Clamp assembly for clamping transmission electron microscope sample to carry out thermal vacuum volatilization test and material thermal vacuum volatilization characteristic test method
By designing a fixture assembly for clamping transmission electron microscope samples, the problem of inaccurate results of the material's thermal vacuum volatility test is solved, and more accurate test results and higher test efficiency are achieved.
Patent Information
- Application Number
- CN202411642593.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-15
- Publication Date
- 2025-02-18
- Estimated Expiration
- 2044-11-15
AI Technical Summary
The existing test methods for thermal vacuum volatilization characteristics of materials have problems with inaccurate test results, especially in high temperature and high vacuum environments of nuclear power supply materials.
A fixture assembly is designed, including a first fixture, a second fixture and a sample positioner for clamping the transmission electron microscope sample for thermal vacuum volatilization test. The fixture assembly keeps the transmission electron microscope sample facing the detection hole through the sample positioning member, avoiding sample damage, movement and falling off, thereby achieving more accurate tests.
By using fixture components, the surface morphology of the sample can be accurately observed before and after the test, the accuracy of the test results can be improved, the testing cost can be reduced, and the testing efficiency can be improved.
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Figure CN119470507A_ABST
Abstract
Description
Technical Field
[0001] The embodiments of the present application relate to the technical field of testing the chemical or physical properties of materials, and in particular to a fixture assembly for clamping a transmission electron microscope sample for a thermal vacuum volatilization test and a material thermal vacuum volatilization property test method. Background Art
[0002] This section of content merely provides background information related to the present application and does not necessarily constitute prior art.
[0003] The principle of nuclear power is to take the fission energy of the reactor out of the core and generate electricity through a thermoelectric conversion device. When used for deep space exploration, nuclear power needs to withstand high temperatures (over 800°C) and ultra-high vacuum (less than 1×10 -5 Pa) thermal vacuum environment, so it is necessary to conduct thermal vacuum volatilization tests on the relevant materials of nuclear power sources. At present, the test method for thermal vacuum volatilization characteristics of materials has the defect that the test results are not accurate enough. Summary of the invention
[0004] A brief overview of the present application is provided below in order to provide a basic understanding of certain aspects of the present application. It should be understood that this overview is not an exhaustive overview of the present application. It is not intended to identify the key or important parts of the present application, nor is it intended to limit the scope of the present application. Its purpose is merely to present certain concepts in a simplified form as a prelude to a more detailed description discussed later.
[0005] In a first aspect, an embodiment of the present application provides a fixture assembly for clamping a transmission electron microscope sample for a thermal vacuum volatilization test, the fixture assembly comprising: a first fixture, a second fixture and a sample positioning member. The first fixture and the second fixture are connected to form a receiving cavity, the first fixture is formed with a detection hole connected to the receiving cavity, and the size of the detection hole is smaller than the size of the transmission electron microscope sample. The sample positioning member is at least partially disposed in the receiving cavity, and is used to position the transmission electron microscope sample so that the transmission electron microscope sample can be maintained at a position facing the detection hole.
[0006] The embodiment of the present application maintains the transmission electron microscope sample in a position facing the detection hole through the cooperation of the first clamp, the second clamp and the sample positioning member, thereby preventing the transmission electron microscope sample from being damaged, moved and falling off during the test and observation process, facilitating the observation and transportation of the transmission electron microscope sample, thereby making it possible to make the material to be tested for thermal vacuum volatilization characteristics into the shape of the transmission electron microscope sample and conduct the thermal vacuum volatilization test under the clamping of the clamp assembly.
