Extreme ultraviolet high-precision adjustment spectrometer

Abstract

The extreme ultraviolet high-precision adjusting spectrometer comprises a vacuum chamber, a CCD camera extreme ultraviolet light source and a vacuum pump set, two openings are symmetrically formed in the two ends of the vacuum chamber, the two openings are a light inlet and a light outlet respectively, the extreme ultraviolet light source is arranged at the position, located at the light inlet, of the vacuum chamber, and the vacuum pump set is arranged at the position, located at the light outlet, of the vacuum chamber. A CCD camera is installed at the position, located at a light outlet, of the vacuum chamber, the vacuum pump set is communicated with the vacuum chamber, and a precise adjusting assembly is detachably installed in the vacuum chamber and used for focusing and splitting extreme ultraviolet light. According to the invention, the precise adjustment function of extreme ultraviolet light splitting of different wavebands is realized, and meanwhile, the built vacuum system meets the particularity of vacuum propagation of extreme ultraviolet light. By using the spectrometer, extreme ultraviolet light of different wavebands can be rapidly, accurately and effectively obtained, and the spectrometer is more beneficial to use in different scenes.

Description

Technical Field

[0001] The invention relates to the technical field of extreme ultraviolet lithography, and in particular to an extreme ultraviolet high-precision adjustment spectrometer. Background Art

[0002] Extreme ultraviolet lithography technology is a micro-nano processing technology that uses the EUV band, mainly the 13.5nm band, for lithography. The extreme ultraviolet light generated at the light source needs to be focused and then split to obtain light of different bands. The extreme ultraviolet light generated from the light source needs to be incident on the tire mirror and reflected onto the grating for splitting and selection. Due to the particularity of the extreme ultraviolet band, extreme ultraviolet light of different bands needs to be propagated in a vacuum.

[0003] Precise adjustment of the lens angle and rotation accuracy in a vacuum is an important indicator for achieving the design requirements of extreme ultraviolet light in different bands, and its stability is also very important.

[0004] The application scenarios of extreme ultraviolet light in different bands are also different. It can be applied to semiconductor quantity detection, interference lithography, CDI imaging, etc. Therefore, there is an urgent need for an extreme ultraviolet high-precision adjustment spectrometer. Summary of the invention

[0005] The purpose of the present invention is to solve the above-mentioned background technical problems and to propose an extreme ultraviolet high-precision adjustment spectrometer.

[0006] The purpose of the present invention can be achieved through the following technical solutions:

[0007] An extreme ultraviolet high-precision adjustment spectrometer comprises a vacuum chamber, a CCD camera, an extreme ultraviolet light source and a vacuum pump group. Two openings are symmetrically provided at both ends of the vacuum chamber, and the two openings are respectively a light inlet and a light outlet. An extreme ultraviolet light source is arranged at the light inlet of the vacuum chamber, a CCD camera is installed at the light outlet of the vacuum chamber, the vacuum pump group is connected to the vacuum chamber, and a precision adjustment component is detachably installed in the vacuum chamber, and the precision adjustment component is used to focus and split the extreme ultraviolet light.

[0008] As a further solution of the present invention: holes are opened on both sides of the vacuum chamber, the precision adjustment component is inserted into the holes, the precision adjustment component is connected to the vacuum chamber through the holes, and a first sealing ring is provided at the connection between the precision adjustment component and the holes.

[0009] As a further solution of the present invention: a cover plate is detachably installed on the top of the vacuum chamber, and a second sealing ring is provided at the connection between the vacuum chamber and the cover plate.

[0010] As a further solution of the present invention: the precision adjustment component includes a sealing flange, an adjustment plate and a strip mirror, the magnetic fluid seal is fixed to the sealing flange by bolts, one end of the magnetic fluid seal is connected to a precision adjustment screw, and the adjustment plate can be rotated and adjusted by rotating the magnetic fluid seal knob to drive the precision adjustment screw, and the strip mirror is arranged on the adjustment plate.

