Dynamic ion beam distribution measurement system and measurement method in a vacuum system

Abstract

The present application provides a dynamic ion beam distribution measurement system and a measurement method in a vacuum system. The dynamic ion beam distribution measurement system includes: a plurality of Faraday-type ion receivers installed in any Faraday cylinder; a signal acquisition device installed on the back side of the umbrella piece to receive the sampling signals collected in real time by the Faraday-type ion receivers; a signal transparent transmission device includes a signal transceiver module and a signal interface module. The signal transceiver module and the signal interface module penetrate the vacuum chamber to maintain a communication connection. The signal interface module is used for external host communication connection. The signal transceiver module and the signal acquisition device maintain a wireless communication connection, receive the sampling signals sent by the signal acquisition device through wireless communication, and transmit them to the signal interface module. The signal interface module forwards the sampling signals to the external host to realize real-time dynamic ion beam distribution measurement. Through a clever wireless communication transmission scheme, vacuum obstacle avoidance is overcome, and dynamic measurement of the ion beam distribution in the vacuum system can be realized in real time.

Description

Technical Field

[0001] This application relates to the technical field of radio frequency ion beam measurement. Specifically, it relates to a dynamic ion beam distribution measurement system and method in a vacuum system. Background Art

[0002] Currently, the measurement of radio frequency ion beams in a vacuum system is mainly carried out through wired connections. These connection lines are connected to the outside of the vacuum chamber through vacuum flanges. However, this wired connection method has obvious limitations. Due to the existence of the connection lines, when dynamic real-time measurement of radio frequency ion beams is required, the connection lines become limiting factors, resulting in the inability to perform the measurement, and thus dynamic measurement cannot be achieved. Summary of the Invention

[0003] The purpose of the embodiments of this application is to provide a dynamic ion beam distribution measurement system and method in a vacuum system, which can overcome vacuum obstacle avoidance through a clever wireless communication transmission scheme and can realize the dynamic measurement of the ion beam distribution in the vacuum system in real time.

[0004] To achieve the above purpose, the embodiments of this application are implemented as follows:

[0005] In a first aspect, the embodiments of this application provide a dynamic ion beam distribution measurement system in a vacuum system. The vacuum system includes a vacuum chamber. The emission end of the ion generation device penetrates and is hermetically arranged on the first side wall in the vacuum chamber. A rotating shaft is provided on the second side wall in the vacuum chamber. The back side of the umbrella-shaped piece is in transmission connection with the rotating shaft, and the front side of the umbrella-shaped piece faces the emission end of the ion generation device. A plurality of Faraday cylinders are arranged on the back side of the umbrella-shaped piece. The dynamic ion beam distribution measurement system includes: a number of Faraday-type ion receivers installed in any one of the Faraday cylinders; a signal acquisition device installed on the back side of the umbrella-shaped piece and communicatively connected to each Faraday-type ion receiver, for receiving the sampling signals collected in real time by the Faraday-type ion receivers; a signal transparent transmission device including a signal transceiver module and a signal interface module. The signal transceiver module and the signal interface module penetrate the vacuum chamber to maintain communication connection and maintain the vacuum chamber sealed. The signal interface module is used for the external host to communicate. The signal transceiver module is in wireless communication connection with the signal acquisition device, for receiving the sampling signals sent by the signal acquisition device through wireless communication and transmitting them to the signal interface module, and the signal interface module is used for forwarding the sampling signals to the external host to achieve real-time dynamic ion beam distribution measurement.

[0006] In combination with the first aspect, in the first possible implementation manner of the first aspect, the signal acquisition device includes an acquisition device housing, mounting feet, and an integrated circuit board. The acquisition device housing has an internal cavity; the mounting feet are provided at the bottom of the acquisition device housing; the integrated circuit board is disposed in the internal cavity of the acquisition device housing and integrates a sampling and analysis module, a data storage module, a wireless communication module, and a power supply module. Among them, the sampling and analysis module is communicatively connected to each Faraday ion receiver, receives the sampling signals collected by the Faraday ion receiver in real time, the data storage module stores the received sampling signals, the wireless communication module is wirelessly communicatively connected to the signal transceiver module of the signal transparent transmission device, and wirelessly transmits the sampling signals to the signal transceiver module. The power supply module supplies power to the sampling and analysis module, the data storage module, the wireless communication module, and each Faraday ion receiver.

[0007] In combination with the first possible implementation manner of the first aspect, in the second possible implementation manner of the first aspect, the acquisition device housing is annular, and the hollow part inside the ring is larger than the part where the back side of the umbrella piece is connected to the rotating shaft.

[0008] In combination with the second possible implementation manner of the first aspect, in the third possible implementation manner of the first aspect, the mounting feet are distributed around the bottom surface of the acquisition device housing, and each mounting foot has a radian matching the back side of the umbrella piece. An installation groove is provided inside the mounting foot for fixedly installing the mounting foot on the back side of the umbrella piece to fix the signal acquisition device.

[0009] In combination with the second possible implementation manner of the first aspect, in the fourth possible implementation manner of the first aspect, a positioning signal sending module is further integrated on the integrated circuit board. The signal transceiver module includes a wireless signal transceiver unit and a positioning signal receiving unit. The positioning signal sending module emits positioning signals outward, and the positioning signal receiving unit is used to receive the positioning signals. Among them, the positioning signal sending module rotates with the umbrella piece, and the positioning signal receiving unit receives a positioning signal once every rotation.

[0010] In combination with the first possible implementation manner of the first aspect, in the fifth possible implementation manner of the first aspect, the acquisition device housing is installed at any position on the back side of the umbrella piece through the mounting feet.