[0007] In a second aspect, an embodiment of the present application provides a method for testing the thermal vacuum volatilization characteristics of a material, comprising: S1, making a sample to be tested into a transmission electron microscope sample; S2, using a transmission electron microscope to detect the surface morphology of the transmission electron microscope sample; S3, using the fixture assembly provided in the first aspect of the present application to clamp the transmission electron microscope sample; S4, placing the fixture assembly clamping the transmission electron microscope sample into a thermal vacuum volatilization characteristics testing device to perform a thermal vacuum volatilization test; S5, taking the fixture assembly clamping the transmission electron microscope sample out of the thermal vacuum volatilization characteristics testing device, conductively bonding the fixture assembly to the stage of a scanning electron microscope, and using a scanning electron microscope to detect the surface morphology of the transmission electron microscope sample after the thermal vacuum volatilization test.
[0008] These and other advantages of the present application will become more apparent through the following detailed description of the preferred embodiments of the present application in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS
[0009] In order to further illustrate the above and other advantages and features of the present application, the specific embodiments of the present application are further described in detail below in conjunction with the accompanying drawings. The accompanying drawings together with the following detailed description are included in this specification and form a part of this specification. Elements with the same function and structure are represented by the same reference numerals. It should be understood that these drawings only describe typical examples of the present application and should not be regarded as limiting the scope of the present application.
[0010] Figure 1 is a schematic diagram of a clamp assembly according to an embodiment of the present application;
[0011] Figure 2 is a cross-sectional schematic diagram of a clamp assembly according to an embodiment of the present application;
[0012] Figure 3 It is a schematic diagram of an exploded view of a clamp assembly according to an embodiment of the present application.
[0013] It should be noted that the drawings are not necessarily drawn to scale, but are merely shown in a schematic manner that does not affect the reader's understanding.
[0014] Description of reference numerals:
[0015] 1. Fixture assembly;
[0016] 10. first fixture; 11. accommodating cavity; 12. cover member; 121. detection hole; 13. annular member; 131. abutting hole;
[0017] 20. second fixture; 21. rotating portion; 22. raised portion; 221. second matching portion;
[0018] 30. Sample positioning member; 31. Main body; 311. Positioning groove; 32. First matching portion;
[0019] 40. Tightening member;
[0020] 50. Samples. DETAILED DESCRIPTION
[0021] Exemplary embodiments of the present application will be described below in conjunction with the accompanying drawings. For the sake of clarity and conciseness, not all features of the actual implementation are described in the specification. However, it should be understood that many implementation-specific decisions must be made in the process of developing any such actual implementation in order to achieve the developer's specific goals, such as meeting those constraints related to the system and business, and these constraints may vary from implementation to implementation. In addition, it should be understood that although the development work may be very complex and time-consuming, it is only a routine task for those skilled in the art who benefit from the content of this application.
[0022] It is also necessary to explain here that, in order to avoid obscuring the present application due to unnecessary details, only the device structure and / or processing steps closely related to the scheme according to the present application are shown in the accompanying drawings, while other details that are not very relevant to the present application are omitted.
[0023] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in this application should have the common meanings understood by persons with ordinary skills in the field to which this application belongs.
[0024] In the description of the embodiments of the present application, “plurality” means at least two, such as two, three, etc., unless otherwise clearly and specifically defined.
[0025] Before and after the thermal vacuum volatilization test of the material, it is necessary to use a transmission electron microscope and a scanning electron microscope to observe the microscopic morphology of the sample. In the related art, in order to meet the testing requirements of the transmission electron microscope, the sample needs to be cut after the test and processed into a transmission electron microscope sample. The transmission electron microscope sample is usually a disc with a diameter of about 3mm, with a through hole formed in the middle of the disc, and a thin area with a thickness of 100-200nm around the through hole for transmission electron microscope observation.
[0026] The inventors of the present application have found that cutting the sample after the test will result in inaccurate test results. Using an in-situ heating rod to perform a thermal vacuum volatilization test under a transmission electron microscope can avoid the above problem, but the cost of such a test will be very expensive.