[0011] As a further solution of the present invention: the precision adjustment component also includes a rotation displacement stage and a mirror frame, the mirror frame is connected to the adjustment plate via the rotation displacement stage, and the strip mirror is specifically detachably mounted on the mirror frame.

[0012] As a further solution of the present invention: the strip mirror can be a tire mirror or a grating mirror, the tire mirror focuses the extreme ultraviolet light, and the grating mirror performs spectral processing on the focused extreme ultraviolet light.

[0013] As a further solution of the present invention: the rotation adjustment accuracy of the rotation translation stage is 20μ°.

[0014] As a further solution of the present invention: a DP9 vacuum feedthrough is welded on the sealing flange.

[0015] Beneficial effects of the invention: The invention realizes the precise adjustment function of extreme ultraviolet light spectrometry of different bands, and the vacuum system constructed at the same time meets the particularity of extreme ultraviolet light propagation in a vacuum. The use of this spectrometer can quickly, accurately and effectively obtain extreme ultraviolet light of different bands, which is more conducive to the use of different scenes. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The present invention will be further described below in conjunction with the accompanying drawings.

[0017] Figure 1 It is a schematic diagram of the structure of the present invention;

[0018] Figure 2 It is a structural schematic diagram of the vacuum chamber of the present invention;

[0019] Figure 3 and Figure 4 It is a structural schematic diagram of the precision adjustment component of the present invention.

[0020] In the figure: 1. extreme ultraviolet light source; 2. vacuum chamber; 201. cover plate; 202. square sealing ring; 203. cavity; 204. O-ring; 3. exhaust adapter flange; 4. vacuum pump group; 5. precision adjustment component; 501. sealing flange; 502. magnetic fluid seal; 503. precision adjustment screw; 504. adjustment plate; 505. DP9 vacuum feedthrough; 506. Z-shaped plate; 507. rotational translation stage; 508. mirror frame; 509. grating mirror; 510. tire mirror; 6. observation window; 7. CCD camera. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0022] For example, see Figure 1-4 As shown, the present invention is an extreme ultraviolet high-precision adjustment spectrometer, comprising a vacuum chamber 2, a CCD camera 7, an extreme ultraviolet light source 1 and a vacuum pump group 4. Two openings are symmetrically provided at both ends of the vacuum chamber 2, and the two openings are respectively the light inlet and the light outlet. The extreme ultraviolet light source 1 is arranged at the light inlet of the vacuum chamber 2, and the CCD camera 7 is installed at the light outlet of the vacuum chamber 2. The vacuum pump group 4 is connected to the vacuum chamber 2, and a precision adjustment component 5 is detachably installed in the vacuum chamber 2, and the precision adjustment component 5 is used to focus and split the extreme ultraviolet light.

[0023] For example 2, please refer to Figure 1-4 As shown, the present invention is an extreme ultraviolet high-precision adjustment spectrometer, comprising a vacuum chamber 2, a CCD camera 7, an extreme ultraviolet light source 1 and a vacuum pump group 4. Two openings are symmetrically provided at both ends of the vacuum chamber 2, and the two openings are respectively the light inlet and the light outlet. The extreme ultraviolet light source 1 is arranged at the light inlet of the vacuum chamber 2, and the CCD camera 7 is installed at the light outlet of the vacuum chamber 2. The vacuum pump group 4 is connected to the vacuum chamber 2, and a precision adjustment component 5 is detachably installed in the vacuum chamber 2, and the precision adjustment component 5 is used to focus and split the extreme ultraviolet light.

[0024] Holes are provided on both sides of the vacuum chamber 2, and the precision adjustment component 5 is inserted through the holes. The precision adjustment component 5 is connected to the vacuum chamber 2 through the holes, and a first sealing ring 204 is provided at the connection between the precision adjustment component 5 and the hole.

[0025] A cover plate 201 is detachably mounted on the top of the vacuum chamber 2 , and a second sealing ring 202 is provided at the connection between the vacuum chamber 2 and the cover plate 201 .