[0011] In combination with the first aspect, in the sixth possible implementation manner of the first aspect, the signal interface module is a line interface or a wireless communication module.

[0012] In combination with the sixth possible implementation manner of the first aspect, in the seventh possible implementation manner of the first aspect, the signal interface module is connected to the signal transceiver module through a vacuum flange type wire harness or a vacuum conductive flange.

[0013] Second aspect, an embodiment of the present application provides a method for measuring the dynamic ion beam distribution in a vacuum system, which is applied to the dynamic ion beam distribution measurement system in the vacuum system described in the first aspect. The method includes: determining measurement points from a plurality of Faraday cylinders arranged on the back side of the umbrella piece, installing a Faraday-type ion receiver in each Faraday cylinder corresponding to the point, and communicatively connecting a signal acquisition device to each Faraday-type ion receiver; connecting an external host to the signal interface module; starting the vacuum system to make the vacuum system reach a set vacuum degree; starting the ion generation device to generate an ion beam, and adjusting the parameters of the ion beam and the rotation speed of the umbrella piece to meet the measurement requirements; collecting sampling signals in real time through the Faraday-type ion receiver, and wirelessly transmitting the sampling signals to the signal transceiver module through the signal acquisition device. After the signal transceiver module transmits the sampling signals to the signal interface module, the sampling signals are transmitted to the external host through the signal interface module to achieve real-time dynamic ion beam distribution measurement.

[0014] Combined with the second aspect, in the first possible implementation manner of the first aspect, when the signal acquisition device includes a collection device housing, mounting feet, and an integrated circuit board, the integrated circuit board is integrated with a sampling analysis module, a data storage module, a wireless communication module, a power supply module, and a positioning signal transmission module, and the signal transceiver module includes a wireless signal transceiver unit and a positioning signal receiving unit, before collecting sampling signals in real time through the Faraday-type ion receiver, the method further includes: transmitting a positioning signal outward through the positioning signal transmission module, and recording the positioning signal reception data after the positioning signal receiving unit receives the positioning signal, wherein the positioning signal transmission module rotates with the umbrella piece, and the positioning signal receiving unit can receive a positioning signal once every rotation; the external host determines the transmission timing and transmission frequency of the sampling signal based on the positioning signal reception data and the rotation speed of the umbrella piece, so that the wireless communication module integrated on the integrated circuit board in the signal acquisition device transmits the sampling signals collected in real time by the Faraday-type ion receiver to the signal transceiver module according to the transmission timing and transmission frequency.

[0015] Beneficial effects:

[0016] 1. Install the signal acquisition device on the back side of the blade, communicate with each Faraday ion receiver, and receive the sampling signals collected by the Faraday ion receiver in real time. Design a signal transparent transmission device, including a signal transceiver module and a signal interface module. The signal transceiver module and the signal interface module penetrate the vacuum chamber to maintain communication connection and keep the vacuum chamber sealed. The signal interface module is used for external host communication connection, and is wirelessly connected to the signal acquisition device through the signal transceiver module, so as to receive the sampling signals sent by the signal acquisition device through wireless communication and transmit them to the signal interface module. The signal interface module is then used to forward the sampling signals to the external host. In this way, the signal acquisition device can rotate with the rotation of the blade, realizing the dynamic measurement of the ion beam distribution. The designed signal transparent transmission device includes a signal transceiver module installed inside the vacuum chamber and a signal interface module installed outside the vacuum chamber. The two penetrate the vacuum chamber to maintain communication and the seal of the vacuum chamber, completing the separation of signal transmission inside the vacuum chamber and signal transmission across the vacuum chamber after signal acquisition: inside the vacuum chamber, the sampling signals dynamically collected by the signal acquisition device (connected Faraday ion receiver) on the blade are transmitted to the signal transceiver module inside the vacuum chamber through wireless communication, realizing the transmission of sampling signals inside the vacuum chamber; then, through the wired connection between the signal transceiver module inside the vacuum chamber and the signal interface module outside the vacuum chamber (realized by penetrating the vacuum chamber and combining a vacuum flange type wire harness or a vacuum conductive flange), the sampling signals are transmitted from the vacuum side to the atmosphere side and further transmitted to the external host, thus realizing the real-time and dynamic measurement of the ion beam distribution.

[0017] 2. For the application scenario where the umbrella blade rotates at a low speed (for example, less than 60 revolutions per minute), since the rotation speed is not high, the signal acquisition device installed on the back of the umbrella blade does not have special requirements for the installation position, does not affect the balance of the umbrella blade rotation, and has almost no damage to the umbrella blade and the vacuum system. For the application scenario where the umbrella blade rotates at a relatively high speed (for example, more than 60 revolutions per minute, or even more than 300 revolutions per minute), it is necessary to consider the shape design of the signal acquisition device and the installation position on the back of the umbrella blade. Therefore, an annular collection device shell is designed, and the hollow part inside the ring is larger than the part of the back of the umbrella blade connected to the rotating shaft. Therefore, the annular collection device shell can be installed on the back of the umbrella blade at a position centered on the connection of the rotating shaft, so as to more evenly distribute the mass of the signal acquisition device and weaken the influence of the signal acquisition device on the umbrella blade when it rotates with the umbrella blade. In addition, the mounting feet are designed to be distributed around the bottom surface of the collection device shell, and each mounting foot has an arc that matches the back side of the umbrella piece. A mounting groove is provided in the mounting foot for fixing the mounting foot on the back side of the umbrella piece to fix the signal collection device. This not only allows the signal collection device to be more stably installed on the back side of the umbrella piece, but also allows the specific fixed position to be adjusted through the mounting groove in the mounting foot according to different umbrella piece specifications, thereby better adapting to umbrella pieces of different specifications, and having greater prospects for the transformation of existing equipment.

