop point, and the end of the shunt pipe 420 is also closed by the fitting wall 510. The shunt pipe 420 and the matching channel 520 are disconnected.

[0078] When the mobile phase (fluid) is introduced into the main body 100, after the fluid enters the main body 100, as the amount of the fluid entering gradually increases, the pressure in the main body 100 gradually increases, and the fluid can overcome the elastic force of the elastic member 130 to smoothly push the control core 200. When the control core 200 is pushed, the diversion ports 140 are exposed one by one, and the main body 100 can be connected with the corresponding diversion pipe 420 through the exposed diversion ports 140.

[0079] At the same time, when the control core 200 is pushed, the driving rod 210 pulls the sliding bar 310 to slide the sliding bar 310 toward the shunt tube 420. When the sliding bar 310 contacts the shunt tube 420, the sliding bar 310 contacts the shunt tube 420 corresponding to the exposed shunt port 140. When the sliding bar 310 contacts the shunt tube 420, the sliding bar 310 pushes the shunt tube 420 upward. The height of the shunt tube 420 pushed upward by the sliding bar 310 is set to enable the matching ring 400 to rotate from the second rotation stop point to the first rotation stop point. Among them, when the control core 200 is pushed so that the diversion ports 140 are exposed, the sliding part also correspondingly lifts up the diversion tubes 420 corresponding to these diversion ports 140, that is, the number of exposed diversion ports 140 and the number of lifted diversion tubes 420 are the same, and the lifted diversion tubes 420 all correspond to (are connected to) the diversion ports 140 in the exposed state.

[0080] The greater the flow rate of the fluid entering the main body 100 , the greater the distance the fluid pushes the control core 200 , and the greater the number of diversion ports 140 that can be opened. Accordingly, more diversion tubes 420 can be used for diversion.

[0081] Through this design, the shunt tube 420 realizes adaptive regulation of the fluid flow rate, and can allocate a suitable number of shunt tubes 420 to help with flow diversion according to the actual flow rate, which can effectively reduce the workload of manual regulation.

[0082] In general, the diversion tubes 420 provided in this embodiment can automatically match the appropriate number of diversion branches according to the real-time flow rate of the fluid. For each diversion branch, there is no need to frequently adjust its related parameters, which greatly improves the adaptability to fluids whose flow rate may change at any time and reduces the control difficulty.

[0083] As an application example of the above-mentioned shunt pipe 420, this embodiment also provides a gallium nitride production waste gas exhaust device, and the actual application of the shunt pipe 420 is not limited to this.

[0084] like Figure 8-Figure 10 As shown, the exhaust device for waste gas from gallium nitride production includes: a flamethrower, a control mechanism and the above-mentioned diverter pipe 420.

[0085] The main body 100 of the shunt pipe 420 is used to communicate with the waste gas pipeline of gallium nitride production, and the matching channel 520 of the shunt pipe 420 is used to communicate with the exhaust pipeline at one end away from the shunt pipe 420.

[0086] The flamethrower is disposed at one end of the shunt tube 420 away from the mating ring 400 , and the flamethrower tube 2100 of the flamethrower penetrates the tube wall of the shunt tube 420 and extends into the tube cavity of the shunt tube 420 , that is, the flamethrower can spray flames into the shunt tube 420 through the flamethrower tube 2100 .

[0087] The control mechanism is used to control the switch of the flamethrower.

[0088] When the shunt pipe 420 is in communication with the matching channel 520 (ie, when the matching ring 400 is at the first rotation dead point), the control mechanism controls the corresponding flamethrower to start.

[0089] When the shunt pipe 420 is disconnected from the matching channel 520 (ie, the matching ring 400 is at the second rotation dead point), the control mechanism controls the corresponding flamethrower to be closed.

[0090] With this design, the exhaust device for gallium nitride production waste gas can be used to burn the residual hydrogen in the waste gas produced by gallium nitride. When the waste gas enters the main body 100, according to the real-time flow rate of the waste gas, a corresponding number of shunt pipes 420 participate in shunting the waste gas, and these shunt pipes 420 are all lifted up by the sliding member, the matching ring 400 is at the first rotation stop point, the corresponding flamethrower is in the open state, and the flamethrower 2100 sprays flames in the shunt pipe 420 to help fully burn the residual hydrogen.