[0027] In order to reduce the testing cost, the inventors of the present application discovered that before conducting a thermal vacuum volatilization test, the sample can be made into a transmission electron microscope sample, and then the transmission electron microscope sample can be clamped by a clamp assembly and placed in a high-temperature and high-vacuum thermal vacuum volatilization test device to conduct a transmission electron microscope sample volatilization test.
[0028] Based on this, an embodiment of the present application provides a fixture assembly for clamping a transmission electron microscope sample for a thermal vacuum volatilization test. Figure 1 is a schematic diagram of a clamp assembly according to an embodiment of the present application. Figure 2 FIG. 1 is a cross-sectional schematic diagram of a clamp assembly according to an embodiment of the present application. Figure 1 and Figure 2 As shown, the fixture assembly 1 includes: a first fixture 10, a second fixture 20 and a sample positioning member 30. The first fixture 10 and the second fixture 20 are connected to form a receiving cavity 11, and the first fixture 10 is formed with a detection hole 121 connected to the receiving cavity 11, and the size of the detection hole 121 is smaller than the size of the transmission electron microscope sample 50. The sample positioning member 30 is at least partially disposed in the receiving cavity 11, and is used to position the transmission electron microscope sample 50 so that the transmission electron microscope sample 50 can be maintained at a position facing the detection hole 121.
[0029] The fixture assembly 1 of the embodiment of the present application arranges the sample positioning member 30 in the accommodating cavity 11 so that the TEM sample 50 is maintained in a position facing the detection hole 121, thereby preventing the TEM sample 50 from being damaged, moved or fallen off during the test, and facilitating the transfer and transportation of the TEM sample 50, thereby making it possible to make the material to be tested for thermal vacuum volatilization characteristics into the shape of the TEM sample and conduct a thermal vacuum volatilization test under the clamping of the fixture assembly 1.
[0030] In this way, before the test begins, the TEM sample 50 can be placed on the stage of the TEM, and the surface morphology of the TEM sample 50 before the thermal vacuum volatilization test can be detected using the TEM; then the TEM sample 50 is assembled with the fixture assembly 1 (the fixture assembly 1 can be conductively bonded to the stage of the SEM, and the surface morphology of the TEM sample 50 before the thermal vacuum volatilization test can be detected using the SEM), and the TEM sample 50 is clamped by the fixture assembly 1 for the test; after the test, the TEM sample 50 can be separated from the fixture assembly 1, and the TEM sample 50 can be placed on the stage of the TEM, and the surface morphology of the TEM sample 50 after the thermal vacuum volatilization test can be detected using the TEM; or the fixture assembly 1 can be directly conductively bonded to the stage of the SEM, and the surface morphology of the TEM sample 50 after the thermal vacuum volatilization test can be detected using the SEM. Since there is no need to process the sample after the test, the true morphology of the sample before and after the test can be obtained more accurately, making the test results more accurate.
[0031] Figure 3 FIG. 1 is a schematic diagram of an exploded view of a clamp assembly 1 according to an embodiment of the present application. Figure 3 As shown, in some embodiments, the sample positioning member 30 includes a positioning groove 311, the groove depth of the positioning groove 311 is less than or equal to the thickness of the TEM sample 50, and when the first fixture 10 and the second fixture 20 are connected, the TEM sample 50 can abut against the periphery of the detection hole 121. By placing the TEM sample 50 in the positioning groove 311 and abutting the periphery of the detection hole 121 against the TEM sample 50, the TEM sample 50 is fixed at the center of the positioning groove 311 to prevent the TEM sample 50 from moving during the test and observation process.
[0032] In some embodiments, the diameter of the TEM sample is 3 mm. In some embodiments, the peripheral thickness of the TEM sample 50 can be greater than 0.2 mm and less than or equal to 0.3 mm, and the depth of the positioning groove 311 can be 0.2 mm.