[0018] 3. A group of mutually cooperating positioning devices are arranged on the umbrella pieces and the side walls of the cavity in the vacuum cavity (in order not to affect the operation, the first side wall and the second side wall are usually not selected for this cavity, but other side walls other than the two are selected). One part is a positioning signal sending module, which is integrated on the integrated circuit board of the signal acquisition device, can emit positioning signals outward, and can also rotate periodically with the rotation of the umbrella pieces; the other part is a positioning signal receiving unit of the signal transceiver module, which is fixedly arranged on the side wall in the vacuum cavity, and can periodically receive the positioning signal emitted outward by the positioning signal sending module (the positioning signal receiving unit receives a positioning signal once for each rotation), so as to receive the positioning signal according to the reception of the positioning signal. , judge the rotation position of the umbrella piece, thereby determining the position of the wireless communication module in the signal acquisition device (located in the ring-shaped signal acquisition device, relatively fixed to the position of the positioning signal sending module), so that the external host can determine the transmission timing and transmission frequency of the sampling signal based on the positioning signal receiving data and the rotation speed of the umbrella piece, so that the wireless communication module integrated on the integrated circuit board in the signal acquisition device transmits the sampling signal collected in real time by the Faraday ion receiver to the signal transceiver module according to the transmission timing and transmission frequency, so that the transmission quality problem that may be caused by the wireless communication module transmitting data (sampling signal) to the wireless signal transceiver unit in a fixed position when rotating at a high speed can be weakened as much as possible, thereby improving the transmission quality.

[0019] To make the above objects, features, and advantages of the present application more apparent and understandable, the following provides preferred embodiments in conjunction with the accompanying drawings and describes them in detail as follows. Description of the Drawings

[0020] To more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings required for use in the embodiments of the present application. It should be understood that the following drawings only show some embodiments of the present application and should not be regarded as limiting the scope. For those of ordinary skill in the art, without creative efforts, other related drawings can also be obtained based on these drawings.

[0021] Figure 1 It is a schematic diagram of the dynamic ion beam distribution measurement system in the vacuum system from the first perspective.

[0022] Figure 2 It is a schematic diagram of the dynamic ion beam distribution measurement system in the vacuum system from the second perspective.

[0023] Figure 3 It is a schematic diagram of the dynamic ion beam distribution measurement system in the vacuum system from the third perspective.

[0024] Figure 4 It is a schematic diagram of the annular signal acquisition device housing arranged on the back side of the umbrella piece.

[0025] Figure 5 It is a schematic diagram of the architecture of the integrated circuit board set in the signal acquisition device communicating with the signal transmission device and the external host.

[0026] Figure 6 It is a flowchart of the dynamic ion beam distribution measurement method in the vacuum system.

[0027] Reference numerals: 11 - vacuum chamber; 111 - first side wall; 112 - second side wall; 12 - emission end of the ion generation device; 13 - rotation axis; 14 - umbrella piece; 15 - Faraday cup; 21 - signal acquisition device; 211 - acquisition device housing; 212 - mounting feet; 213 - integrated circuit board; 2131 - sampling and analysis module; 2132 - data storage module; 2133 - wireless communication module; 2134 - power supply module; 22 - signal transmission device; 221 - signal transceiver module; 222 - signal interface module; 30 - external host. Detailed Embodiments

[0028] The following will describe the technical solutions in the embodiments of the present application in conjunction with the drawings in the embodiments of the present application.

[0029] Please refer to Figures 1 - 3 , Figures 1 - 3Schematic diagrams of the dynamic ion beam distribution measurement system in the vacuum system provided by the embodiments of the present application from multiple perspectives.

[0030] In this embodiment, the vacuum system includes a vacuum chamber 11. The emission end 12 of an ion generation device (such as a radio frequency ion source, a Hall ion source, a Kaufman ion source, a plasma source, etc.) penetrates and is hermetically arranged on the first side wall 111 inside the vacuum chamber 11. A rotating shaft 13 is arranged on the second side wall 112 inside the vacuum chamber 11 (for example, a dynamic sealing structure, or a combination of a vacuum flange, a sealing rotary joint, and a metal gasket, etc. This part is prior art and will not be elaborated here). The back side of the umbrella piece 14 is in transmission connection with the rotating shaft 13. The front side of the umbrella piece 14 faces the emission end 12 of the ion generation device. A plurality of Faraday cylinders 15 are arranged on the back side of the umbrella piece 14. This part all follows the existing vacuum system and is not the improvement point of this embodiment, so it will not be elaborated here.

[0031] In addition, in this embodiment, the installation position of the emission end 12 of the ion generation device is described as the first side wall 111, and the installation position of the umbrella piece 14 is described as the second side wall 112. Just for convenience, according to different vacuum system designs, the installation positions of the emission end 12 of the ion generation device and the umbrella piece 14 can have many flexible changes as long as they are opposite to each other. For example, one is installed on the top surface and the other is installed on the bottom surface, or they are installed at a certain inclination angle, etc. The description here should not be regarded as a limitation to the present application.

[0032] And a plurality of Faraday cylinders 15 are arranged on the back side of the umbrella piece 14, and the arrangement positions are not limited to the examples given in the figure and can be opened at any position on the back side of the umbrella piece 14 according to measurement needs.