[0026] For example 3, please refer to Figure 1-4As shown, the present invention is an extreme ultraviolet high-precision adjustment spectrometer, comprising a vacuum chamber 2, a CCD camera 7, an extreme ultraviolet light source 1 and a vacuum pump group 4. Two openings are symmetrically provided at both ends of the vacuum chamber 2, and the two openings are respectively the light inlet and the light outlet. The extreme ultraviolet light source 1 is arranged at the light inlet of the vacuum chamber 2, and the CCD camera 7 is installed at the light outlet of the vacuum chamber 2. The vacuum pump group 4 is connected to the vacuum chamber 2, and a precision adjustment component 5 is detachably installed in the vacuum chamber 2, and the precision adjustment component 5 is used to focus and split the extreme ultraviolet light.

[0027] Holes are provided on both sides of the vacuum chamber 2, and the precision adjustment component 5 is inserted through the holes. The precision adjustment component 5 is connected to the vacuum chamber 2 through the holes, and a first sealing ring is provided at the connection between the precision adjustment component 5 and the hole.

[0028] A cover plate 201 is detachably mounted on the top of the vacuum chamber 2 , and a second sealing ring is provided at the connection between the vacuum chamber 2 and the cover plate 201 .

[0029] Example 4, please refer to Figure 1-4 As shown, the present invention is an extreme ultraviolet high-precision adjustment spectrometer, comprising a vacuum chamber 2, a CCD camera 7, an extreme ultraviolet light source 1 and a vacuum pump group 4. Two openings are symmetrically provided at both ends of the vacuum chamber 2, and the two openings are respectively the light inlet and the light outlet. The extreme ultraviolet light source 1 is arranged at the light inlet of the vacuum chamber 2, and the CCD camera 7 is installed at the light outlet of the vacuum chamber 2. The vacuum pump group 4 is connected to the vacuum chamber 2, and a precision adjustment component 5 is detachably installed in the vacuum chamber 2, and the precision adjustment component 5 is used to focus and split the extreme ultraviolet light.

[0030] Holes are provided on both sides of the vacuum chamber 2 , and the precision adjustment component 5 is inserted through the holes. The precision adjustment component 5 is connected to the vacuum chamber 2 through the holes. A first sealing ring is provided at the connection between the precision adjustment component 5 and the hole, and the first sealing ring can be an O-ring 204 .

[0031] A cover plate 201 is detachably mounted on the top of the vacuum chamber 2 , and a second sealing ring is provided at the connection between the vacuum chamber 2 and the cover plate 201 . The second sealing ring may be a square sealing ring 202 .

[0032] The precision adjustment component 5 includes a sealing flange 501, an adjustment plate 504 and a strip mirror. The magnetic fluid seal 502 is fixed to the sealing flange 501 by bolts. A precision adjustment screw 503 is connected to one end of the magnetic fluid seal 502. The precision adjustment screw 503 can be driven to rotate and adjust the adjustment plate 504 by rotating the knob of the magnetic fluid seal 502. The strip mirror is set on the adjustment plate 504.

[0033] The precision adjustment assembly 5 further includes a rotation platform 507 and a mirror frame 508 . The mirror frame 508 is connected to the adjustment plate 504 via the rotation platform 507 . The strip mirror is specifically detachably mounted on the mirror frame 508 .

[0034] The strip mirror may be a tire mirror 510 or a grating mirror 509. The tire mirror 510 focuses the extreme ultraviolet light, and the grating mirror 509 performs spectral processing on the focused extreme ultraviolet light.

[0035] In another embodiment, the rotation adjustment accuracy of the rotation stage 507 is 20 μ°.

[0036] In another embodiment, a DP9 vacuum feedthrough 505 is welded to the sealing flange 501 .