[0091] Among them, according to the hydrogen content in the exhaust gas, it can be determined according to the actual situation whether it is necessary to mix air into the exhaust gas to help the hydrogen burn fully.

[0092] In this embodiment, the matching channel 520 is located at the upper half of the fitting wall 510, and the end of the matching channel 520 close to the shunt tube 420 is lower than the end away from the shunt tube 420.

[0093] When the shunt tube 420 is in communication with the mating channel 520 , an end of the shunt tube 420 away from the mating ring 400 is higher than an end of the shunt tube 420 close to the mating ring 400 .

[0094] Through this design, when removing hydrogen from the exhaust gas, the flames ejected from the flamethrower 2100 will heat the exhaust system, which makes it easier for the water vapor generated by the combustion of the exhaust gas and hydrogen to enter the exhaust pipe smoothly along the matching channel 520, reducing the reflux of water vapor and improving the smoothness of exhaust gas discharge.

[0095] Furthermore, the end of the shunt tube 420 away from the matching ring 400 also has a weight piece 2200, which is in contact with the fitting wall 510 and is in an arc shape that matches the fitting wall 510. The shunt tube 420 passes through the weight piece 2200 and is fixedly connected thereto.

[0096] The counterweight 2200 is made of a heat-conductive material, and the flamethrower tube 2100 of the flamethrower is built into the counterweight 2200 .

[0097] The counterweight 2200 can help the flamethrower 2100 to dissipate heat.

[0098] When the shunt tube 420 is disconnected from the matching channel 520 , the counterweight 2200 closes the matching channel 520 .

[0099] With this design, the counterweight 2200 can help the diverter pipe 420 to naturally droop and return to its original position, while helping to close the matching channel 520 to prevent exhaust gas from flowing back.

[0100] Furthermore, a water collecting hole 2300 is also opened in the lower half of the fitting wall 510, and the end of the water collecting hole 2300 close to the diversion pipe 420 is higher than the end away from the diversion pipe 420, and the end of the water collecting hole 2300 away from the diversion pipe 420 is used to communicate with the water collecting tank.

[0101] When the shunt pipe 420 is connected to the matching channel 520, the counterweight 2200 closes the water collection hole 2300. When the shunt pipe 420 droops naturally, the shunt pipe 420 is connected to the water collection hole 2300, and at this time, the end of the shunt pipe 420 close to the water collection hole 2300 is lower than the end close to the matching ring 400.

[0102] With this design, when the waste gas treatment is completed, or a certain shunt pipe 420 no longer continues to shunt the waste gas, the matching ring 400 returns to the second rotation stop point, and the shunt pipe 420 sags and communicates with the water collection hole 2300. At this time, the counterweight 2200 is still preheated, which can promote the full oxidation of hydrogen in the waste gas remaining in the shunt pipe 420. On the other hand, when the residual water vapor in the shunt pipe 420 condenses, it can flow into the water collection hole 2300 along the shunt pipe 420 and finally be collected by the water collection tank, avoiding water collection in the pipeline or condensed water backflow.

[0103] Furthermore, the fitting wall 510 is provided with a water guide groove 2400 , which extends along the length direction of the fitting wall 510 , and the water guide groove 2400 extends from one side edge of the matching channel 520 close to the water collection hole 2300 to one side edge of the water collection hole 2300 close to the matching channel 520 .

[0104] Through this design, when the mating ring 400 is at the second rotation stop point, the counterweight 2200 can close the mouth of the water guide groove 2400, so that the water in the water guide groove 2400 will not flow out, so that the guide groove can smoothly drain the condensed water in the mating channel 520 to the water collection hole 2300, thereby completing the collection of condensed water.

[0105] Further, please combine Figure 8-Figure 12The control mechanism includes: a reference arm 2500, a matching block 2600 and a control circuit (not shown in the figure).