[0033] In some embodiments, the positioning groove 311 may be a circular groove, and the inner diameter of the positioning groove 311 may be slightly larger than the outer diameter of the TEM sample 50, which is beneficial for the positioning groove 311 to fix the TEM sample 50. The inner diameter of the positioning groove 311 may be, for example, 0.1-0.5 mm larger than the outer diameter of the TEM sample 50.
[0034] like Figure 2 and Figure 3 As shown, in some embodiments, the sample positioning member 30 includes: a body 31 and a first matching portion 32. A positioning groove 311 is formed in the body 31, the body 31 is located in the accommodating cavity 11, and the first matching portion 32 is connected to the body 31. The second fixture 20 forms a second matching portion 221, and the sample positioning member 30 faces the detection hole 121 through the matching of the first matching portion 32 and the second matching portion 221.
[0035] like Figure 3 As shown, in some embodiments, the first fixture 10 includes a ring member 13 and a cover member 12 disposed at one end of the ring member 13, and the detection hole 121 is formed in the cover member 12. The ring member 13 and the cover member 12 form the accommodating cavity 11 together with the second fixture 20.
[0036] In some embodiments, the cover 12 is connected to the radial inner edge of the ring 13, and the cover 12 and the ring 13 are flush with each other on one side away from the second fixture 20. The detection hole 121 may be formed in the center of the cover 12.
[0037] In some embodiments, the overall size of the fixture assembly is less than 350 mm, so that the fixture assembly 1 can hold the transmission electron microscope sample 50 for observation under a scanning electron microscope. Since the transmission electron microscope sample 50 is held by the fixture assembly 1 for thermal vacuum volatilization test, and can be directly observed by a scanning electron microscope under the fixture, the test efficiency is improved, and the test sample can be prevented from being affected in the process of making the test sample into a scanning electron microscope sample later, thereby improving the accuracy of the thermal vacuum volatilization test results.
[0038] When performing SEM observation, the closer the objective lens of the SEM needs to be to the sample surface, the clearer the observation of the sample surface morphology. In some embodiments, the thickness of the cover 12 is 0.1-0.2 mm. A thinner cover 12 can make the distance between the surface of the sample 50 and the surface of the cover 12 smaller, thereby making it easier to get the objective lens of the SEM closer to the sample surface, thereby ensuring that the appropriate magnification can be used for observation.
[0039] In some embodiments, the distance between the detection hole 121 and the annular member 13 is 1-1.5 mm. When the cover member 12 is relatively thin, the overall mechanical strength of the first fixture 10 is ensured, and the stability of the fixture assembly 1 in the material thermal vacuum volatilization test is ensured.
[0040] like Figure 3 As shown, in some embodiments, the first fixture 10, the second fixture 20 and the sample positioning member 30 are made of tantalum, and the cover 12 is welded to the ring 13. Metal tantalum is ductile and easy to weld. Tantalum can be used to make a cover 12 as thin as 0.1-0.2 mm, and the cover 12 is welded to the ring 13 using a welding process, which can ensure the processing accuracy and mechanical strength of the cover 12. In particular, when the sample 50 is placed in a thermal vacuum volatilization characteristic test device with the fixture assembly 1 made of metal tantalum for a thermal vacuum volatilization test, the thermal deformation of the metal tantalum is small, which is conducive to maintaining the stability of the sample 50.
[0041] like Figure 2 and Figure 3 As shown, in some embodiments, the second fixture 20 includes a rotating portion 21 and a protruding portion 22 connected to the rotating portion 21, the protruding portion 22 is threadedly connected to the ring member 13, and the second matching portion 221 is formed on the protruding portion 22. The protruding portion 22 can enter the radial inner side of the ring member 13 so that the second matching portion 221 faces the detection hole 121.
[0042] In the embodiment of the present application, the protrusion 22 and the annular member 13 are threadedly connected to achieve a fastened connection between the first clamp 10 and the second clamp 20. At the same time, the distance between the detection hole 121 and the positioning groove 311 can be adjusted according to the thickness of the sample 50 to achieve observation of samples 50 of different thicknesses.