[0037] In another embodiment, the magnetic fluid seal 502 is fixed to the sealing flange 501 by bolts, and a precision adjustment screw 503 is connected to one end of the magnetic fluid seal 502. The precision adjustment screw 503 can be driven by rotating the knob of the magnetic fluid seal 502 to rotate and adjust the adjustment plate 504. The strip mirror is set on the adjustment plate 504, and the rotation adjustment accuracy of the rotation displacement stage 507 is 20μ°. The precision adjustment component 5 also includes a rotation displacement stage 507 and a mirror frame 508. The mirror frame 508 is connected to the adjustment plate 504 through the rotation displacement stage 507, and the strip mirror is specifically detachably installed on the mirror frame 508. The strip mirror can be a tire mirror 510 or a grating mirror 509. The tire mirror 510 focuses the extreme ultraviolet light, and the grating mirror 509 performs spectroscopic processing on the extreme ultraviolet light after focusing.

[0038] A Z-shaped plate 506 is also provided between the sealing flange 501 and the adjusting plate 504 . The Z-shaped plate 506 is fixed to the sealing flange 501 . A plurality of screw sleeves are flexibly mounted on the Z-shaped plate 506 . The top of the precision adjusting screw 503 is connected to the screw sleeve. The screw sleeve can apply force to squeeze the adjusting plate 504 through the precision adjusting screw 503 .

[0039] The two precision adjustment screws 503 are symmetrically arranged, and a push rod is fixed on the sealing flange 501. The push rod also applies force to the adjustment plate 504 through the threaded sleeve. The push rod and the two precision adjustment screws 503 are arranged in a triangle shape.

[0040] An elastic member is further provided between the adjustment plate 504 and the sealing flange 501 , and the adjustment plate 504 is connected to the sealing flange 501 via the elastic member.

[0041] In another embodiment, a DP9 vacuum feedthrough 505 is welded to the sealing flange 501 .

[0042] It is also worth mentioning that:

[0043] like Figure 1As shown, an extreme ultraviolet high-precision adjustment spectrometer of the present invention comprises an extreme ultraviolet light source 1, a vacuum chamber 2, an exhaust adapter flange 3, a vacuum pump group 4, a precision adjustment component 5, an observation window 6 and a CCD camera 7. The extreme ultraviolet light generated by the extreme ultraviolet light source 1 is incident on the vacuum chamber 2, the vacuum pump group 4 performs vacuum exhaust on the vacuum chamber 2, and the extreme ultraviolet light is introduced after the vacuum degree is stabilized, the exhaust adapter flange 3 is connected to the vacuum chamber 2 through a clamp, the precision adjustment component 5 performs rotation positioning and then focuses the extreme ultraviolet light, and the focused extreme ultraviolet light is reflected on the grating mirror 509 for spectral separation, the observation window 6 can observe the position of the grating mirror 509, and the CCD camera 7 can capture the size of the light spot after spectral separation.

[0044] like Figure 2 As shown, the structure of the vacuum chamber 2 of the present invention includes a cover plate 201, an O-ring 204, a square sealing ring 202 and a cavity 203. Six holes are processed around the cavity 203, and the two ends are light inlet and outlet. A vacuum exhaust port and a mounting hole for a precision adjustment component 5 are opened on one side wall, and an observation window 6 and a mounting hole for a precision adjustment component 5 are opened on the other side. The cover plate 201 and the square sealing ring 202 are fixed to the cavity 203 by bolts.

[0045] like Figure 3 , Figure 4 As shown, the structure of the precision adjustment component 5 of the present invention includes a magnetic fluid seal 502, a sealing flange 501, a precision adjustment screw 503, a DP9 vacuum feedthrough 505, a Z-shaped plate 506, an adjustment plate 504, a rotational translation stage 507, a mirror frame 508 and a grating mirror 509. The magnetic fluid seal 502 is fixed to the sealing flange 501 by bolts, and one end of the magnetic fluid seal 502 is connected to the groove of the precision adjustment screw 503. The precision adjustment screw 503 is driven by rotating the knob of the magnetic fluid seal 502 to rotate and adjust the adjustment plate 504. Two precision adjustment screws 503 are used to rotate the adjustment plate 504 on two axes. The precision adjustment screw 503 adopts M6*0.25 thread and a groove is machined on one end. The DP9 vacuum feedthrough 505 is connected to the sealing flange 501 by welding to ensure the sealing. The rotation adjustment accuracy of the rotation stage 507 is 20μ°. The fixed end of the rotation stage 507 is fixed to the adjustment plate 504, and the other end is fixed to the mirror frame 508. The mirror frame 508 and the strip mirror are fixed by bolts. The rotation positioning accuracy adjustment of the strip mirror requires the rotation stage 507 to provide power.