[0033] Moreover, for the structural design of the umbrella piece 14, there may be different structural designs in different application scenarios. In actual applications, the umbrella piece 14 is a support mechanism for placing and positioning the Faraday cylinder 15 and the signal acquisition device 21 in the vacuum space. The umbrella piece 14 can be designed into other shapes according to needs. The shape of the umbrella piece 14 given in this embodiment should not be regarded as a limitation to the present application.

[0034] The dynamic ion beam distribution measurement system includes: a plurality of Faraday-type ion receivers, a signal acquisition device 21, and a signal transmission device 22.

[0035] A plurality of Faraday-type ion receivers (the number and installation positions of the Faraday-type ion receivers are determined according to measurement requirements) are installed in any Faraday cylinder 15 for real-time collection of ion beam distribution data to obtain corresponding sampling signals.

[0036] The signal acquisition device 21 is installed on the back side of the umbrella piece 14 and is communicatively connected to each Faraday-type ion receiver for receiving the sampling signals real-time collected by the Faraday-type ion receivers.

[0037] Exemplarily, the signal acquisition device 21 includes an acquisition device housing 211, mounting feet 212, and an integrated circuit board 213. The acquisition device housing 211 has an internal cavity. The mounting feet 212 are provided at the bottom of the acquisition device housing 211, and the integrated circuit board 213 is provided in the internal cavity of the acquisition device housing 211.

[0038] Due to the requirements of different application scenarios, the rotational speed requirements for the umbrella blades 14 are different. There are relatively low rotational speeds (e.g., below 60 revolutions per minute), and there are also relatively high rotational speeds (above 60 revolutions per minute, e.g., 300 revolutions per minute). For the application scenarios with low rotational speeds, there is no need to overly consider the overall shape design of the signal acquisition device 21 and its installation position on the back side of the umbrella blades 14, and the impact on the balance of the umbrella blades 14 is very low and can be ignored. Therefore, in this case, the shape of the acquisition device housing 211 can be a common small square box design and can be installed at any position on the back side of the umbrella blades 14 (as Figures 1 - 3 shown).

[0039] For the application scenarios with relatively high rotational speeds, it is necessary to consider the overall shape design of the signal acquisition device 21 and its installation position on the back side of the umbrella blades 14 to weaken or even eliminate the impact on the balance of the umbrella blades 14 as much as possible.

[0040] As Figure 4 shown, the acquisition device housing 211 is designed as a ring, and the hollow part inside the ring is larger than the part where the back side of the umbrella blades 14 is connected to the rotating shaft 13. The mounting feet 212 are distributed around the bottom surface of the acquisition device housing 211 (e.g., four mounting feet 212, three mounting feet 212, six mounting feet 212, etc. In this embodiment, four mounting feet 212 are taken as an example), and each mounting foot 212 has a radian matching the back side of the umbrella blades 14 (generally, for different specifications of umbrella blades 14, the radian difference at the part where the back side of the umbrella blades 14 is connected to the rotating shaft 13 is very small and can basically be applicable. Of course, the mounting feet 212 can also be made of a metal material with micro-elasticity to adapt to this small range of radian differences of different specifications of umbrella blades 14). An installation groove is provided inside the mounting feet 212 for fixedly installing the mounting feet 212 on the back side of the umbrella blades 14 (e.g., by bolts, nailed into different positions of the installation groove and fixed on the back side of the umbrella blades 14. Of course, screw holes also need to be opened on the back side of the umbrella blades 14) to fix the signal acquisition device 21.

[0041] As Figure 5As shown in the figure, the integrated circuit board 213 is integrated with a sampling and analysis module 2131, a data storage module 2132, a wireless communication module 2133, and a power supply module 2134. The signal transparent transmission device 22 includes a signal transceiver module 221 and a signal interface module 222. The signal transceiver module 221 and the signal interface module 222 penetrate through the vacuum cavity 11 (to avoid affecting the operation, the side walls of this cavity usually do not select the first side wall 111 and the second side wall 112, but other side walls outside the two, and it is best to maintain the same height as the installation position of the signal acquisition device 21) to maintain communication connection and keep the vacuum cavity 11 sealed. The signal transceiver module 221 is wirelessly connected to the signal acquisition device 21, and the signal interface module 222 is used for communication connection with an external host 30.

[0042] Then, the sampling and analysis module 2131 is communicatively connected to each Faraday ion receiver, receives the sampling signals collected in real time by the Faraday ion receiver, the data storage module 2132 stores the received sampling signals (which can be used to obtain the corresponding stored data afterwards in case of a transmission failure), the wireless communication module 2133 is wirelessly communicatively connected to the signal transceiver module 221 of the signal transparent transmission device 22, and wirelessly transmits the sampling signals to the signal transceiver module 221, and the power supply module 2134 supplies power to the sampling and analysis module 2131, the data storage module 2132, the wireless communication module 2133, and each Faraday ion receiver.

[0043] The signal transceiver module 221 can receive the sampling signals wirelessly transmitted by the signal acquisition device 21 (the wireless communication module 2133 therein) and transmit them to the signal interface module 222, and the signal interface module 222 is used to forward the sampling signals to the external host 30 to realize real-time dynamic ion beam distribution measurement. The external host 30 can be responsible for displaying, operating, and forwarding relevant data for data analysis and processing.