[0043] Specifically, when assembling the fixture assembly 1, the sample positioning member 30 is first placed on the second fixture 20, the sample 50 is placed in the positioning groove 311 of the sample positioning member 30, and the annular member 13 of the first fixture 10 is covered on the protrusion 22. When the second fixture 20 rotates relative to the first fixture 10, the sample positioning member 30 drives the sample 50 to rotate together and continuously moves toward the cover 12. When the sample 50 or the sample positioning member 30 contacts the cover 12 of the first fixture 10, as the second fixture 20 continues to rotate relative to the first fixture 10, the sample 50 or the sample positioning member 30 will no longer rotate relative to the first fixture 10 under the action of friction, thereby avoiding abrasion of the sample 50 and causing inaccurate testing of the sample 50.
[0044] In some embodiments, the outer surface of the protrusion 22 may be an M5 thread, and the inner surface of the ring 13 may be an M5 thread matching the outer surface of the protrusion 22 .
[0045] In some embodiments, the rotating portion 21 may be a disc structure, which is flush with the radial outer surface of the annular member 13 .
[0046] In some embodiments, the radial outer surface of the annular member 13 can also form two oppositely arranged and parallel cross sections, so that when assembling the clamp assembly 1, the annular member 13 can be kept relatively still by clamping the cross sections, driving the rotating part 21 to rotate and tightening the first clamp 10 and the second clamp 20.
[0047] like Figure 2 and Figure 3 As shown, in some embodiments, the second matching portion 221 is a matching groove formed in the protruding portion 22; the first matching portion 32 enters the matching groove and is gap-matched with the matching groove.
[0048] In some embodiments, the size of the body 31 is larger than the size of the matching groove, and the body 31 contacts the protrusion 22 above the matching groove. In some embodiments, the matching groove passes through the rotating part 21 and the protrusion 22, and the length of the first matching part 32 is equal to the sum of the heights of the protrusion 22 and the rotating part 21.
[0049] Specifically, when assembling the fixture assembly 1, the first mating portion 32 is inserted into the mating groove, and the sample 50 is placed in the positioning groove 311. When the rotating portion 21 rotates, the friction between the first mating portion 32 and the mating groove, and between the main body 31 and the protrusion 22 causes the sample positioning member 30 to drive the sample 50 to rotate together and continuously move toward the cover 12. When the sample 50 or the sample positioning member 30 contacts the cover 12 of the first fixture 10, as the second fixture 20 continues to rotate relative to the first fixture 10, the friction between the sample 50 or the sample positioning member 30 and the cover 12 is greater than the sum of the friction between the first mating portion 32 and the mating groove, and between the main body 31 and the protrusion 22. The sample positioning member 30 and the sample 50 will no longer rotate relative to the first fixture 10, thereby avoiding wear of the sample 50 and causing inaccurate testing of the sample 50.
[0050] In some embodiments, the protrusion 22 is disposed at the center of the rotating portion 21 , and the first matching portion 32 is located at the center of the annular member 13 , so that the sample 50 is fixed at the center of the fixture assembly 1 .
[0051] like Figure 2 and Figure 3 As shown, in some embodiments, the inner diameter of the ring 13 is larger than the outer diameter of the body 31 of the sample positioning member 30, so that there is a gap between the radial inner surface of the ring 13 and the body 31. In this way, when the second clamp 20 is threadedly engaged with the first clamp 10, the sample positioning member 30 is prevented from contacting the radial inner surface of the first clamp 10 during the rotation of the second clamp 20 relative to the first clamp 10, and the friction caused by the contact between the sample positioning member 30 and the first clamp 10 is prevented from interfering with the threaded engagement of the second clamp 20 and the first clamp 10.