[0046] The strip mirror can be divided into a tire mirror 510 and a grating mirror 509. The tire mirror 510 focuses the extreme ultraviolet light, and the grating mirror 509 performs spectral processing on the focused extreme ultraviolet light to obtain light spots of different nanometers. The rotary translation stage 507 is connected in the vacuum through the DP9 vacuum feedthrough 505 at one end and connected to the controller on the external non-vacuum side at the other end.

[0047] The above is a detailed description of an embodiment of the present invention, but the content is only a preferred embodiment of the present invention and cannot be considered to limit the scope of implementation of the present invention. All equivalent changes and improvements made within the scope of the present invention should still fall within the scope of the claims of the present invention.

Claims

1. An extreme ultraviolet high-precision adjustment spectrometer, comprising a vacuum chamber (2), a CCD camera (7), an extreme ultraviolet light source (1) and a vacuum pump group (4), characterized in that: Two openings are symmetrically provided at both ends of the vacuum chamber (2), the two openings being respectively a light inlet and a light outlet; an extreme ultraviolet light source (1) is provided at the light inlet of the vacuum chamber (2); a CCD camera (7) is installed at the light outlet of the vacuum chamber (2); the vacuum pump group (4) is connected to the vacuum chamber (2); a precision adjustment component (5) is detachably installed in the vacuum chamber (2); the precision adjustment component (5) is used to focus and split the extreme ultraviolet light.

2. The extreme ultraviolet high-precision adjustment spectrometer according to claim 1, characterized in that: Holes are provided on both sides of the vacuum chamber (2), the precision adjustment component (5) is inserted into the holes, the precision adjustment component (5) is connected to the vacuum chamber (2) through the holes, and a first sealing ring is provided at the connection between the precision adjustment component (5) and the holes.

3. The extreme ultraviolet high-precision adjustment spectrometer according to claim 2, characterized in that: A cover plate (201) is detachably mounted on the top of the vacuum chamber (2), and a second sealing ring is provided at the connection between the vacuum chamber (2) and the cover plate (201).

4. The extreme ultraviolet high-precision adjustment spectrometer according to claim 1, characterized in that: The precision adjustment component (5) comprises a sealing flange (501), a magnetic fluid seal (502), an adjustment plate (504) and a strip mirror. The magnetic fluid seal (502) is fixed to the sealing flange (501) by bolts. One end of the magnetic fluid seal (502) is connected to a precision adjustment screw (503). The precision adjustment screw (503) can be driven by rotating a knob of the magnetic fluid seal (502) to rotate and adjust the adjustment plate (504). The strip mirror is arranged on the adjustment plate (504).

5. The extreme ultraviolet high-precision adjustment spectrometer according to claim 4, characterized in that: The precision adjustment assembly (5) further comprises a rotational displacement platform (507) and a mirror frame (508); the mirror frame (508) is connected to the adjustment plate (504) via the rotational displacement platform (507); and the strip mirror is specifically detachably mounted on the mirror frame (508).

6. An extreme ultraviolet high-precision adjustment spectrometer according to claim 4 or 5, characterized in that: The strip mirror may be a tire mirror (510) or a grating mirror (509), wherein the tire mirror (510) focuses the extreme ultraviolet light, and the grating mirror (509) performs spectroscopic processing on the focused extreme ultraviolet light.

7. The extreme ultraviolet high-precision adjustment spectrometer according to claim 1, characterized in that: The rotation adjustment accuracy of the rotational translation stage (507) is 20 μ°.

8. The extreme ultraviolet high-precision adjustment spectrometer according to claim 1, characterized in that: A DP9 vacuum feedthrough (505) is welded on the sealing flange (501).

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