[0044] Exemplarily, the signal interface module 222 can be a line interface (transmitting relevant data to the external host 30 in a wired manner) or a wireless communication module 2133 (transmitting relevant data to the external host 30 in a wireless manner). The signal interface module 222 and the signal transceiver module 221 can be connected by a vacuum flange type wire harness to overcome the vacuum barrier, which can not only ensure the transmission of data from the vacuum side (inside the vacuum cavity 11) to the atmospheric side (outside the vacuum cavity 11), but also ensure the sealing of the vacuum cavity 11. Or, the signal interface module 222 and the signal transceiver module 221 can also be connected by a vacuum conductive flange to transfer the sampling signals from the signal transceiver module 221 inside the vacuum cavity 11 to the signal interface module 222 outside the vacuum cavity 11.

[0045] Due to the high-speed rotating umbrella blade 14 in the vacuum system, the signal acquisition device 21 installed on the back side of the umbrella blade 14 also rotates accordingly. The wireless communication module 2133 integrated in the integrated circuit board 213 therein is also rotating at a high speed. To wirelessly transmit the sampling signal to the signal transceiver module 221 fixedly installed on the inner wall of the vacuum chamber 11, it is necessary to ensure the transmission quality.

[0046] Accordingly, a positioning signal transmitting module can also be integrated on the integrated circuit board 213, and the signal transceiver module 221 can be designed as a module including a wireless signal transceiver unit and a positioning signal receiving unit. The positioning signal transmitting module emits a positioning signal outward, and the positioning signal receiving unit is used to receive the positioning signal. The positioning signal transmitting module rotates with the umbrella blade 14. Each time it rotates one week, the positioning signal receiving unit receives a positioning signal once. Of course, a main control module is also integrated on the integrated circuit board 213 for controlling the operation of each module, which will not be elaborated here.

[0047] Specifically, a housing with a strip-shaped window can be sleeved outside the positioning signal receiving unit, so that the strip-shaped window faces the installation position of the positioning signal transmitting module, and the positioning signal receiving unit and the positioning signal transmitting module are installed at the same height. Then, each time the positioning signal transmitting module rotates one week with the umbrella blade 14, the positioning signal receiving unit can receive a positioning signal once. Through this positioning signal, combined with the rotation speed of the umbrella blade 14, the real-time rotation situation of the umbrella blade 14 can be judged. Each time the positioning signal transmitting module (and the wireless communication module 2133) rotates past the signal transceiver module 221 (the positioning signal receiving unit and the wireless signal transceiver unit), by adjusting the transmission timing and transmission frequency of the wireless communication, it is beneficial to improve the wireless transmission quality.

[0048] Of course, in addition to this positioning scheme, an encoder can also be designed and installed for more accurate rotation positioning, which is not limited here.

[0049] In the dynamic ion beam distribution measurement system of the vacuum system in this embodiment, the signal acquisition device 21 is installed on the back side of the umbrella blade 14 and communicatively connected to each Faraday-type ion receiver to receive the sampling signals collected by the Faraday-type ion receiver in real time. A signal transparent transmission device 22 is designed, which includes a signal transceiver module 221 and a signal interface module 222. The signal transceiver module 221 and the signal interface module 222 penetrate through the vacuum chamber 11 to maintain communication connection and keep the vacuum chamber 11 sealed. The signal interface module 222 is used for the external host 30 to conduct a communication connection and maintain a wireless communication connection with the signal acquisition device 21 through the signal transceiver module 221, so as to receive the sampling signals sent by the signal acquisition device 21 through wireless communication and transmit them to the signal interface module 222, and the signal interface module 222 is then used to forward the sampling signals to the external host 30. In this way, the signal acquisition device 21 can rotate with the rotation of the umbrella blade 14 to achieve the dynamic measurement of the ion beam distribution. The designed signal transparent transmission device 22 includes a signal transceiver module 221 installed inside the vacuum chamber 11 and a signal interface module 222 installed outside the vacuum chamber 11. The two are connected through the vacuum chamber 11 to maintain communication and the seal of the vacuum chamber 11, completing the separation of the signal transmission inside the vacuum chamber 11 after signal acquisition and the signal transmission across the vacuum chamber 11: inside the vacuum chamber 11, the sampling signals dynamically collected by the signal acquisition device 21 (connected Faraday-type ion receiver) on the umbrella blade 14 are transmitted to the signal transceiver module 221 inside the vacuum chamber 11 through wireless communication, realizing the transmission of the sampling signals inside the vacuum chamber 11; then, through the wired connection between the signal transceiver module 221 inside the vacuum chamber 11 and the signal interface module 222 outside the vacuum chamber 11 (realized by penetrating the vacuum chamber 11 and combining the vacuum flange-type wire harness), the sampling signals are transmitted from the vacuum side to the atmosphere side and further transmitted to the external host 30, thereby realizing the real-time and dynamic measurement of the ion beam distribution.

[0050] For the application scenario where the umbrella blade 14 rotates at a low speed (for example, below 60 revolutions per minute), since the rotational speed is not high, the signal acquisition device 21 installed on the back side of the umbrella blade 14 has no special requirements for the installation position, does not affect the balance of the rotation of the umbrella blade 14, and causes almost no damage to the umbrella blade 14 and the vacuum system. For the application scenario where the umbrella blade 14 rotates at a relatively high speed (for example, above 60 revolutions per minute, even above 300 revolutions per minute), it is necessary to consider the shape design of the signal acquisition device 21 and its installation position on the back side of the umbrella blade 14. Therefore, a ring-shaped acquisition device housing 211 is designed, and the hollow part inside the ring is larger than the part where the back side of the umbrella blade 14 is connected to the rotating shaft 13. Therefore, the ring-shaped acquisition device housing 211 can be installed on the back side of the umbrella blade 14 at a position centered on the connection point of the rotating shaft, more evenly distributing the mass of the signal acquisition device 21 and weakening the influence of the signal acquisition device 21 on the umbrella blade 14 when it rotates with the umbrella blade 14. Moreover, the installation feet 212 are designed to be distributed around the bottom surface of the acquisition device housing 211, and each installation foot 212 has an arc matching the back side of the umbrella blade 14. An installation groove is provided inside the installation foot 212 for fixedly installing the installation foot 212 on the back side of the umbrella blade 14 to fix the signal acquisition device 21. In this way, not only can the signal acquisition device 21 be more stably installed on the back side of the umbrella blade 14, but also the specific fixing position can be adjusted through the installation groove inside the installation foot 212 according to different specifications of the umbrella blade 14, so as to better adapt to different specifications of the umbrella blade 14, having a greater prospect of retrofitting existing equipment.