[0106] The reference arm 2500 is arranged parallel to the main body 100 and is located on the shunt tube 420. A matching groove 2510 for matching with the matching block 2600 is provided on one side of the reference arm 2500 close to the shunt tube 420. A first conductive contact 2520 is provided on one side of the matching groove 2510, and a second conductive contact 2530 is provided on the other side of the groove wall.

[0107] The first conductive contact 2520 is electrically connected to one pole of the control circuit, and the second conductive contact 2530 is electrically connected to the other pole of the control circuit.

[0108] The matching block 2600 is fixedly connected to the shunt tube 420 , and a conductive core 2610 is disposed inside the matching block 2600 . The conductive core 2610 penetrates the matching block 2600 .

[0109] When the shunt tube 420 is connected to the mating channel 520 (i.e., the mating ring 400 is at the first rotation stop point), the mating block 2600 is mated to the mating groove 2510, the conductive core 2610 electrically conducts the first conductive contact 2520 and the second conductive contact 2530, and the control circuit controls the corresponding flamethrower to start.

[0110] When the shunt tube 420 is disconnected from the mating channel 520 (ie, the mating ring 400 is at the second rotation stop point), the mating block 2600 withdraws from the mating groove 2510, the first conductive contact 2520 and the second conductive contact 2530 are disconnected, and the control circuit controls the corresponding flamethrower to be turned off.

[0111] Through this design, the switch control of the flamethrower can be achieved more conveniently.

[0112] To sum up, the diversion tube 420 provided in the embodiment of the present invention can automatically match the appropriate number of diversion branches according to the real-time flow rate of the fluid. For each diversion branch, there is no need to frequently adjust its related parameters, which greatly improves the adaptability to fluids whose flow rate may change at any time and reduces the control difficulty.

[0113] The gallium nitride production waste gas exhaust device provided in the embodiment of the present invention can automatically match the appropriate number of diversion branches according to the real-time flow rate of the waste gas, ensuring that the residual hydrogen in the waste gas can be processed in time, improving the safety of emptying, and avoiding waste gas backlog during the production process.

[0114] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A flow dividing pipe, characterized in that: include: Main body, control core, driving rod, slide rail, slide bar, matching ring, shunt pipe and matching seat; The control core can be slidably fitted in the main body, and a sliding seal is provided between the control core and the main body; One end of the main pipe is used to communicate with the external pipeline, and the other end is closed by a sealing block; the inner side wall of the main pipe is fixedly connected to a stop block, the control core is located on a side of the stop block close to the sealing block, and an elastic member is abutted between the control core and the sealing block; The driving rod is connected to the control core, and the driving rod passes through the sealing block and extends outside the main pipe; The slide rail is arranged parallel to the main body, the slide bar is slidably matched with the slide rail, and the slide bar is fixedly connected to the driving rod; The side wall of the main body is also provided with a diversion opening, the diversion opening extends in an arc shape along the circumference of the main body, and the diversion opening is located on a side of the stop block close to the sealing block; along the axial direction of the main body, a plurality of the diversion openings are arranged at intervals; The matching ring is rotatably sleeved on the main body, each of the diversion ports is correspondingly provided with a matching ring, and the matching ring closes the diversion port; the diversion pipe is fixedly connected to the matching ring; the matching ring is provided with a connecting hole for connecting the diversion port and the diversion pipe; The matching seat is located at one end of the shunt tube away from the matching ring, and the matching seat has a fitting wall for fitting with the end of the shunt tube, and the fitting wall is provided with a matching channel for communicating with the shunt tube; Among them, when the mobile phase is not passed into the main body, the control core abuts against the stop block, the control core closes all the diversion ports, and the end of the diversion tube naturally droops and is disconnected from the matching channel; when the mobile phase is passed into the main body, the mobile phase pushes the control core to open the diversion port. At this time, the driving rod drives the sliding bar to move, and the sliding bar lifts the diversion tube corresponding to the opened diversion port to connect the corresponding diversion tube with the matching channel.