[0052] like Figure 1 and Figure 2 As shown, in some embodiments, the first clamp 10 is further formed with a tightening hole 131 communicating with the accommodating cavity 11, and the clamp assembly 1 further includes a tightening member 40, which enters the tightening hole 131 to tighten the second clamp 20 to fix the relative position of the first clamp 10 and the second clamp 20. By arranging the tightening member 40 to cooperate with the tightening hole 131, the relative position of the first clamp 10 and the second clamp 20 can be further fixed, ensuring that the sample 50 remains in the same position of the clamp assembly 1 during the transportation and transfer of the clamp assembly 1.
[0053] In some embodiments, the tightening hole 131 is formed on a cross-section of the annular member 13 , so that the tightening member 40 can enter the tightening hole 131 to tighten the second clamp 20 .
[0054] In some embodiments, the fastening member 40 and the fastening hole 131 may be threadedly connected, wherein the fastening member 40 may be fixed with a top screw, such as an M3 top screw, and the fastening hole 131 is a threaded hole matching the size of the fixed top screw.
[0055] The embodiments of the present application also provide a material thermal vacuum volatilization characteristic test method, comprising: S1, making a sample to be tested into a transmission electron microscope sample 50; S2, using a transmission electron microscope to detect the surface morphology of the transmission electron microscope sample; S3, using the fixture assembly 1 provided in any embodiment of the present application to clamp the transmission electron microscope sample 50; S4, placing the fixture assembly 1 clamping the transmission electron microscope sample 50 into a thermal vacuum volatilization characteristic test device to perform a thermal vacuum volatilization test; S5, taking the fixture assembly 1 clamping the transmission electron microscope sample 50 out of the thermal vacuum volatilization characteristic test device, conductively bonding the fixture assembly 1 to the stage of a scanning electron microscope, and using a scanning electron microscope to detect the surface morphology of the transmission electron microscope sample 50 after the thermal vacuum volatilization test.
[0056] The fixture assembly 1 of the embodiment of the present application sets the sample positioning member 30 in the accommodating cavity 11, so that the TEM sample 50 is kept in a position facing the detection hole 121, thereby preventing the TEM sample 50 from being damaged, moved or dropped during the test, and facilitating the transfer and transportation of the TEM sample 50, so that the material to be tested for thermal vacuum volatilization characteristics can be made into the shape of the TEM sample, and the thermal vacuum volatilization test can be carried out under the clamping of the fixture assembly 1. Since the sample does not need to be processed after the thermal vacuum volatilization characteristics test, the true morphology of the sample before and after the test can be obtained more accurately, making the test result more accurate.
[0057] Since the transmission electron microscope sample 50 is subjected to the thermal vacuum volatilization test while being held by the fixture assembly 1, and can be directly observed by the scanning electron microscope while being held by the fixture, the test efficiency is improved, and the influence on the test sample during the subsequent process of making the test sample into a scanning electron microscope sample can be avoided, thereby improving the accuracy of the thermal vacuum volatilization test results.
[0058] In some embodiments, the TEM sample 50 is a disc with a diameter of 3 mm, a through hole is formed in the middle of the disc, and a thin area with a thickness of 100-200 nm is formed around the through hole for observation by the TEM. In S1, a through hole can be formed in the middle of the disc sample with a diameter of 3 mm by using an electrolyte erosion process, and a thin area with a thickness of 100-200 nm can be formed around the through hole.
[0059] In some embodiments, after step S3 and before step S4, the following may also be included: conductively bonding the fixture assembly 1 to the stage of a scanning electron microscope, and using the scanning electron microscope to detect the surface morphology of the transmission electron microscope sample 50 before the thermal vacuum volatilization test.
[0060] In some embodiments, after step S5, the TEM sample 50 can be separated from the fixture assembly 1, and the TEM sample 50 can be placed on the stage of the TEM, and the surface morphology of the TEM sample 50 after the thermal vacuum volatilization test can be detected using the TEM.