[0051] Based on the above introduction of the dynamic ion beam distribution measurement system in the vacuum system, this embodiment also provides a method for measuring the dynamic ion beam distribution in the vacuum system. Please refer to Figure 6 , Figure 6 which is a flowchart of the method for measuring the dynamic ion beam distribution in the vacuum system, including step S1, step S2, step S3, step S4, and step S5.

[0052] Step S1: Determine the measurement points from the multiple Faraday cylinders 15 arranged on the back side of the umbrella blade 14, install Faraday-type ion receivers in each Faraday cylinder 15 corresponding to the points, and communicatively connect the signal acquisition device 21 with each Faraday-type ion receiver.

[0053] Step S2: Connect the external host 30 to the signal interface module 222.

[0054] Step S3: Start the vacuum system to make the vacuum system reach the set vacuum degree.

[0055] Step S4: Start the ion generation device to generate an ion beam, and adjust the parameters of the ion beam and the rotational speed of the umbrella blade 14 to meet the measurement requirements.

[0056] Step S5: Collect the sampling signal in real time through a Faraday-type ion receiver, wirelessly transmit the sampling signal to the signal transceiver module 221 by the signal acquisition device 21. After the signal transceiver module 221 transmits the sampling signal to the signal interface module 222, the sampling signal is transmitted to the external host 30 through the signal interface module 222, realizing real-time dynamic ion beam distribution measurement.

[0057] Steps S1 and S2 are the preliminary preparations. According to the measurement requirements, the measurement points can be determined from the multiple Faraday cups 15 arranged on the back side of the umbrella piece 14, and a Faraday-type ion receiver is installed in each Faraday cup 15 corresponding to the measurement point. The signal acquisition device 21 is communicatively connected to each Faraday-type ion receiver. And, the external host 30 is connected to the signal interface module 222. Steps S3 and S4 are the operation processes. The vacuum system can be started to make the vacuum system reach the set vacuum degree. And, the ion generation device is started to generate an ion beam, and the parameters of the ion beam (such as beam current, ion emission energy, etc.) and the rotation speed of the umbrella piece 14 are adjusted to meet the measurement requirements. Step S5 is the process of signal acquisition and transmission in the dynamic ion beam distribution measurement system in the vacuum system, realizing real-time dynamic measurement of the ion beam distribution.

[0058] In order to improve the signal transmission quality, in this embodiment, on the basis that the signal acquisition device 21 in the dynamic ion beam distribution measurement system includes an acquisition device housing 211, mounting feet 212, an integrated circuit board 213, the integrated circuit board 213 integrates a sampling analysis module 2131, a data storage module 2132, a wireless communication module 2133, a power supply module 2134 and a positioning signal transmission module, and the signal transceiver module 221 includes a wireless signal transceiver unit and a positioning signal receiving unit, a suitable wireless transmission scheme can also be determined before the sampling signal is collected in real time through the Faraday-type ion receiver to improve the transmission quality of the sampling signal dynamically collected in the vacuum system.

[0059] Specifically, the positioning signal transmission module can transmit a positioning signal outward. After the positioning signal receiving unit receives the positioning signal, the positioning signal reception data is recorded. Among them, the positioning signal transmission module rotates with the umbrella piece 14. Every time it rotates one week, the positioning signal receiving unit can receive a positioning signal once. Then, the external host 30 can receive the transmitted positioning signal reception data. Then, the external host 30 can determine the transmission timing and transmission frequency of the sampling signal based on the positioning signal reception data and the rotation speed of the umbrella piece 14 (already set), so that the wireless communication module 2133 integrated on the integrated circuit board 213 in the signal acquisition device 21 transmits the sampling signal collected in real time by the Faraday-type ion receiver to the signal transceiver module 221 according to the transmission timing and transmission frequency.

[0060] For example, by positioning the received data of the signal and the rotation speed of the umbrella piece 14, we can analyze and predict the time point when the distance between the positioning signal receiving unit and the positioning signal transmitting module is the closest. Further, according to the setting position of the wireless communication module 2133 in the signal acquisition device 21 (the interval angle relative to the positioning signal transmitting module), the time point when the distance between the wireless communication module 2133 in the signal acquisition device 21 and the wireless signal transceiver unit in the signal transceiver module 221 is the closest can be determined. Data transmission is preferably performed at these time points (i.e., transmission opportunities) (the start time and end time of the communication window can be pre-designed), so that the signal attenuation is minimized and the transmission quality is the highest. Also, the transmission frequency can be adaptively adjusted. For example, within the communication window, a fixed high frequency can be used for data transmission to ensure the continuity and stability of data transmission. Outside the communication window, the frequency can be dynamically adjusted as needed to cope with possible interference: when the distance between the two is relatively close, a higher frequency is used for transmission to take advantage of better channel conditions; when the distance between the two increases, the frequency can be reduced to maintain the stability of communication.