2. The flow dividing pipe according to claim 1, characterized in that: The end of the sliding bar is wedge-shaped.

3. A gallium nitride production waste gas exhaust device, characterized in that: include: A flamethrower, a control mechanism and a flow diverter pipe as claimed in claim 1 or 2; Wherein, the main body of the diverter pipe is used to communicate with the exhaust gas pipeline produced by gallium nitride, and the end of the matching channel of the diverter pipe away from the diverter pipe is used to communicate with the exhaust pipeline; The flame spray gun is arranged at one end of the shunt pipe away from the matching ring, and the flame spray pipe of the flame spray gun penetrates the pipe wall of the shunt pipe and extends into the pipe cavity of the shunt pipe; The control mechanism is used to control the switch of the flamethrower; when the shunt tube is connected to the matching channel, the control mechanism controls the corresponding flamethrower to turn on; when the shunt tube is disconnected from the matching channel, the control mechanism controls the corresponding flamethrower to turn off.

4. The gallium nitride production waste gas exhaust device according to claim 3, characterized in that: The fitting wall is arc-shaped, and the cylindrical surface corresponding to the fitting wall and the matching ring are coaxially arranged; The main body is arranged transversely; the matching channel is located at the upper half of the fitting wall, and when the shunt pipe is connected with the matching channel, the end of the shunt pipe away from the matching ring is higher than the end close to the matching ring.

5. The gallium nitride production waste gas exhaust device according to claim 4, characterized in that: An end of the matching channel close to the shunt tube is lower than an end of the matching channel far from the shunt tube.

6. The gallium nitride production waste gas exhaust device according to claim 5, characterized in that: The shunt pipe further has a counterweight at one end away from the matching ring, the counterweight is in contact with the fitting wall, and the counterweight is in an arc shape that matches the fitting wall; the shunt pipe passes through the counterweight and is fixedly connected to the counterweight; The counterweight is made of a heat-conducting material, and the flamethrower tube of the flamethrower is built into the counterweight; When the shunt pipe is disconnected from the matching channel, the counterweight closes the matching channel.

7. The gallium nitride production waste gas exhaust device according to claim 6, characterized in that: A water collecting hole is also provided in the lower half of the fitting wall, wherein an end of the water collecting hole close to the diverter pipe is higher than an end thereof away from the diverter pipe, and an end of the water collecting hole away from the diverter pipe is used to communicate with a water collecting tank; When the diverter pipe is connected to the matching channel, the counterweight closes the water collecting hole; when the diverter pipe naturally droops, the diverter pipe is connected to the water collecting hole, and at this time, the end of the diverter pipe close to the water collecting hole is lower than the end close to the matching ring.

8. The gallium nitride production waste gas exhaust device according to claim 7, characterized in that: The fitting wall is provided with a water guide groove, which extends along the length direction of the fitting wall and extends from a side edge of the matching channel close to the water collection hole to a side edge of the water collection hole close to the matching channel.

9. The gallium nitride production waste gas exhaust device according to claim 3, characterized in that: The control mechanism comprises: a reference arm, a matching block and a control circuit; The reference arm is arranged parallel to the main body and is located on the shunt tube; a matching groove for matching with the matching block is provided on one side of the reference arm close to the shunt tube; a first conductive contact is provided on one side of the matching groove, and a second conductive contact is provided on the other side of the groove; the first conductive contact is electrically connected to one pole of the control circuit, and the second conductive contact is electrically connected to the other pole of the control circuit; The matching block is fixedly connected to the shunt pipe, and the matching block has a conductive core inside, and the conductive core runs through the matching block; When the shunt tube is connected to the mating channel, the mating block is mated to the mating slot, the conductive core electrically connects the first conductive contact and the second conductive contact, and the control circuit controls the corresponding flamethrower to turn on; when the shunt tube is disconnected from the mating channel, the mating block withdraws from the mating slot, the first conductive contact and the second conductive contact are disconnected, and the control circuit controls the corresponding flamethrower to turn off.

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