[0061] Regarding the embodiments of the present application, it should also be noted that, in the absence of conflict, the embodiments of the present application and the features therein can be combined with each other to obtain new embodiments.
[0062] The above description is only a specific implementation manner of the present application, but the protection scope of the present application is not limited thereto. The protection scope of the present application shall be based on the protection scope of the claims.
Claims
1. A fixture assembly for clamping a transmission electron microscope sample for a thermal vacuum volatilization test, characterized in that: The clamp assembly comprises: A first fixture and a second fixture, wherein the first fixture and the second fixture are connected to form a receiving cavity, and the first fixture is formed with a detection hole connected to the receiving cavity, and the size of the detection hole is smaller than the size of the transmission electron microscope sample; The sample positioning member is at least partially disposed in the accommodating cavity and is used to position the transmission electron microscope sample so that the transmission electron microscope sample can be maintained at a position facing the detection hole.
2. The clamp assembly according to claim 1, characterized in that: The sample positioning member comprises a positioning groove, the groove depth of which is less than or equal to the thickness of the TEM sample. When the first clamp and the second clamp are connected, the TEM sample can abut against the periphery of the detection hole.
3. The clamp assembly according to claim 2, characterized in that: The sample positioning member comprises: A body, the positioning groove is formed on the body, and the body is located in the accommodating cavity; A first matching portion connected to the body; The second fixture forms a second matching portion, and the sample positioning member faces the detection hole through the matching of the first matching portion and the second matching portion.
4. The clamp assembly according to claim 3, characterized in that: The first fixture includes an annular member and a cover member disposed at one end of the annular member, and the detection hole is formed in the cover member.
5. The clamp assembly according to claim 4, characterized in that: The overall size of the clamp assembly is less than or equal to 35 mm, so that the clamp assembly can clamp the transmission electron microscope sample for observation under a scanning electron microscope; The thickness of the cover is 0.1-0.2 mm, and the distance between the detection hole and the annular member is 1-1.5 mm.
6. The clamp assembly according to claim 4, characterized in that: The first fixture, the second fixture and the sample positioning member are made of tantalum; The cover member is welded to the annular member.
7. The clamp assembly according to claim 4, characterized in that: The second clamp comprises a rotating portion and a protruding portion connected to the rotating portion, wherein the protruding portion is threadedly connected to the annular member; The second matching portion is formed on the raised portion; The protrusion can enter the radial inner side of the annular member so that the second matching portion faces the detection hole.
8. The clamp assembly according to claim 7, characterized in that: The second matching portion is a matching groove formed on the raised portion; The first matching portion enters the matching groove and is clearance-matched with the matching groove.
9. The clamp assembly according to claim 4, characterized in that: The inner diameter of the ring is greater than the outer diameter of the body of the sample positioning member, so that there is a gap between the radial inner surface of the ring and the body.
10. The clamp assembly according to any one of claims 1 to 9, characterized in that: The first clamp is also formed with a tightening hole communicating with the accommodating cavity; The clamp assembly further includes a pressing member, which enters the pressing hole to press the second clamp tightly to fix the relative positions of the first clamp and the second clamp.
11. A material thermal vacuum volatilization property test method, characterized in that: include: S1. Prepare the sample to be tested into a transmission electron microscope sample; S2, using a transmission electron microscope to detect the surface morphology of the transmission electron microscope sample; S3, clamping the transmission electron microscope sample using the clamp assembly described in any one of claims 1 to 10; S4, placing the fixture assembly holding the transmission electron microscope sample into a thermal vacuum volatilization characteristic test device to perform a thermal vacuum volatilization test; S5. Take out the fixture assembly holding the transmission electron microscope sample from the thermal vacuum volatilization characteristics testing device, conductively bond the fixture assembly to the stage of a scanning electron microscope, and use the scanning electron microscope to detect the surface morphology of the transmission electron microscope sample after the thermal vacuum volatilization test.
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