[0061] Here is only an example. The quality of wireless transmission can be improved by positioning the received data of the signal and the rotation speed of the umbrella piece 14. The specific algorithm design is not specifically introduced in this embodiment because a specific transmission scheme (such as transmission opportunity, transmission frequency, transmission power, etc.) needs to be designed according to the actual measurement scenario. Different vacuum degrees, ion beam parameters, rotation speed of the umbrella piece 14, etc. all need to be specifically considered. Therefore, the example introduced here should not be regarded as a restriction and limitation to this application.

[0062] Therefore, by arranging a set of cooperating positioning devices on the umbrella piece 14 in the vacuum chamber 11 and the side wall of the chamber, one part is the positioning signal transmitting module, which is integrated on the integrated circuit board 213 of the signal acquisition device 21 and can transmit positioning signals outward, and can also rotate periodically as the umbrella piece 14 rotates; the other part is the positioning signal receiving unit of the signal transceiver module 221, which is fixedly arranged on the side wall in the vacuum chamber 11 and can periodically receive the positioning signals transmitted outward by the positioning signal transmitting module (each time it rotates one week, the positioning signal receiving unit receives a positioning signal). Thus, according to the reception situation of the positioning signals, the rotation position of the umbrella piece 14 can be judged, and then the position of the wireless communication module 2133 in the signal acquisition device 21 (located in the annular signal acquisition device 21 and relatively fixed with the position of the positioning signal transmitting module) can be determined, so that the external host 30 can determine the transmission timing and transmission frequency of the sampling signal based on the positioning signal reception data and the rotation speed of the umbrella piece 14, so that the wireless communication module 2133 integrated on the integrated circuit board 213 in the signal acquisition device 21 transmits the sampling signal collected in real time by the Faraday ion receiver to the signal transceiver module 221 according to the transmission timing and transmission frequency. In this way, the transmission quality problem that may occur when the wireless communication module 2133 transmits data (sampling signal) to the fixed-position wireless signal transceiver unit at high speed can be weakened as much as possible, and the transmission quality can be improved.

[0063] It should be noted that the dynamic ion beam distribution measurement system and measurement method in the vacuum system provided in this embodiment are currently mainly applied to the dynamic measurement scenario of rotating measurement in the vacuum system. When the application scenarios of ion radio frequency technology are more extensive in the future (for example, new dynamic measurement scenarios are generated, such as mobile measurement in the vacuum system, or other dynamic form of motion measurement scenarios), this solution can still be applicable. Moreover, the dynamic ion beam distribution measurement system and measurement method provided in the vacuum system of this embodiment can not only be applied to a series of application scenarios given in this embodiment, but also can be applied to other application scenarios.

[0064] In summary, the embodiments of the present application provide a dynamic ion beam distribution measurement system and method in a vacuum system. The signal acquisition device 21 is installed on the back side of the umbrella piece 14 and is communicatively connected to each Faraday ion receiver to receive the sampling signals collected in real time by the Faraday ion receivers. A signal transparent transmission device 22 is designed, which includes a signal transceiver module 221 and a signal interface module 222. The signal transceiver module 221 and the signal interface module 222 penetrate the vacuum chamber 11 to maintain a communication connection and keep the vacuum chamber 11 sealed. The signal interface module 222 is used for the external host 30 to establish a communication connection, and wirelessly communicates with the signal acquisition device 21 through the signal transceiver module 221, so as to receive the sampling signals sent wirelessly by the signal acquisition device 21 and transmit them to the signal interface module 222. The signal interface module 222 then forwards the sampling signals to the external host 30. In this way, the signal acquisition device 21 can rotate with the rotation of the umbrella piece 14 to achieve dynamic measurement of the ion beam distribution. The designed signal transparent transmission device 22 includes a signal transceiver module 221 installed inside the vacuum chamber 11 and a signal interface module 222 installed outside the vacuum chamber 11. The two penetrate the vacuum chamber 11 to maintain communication and the seal of the vacuum chamber 11, completing the separation of signal transmission inside the vacuum chamber 11 after signal acquisition and signal transmission across the vacuum chamber 11: inside the vacuum chamber 11, the sampling signals dynamically collected by the signal acquisition device 21 (connected Faraday ion receivers) on the umbrella piece 14 are wirelessly transmitted to the signal transceiver module 221 inside the vacuum chamber 11 to achieve the transmission of the sampling signals inside the vacuum chamber 11; then, through the wired connection between the signal transceiver module 221 inside the vacuum chamber 11 and the signal interface module 222 outside the vacuum chamber 11 (realized by penetrating the vacuum chamber 11 and combining a vacuum flange type wire harness), the sampling signals are transferred from the vacuum side to the atmosphere side and further transmitted to the external host 30, thereby achieving real-time and dynamic measurement of the ion beam distribution.

[0065] In this document, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations.

[0066] The above description is only for the embodiments of the present application and is not intended to limit the protection scope of the present application. For those skilled in the art, the present application can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A dynamic ion beam distribution measurement system in a vacuum system, characterized in that, The vacuum system includes a vacuum chamber. The emission end of the ion generation device penetrates and is hermetically arranged on the first side wall inside the vacuum chamber. A rotating shaft is provided on the second side wall inside the vacuum chamber. The back side of the umbrella-shaped piece is in transmission connection with the rotating shaft, the front side of the umbrella-shaped piece faces the emission end of the ion generation device, and a plurality of Faraday cylinders are arranged on the back side of the umbrella-shaped piece. The dynamic ion beam distribution measurement system includes: A number of Faraday-type ion receivers installed in any of the Faraday cylinders; A signal acquisition device installed on the back side of the umbrella-shaped piece and communicatively connected to each Faraday-type ion receiver, for receiving the sampling signals collected in real time by the Faraday-type ion receivers; A signal transparent transmission device, including a signal transceiver module and a signal interface module. The signal transceiver module and the signal interface module penetrate the vacuum chamber to maintain communication connection and keep the vacuum chamber sealed. The signal interface module is used for the external host to communicate. The signal transceiver module is in wireless communication connection with the signal acquisition device, for receiving the sampling signals sent by the signal acquisition device through wireless communication and transmitting them to the signal interface module, and the signal interface module is used for forwarding the sampling signals to the external host to realize real-time dynamic ion beam distribution measurement; The signal acquisition device includes an acquisition device housing, mounting feet, and an integrated circuit board. The acquisition device housing has an internal cavity; The mounting feet are arranged at the bottom of the acquisition device housing; The integrated circuit board is arranged in the internal cavity of the acquisition device housing and integrates a sampling analysis module, a data storage module, a wireless communication module, and a power supply module. Among them, the sampling analysis module is communicatively connected to each Faraday-type ion receiver to receive the sampling signals collected in real time by the Faraday-type ion receivers. The data storage module stores the received sampling signals. The wireless communication module is in wireless communication connection with the signal transceiver module of the signal transparent transmission device to wirelessly transmit the sampling signals to the signal transceiver module. The power supply module supplies power to the sampling analysis module, the data storage module, the wireless communication module, and each Faraday-type ion receiver; A positioning signal sending module is also integrated on the integrated circuit board. The signal transceiver module includes a wireless signal transceiver unit and a positioning signal receiving unit. The positioning signal sending module emits positioning signals outward, and the positioning signal receiving unit is used for receiving the positioning signals. Among them, the positioning signal sending module rotates with the umbrella-shaped piece. Every time it rotates one week, the positioning signal receiving unit receives a positioning signal once. The external host determines the transmission timing and transmission frequency of the sampling signals based on the received positioning signal data and the rotation speed of the umbrella-shaped piece, so that the wireless communication module integrated on the integrated circuit board in the signal acquisition device transmits the sampling signals collected in real time by the Faraday-type ion receivers to the signal transceiver module according to the transmission timing and transmission frequency.

2. The dynamic ion beam distribution measurement system in the vacuum system according to claim 1, characterized in that, The acquisition device housing is annular, and the hollow part inside the ring is larger than the part where the back side of the umbrella-shaped piece is connected to the rotating shaft.

3. The dynamic ion beam distribution measurement system in the vacuum system according to claim 2, characterized in that, The mounting feet are distributed around the bottom surface of the acquisition device housing, and each mounting foot has an arc matching the back side of the umbrella-shaped piece. An installation groove is provided inside the mounting foot for fixedly installing the mounting foot on the back side of the umbrella-shaped piece to fix the signal acquisition device.

4. The dynamic ion beam distribution measurement system in the vacuum system according to claim 1, characterized in that, The acquisition device housing is installed at any position on the back side of the umbrella-shaped piece through the mounting feet.

5. The dynamic ion beam distribution measurement system in the vacuum system according to claim 1, characterized in that The signal interface module is a line interface or a wireless communication module.

6. The dynamic ion beam distribution measurement system in the vacuum system according to claim 5, wherein The signal interface module and the signal transceiver module are connected by a vacuum flange type wire harness or a vacuum conductive flange.

7. A method for measuring the dynamic ion beam distribution in a vacuum system, characterized in that, A dynamic ion beam distribution measurement system applied to the vacuum system described in claim 1, the method comprising: Determining measurement points from a plurality of Faraday cylinders arranged on the back side of the umbrella piece, installing a Faraday type ion receiver in each Faraday cylinder corresponding to the point, and communicatively connecting a signal acquisition device to each Faraday type ion receiver; Connecting an external host to the signal interface module; Starting the vacuum system to make the vacuum system reach a set vacuum degree; Starting the ion generation device to generate an ion beam, and adjusting the parameters of the ion beam and the rotation speed of the umbrella piece to meet the measurement requirements; Real-time collecting sampling signals through the Faraday type ion receiver, wirelessly transmitting the sampling signals to the signal transceiver module through the signal acquisition device, after the signal transceiver module transmits the sampling signals to the signal interface module, transmitting the sampling signals to the external host through the signal interface module to realize real-time dynamic ion beam distribution measurement.

8. The method for measuring the dynamic ion beam distribution in a vacuum system according to claim 7, characterized in that, When the signal acquisition device includes an acquisition device housing, mounting feet, and an integrated circuit board, the integrated circuit board is integrated with a sampling analysis module, a data storage module, a wireless communication module, a power supply module, and a positioning signal sending module, and the signal transceiver module includes a wireless signal transceiver unit and a positioning signal receiving unit, before real-time collecting sampling signals through the Faraday type ion receiver, the method further includes: Transmitting a positioning signal outward through the positioning signal sending module, and recording positioning signal reception data after the positioning signal receiving unit receives the positioning signal, wherein the positioning signal sending module rotates with the umbrella piece, and the positioning signal receiving unit can receive a positioning signal once every rotation; The external host determines the transmission timing and transmission frequency of the sampling signal based on the positioning signal reception data and the rotation speed of the umbrella piece, so that the wireless communication module integrated on the integrated circuit board in the signal acquisition device transmits the sampling signals real-time collected by the Faraday type ion receiver to the signal transceiver module according to the transmission timing and transmission frequency.

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